CUSP superconducting magnet monitoring device

Abstract

The invention discloses a CUSP superconducting magnet monitoring device which is characterized in that a first superconducting power supply and a second superconducting power supply are electrically connected with a first coil and a second coil of a superconducting magnet through a first current lead and a second current lead respectively, and the first superconducting power supply and the second superconducting power supply are in signal connection with a programmable controller; the monitor is arranged on the superconducting magnet and is in signal connection with the programmable controller, the current lead temperature control system is arranged on the superconducting magnet and is in signal connection with the programmable controller, and the remote control system is connected with the programmable controller through the Internet. According to the invention, the upper coil and the lower coil of the CUSP superconducting magnet can be respectively controlled, the closed-loop operation of the superconducting magnet is satisfied, the unstable interference caused by the operation of the superconducting magnet dragged by a superconducting power supply is reduced, the excitation efficiency of the superconducting magnet is greatly improved, and the cost is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of superconducting magnets, and in particular to a CUSP superconducting magnet monitoring device. Background Art

[0002] High-purity single crystal silicon is widely used in industries such as integrated circuits and semiconductors. It is one of the key materials for high-tech industries such as electronic information and photovoltaic power generation. With the rapid development of manufacturing technologies for semiconductor microelectronic devices and large-scale integrated circuits, the quality and size requirements for single crystal silicon are getting higher and higher, and the preparation requirements for semiconductor material single crystal silicon are becoming more stringent. In this context, magnetron CZ single crystal magnets have become the mainstream in the production of single crystal silicon. With the development of superconducting technology, superconducting magnets can generate magnetic fields several times that of conventional electromagnets or permanent magnets, which can significantly reduce the impact of melt thermal convection on the quality of single crystals. Therefore, more and more magnetron CZ single crystal equipment is equipped with magnetron CZ single crystal superconducting magnets.

[0003] CUSP superconducting magnets used in magnetron CZ-pulled single crystal silicon can effectively reduce the oxygen content. Local control of CUSP superconducting magnets used in magnetron CZ-pulled single crystal silicon and remote control with the single crystal furnace require an electrical control system to collect parameters such as temperature, vacuum, voltage, and current inside the superconducting magnet to achieve interlocking protection and remote control of superconducting power supplies and other functions.

[0004] However, the existing CUSP superconducting magnet control equipment has problems such as asynchronous excitation of the upper and lower coils of the CUSP superconducting magnet, closed-loop drag control, local and remote control, and inconvenient switching control between different superconducting magnets. Summary of the invention

[0005] The embodiment of the present invention provides a CUSP superconducting magnet monitoring device to solve the problems of asynchronous excitation of upper and lower coils of the CUSP superconducting magnet, closed-loop drag control, local and remote control, and inconvenient switching control between different superconducting magnets in the CUSP superconducting magnet control equipment in the prior art.

[0006] On the one hand, an embodiment of the present invention provides a CUSP superconducting magnet monitoring device, comprising: A first superconducting power supply, a second superconducting power supply, a programmable controller, a monitor, a current lead temperature control system, a remote control system, a superconducting magnet, an electric control cabinet and a single crystal furnace. The first superconducting power supply and the second superconducting power supply are electrically connected to the first coil and the second coil of the superconducting magnet through the first current lead and the second current lead respectively. The first superconducting power supply and the second superconducting power supply signals are connected to the programmable controller, and the monitor signal is connected to the programmable controller. The current lead temperature control system is arranged on the superconducting magnet, and the current lead temperature control system signal is connected to the programmable controller. The remote control system is connected to the programmable controller through a communication method. The programmable controller, the first superconducting power supply, the second superconducting power supply, the monitor, the current lead temperature control system, the remote control system, and the quench detection circuit are arranged in the electric control cabinet, and the single crystal furnace signal is connected to the programmable controller.

