Adjustable furnace door and equipment thereof

Abstract

The invention discloses an adjustable furnace door and equipment thereof. An adjusting device comprises an adjusting body, a connecting piece and an adjusting piece. The adjusting body is connected with an opening-closing mechanism of the furnace door, one end of the connecting piece penetrates through the adjusting body to be connected with the furnace door, and one end of the adjusting piece penetrates through the adjusting body to abut against the furnace door. The adjusting piece adjusts the position of the adjusting piece relative to the adjusting body in the penetrating direction so as to adjust the posture of the furnace door. By means of the mode, the furnace door is connected with the adjusting device, the adjusting device is connected with the opening and closing mechanism of the furnace door, on the basis that normal opening and closing of the furnace door are guaranteed, the posture of the furnace door is adjusted through cooperation of the connecting piece of the adjusting device, the adjusting piece and the adjusting body, and the pressing uniformity when sealing parts are attached is improved; and the sealing performance of the furnace door is improved.

Description

Technical Field

[0001] The present application relates to the field of coating process technology, and in particular to an adjustable furnace door and equipment thereof. Background Art

[0002] In the prior art, some processing equipment has a sealed cavity, and one side or one end of the cavity has a furnace door that can be opened and closed, and the furnace door is opened and closed by driving the movement of the furnace door. Since the furnace opening is sealed only by the furnace door, its sealing performance is insufficient, so a sealing ring is generally provided on the furnace opening, so that the furnace door presses the sealing ring when closing to ensure its sealing performance.

[0003] However, there are still problems with the method of achieving sealing by pressing the sealing ring with the furnace door. Since the furnace door is made of rigid material, the sealing ring is affected by the force-applying end when it is actually pressed, resulting in uneven fit with the sealing ring of the furnace door, which in turn leads to insufficient sealing. Summary of the invention

[0004] The embodiments of the present application provide an adjustable furnace door and equipment thereof, which can improve the sealing performance between the furnace door and the furnace opening.

[0005] In a first aspect, an embodiment of the present application provides an adjustable furnace door, wherein the furnace door is connected to an opening and closing mechanism of the furnace door via an adjusting device, wherein the adjusting device comprises an adjusting body, a connecting member and an adjusting member;

[0006] The regulating body is connected to the opening and closing mechanism, one end of the connecting member passes through the regulating body and is connected to the furnace door, and one end of the regulating member passes through the regulating body and abuts against the furnace door;

[0007] The adjusting member adjusts the position of the adjusting member relative to the adjusting body along the penetration direction to adjust the posture of the furnace door.

[0008] In some embodiments, the connecting member is symmetrically arranged about the center of the adjusting body;

[0009] And / or, the adjusting member is symmetrically arranged with respect to the center of the adjusting body.

[0010] In some embodiments, the connecting member and the adjusting member are respectively arranged on opposite sides of the center of the adjusting body.

[0011] In some embodiments, a plurality of the connecting members are arranged in a straight line on the adjusting body.

[0012] Alternatively, a plurality of the connecting members are arranged in an array on the regulating body.

[0013] In some embodiments, the center of the adjusting body is located on the arrangement path of the plurality of connecting members.

[0014] In some embodiments, the adjusting member is a screw, and the adjusting body is provided with a threaded hole that cooperates with the adjusting member.

[0015] In some embodiments, the adjusting device further comprises:

[0016] A sliding member, wherein the sliding member is arranged on a side of the adjusting body away from the furnace door body, and the adjusting body is slidably connected with the opening and closing mechanism through the sliding member;

[0017] The adjusting device comprises at least two adjusting bodies, and the adjusting bodies are adjusted to have a distance from each other through the sliding member.

[0018] In some embodiments, the opening and closing mechanism has a first driving component, and the first driving component is used to drive the adjusting device to move in a first direction.

[0019] In some embodiments, the opening and closing mechanism further has a second driving component, and the second driving component is used to drive the adjusting device to move in a second direction.

[0020] In some embodiments, the furnace opening closed by the furnace door has a through direction, the first direction is a direction parallel to the through direction, and the second direction is a direction perpendicular to the through direction.

[0021] In some embodiments, the furnace door includes a furnace door body and a mounting body, the mounting body is fixedly connected to the furnace door body, one end of the connecting member passes through the adjusting body and is connected to the mounting body, and one end of the adjusting member passes through the adjusting body and abuts against the mounting body.

[0022] In a second aspect, an embodiment of the present application further provides a device, comprising a furnace cavity and an adjustable furnace door as described in any one of the above; wherein the furnace door is used to close the furnace cavity.

[0023] The beneficial effect of the present application is as follows: the present application connects the furnace door to the adjusting device, which connects the adjusting device to the opening and closing mechanism of the furnace door, and on the basis of ensuring the normal opening and closing of the furnace door, the posture of the furnace door is adjusted by the cooperation between the connecting part of the adjusting device and the adjusting part and the adjusting plate, thereby improving the uniformity of pressure when the sealing part is fitted, and thus improving the sealing of the furnace door. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 It is a schematic diagram of the structure of an adjusting device in one embodiment of the present application;

[0026] Figure 2 is a schematic diagram of the structure of an adjusting device in another embodiment of the present application;

[0027] Figure 3 It is a schematic diagram of the arrangement of the adjusting member and the connecting member in one embodiment of the present application;

[0028] Figure 4 is a schematic diagram of the arrangement of adjusting members and connecting members in another embodiment of the present application;

[0029] Figure 5 is a schematic diagram of the arrangement of the adjusting member and the connecting member in another embodiment of the present application;

[0030] Figure 6 is a schematic diagram of the arrangement of the adjusting member and the connecting member in another embodiment of the present application;

[0031] Figure 7 It is a schematic diagram of the arrangement of the adjusting member and the connecting member in one embodiment of the present application;

