A semiconductor equipment parts cleaning spraying device

Abstract

The present invention relates to the field of semiconductor melt spraying technology, and in particular to a semiconductor equipment component cleaning melt spraying device. It comprises: a frame, the frame is equipped with a transmission device and a first electric slide rail, the first electric slide rail is slidably connected to a first electric slider, the first electric slider is slidably connected to a sliding block, and the sliding block is rotatably connected to a mounting block; a melt spraying nozzle, mounted on the mounting block; a first mounting frame, rotatably connected to the outside of the melt spraying nozzle, the first mounting frame is equipped with a first electric push rod, and the telescopic end of the first electric push rod is fixedly connected to a second mounting frame; a shielding plate, fixedly connected to the second mounting frame. When the melt spraying nozzle sprays the edge of the workpiece, the present invention uses a shielding plate to shield the spraying range of the melt spraying nozzle, and guides the molten material sprayed by the melt spraying nozzle, thereby reducing the amount of molten material wasted by the melt spraying nozzle, thereby improving the utilization rate of the molten material.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor melt spraying, and in particular to a semiconductor equipment component cleaning melt spraying device. Background Art

[0002] During the production process of semiconductor equipment components, it is usually necessary to use a melt spraying device to form a protective coating on the outer surface of the semiconductor equipment components. The melt spraying device uses high-pressure gas to spray molten or semi-molten materials onto the semiconductor equipment components at high speed, thereby improving the wear resistance, corrosion resistance and thermal stability of the semiconductor equipment components, and improving the performance of the semiconductor equipment components. In order to increase the uniformity of the material sprayed by the melt spraying nozzle, the nozzle is usually designed with a certain divergence angle so that the molten material sprayed from the melt spraying nozzle is distributed in a cone shape, thereby expanding the coverage area of ​​the melt spraying. However, when the melt spraying nozzle sprays to the edge of the semiconductor equipment component, in order to ensure the uniformity of the spraying, the axis of the melt spraying nozzle must be moved to a position perpendicular to the edge of the semiconductor equipment component, and then the melt spraying nozzle can move in other directions to spray the edge of the semiconductor equipment component, which will undoubtedly result in a large amount of molten material not being sprayed onto the surface of the semiconductor equipment component, resulting in a waste of molten material. Summary of the invention

[0003] In order to overcome the disadvantage that a large amount of material is not sprayed onto the surface of semiconductor equipment components when the existing melt spraying nozzle sprays to the edge of the semiconductor equipment components, resulting in material waste, the present invention proposes a melt spraying device for cleaning semiconductor equipment components.

[0004] The technical implementation scheme of the present invention is: a semiconductor equipment component cleaning melt spraying device, comprising: A frame, wherein the frame is equipped with a transmission device and a first electric slide rail, the first electric slide rail is slidably connected to a first electric slider, the first electric slider is slidably connected to a sliding block, and the sliding block is rotatably connected to a mounting block; A spray nozzle is installed on the mounting block; A first mounting frame is rotatably connected to the outer side of the spray nozzle, the first mounting frame is equipped with a first electric push rod, and the telescopic end of the first electric push rod is fixedly connected to the second mounting frame; A shielding plate, fixedly connected to the second mounting frame, the shielding plate is used to guide the molten material sprayed from the spray nozzle; A driving mechanism, disposed on the spray nozzle, for changing the position of the shielding plate relative to the spray nozzle; The cleaning mechanism is arranged on the frame and is used for pre-cleaning the workpiece.

[0005] Furthermore, the first electric push rod, the second mounting frame and the shielding plate are all arranged at an angle, and the angles between the three and the vertical direction are all less than 30°.

[0006] Furthermore, the driving mechanism comprises: There are a plurality of laser probes, all mounted on the first mounting frame; A first motor is mounted on the outer side of the spray nozzle, the first mounting frame is fixedly connected to a fixed gear ring, and an output shaft of the first motor is fixedly connected to a gear meshing with the fixed gear ring; A fine-tuning component is arranged on the first electric slider and is used to change the orientation of the spray nozzle.

[0007] Furthermore, the fine-tuning component includes: An electric rotating shaft is mounted on the sliding block, and the electric rotating shaft is fixedly connected to the mounting block; The second electric push rod is installed on the first electric sliding block, and the telescopic end of the second electric push rod is fixedly connected to the sliding block.

[0008] Furthermore, the cleaning mechanism includes: A second electric slide rail is installed on the frame, the second electric slide rail is slidably connected to a second electric slider, and the second electric slider is fixed to a fixing plate; A mounting shell, rotatably connected to the fixing plate, the mounting shell being provided with high-pressure water spray heads distributed at intervals; A dryer, mounted on the frame, the dryer being located between the first electric slide rail and the second electric slide rail; An angle changing component, disposed on the fixing plate, for changing the angle at which the high-pressure water spray head sprays water; The centering component is arranged on the frame and is used for fixing the workpiece.

