Mask conveying device and photoetching machine

Abstract

The invention belongs to the technical field of mask production and manufacturing, and discloses a mask conveying device and a photoetching machine. The mask conveying device comprises a supporting frame, a supporting arm, a vertical driving mechanism and a grabbing mechanism, wherein a first driving part is mounted on the supporting frame; the output end of the first driving part is in transmission connection with the supporting arm, and the first driving part is configured to drive the supporting arm to rotate; the two vertical driving mechanisms are symmetrically arranged at the two ends of the supporting arm. The grabbing mechanism comprises a supporting plate, two clamping jaw assemblies and a driving assembly, the output end of the vertical driving mechanism is in transmission connection with the supporting plate, the vertical driving mechanism is configured to be capable of driving the supporting plate to ascend and descend, and the driving assembly is configured to be capable of driving the two clamping jaw assemblies to be close to or away from each other. According to the mask conveying device, the transfer efficiency is effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of mask production and manufacturing, and in particular to a mask conveying device and a photolithography machine. Background Art

[0002] A mask, also known as a photomask, a mask plate, a photomask or a photolithography mask plate, is a mold composed of a metal layer film or a photoresist layer film with information such as graphics and text on the surface, and a glass carrier plate made of high-purity fused quartz or other materials. It is a graphic master used in the photolithography process in the manufacture of microelectronics and integrated optoelectronics. When in use, a mask pattern is first formed on a transparent substrate by an opaque light-shielding film, and then the pattern is transferred to the wafer through exposure. Therefore, the mask is an indispensable component in the photolithography process.

[0003] As a precision component, the mask is very sensitive to particles or contaminants, so the mask is placed in a special mask box during storage. Only during the exposure process is it taken out of the mask box by a robot and placed on the mask table for exposure. The mask is of high value, and protection is required during the transmission process to prevent it from falling. At the same time, the transmission accuracy needs to be maximized to meet the exposure accuracy of the subsequent steps. At the same time, the transmission efficiency needs to be improved to compress the time to improve the production efficiency of the whole machine.

[0004] During the transportation of the mask, a robot is generally used for automatic transportation. However, there is a certain distance between the mask storage library and the exposure platform, and the mask needs to be aligned and other actions during the transportation. Existing robots generally use multi-arm robots, which occupy a large space and have a large rotation radius. Not only does it occupy more internal space of the lithography machine, but it also cannot achieve accurate and efficient transportation. Summary of the invention

[0005] The purpose of the present invention is to provide a mask conveying device and a photolithography machine, aiming to solve the problems of low transfer efficiency, large rotation radius and large occupied space of the multi-arm robot in the prior art. The mask conveying device and the photolithography machine have a small rotation radius, occupy a small space, and have a higher transfer efficiency.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A mask conveying device, comprising:

[0008] A support frame, on which a first driving member is mounted;

[0009] A support arm, the output end of the first driving member is drivingly connected to the support arm, and the first driving member is configured to drive the support arm to rotate;

[0010] A vertical driving mechanism, wherein two vertical driving mechanisms are symmetrically arranged at two ends of the support arm;

[0011] There are two gripping mechanisms, and the two gripping mechanisms are arranged in a one-to-one correspondence with the two vertical driving mechanisms. The gripping mechanism includes a support plate, two clamping jaw assemblies and a driving assembly installed on the support plate. The output end of the vertical driving mechanism is transmission-connected to the support plate, and the vertical driving mechanism is configured to drive the support plate to rise and fall. The two clamping jaw assemblies are symmetrically arranged on the support plate, and the clamping jaw assemblies are slidingly connected to the support plate. The driving assembly is configured to drive the two clamping jaw assemblies to move closer to or away from each other.

[0012] In some possible embodiments, the first driving member is connected to the support frame via a vertical arm, and the vertical arm is connected to the support frame via a slide rail structure, the slide rail structure includes a slider, a connecting plate and a locking assembly, the slider is slidably connected to the guide rail at the bottom of the support frame, the connecting plate is installed at the bottom of the slider, the vertical arm is fixedly connected to the connecting plate, and the connecting plate and the support frame are locked and fixed by the locking assembly.

