Method for automatically calibrating sensor through humidity change and sensor device

Through the method of automatically calibrating the gas sensor with humidity changes, the calibration coefficient is calculated using humidity data, which solves the problem that it is difficult to calibrate the gas sensor by a simple mathematical model, and realizes automatic calibration and accuracy improvement of the gas sensor.

CN119715704AActive Publication Date: 2025-03-28QSI SEMICON (HANGZHOU) CO LTD
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Patent Information

Application Number
CN202510238520.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-03
Publication Date
2025-03-28
Estimated Expiration
2045-03-03

AI Technical Summary

Technical Problem

In the prior art, it is difficult for a simple mathematical model to effectively calibrate the gas sensor, resulting in severe deviations in calculating the gas concentration when the performance of the gas sensor is weak.

Method used

Through the method of automatically calibrating the sensor with humidity changes, the temperature sensor and humidity sensor are used to measure environmental data, record resistance values, calculate calibration coefficients based on humidity data, and automatically calibration is achieved through calibration algorithms.

Benefits of technology

This method can automatically restore the accuracy of the gas sensor when the performance of the gas sensor is degraded due to the environment or use, improve the quantitative accuracy of the gas sensor and avoid the randomness of the external environment.

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Abstract

The invention relates to the technical field of gas sensors, in particular to a method for automatically calibrating a sensor through humidity change and a sensor device.The method comprises the steps that a temperature sensor and a humidity sensor measure temperature and humidity data of the environment where the current gas sensor is located; recording the resistance value of the gas sensor under the current temperature and humidity; according to the temperature and humidity data, searching gas sensor resistance values under the conditions of the same temperature and different humidity; calculating a response value and a calibration coefficient through a calibration algorithm, and uploading the response value and the calibration coefficient to a server; according to the method, the accuracy of the gas sensor can be automatically recovered when the performance of the gas sensor is reduced due to environmental factors or long-term use, the method takes controllable humidity as a calibration basis, manual operation is not needed, and the accuracy of the gas sensor is improved.
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Description

Technical Field

[0001] The present invention relates to the technical field of gas sensors, and in particular to a method and a sensor device for automatically calibrating a sensor through humidity changes. Background Art

[0002] Metal oxide semiconductor gas sensors are widely used in various environmental monitoring and safety systems due to their low cost, fast response speed, high sensitivity and easy integration. Their gas sensing is achieved through changes in resistance under different atmospheres. For example, when an N-type semiconductor gas sensor is exposed to a reducing gas, its resistance will drop significantly. Usually, the resistance value Ra (called baseline resistance) in clean air and the resistance value Rg (called response resistance) that reaches a stable state after contacting the gas to be tested, Ra / Rg-1 is called the response value. The response value has a linear relationship with the concentration of the response gas within a certain range, so the concentration of the test gas can be determined by the size of the response value.

[0003] However, with the continuous use of gas sensors and changes in the environment, the performance of the sensors will continue to weaken. At the same concentration, the sensor response will continue to decrease with the increase in the number of days of use, and there will be certain irregularities, resulting in serious deviations in the calculated concentration. At this time, sensor calibration can greatly improve the quantitative accuracy of the sensor for the response gas, but a simple mathematical model cannot correct the concentration deviation well. This is mainly related to the individual differences of the sensors and the uncertainty of the use environment. Different sensors have different attenuation over time and are irregular. Summary of the invention

[0004] The object of the present invention is to provide a method and a sensor device for automatically calibrating a sensor through humidity changes, so as to solve the problem that the simple mathematical model proposed in the above background technology cannot calibrate the sensor well.

[0005] To achieve the above object, the present invention provides the following technical solution: a method for automatically calibrating a sensor by humidity change, the method comprising the following steps: Step 1: The temperature sensor and humidity sensor measure the temperature and humidity data of the environment where the gas sensor is currently located; Step 2: Record the gas sensor resistance value Ra under the current temperature and humidity; Step 3: Find the gas sensor resistance value Rg under the same temperature and different humidity conditions according to the temperature and humidity data; Step 4: Calculate the humidity response value through the calibration algorithm, calculate the calibration coefficient according to the change of the humidity response value, and upload it to the server.