[0007] In a possible implementation, a first DC switch is provided in the positive loop between the first superconducting power supply and the first current lead, the positive and negative loops between the first superconducting power supply and the first current lead pass through a first circuit breaker, a second DC switch is provided in the positive loop between the second superconducting power supply and the second current lead, the positive and negative loops between the second superconducting power supply and the second current lead pass through a second circuit breaker, the first DC switch and the second DC switch are normally closed DC switches, the first circuit breaker and the second circuit breaker are manual circuit breakers, a group of first normally closed DC switches are connected in parallel on both sides of the positive and negative poles of the first superconducting power supply, and a group of second normally closed DC switches are connected in parallel on both sides of the positive and negative poles of the second superconducting power supply.

[0008] In a possible implementation, the quench detection circuit is connected to voltage leads on both sides of a coil voltage lead and a current lead inside the superconducting magnet, and the quench detection circuit is connected to the first DC switch, the second DC switch, the first normally closed DC switch, and the second normally closed DC switch through control signals from the electric control cabinet and the programmable controller.

[0009] In a possible implementation, a reset switch is provided on the electric control cabinet, the reset switch signal is connected to the programmable controller, and the reset switch is used to reset the initial states of the first DC switch, the second DC switch, the first normally closed DC switch and the second normally closed DC switch.

[0010] In a possible implementation, the electric control cabinet is provided with a panel alarm light and a panel buzzer, and the panel alarm light and panel buzzer signals are connected to the programmable controller.

[0011] In a possible implementation, the electric control cabinet is provided with a panel emergency button, the panel emergency button is electrically connected to the programmable controller, and the panel emergency button is used to control the active quenching of the superconducting magnet through the programmable controller.

[0012] In a possible implementation, a remote button is provided in the electric control cabinet, the remote button is electrically connected to the programmable controller, and the remote button is used to switch the control mode of the programmable controller.

[0013] In a possible implementation, a first copper block and a second copper block are respectively disposed on the first current lead and the second current lead, and a first copper block heater and a second copper block heater are respectively disposed on the first copper block and the second copper block.

[0014] In a possible implementation, the current lead temperature control system is electrically connected to the first copper block heater and the second copper block heater respectively through a temperature controller, and the temperature controller is used for closed-loop control of the first copper block heater and the second copper block heater.

[0015] A CUSP superconducting magnet monitoring device in the present invention has the following advantages: The upper and lower coils of the CUSP superconducting magnet can be controlled separately to ensure the smooth operation of the superconducting magnet and reduce the unstable interference of the superconducting power supply dragging the superconducting magnet. In addition, a group of magnetically controlled CZ-pull single-crystal silicon superconducting magnets can be provided for closed-loop operation, and multiple groups of magnetically controlled CZ-pull single-crystal silicon superconducting magnets can be provided for closed-loop operation, which greatly improves the excitation efficiency of the superconducting magnet and reduces the cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 A circuit diagram of a CUSP superconducting magnet monitoring device provided by an embodiment of the present invention.

[0018] Figure 2 A circuit diagram of a CUSP superconducting magnet monitoring device provided by an embodiment of the present invention, which includes a superconducting switch.

[0019] Figure 3 A schematic diagram of the distribution of an electric control cabinet and an electric control cabinet panel of a CUSP superconducting magnet monitoring device provided in an embodiment of the present invention.