[0013] In some possible embodiments, the locking assembly includes a locking plate and a threaded member, the locking plate is configured as an L-shaped structure, the L-shaped structure includes a first support plate and a second support plate that are perpendicular to each other, the first support plate is connected to the connecting plate, a long strip slide groove is provided on the support frame, and the second support plate is locked in the long strip slide groove by the threaded member.

[0014] In some possible embodiments, the vertical arm includes a cylinder, a first guide plate arranged at the first end of the cylinder, and a second guide plate arranged at the second end of the cylinder, the first guide plate is connected to the connecting plate, the second guide plate is connected to the first driving member, and the cylinder, the first guide plate and the second guide plate are all provided with weight reduction holes.

[0015] In some possible embodiments, the vertical drive mechanism includes a third drive member and a guide assembly, the third drive member is mounted on the support arm, the output end of the third drive member is transmission-connected to the support plate, the guide assembly includes a guide cylinder mounted on the support arm and a guide column slidably connected to the guide cylinder, and the first end of the guide column passes through the support arm and is connected to the support plate.

[0016] In some possible implementations, the output end of the driving assembly is transmission-connected to the clamping assembly via a connecting member, one end of the connecting member is connected to the driving assembly, and the other end of the connecting member is connected to the middle portion of the clamping assembly.

[0017] In some possible embodiments, the clamp assembly includes a connecting arm, two connecting feet respectively arranged at both ends of the connecting arm, and a clamp installed on the connecting feet, the clamp faces inward, the connecting arm is located above the support plate, the clamp is located below the support plate, the support plate is provided with a long strip hole for the connecting foot to slide through, and the connecting piece is connected to the midpoint of the connecting arm.

[0018] In some possible embodiments, the gripping mechanism further includes a cover plate, which is disposed on the support plate and is combined with the support plate to form a receiving cavity, so that the drive assembly, the connecting arm and part of the connecting foot are accommodated in the receiving cavity.

[0019] In some possible embodiments, the support arm includes a horizontal plate and two vertical plates respectively arranged perpendicularly at both ends of the horizontal plate, and extension plates are arranged on the relative outer sides of the two vertical plates. The output end of the first driving member is connected to the horizontal plate, and the vertical driving mechanism is installed on the extension plate.

[0020] The present invention provides a photolithography machine, comprising a mask conveying device as described in any of the above schemes.

[0021] The beneficial effects of the present invention are as follows: the mask conveying device provided by the present invention is provided with a first driving member, a support arm and two grabbing mechanisms. In the initial state, the connection line of the two grabbing mechanisms is consistent with the horizontal projection direction of the support frame. When in use, the first driving member drives the support arm to rotate 90 degrees, so that one of the grabbing mechanisms is aligned with the pre-alignment position, and the other grabbing mechanism is aligned with the mask stage receiving position. Then, the vertical driving mechanism drives the support plate to descend, and the driving assembly drives the two clamping claw assemblies to approach each other, so that the two grabbing mechanisms respectively grab the mask on the pre-alignment position and the mask on the mask stage receiving position. Then, the vertical driving mechanism drives the support plate to rise, the first driving member drives the support arm to rotate 180 degrees, and the vertical driving mechanism drives the support plate to descend. Then, the driving assembly drives the two clamping claw assemblies to move away from each other, swaps the mask on the pre-alignment position and the mask on the mask stage receiving position, and accurately realizes the transportation of the mask plates of the two workstations. After the exposure is completed, the first driving member can drive the support arm to rotate 90 degrees, so that the two grabbing mechanisms return to their original positions, which is convenient for re-action. Compared with the existing multi-arm manipulator structure, the mask conveying device can not only realize the transfer of the mask on the pre-alignment position and the mask on the receiving position of the mask stage by using two mutually symmetrical grasping mechanisms, but also complete the interchange of the mask on the pre-alignment position and the mask on the receiving position of the mask stage, effectively improving the transfer efficiency. Secondly, since the two grasping mechanisms are symmetrically arranged, the space occupied during transfer is only the connection line between the two grasping mechanisms, and the two grasping mechanisms are within the same transfer radius, so less space is occupied during transfer.

