Semiconductor key wafer transfer component (Root) detection system

Abstract

The invention discloses a semiconductor key wafer transfer part (Root) detection system, which belongs to the field of semiconductor equipment, and comprises a PLC processor unit, a touch screen display operation unit, a power supply unit and a servo driver unit, the PLC processor unit is also matched with a standard RS232 serial port, and some types of controllers and bodies are integrated together, so that the reliability of the detection system is improved. The system comprises a PLC processor unit and a touch screen display operation unit, the PLC processor unit is connected with the touch screen display operation unit, a motion test can be carried out on the Root by using a communication instruction, the power supply unit provides 24V direct current power for the whole system, the PLC processor unit also comprises Internet / IP communication, the Internet / IP communication is carried out between the PLC processor unit and the touch screen display operation unit, communication between a processor and a touch screen is completed, and system parameter change and state information display are realized. According to the method, the abnormal points of the Root can only be obtained according to known information and experience in the prior art, maintenance is carried out according to own experience, the online simulation and detection capability is increased at present, the one-time pass rate of maintenance and the support of detection data are greatly improved, and the working efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment, in particular to a semiconductor key wafer transfer component (Robot) detection system. Background Art

[0002] Each device in the semiconductor chip FAB has a key wafer transfer component (Robot). Because the Robot has been running at a high frequency, it often crashes. Robot crashes will cause the entire device to be unable to operate normally and produce products. Therefore, quick maintenance is required to reduce downtime and improve equipment utilization.

[0003] There has always been a problem that has troubled technicians during the Robot maintenance process. After a Robot breaks down, most technicians can only get the Robot but not the controller and cables, which results in the Robot being unable to be tested after repair, and ultimately increases the failure rate of the machine. In the semiconductor industry, customers have to do a lot of work before they can install the Robot, and failure to install the Robot will cause great trouble to the application end and the customer. Summary of the invention

[0004] The purpose of the present invention is to provide a semiconductor key wafer transfer component (Robot) detection system to solve the problem mentioned in the above background technology that after the Robot breaks down, most technicians can only get the Robot but cannot get the controller and cable, resulting in the inability to test the Robot after repair, which ultimately leads to an increased failure rate of the machine. In the semiconductor industry, customers have to do a lot of work to install the Robot, and failure to install the Robot will cause great trouble to the application end and customers.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a semiconductor key wafer transfer component (Robot) detection system, including a PLC processor unit, a touch screen display operation unit, a power supply unit and a servo drive unit.

[0006] As a further preferred embodiment of the present technical solution: the PLC processor unit is also equipped with a standard RS232 serial port. When encountering some models where the controller and the body are integrated together, the communication command can be used to perform motion test on the Robot;

[0007] As a further preferred embodiment of the present technical solution: the power supply unit provides 24V DC power to the entire system to support display and DC signal power consumption;

[0008] As a further preferred embodiment of the present technical solution: the PLC processor unit also includes Internet / IP communication, the PLC processor unit and the touch screen display operation unit implement Internet / IP communication, complete the communication between the processor and the touch screen, and realize the system parameter change and status information display;

[0009] As a further preferred embodiment of the present technical solution: the touch screen display operation unit can set the process of each step of the Robot operation, and the running cycle operates according to the set cycle;

[0010] As a further preferred embodiment of the present technical solution: the manual speed, automatic speed and motion acceleration and deceleration of each joint can be set in the touch screen display operation unit;

[0011] As a further preferred embodiment of the present technical solution: the touch screen display operation unit can set the time of each action interval to complete the test conditions of some instruments, such as the laser precision test instrument to complete the position repeatability test;

[0012] As a further preferred embodiment of the technical solution: the opening and closing of the solenoid valve is controlled during the operation, and the gas path is detected by analyzing the vacuum sensor (vacuum) sense, (atmosphere) signal;

[0013] As a further preferred embodiment of the present technical solution: the test tracks the abnormality, and if there is an abnormality, the time and cause of the abnormality can be found to ensure that we continue to complete the maintenance action next, and test again after the maintenance is completed;

[0014] As a further preferred embodiment of the present technical solution: after the entire system process is prepared, a 24-hour continuous stability test is performed, and a repeatability test is completed to ensure that the Robot performance test is completed.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. In the present invention, previously only the abnormal points of the Robot could be found based on the known information and experience, and maintenance was performed based on one's own experience. Now, the ability of online simulation and detection is added, which greatly improves the one-time pass rate of maintenance and the support of detection data, thereby improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of a semiconductor key wafer transfer component (Robot) detection system of the present invention;

[0018] Figure 2 The present invention is a workflow diagram of a semiconductor key wafer transfer component (Robot) detection system. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] Example

[0021] See also Figure 1-Figure 2 As shown, the present invention provides a technical solution: a semiconductor key wafer transfer component (Robot) detection system, including a PLC processor unit, a touch screen display operation unit, a power supply unit and a servo drive unit.

