A particle control system and method for APCVD deposition process

Abstract

The present invention discloses a particle control system for an APCVD deposition process, belonging to the field of atmospheric pressure chemical deposition technology, comprising a regulating nozzle, wherein a plurality of rotating shafts are mounted inside the regulating nozzle via bearings, and one end of the rotating shaft extends to the outside of the regulating nozzle, and each rotating shaft located outside the regulating nozzle is fixedly connected to a transmission gear at one end thereof, an air deflector is fixedly connected to the middle section of the shaft body of the rotating shaft, a motor 1 is fixedly mounted on the top of the regulating nozzle, the end of the output shaft of the motor 1 is fixedly connected to a drive gear, and the outer sides of the drive gear and the transmission gear are meshed and connected to a transmission rack. The present invention can clean the air deflector and automatically lubricate the transmission chain used for adjusting the air deflector.

Description

Technical Field

[0001] The present invention relates to the technical field of atmospheric pressure chemical deposition, and more specifically, to a particle control system and method for an APCVD deposition process. Background Art

[0002] APCVD, or atmospheric pressure chemical vapor deposition, refers to a chemical vapor deposition method performed under atmospheric pressure. This is the method originally used for chemical vapor deposition.

[0003] After searching, the invention patent with publication number CN113862646A discloses an APCVD deposition process particle control system and a control method thereof, including a reaction tube, a first gas tank, a second gas tank and a third gas tank. The slider slides and provides swinging power for the adjustment blades, so that the passing airflow continuously changes the passing path, thereby achieving the purpose of uniform dispersion of the airflow. Therefore, the process product particles produced after the airflow reacts with the reactants can be evenly dispersed. When the adjustment component is used, the flowing airflow can drive the fan to rotate, and the swinging power of the adjustment blades can be provided without external power drive, thereby saving energy consumption. The adjustment blades can be rotated to a certain angle through the second rotating shaft. Therefore, a certain size of gap can be formed between adjacent adjustment blades. By adjusting the size of the gap, the flow rate of the reaction gas passing through can be controlled, so that it is suitable for APCVD systems with different reaction gas flow rates.

[0004] However, existing technologies control the flow of reactant gas by adjusting the gap between the blades, making them suitable for APCVD systems with different reactant gas flows. However, materials easily accumulate on the blades, which not only hinders gas flow but also causes material waste. In addition, the transmission gears and transmission chains used to drive the blades can become stuck due to long-term use or dust accumulation, thus affecting the normal flow regulation. Therefore, improvements are needed. Summary of the Invention

[0005] In response to the problems existing in the prior art, the purpose of the present invention is to provide a particle control system for the APCVD deposition process, which can periodically clean the air guide plate and lubricate the transmission chain and transmission gears.

[0006] In order to solve the above problems, the present invention adopts the following technical solutions:

[0007] A particle control system for an APCVD deposition process includes a regulating nozzle head, wherein a plurality of rotating shafts are installed inside the regulating nozzle head through bearings, and one end of the rotating shaft extends to the outside of the regulating nozzle head, and each end of the rotating shaft located outside the regulating nozzle head is fixedly connected to a transmission gear, and the middle section of the shaft body of the rotating shaft is fixedly connected to an air guide plate, and a motor 1 is fixedly installed on the top of the regulating nozzle head, and the end of the output shaft of the motor 1 is fixedly connected to a driving gear, and the outer sides of the driving gear and the transmission gear are meshed and connected to a transmission rack, a cleaning component is provided on the inner side of the regulating nozzle head and in front of the air guide plate, and a hollow shell is fixedly connected on the outer side of the regulating nozzle head and on the side of the transmission chain, an oiling mechanism is provided on the upper inner side of the hollow shell, and an automatic lubrication mechanism is provided on the lower inner side of the hollow shell.

[0008] As a preferred solution of the present invention, a refueling nozzle is fixedly connected to the top of the hollow shell, a plug is threadedly mounted on the inner side of the upper opening of the refueling nozzle, and a swivel is fixedly connected to the upper end of the plug.

[0009] As a preferred solution of the present invention, a magnetic block is clamped on the bottom of the hollow shell, and a waste oil box is fixedly connected to the side of the magnetic block and located below the transmission chain, and the waste oil box is in contact with the hollow shell.