[0022] The present invention also provides a photolithography machine, comprising the above-mentioned mask conveying device, and the photolithography machine can realize accurate and efficient transportation of the mask on the pre-alignment position and the mask stage receiving position. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a three-dimensional view of a mask conveying device at a viewing angle provided by an embodiment of the present invention;

[0024] Figure 2 is a side view of a mask conveying device provided by an embodiment of the present invention;

[0025] Figure 3 is a schematic diagram of the assembly of the vertical arm and the slide rail structure provided by an embodiment of the present invention;

[0026] Figure 4 is a structural schematic diagram of a grabbing mechanism at a viewing angle provided by an embodiment of the present invention;

[0027] Figure 5 is a three-dimensional view of a mask conveying device from another perspective provided by an embodiment of the present invention;

[0028] Figure 6 is a structural schematic diagram of a slide rail structure and a vertical drive mechanism provided by an embodiment of the present invention;

[0029] Figure 7 is a partial structural schematic diagram of a mask conveying device (the supporting frame is not shown) provided in an embodiment of the present invention;

[0030] Figure 8 is a structural schematic diagram of a grabbing mechanism from another perspective provided by an embodiment of the present invention;

[0031] Fig. 9 is a schematic structural diagram of a support arm provided by an embodiment of the present invention;

[0032] Fig.10 is a schematic structural diagram of a connecting piece provided by an embodiment of the present invention;

[0033] Fig.11 It is a schematic diagram of the working process of the mask conveying device provided in an embodiment of the present invention.

[0034] In the figure:

[0035] 10. Mask conveying device; 20. Mask; 30. Pre-alignment position; 40. Mask stage receiving position;

[0036] 100, support frame; 110, cross beam; 120, longitudinal beam; 130, support foot; 200, vertical arm; 210, cylinder; 220, first guide plate; 230, second guide plate; 240, weight reduction hole; 300, first driving member; 400, support arm; 410, cross plate; 420, vertical plate; 430, extension plate; 500, vertical driving mechanism; 510, third driving member; 520, guide assembly; 521, guide cylinder; 522, Guide column; 600, grasping mechanism; 610, support plate; 611, long strip hole; 621, connecting arm; 622, connecting foot; 623, clamping claw; 624, vacuum air nozzle; 630, driving assembly; 631, second driving member; 640, connecting member; 650, cover plate; 700, slide rail structure; 710, slider; 720, guide rail; 730, connecting plate; 741, locking plate; 7411, first support plate; 7412, second support plate. DETAILED DESCRIPTION

[0037] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0038] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0040] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0041] The present embodiment provides a mask conveying device and a photolithography machine, aiming to solve the problems of low transfer efficiency, large rotation radius, and large occupied space of the multi-arm robot in the prior art. The mask conveying device and the photolithography machine have a small rotation radius, occupy a small space, and have a higher transfer efficiency.

[0042] like Figures 1 to 10 As shown, the mask conveying device 10 includes a support frame 100 , a support arm 400 , a vertical driving mechanism 500 and a gripping mechanism 600 . A first driving member 300 is installed on the support frame 100; the output end of the first driving member 300 is transmission-connected to the support arm 400, and the first driving member 300 is configured to drive the support arm 400 to rotate; two vertical driving mechanisms 500 are symmetrically arranged at both ends of the support arm 400; there are two grasping mechanisms 600, and the two grasping mechanisms 600 are arranged in a one-to-one correspondence with the two vertical driving mechanisms 500, and the grasping mechanism 600 includes a support plate 610, two clamping jaw assemblies and a driving assembly 630 installed on the support plate 610, the output end of the vertical driving mechanism 500 is transmission-connected to the support plate 610, the vertical driving mechanism 500 is configured to drive the support plate 610 to rise and fall, the two clamping jaw assemblies are symmetrically arranged on the support plate 610, and the clamping jaw assemblies are slidingly connected to the support plate 610, and the driving assembly 630 is configured to drive the two clamping jaw assemblies to move closer to or away from each other.