[0009] Furthermore, the angle conversion component includes: An extrusion bar is slidably connected to the fixed plate, and a spring is installed between the two. The high-pressure water spray head is fixedly connected to an extrusion block, and the extrusion bar is used to squeeze the extrusion block and the high-pressure water spray head to rotate to an inclined state; There are two squeezing rods, which are respectively fixed to the two sides of the frame. The squeezing rods are used to squeeze the squeezing block and the high-pressure water spray head to rotate in opposite tilting directions.

[0010] Furthermore, the centering component includes: The third electric slide rail has two symmetrically distributed rails, both of which are mounted on the frame, and the third electric slide rail is slidably connected to a third electric slider; The electric clamps have two symmetrically distributed ones, which are respectively installed on the third electric slide blocks adjacent to the third electric slide rail.

[0011] Furthermore, it also includes: There are a plurality of fixing rods, all of which are fixedly connected to the outer side of the shielding plate. The shielding plate is made of a flexible metal material. The fixing rods are used to limit the bending deformation of the shielding plate in the vertical direction.

[0012] Furthermore, it also includes: A changing mechanism, disposed on the second mounting frame, for changing the shielding range of the shielding plate, the changing mechanism comprising: There are two sliding rods, which are respectively fixed to the two outermost fixed rods of the shielding plate, and the sliding rods are slidably connected to the second mounting frame, and a first elastic member is installed between the two; The second motor has two parts, both of which are fixedly connected to the second mounting frame. The output shaft of the second motor is fixedly connected to a winding shaft, and a steel wire rope is wound around the winding shaft. The steel wire rope of the winding shaft is fixedly connected to the adjacent fixing rod.

[0013] Furthermore, except for the fixing rod fixedly connected to the sliding rod, a second elastic member is fixedly connected between the other fixing rods and the winding shaft.

[0014] The present invention has the following advantages: when the melt-spraying nozzle sprays the edge of the workpiece, the shielding plate is used to shield the spraying range of the melt-spraying nozzle and guide the molten material sprayed by the melt-spraying nozzle, thereby reducing the amount of molten material wasted by the melt-spraying nozzle and improving the utilization rate of the molten material.

[0015] The present invention controls the spraying nozzle through the electric rotating shaft and the second electric push rod to spray the groove part and the inclined surface in the workpiece more smoothly, thereby improving the uniformity of the device spraying the groove part and the inclined surface of the workpiece.

[0016] The present invention adjusts the direction of the high-pressure water spray head by an extrusion rod, and locks the direction of the high-pressure water spray head by an extrusion bar and an extrusion block, so that the direction of the high-pressure water spray head is always the same as its moving direction, and then the surface of the workpiece is cleaned by an inclined water flow, thereby increasing the probability of molten material adhering to the surface of the workpiece.

[0017] The present invention controls the bending of both sides of the shielding plate through a second motor, and adjusts the shielding range of the shielding plate according to the position of the spray nozzle, so that the shielding plate can make different changes in response to different working conditions, thereby increasing the application scope of the device and further increasing the utilization rate of the molten material by the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a schematic diagram of the three-dimensional structure of the frame, the transmission device and the first electric slide rail of the present invention; Figure 3 It is a three-dimensional structural schematic diagram of the transmission device, the first electric slide rail and the drying machine of the present invention; Figure 4 It is a schematic diagram of the three-dimensional structure of the first electric slide rail, the sliding block and the spray nozzle of the present invention; Figure 5 It is a three-dimensional structural schematic diagram of the sliding block, the mounting block and the spray nozzle of the present invention; Figure 6 It is a schematic diagram of the three-dimensional structure of the spray nozzle, the first mounting frame and the first electric push rod of the present invention; Figure 7 It is a cross-sectional view of the spray nozzle, the first mounting frame and the fixed gear ring of the present invention; Figure 8 It is a schematic diagram of the three-dimensional structure of the first electric push rod, the second mounting frame and the shielding plate of the present invention; Fig. 9 It is a schematic diagram of the three-dimensional structure of the second mounting frame, the shielding plate and the fixing rod of the present invention; Fig.10 It is a three-dimensional structural schematic diagram of the extrusion rod, the third electric slide rail and the electric clamping claw of the present invention; Fig.11 It is a schematic diagram of the three-dimensional structure of the second electric slide rail, the second electric slide block and the fixing plate of the present invention; Fig.12 It is a three-dimensional structural schematic diagram of the fixing plate, the mounting shell and the high-pressure sprinkler head of the present invention; Fig.13 It is a cross-sectional view of the fixing plate, the mounting shell and the extruded strip of the present invention.

