Magneto-optical test system and method based on polarized light excitation and detection
By designing a magneto-optical testing system based on polarized light excitation and detection, the existing magneto-optical characteristic testing devices have been solved, and a variety of light detection methods and efficient testing modes have been realized, which reduces the testing cost and difficulty.
Patent Information
- Application Number
- CN202510170761.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-17
- Publication Date
- 2025-03-28
AI Technical Summary
The existing magneto-optical characteristic testing devices are single-functional and have low integration, making it difficult to achieve high test accuracy and high test efficiency, and multiple test devices are required for different test needs.
A magneto-optical testing system based on polarized light excitation and detection is designed. The polarization excitation of the white light path and the laser light path is realized through multi-optical spectroscopy, and the spectrometer and detector are integrated, and the temperature, electric field and magnetic field control are coupled to realize a variety of light detection methods and testing modes.
Single-point detection and scanning imaging tests such as polarization absorption spectrum, polarization-dependent photoelectric response, magneto-optical Kerr, Faraday rotation effect under external excitation are realized, which reduces the testing cost and reduces the testing difficulty, and does not require the use of a low-temperature piezoelectric displacement stage or switch test system.
Smart Images
Figure CN119716676A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of optical detection technology, and in particular to a magneto-optical testing system and method based on polarized light excitation and detection. Background Art
[0002] With the continuous improvement of the degree of digitalization and informatization of society, the total amount of data generated and needed to be processed each year in the world has shown a blowout growth, reaching the scale of EB and the access frequency of billions per second. In order to meet the needs of emerging industries such as big data, artificial intelligence, quantum information, etc., it is urgent to develop faster, more efficient, lower power consumption and better reliability information storage and logical operation technologies.
[0003] As the next generation of memory, random access magnetic memory based on magnetic material storage media shows good application prospects. Its advantages include fast reading and writing, low power consumption, unlimited erasing and writing, low cost and non-volatility. The use of random access magnetic memory will effectively overcome the shortcomings of slow operation speed of traditional memory, reduce losses during data transmission, and improve the overall operation efficiency of data storage and computing systems. Among them, the research and development of materials for magnetic storage media is the primary prerequisite for realizing its device functions. It is usually necessary to use magnetic detection equipment to carry out detailed characterization of magnetic media, and at the same time study the magnetoelectric coupling effect of materials, so as to realize the basic storage function based on electrically controlled magnetism.
[0004] Detecting the magneto-optical properties of magnetic materials with the help of optical means has the characteristics of high precision, high efficiency, spatial / temporal resolution and non-destructiveness. Currently, commonly used magneto-optical property detection equipment or systems include magneto-optical Kerr test devices and spectral test systems under magnetic fields. However, in order to comprehensively study the effects of various physical fields such as magnetic fields, temperature, and electric fields on the basic properties of magnetic materials and their coupling mechanisms, it is necessary to prepare, load, and test samples for different test devices respectively. In addition, for the same type of test equipment, high test accuracy and high test efficiency cannot be achieved at the same time. For different test requirements, multiple test devices are needed. These limitations and difficulties have greatly increased the time cost and testing cost. Summary of the invention
[0005] In order to solve the technical problems of single functionality and low integration of existing magneto-optical property testing devices, the present invention proposes a magneto-optical testing system based on polarized light excitation and detection, which can realize multiple light detection modes, has simple operation and low cost.