[0032] Figure 8 is a schematic diagram of the arrangement of adjusting members and connecting members in another embodiment of the present application;

[0033] Fig. 9 is a schematic diagram of the arrangement of the adjusting member and the connecting member in another embodiment of the present application;

[0034] Fig.10 is a schematic diagram of the arrangement of the adjusting member and the connecting member in another embodiment of the present application;

[0035] Fig.11 It is a schematic diagram of the arrangement of the adjusting member and the connecting member in one embodiment of the present application;

[0036] Fig.12 is a schematic diagram of the arrangement of adjusting members and connecting members in another embodiment of the present application;

[0037] Fig.13 is a schematic diagram of the arrangement of the adjusting member and the connecting member in another embodiment of the present application;

[0038] Fig.14 It is a schematic diagram of the structure of a connecting member and an adjusting member in an embodiment of the present application;

[0039] Fig.15 is a schematic diagram of the structure of a connecting member and an adjusting member in another embodiment of the present application;

[0040] Fig.16 This is a schematic diagram of the structure of a connecting member and an adjusting member in another embodiment of the present application;

[0041] Fig.17 It is a side view of the slider and linear rail structure in this application;

[0042] Fig.18 It is a side view of the opening and closing mechanism structure in this application;

[0043] Fig.19 It is a structural front view of the opening and closing mechanism in the present application;

[0044] Fig. 20 It is a top view of the opening and closing mechanism in this application.

[0045] Explanation of the reference numerals: 10-adjusting device; 20-opening and closing mechanism; 30-furnace door; 100-adjusting body; 200-connecting piece; 300-adjusting piece; 31-furnace door body; 32-mounting body; 101-threaded hole; 102-through hole; 103-adjusting gap; 321-threaded groove; 322-groove; 323-through groove; 201-limiting structure; 202-protruding structure; 40-sliding piece; 41-sliding block; 42-first linear rail; 21-first driving assembly; 211-mounting frame; 212-support frame; 213-first movable base; 214-first driving piece; 215-second linear rail; 22-second driving assembly; 221-second movable base; 222-second driving piece; 223-third linear rail; 224-base. DETAILED DESCRIPTION

[0046] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0047] Please refer to Figure 1 , an embodiment of the present application provides an adjustable furnace door, the furnace door 30 is connected to the opening and closing mechanism 20 of the furnace door 30 through an adjusting device 10, and the adjusting device 10 includes an adjusting body 100, a connecting member 200 and an adjusting member 300;

[0048] The adjusting body 100 is connected to the opening and closing mechanism 20, one end of the connecting member 200 passes through the adjusting body 100 and is connected to the furnace door 30, and one end of the adjusting member 300 passes through the adjusting body 100 and abuts against the furnace door 30;

[0049] The adjusting member 300 adjusts the position of the adjusting member 300 relative to the adjusting body 100 along the penetration direction to adjust the posture of the furnace door 30 .

[0050] In this embodiment, the furnace door 30 may be a furnace door of a mechanical device with a cavity used in the photovoltaic field. In one example, the furnace door 30 is a furnace door used on a process host. In another example, the furnace door 30 is a furnace door used in an ALD coating device.

[0051] In this embodiment, the adjusting device 10 is used to connect the furnace door 30 and the opening and closing mechanism 20, and can adjust the posture of the furnace door 30. The opening and closing mechanism 20 is a power source mechanism for driving the furnace door 30 to move.

[0052] The adjusting body 100 is used to connect the adjusting device 10 with the opening and closing mechanism 20 of the furnace door 30, so as to ensure that the entire adjusting device 10 can cooperate with the movement of the opening and closing mechanism 20 of the furnace door 30, and does not affect the opening and closing of the furnace door 30. The opening and closing mechanism 20 of the furnace door 30 is used to drive the furnace door 30 to move, so as to realize the movement of the furnace door 30 to close the furnace opening and the movement of the furnace door 30 to leave the furnace opening to open. The connecting member 200 is used to realize the connection between the adjusting body 100 and the furnace door 30. The adjusting member 300 adjusts the position of the adjusting member 300 relative to the adjusting body 100 along the penetration direction to adjust the posture of the furnace door 30. Specifically, the adjusting member 300 adjusts the distance between the adjusting body 100 and the furnace door 30 at this position by adjusting the penetration depth of the adjusting member 300 through the adjusting body 100. When the distances between the adjusting body 100 and the furnace door 30 at different positions are different, the posture of the furnace door 30 relative to the adjusting body 100 can be adjusted. The posture is the position state of the furnace door 30 relative to the adjusting body 100. The posture adjustment is the position change of the adjusting body 100 such as translation and deflection in different directions. The deflection includes the pitch angle adjustment of the furnace door 30 in the vertical direction and the left and right angle adjustment in the horizontal direction. At the same time, when the adjusting member 300 adjusts its penetration depth through the adjusting body 100, the connecting member 200 is adaptively adjusted accordingly, so that the furnace door maintains a stable relative position with the adjusting body 100 at the position after the posture adjustment.

[0053] In one embodiment, the installation and adjustment steps of the furnace door 30 are as follows: operate the opening and closing mechanism 20 to the door closing position, loosen the connecting piece 200 and the adjusting piece 300, so that the furnace door 30 fits against the furnace mouth, then pre-tighten the connecting piece 200, and then screw the adjusting piece 300 to the position to tighten the furnace door 30, and finally completely tighten the connecting piece 200 to complete the positioning and installation of the furnace door 30.

[0054] For further explanation, please refer to the following examples.

[0055] In this embodiment, the working process is that the staff determines the deflection adjustment demand according to the sealing condition of the furnace door 30 when it is in the closed position, adjusts the penetration depth of the adjusting member 300 through the adjusting body 100, and causes the distance between the furnace door 30 and the adjusting body 100 to change when the adjusting member 300 abuts against the furnace door 30, that is, causes the furnace door 30 to tilt at a certain angle relative to the adjusting body 100, thereby adjusting the sealing effect of the furnace door 30 on the furnace opening.