[0043] See also Fig.11 , A represents one of the gripping mechanisms 600, and B represents the other gripping mechanism 600. In the above-mentioned mask conveying device 10, in the initial state, the connection line of the two gripping mechanisms 600 is consistent with the horizontal projection direction of the support frame 100. At this time, the two gripping mechanisms 600 are located inside the frame range of the support frame 100. The support frame 100 can protect the two gripping mechanisms 600 from both sides and the top to prevent other mechanisms from touching and causing damage or affecting the accuracy. This position is the default initial position, such as Fig.11 When in use, the first driving member 300 first drives the support arm 400 to rotate 90 degrees in the reverse (or forward) direction. Fig.11As shown in Figure b, one of the gripping mechanisms 600 is aligned with the pre-alignment position 30, and the other gripping mechanism 600 is aligned with the mask stage receiving position 40. The alignment of the two gripping mechanisms 600 with the pre-alignment position 30 and the mask stage receiving position 40, respectively, is calibrated during assembly and can be used directly without recalibration, which greatly saves calibration time. Then, the vertical drive mechanism 500 drives the support plate 610 to descend, and the drive assembly 630 drives the two clamping jaw assemblies to approach each other, so that the two gripping mechanisms 600 respectively grab the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40. Then, the vertical drive mechanism 500 drives the support plate 610 to rise, and the first drive member 300 drives the support arm 400 to rotate 180 degrees in the forward or reverse direction, as shown in Figure b. Fig.11 As shown in Figure c, the vertical drive mechanism 500 drives the support plate 610 to descend, and the drive assembly 630 drives the two clamping claw assemblies to move away from each other, so that the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40 are swapped, and the mask 20 of the two stations is accurately transported. After the exposure is completed, the first drive member 300 can drive the support arm 400 to rotate 90 degrees in the reverse (or forward) direction, so that the two gripping mechanisms 600 return to their original positions, as shown in Figure c. Fig.11 Compared with the existing multi-arm manipulator structure, the mask conveying device 10 can not only realize the transfer of the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40 by using two mutually symmetrical grasping mechanisms 600, but also complete the interchange of the mask 20 on the pre-alignment position 30 and the mask 20 on the mask stage receiving position 40, thereby effectively improving the transfer efficiency. Secondly, since the two grasping mechanisms 600 are symmetrically arranged, the space occupied during transportation is only the line between the two grasping mechanisms 600, and the two grasping mechanisms 600 are within the same transportation radius, so less space is occupied during transportation; and since the present solution adjusts each grasping mechanism 600 to exactly correspond to the corresponding grasping position during the assembly stage, the rotation angle of the grasping mechanism 600 only needs to be set to ±90° and ±180°, which can meet the state adjustment of the entire transportation process and the initial position. The control program is relatively simple, and the control stability and working stability of the equipment are relatively high. Compared with the traditional transportation solution using expensive multi-arm manipulators, it is not only easy to operate, but also can save a lot of costs.

[0044] Optionally, the first driving member 300 is connected to the support frame 100 through the vertical arm 200, and the vertical arm 200 is connected to the support frame 100 through the slide rail structure 700, the slide rail structure 700 includes a slider 710, a connecting plate 730 and a locking assembly, the slider 710 is slidably connected to the guide rail 720 at the bottom of the support frame 100, the connecting plate 730 is installed at the bottom of the slider 710, the vertical arm 200 is fixedly connected to the connecting plate 730, and the connecting plate 730 and the support frame 100 are locked and fixed by the locking assembly. In this way, the installation position of the vertical arm 200 on the support frame 100 can be set as needed, and after the position of the vertical arm 200 is determined, it is locked and fixed on the support frame 100 by the locking assembly. In this embodiment, two guide rails 720 are provided, and the two guide rails 720 are arranged parallel to each other, and multiple sliders 710 are correspondingly slidably arranged on each guide rail 720, so as to improve the stability of the vertical arm 200 during the sliding process.