[0006] The calibration algorithm is as follows: Let the humidity change value on the first day be Δh1, which is the standard humidity change value Δhs , that is, Δh1=Δh s When the ambient humidity changes to the standard humidity change value, the standard response value of the gas sensor is Rd Δhs At the same time, the standard response value of the gas sensor when measuring a certain concentration of a certain gas on the first day is Rd gas-1 , the performance of the sensor changes after t days of use, that is, the sensor's response to humidity changes and gas is different from that on the first day. The humidity change value is used to automatically calibrate the sensor's response; the humidity change value on the tth day is expressed as Δh t Indicated by humidity response Rd Δht Indicates that the response of a certain concentration of a certain gas measured on the tth day is expressed by Rd gas-t Indicates that a calibration coefficient α is defined, and the calculation process of α is as follows: a. When the humidity change value on day t is the same as the standard humidity change value, that is, Δh t =Δh1=Δh s hour, ; b. Humidity change value Δh on day t t And standard humidity change value Δh s Different, that is, Δh t ≠Δh s It is known that the response values ​​generated by different humidity change values ​​are different from the response values ​​generated by standard humidity change values, so it is necessary to convert the response value Rd of non-standard humidity change into Δht Mapping to the response value Rd of the standard humidity change Δht-标准 , the response value and humidity change value conform to the functional relationship Rd=f(Δh), then Rd' Δhs =f(Δh s ), Rd' Δht =f(Δh t ), Rd' Δhs , Rd' Δh is the theoretical value obtained by function calculation; Let β = Rd' Δhs / Rd' Δht , the response value Rd mapped to the standard humidity change can be given Δht-标准 = Rd Δht *β; but, ; The response value of a certain concentration of gas after humidity change calibration is: Rd gas-t-校准 = Rd gas-t *α.

[0007] A sensor device, which uses the above method to achieve automatic calibration, comprises a sensor housing and a gas sensor arranged inside the sensor housing, wherein a gas gate with an opening and closing function is embedded and installed on the surface of the sensor housing, the gas gate is in a normally open state in a non-calibration state, and the gas sensor detects external gas through the gas gate; A temperature control module, a temperature sensor and a humidity sensor are arranged inside the sensor housing, wherein the temperature control module is used to heat the inside of the sensor housing, the temperature sensor is used to detect the temperature inside the sensor housing, and the humidity sensor is used to detect the humidity inside the sensor housing; The outside of the sensor housing is connected to a humidity control module via a pipeline, and a channel valve is installed on the pipeline between the humidity control module and the sensor housing. When the channel valve is closed, the connection between the humidity control module and the sensor housing can be cut off. A water storage bottle is fixedly arranged inside the humidity control module, and the water storage bottle is filled with water. A heating wire is arranged on the surface of the water storage bottle, and the water storage bottle can be heated by the heating wire. An air hole is opened through the top of the water storage bottle, and the air hole is closed by a waterproof and breathable membrane.

[0008] The upper part of the water storage bottle is connected with a water pipe, and the water pipe is provided with a water pipe valve for controlling the on and off of the water pipe.

[0009] A supply bin is fixedly arranged on the upper part of the humidity control module, and a guide bottom groove is opened on the inner lower surface of the supply bin, and the lowest point of the guide bottom groove is connected to the upper end of the water delivery pipe.

[0010] An internal partition is fixedly arranged inside the supply bin, and a semiconductor refrigeration plate is embedded and installed in the internal partition.

[0011] The cooling surface of the semiconductor refrigeration plate faces downward, and a cold end fin is arranged on the lower cooling surface for cooling, and the lower part of the cold end fin is pointed, and a hot end fin is arranged on the upper heating surface of the semiconductor refrigeration plate for heat conduction.

[0012] An air inlet side window and an air outlet are provided through the supply bin. The air inlet side window is located below the internal partition. A gas filter membrane is provided in the air inlet side window. The air outlet is located above the internal partition.

[0013] A built-in fan is provided inside the supply bin, and an air intake bottom window with a dust filtering function is opened through the lower surface of the supply bin. When the built-in fan rotates, air flows in through the air intake side windows and the air intake bottom window, and flows out through the air outlet.

[0014] An external environment humidity probe is fixedly installed on the surface of the supply bin, and the external environment humidity probe is used to detect the environmental humidity outside the supply bin.

[0015] Compared with the prior art, the present invention has the following beneficial effects: The method of automatically calibrating a sensor through humidity changes of the present invention can automatically restore the accuracy of a gas sensor when its performance is reduced due to environmental factors or long-term use. The method uses controllable humidity as a calibration basis, does not require manual operation, and improves the accuracy of the gas sensor.