[0020] Explanation of reference numerals: 101, first superconducting power source; 102, second superconducting power source; 2, programmable controller; 3, monitor; 4, current lead temperature control system; 6, remote control system; 7, superconducting magnet; 8, electric control cabinet; 9, single crystal furnace; 5, compressor; 701, first current lead; 702, second current lead; 703, first copper block; 704, first copper block heater; 705, second copper block; 706, second copper block heater; 710, first coil; 711, coil voltage lead; 712, voltage leads on both sides of current lead; 720, second coil; 713, first superconducting switch; 714, second superconducting switch; 715, first heater coil; 716, second heater coil; 801, first DC switch; 802 , first circuit breaker; 803, second DC switch; 804, second circuit breaker; 805, first normally closed DC switch; 806, second normally closed DC switch; 807, first loop short-circuit current sensor; 808, first loop current sensor; 809, second loop short-circuit current sensor; 810, quench detection circuit; 811, second loop current sensor; 821, reset switch; 822, alarm reset button; 823, panel emergency button; 824, panel alarm light; 825, panel buzzer; 826, quick recovery button; 827, CUSP synchronization selection button; 828, superconducting switch selection button; 829, remote button; 830; first superconducting switch power supply, 831, second superconducting switch power supply; 401, temperature controller. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] Figure 1 A schematic diagram of the structure of a CUSP superconducting magnet monitoring device provided in an embodiment of the present invention; an embodiment of the present invention provides a CUSP superconducting magnet monitoring device, comprising: A first superconducting power source 101, a second superconducting power source 102, a programmable controller 2, a monitor 3, a current lead temperature control system 4, a remote control system 6, a superconducting magnet 7, an electric control cabinet 8 and a single crystal furnace 9. The first superconducting power source 101 and the second superconducting power source 102 are electrically connected to the first coil 710 and the second coil 720 of the superconducting magnet 7 through the first current lead 701 and the second current lead 702 respectively. The first superconducting power source 101 and the second superconducting power source 102 are connected to the programmable controller 2 by signals, and the monitor 3 is connected to the programmable controller by signals. The device 2, the current lead temperature control system 4 is arranged on the superconducting magnet 7, the current lead temperature control system 4 is connected to the programmable controller 2 by signal, the remote control system 6 is remotely controlled by communication and is connected to the programmable controller 2 by communication between the on-site programmable controller, the programmable controller 2, the first superconducting power supply 101, the second superconducting power supply 102, the monitor 3, the current lead temperature control system 4, the remote control system 6, and the quench detection circuit 810 are arranged in the electric control cabinet 8, and the single crystal furnace 9 is connected to the programmable controller 2 by signal; The positive loop between the first superconducting power source 101 and the first current lead 701 is provided with a first DC switch 801, the positive and negative loops between the first superconducting power source 101 and the first current lead 701 pass through a first circuit breaker 802, the positive loop between the second superconducting power source 102 and the second current lead 702 is provided with a second DC switch 803, the positive and negative loops between the second superconducting power source 102 and the second current lead 702 pass through a second circuit breaker 804, the first DC switch 801 and the second DC switch 803 are normally closed DC switches, the first circuit breaker 802 and the second circuit breaker 804 are manual circuit breakers, a group of first normally closed DC switches 805 are connected in parallel on both sides of the positive and negative poles of the first superconducting power source 101, and a group of second normally closed DC switches 806 are connected in parallel on both sides of the positive and negative poles of the second superconducting power source 102; The quench detection circuit 810 is connected to the coil voltage lead 711 and the voltage leads 712 on both sides of the current lead inside the superconducting magnet 7. The quench detection circuit 810 is connected to the first DC switch 801, the second DC switch 803, the first normally closed DC switch 805 and the second normally closed DC switch 806 through the control signal of the electric control cabinet 8 and the programmable controller 2; The electric control cabinet 8 is provided with a reset switch 821, the reset switch 821 signal is connected to the programmable controller 2, and the reset switch 821 is used to reset the initial states of the first DC switch 801, the second DC switch 803, the first normally closed DC switch 805 and the second normally closed DC switch 806; The electric control cabinet 8 is provided with a panel alarm light 824 and a panel buzzer 825, and the panel alarm light 824 and the panel buzzer 825 are connected to the programmable controller 2 by signal. The electric control cabinet 8 is also provided with an alarm reset button 822, and the alarm reset button 822 resets the panel alarm light 824 and the panel buzzer 825 through the programmable controller 2; The electric control cabinet 8 is provided with a panel emergency button 823, the panel emergency button 823 is electrically connected to the programmable controller 2, and the panel emergency button 823 is used to control the active quenching of the superconducting magnet 7 through the programmable controller 2; A remote button 829 is provided in the electric control cabinet 8, and the remote button 829 is electrically connected to the programmable controller 2. The remote button 829 is used to switch the control mode of the programmable controller 2; A first copper block 703 and a second copper block 705 are respectively disposed outside the first current lead 701 and the second current lead 702, and a first copper block heater 704 and a second copper block heater 706 are respectively disposed on the first copper block 703 and the second copper block 705; The current lead temperature control system 4 is electrically connected to the first copper block heater 704 and the second copper block heater 706 through a temperature controller 401 , and the temperature controller 401 is used for closed-loop control of the first copper block heater 704 and the second copper block heater 706 .

