Mobile precision compensation device and micropositioner

Abstract

The invention discloses a mobile precision compensation device and a micropositioner, and relates to the technical field of instrument calibration, the mobile precision compensation device comprises a base, a top plate, a sliding assembly, an adsorption assembly and piezoelectric ceramics, one end of the sliding assembly is connected with the base, and the other end of the sliding assembly is connected with the top plate; one end of the adsorption assembly is connected with the top plate, and the other end of the adsorption assembly is movably arranged on the base; the piezoelectric ceramic is arranged on one side of the adsorption assembly, and the piezoelectric ceramic is used for pushing the adsorption assembly to drive the top plate to move on the base through deformation. According to the technical scheme, the precision of the micropositioner is improved, meanwhile, the limitation of an existing micropositioner in the aspects of precision and performance is overcome, and the stability and reliability of the whole system are remarkably improved.

Description

Technical Field

[0001] The invention relates to the technical field of instrument calibration, and in particular to a mobile precision compensation device and a micro-motion stage. Background Art

[0002] Micro-motion systems are widely used in high-precision equipment, mainly for positioning compensation of coarse motion stages, so they have extremely high requirements for positioning accuracy and response speed. To achieve this requirement, high-precision guide mechanisms and drive mechanisms are required to ensure the stability and reliability of the system.

[0003] In the current existing technology, the motor resolution of the micro-motion stage is low, the minimum step length is large, and the adjustable stroke is small. There are obvious limitations in terms of structural miniaturization, high-precision long-stroke positioning, and simple control. As a result, the overall positioning accuracy of the micro-motion stage is insufficient, which in turn affects its work efficiency and is difficult to meet the needs of high-precision applications. Summary of the invention

[0004] The main purpose of the present invention is to propose a mobile precision compensation device and a micro-motion stage, aiming to solve the obvious limitations of the micro-motion stage in the prior art in terms of structural miniaturization, high-precision long-stroke positioning and simple control, which leads to insufficient overall positioning accuracy of the micro-motion stage and thus affects its working efficiency.

[0005] To achieve the above object, the present invention proposes a mobile precision compensation device, the mobile precision compensation device comprising: Base and top plate; A sliding assembly, one end of which is connected to the base, and the other end of which is connected to the top plate; An adsorption component, one end of which is connected to the top plate, and the other end of which is movably disposed on the base; A piezoelectric ceramic, wherein the piezoelectric ceramic is arranged on one side of the adsorption component, and the piezoelectric ceramic is used to push the adsorption component to drive the top plate to move on the base through deformation. In one embodiment, the mobile precision compensation device further includes a controller, which is electrically connected to the piezoelectric ceramic. The controller is used to control the voltage value of the piezoelectric ceramic, and the piezoelectric ceramic is used to adjust the stroke value of the top plate according to the voltage value.

[0006] In one embodiment, the controller includes a high-precision mode. When the controller enters the high-precision mode, the voltage value is controlled to gradually increase and / or gradually decrease within a preset period.

[0007] In one embodiment, the controller further includes a large stroke mode. When the controller enters the large stroke mode, the voltage value is controlled to gradually increase or decrease from 0 to a preset voltage within a preset period, and then the voltage value is instantly reduced to 0.

[0008] In one embodiment, the mobile precision compensation device further includes a calculation module, which is connected to the control module by signal, and is used to obtain the error stroke and calculate the actual stroke according to the error stroke and the stroke value.

[0009] In one embodiment, the adsorption assembly comprises: A flexible connector, wherein the flexible connector is disposed on the base; A magnetic member is arranged on the flexible connecting member.

[0010] A first adjusting rod, the bottom of the flexible connecting member has a mounting hole, the bottom of the magnetic member has a threaded hole, the first adjusting rod passes through the mounting hole and is threadedly connected with the threaded hole, and the first adjusting rod is used to adjust the preload force between the magnetic member and the top plate.

[0011] In one embodiment, the sliding assembly includes two slide rails, the two slide rails are arranged opposite to each other on two sides of the base, and the two ends of the top plate are respectively connected to the two slide rails.