[0056] It should be noted that in actual use, if the furnace door 30 needs to be adjusted to a large extent relative to the furnace mouth, the adjustment device 10 of the present application can be used for further fine-tuning by changing the setting orientation of the opening and closing mechanism and the initial installation orientation of the furnace door 30. That is, on the premise that the furnace door 30 and the furnace mouth can smoothly achieve the closing function, the furnace door can be slightly deflected at an angle relative to the adjustment body 100, such as in the range of 0-5°, so as to improve the uniformity of pressure on the sealing part and enhance the sealing effect.

[0057] In another embodiment, as shown in the attached Figure 2 As shown, the furnace door 30 includes a furnace door body 31 and a mounting body 32 , the mounting body 32 is fixedly connected to the furnace door body 31 , one end of the connecting member 200 passes through the adjusting body 100 and is connected to the mounting body 32 , and one end of the adjusting member 300 passes through the adjusting body 100 and abuts against the mounting body 32 .

[0058] In this embodiment, the function of the mounting body 32 is to avoid processing the mounting structure that cooperates with the connecting member 200 directly on the furnace door body 31, thereby reducing the structural processing of the furnace door body 31. The mounting body 32 can be integrally formed with the furnace door body 31, or can be fixedly connected with the furnace door body 31; by adding the mounting body 32 to the furnace door body 31, the furnace door structure that lacks posture adjustment capability can be modified so that it can be used in conjunction with the adjustment device 10; and after adding the mounting body 32, when adjusting the adjustment member 300, the extrusion force after the abutment can act on the furnace door body 31 through the mounting body 32, thereby expanding the pressure area of ​​the furnace door body 31, and further improving the stability during adjustment.

[0059] In the above embodiments, the following embodiments are provided to further introduce and illustrate that the adjusting member 300 adjusts the position of the adjusting member 300 relative to the adjusting body 100 along the penetration direction to adjust the posture of the furnace door 30 .

[0060] In some embodiments, please refer to Figure 3 , Figure 4 and Figure 5, the connecting member 200 is arranged symmetrically about the center of the adjusting body 100; and / or, the adjusting member 300 is arranged symmetrically about the center of the adjusting body 100. In this embodiment, it should be noted that the above-mentioned symmetrical arrangement about the adjusting body 100 includes the case where the symmetrical arrangement is arranged at any orientation of the adjusting body 100 to form a symmetrical center, for example, the connecting member 200 and / or the adjusting member 300 are arranged symmetrically on the distribution track at 45° and 75° to the horizontal line, and the directions of these angles are not further described in this application.

[0061] The following provides some embodiments to illustrate the above-mentioned central symmetric setting:

[0062] Please refer to Figure 5 In one embodiment, the connecting member 200 and the adjusting member 300 are distributed in the horizontal direction and are symmetrically arranged about the center of the adjusting body 100;

[0063] In another embodiment, please refer to Figure 3 The connecting member 200 and the adjusting member 300 are distributed along the vertical direction and are symmetrically arranged about the center of the adjusting body 100 .

[0064] In the above embodiment, at least two connecting members 200 and at least two adjusting members 300 are provided, and the at least two connecting members 200 and at least two adjusting members 300 are arranged in a central symmetrical manner and distributed along the horizontal direction or the vertical direction of the adjusting body 100 to achieve the adjustment of the pitch angle or the left and right angle of the furnace door 30. The following will be explained with examples:

[0065] In one example, as shown in the attached Figure 3 As shown, two connecting members 200 and two adjusting members 300 are centrally symmetrically arranged in the vertical direction of the adjusting body 100. In actual use, by adjusting the penetration depth of one of the adjusting members 300 into the adjusting body 100, the distance between the furnace door 30 at this position and the adjusting body 100 is adjusted, that is, the pitch angle of the furnace door 30 is finally adjusted. For example, as shown in the figure, the penetration depth of the adjusting member 300 located at the lower position in the vertical direction is controlled to be larger, and the swing change of the furnace door 30 in the vertical direction is shown in the figure and the arc arrow in the figure. If the penetration depth of the adjusting member 300 located at the lower position in the vertical direction is controlled to be smaller, the swing change of the furnace door 30 in the vertical direction is opposite to that shown by the arc arrow in the figure; of course, it is also possible to select to control the adjusting member 300 located at the upper position in the vertical direction to make the furnace door 30 swing. In addition, the penetration depth of the adjusting members 300 at both ends can also be controlled at the same time to obtain the required angle.

[0066] In another example, as shown in the attached Figure 4As shown, on the basis of the above example, the number of connecting members 200 and adjusting members 300 can be further increased, that is, four connecting members 200 and four adjusting members 300 are centrally symmetrically arranged in the vertical direction of the adjusting body 100. The corresponding increase in the number of connecting members 200 can further improve the stability of the connection between the adjusting device 10 and the furnace door 30, and the corresponding increase in the adjusting members 300 can more flexibly control the accuracy of the adjusted angle, that is, a more accurate angle of the furnace door 30 can be obtained by adjusting multiple adjusting members 300. At this time, the angular deflection of the furnace door 30 may not be in the vertical plane or the horizontal plane, but can be achieved in other directions according to the setting position and control method of the adjusting member 300, so as to further improve the sealing adjustment ability of the furnace door 30 to the furnace mouth.