[0019] The meanings of the reference numerals in the figure are as follows: 1: frame, 101: containing shell, 102: picking platform, 2: transmission device, 3: first electric slide rail, 301: first electric slider, 4: sliding block, 401: mounting block, 5: spray nozzle, 6: first mounting frame, 7: first electric push rod, 8: second mounting frame, 9: shielding plate, 10: laser probe, 11: first motor, 12: fixed gear ring, 13: electric rotating shaft, 14: second electric push rod, 15: fixed rod, 16: sliding rod, 161: first elastic member, 17: second motor, 18: winding shaft, 19: second elastic member, 20: second electric slide rail, 201: second electric slider, 21: fixed plate, 22: mounting shell, 23: high-pressure water spray head, 24: extrusion bar, 25: extrusion block, 26: extrusion rod, 27: third electric slide rail, 28: electric clamp, 29: dryer. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] A semiconductor equipment component cleaning spraying device, such as Figure 1-Figure 8 As shown, it includes: a frame 1, on which a transmission device 2 and a first electric slide rail 3 are installed, the first electric slide rail 3 is slidably connected to a first electric slider 301, the first electric slider 301 is slidably connected to a sliding block 4, and the sliding block 4 is rotatably connected to a mounting block 401; a spray nozzle 5 is installed on the lower side of the mounting block 401; a first mounting frame 6 is rotatably connected to the outer side of the spray nozzle 5, the first mounting frame 6 is installed with a first electric push rod 7, and the telescopic end of the first electric push rod 7 is fixedly connected to a second mounting frame 8; a baffle plate 9 is fixedly connected to the second mounting frame 8, and the baffle plate 9 is used to guide the molten material sprayed by the spray nozzle 5; a driving mechanism is arranged on the spray nozzle 5, and is used to change the position of the baffle plate 9 relative to the spray nozzle 5; a cleaning mechanism is arranged on the frame 1, and is used to pre-clean the workpiece.

[0022] Furthermore, if Figure 5-Figure 8 As shown, the first electric push rod 7, the second mounting frame 8 and the shielding plate 9 are all arranged at an angle, and the angles between the three and the vertical direction are all less than 30°.

[0023] The above scheme aims to address the problem that when the existing spray nozzle 5 sprays to the edge of the semiconductor device component, a large amount of material is not sprayed onto the surface of the semiconductor device component, resulting in a large amount of material being wasted; the frame 1 is equipped with a containing shell 101 and a pickup table 102, the containing shell 101 is used to hold the material to be sprayed, and the pickup table 102 is used to hold the material after spraying; the transmission device 2 is an existing device, the transmission device 2 can be any type of plate conveyor belt, and the transmission device 2 can adopt a slow and continuous operation mode, or it can adopt an indirect start-up to drive the workpiece to move indirectly. In this scheme, the transmission device 2 adopts a slow and continuous operation mode, and the outer sides of the first electric slide rail 3 and the cleaning mechanism are provided with a closed shell to prevent the molten material or high-pressure water flow from accidentally spraying to the outside of the device. The transmission device 2, the first electric slide rail 3, the spray nozzle 5, the first electric The push rod 7, the driving mechanism and the cleaning mechanism are all electrically connected to the control terminal; the spray nozzle 5 is connected to an external melting device, which is used to transport molten material into the spray nozzle 5; the first electric push rod 7 and the baffle plate 9 have the same inclination angle, and the angle between the two and the vertical direction is about 20°, ensuring that when the molten material sprayed from the spray nozzle 5 contacts the baffle plate 9, the angle between the two is small, thereby improving the effect of the baffle plate 9 on guiding the molten material. In the initial state, when the telescopic end of the first electric push rod 7 is not extended, the lowermost side of the baffle plate 9 is flush with the lowermost side of the spray nozzle 5, and the lowermost sides of the two are in contact with each other. When the telescopic end of the first electric push rod 7 is extended to the longest state (the telescopic end of the first electric push rod 7 is in a fully extended state), the uppermost side of the baffle plate 9 is in contact with the lowermost side of the spray nozzle 5, thereby ensuring the effectiveness of the baffle plate 9 in guiding the spray nozzle 5 to spray the molten material.

[0024] The working process is as follows: when the staff is preparing to perform melt spraying on the semiconductor device components (workpieces), they first place the workpiece to be sprayed on the containing shell 101, and then the staff starts the transmission device 2 through the control terminal. The staff places the workpiece to be sprayed on the transmission device 2 in turn, and the transmission device 2 drives the workpiece to be sprayed thereon to move slowly to the right.