[0006] The present invention proposes a magneto-optical test system based on polarized light excitation and detection, which includes a laser detection subsystem, which includes: a laser source, a scanning galvanometer, a first polarizing module, a photoelastic modulator, a first beam splitter, a polarization analyzer module, a detector, a first plano-convex lens, a second plano-convex lens, a second beam splitter, an amplifying objective lens and a sample cavity; the scanning galvanometer, the first polarizing module, the photoelastic modulator, the first beam splitter, the first plano-convex lens, the second plano-convex lens, the second beam splitter, the amplifying objective lens and the sample cavity are sequentially arranged on the propagation path of the laser light emitted from the laser source, the polarization analyzer module is arranged in the light emitting direction of the first beam splitter deviating from the first plano-convex lens, and the detector is arranged in the light emitting direction of the polarization analyzer module; the reflected light of the sample in the sample cavity to the laser emitted by the laser source is received and then passes through the amplifying objective lens, the second beam splitter, the second plano-convex lens, the first plano-convex lens, the first beam splitter and the polarization analyzer module in sequence and then is collected by the detector;
[0007] The magneto-optical test system based on polarized light excitation and detection also includes: a third beam splitter, a white light source, a first focusing lens, a camera, a second analyzer, a spectrometer, a second focusing lens, and a second polarizing module;
[0008] The third beam splitter is arranged in the beam splitting direction of the second beam splitter deviating from the second plano-convex lens and the magnifying objective lens, the white light source and the second polarizing module are arranged in sequence in the first beam splitting direction of the third beam splitter, the first focusing lens and the camera are arranged in the second beam splitting direction of the third beam splitter, and the first beam splitting direction and the second beam splitting direction of the third beam splitter are both offset from the second beam splitter; the second analyzer, the second focusing lens and the spectrometer are arranged in sequence in the light emitting direction of the sample cavity away from the magnifying objective lens;
[0009] The second polarizing module, the third beam splitter, the second beam splitter, the magnifying objective lens, the sample cavity, the second polarizer, the second focusing lens and the spectrometer are sequentially arranged on the optical path of the outgoing light of the white light source, and cooperate with the white light source to form a white light transmission detection subsystem; the second polarizing module of the white light source, the third beam splitter, the second beam splitter, the magnifying objective lens, the sample cavity, the first focusing lens and the camera cooperate to form a white light reflection detection subsystem.
[0010] Preferably, it also includes an electromagnet and a magnet controller, the electromagnet is arranged outside the sample cavity, the magnet controller is connected to the electromagnet, and the magnet controller is used to adjust the working state of the electromagnet to adjust the magnetic field environment of the sample in the sample cavity.
[0011] Preferably, it also includes: a measuring instrument, a signal generator and a computer; a vacuum thermostat is provided in the sample chamber, and the vacuum thermostat is used to keep the sample in the sample chamber in a constant temperature environment; the measuring instrument is connected to the vacuum thermostat, and the measuring instrument is used to apply a current / voltage signal to the sample in the sample chamber and collect the current / voltage signal of the sample; the signal generator is connected to the scanning galvanometer, and the signal generator is used to provide a scanning galvanometer control signal; the computer is respectively connected to the detector, the spectrometer, the magnet controller, the measuring instrument and the signal generator; the computer is used to receive analysis and detection data from the detector and the spectrometer, the computer is used to detect the state of the scanning galvanometer, and the computer is also used to control the operation of the measuring instrument, the signal generator and the magnet controller.
[0012] Preferably, a spatial filtering module is further included, and the spatial filtering module is arranged on the propagation path of the light emitted by the laser source and is located between the laser source and the scanning galvanometer.
[0013] Preferably, it also includes a first reflector, a second reflector and a third reflector arranged on the propagation path of the laser source output light; the first reflector and the second reflector are arranged in sequence between the laser source and the spatial filter module, and the third reflector is located between the spatial filter module and the scanning galvanometer.
[0014] Preferably, the first polarizing module and the second polarizing module both adopt polarizing modules composed of a polarizer and a first wave plate; the analyzing module adopts an analyzer and a second wave plate; the first wave plate is a half-wave plate or a quarter-wave plate, and the second wave plate is a half-wave plate or a quarter-wave plate.
[0015] Preferably, the white light source is a xenon lamp, and the laser source is a semiconductor laser.
[0016] Preferably, an attenuator is also provided at the output end of the laser source.