[0023] Exemplary, Example 1, such as Figure 1 , 2 , 3. For a CUSP superconducting magnet without a superconducting switch, the first superconducting power source 101 and the second superconducting power source 102 are respectively controlled by the programmable controller 2 to excite the two superconducting magnets respectively, or the two superconducting magnets can be excited simultaneously by synchronous control. The mode selection is selected by the CUSP synchronous selection button 827 of the electric control cabinet 8. If the superconducting magnet 7 of the CUSP does not have a superconducting switch, the superconducting switch selection button 828 of the electric control cabinet 8 is used to switch to the non-superconducting switch mode. The first normally closed DC switch 805 is also connected in series with a first loop short-circuit current sensor 807, and the second normally closed DC switch 806 is also connected in series with a second loop short-circuit current sensor 809. A first loop current sensor 808 is connected in series between the first DC switch 801 and the first circuit breaker 802, and a second loop current sensor 811 is connected in series between the second DC switch 803 and the second circuit breaker 804; When the first superconducting power source 101 and the first superconducting power source 102 synchronously excite the first coil 710 and the second coil 720 of the superconducting magnet 7 of the CUSP, after the programmable controller 2 detects the quench of the superconducting magnet 7 through the quench detection circuit 810, the first normally closed DC switch 805 and the second normally closed DC switch 806 change from the open state to the normally closed state, the current of the first superconducting power source 101 continues to flow through the first normally closed DC switch 805, and the first superconducting power source 101 quickly reduces the current to zero. The current of the second superconducting power source 102 continues to flow through the second normally closed DC switch 806, and the second superconducting power source 102 quickly reduces the current to zero. At the same time, the first DC switch 801 and the second DC switch 803 change from the normally closed state to the open state, and the superconducting power source 7 no longer outputs current to the superconducting magnet 7. After the temperature of the superconducting magnet 7 is cooled down and returns to the superconducting temperature, the monitoring system is reset to the initial state through the reset button 821 on the electric control cabinet 8, the first DC switch 801 and the second DC switch 803 are restored to the normally closed state, and the first normally closed DC switch 805 and the second normally closed DC switch 806 are restored to the normally closed state; when the programmable controller 2 logically determines that the superconducting magnet 7 has a serious abnormality, the first normally closed DC switch 805 and the second normally closed DC switch 806 are changed from the open state to the normally closed state, and the first superconducting power supply 801 is turned off. The current of the first coil 710 continues to flow through the first normally closed DC switch 801, and the current of the second superconducting power supply 102 continues to flow through the second normally closed DC switch 806. At this time, the alarm light 824 on the panel of the electric control cabinet 8 flashes, and the buzzer 825 on the panel of the electric control cabinet 8 sounds. The first superconducting power supply 101 and the second superconducting power supply 102 slowly reduce the current, and the first DC switch 801 and the second DC switch 803 remain in the closed state. The current of the first coil 710 continues to flow through the first DC switch 801, and the current of the second coil 720 flows through the second DC switch 80 3. After the operator conducts on-site inspection and eliminates the abnormal situation, the programmable controller 2 reads the value of the short-circuit current transformer of the first coil 710. When the operator activates the quick recovery button 826 of the first coil 710, the first superconducting power supply 101 quickly starts excitation. When the excitation current and the reading of the first-circuit short-circuit current transformer 807 of the first coil 710 are within 1 ampere, the first normally closed DC switch 805 is controlled by the programmable controller 2 to open, the first coil 710 