[0025] During the process of the workpiece to be sprayed moving to the right, it first enters the cleaning mechanism, which cleans the workpiece to be sprayed to remove oil and fine dust on the workpiece to be sprayed to prevent the oil and fine dust from affecting the spraying effect of the workpiece. After the workpiece to be sprayed is cleaned, the transmission device 2 continues to transport the workpiece to be sprayed to the right, and the cleaning mechanism dries the workpiece to be sprayed during its movement.

[0026] After the sprayed workpiece is dried, it continues to move to the right driven by the transmission device 2, and the right side of the workpiece to be sprayed gradually moves to the bottom of the spray nozzle 5. At this time, the control terminal starts the first electric slide rail 3 and the external melting device. The melting device supplies molten material to the spray nozzle 5. The first electric slide rail 3 controls the first electric slider 301 thereon to slide back and forth. The spray nozzle 5 sprays the molten material downward, so that the molten material gradually and evenly adheres to the surface of the workpiece moving to the right, completing the spraying of the workpiece.

[0027] When the spray nozzle 5 just starts to spray the workpiece, the right side of the workpiece is just below the spray nozzle 5. At this time, the molten material sprayed from the right side of the spray nozzle 5 will be wasted. The control terminal controls the driving mechanism to rotate the first electric push rod 7, the second mounting bracket 8 and the shielding plate 9 to the right side of the spray nozzle 5. The control terminal simultaneously controls the telescopic end of the first electric push rod 7 to extend downward, and the second mounting bracket 8 and the shielding plate 9 move together with the telescopic end of the first electric push rod 7. The upper part of the shielding plate 9 moves to the lower right side of the spray nozzle 5, and the shielding plate 9 shields the right part of the spraying range of the spray nozzle 5. At this time, the molten material sprayed from the right side of the spray nozzle 5 first contacts with the shielding plate 9 driven by the airflow. The molten material is then gradually deflected to the left under the guidance of the baffle plate 9, and the molten material finally hits the edge of the right side of the workpiece to reduce the waste of molten material. Because the amount of molten material contacted by the right edge of the workpiece is increased compared to its center position, the control terminal slightly increases the moving speed of the first electric slider 301 at this time. When the spray nozzle 5 has finished spraying the right edge of the workpiece (that is, the spraying range of the spray nozzle 5 will no longer cover the right edge of the workpiece), the control terminal restores the moving speed of the first electric slider 301, thereby ensuring that the thickness of the molten material sprayed on the right edge of the workpiece and the thickness of the molten material sprayed on the middle position of the workpiece are in a relatively uniform state.

[0028] When the spray nozzle 5 has finished spraying the right edge of the workpiece, the control terminal controls the driving mechanism and the first electric push rod 7 to drive the baffle plate 9 to move and reset, and the baffle plate 9 no longer blocks the spraying range of the spray nozzle 5. Then the spray nozzle 5 continues to spray the middle area of ​​the workpiece. When the spray nozzle 5 moves to the edge positions of the front and back sides and the left side of the workpiece, the control terminal drives the baffle plate 9 to move to the edge position of the workpiece through the driving mechanism and the first electric push rod 7 according to the same principle as above. The baffle plate 9 limits the area where the spray nozzle 5 sprays the molten material according to the same principle to reduce the waste of molten material. During the operation of the baffle plate 9, the control terminal also slightly increases the moving speed of the first electric slider 301 to ensure that the thickness of the material sprayed at the front and back sides and the left edge of the workpiece is relatively uniform with the thickness of the material sprayed at the middle of the workpiece, thereby maintaining the uniformity of the coating on the workpiece.

[0029] When the workpiece is completely sprayed, the workpiece is gradually moved to the pickup platform 102 driven by the transmission device 2. The staff takes the sprayed workpiece off the transmission device 2 and temporarily stores it at the pickup platform 102. When the workpieces piled up at the pickup platform 102 accumulate to a certain number, the staff removes the workpieces in batches. When all the workpieces are sprayed, the staff closes the cleaning mechanism, the transmission device 2 and the spray nozzle 5.

[0030] Furthermore, if Figure 5-Figure 7 As shown, the driving mechanism includes: a plurality of laser probes 10, all mounted on the first mounting frame 6; a first motor 11, mounted on the outer side of the spray nozzle 5, the first mounting frame 6 is fixedly connected with a fixed gear ring 12, and the output shaft of the first motor 11 is fixedly connected with a gear meshing with the fixed gear ring 12; a fine-tuning component, arranged on the first electric slider 301, for changing the direction of the spray nozzle 5.

[0031] Furthermore, if Figure 5 and Figure 6 As shown, the fine-tuning component includes: an electric shaft 13 installed on the sliding block 4, and the electric shaft 13 is fixedly connected to the mounting block 401; a second electric push rod 14 is installed on the first electric slider 301, and the telescopic end of the second electric push rod 14 is fixedly connected to the sliding block 4.