[0067] In yet another example, as shown in the attached Figure 5 As shown, two connecting members 200 and two adjusting members 300 are centrally symmetrically arranged in the horizontal direction of the adjusting body 100. In actual use, by adjusting the penetration depth of one or two adjusting members 300 into the adjusting body 100, the distance between the furnace door 30 and the adjusting body 100 at each position is adjusted, that is, the left and right angles of the furnace door 30 are finally adjusted. For example, as shown in the figure, the penetration depth of the adjusting member 300 located at the right position in the horizontal direction is controlled to be larger, and the swing change of the furnace door 30 in the horizontal direction is shown as the arc arrow in the figure. Of course, it is also possible to choose to control the penetration depth of the adjusting member 300 located at the left position in the horizontal direction to be smaller, and the furnace door 30 can also achieve the swing change shown by the arc arrow in the figure. In addition, the penetration depth of the adjusting members 300 at both ends can also be controlled at the same time, that is, the penetration depth of the adjusting member 300 located at the right position in the horizontal direction is controlled to be larger, while the penetration depth of the adjusting member 300 located at the left position in the horizontal direction is reduced, so as to obtain the required deflection angle. Of course, the example can also further increase the number of connecting members 200 and adjusting members 300 to make the connection between the furnace door 30 and the adjusting body 100 more stable and the deflection direction more diverse. This adjustment method is described in the above example (for example Figure 3 to Figure 4 ), which will not be described in detail here.

[0068] Please refer to Figure 6 , Figure 7 , Figure 8 and Fig. 9 In one embodiment, the connecting member 200 and the adjusting member 300 are respectively arranged on opposite sides of the center of the adjusting body 100 in the horizontal direction;

[0069] And / or, please refer to Fig.10 The connecting member 200 and the adjusting member 300 are respectively arranged on opposite sides of the center of the adjusting body 100 in the vertical direction.

[0070] In this embodiment, the setting positions and the setting numbers of the connecting members 200 and the adjusting members 300 are further adjusted, so that it is not necessary to set the connecting members 200 and the adjusting members 300 in equal numbers, and the deflection direction and angle of the furnace door 30 can still be controlled, and the pitch angle or left and right angle of the furnace door 30 can also be adjusted. The following will be explained with examples:

[0071] In one example, as shown in the attached Figure 6 As shown, a connecting member 200 and an adjusting member 300 are provided on both sides of the adjusting body 100 in the horizontal direction. In actual use, by adjusting the penetration depth of the adjusting member 300 on one side into the adjusting body 100, the distance between the furnace door 30 and the adjusting body 100 at this position is adjusted, that is, the left and right deflection angle of the furnace door 30 is finally adjusted. For example, as shown in the figure, the penetration depth of the adjusting member 300 located on the right side in the horizontal direction is controlled to be larger, and the swing change of the furnace door 30 in the horizontal direction is shown in the figure and the arc arrow in the figure.

[0072] In other examples, such as the Figure 7-9 As shown, the number of connecting members 200 or adjusting members 300 is further increased according to the demand, or the number of connecting members 200 and adjusting members 300 is increased at the same time. Figure 7 In the example provided, the number of the connecting members 200 on one side is increased, so that the connection between the adjusting device 10 and the furnace door 30 is more stable. Figure 8 The example provided increases the number of the adjusting members 300 on the other side, so that in actual operation, the angle deflection of the furnace door 30 in different directions can be realized more flexibly according to the setting position and control method of the adjusting members 300. For example, the penetration depth of the adjusting member 300 located at the upper position in the figure is adjusted to be smaller than the penetration depth of the adjusting member 300 located at the lower position, which makes the pitch angle condition of the furnace door 30 as shown by the arc arrow in the figure. Fig. 9 In the example provided, the number of the connecting members 200 on one side and the number of the adjusting members 300 on the other side are increased at the same time, so that the stability of the connection between the adjusting device 10 and the oven door 30 is further ensured, and the angle of the oven door 30 can be deflected more flexibly according to the setting position and control method of the adjusting member 300 in actual operation, as shown in the following example. Fig. 9 As shown, when the adjusting member 300 on the right side penetrates deeper into the furnace door 30, the angle of the furnace door 30 can be adjusted. Furthermore, by adjusting the upper and lower adjusting members 300 on the right side to different penetration depths, the angle of the furnace door 30 can be deflected, which can flexibly adapt to the adjustment needs in actual use.

[0073] In another example, Fig.10As shown, a connecting piece 200 and an adjusting piece 300 are provided on both sides of the adjusting body 100 in the vertical direction. In actual use, by adjusting the penetration depth of the adjusting piece 300 on one side into the adjusting body 100, the distance between the furnace door 30 and the adjusting body 100 at this position is adjusted, and finally the pitch angle of the furnace door 30 is adjusted. For example, as shown in the figure, the penetration depth of the adjusting piece 300 located at the lower part in the vertical direction is controlled to be larger, and the swing change of the furnace door 30 in the vertical direction is shown in the figure and the arc arrow in the figure. As for further settings of this example, such as increasing the number of connecting pieces 200 on one side, or increasing the number of adjusting pieces 300 on the other side, or increasing the number of connecting pieces 200 on one side and the number of adjusting pieces 300 on the other side at the same time, its implementation method and the effect obtained are shown in the above examples (for example Figure 6 to Figure 7 , Figure 8 and Fig. 9 ), I will not go into details here.

[0074] Please refer to Fig.11 and Fig.12 In one embodiment, a plurality of connecting members 200 are provided, and the plurality of connecting members 200 are arranged in a straight line on the adjusting body 100;

[0075] Please refer to Fig.13 In one embodiment, a plurality of connecting members 200 are arranged in an array on the regulating body 100 .

[0076] In this embodiment, the number and arrangement of the connecting members 200 are further provided. The purpose is to further increase the stability of the connection between the adjusting device 10 and the furnace door 30 and the adjusting body 100. Specifically, the cross-sectional area of ​​the hole on the adjusting body 100 for inserting the connecting member 200 can be slightly larger than the cross-sectional area of ​​the connecting member 200, so that the insertion direction of the connecting member 200 can be adjusted according to the change of the orientation between the furnace door 30 and the adjusting body 100, and the adjusting member 300 is used to tighten the furnace door 300 to provide a stable pressing force point. On this basis, increasing the number of the adjusting members 300 can further increase the position stability of the furnace door 30. Please continue to refer to the following embodiments for the specific connection structure.