restores the current, and continues to operate according to the set value given by the single crystal furnace 9 or the local monitor 3; the programmable controller 2 also reads the value of the second-circuit short-circuit current transformer 809 of the second coil 720, and the second superconducting power supply 102 quickly starts excitation. When the excitation current and the current value read by the second-circuit short-circuit current transformer 809 of the second coil 720 are within 1 ampere, the second normally closed DC switch 806 is controlled by the programmable controller 2 to open, the second coil 720 restores the current, and continues to operate according to the set value given by the single crystal furnace 9 or the local monitor 3; The controller 2 can be programmed to control the first superconducting power source 101 and the second superconducting power source 102 through logic, and monitor the state of the superconducting magnet 7 of the CUSP, and the monitor 3 displays the operation, fault alarm and other states of the superconducting magnet 7 of the CUSP; the signal input and output of the controller 2 and the compressor 5, the internal thermometer of the CUSP superconducting magnet 7, the first superconducting power source 101 and the second superconducting power source 102 can be programmed, wherein the relevant signal of the compressor 5 is the switch input and output signal, and the data acquisition of the internal thermometer of the superconducting magnet 7 of the CUSP is the 232 communication protocol The data exchange between the first superconducting power source 101 and the second superconducting power source 102 is a 485 communication protocol. The temperature detection of the superconducting magnet 7 of the CUSP monitors the temperature of key positions (coils, current leads, etc.) in the magnet. The temperatures of the first coil 710 and the second coil 720 and the first current lead 701 and the second current lead 702 of the high-temperature superconductor are the focus of attention. Thresholds are set for them respectively. When the temperature is too high, the monitoring device will issue an alarm. At this time, the alarm light 824 on the panel of the electric control cabinet 8 flashes, and the buzzer 825 on the panel of the electric control cabinet 8 buzzes; The current lead temperature control system 4 is electrically connected to the first copper block heater 704 installed on the first copper block 703 of the current lead on the superconducting magnet 7 of the CUSP through the temperature controller 401 to form a closed-loop control system, which is used to prevent ice from causing adverse effects on the working environment, etc.; The remote control system 6 selects local and remote control through the remote button 829 on the electric control cabinet 8. When the remote button 829 is selected as the local mode, the single crystal furnace 9 host computer cannot remotely give commands to the programmable controller 2 in the electric control cabinet 8, and can only give instructions to the first superconducting power supply 101 through the monitor 3 for local excitation operation; when the remote button 829 is selected as the remote mode, the local operation cannot be performed, and the control right is handed over to the single crystal furnace 9 host computer. The remote mode is generally completed by the programmable controller 2 communicating with the single crystal furnace 9 programmable controller. When the single crystal furnace 9 programmable controller has abundant I / O ports, the device of this example can send the required communication information to the single crystal furnace 9 host computer by connecting the signal line. The communication methods used are more optical fiber communication, modbus485, PROFINET, EtherCAT, EtherNet / IP, Modbus TCP, CClink and other communication methods. This device adopts CClink communication method; the first superconducting power supply 101 and the second superconducting power supply 102 use serial communication with the programmable controller 2, and use the communication module to communicate with the superconducting power supply for Modbus-RTU. The device address of superconducting power supply 101 is 1, the device address of superconducting power supply 102 is 2, the communication protocol is set to communication protocol, the communication speed is set to 57600bps, the data bit is 8 bits, the parity bit: none, the parity check: odd, the stop bit: 1, and no check code.