[0010] The top end of the sliding panel also is provided with an interlocking structure, and the interlocking structure is fixed with a base, and the interlocking structure is fixed with a base at the interlocking end.

[0011] As a preferred solution of the present invention, the oil adding mechanism includes an oil separator fixedly connected to the upper inner side of the hollow shell, a countersunk hole is provided inside the oil separator, a sliding column is slidably connected to the inner side of the countersunk hole, one end of the sliding column is fixedly connected to a limiting block, the bottom of the sliding column is fixedly connected to a float, the middle section of the column of the sliding column is fixedly connected to a retaining ring, and the diameter of the retaining ring is larger than the diameter of the countersunk hole, the retaining ring is in contact with the oil separator, and the bottom of the oil separator is fixedly connected to a guide pin, and the guide pin passes through the retaining ring and is slidably connected to the retaining ring.

[0012] As a preferred solution of the present invention, the automatic lubrication mechanism includes a hollow vertical plate fixedly connected to the inner bottom of the hollow shell, a hollow block is fixedly connected to the right side of the hollow vertical plate, a slider is slidably connected to the inside of the hollow block, and an end of the slider away from the hollow vertical plate is fixedly connected to an oil sealing nozzle and a sliding pin, the oil sealing nozzle and the sliding pin are both slidably connected to the hollow shell, the sliding pin is in contact with the transmission chain, and a protrusion is fixedly connected to the surface of the transmission chain.

[0013] As a preferred solution of the present invention, a spring is provided inside the hollow block, one end of the spring is fixedly connected to the slider, and the other end of the spring is fixedly connected to the inner surface of the hollow block.

[0014] As a preferred solution of the present invention, a guide block is fixedly connected to the side of the sliding block, and the guide block is slidably connected to the hollow block.

[0015] As a preferred solution of the present invention, an oil outlet hole is opened inside the hollow shell, and the position of the oil outlet hole corresponds to the oil sealing nozzle.

[0016] A method for using a particle control system in an APCVD deposition process includes the following steps:

[0017] Step 1: The APCVD system will grow the predetermined thin film product according to the set time. The gas enters the control nozzle through the gas pipe. At this time, the motor is started to drive the drive gear to rotate, and the drive gear drives the transmission chain to rotate. The transmission chain drives each transmission gear to rotate at the same time, so that the air guide plate coaxial with the transmission gear rotates a certain angle. In this way, a certain size of gap is formed between adjacent air guide plates, and the gas can flow into the subsequent reaction tube through the gap. In this way, the size of the gap between the air guide plates is adjusted according to the required reaction rate of the reactants. The larger the gap, the more gas can pass through. Conversely, the gas passing through is smaller.

[0018] Step 2: During the transmission of the transmission chain, the protrusion on the transmission chain contacts and squeezes the sliding pin, causing the sliding pin to slide into the hollow shell. The sliding pin then drives the slider to slide into the hollow block and compress the spring.

[0019] Step 3: As the slider slides, the oil sealing nozzle on the slider separates the oil outlet hole, so that the lubricating oil stored in the hollow shell can flow out smoothly through the oil outlet hole, thereby lubricating the transmission chain and transmission gears, avoiding the transmission chain from getting stuck after long-term use;

[0020] Step 4: When the level of the lubricating oil in the lower part of the hollow shell drops, the position of the float will drop immediately, and then the retaining ring on the float will expose the countersunk hole. In this way, the prepared lubricating oil in the upper part of the hollow shell will automatically fall down, and the lubricating oil below can be replenished, thereby reducing the operator's oil refilling cycle;

[0021] Step 5: When the air guide plate needs to be cleaned, it is only necessary to drive the threaded shaft to rotate through the second motor, and the moving block moves back and forth on the axial direction of the threaded shaft. The moving block will drive the slider to move during the movement, and the slider will drive the slide rod to move, and then drive the cleaning sleeve at the end of the slide rod to slide on the outside of the air guide plate and clean it. In this way, on the one hand, it is not easy for the material to accumulate on the air guide plate and affect the flow direction of the material. On the other hand, it can reduce the waste of material without affecting the rotation adjustment of the air guide plate.