[0032] In the above scheme, the laser probe 10 is an existing device. The laser probe 10 detects the thickness of the workpiece through the laser ranging principle, and then determines whether the first electric slider 301 moves to a position close to the edge of the workpiece. A total of four laser probes 10 are installed, and the four laser probes 10 are evenly distributed circumferentially on the outside of the spray nozzle 5; the first motor 11 is a small servo motor, and the first motor 11 drives the fixed gear ring 12 to rotate through the gear on its output shaft, and then rotates the fixed gear ring 12 and the first mounting frame 6 to different positions; the electric shaft 13, the second electric push rod 14, the first motor 11 and the laser probe 10 are all electrically connected to the control terminal.

[0033] The working process is as follows: when the workpiece moves to the right, when the workpiece passes through the laser probes 10 on the front and rear sides of the spray nozzle 5, the laser probes 10 on the front and rear sides of the spray nozzle 5 transmit data to the control terminal, and the control terminal promptly starts the melting device, and the melting device supplies molten material into the spray nozzle 5, and controls the spray nozzle 5 to start spraying the workpiece. When the spray nozzle 5 moves to other edge positions of the workpiece, taking the spray nozzle 5 moving to the rear edge position as an example, the laser probe 10 located on the rear side of the spray nozzle 5 detects the rear edge position of the workpiece and sends a corresponding signal to the control terminal. The control terminal controls the spray nozzle 5 and the baffle 9 to complete the above-mentioned corresponding work, and when the axis of the spray nozzle 5 moves to the edge of the workpiece, the first electric slider 301 is promptly controlled to move in the opposite direction to prevent the spray nozzle 5 from moving out of the range of the upper surface of the workpiece.

[0034] When there is an inclined surface with a large inclination angle in the middle of the workpiece, taking the inclined surface facing the front side as an example, the laser probe 10 on the front side of the spray nozzle 5 detects the position of the inclined surface in advance during the movement. When the spray nozzle 5 moves to the inclined surface, the control terminal promptly controls the electric shaft 13 to drive the mounting block 401 to rotate slightly, and the mounting block 401 drives the spray nozzle 5 to rotate, so that the axis of the spray nozzle 5 rotates a certain angle in the direction perpendicular to the inclined surface, and changes the spraying direction of the spray nozzle 5, so that the molten material sprayed from the spray nozzle 5 can be more easily attached. On the inclined surface, the control terminal simultaneously controls the telescopic end of the second electric push rod 14 to retract inward by a certain distance, so as to keep the spraying area of ​​the spray nozzle 5 from changing due to the rotation of the spray nozzle 5 and to maintain the uniformity of the molten material sprayed by the spray nozzle 5. When the spray nozzle 5 moves above the inclined surface, the control terminal controls the electric rotating shaft 13 and the second electric push rod 14 to drive the spray nozzle 5 to reset. When the spray nozzle 5 moves from back to front or sprays the inclined surface on the workpiece facing backward, it operates according to the same principle to ensure uniform spraying of the inclined surface on the workpiece.

[0035] Furthermore, if Figure 2 and Figure 10-13 As shown, the cleaning mechanism includes: a second electric slide rail 20, which is installed on the frame 1, and the second electric slide rail 20 is slidably connected to the second electric slider 201, and the second electric slider 201 is fixed to the fixed plate 21; a mounting shell 22, which is rotatably connected to the fixed plate 21, and the mounting shell 22 is installed with spaced high-pressure water spray heads 23; a dryer 29, which is installed on the frame 1, and the dryer 29 is located between the first electric slide rail 3 and the second electric slide rail 20; an angle conversion component, which is arranged on the fixed plate 21, and is used to change the angle of the water jet from the high-pressure water spray head 23; a centering component, which is arranged on the frame 1, and is used to fix the workpiece.

[0036] Furthermore, if Figure 11-13 As shown, the angle conversion component includes: an extrusion bar 24, which is slidably connected to the fixed plate 21, and a spring is installed between the two. The high-pressure water spray head 23 is fixedly connected to the extrusion block 25, and the extrusion bar 24 is used to extrude the extrusion block 25 and the high-pressure water spray head 23 to rotate to an inclined state; there are two extrusion rods 26, which are respectively fixedly connected to both sides of the frame 1, and the extrusion rods 26 are used to extrude the extrusion block 25 and the high-pressure water spray head 23 to rotate in opposite inclined directions.

[0037] Furthermore, if Fig.10 and Fig.11As shown, the center component includes: a third electric slide rail 27, having two symmetrically distributed ones, both installed on the frame 1, and the third electric slide rail 27 is slidably connected with a third electric slider; an electric clamp 28, having two symmetrically distributed ones, respectively installed on the third electric sliders of adjacent third electric slide rails 27.

