A corrosion-resistant single crystal growth furnace

Abstract

The present invention relates to the technical field of single crystal growth furnaces, and discloses a corrosion-resistant single crystal growth furnace, comprising a growth furnace body, a base installed at the bottom of the growth furnace body, the inner wall and surface of the furnace body inside the growth furnace body are provided with an anti-corrosion coating, and the outer sides of the bottom of the growth furnace body are both covered with semi-open insulation sleeves. In the corrosion-resistant single crystal growth furnace, the growth furnace body is provided with an anti-corrosion coating on the surface and inner wall of the furnace body to improve the corrosion resistance of the growth furnace body, and the two semi-open insulation sleeves, two-way meshing output components, electric push rods and bases are provided to form an auxiliary insulation structure. After being used in combination with the growth furnace body, the two semi-open insulation sleeves will automatically cover the furnace body structure at the bottom of the growth furnace body under the combined transmission of the electric push rod and the two-way meshing output components, and the growth furnace body is subjected to secondary insulation treatment.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal growth furnaces, in particular to a corrosion-resistant single crystal growth furnace. Background Art

[0002] The single crystal growth furnace is a manufacturing equipment for producing single crystal silicon by the Czochralski method. It is mainly composed of three parts: the furnace body, the heating power supply, and the computer control system. When in use, the high-purity polysilicon raw material is placed in the high-purity quartz crucible in the furnace body, and is melted by the high temperature generated by the graphite heater installed inside the furnace body. Then, the molten silicon liquid is slightly cooled to produce a certain degree of supercooling, and then a silicon single crystal (called a seed crystal) fixed on the seed crystal axis is inserted into the melt surface. After the seed crystal and the melt are melted, the seed crystal is slowly pulled upwards, and the crystal will grow at the lower end of the seed crystal. Then, the seed crystal is controlled to grow a thin section of about 100mm long and 3-5mm in diameter. The neck is used to eliminate the dislocation of atomic arrangement caused by the strong thermal shock of the high-temperature solution on the seed crystal. This process is called seeding; then, the crystal diameter is enlarged to the size required by the process, generally 75 to 300 mm, and this process is called shoulder release; then, the pulling speed is suddenly increased to perform a shoulder rotation operation to make the shoulder approximately a right angle; then, the equal diameter process is entered, and a single crystal column of a certain diameter specification is grown by controlling the thermal field temperature and the crystal lifting speed; finally, when most of the silicon solution has completed crystallization, the crystal is gradually reduced to form a tail-shaped cone, which is called the finishing process. At this point, the single crystal pulling process is basically completed and it can be taken out after a certain amount of insulation cooling.

[0003] However, the single crystal growth furnaces currently in use are limited by traditional structures and materials, and still have some shortcomings in terms of corrosion resistance and thermal insulation. Especially in terms of thermal insulation, the single thermal insulation structure leads to a large amount of heat dissipation during the processing process, which has a certain impact on the processing quality and also causes waste of heat energy. Summary of the invention

[0004] 1. Technical issues to be resolved In view of the deficiencies of the prior art, the present invention provides a corrosion-resistant single crystal growth furnace, which solves the problems raised in the above-mentioned background technology.

[0005] (II) Technical solution To achieve the above-mentioned object, the present invention provides the following technical solutions: a corrosion-resistant single crystal growth furnace, comprising a growth furnace body and a base installed at the bottom of the growth furnace body, wherein the inner wall and surface of the furnace body inside the growth furnace body are provided with an anti-corrosion coating, and the outer sides of both sides of the bottom of the growth furnace body are both provided with semi-open insulation sleeves, and the front and rear ends of the two semi-open insulation sleeves are fixedly connected to the slide rails on the top surface of the base; A bidirectional meshing output component is installed at the front end of the top of the base, and an electric push rod is installed on one side of the top of the base. The output end of the electric push rod is transmission connected to a corresponding semi-open insulation sleeve, and the two output structures inside the bidirectional meshing output component are transmission connected to the front end structures of the two semi-open insulation sleeves respectively.