[0012] In one embodiment, the slide rail includes an active rod and a driven rod slidably disposed on the active rod, the active rod is connected to the base, and the driven rod is connected to the top plate.

[0013] In one embodiment, the sliding assembly further includes a second adjustment rod, and an adjustment hole is provided on the side wall of the base, and the second adjustment rod is inserted into the adjustment hole; The position of the adjustment hole corresponds to the position of the slide rail, and the second adjustment rod is used to adjust the position of the slide rail.

[0014] The present invention also proposes a micro-motion stage, which includes multiple movable precision compensation devices as described above, wherein the base of the first movable precision compensation device is installed on the top plate of the next movable precision compensation device, and so on, so as to compensate for stroke values ​​in multiple different directions.

[0015] The technical solution of the present invention controls the voltage value applied to the piezoelectric ceramic, and compresses the adsorption component through the ceramic voltage deformation, thereby driving the top plate to slide on the base, achieving high-precision reciprocating motion and large-stroke motion. While improving the precision of the micro-motion stage, it overcomes the limitations of the existing micro-motion stage in terms of precision and performance, and significantly improves the stability and reliability of the overall system. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 A schematic diagram of the explosion structure of the mobile precision compensation device provided by the present invention; Figure 2 A schematic diagram of the assembly structure of the mobile precision compensation device provided by the present invention; Figure 3 This is a schematic diagram of the displacement formation of the mobile precision compensation device provided by the present invention.

[0018] Description of Figure Numbers: 10. Top plate; 20. Base; 21. Mounting hole; 22. Adjustment hole; 30. Slide rail; 31. Active rod; 32. Driven rod; 40. Adsorption assembly; 41. Flexible connector; 42. Magnetic member; 43. First adjustment rod; 44. Second adjustment rod; 50. Piezoelectric ceramic; 60. Third adjustment rod.

[0019] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0022] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0023] The invention provides a mobile precision compensation device.

[0024] See also Figure 1 In one embodiment of the present invention, the mobile precision compensation device includes a base 20, a top plate 10, a sliding component, an adsorption component 40 and a piezoelectric ceramic 50, one end of the sliding component is connected to the base 20, and the other end is connected to the top plate 10; one end of the adsorption component 40 is connected to the top plate 10, and the other end is movably arranged on the base 20; the piezoelectric ceramic 50 is arranged on one side of the adsorption component 40, and the piezoelectric ceramic 50 is used to push the adsorption component 40 to drive the top plate 10 to move on the base 20 through deformation.

[0025] The sliding assembly is arranged on the top of the base 20, and the bottom surface of the top plate 10 is connected to the sliding assembly. The top plate 10 can reciprocate on the base 20 through the sliding assembly. The top surface of the top plate 10 is a flat surface. A plurality of connection holes are arranged on the top surface of the top plate 10.

[0026] The fine motion stage includes a plurality of movable precision compensation devices. Therefore, in this embodiment, when the plurality of movable precision compensation devices are combined into a fine motion stage, the base 20 of the first movable precision compensation device can be installed in the top surface connection hole of the top plate 10 of the second movable precision compensation device, and so on, the base 20 of the second movable precision compensation device can be installed in the top surface connection hole of the top plate 10 of the third movable precision compensation device.

[0027] A spatial coordinate system is established, and the positions of the three mobile precision compensation devices are adjusted respectively so that the movement directions of the top plate 10 driven by the three sliding components correspond to the X, Y, and Z axes respectively, thereby achieving a three-dimensional precision movement compensation effect through the stacking structure.

[0028] In addition, the micro-motion stage of the present invention includes but is not limited to the above-mentioned solutions. In order to meet more different requirements, the number of mobile precision compensation devices can be further increased, and by adjusting their installation positions and the driving direction of the sliding components, the mobile compensation adjustment in more different directions can be achieved at the same time, thereby improving the compatibility and ease of use of the micro-motion stage.