[0022] Compared with the prior art, the advantages of the present invention are:

[0023] (1) In the present invention, a cleaning assembly is provided on the inner side of the regulating nozzle and in front of the air guide plate. The cleaning sleeve in the cleaning assembly is provided on the outer side of the air guide plate and can be driven to move transversely by a motor and a threaded shaft. In this way, the air guide plate can be cleaned periodically. On the one hand, this prevents the flow direction of the material from being affected by the accumulation of the material on the air guide plate. On the other hand, it can reduce the waste of the material without affecting the rotation adjustment of the air guide plate.

[0024] (2) In the present invention, a lubrication mechanism is provided on the outside of the transmission chain. During the transmission of the transmission chain, the protrusions on the transmission chain will contact and squeeze the sliding pin, causing the sliding pin to slide into the hollow shell, thereby exposing the oil outlet hole of the oil sealing nozzle on the same slider as the sliding pin. In this way, the lubricating oil stored in the hollow shell can flow out smoothly through the oil outlet hole, thereby lubricating the transmission chain and the transmission gear, avoiding the transmission chain from getting stuck after long-term use. In addition, by providing an oil adding mechanism on the lubricating mechanism, lubricating oil can be automatically added after the lubricating oil is consumed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 For the present invention Figure 1 Schematic diagram of the internal structure;

[0027] Figure 3 For the present invention Figure 2 Schematic diagram of the cleaning component structure;

[0028] Figure 4 For the present invention Figure 1 Schematic diagram of the internal structure of the hollow shell;

[0029] Figure 5 For the present invention Figure 4 A magnified view of point A;

[0030] Figure 6 For the present invention Figure 4 Enlarged view of point B;

[0031] Figure 7 For the present invention Figure 4 Schematic diagram of the sliding column structure;

[0032] Figure 8 For the present invention Figure 6 Schematic diagram of the waste oil box structure;

[0033] Figure 9 For the present invention Figure 2 Schematic diagram of the wind deflector structure.

[0034] Description of the numbers in the figure:

[0035] 1. Control nozzle; 2. Rotating shaft; 3. Transmission gear; 4. Air guide plate; 5. Transmission chain; 51. Bump; 6. Motor 1; 7. Drive gear; 8. Cleaning assembly; 9. Hollow shell; 10. Oil nozzle; 11. Plug; 12. Swivel; 13. Oil filling mechanism; 14. Automatic lubrication mechanism; 15. Magnetic block; 16. Waste oil box; 81. Slide bar; 82. Cleaning sleeve; 83. Slide bar; 84. Stop ball; 85. Moving block; 86 , motor 2; 87, threaded shaft; 88, connecting frame; 89, guide seat; 810, guide rod; 131, oil separator; 1311, countersunk hole; 132, sliding column; 133, limit block; 134, float; 135, retaining ring; 136, guide pin; 141, hollow vertical plate; 142, hollow block; 143, slider; 144, oil sealing nozzle; 145, sliding pin; 146, spring; 147, guide block; 148, oil outlet hole. DETAILED DESCRIPTION

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are also within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the terms "upper," "lower," "inner," "outer," "top / bottom," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "mounted / connected," and "connected" should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in the present invention in specific circumstances.

[0039] Example:

[0040] See also Figure 1 、 Figure 2 、 Figure 4 、 Figure 9 , a particle control system for an APCVD deposition process, comprising a regulating nozzle head 1, wherein a plurality of rotating shafts 2 are installed inside the regulating nozzle head 1 through bearings, and one end of the rotating shaft 2 extends to the outside of the regulating nozzle head 1, and each of the rotating shafts 2 located on the outside of the regulating nozzle head 1 is fixedly connected to a transmission gear 3, and the middle section of the shaft body of the rotating shaft 2 is fixedly connected to an air guide plate 4, and a motor 6 is fixedly installed on the top of the regulating nozzle head 1, and the end of the output shaft of the motor 6 is fixedly connected to a driving gear 7, and the driving gear 7 and the outer side of the transmission gear 3 are meshed and connected to a transmission rack 5, and a hollow shell 9 is fixedly connected to the outside of the regulating nozzle head 1 and on the side of the transmission chain 5.