[0017] A magneto-optical testing method based on polarized light excitation and detection, when a white light transmission detection mode is adopted, firstly, the positions of the second beam splitter and the third beam splitter are adjusted so that the light emitted by the white light source passes through the second polarizing module, the third beam splitter, the second beam splitter and the magnifying objective lens in sequence and then is incident on the sample in the sample cavity, then the object light wave carrying the sample information passes through the second analyzer, and the object light wave of the specified frequency is focused by the second focusing lens to the spectrometer, and the spectrometer analyzes the object light wave;
[0018] When the white light reflection detection mode is adopted, the positions of the first beam splitter, the second beam splitter and the third beam splitter are first adjusted, and a filter is set at the output end of the white light source, so that the light emitted by the white light source is incident on the sample in the sample cavity after passing through the filter, the second polarizing module, the third beam splitter, the second beam splitter and the magnifying objective lens in sequence, and then the reflected light wave carrying the sample information passes through the magnifying objective lens, the second beam splitter, the second plano-convex lens, the first plano-convex lens and the first beam splitter in sequence and is incident on the detector through the polarization analyzer module; the split light of the second beam splitter deviating from the second plano-convex lens passes through the third beam splitter and the first focusing lens and is incident on the camera, and the camera images the sample surface;
[0019] When laser detection is adopted, the positions of the first beam splitter and the second beam splitter are adjusted first, and the laser emitted by the laser source passes through the scanning galvanometer, the first polarizing module, the photoelastic modulator, the first plano-convex lens, the second plano-convex lens, the second beam splitter and the magnifying objective lens in sequence, and then is incident on the sample surface of the sample in the sample cavity; the reflected laser of the sample is collected by the magnifying objective lens and then passes through the second beam splitter, the second plano-convex lens, the first plano-convex lens, the first beam splitter and the polarizing module in sequence, and then is incident on the detector.
[0020] The advantages of the present invention are:
[0021] (1) The present invention provides a magneto-optical test system based on polarized light excitation and detection. The test system realizes polarized excitation of white light paths and laser paths by means of multi-path splitting, integrates a spectrometer and a detector, and couples temperature, electric field and magnetic field control to realize single-point detection and scanning imaging tests such as polarized absorption spectrum, polarization-dependent photoelectric response, magneto-optical Kerr effect, and Faraday rotation effect under external excitation.
[0022] (2) The present invention utilizes a vacuum temperature-controlled sample chamber with an optical window, an electromagnet, a scanning galvanometer, polarization excitation and detection, etc. to achieve fixed-point testing, rapid imaging testing, and point-by-point scanning testing of the polarization light response characteristics, magneto-optical characteristics, and polarization absorption characteristics of materials under polarized light excitation, and effectively regulates the coupled electric and magnetic fields. The present invention does not require the use of a low-temperature piezoelectric displacement stage or switching of the test system, which greatly saves test costs and reduces test difficulty. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a system schematic diagram of the present invention;
[0024] Figure 2 Schematic diagram of the spatial filtering module in the present invention;
[0025] Figure 3 It is a schematic diagram of the working of the scanning galvanometer in the present invention;
[0026] Figure 4 It is a schematic diagram of the position of the sample chamber and the electromagnet in the present invention;
[0027] Figure 5 Polarization-dependent absorption spectrum of MoS2 / Ta2Pd3Se8 heterojunction;
[0028] Figure 6 It is a reflective magneto-optical Kerr hysteresis loop of magnetic materials;
[0029] Figure 7 Rapid imaging of magnetic domains in magnetic materials.
[0030] Illustration: 1-laser source; 2-attenuator; 3-first reflector; 4-second reflector; 5-spatial filter module; 6-third reflector; 7-scanning galvanometer; 8-first polarizing module; 9-photoelastic modulator; 10-first beam splitter; 11-polarization analyzer; 12-detector; 13-first plano-convex lens; 14-second plano-convex lens; 15-second beam splitter; 16-third beam splitter; 17-white light source; 18-first focusing lens; 19-camera; 20-magnification Objective lens; 21-electromagnet; 22-second polarizer; 23-spectrometer; 24-sample chamber; 241-vacuum thermostat; 25-translation stage; 26-magnet controller; 27-measuring instrument; 28-signal generator; 29-computer; 30-second focusing lens; 31-filter; 32-second polarizing module; 33-10x lens; 34-adjustable aperture plate; 35-third plano-convex lens; 36-fourth plano-convex lens; A-sample to be tested; B-optical window. DETAILED DESCRIPTION
[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0032] like Figure 1 As shown, a magneto-optical testing system based on polarized light excitation and detection proposed in this embodiment includes: a laser source 1, an attenuator 2, a first reflector 3, a second reflector 4, a spatial filtering module 5, a third reflector 6, a scanning galvanometer 7, a first polarizing module 8, a photoelastic modulator 9, a first beam splitter 10, an analyzer module 11, a detector 12, a first plano-convex lens 13, a second plano-convex lens 14, a second beam splitter 15, a third beam splitter 16, a white light source 17, a first focusing lens 18, a camera 19, a magnifying objective lens 20, an electromagnet 21, a second analyzer 22, a spectrometer 23, a sample chamber 24, a translation stage 25, a magnet controller 26, a measuring instrument 27, a signal generator 28, a computer 29, a second focusing lens 30 and a second polarizing module 32.