[0016] The sensor device of the present invention can establish a standard environment required for calibration of the gas sensor. The sensor device controls the humidity and temperature of the environment in which the gas sensor is located, so that the gas sensor can be calibrated independently of the external environment, avoiding the randomness of the external environment, and allowing the gas sensor to complete automatic calibration at any time.

[0017] The sensor device of the present invention cooperates with structures such as a supply bin, cold end fins and a guide bottom trough, and can automatically replenish water in the water storage bottle after the water in the water storage bottle is consumed without the need for a water pipe connection. When it detects that the humidity of the external environment is high, it can automatically capture moisture from the outside air and merge it into the water storage bottle, thereby further improving the practicality of the device and reducing personnel maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a graph showing how the resistance of the gas sensor changes with humidity.

[0019] Figure 2 This is the response value change diagram for different humidity differences.

[0020] Figure 3 Gas response diagram.

[0021] Figure 4 This is the normalized attenuation diagram of the response values ​​for different gases.

[0022] Figure 5 Schematic diagram of the sensor device.

[0023] Figure 6 This is a schematic diagram of the sensor device from another angle.

[0024] Figure 7 This is a schematic diagram of the sensor housing being cut open.

[0025] Figure 8 It is a three-dimensional half-section schematic diagram of the sensor device.

[0026] Fig. 9 for Figure 8 A magnified schematic diagram of area A in the middle.

[0027] In the figure: 1. sensor housing; 2. temperature control module; 3. humidity control module; 4. channel valve; 5. air gate; 6. temperature sensor; 7. humidity sensor; 8. heating wire; 9. water storage bottle; 10. air vent; 11. gas sensor; 301. water pipe; 302. water pipe valve; 303. supply bin; 304. guide bottom trough; 305. internal partition; 306. semiconductor refrigeration plate; 307. cold end fin; 308. hot end fin; 309. air inlet side window; 310. gas filter membrane; 311. air outlet; 312. built-in fan; 313. air inlet bottom window; 314. external environment humidity probe. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] See also Figures 1 to 9 ,The present invention provides a technical solution: a method for automatically calibrating a sensor by humidity changes.,Since humidity is also a test gas, it has a linear relationship within a certain range, just like other test gases, such as Figure 1 and Figure 2 As shown in the figure, there is a high degree of consistency between humidity and the resistance value of the gas sensor, with an R² value of 0.9978, indicating a strong linear correlation between the two. The response value of different humidity differences increases as the difference increases, so we can reasonably regard air with different humidity as a response medium.

[0030] like Figure 3 As shown in Figure 3 The selective characteristics of gas sensors to different gases under clean air with the same temperature and humidity are demonstrated, indicating that the gas sensor itself responds to multiple gases and also responds to humidity, which makes it possible to automatically calibrate the sensor with humidity.

[0031] During the attenuation of the gas sensor, the response of humidity has the same attenuation consistency as the response of other gases, such as Figure 4 As shown in , the response curves of gases such as carbon monoxide and ethanol are consistent with the humidity response curve. This calibration method can be used to calibrate the changes caused by the attenuation of the sensor during use.

[0032] The method therefore comprises the following steps: Step 1: The temperature sensor and humidity sensor measure the temperature and humidity data of the environment where the gas sensor is currently located; Step 2: Record the gas sensor resistance value Ra under the current temperature and humidity; Step 3: Find the gas sensor resistance value Rg under the same temperature and different humidity conditions according to the temperature and humidity data; Step 4: Calculate the humidity response value through the calibration algorithm, calculate the calibration coefficient according to the change of the humidity response value, and upload it to the server.

[0033] The calibration algorithm is as follows: Let the humidity change value on the first day be Δh1, which is the standard humidity change value Δh s , that is, Δh1=Δh s When the ambient humidity changes to the standard humidity change value, the standard response value of the gas sensor is Rd Δhs At the same time, the standard response value of the gas sensor when measuring a certain concentration of a certain gas on the first day is Rd gas-1 , the performance of the sensor changes after t days of use, that is, the sensor's response to humidity changes and gas is different from that on the first day. The humidity change value is used to automatically calibrate the sensor's response; the humidity change value on the tth day is expressed as Δh t Indicated by humidity response Rd Δht Indicates that the response of a certain concentration of a certain gas measured on the tth day is expressed by Rd gas-t Indicates that a calibration coefficient α is defined, and the calculation process of α is as follows: a. When the humidity change value on day t is the same as the standard humidity change value, that is, Δh t =Δh1=Δh s hour, ; b. Humidity change value Δh on day t t And standard humidity change value Δh s Different, that is, Δh t ≠Δh s It is known that the response values ​​generated by different humidity change values ​​are different from the response values ​​generated by standard humidity change values, so it is necessary to convert the response value Rd of non-standard humidity change into Δht Mapping to the response value Rd of the standard humidity change Δht-标准 , the response value and humidity change value conform to the functional relationship Rd=f(Δh), then Rd' Δhs =f(Δh s ), Rd' Δht =f(Δh t ), Rd' Δhs , Rd' Δh is the theoretical value obtained by function calculation; Let β = Rd' Δhs / Rd' Δht , the response value Rd mapped to the standard humidity change can be given Δht-标准= Rd Δht *β; but, ; The response value of a certain concentration of gas after humidity change calibration is: Rd gas-t-校准 = Rd gas-t *α.