[0029] See also Figure 1 and Figure 2 An adsorption assembly 40 is further provided between the base 20 and the top plate 10 . The bottom of the adsorption assembly 40 is connected to the base 20 , and the top is connected to the top plate 10 by adsorption.

[0030] Specifically, the adsorption method of the adsorption component 40 can be to adsorb on the bottom surface of the top plate 10 through a suction cup, and use a hose and a vacuum generator and other equipment to form negative pressure on the suction cup so that it is tightly adsorbed on the bottom surface of the top plate 10. In addition, the adsorption component 40 can use a magnetic member 42, such as a magnet, and the top plate 10 is made of iron, so that the magnetic member 42 is adsorbed on the bottom surface of the top plate 10.

[0031] In this embodiment, the adsorption component 40 adopts the magnetic member 42 as an example for description. The adsorption component 40 includes a flexible connector 41 and a magnetic member 42. The flexible connector 41 is installed on the base 20. The flexible connector 41 has a mounting hole 21. The magnetic member 42 has a disc-shaped top and a connecting rod extending downward at the bottom. The connecting rod can be inserted into the mounting hole 21.

[0032] The piezoelectric ceramic 50 is arranged on one side of the flexible connector 41 and connected to the flexible connector 41. For example, the piezoelectric ceramic 50 can be connected by glue, screws, buckles, etc. The piezoelectric ceramic 50 is connected to an external power source through a signal line. When the power source applies voltage to the piezoelectric ceramic 50, the volume of the piezoelectric ceramic 50 will gradually increase or decrease.

[0033] As the volume of the piezoelectric ceramic 50 gradually increases, the flexible connector 41 is squeezed and the magnetic member 42 is driven to move. As the volume of the piezoelectric ceramic 50 gradually decreases, the flexible connector 41 is dragged back and the magnetic member 42 is driven to move. The movement of the magnetic member 42 drives the top plate 10 to move on the base 20 by the adsorption force.

[0034] By adjusting the voltage value, the volume transformation of the piezoelectric ceramic 50 can be precisely controlled, and then the stroke value of the top plate 10 moving on the base 20 can be precisely controlled, and the displacement compensation can be achieved using the stroke value.

[0035] It should be noted that adjusting the volume of the piezoelectric ceramic 50 by controlling the voltage is a mature technical means in the prior art and will not be described in detail here.

[0036] The technical solution of the present invention controls the voltage value applied to the piezoelectric ceramic 50, and compresses the adsorption component 40 through the ceramic voltage deformation, thereby driving the top plate 10 to slide on the base 20, thereby achieving high-precision reciprocating motion and large-stroke motion. While improving the precision of the micro-motion stage, it overcomes the limitations of the existing micro-motion stage in terms of precision and performance, and significantly improves the stability and reliability of the overall system.

[0037] For further information, see Figure 1 The bottom of the connecting rod formed by the downward extension of the magnetic member 42 has a threaded hole, and the adsorption assembly 40 also includes a first adjustment rod 43. The first adjustment rod 43 can be an adjustment screw, which is screwed into the first adjustment rod 43 through the mounting hole 21. By tightening or loosening the first adjustment rod 43, the pre-tightening force between the magnetic member 42 and the top plate 10 can be adjusted to ensure that the magnetic member 42 provides a certain load capacity while maintaining the smooth movement of the top plate 10.

[0038] Please continue reading Figure 1 The sliding assembly includes two slide rails 30 , which are relatively arranged on both sides of the base 20 , and both ends of the top plate 10 are respectively connected to the two slide rails 30 .

[0039] The slide rail 30 adopts a cross roller guide rail, and includes an active rod 31 and a driven rod 32 slidably arranged on the active rod 31, the active rod 31 is connected to the base 20, and the driven rod 32 is connected to the top plate 10. The active rod 31 and the driven rod 32 slide relative to each other, so that the top plate 10 can reciprocate on the base 20.