[0033] In this embodiment, the displacement stage 25 is connected to the sample chamber 24 to adjust the position of the sample in the sample chamber 24. A vacuum thermostat 241 is provided in the sample chamber 24, and the vacuum thermostat 241 is used to adjust the temperature of the environment in which the sample is located; an electromagnet 21 is provided on the outside of the sample chamber 24, and the electromagnet 21 is used to apply a uniform and adjustable magnetic field to the sample chamber 24, and the magnet controller 26 is used to control the working voltage of the electromagnet 21, thereby controlling the magnetic field strength. The measuring instrument 27 is used to apply a current / voltage signal to the sample in the sample chamber 24 and collect the current / voltage signal of the sample. The signal generator 28 is connected to the scanning galvanometer 7, and the signal generator 28 is used to provide a control signal to the scanning galvanometer 7.
[0034] The sample chamber 24 is used to provide a sample testing environment. A vacuum variable temperature environment can be achieved through a vacuum thermostat. A light-transmitting quartz window is provided above the sample chamber 24 as an optical window B. At the same time, the sample chamber 24 is provided with multiple coaxial cables for providing current / voltage to the sample and testing the current / voltage.
[0035] The computer 29 selects and controls the working parameters of the detector 12 , the spectrometer 23 , the measuring instrument 27 , and the magnet controller 26 according to the test requirements.
[0036] The computer 29 is connected to the detector 12, the spectrometer 23, the magnet controller 26, the measuring instrument 27 and the signal generator 29 respectively; the computer 29 is used to receive the analysis and detection data of the detector 12 and the spectrometer 23, the computer 29 is used to detect the state of the scanning galvanometer, and the computer 29 is also used to control the operation of the measuring instrument 27, the signal generator 28 and the magnet controller 26.
[0037] In this embodiment, the polarization analyzing module 11, the detector 12, the laser source 1 and the attenuator 2, the first reflector 3, the second reflector 4, the spatial filtering module 5, the third reflector 6, the scanning galvanometer 7, the first polarizing module 8, the photoelastic modulator 9, the first beam splitter 10, the first plano-convex lens 13, the second plano-convex lens 14, the second beam splitter 15, the magnifying objective lens 20 and the sample cavity 24 which are sequentially arranged on the propagation path of the laser emitted by the laser source 1 constitute a laser detection subsystem.
[0038] When laser detection is adopted, the positions of the first beam splitter 10 and the second beam splitter 15 are adjusted, and the laser emitted by the laser source 1 passes through the attenuator 2, the first reflector 3, the second reflector 4, the spatial filter module 5, the third reflector 6, the scanning galvanometer 7, the first polarizing module 8, the photoelastic modulator 9, the first plano-convex lens 13, the second plano-convex lens 15, the second beam splitter 15 and the magnifying objective lens 20 in sequence, and then is incident on the sample surface of the sample cavity 24; the reflected laser of the sample is collected by the magnifying objective lens 20, and then passes through the second beam splitter 15, the second plano-convex lens 14, the first plano-convex lens 13, the first beam splitter 10 and the polarizing module 11 in sequence, and then is incident on the detector 12.
[0039] The laser 1 is a single-wavelength semiconductor laser with a wavelength ranging from 400 to 800 nm.