[0034] A sensor device, which uses the above method to achieve automatic calibration, comprises a sensor housing 1 and a gas sensor 11 arranged inside the sensor housing 1, a vent 5 with an opening and closing function is embedded and installed on the surface of the sensor housing 1, a closed blade is arranged inside the vent 5, and the vent 5 can be closed by controlling the blade. The vent 5 is in a normally open state in a non-calibration state, and the gas sensor 11 detects external gas through the vent 5; The sensor housing 1 is provided with a temperature control module 2, a temperature sensor 6 and a humidity sensor 7. The temperature control module 2 is used to heat the interior of the sensor housing 1, the temperature sensor 6 is used to detect the temperature inside the sensor housing 1, and the humidity sensor 7 is used to detect the humidity inside the sensor housing 1; The outside of the sensor housing 1 is connected to a humidity control module 3 through a pipeline, and a channel valve 4 is installed on the pipeline between the humidity control module 3 and the sensor housing 1. When the channel valve 4 is closed, the connection between the humidity control module 3 and the sensor housing 1 can be cut off. A water storage bottle 9 is fixedly arranged inside the humidity control module 3. The water storage bottle 9 is filled with water. A heating wire 8 is arranged on the surface of the water storage bottle 9. The water storage bottle 9 can be heated by the heating wire 8. The top of the water storage bottle 9 is penetrated by a vent hole 10, and the vent hole 10 is closed by a waterproof breathable membrane. The water storage bottle 9 is made of stainless steel. The waterproof breathable membrane can realize the diffusion of water vapor and ensure that liquid water does not flow out. Since the distance between water vapor molecules is large, they can pass through the vent holes of the waterproof breathable membrane during the diffusion movement, while the distance between liquid water molecules is smaller than the distance between the vent holes. Under the action of surface tension, the liquid water molecules cannot pass through the waterproof breathable membrane, that is, it plays a waterproof role.

[0035] The upper part of the water storage bottle 9 is connected to a water pipe 301 , on which a water pipe valve 302 for controlling the on-off of the water pipe 301 is arranged, and the water pipe valve 302 is opened and closed by electric control.

[0036] A supply bin 303 is fixedly provided on the upper part of the humidity control module 3 , and a guide bottom groove 304 is provided on the inner lower surface of the supply bin 303 , and the lowest point of the guide bottom groove 304 is connected to the upper end of the water delivery pipe 301 .

[0037] An internal partition 305 is fixedly arranged inside the supply bin 303, and a semiconductor cooling plate 306 is embedded and installed in the internal partition 305. The cooling surface of the semiconductor cooling plate 306 faces downward, and a cold end fin 307 is arranged on the lower cooling surface for cooling, and the lower part of the cold end fin 307 is pointed, and a hot end fin 308 is arranged on the upper heating surface of the semiconductor cooling plate 306 for heat conduction.

[0038] The supply bin 303 is provided with an air inlet side window 309 and an air outlet 311 . The air inlet side window 309 is located below the internal partition 305 . A gas filter membrane 310 is provided in the air inlet side window 309 . The air outlet 311 is located above the internal partition 305 .

[0039] A built-in fan 312 is provided inside the supply bin 303, and an air inlet bottom window 313 with a dust filtering function is opened through the lower surface of the supply bin 303. When the built-in fan 312 rotates, air flows in through the air inlet side windows 309 and the air inlet bottom window 313, and flows out through the air outlet 311.

[0040] An external environment humidity probe 314 is fixedly installed on the surface of the supply bin 303 , and the external environment humidity probe 314 is used to detect the environmental humidity outside the supply bin 303 .