[0022] In this embodiment, specifically: the PLC processor unit is also equipped with a standard RS232 serial port. When encountering some models in which the controller and the body are integrated together, the communication command can be used to perform motion test on the Robot.

[0023] In this embodiment, specifically: the power supply unit provides 24V DC power to the entire system to support display and DC signal power.

[0024] In this embodiment, specifically: the PLC processor unit also includes Internet / IP communication, the PLC processor unit and the touch screen display operation unit implement Internet / IP communication, complete the communication between the processor and the touch screen, and realize system parameter changes and status information display.

[0025] In this embodiment, specifically: the process of each step of the Robot's operation can be set in the touch screen display operation unit, and the running cycle operates according to the set cycle.

[0026] In this embodiment, specifically: the manual speed, automatic speed and motion acceleration and deceleration of each joint can be set in the touch screen display operation unit.

[0027] In this embodiment, specifically: the touch screen display operation unit can set the time of each action interval to complete the test conditions of some instruments, such as a laser precision testing instrument to complete the position repeatability test.

[0028] In this embodiment, specifically: the opening and closing of the solenoid valve is controlled during operation, and the gas path is detected by analyzing the vacuum sensor (vacuum) sense, (atmosphere) signal.

[0029] In this embodiment, specifically: the test tracks the exceptions. If there are any exceptions, the time and cause of the exceptions can be found to ensure that we continue to complete the maintenance action next, and test again after the maintenance is completed.

[0030] In this embodiment, specifically: after the entire system process is prepared, a 24-hour continuous stability test is performed, and a repeatability test is completed to ensure that the Robot performance test is completed.

[0031] It should be noted that when we encounter the situation where the Robot and the controller are integrated, we can complete the control of the Robot through Internet / IP or standard RS232 communication to achieve the purpose of testing.

[0032] It should be noted that most of the robots we encounter only have a body but no controller. We can use a motor drive to complete the control of the Robot through the PLC processor through pulses or buses to achieve the purpose of testing.

[0033] In practice, when we encounter the situation where the Robot and the controller are integrated into one, all the communication methods of the third-party equipment vendors we encounter support the standard RS232 communication protocol, so we can use the Robot's instruction set to communicate with the Robot's processor through the PLC processor to accurately position the Robot and complete the purpose of the Robot control test.

[0034] In practice, when there is only an independent Robot, no matter what brand of servo or stepper motor, it can be driven by a matching driver, and then the PLC processor controls the servo driver / stepper driver by sending pulses or bus to drive the motor to control the Robot's precise positioning, so as to complete the control of the Robot and achieve the purpose of testing.

[0035] In summary, the above two methods can be used to complete the precise positioning of all types of Robots, complete the control of Robots and achieve the purpose of testing. Therefore, this development system can be used for positioning tests of Robots of various brands and types. It has the characteristics of versatility and provides us with convenient methods, which saves a lot of manpower and financial resources and improves work efficiency and the accuracy of product parameters.

[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor key wafer transfer component (Robot) detection system, characterized in that: It includes a PLC processor unit, a touch screen display operation unit, a power supply unit and a servo drive unit.

2. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: The PLC processor unit is also equipped with a standard RS232 serial port. When encountering some models where the controller and the main body are integrated together, the communication instructions can be used to perform motion tests on the Robot.

3. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: The power supply unit provides 24V DC power to the entire system, completing the support of display and DC signal power.

4. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: The PLC processor unit also includes Internet / IP communication. The PLC processor unit and the touch screen display operation unit implement Internet / IP communication to complete the communication between the processor and the touch screen, and realize system parameter changes and status information display.

5. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: The touch screen display operation unit can set the process of each step of the Robot's operation, and the running cycle operates according to the set cycle.

6. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: The touch screen display operation unit can set the manual speed, automatic speed and movement acceleration and deceleration of each joint.

7. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: The touch screen display operation unit can set the time of each action interval to complete the test conditions of some instruments, such as completing the position repeatability test of a laser precision test instrument.

8. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: During the operation, the opening and closing of the solenoid valve is controlled, and the gas path is detected by analyzing the vacuum sensor (vacuum) sense and (atmosphere) signal.

9. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: The test tracks the anomalies. If there are any anomalies, we can find out the time and cause of the anomaly to ensure that we continue to complete the maintenance action and test again after the maintenance is completed.

10. A semiconductor key wafer transfer component (Robot) detection system according to claim 1, characterized in that: After the entire system process is prepared, a 24-hour continuous stability test is carried out, and a repeatability test is completed to ensure that the Robot performance test is completed.

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