[0040] See also Figure 1 , the inner wall of the two side edges of the base 20 is in a stepped structure, then the slide rail 30 is installed at the stepped position, and the adjustment holes 22 are set on the two side outer walls of the base 20 at the positions corresponding to the stepped structure, and the second adjustment rod 44 is inserted into the adjustment hole 22, and the second adjustment rod 44 can also be an adjustment screw, which is screwed into the second adjustment hole 22. It should be noted that the first adjustment rod 43 and the second adjustment hole 22 are arranged perpendicular to each other, that is, the second adjustment rod 44 is used to adjust the balance of the slide rail 30 to keep the two slide rails 30 parallel, or adjust the distance between the two slide rails 30, etc.

[0041] Furthermore, the present embodiment further includes a controller to adjust the voltage value applied to the piezoelectric ceramic 50 , and further adjust the stroke value of the top plate 10 driven by the piezoelectric ceramic 50 according to the voltage value.

[0042] Specifically, the controller includes two modes, namely, a high-precision mode and a long-stroke mode.

[0043] When entering the high-precision mode, the controller is used to control the voltage value applied to the piezoelectric ceramic 50 to gradually increase and / or gradually decrease within a preset period. Figure 3 First, when the piezoelectric ceramic 50 is not powered, the voltage value is 0. Assuming the preset period is t, the voltage value applied to the piezoelectric ceramic 50 is gradually increased from 0 to m within the first preset period t, and the volume of the piezoelectric ceramic 50 increases, and squeezes the magnetic part 42 to move to the right by Δs, that is, the stroke value of driving the top plate 10 to move to the right is Δs. In the second preset period t, the voltage value is gradually decreased from m to 0, and the top plate 10 returns to its original position, and in the third preset period t, the voltage value is gradually decreased from 0 to -m, thereby dragging the magnetic part 42 back to the left by Δs. In the last preset period t, the voltage value is gradually increased from -m to 0. In addition, in the high-precision mode, the voltage value can also be directly decreased from 0 to -m within the first preset period t.

[0044] It should be noted that, in this embodiment, the duration of each cycle can be the same or different. For example, the first cycle can be set to t, and the second cycle can be set to any other duration different from t. The voltage value can also be adjusted according to demand. Alternatively, the voltage value can be controlled to be maintained at m, so as to keep the position of the top plate 10 unchanged.

[0045] In this embodiment, due to the high-precision deformation of the piezoelectric ceramic 50 and the effectiveness of motion transmission, after multiple scanning cycles, the deviation between the final position of the top plate 10 and the initial position is extremely small.

[0046] Please continue reading Figure 3 , when the controller enters the large stroke mode, similarly, the voltage value of the piezoelectric ceramic 50 is 0 when it is not powered on, and it is assumed that the preset period is t. The controller adjusts the voltage value applied to the piezoelectric ceramic 50 in the form of a sawtooth wave. That is, within the preset period t, the voltage value is controlled to gradually increase from 0 to m, and the volume of the piezoelectric ceramic 50 increases to squeeze the magnetic part 42 to move to the right. The stroke value is S, and when the voltage value reaches m, the voltage value is instantly reset to zero. The piezoelectric ceramic 50 quickly returns to the initial state. By adjusting the pre-tightening force between the magnetic part 42 and the top plate 10, the static friction between the magnetic part 42 and the top plate 10 is instantly converted into dynamic friction after the magnetic part 42 returns to the initial position with the piezoelectric ceramic 50. Since the dynamic friction of the top plate 10 is less than the static friction, the top plate 10 can remain in the position of the rightward movement stroke value S. Subsequently, the voltage value is controlled to gradually increase from 0 to m within the preset period t, further driving the top plate 10 to move to the right, and realizing the large stroke displacement compensation of the top plate 10.

[0047] However, in practice, due to the transformation of static friction and dynamic friction and the influence of magnetic attraction, the top plate 10 may have a very small recoil displacement, that is, after the voltage value of the piezoelectric ceramic 50 is instantly reduced to 0, the top plate 10 has a leftward retreat error stroke Δs'. The error stroke Δs' can be obtained through actual measurement of the instrument.