[0006] Preferably, the bidirectional meshing output assembly includes a transmission gear and two spur gear plates, one end of the two spur gear plates are respectively meshed and connected with the top and bottom of the transmission gear, and the other end of the two spur gear plates are respectively transmission-connected with the surface of one side of the front end of two semi-open insulation sleeves as the output structure of the bidirectional meshing output assembly, a transmission shaft is fixedly connected to the middle part of the transmission gear, and one end of the transmission shaft is provided with a bearing seat fixedly installed on the top of the base through a bearing sleeve.

[0007] Preferably, a support seat is installed between the shell surface of the electric push rod and the surface on one side of the top of the growth furnace body to ensure the stability of the structure. The two semi-open insulation sleeves can insulate the bottom of the growth furnace body under the transmission of the bidirectional meshing output component and the electric push rod.

[0008] Preferably, the two semi-open insulation panels are provided with a makeshift space inside, a long U-shaped hose is provided on the top of the base, and both ends of the long U-shaped hose are respectively sleeved on the inner sides of the bottoms of the two semi-open insulation panels.

[0009] Preferably, a composite negative suction component is provided on one side of the rear end of the base, and the composite negative suction component includes a vacuum pump, a third transition solenoid valve tube, and a fourth transition solenoid valve tube. The suction end of the vacuum pump is fixedly connected to one end of the third transition solenoid valve tube, and the other end of the third transition solenoid valve tube is fixedly sleeved on the inner side of the middle part of the long U-shaped hose. One end of the fourth transition solenoid valve tube is connected to the outlet end of the vacuum pump. A fixing seat is installed between the shell surface of the vacuum pump and the surface of the rear end of the base. The composite negative suction component is used in conjunction with the long U-shaped hose. After the two semi-open insulation sleeves are insulated for the bottom furnace body structure of the growth furnace body, the air in the makeshift space inside the two semi-open insulation sleeves is sucked for negative suction, thereby further improving the insulation effect of the two semi-open insulation sleeves.

[0010] Preferably, an air pressure detection component is provided on the top of the semi-open insulation sleeve connected to the electric push rod transmission, and the air pressure detection component is composed of a protective sleeve and an air pressure sensor. The protective sleeve is fixedly sleeved on the inner side of the front end of the top of the corresponding semi-open insulation sleeve and communicates with the clearance space inside the semi-open insulation sleeve. The air pressure sensor is sleeved inside the protective sleeve, and the air pressure detection component is used to monitor the air pressure status of the clearance space in the corresponding semi-open insulation sleeve in real time.

[0011] Preferably, a pumping assembly is arranged on the other side of the rear end of the base, and the pumping assembly consists of a water pump and a transition water tank. The input end of the water pump is sleeved on the inner side of the top of the transition water tank, and the bottom of the transition water tank is fixedly installed on the surface on the other side of the rear end of the base, and a replenishing valve tube is fixedly sleeved on one side of the top of the transition water tank. A first transition solenoid valve tube is connected between the output end of the water pump and the middle structure of the long U-shaped hose, and a second transition solenoid valve tube is also fixedly sleeved on the middle part of the long U-shaped hose. After the pumping assembly is used in conjunction with the first transition solenoid valve tube, the long U-shaped hose and the second transition solenoid valve tube, the solution can be pumped into the makeshift space inside the two semi-open insulation sleeves, and then the waste heat after the use of the growth furnace body is absorbed, so as to perform secondary utilization of the waste heat.

[0012] Preferably, an electronic liquid level gauge is installed at the rear end of the top of the semi-open insulation sleeve to which the electric push rod is connected, and the detection end of the electronic liquid level gauge extends to the corresponding concession space of the semi-open insulation sleeve, and the electronic liquid level gauge is used to perform real-time detection of the liquid containing state of the concession space inside the semi-open insulation sleeve.

[0013] Preferably, the middle part of the third transition solenoid valve tube is fixedly connected to the fifth transition solenoid valve tube which is in communication with its own space, and the sixth transition solenoid valve tube is installed between the middle part of the fourth transition solenoid valve tube and the middle part of the long U-shaped hose. The fifth transition solenoid valve tube, the sixth transition solenoid valve tube, the long U-shaped hose and the second transition solenoid valve tube are used to form a reverse air blowing channel for the space inside the two semi-open insulation sleeves to meet the needs of subsequent expansion and use.