[0040] The spatial filtering module 5 is used to improve the quality of the laser beam, obtain a near-Gaussian beam, and thereby achieve a laser spot diameter close to the diffraction limit of each wavelength and an optimal spatial resolution. Figure 2 The spatial filter module 5 includes a 10x lens 33, an adjustable aperture plate 34, a third plano-convex lens 35 and a fourth plano-convex lens 36; the incident light of the spatial filter module 5 passes through the 10x lens, the adjustable aperture on the adjustable aperture plate 34, the third plano-convex lens 35 and the fourth plano-convex lens 36 in sequence and then exits. The laser beam enters and exits the spatial filter module 5 as parallel light. The adjustable aperture plate 34 is set on the displacement mechanism to adjust the distance between the 10x lens 33 and the adjustable aperture.
[0041] The scanning galvanometer 7 is a biaxial two-dimensional scanning galvanometer, which is used to realize laser beam scanning in the xy horizontal and vertical directions perpendicular to the optical path plane. The adjustable angle range of the biaxial scanning galvanometer is ±25°. It can be matched with magnifying objective lenses of different magnifications, such as 5x, 10x, 20x, and 50x, to realize plane scanning in different ranges. For example, a 50x objective lens can realize plane scanning of 20μm x 20μm.
[0042] The signal generator 28 is used to generate a voltage signal of ±10V, and transmit the voltage signal to the scanning galvanometer 7 through the data connection line, so as to control the operation of the scanning galvanometer 7.
[0043] The photoelastic modulator 9 works in conjunction with the first polarizing module 8, and is used to modulate the proportion of o-light and e-light of the laser to achieve excitation of different polarizations; in the first polarizing module 8, the polarizer is used to generate the initial polarization of the laser and natural light, and the wave plate is used to adjust the polarization state of the laser and natural light.
[0044] The polarization analyzer module is used to detect specific polarized light signals after being reflected or transmitted through the sample.
[0045] The detector 12 can be a single point detector or a CMOS array detector, or a combination of a single point detector and a CMOS array detector. The single point detector is used to detect the intensity signal of polarized laser reflected or transmitted through the sample; the CMOS array detector is used to image the optical signal of polarized light fed back through the sample.
[0046] In this embodiment, the white light source 17, the polarization analyzer module 11, the detector 12, the first plano-convex lens 13, the second plano-convex lens 14, the second beam splitter 15, the third beam splitter 16, the white light source 17, the first focusing lens 18, the camera 19, the second polarization module 32, the magnifying lens 20 and the sample chamber 24 together constitute a white light detection subsystem. The spectrometer 23 is used to detect the frequency signal of polarized light reflected or transmitted through the sample; the camera 19 is used to realize sample imaging in the white light optical path, and the image is collected by the camera and presented in the computer by the image software;
[0047] Specifically, the white light detection subsystem includes two light paths: white light transmission detection and white light reflection detection.
[0048] When the white light transmission detection mode is adopted, the light emitted by the white light source 17 passes through the second polarizing module 32, the third beam splitter 16, the second beam splitter 15 and the magnifying objective lens 20 in sequence and is incident on the sample in the sample cavity 24. Then the object light wave carrying the sample information passes through the second polarizer 22, and the object light wave of the specified frequency is focused by the second focusing lens 30 to the spectrometer 23, and the spectrometer 23 analyzes the object light wave.
[0049] When the white light reflection detection mode is adopted, a filter 31 is arranged at the output end of the white light source 17, so that the light emitted by the white light source 17 passes through the filter 31, the second polarizing module 32, the third beam splitter 16, the second beam splitter 15 and the magnifying objective lens 20 in sequence and is incident on the sample in the sample cavity 24, and then the reflected light wave carrying the sample information passes through the magnifying objective lens 20, the second beam splitter 15, the second plano-convex lens 14, the first plano-convex lens 13 and the first beam splitter 10 in sequence and is incident on the detector 12 through the polarizing module 11; and the light splitting of the second beam splitter 15 deviating from the second plano-convex lens 14 passes through the third beam splitter 16 and the first focusing lens 18 and is incident on the camera 19, and the camera 19 images the sample surface.