[0041] In this embodiment, the motor 1 6 drives the driving gear 7 to rotate, and the driving gear 7 thereby drives the transmission chain 5 to rotate, and the transmission chain 5 simultaneously drives the transmission gear 3 to rotate, thereby causing the air guide plate 4 coaxial with the transmission gear 3 to rotate.

[0042] For details, please refer to Figure 4 、 Figure 6 、 Figure 8A fueling nipple 10 is fixedly connected to the top of the hollow shell 9. A plug 11 is threadedly mounted on the inside of the upper opening of the fueling nipple 10, and a swivel 12 is fixedly connected to the upper end of the plug 11. The provision of the fueling nipple 10 facilitates the addition of lubricating oil to the hollow shell 9. A magnetic block 15 is clamped to the bottom of the hollow shell 9. A waste oil box 16 is fixedly connected to the side of the magnetic block 15 and located below the transmission chain 5. The waste oil box 16 contacts the hollow shell 9.

[0043] In this embodiment, the waste oil box 16 is provided to collect the used lubricating oil.

[0044] For details, please refer to Figure 1 、 Figure 2 、 Figure 3 , a cleaning assembly 8 is provided on the inner side of the regulating nozzle head 1 and in front of the air guide plate 4. The cleaning assembly 8 includes a slide bar 81 slidably connected to the inner side of the regulating nozzle head 1, and a slide rod 83 is slidably connected to the interior of the slide bar 81. One end of the slide bar 83 is fixedly connected to a limiting ball 84, and the other end of the slide bar 83 is fixedly connected to a cleaning sleeve 82. The cleaning sleeve 82 is slidably sleeved on the outer side of the air guide plate 4. A moving block 85 is fixedly connected to the upper part of the side of the slide bar 81 away from the air guide plate 4. An electric Machine 2 86, the end of the output shaft of the motor 2 86 is fixedly connected to a threaded shaft 87, and the other end of the threaded shaft 87 is installed on the inner wall of the regulating nozzle 1 through a bearing, the threaded shaft 87 passes through the moving block 85 and is connected to the moving block 85 by a thread, the lower part of the slide bar 81 away from the side of the air guide plate 4 is fixedly connected to a connecting frame 88, the end of the connecting frame 88 is fixedly connected to a guide seat 89, the lower inner side of the regulating nozzle 1 is fixedly connected to a guide rod 810, the guide rod 810 passes through the guide seat 89 and is slidably connected to the guide seat 89.

[0045] In this embodiment, the threaded shaft 87 is driven to rotate by the second motor 86, and the moving block 85 moves back and forth in the axial direction of the threaded shaft 87. During the movement, the moving block 85 drives the slide bar 81 to move, and the slide bar 81 drives the slide rod 83 to move, thereby driving the cleaning sleeve 82 at the end of the slide rod 83 to slide on the outside of the air guide plate 4 and clean it. In this way, on the one hand, it is not easy for materials to accumulate on the air guide plate 4 and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials without affecting the rotation adjustment of the air guide plate 4.

[0046] For details, please refer to Figure 5 、 Figure 7, an oil adding mechanism 13 is provided on the inner upper part of the hollow shell 9, and the oil adding mechanism 13 includes an oil separator 131 fixedly connected to the inner upper part of the hollow shell 9, a countersunk hole 1311 is provided inside the oil separator 131, and a sliding column 132 is slidably connected to the inner side of the countersunk hole 1311, one end of the sliding column 132 is fixedly connected to a limiting block 133, and a float 134 is fixedly connected to the bottom of the sliding column 132, and a retaining ring 135 is fixedly connected to the middle section of the column of the sliding column 132, and the diameter of the retaining ring 135 is larger than the diameter of the countersunk hole 1311, and the retaining ring 135 is in contact with the oil separator 131, and a guide pin 136 is fixedly connected to the bottom of the oil separator 131, and the guide pin 136 passes through the retaining ring 135 and is slidably connected to the retaining ring 135.

[0047] In this embodiment, when the liquid level of the lubricating oil in the lower inner part of the hollow shell 9 drops, the position of the float 134 drops immediately, and then the retaining ring 135 on the float 134 exposes the countersunk hole 1311. In this way, the prepared lubricating oil in the upper inner part of the hollow shell 9 will automatically fall, and the lubricating oil below can be replenished, thereby reducing the oil adding cycle of the staff.