[0048] Therefore, the present embodiment also includes a calculation module, assuming that the net displacement generated by the sawtooth wave driving of each preset period t is Δs, that is, the actual stroke Δs. Then Δs=S-Δs', after providing n preset periods, the cumulative displacement of the top plate 10 is n*(S-Δs'). Theoretically, the limit displacement is only limited by the stroke of the selected sliding component, so high-precision positioning under millimeter-level stroke can be achieved.

[0049] The present invention further proposes a micro-motion stage, which includes a plurality of movable precision compensation devices as described above, wherein the base 20 of the first movable precision compensation device is installed on the top plate 10 of the next movable precision compensation device, and so on, so as to compensate for the stroke values ​​in multiple different directions. The specific structure of the movable precision compensation device refers to the above-mentioned embodiment. Since the present micro-motion stage adopts all the technical solutions of all the above-mentioned embodiments, it has at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be described one by one here.

[0050] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A mobile precision compensation device, characterized in that: The mobile precision compensation device comprises: Base and top plate; A sliding assembly, one end of which is connected to the base, and the other end of which is connected to the top plate; An adsorption component, one end of which is connected to the top plate, and the other end of which is movably disposed on the base; The piezoelectric ceramic is arranged on one side of the adsorption component, and is used to push the adsorption component to drive the top plate to move on the base through deformation.

2. The mobile precision compensation device according to claim 1, characterized in that: The mobile precision compensation device also includes a controller, which is electrically connected to the piezoelectric ceramic. The controller is used to control the voltage value of the piezoelectric ceramic, and the piezoelectric ceramic is used to adjust the stroke value of the top plate according to the voltage value.

3. The mobile precision compensation device according to claim 2, characterized in that: The controller includes a high-precision mode. When the controller enters the high-precision mode, the voltage value is controlled to gradually increase and / or gradually decrease within a preset period.

4. The mobile precision compensation device according to claim 2, characterized in that: The controller also includes a large stroke mode. When the controller enters the large stroke mode, the voltage value is controlled to gradually increase or decrease from 0 to a preset voltage within a preset period, and then the voltage value is instantly reduced to 0.

5. The mobile precision compensation device according to claim 2, characterized in that: The mobile precision compensation device also includes a calculation module, which is connected to the control module by signal. The calculation module is used to obtain the error stroke and calculate the actual stroke according to the error stroke and the stroke value.

6. The mobile precision compensation device according to claim 1, characterized in that: The adsorption assembly comprises: A flexible connector, wherein the flexible connector is disposed on the base; A magnetic member, wherein the magnetic member is arranged on the flexible connecting member; A first adjusting rod, the bottom of the flexible connecting member has a mounting hole, the bottom of the magnetic member has a threaded hole, the first adjusting rod passes through the mounting hole and is threadedly connected with the threaded hole, and the first adjusting rod is used to adjust the preload force between the magnetic member and the top plate.

7. The mobile precision compensation device according to claim 1, characterized in that: The sliding assembly comprises two slide rails, which are arranged oppositely on two sides of the base, and the two ends of the top plate are respectively connected to the two slide rails.

8. The mobile precision compensation device according to claim 7, characterized in that: The slide rail comprises an active rod and a driven rod slidably arranged on the active rod, the active rod is connected to the base, and the driven rod is connected to the top plate.

9. The mobile precision compensation device according to claim 7, characterized in that: The sliding assembly further includes a second adjusting rod, and the side wall of the base is provided with an adjusting hole, and the second adjusting rod is inserted into the adjusting hole; The position of the adjustment hole corresponds to the position of the slide rail, and the second adjustment rod is used to adjust the position of the slide rail.

10. A micro-motion stage, characterized in that: The micro-motion stage comprises a plurality of movable precision compensation devices as described in any one of claims 1 to 9, wherein the base of the first movable precision compensation device is mounted on the top plate of the next movable precision compensation device, and so on, so as to compensate for stroke values ​​in a plurality of different directions.

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