[0014] Beneficial Effects The present invention provides a corrosion-resistant single crystal growth furnace, which has the following beneficial effects: 1. The corrosion-resistant single crystal growth furnace has a growth furnace body that is provided with an anti-corrosion coating on the surface and inner wall of the furnace body to improve the corrosion resistance of the growth furnace body, and the two semi-open insulation sleeves, the two-way meshing output components, the electric push rod and the base will form an auxiliary insulation structure. After being used in combination with the growth furnace body, the two semi-open insulation sleeves will automatically fit the furnace body structure at the bottom of the growth furnace body under the combined transmission of the electric push rod and the two-way meshing output component, and perform secondary insulation treatment on the growth furnace body.

[0015] 2. The corrosion-resistant single crystal growth furnace, through the composite negative suction component set up and further combined with the above-mentioned auxiliary insulation structure, the vacuum pump arranged inside the composite negative suction component sucks the air in the makeshift space of the two semi-open insulation sleeves through the third transition solenoid valve tube and the long U-shaped hose for negative suction, and then outputs it through the fourth transition solenoid valve tube arranged in the composite negative suction component, thereby reciprocating to minimize the air content inside the two semi-open insulation sleeves, achieve a similar hollow effect, and further optimize the thermal insulation effect of the two semi-open insulation sleeves.

[0016] 3. The corrosion-resistant single crystal growth furnace is composed of a waste heat utilization device by means of the second transition solenoid valve tube, the first transition solenoid valve tube, and the pumping assembly. When the device is used in combination with the auxiliary insulation structure, when there is still waste heat in the growth furnace body after the use of the growth furnace body, the water pump arranged inside the pumping assembly can be used to pump the solution inside the transition water tank through the first transition solenoid valve tube and the long U-shaped hose to the makeshift space inside the two semi-open insulation sleeves outside the furnace body at the bottom of the growth furnace body, and then the waste heat emitted from the growth furnace body is absorbed by heat conduction, thereby providing conditions for the subsequent secondary utilization of heat energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front view schematic diagram of the structure of the present invention; Figure 2 It is a top view schematic diagram of the electric push rod of the present invention; Figure 3 It is an enlarged schematic diagram of the bidirectional meshing output component of the structure of the present invention; Figure 4 It is a top view schematic diagram of the structural composite negative suction assembly of the present invention; Figure 5 It is an enlarged schematic diagram of the structural composite negative suction component of the present invention; Figure 6 It is a partial cross-sectional schematic diagram of the air pressure detection assembly of the structure of the present invention.

[0018] In the figure: 1. Growth furnace body; 2. Base; 3. Semi-open insulation sleeve; 4. Slide rail; 5. Bidirectional meshing output assembly; 51. Transmission gear; 52. Straight tooth plate; 6. Electric push rod; 7. Long U-shaped hose; 8. Pumping assembly; 81. Water pump; 82. Transition water tank; 9. First transition solenoid valve tube; 10. Second transition solenoid valve tube; 11. Composite negative suction assembly; 111. Vacuum pump; 112. Third transition solenoid valve tube; 113. Fourth transition solenoid valve tube; 114. Fifth transition solenoid valve tube; 115. Sixth transition solenoid valve tube; 12. Electronic liquid level gauge; 13. Air pressure detection assembly; 131. Protective sleeve; 132. Air pressure sensor. DETAILED DESCRIPTION