[0048] For details, please refer to Figure 5 , an automatic lubrication mechanism 14 is provided at the lower inner part of the hollow shell 9, and the automatic lubrication mechanism 14 includes a hollow vertical plate 141 fixedly connected to the inner bottom of the hollow shell 9, and a hollow block 142 is fixedly connected to the right side of the hollow vertical plate 141, and a slider 143 is slidably connected to the inside of the hollow block 142, and the slider 143 is fixedly connected to an oil sealing nozzle 144 and a sliding pin 145 at one end away from the hollow vertical plate 141. The oil sealing nozzle 144 and the sliding pin 145 are both slidably connected to the hollow shell 9, and the sliding pin 145 contacts the transmission chain 5. A protrusion 51 is fixedly connected to the surface of the transmission chain 5, and an oil outlet hole 148 is opened inside the hollow shell 9, and the position of the oil outlet hole 148 corresponds to the oil sealing nozzle 144.

[0049] In this embodiment, during the transmission of the transmission chain 5, the protrusion 51 on the transmission chain 5 will contact and squeeze the sliding pin 145, causing the sliding pin 145 to slide into the hollow shell 9, and then the sliding pin 145 drives the slider 143 to slide into the hollow block 142 and compress the spring 146. While the slider 143 slides, the oil sealing nozzle 144 on the slider 143 separates the oil outlet 148, so that the lubricating oil stored in the hollow shell 9 can flow out smoothly through the oil outlet 148, thereby lubricating the transmission chain 5 and the transmission gear 3, thereby avoiding the transmission chain from getting stuck after long-term use.

[0050] For details, please refer to Figure 5A spring 146 is provided on the inner side of the hollow block 142 , one end of the spring 146 is fixedly connected to the slider 143 , and the other end of the spring 146 is fixedly connected to the inner surface of the hollow block 142 .

[0051] In this embodiment, the spring 146 is provided to apply elastic force to the slider 143 .

[0052] For details, please refer to Figure 5 The side of the slider 143 is fixedly connected with a guide block 147, and the guide block 147 is slidably connected to the hollow block 142.

[0053] In this embodiment, the guide block 147 is provided to guide the sliding of the slider 143 inside the hollow block 142 .

[0054] Working principle: Step 1: The APCVD system will grow a predetermined thin film product according to the set time. The gas enters the inside of the regulating nozzle 1 through the gas pipe. At this time, the motor 6 is started to drive the driving gear 7 to rotate, and the driving gear 7 drives the transmission chain 5 to rotate, and the transmission chain 5 drives each transmission gear 3 to rotate at the same time, so that the air guide plate 4 coaxial with the transmission gear 3 rotates a certain angle, so that a certain size of gap is formed between adjacent air guide plates 4, and the gas can flow into the subsequent reaction tube through the gap. In this way, the size of the gap formed between the 4 air guide plates is adjusted according to the required reaction rate of the reactants. The larger the gap, the greater the amount of gas passing through. Conversely, the smaller the gap, the smaller the amount of gas passing through.

[0055] Step 2: During the transmission of the transmission chain 5, the protrusion 51 on the transmission chain 5 contacts and squeezes the sliding pin 145, causing the sliding pin 145 to slide into the hollow shell 9. Then, the sliding pin 145 drives the slider 143 to slide into the hollow block 142 and compress the spring 146.

[0056] Step 3: As the slider 143 slides, the oil sealing nozzle 144 on the slider 143 separates the oil outlet 148, so that the lubricating oil stored in the hollow shell 9 can smoothly flow out through the oil outlet 148, thereby lubricating the transmission chain 5 and the transmission gear 3, thereby preventing the transmission chain 5 from getting stuck after long-term use;

[0057] Step 4: When the level of the lubricating oil in the lower part of the hollow shell 9 drops, the position of the float 134 drops immediately, and then the retaining ring 135 on the float 134 exposes the countersunk hole 1311. In this way, the prepared lubricating oil in the upper part of the hollow shell 9 will automatically fall down, and the lubricating oil below can be replenished, thereby reducing the operator's refueling cycle;