[0077] In this embodiment, it should also be noted that the plurality of connecting members 200 may also be arranged on the adjusting body 100 in a linear shape such as a wave shape or a fold line shape, which will not be described in detail here.

[0078] In one embodiment, please refer to Fig.11 and Fig.12 The arrangement direction is the horizontal direction or the vertical direction of the adjusting body 100 , and the center of the adjusting body 100 is located on the arrangement path of the multiple connecting members 200 .

[0079] In this embodiment, the setting position and setting number of the connecting member 200 are further set, so that it is not necessary to set the connecting member 200 and the adjusting member 300 at symmetrical positions on the adjusting body 100, but the angle of the furnace door 30 can still be controlled, and the pitch angle or left and right deflection angle of the furnace door 30 can also be adjusted. In addition, this method improves the stability of the connection between the adjusting device 10 and the furnace door 30 by increasing the number of connecting members 200 and the limited setting position, and the center of the adjusting body 100 is located on the arrangement path of multiple connecting members 200, so that the center of the adjusting body 100 and the vicinity have a stable connection, and the installation firmness is improved. The following will be explained with examples:

[0080] In one example, if Fig.11 As shown, a plurality of connecting members 200 are arranged in a straight line on the horizontal center line of the adjusting body 100, and the adjusting member 300 is arranged on one side of the connecting members 200 arranged in a straight line. In actual use, by controlling the penetration depth of the adjusting member 300 through the adjusting body 100, the pitch angle of the furnace door 30 is adjusted. When the penetration depth of the adjusting member 300 through the adjusting body 100 increases, the swing direction of the furnace door 30 is shown as the arc arrow in the figure. It should be noted that Fig.11 The adjusting member 300 is shown to be arranged at the upper side relative to the connecting member 200. The adjusting member 300 can also be arranged at the lower side relative to the connecting member 200 according to actual needs. The swing direction of the furnace door 30 is the same as that of the connecting member 200. Fig. 9 on the contrary.

[0081] In another example, Fig.12 As shown, a plurality of connecting members 200 are arranged in a straight line on the center line of the vertical direction of the adjusting body 100, and the adjusting member 300 is arranged on one side of the connecting members 200 arranged in a straight line. In actual use, by controlling the penetration depth of the adjusting member 300 through the adjusting body 100 to increase, the left and right deflection angles of the furnace door 30 are adjusted, and the swing direction of the furnace door 30 is shown by the arc arrow in the figure. It should be noted that Fig.11 The adjusting member 300 is shown to be arranged at the left side relative to the connecting member 200. The adjusting member 300 can also be arranged at the right side relative to the connecting member 200 according to actual needs. The swing direction of the furnace door 30 is the same as that of the connecting member 200. Fig.13 For further configuration of this example, for example, the manner of providing the adjusting members 300 on both sides of the vertically arranged connecting members 200 is referred to the above example and will not be described in detail here.

[0082] In another example, as shown in the attached Fig.13As shown, the number of adjusting members 300 and their setting positions are further increased, that is, a plurality of connecting members 200 are arranged in an array on the center line of the horizontal direction of the adjusting body 100, and adjusting members 300 are arranged on both sides of the connecting members 200 arranged in an array. By making the center of the adjusting body 100 located on the array arrangement path of the plurality of connecting members 200, a stable connection can be provided at and near the center of the adjusting body 100, thereby improving the installation firmness. In actual use, by controlling the penetration depth of the adjusting members 300 on both sides through the adjusting body 100, the pitch angle of the furnace door 30 is adjusted, and the swing direction of the furnace door 30 is shown in the arc arrow in the figure. It can be understood that by adjusting the penetration depth of the adjusting members 300 on both sides respectively, the swing direction of the pitch angle of the furnace door 30 can also be controlled.

[0083] In one embodiment of the present application, the structure of the adjusting member 300 is further configured, as shown in the attached Fig.14 As shown, the adjusting member 300 is set as a screw, and the adjusting body 100 is provided with a threaded hole 101 that cooperates with the adjusting member 300. Specifically, in actual use, the penetration depth of the adjusting member 300 through the adjusting body 100 is controlled by twisting the screw through the cooperation between the screw and the thread.

[0084] In another embodiment of the present application, the adjusting member 300 can be configured as a retractable telescopic rod or other structure, and the telescopic rod can realize telescopic movement by electric drive or hydraulic drive. By passing one end of the telescopic rod through the threaded hole 101 of the adjusting body 100 and abutting against the furnace door 30, and then connecting the telescopic rod to the driving device to realize the extension and retraction of the telescopic rod, the penetration depth of the adjusting member 300 through the adjusting body 100 can be controlled.

[0085] In one embodiment of the present application, as shown in the attached Fig.14As shown, the structure of the connecting member 200 is further set, and the connecting member 200 is set as a screw, and the adjusting body 100 is provided with a through hole 102 corresponding to the connecting member 200, and the furnace door 30 or the mounting body 32 shown in the above example is provided with a thread groove 321 corresponding to the connecting member 200, and the hole cross-sectional area of ​​the through hole 102 can be slightly larger than the cross-sectional area of ​​the connecting member 200, and there is an adjustment gap 103 between the outer periphery of the connecting member 200 and the inner wall of the through hole 102. In actual use, the screw penetrates through the through hole 102 and penetrates into the thread groove 321, and is fixed to the furnace door 30 through the thread. The adjustment gap 103 allows the connecting member 200 to have a certain avoidance or activity space as the angle of the furnace door 30 changes in actual use when the furnace door 30 tilts at an angle, thereby ensuring the connection between the furnace door 30 and the adjusting device 10 while achieving the angle adjustment of the furnace door 30, and avoiding damage to the connecting member 200 during the adjustment process. In actual use, since only the angle of the oven door 30 needs to be fine-tuned, the corresponding adjustment gap 103 will not be set too large to affect the stability of the overall structural installation. It only requires that the diameter of the through hole 102 is slightly larger than the diameter of the screw.