[0024] In a possible embodiment, Figure 2 , 3 As shown, in Example 2, when the remote button 829 is selected as the remote mode, the superconducting switch selection button 828 is selected as the superconducting switch mode, and the CUSP synchronization selection button 827 is selected as the synchronization mode, the two coils of the superconducting magnet 7 of the CUSP, the first coil 710 and the second coil 720, are synchronously operated, and the DC switch and other settings in the circuit are the same as those in Example 1; when the superconducting magnet 7 of the CUSP is excited, firstly, the programmable controller 2 is synchronously set to output the same current to the first heater coil 715 of the first superconducting switch 713 and the second heater coil 716 of the second superconducting switch 714, so that the first superconducting switch 713 and the second superconducting switch 714 are changed from the superconducting state to the non-superconducting state. At this time, the states of the first coil 710 and the second coil 720 are the same as those in Example 1, and the first superconducting power supply 101 is electrically connected to the first current lead 701 of the superconducting magnet 7 of the CUSP to supply power to the first coil 710; the second superconducting power supply 102 is connected to the first current lead 701 of the superconducting magnet 7 of the CUSP to supply power to the first coil 710; The second current lead 702 of the superconducting magnet 7 of the CUSP is electrically connected to supply power to the second coil 720. When the crystal pulling process of the single crystal furnace 9 enters the equal diameter process, the current required by the superconducting magnet 7 of the CUSP is kept constant according to the process setting according to the process requirements, and is recorded as the closed-loop current. Then, the output current of the first superconducting switch power supply 830 and the second superconducting switch power supply 831 is set to zero, and the heating coils of the first superconducting switch 713 and the second superconducting switch 714 are no longer heated, so that the first superconducting switch 713 and the second superconducting switch 714 are changed from a non-superconducting state to a superconducting state, and the first coil 710 and the first superconducting switch 713 form a superconducting closed-loop state, and the second coil 720 and the second superconducting switch 714 form a superconducting closed-loop state. At this time, the programmable controller 2 sends a signal to the first superconducting power supply 101 to reduce the current to zero, and no longer supplies power to the first coil 710; the programmable controller 2 sends a signal to the second superconducting power supply 102 to reduce the current to zero, and no longer supplies power to the second coil 720. The closed-loop current of the superconducting magnet 7 of the CUSP continues to run at equal diameter. When the equal diameter of the single crystal furnace 9 is completed and demagnetization is performed according to the process requirements, the programmable controller 2 first synchronously sets the same closed-loop current to the first superconducting power supply 101 and the second superconducting power supply 102, and powers on to run. When the first superconducting power supply 101 and the second superconducting power supply 102 reach the set closed-loop current, the programmable controller 2 synchronously sets the first superconducting switch power supply 830 and the second superconducting switch power supply 831 to output the same current to the first heater coil 715 of the first superconducting switch 713 and the second heater coil 716 of the second superconducting switch 714, so that the first superconducting switch 713 and the second superconducting switch 714 are changed from the superconducting state to the non-superconducting state. At this time, the states of the first coil 710 and the second coil 720 are the same as those in Example 1, and the current is reduced by demagnetization according to the process requirements of the single crystal furnace 9.