[0045] Furthermore, the locking assembly includes a locking plate 741 and a screw member, the locking plate 741 is set to an L-shaped structure, the L-shaped structure includes a first support plate 7411 and a second support plate 7412 that are perpendicular to each other, the first support plate 7411 is connected to the connecting plate 730, a long strip slide groove is set on the support frame 100, and the second support plate 7412 is locked in the long strip slide groove by a screw member. This arrangement is easy to operate and has reliable connection.

[0046] Optionally, the hanging arm 200 includes a cylinder 210, a first conducting plate 220 disposed at the first end of the cylinder 210, and a second conducting plate 230 disposed at the second end of the cylinder 210, the first conducting plate 220 is connected to the connecting plate 730, the second conducting plate 230 is connected to the first driving member 300, and the cylinder 210, the first conducting plate 220 and the second conducting plate 230 are all provided with weight-reducing holes 240. The cylinder 210 can be used to pass cables to improve the regularity of the overall structure and facilitate wiring; the first conducting plate 220 and the second conducting plate 230 are provided to facilitate the connection between the hanging arm 200 and the connecting plate 730, and between the hanging arm 200 and the first driving member 300. Preferably, the cylinder 210, the first conducting plate 220 and the second conducting plate 230 are coaxially arranged, and the sizes of the first conducting plate 220 and the second conducting plate 230 are both larger than the sizes of the cylinder 210, providing a larger operating space for disassembly and assembly. In addition, the weight-reducing hole 240 can be set to a circular, square or irregular shape, as long as weight reduction can be achieved. In other embodiments, the hanging arm 200 can be set to other shapes, such as a square, triangular or polygonal cross section, etc. It can be a hollow structure or a solid structure, as long as the connection function can be achieved. When the hanging arm 200 is set to a hollow structure other than a cylindrical structure, it is also convenient for wiring and weight reduction. When the hanging arm 200 is set to a solid structure, the relevant cables can be arranged along the outer wall of the hanging arm 200, and it can be set as needed.

[0047] Preferably, the support arm 400 includes a horizontal plate 410 and two vertical plates 420 respectively arranged vertically at both ends of the horizontal plate 410, and an extension plate 430 is arranged on the opposite outer sides of the two vertical plates 420. The output end of the first driving member 300 is connected to the horizontal plate 410, and the vertical driving mechanism 500 is installed on the extension plate 430. The horizontal plate 410 and the two vertical plates 420 are surrounded to form a receiving groove, and the receiving groove can be used to install other components, such as input and output line slip rings, to facilitate wiring and improve overall aesthetics.

[0048] In this embodiment, the vertical drive mechanism 500 includes a third drive member 510 and a guide assembly 520. The third drive member 510 is mounted on the support arm 400. The output end of the third drive member 510 is transmission-connected to the support plate 610. The guide assembly 520 includes a guide cylinder 521 mounted on the support arm 400 and a guide column 522 slidably connected to the guide cylinder 521. The first end of the guide column 522 passes through the support arm 400 and is connected to the support plate 610. When the output end of the third drive member 510 is retracted upward or ejected downward, the arrangement of the guide assembly 520 enables the movement of the support plate 610 to be stable and reliable.

[0049] Optionally, the output end of the driving assembly 630 is connected to the clamping assembly through a connecting piece 640, one end of the connecting piece 640 is connected to the driving assembly 630, and the other end of the connecting piece 640 is connected to the middle part of the clamping assembly. During actual assembly, in order to enable the driving assembly 630 to stably push the two clamping assemblies closer to or away from each other when ejecting, one end of the connecting piece 640 is connected to the driving assembly 630, and the other end of the connecting piece 640 is connected to the middle part of the clamping assembly, so that the driving force on the clamping assembly is placed in the middle, keeping the driving stable. In this embodiment, the driving assembly 630 includes two second driving members 631 that are symmetrically arranged at intervals, and two connecting members 640 are arranged, and the two second driving members 631 and the two connecting members 640 are arranged in a one-to-one correspondence. The output end of the second driving member 631 is transmission-connected to the clamping jaw assembly through the connecting member 640. The connecting member 640 is arranged in an L-shape, one end of the connecting member 640 is connected to the second driving member 631, and the other end of the connecting member 640 is connected to the middle part of the clamping jaw assembly. The output end of the second driving member 631 and the L-shaped connecting member 640 can form a Z-shaped structure, and sufficient space can be reserved between the two second driving members 631 for the installation of the third driving member 510 and the guide column 522.