[0086] In another embodiment of the present application, as shown in the attached Fig.15As shown, the structure of the connecting member 200 is further set, and this setting is based on the fact that the furnace door body 31 is fixedly connected to the mounting body 32. That is, a groove 322 and a through groove 323 corresponding to the connecting member 200 are provided on the mounting body 32, and the groove 322 is connected with the through groove 323. The groove 322 is arranged on the side close to the furnace door 30, and the through groove 323 is arranged on the side away from the furnace door 30 and communicates with the surface of the mounting body 32, and the adjusting body 100 is provided with a through hole 102 corresponding to the connecting member 200. During installation, one end of the connecting member 200 passes through the through hole 102 and the through groove 323 and penetrates into the groove 322, and one end of the connecting member 200 is provided with a limiting structure 201 with a diameter larger than the through groove 323 in the groove 322, and the through groove 323 has an adjustment gap for avoiding the connecting member 200, that is, the diameter of the through groove 323 is larger than the diameter of one end of the connecting member 200. In actual use, the connector 200 can be fixed to the mounting body 32 through the limiting structure 201, and the connector 200 can be avoided when the angle of the furnace door 30 is adjusted by adjusting the gap. Similarly, since it is only necessary to fine-tune the angle of the furnace door 30, the corresponding adjustment gap 103 will not be set too large to affect the stability of the overall structural installation. It is only necessary that the diameter of the through groove 323 is slightly larger than the diameter of one end of the connector 200. In addition, a protruding structure 202 can be correspondingly provided at the end of the connector 200 located at the through hole 102 away from the mounting body 32 to prevent the adjusting body 100 from escaping from the connector 200. In this embodiment, the connector 200 can be installed with the mounting body 32 first, and then the mounting body 32 can be installed with the furnace door 30. The mounting body 32 and the furnace door 30 can be installed by screw connection or welding.

[0087] In another embodiment of the present application, a mounting body 32 is fixedly connected to the furnace door body 31. Fig.14 The thread groove 321 shown in the figure can be arranged on the mounting body 32, and the mounting body 32 and the furnace door body 31 can be mounted by screw connection or welding.

[0088] In one embodiment of the present application, as shown in the attached Fig.16 As shown, the threaded hole 101 of the adjusting body 100 corresponding to the adjusting member 300 is set as a top screw hole, and the through hole 102 of the adjusting body 100 corresponding to the connecting member 200 is set as a waist hole. Correspondingly, the adjusting member 300 is a top screw hole bolt, and the connecting member 200 is a waist hole bolt. The waist hole is a waist hole that can be adjusted up and down or left and right (that is, the length direction of the waist hole is set horizontally or vertically), and the waist hole and the top screw hole are used to fine-tune the position of the furnace door 30. Correspondingly, a threaded hole is provided at the position corresponding to the connecting member 200 on the mounting body 32, which is used to cooperate with the waist hole bolt passing through the waist hole, and a top screw hole bolt is provided in the top screw hole.

[0089] In the present application, the setting position of the adjusting device 10 on the furnace door 30 can be set at a position close to the center of the furnace door 30, in which case only one adjusting device 10 is required, or two symmetrical adjusting devices 10 can be set at the edge of the furnace door 30. In this case, the position where the adjusting device 10 applies pressure just corresponds to the force-bearing part of the flange of the furnace cavity, which can achieve better sealing. Of course, the adjusting device 10 can also be set at the edge and center positions of the furnace door 30 for adjustment according to actual needs.

[0090] In one embodiment, the adjustment device 10 of the present application is further configured, please refer to Fig.17 , the regulating device 10 further comprises:

[0091] The sliding member 40 is disposed on a side of the regulating body 100 away from the furnace door body 31 , and the regulating body 100 is slidably connected to the opening and closing mechanism 20 via the sliding member 40 .

[0092] In this embodiment, the adjusting device 10 is further configured to be a structure that can be slidably connected to the opening and closing mechanism 20 through a sliding member 40, so that it is easy to flexibly control the movement of the furnace door 30 in actual use.

[0093] In one embodiment, please refer to Fig.17 and Fig.18 As shown, the sliding member 40 includes a slider 41 and a first linear rail 42; one end of the slider 41 is connected to the adjusting body 100, and the other end of the slider 41 is connected to the first linear rail 42, and the first linear rail 42 is arranged on the opening and closing mechanism 20. In this embodiment, the sliding connection is achieved by the slider 41 and the first linear rail 42. It should be noted that the sliding connection can also be achieved by the slider 41 and the slide rail.

[0094] In one embodiment, please refer to Fig.16 and Fig.19 The adjusting device 10 includes at least two adjusting bodies 100, and the adjusting bodies 100 are used to adjust the distance between each other through sliding members.

[0095] In this embodiment, the purpose of the arrangement is to flexibly select the installation position of at least two adjusting bodies 100, so that they can be arranged at the edge of the furnace door 30 to adaptably install furnace doors 30 of different sizes and models through the adjusting device 10. Among them, the slider 41 is connected to the adjusting body 100 and the first linear rail 42 respectively, and the first linear rail 42 is installed on the opening and closing mechanism 20, so that the connecting plate can slide on the first linear rail 42 through the slider 41. In this way, in actual use, when two adjusting devices 10 are symmetrically arranged at the edge of the furnace door 30, the connecting plates of the two adjusting devices 10 can be slidably connected to the first linear rail 42 through the slider 41, and then the spacing between the two adjusting devices 10 is moved through the first linear rail 42, so that furnace doors 30 of different sizes or models can be adaptively installed, which increases the versatility of the adjusting device 10 of the present application.