[0050] It can be seen that the above system provides three optical paths and sample light detection methods, and the switching of the three optical paths can be performed by adjusting the beam splitter. Therefore, in this system, the beam splitter is set on an adjustable bracket, so that the angle of the beam splitter can be switched by adjusting the bracket, thereby adjusting the working mode of the beam splitter and realizing the switching between the three detection modes.
[0051] The above system is verified in combination with specific embodiments below.
[0052] In this embodiment, the optical path is designed as follows Figure 1 shown.
[0053] In this embodiment, the white light transmission detection mode is used to test the polarization-dependent absorption spectrum of a heterostructure composed of a semiconductor two-dimensional material MoS2 and a semiconductor quasi-one-dimensional material Ta2Pd3Se8. In the specific experiment, the semiconductor two-dimensional material MoS2 and the semiconductor quasi-one-dimensional material T2Pd3Se8 are stacked on a transparent sapphire substrate, placed in a sample cavity and maintained under atmospheric room temperature conditions; then the white light transmission detection mode is used to collect the polarization absorption spectrum of the heterojunction region with a spectrometer. During the test, the polarization angle of the light beam passing through the polarization analyzer module 11 gradually changes from 0 to 90 degrees with the angle between the c-axis of the one-dimensional nanowire crystal of the sample to be tested, and the polarization absorption spectrum finally obtained is as shown in the figure. Figure 5 shown.
[0054] In this embodiment, the laser reflection detection mode is used to obtain the magneto-optical Kerr hysteresis loop of the magnetic material Co3Sn2S2 at a temperature of 78K. During the experiment, the sample to be tested is placed in a sample chamber in a vacuum state, and the vacuum thermostat is filled with liquid nitrogen to reduce the temperature to 78K. The laser source selects a 532nm laser, and the magnetic field is controlled by a magnet controller to scan back and forth from -1500Oe to 1500Oe in both positive and negative directions. At the same time, a single-point detector is used to measure the magneto-optical Kerr signal, and finally the Figure 6 The magneto-optical Kerr hysteresis loop is shown.
[0055] In this embodiment, the white light reflection detection mode is used to obtain the rapid magnetic domain imaging of the magnetic material Co3Sn2S2 at a temperature of 78K. During the experiment, the sample to be tested is placed in a sample chamber in a vacuum state, and the vacuum thermostat is filled with liquid nitrogen to reduce the temperature to 78K. The white light source is a xenon lamp, and a 620nm filter is set at the output end of the white light source. The CMOS array detector is used to quickly image the magneto-optical Kerr signal on the material surface, and finally the Figure 7 The results of rapid magnetic domain imaging are shown.
[0056] Combination Figure 5 , Figure 6 , Figure 7 It can be seen that the three detection modes of this system can achieve good test results.
[0057] In this embodiment, when the laser reflection detection mode is used to detect the sample to be detected, the following steps are specifically included:
[0058] Place the sample to be tested on the surface of the copper column in the sample cavity and fix it. Place the sample cavity with the sample to be tested in the center area of the electromagnet. Adjust the front and rear position of the sample cavity so that the sample is in the center area of the electromagnet.
[0059] Adjust the position of the magnifying objective lens, focus the light beam emitted from the magnifying objective lens on the sample surface, use the white light path to observe the sample surface and select the measurement area, and at the same time, focus the laser beam on the sample surface;
[0060] Providing voltage and current signals to the sample to be tested through the test instrument, and testing the voltage and current signals generated by the sample to be tested;
[0061] The scanning galvanometer is controlled by the voltage signal generated by the signal generator, and combined with the magnification objective lenses of different magnifications, point-by-point scanning test of specific areas of the sample to be tested is realized. With the sample chamber temperature control, test instruments, electromagnets, and polarization modules, multi-dimensional testing and regulation of temperature, electric field, magnetic field, and polarized light field can be realized.
[0062] Of course, it will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, but also includes the same or similar structures that can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-limiting in all respects, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.
[0063] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.
[0064] The techniques, shapes, and structural parts not described in detail in the present invention are all well-known techniques.