[0025] In a possible embodiment, when the remote button 829 is selected as the remote mode, the superconducting switch selection button 828 is selected as the superconducting switch mode, and the CUSP synchronization selection button 827 is selected as the asynchronous mode, the two coils of the superconducting magnet 7 of the CUSP, the first coil 710 and the second coil 720, act independently, the first superconducting power supply 101 supplies power to the first coil 710 of the superconducting magnet 7 of the CUSP; the second superconducting power supply 102 supplies power to the second coil 720 of the superconducting magnet 7 of the CUSP; at this time, the first superconducting power supply 101 and the second superconducting power supply 102 are respectively controlled by the programmable controller 2, and the current setting size and setting time are no longer synchronized.

[0026] In a possible embodiment, the CUSP superconducting magnet monitoring device can excite the superconducting magnet coil for magnetically controlled CZ-pulled single crystal silicon without a superconducting switch, and can also excite the superconducting magnet coil for magnetically controlled CZ-pulled single crystal silicon with a superconducting switch. The superconducting magnet here can be a superconducting horizontal magnetic field, etc. At this time, the monitoring device of the present invention is in a mobile use situation, and can be used as an emergency backup device, or it can be fixedly used after reconfiguring the parameters of the superconducting magnet for magnetically controlled CZ-pulled single crystal silicon; When the remote button 829 is selected as the local mode, the first superconducting power source 101 is electrically connected to the current lead of the superconducting magnet for magnetron CZ single crystal silicon, and supplies power to the superconducting coil of the superconducting magnet for magnetron CZ single crystal silicon; the second superconducting power source 102 can be vacant, or it can be electrically connected to the current lead of another superconducting magnet for magnetron CZ single crystal silicon. The DC switch and other settings in the circuit are the same as those in Example 1; when the superconducting magnet for magnetron CZ single crystal silicon is excited, the current value of the first superconducting power source 101 is manually set on the monitor 3 to excite the superconducting magnet for magnetron CZ single crystal silicon, and when the second superconducting power source 102 needs to be used, the current value of the second superconducting power source 102 is set on the monitor 3. When a superconducting switch is installed inside the superconducting magnet for magnetron CZ single crystal silicon, the first superconducting switch power supply 830 or the second superconducting switch power supply 831, the first heater coil 715 or the second heater coil 716 are manually set to change the first superconducting switch 713 and the second superconducting switch 714 from a superconducting state to a non-superconducting state. At this time, the state of the superconducting coil of the superconducting magnet for magnetron CZ single crystal silicon is the same as that in Example 1. The first superconducting power supply 101 and the superconducting coil of the superconducting magnet for magnetron CZ single crystal silicon are powered. When the current required by the superconducting magnet for magnetron CZ single crystal silicon is kept constant as the closed-loop current according to the process requirements, the output current of the first superconducting switch power supply 830 or the second superconducting switch power supply 831 is manually set to zero, and the superconducting switch for the superconducting coil of the magnetron CZ single crystal silicon superconducting magnet or the superconducting switch 714 for the superconducting coil 720 is no longer heated, so that the superconducting switch for the superconducting coil of the magnetron CZ single crystal silicon superconducting magnet or the superconducting switch 714 for the superconducting coil 720 is changed from a non-superconducting state to a superconducting state. In the conductive state, the superconducting coil of the superconducting magnet for magnetron CZ silicon single crystal and the first superconducting switch 713 form a superconducting closed loop state. At this time, the current of the first superconducting power supply 101 is manually set to zero on the monitor 3, and the superconducting coil of the superconducting magnet for magnetron CZ silicon single crystal is no longer powered. When the process of the single crystal furnace 9 requires demagnetization, firstly, the closed loop current is manually set for the first superconducting power supply 101 or the second superconducting power supply 102, and it is powered on and operated. When the first superconducting power supply 101 or the second superconducting power supply 102 reaches the set closed loop current, the first superconducting power supply 101 or the second superconducting power supply 102 is powered on and the first superconducting power supply 101 is powered on and the first ... When current flows, the first superconducting switch power supply 830 or the second superconducting switch power supply 831 is manually set to output current to the first heater coil 715 or the second heater coil 716 of the superconducting coil of the superconducting magnet for magnetron CZ-pulling single crystal silicon, so that the first superconducting switch 713 or the second superconducting switch 714 of the superconducting magnet for magnetron CZ-pulling single crystal silicon changes from a superconducting state to a non-superconducting state. At this time, the state of the superconducting coil of the superconducting magnet for magnetron CZ-pulling single crystal silicon is the same as that in Example 1, and the current is demagnetized and reduced according to the process requirements of the single crystal furnace 9.