[0058] Step 5: When the air guide plate 4 needs to be cleaned, it is only necessary to drive the threaded shaft 87 to rotate through the motor 2 86, and the moving block 85 moves back and forth in the axial direction of the threaded shaft 87. During the movement, the moving block 85 will drive the slide bar 81 to move, and the slide bar 81 will drive the slide rod 83 to move, and then drive the cleaning sleeve 82 at the end of the slide rod 83 to slide on the outside of the air guide plate 4 and clean it. In this way, on the one hand, it is not easy for materials to accumulate on the air guide plate 4 and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials without affecting the rotation adjustment of the air guide plate 4.

[0059] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes based on the technical solutions and improved concepts of the present invention within the technical scope disclosed by the present invention, and these changes should be covered by the scope of protection of the present invention.

Claims

1. A particle control system for an APCVD deposition process, comprising a control nozzle (1), characterized in that: The regulating nozzle (1) is internally provided with a plurality of rotating shafts (2) through bearings, and one end of the rotating shaft (2) extends to the outside of the regulating nozzle (1), and one end of each rotating shaft (2) located outside the regulating nozzle (1) is fixedly connected to a transmission gear (3), and the middle section of the shaft of the rotating shaft (2) is fixedly connected to an air guide plate (4), and a motor (6) is fixedly installed on the top of the regulating nozzle (1), and the output shaft end of the motor (6) is fixedly connected to a driving gear (7), and the driving gear (7) and the outer side of the transmission gear (3) are meshed and connected to a transmission chain (5), and a cleaning component (8) is provided on the inner side of the regulating nozzle (1) and in front of the air guide plate (4), and a hollow shell (9) is fixedly connected on the outer side of the regulating nozzle (1) and on the side of the transmission chain (5), and an oiling mechanism (13) is provided on the inner upper part of the hollow shell (9), and an automatic lubrication mechanism (14) is provided on the inner lower part of the hollow shell (9); The cleaning assembly (8) includes a slide bar (81) slidably connected to the inner side of the regulating nozzle (1), a slide bar (83) is slidably connected to the interior of the slide bar (81), one end of the slide bar (83) is fixedly connected to a limiting ball (84), the other end of the slide bar (83) is fixedly connected to a cleaning sleeve (82), the cleaning sleeve (82) is slidably sleeved on the outer side of the air guide plate (4), the upper part of the side of the slide bar (81) away from the air guide plate (4) is fixedly connected to a moving block (85), the inner wall of the regulating nozzle (1) is fixedly mounted with a second motor (86), the second motor (86) The end of the output shaft is fixedly connected to a threaded shaft (87), and the other end of the threaded shaft (87) is mounted on the inner wall of the regulating nozzle (1) through a bearing, the threaded shaft (87) passes through the moving block (85) and is connected to the moving block (85) through a thread, the lower part of the side of the slide bar (81) away from the air guide plate (4) is fixedly connected to a connecting frame (88), the end of the connecting frame (88) is fixedly connected to a guide seat (89), the lower part of the inner side of the regulating nozzle (1) is fixedly connected to a guide rod (810), the guide rod (810) passes through the guide seat (89) and is slidably connected to the guide seat (89); The automatic lubrication mechanism (14) includes a hollow vertical plate (141) fixedly connected to the bottom inner side of the hollow shell (9), a hollow block (142) fixedly connected to the right side of the hollow vertical plate (141), a slider (143) slidably connected to the interior of the hollow block (142), an end of the slider (143) away from the hollow vertical plate (141) fixedly connected to an oil sealing nozzle (144) and a sliding pin (145), the oil sealing nozzle (144) and the sliding pin (145) are both slidably connected to the hollow shell (9), the sliding pin (145) contacts the transmission chain (5), and a protrusion (51) is fixedly connected to the surface of the transmission chain (5); A spring (146) is provided on the inner side of the hollow block (142), one end of the spring (146) is fixedly connected to the slider (143), and the other end of the spring (146) is fixedly connected to the inner surface of the hollow block (142); The side of the slider (143) is fixedly connected to a guide block (147), and the guide block (147) is slidably connected to the hollow block (142); An oil outlet hole (148) is provided inside the hollow shell (9), and the position of the oil outlet hole (148) corresponds to the oil sealing nozzle (144).