Claims
1. A magneto-optical testing system based on polarized light excitation and detection, characterized in that: The invention comprises a laser detection subsystem, which comprises: a laser source (1), a scanning galvanometer (7), a first polarizing module (8), a photoelastic modulator (9), a first beam splitter (10), a polarizing module (11), a detector (12), a first plano-convex lens (13), a second plano-convex lens (14), a second beam splitter (15), an amplifying objective lens (20) and a sample cavity (24); a scanning galvanometer (7), a first polarizing module (8), a photoelastic modulator (9), a first beam splitter (10), a first plano-convex lens (13), a second plano-convex lens (14), a second beam splitter (15), an amplifying objective lens (20) and a sample cavity (24); a scanning galvanometer (7), a first polarizing module (8), a photoelastic modulator (9), a first beam splitter (10), a first plano-convex lens (13), a second plano-convex lens (14), a second beam splitter (15), an amplifying objective lens (20) and a sample cavity (24). The objective lens (20) and the sample cavity (24) are sequentially arranged on the propagation path of the light emitted by the laser source (1); the polarization analyzer module (11) is arranged in the light emitting direction of the first beam splitter (10) deviating from the first plano-convex lens (13); and the detector (12) is arranged in the light emitting direction of the polarization analyzer module (11); the reflected light of the laser emitted by the laser source (1) from the sample in the sample cavity (24) is received and sequentially passes through the magnifying objective lens (20), the second beam splitter (15), the second plano-convex lens (14), the first plano-convex lens (13), the first beam splitter (10) and the polarization analyzer module (11) and is then collected by the detector (12); The magneto-optical testing system based on polarized light excitation and detection also includes: a third beam splitter (16), a white light source (17), a first focusing lens (18), a camera (19), a second polarizer (22), a spectrometer (23), a second focusing lens (30) and a second polarizing module (32); The third beam splitter (16) is arranged on the beam splitting direction of the second beam splitter (15) deviating from the second plano-convex lens (14) and the magnifying objective lens (20); the white light source (17) and the second polarizing module (32) are arranged in sequence on the first beam splitting direction of the first beam splitter (16); the first focusing lens (18) and the camera (19) are arranged in the second beam splitting direction of the first beam splitter (16); the first beam splitting direction and the second beam splitting direction of the third beam splitter (16) are both offset from the second beam splitter (15); the second polarizer (22), the second focusing lens (30) and the spectrometer (23) are arranged in sequence on the light emitting direction of the sample chamber (24) away from the magnifying objective lens (20); The second polarizing module (32), the third beam splitter (16), the second beam splitter (15), the magnifying objective lens (20), the sample cavity (24), the second polarizer (22), the second focusing lens (30) and the spectrometer (23) are sequentially arranged on the optical path of the outgoing light of the white light source (17), and cooperate with the white light source (17) to form a white light transmission detection subsystem; the second polarizing module (32), the third beam splitter (16), the second beam splitter (15), the magnifying objective lens (20), the sample cavity (24), the first focusing lens (18) and the camera (19) of the white light source (17) cooperate to form a white light reflection detection subsystem.
2. The magneto-optical testing system based on polarized light excitation and detection as claimed in claim 1, characterized in that: It also includes an electromagnet (21) and a magnet controller (26), wherein the electromagnet (21) is arranged outside the sample chamber (24), the magnet controller (26) is connected to the electromagnet (21), and the magnet controller (26) is used to adjust the working state of the electromagnet (21) to adjust the magnetic field environment of the sample in the sample chamber (24).
3. The magneto-optical testing system based on polarized light excitation and detection as claimed in claim 2, characterized in that: Also includes: A measuring instrument (27), a signal generator (28) and a computer (29); a vacuum thermostat is arranged in the sample chamber (24), and the vacuum thermostat is used to keep the sample in the sample chamber (24) in a constant temperature environment; the measuring instrument (27) is connected to the vacuum thermostat, and the measuring instrument (27) is used to apply a current / voltage signal to the sample in the sample chamber (24), and collect the current / voltage signal of the sample; the signal generator (28) is connected to the scanning galvanometer (7), and the signal generator (28) is used to provide a control signal for the scanning galvanometer (7); the computer (29) is respectively connected to the detector (12), the spectrometer (23), the magnet controller (26), the measuring instrument (27) and the signal generator (29); the computer (29) is used to receive analysis and detection data from the detector (12) and the spectrometer (23), the computer (29) is used to detect the state of the scanning galvanometer, and the computer (29) is also used to control the operation of the measuring instrument (27), the signal generator (28) and the magnet controller (26).