[0041] During daily operation of the sensor device of the present invention, the channel valve 4 is closed, the humidity control module 3 is in a closed state, the air gate 5 is opened, and the gas sensor 11 communicates with the external gas through the air gate 5, so that the gas sensor 11 can detect the external gas.

[0042] When the calibration function is started, the air gate 5 is closed and the temperature control module 2 is started to heat the interior of the sensor housing 1. In conjunction with the feedback from the temperature sensor 6, the interior of the sensor housing 1 is heated to 45 degrees Celsius and maintained at a constant temperature. The humidity inside the sensor housing 1 is monitored in real time by the humidity sensor 7. At this time, the channel valve 4 is opened and the heating wire 8 is energized so that the heating wire 8 heats the water storage bottle 9. The water in the water storage bottle 9 is heated to generate water vapor, which escapes through the air vent 10 and then diffuses into the sensor housing 1 through the pipe between the sensor housing 1 and the humidity control module 3, slowly increasing the internal humidity of the sensor housing 1.

[0043] When the humidity sensor 7 detects that the humidity inside the sensor housing 1 reaches 65%, the channel valve 4 is closed to keep the internal temperature of the sensor housing 1 constant and stabilize it for 5 minutes. The first calibration point measurement is performed to record the resistance value of the gas sensor 11 under the current temperature and humidity.

[0044] After completion, open the channel valve 4 again to continue to increase the internal humidity of the sensor housing 1. When the humidity reaches 85%, close the channel valve 4 again to keep the internal temperature of the sensor housing 1 constant. After stabilizing for 5 minutes, perform the second calibration point measurement and record the resistance value of the gas sensor 11 under the same current temperature and different humidity conditions. Finally, calculate the response value and calibration coefficient through the calibration algorithm.

[0045] After the calibration is completed, the air vent 5 is reopened, and the heating wire 8 and the temperature control module 2 are turned off.

[0046] The ambient humidity is detected by the external ambient humidity probe 314. When the ambient humidity is high, the semiconductor refrigeration chip 306 is powered on. After the semiconductor refrigeration chip 306 is powered on, it cools and generates heat at the same time. The cooling surface cools the cold end fin 307, and the heating surface dissipates heat through the hot end fin 308. At the same time, the built-in fan 312 is running, driving the air flow to flow in from the air inlet side window 309 and the air inlet bottom window 313, and discharge through the air outlet 311. When the gas flowing in through the air inlet side window 309 passes through the cold end fin 307, the water vapor in the gas will condense on the cold end fin 307, drip through the bottom tip of the cold end fin 307, and the water pipe valve 302 will be opened. The water gathered in the diversion bottom trough 304 will enter the water storage bottle 9 through the water pipe 301 to replenish the water storage bottle 9.

[0047] When the gas flows through the hot-end fin 308, it will dissipate the heat of the hot-end fin 308 and take away the heat of the hot-end fin 308. Since the air inlet has two side air inlet windows 309 and the bottom air inlet window 313, the air intake flow at the side air inlet window 309 can be reduced, thereby avoiding excessive gas flow rate passing through the cold-end fin 307 and affecting the condensation effect.

[0048] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A method for automatically calibrating a sensor by humidity changes, characterized in that: The method comprises the following steps: Step 1: The temperature sensor and humidity sensor measure the temperature and humidity data of the environment where the gas sensor is currently located; Step 2: Record the gas sensor resistance value Ra under the current temperature and humidity; Step 3: Find the gas sensor resistance value Rg under the same temperature and different humidity conditions according to the temperature and humidity data; Step 4: Calculate the humidity response value through the calibration algorithm, calculate the calibration coefficient according to the change of the humidity response value, and upload it to the server.