2. The particle control system for an APCVD deposition process according to claim 1, characterized in that: A refueling nozzle (10) is fixedly connected to the top of the hollow shell (9), a plug (11) is threadedly mounted on the inner side of the upper opening of the refueling nozzle (10), and a swivel (12) is fixedly connected to the upper end of the plug (11).

3. The particle control system for an APCVD deposition process according to claim 1, characterized in that: A magnetic block (15) is clamped on the bottom of the hollow shell (9), and a waste oil box (16) is fixedly connected to the side of the magnetic block (15) and located below the transmission chain (5), and the waste oil box (16) is in contact with the hollow shell (9).

4. The particle control system for an APCVD deposition process according to claim 1, characterized in that: The oil adding mechanism (13) comprises an oil separator (131) fixedly connected to the upper inner side of the hollow shell (9); a countersunk hole (1311) is provided inside the oil separator (131); a sliding column (132) is slidably connected to the inner side of the countersunk hole (1311); one end of the sliding column (132) is fixedly connected to a limit block (133); the bottom of the sliding column (132) is fixedly connected to a float (134); a retaining ring (135) is fixedly connected to the middle section of the column of the sliding column (132); the diameter of the retaining ring (135) is larger than the diameter of the countersunk hole (1311); the retaining ring (135) contacts the oil separator (131); the bottom of the oil separator (131) is fixedly connected to a guide pin (136); the guide pin (136) passes through the retaining ring (135) and is slidably connected to the retaining ring (135).

5. The method for using a particle control system for an APCVD deposition process according to claim 4, characterized in that: The steps include: Step 1: The APCVD system will grow a predetermined thin film product according to the set time. The gas enters the inside of the regulating nozzle (1) through the gas pipe. At this time, the motor 1 (6) is started to drive the driving gear (7) to rotate. The driving gear (7) drives the transmission chain (5) to rotate, and the transmission chain (5) simultaneously drives each transmission gear (3) to rotate, so that the air guide plate (4) coaxial with the transmission gear (3) rotates a certain angle accordingly, so that a certain size of gap is formed between adjacent air guide plates (4), and the gas can flow into the subsequent reaction tube through the gap. In this way, the size of the gap formed between the air guide plates (4) is adjusted according to the required reaction rate of the reactants. The larger the gap, the greater the amount of gas passing through. Conversely, the smaller the gap, the smaller the amount of gas passing through. Step 2: During the transmission of the transmission chain (5), the protrusion (51) on the transmission chain (5) contacts and squeezes the sliding pin (145), causing the sliding pin (145) to slide into the hollow shell (9), and then the sliding pin (145) drives the slider (143) to slide into the hollow block (142) and compress the spring (146); Step 3: As the slider (143) slides, the oil sealing nozzle (144) on the slider (143) separates the oil outlet hole (148), so that the lubricating oil stored in the hollow shell (9) can flow out smoothly through the oil outlet hole (148), thereby lubricating the transmission chain (5) and the transmission gear (3), thereby preventing the transmission chain (5) from getting stuck after long-term use; Step 4: When the level of the lubricating oil in the lower inner portion of the hollow shell (9) drops, the position of the float (134) drops immediately, and then the retaining ring (135) on the float (134) exposes the countersunk hole (1311), so that the prepared lubricating oil in the upper inner portion of the hollow shell (9) automatically falls, and the lubricating oil below can be replenished, thereby reducing the period of refueling by the staff; Step 5: When the air guide plate (4) needs to be cleaned, the threaded shaft (87) is driven to rotate by the second motor 86, and the moving block (85) moves back and forth in the axial direction of the threaded shaft (87). The moving block (85) drives the slide bar (81) to move during the movement, and the slide bar (81) drives the slide bar (83) to move, thereby driving the cleaning sleeve (82) at the end of the slide bar (83) to slide on the outside of the air guide plate (4) and clean it. In this way, on the one hand, it is not easy for materials to accumulate on the air guide plate (4) and affect the flow direction of the materials. On the other hand, it can reduce the waste of materials without affecting the rotation adjustment of the air guide plate (4).

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