[0050] In this embodiment, the clamping jaw assembly includes a connecting arm 621, two connecting legs 622 respectively arranged at both ends of the connecting arm 621, and a clamping jaw 623 installed on the connecting legs 622, the clamping jaw 623 faces inward, the connecting arm 621 is located above the support plate 610, the clamping jaw 623 is located below the support plate 610, the support plate 610 is provided with a long strip hole 611 for the connecting leg 622 to slide through, and the connecting piece 640 is connected to the midpoint of the connecting arm 621. When grabbing the mask 20, the output ends of the two second driving members 631 are pushed out to both sides at the same time, driving the two clamping jaws assemblies to move away from each other. In order to leave enough clamping space for grabbing the mask 20, when the mask 20 is located between the two clamping jaws assemblies, the output ends of the two second driving members 631 are simultaneously contracted, and the clamping jaws 623 on both sides move toward each other, and the clamping jaws 623 move to the bottom of the mask 20. Then, the third driving member 510 drives the support plate 610 to rise, and the clamping jaws 623 hold the mask 20 and move upward by a preset distance. Preferably, in order to prevent the mask 20 from moving, the lifting surface of the clamping jaws 623 is provided with a vacuum air nozzle 624, and the vacuum air nozzle 624 is connected to the pipeline of the negative pressure device, and the mask 20 is fixed by vacuum adsorption.

[0051] The gripping mechanism 600 also includes a cover plate 650, which is covered on the support plate 610 and enclosed with the support plate 610 to form a receiving cavity, so that the driving component 630, the connecting arm 621 and part of the connecting foot 622 are accommodated in the receiving cavity to avoid being affected by the external environment. The cover plate 650 is provided with a through hole for the output end of the driving component 630 and the guide column 522 to pass through.

[0052] In this embodiment, the first driving member 300 is configured as a direct drive motor, and the second driving member 631 and the third driving member 510 are both configured as electric cylinders.

[0053] Optionally, the support frame 100 includes a crossbeam 110 and a longitudinal beam 120, the two longitudinal beams 120 are arranged at both ends of the crossbeam 110 and are arranged perpendicular to the crossbeam 110, the support foot 130 is installed at one end of the longitudinal beam 120 away from the crossbeam 110, and is used to abut or be fixedly connected with the ground or the photolithography machine frame, and the two guide rails 720 are installed on the bottom surface of the crossbeam 110. It can be understood that when the mask conveying device 10 is not working, the two gripping mechanisms 600 are located between the two longitudinal beams 120, and the connection line of the two gripping mechanisms 600 is parallel to the crossbeam 110, so as to avoid the mask conveying device 10 from occupying excess space.

[0054] This embodiment further provides a photolithography machine, including the above-mentioned mask conveying device 10 , which can realize efficient transportation of the mask 20 on the pre-alignment position 30 and the mask stage receiving position 40 .

[0055] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A mask conveying device, characterized in that: include: A support frame (100), wherein a first driving member (300) is mounted on the support frame (100); A support arm (400), the output end of the first driving member (300) being in driving connection with the support arm (400), and the first driving member (300) being configured to drive the support arm (400) to rotate; A vertical driving mechanism (500), wherein two vertical driving mechanisms (500) are symmetrically arranged at two ends of the support arm (400); Two gripping mechanisms (600) are provided, and the two gripping mechanisms (600) are arranged in a one-to-one correspondence with the two vertical driving mechanisms (500). The gripping mechanism (600) comprises a support plate (610), two clamping jaw assemblies and a driving assembly (630) installed on the support plate (610). The output end of the vertical driving mechanism (500) is transmission-connected to the support plate (610). The vertical driving mechanism (500) is configured to drive the support plate (610) to rise and fall. The two clamping jaw assemblies are symmetrically arranged on the support plate (610), and the clamping jaw assemblies are slidingly connected to the support plate (610). The driving assembly (630) is configured to drive the two clamping jaw assemblies to move closer to or away from each other.