[0038] In the above scheme, multiple second electric slide rails 20 can be provided. Since the functions of multiple second electric slide rails 20 are the same, the following description is always based on one second electric slide rail 20 as an example. The second electric slide rail 20, the third electric slide rail 27, the electric clamp 28 and the dryer 29 are all electrically connected to the control terminal. The length of the mounting shell 22 is greater than the length of the workpiece in the left and right directions. The mounting shell 22 is connected to the high-pressure water spray head 23 thereon, and the mounting shell 22 is connected to an external water supply device. Because when the spray nozzle 5 sprays the workpiece, the speed at which the workpiece moves following the transmission device 2 is usually slow, the second electric slide rail 20, the high-pressure water spray head 23 and other components work in an intermittent working mode to avoid waste of water resources; the two extrusion rods 26 are respectively installed on the front and rear sides of the frame 1; the electric clamp 28 is composed of an electric telescopic rod and a fixed clamp, and the two third electric slide rails 27 are respectively installed on the front and rear sides of the frame 1.

[0039] The working process is as follows: the control terminal starts the dryer 29 synchronously when starting the transmission device 2. When the workpiece to be sprayed moves to the second electric slide rail 20, the control terminal controls the two third electric slide rails 27 to drive the adjacent electric clamps 28 to move left and right respectively, so that the two electric clamps 28 are aligned with the middle of the workpiece. Then the control terminal controls the two electric clamps 28 to extend toward each other, and the two electric clamps 28 clamp the workpiece together. At this time, the control terminal controls the third electric slider on the third electric slide rail 27 to move, and the third electric slider on the third electric slide rail 27 drives the electric clamps 28 to move to the right at a speed equal to that of the transmission device 2. Then the control terminal controls the external water supply device to High-pressure water is supplied in the installation shell 22, and the high-pressure water in the installation shell 22 is sprayed outward through all the high-pressure water spray heads 23. Initially, the high-pressure water spray heads 23 face the rear side, and the control terminal controls the second electric slider 201 to slide backward. The second electric slider 201 drives the fixed plate 21, the installation shell 22, the high-pressure water spray heads 23 and the extrusion strip 24 to move backward together. The extrusion strip 24 always squeezes the extrusion block 25 on the high-pressure water spray heads 23 under the action of the spring thereon, so that the high-pressure water spray heads 23 always maintain the initial direction. When the high-pressure water spray heads 23 pass through the workpiece, the high-pressure water spray heads 23 clean the workpiece by the sprayed high-pressure water flow. When the fixed plate 21 passes through the workpiece, it moves to the rear side. When the squeezing rod 26 is at the position, the fixing plate 21 drives all the high-pressure water spray heads 23 to continue to move backwards, and all the high-pressure water spray heads 23 flip forward under the squeezing of the squeezing rod 26, and the high-pressure water spray heads 23 drive the squeezing blocks 25 to flip together, and all the squeezing blocks 25 squeeze the squeezing bar 24 together to move upward, and the springs on the squeezing blocks 25 are compressed and stored until the squeezing blocks 25 pass through the squeezing bar 24, and the high-pressure water spray heads 23 and the squeezing blocks 25 rotate to a state facing the front side, and the squeezing bar 24 moves downward and resets under the action of the spring on it, and the squeezing bar 24 squeezes all the squeezing blocks 25, so that the squeezing blocks 25 and the high-pressure water spray heads 23 maintain the current direction, and at this time the control terminal controls the second electric slider 20 1 drives the fixing plate 21, the mounting shell 22 and the high-pressure water spray head 23 to move forward, and the high-pressure water spray head 23 washes the workpiece from the back to the front. When the workpiece is cleaned, the control terminal closes the second electric slide rail 20, controls the two electric clamps 28 to move and reset, and the two electric clamps 28 release the workpiece and place the workpiece in the middle of the transmission device 2. Then the control terminal controls the third electric sliders on the two third electric slide rails 27 to drive the electric clamps 28 to move to the left and reset. The workpiece continues to move slowly to the right following the transmission device 2. When the workpiece passes through the dryer 29, the dryer 29 dries the workpiece. When the control terminal closes the transmission device 2, the dryer 29 is closed synchronously.

[0040] Furthermore, if Figure 6-Figure 9As shown, it also includes: a plurality of fixing rods 15, all of which are fixedly connected to the outer side of the shielding plate 9. The shielding plate 9 is made of flexible metal material. The fixing rods 15 are used to limit the bending deformation of the shielding plate 9 in the vertical direction.