[0096] In the present application, the slider 41 can be moved by manual or telescopic drive, and then fixed in position by a design such as a positioning pin; by moving different sliders 41 to adjust the spacing between different adjustment devices 10, the sizes of different furnace doors 30 can be adapted. Figure 1 ,9, there are three pairs of rectangular dotted lines A on the mounting frame 211 of the opening and closing mechanism 20 in the figure, corresponding to the respective mounting positions of the three types of furnace doors 30 (furnace door 30 mounting positions 1 / 2 / 3); and the adjusting body 100 is specifically connected to the edge position of the furnace door 30, because this corresponds to the stress-bearing part of the furnace chamber flange, which can achieve better sealing.

[0097] In one embodiment, the connecting member 200 is arranged at an edge position close to the furnace door 30, and the adjusting member 300 is also arranged at an edge position close to the furnace door 30. The case where both are arranged at the edge position includes a mode in which at least two connecting members 200 and at least two adjusting members 300 are symmetrically arranged at the edge position of the furnace door 30, and also includes a mode in which the connecting member 200 is arranged on one side of the edge position of the furnace door 30 and the adjusting member 300 is symmetrically arranged on the other side. Arranging at the edge position can adjust the deflection angle of the furnace door 30 to the maximum extent. In another embodiment, one of the connecting member 200 and the adjusting member 300 can be arranged at a position close to the center of the furnace door 30 or at the exact center of the furnace door 30, and the other can be arranged at an edge position close to the furnace door 30. That is, as long as there is a gap between the connecting member 200 and the adjusting member 300 arranged on the furnace door 30, the adjusting body 100 can be used to cooperate to achieve the angle adjustment of the furnace door 30.

[0098] The adjusting device 10 of the present application has a simple structure and is easy to install, and is suitable for fine-tuning the pitch angle or left-right deflection angle of various furnace doors 30 .

[0099] The structure of the opening and closing mechanism in the present application is described in detail below through some embodiments:

[0100] In one embodiment, please refer to Fig.18 , Fig.19 and Fig. 20 , the opening and closing mechanism 20 has a first driving assembly 21, and the opening and closing mechanism 20 is connected to the adjusting device 10 through the first driving assembly 21;

[0101] The first driving assembly 21 is used to drive the adjusting device 10 to move back and forth in a first direction (eg Fig.18 , Fig. 20 in the Z direction).

[0102] The specific structure of the first driving assembly 21 is described in detail below. Fig.18 , Fig.19 and Fig. 20 The first driving assembly 21 includes a mounting frame 211, a support frame 212, a first movable base 213, a first driving member 214 and a second linear rail 215; the mounting frame 211 is connected to the first linear rail 42, the mounting frame 211 is connected to the first movable base 213 through the support frame 212, the first movable base 213 is slidably arranged on the second linear rail 215, the first movable base 213 is connected to the first driving member 214, and the first driving member 214 is arranged on one side of the second linear rail 215.

[0103] In this embodiment, the first driving member 214 may be a driving motor, a driving cylinder, a telescopic cylinder, etc. The second linear track 215 may also be replaced by a non-linear track, etc., which will not be described in detail here.

[0104] In this embodiment, in order to realize the opening and closing of the furnace door 30, the opening and closing structure of the furnace door 30 is set, specifically, by connecting the furnace door 30 with the adjustment device 10, and the adjustment device 10 with the opening and closing mechanism 20, the adjustment device 10 is realized to move with the opening and closing mechanism 20, ensuring that the adjustment device 10 can cooperate with the movement of the opening and closing mechanism 20 without affecting it during operation. Among them, the working process of the opening and closing mechanism 20 is: firstly, the first driving member 214 drives the first moving base 213 to slide on the second linear rail 215, and the first moving base 213 drives the furnace door 30 to move in the first direction along the second linear rail 215 through the adjustment device 10 to realize opening and closing.

[0105] In another embodiment, please refer to Fig.18 , Fig.19 and Fig. 20 The opening and closing mechanism 20 also has a second driving assembly 22, which is used to drive the adjustment device 10 to reciprocate in the second direction (such as Fig.19 shown in the Y direction).

[0106] The specific structure of the second drive assembly 22 is described in detail below. Fig.18 , Fig.19 and Fig. 20 The second driving assembly 22 includes a second moving base 221, a second driving member 222, a third linear rail 223 and a base 224; wherein the second moving base 221 is used to install the second linear rail 215, the second moving base 221 is slidably arranged on the third linear rail 223, the third linear rail 223 is arranged on the base 224, and the second driving member 222 is connected to the second moving base 221 and arranged on one side of the third linear rail 223. The working process of the opening and closing mechanism 20 is as follows: on the basis of realizing the movement in the first direction as mentioned above, the second moving base 221 is driven by the second driving assembly 22 to slide on the third linear rail 223, thereby realizing the movement of the furnace door 30 in the second direction, and further realizing the staggered movement of the furnace door 30 and the furnace opening.

[0107] In this embodiment, the second driving member 222 may be a driving motor, a driving cylinder, a telescopic cylinder, etc. The third linear rail 223 may also be replaced by a slide rail, etc., which will not be described in detail here.

[0108] In the above embodiment, the furnace opening closed by the furnace door 30 has a through direction, the first direction (Z direction) is parallel to the through direction, and the second direction (X or Y direction) is perpendicular to the through direction.

[0109] In this embodiment, the furnace door 30 moves along the first direction (Z direction) to be separated from the furnace opening, and the furnace door 30 moves along the second direction (X or Y direction) to be offset from the furnace opening.