2. The mask conveying device according to claim 1, characterized in that: The output end of the driving assembly (630) is transmission-connected to the clamping assembly via a connecting piece (640), one end of the connecting piece (640) is connected to the driving assembly (630), and the other end of the connecting piece (640) is connected to the middle part of the clamping assembly.

3. The mask conveying device according to claim 2, characterized in that: The clamping jaw assembly comprises a connecting arm (621), two connecting legs (622) respectively arranged at both ends of the connecting arm (621), and a clamping jaw (623) installed on the connecting legs (622), wherein the clamping jaw (623) faces inward, the connecting arm (621) is located above the supporting plate (610), and the clamping jaw (623) is located below the supporting plate (610), and the supporting plate (610) is provided with a long strip hole (611) for the connecting leg (622) to slide through, and the connecting piece (640) is connected to the midpoint of the connecting arm (621).

4. The mask conveying device according to claim 3, characterized in that: The gripping mechanism (600) further comprises a cover plate (650), wherein the cover plate (650) is covered on the support plate (610) and is combined with the support plate (610) to form a receiving cavity, so that the driving component (630), the connecting arm (621) and part of the connecting foot (622) are received in the receiving cavity.

5. The mask conveying device according to claim 1, characterized in that: The support arm (400) comprises a horizontal plate (410) and two vertical plates (420) respectively arranged perpendicularly at two ends of the horizontal plate (410), and extension plates (430) are arranged on the opposite outer sides of the two vertical plates (420), the output end of the first driving member (300) is connected to the horizontal plate (410), and the vertical driving mechanism (500) is installed on the extension plates (430).

6. The mask conveying device according to claim 1, characterized in that: The first driving member (300) is connected to the support frame (100) through a vertical arm (200), and the vertical arm (200) is connected to the support frame (100) through a slide rail structure (700), the slide rail structure (700) includes a slider (710), a connecting plate (730) and a locking assembly, the slider (710) is slidably connected to a guide rail (720) at the bottom of the support frame (100), the connecting plate (730) is installed at the bottom of the slider (710), the vertical arm (200) is fixedly connected to the connecting plate (730), and the connecting plate (730) and the support frame (100) are locked and fixed by the locking assembly.

7. The mask conveying device according to claim 6, characterized in that: The locking assembly comprises a locking plate (741) and a threaded member, wherein the locking plate (741) is arranged as an L-shaped structure, wherein the L-shaped structure comprises a first support plate (7411) and a second support plate (7412) which are perpendicular to each other, wherein the first support plate (7411) is connected to the connecting plate (730), and an elongated sliding groove is arranged on the support frame (100), and the second support plate (7412) is locked in the elongated sliding groove by the threaded member.

8. The mask conveying device according to claim 6, characterized in that: The vertical arm (200) comprises a cylinder (210), a first guide plate (220) arranged at the first end of the cylinder (210), and a second guide plate (230) arranged at the second end of the cylinder (210), the first guide plate (220) being connected to the connecting plate (730), the second guide plate (230) being connected to the first driving member (300), and the cylinder (210), the first guide plate (220) and the second guide plate (230) are all provided with weight reduction holes (240).

9. The mask conveying device according to claim 1, characterized in that: The vertical driving mechanism (500) comprises a third driving member (510) and a guide assembly (520), wherein the third driving member (510) is mounted on the support arm (400), and an output end of the third driving member (510) is transmission-connected to the support plate (610), and the guide assembly (520) comprises a guide cylinder (521) mounted on the support arm (400) and a guide column (522) slidably connected to the guide cylinder (521), and a first end of the guide column (522) passes through the support arm (400) and is connected to the support plate (610).

10. A photolithography machine, characterized in that: It comprises the mask conveying device as described in any one of claims 1 to 9.

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