[0041] Furthermore, if Figure 6-Figure 9 As shown, it also includes: a changing mechanism, which is arranged on the second mounting frame 8, and is used to change the shielding range of the baffle plate 9. The changing mechanism includes: a sliding rod 16, which has two, and is respectively fixed to the two outermost fixed rods 15 of the baffle plate 9. The sliding rod 16 is slidably connected to the second mounting frame 8, and a first elastic member 161 is installed between the two; a second motor 17, which has two, both are fixed to the second mounting frame 8, and the output shaft of the second motor 17 is fixedly connected to a winding shaft 18, and the winding shaft 18 is wound with a steel wire rope, and the steel wire rope of the winding shaft 18 is fixedly connected to the adjacent fixed rod 15.

[0042] Furthermore, if Figure 8 and Fig. 9 As shown, except for the fixed rod 15 fixedly connected to the sliding rod 16 , a second elastic member 19 is fixedly connected between the other fixed rods 15 and the winding shaft 18 .

[0043] In the above scheme, the shielding plate 9 is made of flexible metal material, such as a steel plate or copper plate with deformation ability. By controlling the deformation of the shielding plate 9, the shielding plate 9 can block the two directions of the spraying range of the spray nozzle 5 at one time, thereby enhancing the shielding effect of the shielding plate 9 on the corners of the workpiece, so that the shielding plate 9 can block the two directions of the spray nozzle 5 at the same time when it is at the corners of the workpiece, thereby increasing the application range of the device. A plurality of fixing rods 15 are inserted on the back of the shielding plate 9 to prevent the shielding plate 9 from flipping in the vertical direction, thereby ensuring that the shielding plate 9 is fixed to the back of the shielding plate 9. The inclination angle relative to the vertical direction will not change, and the baffle plate 9 always guides the molten material correctly; the second motor 17 is electrically connected to the control terminal; the first elastic member 161 and the second elastic member 19 are both tension springs, and the closer the second elastic member 19 is to the first electric push rod 7, the larger the elastic coefficient is, so as to suppress the deformation of the baffle plate 9 close to the first electric push rod 7, and ensure that the inner surface of the baffle plate 9 is always a complete arc surface, affecting the guiding effect of the baffle plate 9 on the molten material; the first elastic member 161 is initially in a stored force state.

[0044] The working process is as follows: when the spray nozzle 5 is spraying on the right side of the workpiece, the baffle plate 9 is located on the right side of the spray nozzle 5. When the spray nozzle 5 moves to the back side of the workpiece, the laser probe 10 on the back side of the spray nozzle 5 detects the position of the back side of the workpiece, and the control terminal controls the second motor 17 on the back side of the second mounting frame 8 to work. The second motor 17 drives the winding shaft 18 thereon to rotate a certain angle, and the winding shaft 18 relaxes the wire rope thereon. At this time, the fixed rod 15 and the adjacent sliding rod 16 on the back side of the second mounting frame 8 lose their limit, and the fixed rod 15 and the sliding rod 16 move to the left under the action of the first elastic member 161. At this time, the rear fixed rod 15 drives the back side of the baffle plate 9 to bend to the left, so that the baffle plate 9 gradually blocks more areas on the back side of the spray nozzle 5, further reducing the spraying of the spray nozzle 5. The spraying range is limited, and the molten material sprayed toward the rear by the spraying nozzle 5 is guided forward. At this time, the right side and the rear side of the spraying range of the spraying nozzle 5 are limited. When the spraying nozzle 5 moves to the rear side of the workpiece and gradually moves forward, the control terminal controls the output shaft of the second motor 17 on the rear side to rotate in the opposite direction and reset. The second motor 17 drives the winding shaft 18 on it to reel in the wire rope. The wire rope pulls the rear side of the shielding plate 9 to reset to the right. The first elastic member 161 is reset to the initial state. When the shielding plate 9 is reset to the initial state, the rear side of the spraying nozzle 5 is no longer blocked. When the spraying nozzle 5 moves to the front edge of the workpiece, the control terminal controls the second motor 17 on the front side to work according to the same principle, and then controls the front side of the shielding plate 9 to shield the front side of the spraying nozzle 5, thereby reducing the waste of molten material.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the present invention.

Claims

1. A semiconductor equipment component cleaning spraying device, Its characteristics include: A frame (1), the frame (1) being equipped with a transmission device (2) and a first electric slide rail (3), the first electric slide rail (3) being slidably connected to a first electric slider (301), the first electric slider (301) being slidably connected to a sliding block (4), and the sliding block (4) being rotatably connected to a mounting block (401); A spray nozzle (5) is mounted on the mounting block (401); A first mounting frame (6) is rotatably connected to the outer side of the spray nozzle (5), a first electric push rod (7) is installed on the first mounting frame (6), and a second mounting frame (8) is fixedly connected to the telescopic end of the first electric push rod (7); A shielding plate (9) fixedly connected to the second mounting frame (8), the shielding plate (9) being used to guide the molten material sprayed from the spray nozzle (5); A driving mechanism, arranged on the spray nozzle (5), and used for changing the position of the shielding plate (9) relative to the spray nozzle (5); A cleaning mechanism is arranged on the frame (1) and is used for pre-cleaning the workpiece.