[0019] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0020] Embodiment 1 See also Figure 1-3 A corrosion-resistant single crystal growth furnace comprises a growth furnace body 1, a base 2 installed at the bottom of the growth furnace body 1, the inner wall and surface of the furnace body inside the growth furnace body 1 are provided with an anti-corrosion coating, the outer sides of the bottom of the growth furnace body 1 are both covered with semi-open insulation sleeves 3, and the front and rear ends of the two semi-open insulation sleeves 3 are fixedly connected to the slide rails 4 on the top surface of the base 2, a bidirectional meshing output component 5 is installed at the front end of the top of the base 2, and an electric push rod 6 is installed on one side of the top of the base 2, the output end of the electric push rod 6 is transmission-connected with a corresponding semi-open insulation sleeve 3, and the two output structures inside the bidirectional meshing output component 5 are transmission-connected with the front end structures of the two semi-open insulation sleeves 3 respectively; The bidirectional meshing output component 5 includes a transmission gear 51 and two spur plates 52. One end of the two spur plates 52 is meshed with the top and bottom of the transmission gear 51 respectively. The other ends of the two spur plates 52 are respectively connected to the surface of the front end of the two semi-open insulation sleeves 3 as the output structure of the bidirectional meshing output component 5. A transmission shaft is fixedly connected to the middle of the transmission gear 51. One end of the transmission shaft is fixedly mounted on the top of the base 2 through a bearing sleeve. A support seat is installed between the shell surface of the electric push rod 6 and the surface of the top side of the growth furnace body 1 to ensure the stability of the structure. The two semi-open insulation sleeves 3 can cover and insulate the bottom of the growth furnace body 1 under the transmission of the bidirectional meshing output component 5 and the electric push rod 6.

[0021] Working principle: When in use, during the operation of the growth furnace body 1, the existing infrared radiation thermometer can be used to detect the temperature of the furnace body at the bottom of the growth furnace body 1. If the displayed temperature data exceeds the specified standard value, it means that the internal heat of the growth furnace body 1 is too much, and the electric push rod 6 can be started. The output end of the electric push rod 6 drives the corresponding semi-open insulation sleeve 3 to move, and under the meshing transmission of the transmission gear 51 and the two spur plates 52 inside the two-way meshing output component 5, the other semi-open insulation sleeve 3 will move synchronously with the semi-open insulation sleeve 3 driven by the electric push rod 6, until the two semi-open insulation sleeves 3 are covered on the surface of the furnace structure at the bottom of the growth furnace body 1, and the furnace structure at the bottom of the growth furnace body 1 is provided with secondary thermal insulation protection.

[0022] Embodiment 2 See also Figure 1-6A corrosion-resistant single crystal growth furnace comprises a growth furnace body 1, a base 2 installed at the bottom of the growth furnace body 1, the inner wall and surface of the furnace body inside the growth furnace body 1 are provided with an anti-corrosion coating, the outer sides of the bottom of the growth furnace body 1 are both covered with semi-open insulation sleeves 3, and the front and rear ends of the two semi-open insulation sleeves 3 are fixedly connected to the slide rails 4 on the top surface of the base 2, a bidirectional meshing output component 5 is installed at the front end of the top of the base 2, and an electric push rod 6 is installed on one side of the top of the base 2, the output end of the electric push rod 6 is transmission-connected with a corresponding semi-open insulation sleeve 3, and the two output structures inside the bidirectional meshing output component 5 are transmission-connected with the front end structures of the two semi-open insulation sleeves 3 respectively; The bidirectional meshing output component 5 includes a transmission gear 51 and two spur plates 52. One end of the two spur plates 52 is meshed with the top and bottom of the transmission gear 51 respectively. The other ends of the two spur plates 52 are respectively connected to the surface of the front end of the two semi-open insulation sleeves 3 as the output structure of the bidirectional meshing output component 5. A transmission shaft is fixedly connected to the middle of the transmission gear 51. One end of the transmission shaft is fixedly mounted on the top of the base 2 through a bearing sleeve. A support seat is installed between the shell surface of the electric push rod 6 and the surface of the top side of the growth furnace body 1 to ensure the stability of the structure. The two semi-open insulation sleeves 3 can cover and insulate the bottom of the growth furnace body 1 under the transmission of the bidirectional meshing output component 5 and the electric push rod 6. The two semi-open insulation sleeves 3 are provided with a clearance space inside, a long U-shaped hose 7 is provided on the top of the base 2, and the two ends of the long U-shaped hose 7 are respectively sleeved on the inner sides of the bottoms of the two semi-open insulation sleeves 3, and a composite negative suction component 11 is provided on one side of the rear end of the base 2. The composite negative suction component 11 includes a vacuum pump 111, a third transition solenoid valve tube 112, and a fourth transition solenoid valve tube 113. The suction end of the vacuum pump 111 is fixedly connected to one end of the third transition solenoid valve tube 112, and the other end of the third transition solenoid valve tube 112 is fixedly connected to the suction end of the vacuum pump 111. The end is fixedly sleeved on the inner side of the middle part of the long U-shaped hose 7, one end of the fourth transition solenoid valve tube 113 is connected to the air outlet end of the vacuum pump 111, and a fixing seat is installed between the shell surface of the vacuum pump 111 and the surface of the rear end of the base 2. The composite negative suction component 11 is used in conjunction with the long U-shaped hose 7. After the two semi-open insulation sleeves 3 are insulated for the bottom furnace structure of the growth furnace body 1, the air in the vacant space inside the two semi-open insulation sleeves 3 is sucked for negative suction, thereby further improving the insulation effect of the two semi-open insulation sleeves 3; An air pressure detection component 13 is arranged on the top of the semi-open insulation sleeve 3 which is connected by the electric push rod 6. The air pressure detection component 13 consists of a protective sleeve 131 and an air pressure sensor 132. The protective sleeve 131 is fixedly sleeved on the inner side of the front end of the top of the corresponding semi-open insulation sleeve 3 and communicates with the clearance space inside the semi-open insulation sleeve 3. The air pressure sensor 132 is sleeved inside the protective sleeve 131. The air pressure detection component 13 is used to monitor the air pressure state of the clearance space in the corresponding semi-open insulation sleeve 3 in real time.