2. The method for automatically calibrating a sensor by humidity change according to claim 1, characterized in that: The calibration algorithm is as follows: Let the humidity change value on the first day be Δh1, which is the standard humidity change value Δh s , that is, Δh1=Δh s When the ambient humidity changes to the standard humidity change value, the standard response value of the gas sensor is Rd Δhs At the same time, the standard response value of the gas sensor when measuring a certain concentration of a certain gas on the first day is Rd gas-1 , the performance of the sensor changes after t days of use, that is, the sensor's response to humidity changes and gas is different from that on the first day. The humidity change value is used to automatically calibrate the sensor's response; the humidity change value on the tth day is expressed as Δh t Indicated by humidity response Rd Δht Indicates that the response of a certain concentration of a certain gas measured on the tth day is expressed by Rd gas-t Indicates that a calibration coefficient α is defined, and the calculation process of α is as follows: a. When the humidity change value on day t is the same as the standard humidity change value, that is, Δh t =Δh1=Δh s hour, ; b. Humidity change value Δh on day t t And standard humidity change value Δh s Different, that is, Δh t ≠Δh s It is known that the response values ​​generated by different humidity change values ​​are different from the response values ​​generated by standard humidity change values, so it is necessary to convert the response value Rd of non-standard humidity change into Δht Mapping to the response value Rd of the standard humidity change Δht-标准 , the response value and humidity change value conform to the functional relationship Rd=f(Δh), then Rd' Δhs =f(Δh s ), Rd' Δht =f(Δh t ), Rd' Δhs , Rd' Δh is the theoretical value obtained by function calculation; Let β = Rd' Δhs / Rd' Δht , the response value Rd mapped to the standard humidity change can be given Δht-标准 = Rd Δht *β; but, ; The response value of a certain concentration of gas after humidity change calibration is: Rd gas-t-校准 = Rd gas-t *α。 3. A sensor device, which uses the method as claimed in claim 1 or 2 to achieve automatic calibration, characterized in that: The invention comprises a sensor housing (1) and a gas sensor (11) arranged inside the sensor housing (1); a gas gate (5) having an opening and closing function is embedded and installed on the surface of the sensor housing (1); the gas gate (5) is in a normally open state in a non-calibrated state; and the gas sensor (11) detects external gas through the gas gate (5); A temperature control module (2), a temperature sensor (6) and a humidity sensor (7) are arranged inside the sensor housing (1); the temperature control module (2) is used to heat the interior of the sensor housing (1); the temperature sensor (6) is used to detect the temperature inside the sensor housing (1); and the humidity sensor (7) is used to detect the humidity inside the sensor housing (1); The outside of the sensor housing (1) is connected to a humidity control module (3) via a pipeline, and a channel valve (4) is installed on the pipeline between the humidity control module (3) and the sensor housing (1). When the channel valve (4) is closed, the connection between the humidity control module (3) and the sensor housing (1) can be cut off. A water storage bottle (9) is fixedly arranged inside the humidity control module (3), and the water storage bottle (9) is filled with water. A heating wire (8) is arranged on the surface of the water storage bottle (9), and the water storage bottle (9) can be heated by the heating wire (8). A ventilation hole (10) is opened through the top of the water storage bottle (9), and the ventilation hole (10) is sealed by a waterproof and breathable membrane.

4. The sensor device according to claim 3, characterized in that: The upper part of the water storage bottle (9) is connected to a water pipe (301), and the water pipe (301) is provided with a water pipe valve (302) for controlling the on and off of the water pipe (301).

5. The sensor device according to claim 4, characterized in that: A supply bin (303) is fixedly arranged on the upper part of the humidity control module (3), a flow guiding bottom groove (304) is provided on the inner lower surface of the supply bin (303), and the lowest point of the flow guiding bottom groove (304) is connected to the upper end of the water delivery pipe (301).

6. The sensor device according to claim 5, characterized in that: An internal partition (305) is fixedly arranged inside the supply bin (303), and a semiconductor cooling plate (306) is embedded and installed in the internal partition (305).

7. The sensor device according to claim 6, characterized in that: The cooling surface of the semiconductor cooling plate (306) faces downward, and a cold end fin (307) is provided on the lower cooling surface for cooling, the lower portion of the cold end fin (307) is pointed, and a hot end fin (308) is provided on the upper heating surface of the semiconductor cooling plate (306) for heat conduction.

8. The sensor device according to claim 7, characterized in that: The supply bin (303) is provided with an air inlet side window (309) and an air outlet (311), wherein the air inlet side window (309) is located below the internal partition (305), a gas filter membrane (310) is provided in the air inlet side window (309), and the air outlet (311) is located above the internal partition (305).

9. The sensor device according to claim 8, characterized in that: The supply bin (303) is provided with a built-in fan (312) inside, and an air intake bottom window (313) having a dust filtering function is provided through the lower surface of the supply bin (303); when the built-in fan (312) rotates, air flows in through the air intake side windows (309) and the air intake bottom window (313), and flows out through the air outlet (311).

10. The sensor device according to claim 9, characterized in that: An external environment humidity probe (314) is fixedly mounted on the surface of the supply bin (303), and the external environment humidity probe (314) is used to detect the environmental humidity outside the supply bin (303).

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