4. The magneto-optical testing system based on polarized light excitation and detection as claimed in claim 1, characterized in that: It also comprises a spatial filtering module (5), which is arranged on the propagation path of the light emitted by the laser source (1) and is located between the laser source (1) and the scanning galvanometer (7).
5. The magneto-optical testing system based on polarized light excitation and detection as claimed in claim 4, characterized in that: The invention also comprises a first reflector (3), a second reflector (4) and a third reflector (6) which are arranged on the propagation path of the light emitted by the laser source (1); the first reflector (3) and the second reflector (4) are arranged in sequence between the laser source (1) and the spatial filter module (5), and the third reflector (6) is located between the spatial filter module (5) and the scanning galvanometer (7).
6. The magneto-optical testing system based on polarized light excitation and detection as claimed in claim 1, characterized in that: The first polarizing module (8) and the second polarizing module (32) both adopt polarizing modules composed of a polarizer and a first wave plate; the analyzing module (11) adopts an analyzer and a second wave plate; the first wave plate is a half-wave plate or a quarter-wave plate, and the second wave plate is a half-wave plate or a quarter-wave plate.
7. The magneto-optical testing system based on polarized light excitation and detection as claimed in claim 1, characterized in that: The white light source (17) is a xenon lamp, and the laser source (1) is a semiconductor laser.
8. The magneto-optical testing system based on polarized light excitation and detection as claimed in claim 5, characterized in that: An attenuator (2) is also provided at the output end of the laser source (1).
9. A magneto-optical testing method based on polarized light excitation and detection using a magneto-optical testing system based on polarized light excitation and detection as claimed in any one of claims 1 to 7, characterized in that: When the white light transmission detection mode is adopted, the positions of the second beam splitter (15) and the third beam splitter (16) are first adjusted so that the light emitted by the white light source (17) passes through the second polarizing module (32), the third beam splitter (16), the second beam splitter (15) and the magnifying objective lens (20) in sequence and then is incident on the sample in the sample cavity (24), then the object light wave carrying the sample information passes through the second polarizer (22), and the object light wave of the specified frequency is focused by the second focusing lens (30) to the spectrometer (23), and the spectrometer (23) analyzes the object light wave; When the white light reflection detection mode is adopted, the positions of the first beam splitter (10), the second beam splitter (15) and the third beam splitter (16) are first adjusted, and a filter (31) is arranged at the output end of the white light source (17), so that the light emitted by the white light source (17) passes through the filter (31), the second polarizing module (32), the third beam splitter (16), the second beam splitter (15) and the magnifying objective lens (20) in sequence and then is incident on the sample in the sample chamber (24), and then the sample is carried by the detector. The reflected light waves of the information pass through the magnifying objective lens (20), the second beam splitter (15), the second plano-convex lens (14), the first plano-convex lens (13) and the first beam splitter (10) in sequence, and then are incident on the detector (12) through the polarization analysis module (11); the split light of the second beam splitter (15) deviating from the second plano-convex lens (14) passes through the third beam splitter (16) and the first focusing lens (18), and then is incident on the camera (19), and the camera (19) images the sample surface; When laser detection is adopted, the positions of the first beam splitter (10) and the second beam splitter (15) are first adjusted, and the laser emitted by the laser source (1) passes through the scanning galvanometer (7), the first polarizing module (8), the photoelastic modulator (9), the first plano-convex lens (13), the second plano-convex lens (14), the second beam splitter (15) and the magnifying objective lens (20) in sequence, and then is incident on the sample surface of the sample cavity (24); the reflected laser of the sample is collected by the magnifying objective lens (20), and then passes through the second beam splitter (15), the second plano-convex lens (14), the first plano-convex lens (13), the first beam splitter (10) and the polarizing module (11) in sequence, and then is incident on the detector (12).