[0027] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0028] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A CUSP superconducting magnet monitoring device, characterized in that: include: A first superconducting power source (101), a second superconducting power source (102), a programmable controller (2), a monitor (3), a current lead temperature control system (4), a remote control system (6), a superconducting magnet (7), an electric control cabinet (8) and a single crystal furnace (9), wherein the first superconducting power source (101) and the second superconducting power source (102) are electrically connected to a first coil (710) and a second coil (720) of the superconducting magnet (7) via a first current lead (701) and a second current lead (702), respectively, the first superconducting power source (101) and the second superconducting power source (102) are signal-connected to the programmable controller (2), and the monitor (3) 3) signal connected to the programmable controller (2), the current lead temperature control system (4) is arranged on the superconducting magnet (7), the current lead temperature control system (4) is signal connected to the programmable controller (2), the remote control system (6) is connected to the programmable controller (2) via the Internet, the programmable controller (2), the first superconducting power source (101), the second superconducting power source (102), the monitor (3), the current lead temperature control system (4), the remote control system (6), and the quench detection circuit (810) are arranged in the electric control cabinet (8), and the single crystal furnace (9) is signal connected to the programmable controller (2).

2. A CUSP superconducting magnet monitoring device according to claim 1, characterized in that: The positive loop between the first superconducting power source (101) and the first current lead (701) is provided with a first DC switch (801), the positive and negative loops between the first superconducting power source (101) and the first current lead (701) pass through a first circuit breaker (802), the positive loop between the second superconducting power source (102) and the second current lead (702) is provided with a second DC switch (803), the positive and negative loops between the second superconducting power source (102) and the second current lead (702) pass through a second circuit breaker (804), the first DC switch (801) and the second DC switch (803) are normally closed DC switches, the first circuit breaker (802) and the second circuit breaker (804) are manual circuit breakers, a group of first normally closed DC switches (805) are connected in parallel on both sides of the positive and negative poles of the first superconducting power source (101), and a group of second normally closed DC switches (806) are connected in parallel on both sides of the positive and negative poles of the second superconducting power source (102).

3. A CUSP superconducting magnet monitoring device according to claim 2, characterized in that: The quench detection circuit (810) is connected to a coil voltage lead (711) and voltage leads (712) on both sides of a current lead inside the superconducting magnet (7). The quench detection circuit (810) is connected to the first DC switch (801), the second DC switch (803), the first normally closed DC switch (805), and the second normally closed DC switch (806) via control signals from the electric control cabinet (8) and the programmable controller (2).

4. A CUSP superconducting magnet monitoring device according to claim 3, characterized in that: The electric control cabinet (8) is provided with a reset switch (821), the reset switch (821) being connected to the programmable controller (2) by a signal, and the reset switch (821) being used to reset the initial states of the first DC switch (801), the second DC switch (803), the first normally closed DC switch (805) and the second normally closed DC switch (806).

5. A CUSP superconducting magnet monitoring device according to claim 4, characterized in that: The electric control cabinet (8) is provided with a panel alarm light (824) and a panel buzzer (825), and the panel alarm light (824) and the panel buzzer (825) are connected to the programmable controller (2) through signals.

6. A CUSP superconducting magnet monitoring device according to claim 5, characterized in that: The electric control cabinet (8) is provided with a panel emergency button (823), the panel emergency button (823) is electrically connected to the programmable controller (2), and the panel emergency button (823) is used to control the active quenching of the superconducting magnet (7) through the programmable controller (2).

7. A CUSP superconducting magnet monitoring device according to claim 6, characterized in that: A remote button (829) is provided in the electric control cabinet (8), the remote button (829) is electrically connected to the programmable controller (2), and the remote button (829) is used to switch the control mode of the programmable controller (2).

8. A CUSP superconducting magnet monitoring device according to claim 7, characterized in that: A first copper block (703) and a second copper block (705) are respectively arranged outside the first current lead (701) and the second current lead (702), and a first copper block heater (704) and a second copper block heater (706) are respectively arranged on the first copper block (703) and the second copper block (705).

9. A CUSP superconducting magnet monitoring device according to claim 8, characterized in that: The current lead temperature control system (4) is electrically connected to the first copper block heater (704) and the second copper block heater (706) respectively through a temperature controller (401) to perform closed-loop control.

Images