[0110] In one example, the second direction is specifically Fig.19 In the X direction shown in FIG, a drive assembly can be correspondingly arranged to realize the vertical opening of the furnace door.

[0111] In yet another example, the second direction is specifically Fig.19 In the Y direction shown in FIG, the horizontal side opening of the furnace door is achieved by the second drive assembly 22.

[0112] Its working process is that the furnace door 30 is moved to the corresponding position of the furnace cavity opening during the sliding of the second movable base 221 along the second linear rail 215 to achieve the Y-direction sliding, and then the first movable base 213 slides along the second linear rail 215, thereby moving the furnace door 30 toward the opening of the furnace cavity (i.e., the Z direction), and finally closing with the furnace mouth.

[0113] In this embodiment, the existing furnace door 30 opening and closing structure is described. The existing structure is relatively complex. Generally, the ball screw is driven by a motor and a belt to rotate. Under the drive of the ball screw, the horizontal driving part and the furnace door 30 are raised or lowered together to realize the actual up and down movement of the furnace door 30. The structure is complex and the cost is high. At the same time, for multi-cavity equipment, there will be a situation where multiple tube cavities are arranged vertically up and down. When the furnace door 30 is open, the existing furnace door 30 opening mechanism will interfere with the opening and closing of the upper and lower adjacent furnace doors 30 due to the risk of collision, so that the adjacent furnace doors 30 cannot perform the opening and closing action synchronously, resulting in a beat loss and restricting the improvement of production capacity. Therefore, this embodiment sets the original furnace door 30 opening structure, adopts a side opening structure, and the opening trajectories of each furnace door 30 in the vertical direction do not interfere with each other, and the opening and closing mechanism 20 of this application adopts a double cylinder drive form, which reduces the manufacturing cost. The opening and closing mechanism 20 of this application solves the problem of complex opening and closing structure and high production cost of the cavity furnace door 30.

[0114] The working process of an embodiment of the present application is as follows:

[0115] A. Connect the mounting body 32 to the furnace door body 31 to be installed (e.g., by bolts);

[0116] B. According to the size of the furnace door 30, adjust the distance between the sliders 41 on the pair of adjustment devices 10 along the first linear rail 42, and connect the mounting body 32 with the adjustment body 100 by using the waist hole and the top screw hole;

[0117] C. Loosen the connecting piece 200 and the adjusting piece 300, align the furnace door 30 with the furnace opening, close it and seal it, then adjust the adjusting piece 300 to tighten the furnace door 30, and tighten the connecting piece 200 to firmly connect the furnace door and the adjusting body 100.

[0118] The connecting member 200 can be tightened or loosened accordingly during the furnace door adjustment process to adapt to the change in the distance between the mounting body 32 and the adjusting body 100 .

[0119] An embodiment of the present application further provides a device, comprising a furnace door and a furnace cavity; the furnace door is an adjustable furnace door 30 of any one of the above embodiments; wherein the furnace door 30 is used to close the furnace cavity.

[0120] In one embodiment of the present application, the device is an ALD coating device.

[0121] The above descriptions are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An adjustable furnace door, characterized in that: The furnace door is connected to the opening and closing mechanism of the furnace door through an adjusting device, and the adjusting device includes an adjusting body, a connecting piece and an adjusting piece; The regulating body is connected to the opening and closing mechanism, one end of the connecting member passes through the regulating body and is connected to the furnace door, and one end of the regulating member passes through the regulating body and abuts against the furnace door; The adjusting member adjusts the position of the adjusting member relative to the adjusting body along the penetration direction to adjust the posture of the furnace door.

2. The adjustable furnace door according to claim 1, characterized in that: The connecting member is symmetrically arranged about the center of the adjusting body; And / or, the adjusting member is symmetrically arranged with respect to the center of the adjusting body.

3. The adjustable furnace door according to claim 1, characterized in that: The connecting member and the adjusting member are respectively arranged on two opposite sides of the center of the adjusting body.

4. The adjustable furnace door according to claim 1, characterized in that: The plurality of connecting members are arranged in a straight line on the adjusting body. Alternatively, a plurality of the connecting members are arranged in an array on the regulating body.

5. The adjustable furnace door according to claim 4, characterized in that: The center of the regulating body is located on the arrangement path of the plurality of connecting members.

6. The adjustable furnace door according to claim 1, characterized in that: The adjusting member is a screw, and the adjusting body is provided with a threaded hole matched with the adjusting member.

7. The adjustable furnace door according to claim 1, characterized in that: The adjusting device also includes: A sliding member, wherein the sliding member is arranged on a side of the adjusting body away from the furnace door body, and the adjusting body is slidably connected with the opening and closing mechanism through the sliding member; The adjusting device comprises at least two adjusting bodies, and the adjusting bodies are adjusted to have a distance from each other through the sliding member.

8. The adjustable oven door according to claim 1, characterized in that: The opening and closing mechanism has a first driving component, and the first driving component is used to drive the adjusting device to move in a first direction.

9. The adjustable oven door according to claim 8, characterized in that The opening and closing mechanism also has a second driving component, and the second driving component is used to drive the adjusting device to move in a second direction.

10. The adjustable oven door according to claim 9, characterized in that The furnace opening closed by the furnace door has a through direction, the first direction is a direction parallel to the through direction, and the second direction is a direction perpendicular to the through direction.

11. The adjustable oven door according to claim 1, characterized in that: The furnace door comprises a furnace door body and a mounting body, wherein the mounting body is fixedly connected to the furnace door body, one end of the connecting member passes through the adjusting body and is connected to the mounting body, and one end of the adjusting member passes through the adjusting body and abuts against the mounting body.

12. A device, characterized in that: The device comprises a furnace cavity and an adjustable furnace door as described in any one of claims 1 to 11 above; wherein the furnace door is used to close the furnace cavity.

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