2. A semiconductor equipment component cleaning spraying device according to claim 1, characterized in that: The first electric push rod (7), the second mounting frame (8) and the shielding plate (9) are all arranged in an inclined manner, and the angles between the three and the vertical direction are all less than 30 degrees.

3. A semiconductor equipment component cleaning spraying device according to claim 1, characterized in that: The driving mechanism comprises: A plurality of laser probes (10) are mounted on the first mounting frame (6); A first motor (11) is mounted on the outside of the spray nozzle (5); the first mounting frame (6) is fixedly connected to a fixed gear ring (12); and an output shaft of the first motor (11) is fixedly connected to a gear meshing with the fixed gear ring (12); A fine-tuning component is arranged on the first electric slider (301) and is used to change the orientation of the spray nozzle (5).

4. A semiconductor equipment component cleaning spraying device according to claim 3, characterized in that: The fine-tuning component includes: An electric rotating shaft (13) is mounted on the sliding block (4), and the electric rotating shaft (13) is fixedly connected to the mounting block (401); The second electric push rod (14) is mounted on the first electric slide block (301), and the telescopic end of the second electric push rod (14) is fixedly connected to the slide block (4).

5. A semiconductor equipment component cleaning spraying device according to claim 1, characterized in that: The cleaning mechanism comprises: A second electric slide rail (20) is mounted on the frame (1); the second electric slide rail (20) is slidably connected to a second electric slider (201); the second electric slider (201) is fixedly connected to a fixing plate (21); A mounting shell (22) rotatably connected to the fixing plate (21), wherein the mounting shell (22) is provided with high-pressure water spray heads (23) distributed at intervals; a dryer (29) mounted on the frame (1), the dryer (29) being located between the first electric slide rail (3) and the second electric slide rail (20); An angle changing component, arranged on the fixing plate (21), and used for changing the angle of the water jet from the high-pressure water jet head (23); A centering component is arranged on the frame (1) and is used to fix the workpiece.

6. A semiconductor equipment component cleaning spraying device according to claim 5, characterized in that: The angle conversion component includes: An extrusion bar (24) is slidably connected to the fixing plate (21), and a spring is installed between the two. The high-pressure water spray head (23) is fixedly connected to an extrusion block (25). The extrusion bar (24) is used to squeeze the extrusion block (25) and the high-pressure water spray head (23) to rotate to an inclined state. There are two squeezing rods (26) which are respectively fixed to two sides of the frame (1); the squeezing rods (26) are used to squeeze the squeezing block (25) and the high-pressure water spray head (23) to rotate in opposite tilting directions.

7. A semiconductor equipment component cleaning spraying device according to claim 6, characterized in that: The centering component includes: The third electric slide rails (27) have two symmetrically distributed ones, both of which are mounted on the frame (1); the third electric slide rails (27) are slidably connected to a third electric sliding block; The electric clamping claws (28) have two symmetrically distributed claws, which are respectively mounted on the third electric sliding blocks adjacent to the third electric sliding rail (27).

8. A semiconductor equipment component cleaning spraying device according to claim 2, characterized in that: Also included are: There are a plurality of fixing rods (15), all of which are fixedly connected to the outer side of the shielding plate (9); the shielding plate (9) is made of a flexible metal material; the fixing rods (15) are used to limit the bending deformation of the shielding plate (9) in the vertical direction.

9. A semiconductor equipment component cleaning spraying device according to claim 8, characterized in that: Also included are: A changing mechanism is arranged on the second mounting frame (8) and is used to change the shielding range of the shielding plate (9), the changing mechanism comprising: There are two sliding rods (16), which are respectively fixed to the two outermost fixed rods (15) of the shielding plate (9); the sliding rod (16) is slidably connected to the second mounting frame (8), and a first elastic member (161) is installed between the two; The second motor (17) has two parts, both of which are fixedly connected to the second mounting frame (8); the output shaft of the second motor (17) is fixedly connected to a winding shaft (18); a steel wire rope is wound around the winding shaft (18); and the steel wire rope of the winding shaft (18) is fixedly connected to the adjacent fixing rod (15).

10. A semiconductor equipment component cleaning spraying device according to claim 9, characterized in that: Except for the fixed rod (15) fixedly connected to the sliding rod (16), a second elastic member (19) is fixedly connected between the other fixed rods (15) and the winding shaft (18).

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