[0023] Working principle: When in use, two semi-open insulation sleeves 3 are used to perform secondary heat insulation protection operation on the furnace structure at the bottom of the growth furnace body 1, and the operation can be performed according to the steps of the above-mentioned embodiment 1; When it is necessary to further improve the thermal insulation effect of the two semi-open insulation sleeves 3 on the bottom furnace body structure of the growth furnace body 1, the vacuum pump 111 can be started and the solenoid valve inside the third transition solenoid valve tube 112 and the solenoid valve of the fourth transition solenoid valve tube 113 can be opened. Then, the vacuum pump 111 is used to absorb the air in the vacant space of the two semi-open insulation sleeves 3 through the third transition solenoid valve tube 112 and the long U-shaped hose 7 for negative suction, and then output it through the fourth transition solenoid valve tube 113. In this way, the air content inside the two semi-open insulation sleeves 3 is reduced to the greatest extent, a similar hollow effect is achieved, and the thermal insulation effect of the two semi-open insulation sleeves 3 is further optimized. The specific air pressure conditions will be detected in real time by the air pressure sensor 132 inside the air pressure detection component 13. After reaching the specified air pressure value, the vacuum pump 111, the solenoid valve inside the third transition solenoid valve tube 112, and the solenoid valve inside the fourth transition solenoid valve tube 113 are closed.

[0024] Embodiment 3 See also Figure 1-6 A corrosion-resistant single crystal growth furnace comprises a growth furnace body 1, a base 2 installed at the bottom of the growth furnace body 1, the inner wall and surface of the furnace body inside the growth furnace body 1 are provided with an anti-corrosion coating, the outer sides of the bottom of the growth furnace body 1 are both covered with semi-open insulation sleeves 3, and the front and rear ends of the two semi-open insulation sleeves 3 are fixedly connected to the slide rails 4 on the top surface of the base 2, a bidirectional meshing output component 5 is installed at the front end of the top of the base 2, and an electric push rod 6 is installed on one side of the top of the base 2, the output end of the electric push rod 6 is transmission-connected with a corresponding semi-open insulation sleeve 3, and the two output structures inside the bidirectional meshing output component 5 are transmission-connected with the front end structures of the two semi-open insulation sleeves 3 respectively; The bidirectional meshing output component 5 includes a transmission gear 51 and two spur plates 52. One end of the two spur plates 52 is meshed with the top and bottom of the transmission gear 51 respectively. The other ends of the two spur plates 52 are respectively connected to the surface of the front end of the two semi-open insulation sleeves 3 as the output structure of the bidirectional meshing output component 5. A transmission shaft is fixedly connected to the middle of the transmission gear 51. One end of the transmission shaft is fixedly mounted on the top of the base 2 through a bearing sleeve. A support seat is installed between the shell surface of the electric push rod 6 and the surface of the top side of the growth furnace body 1 to ensure the stability of the structure. The two semi-open insulation sleeves 3 can cover and insulate the bottom of the growth furnace body 1 under the transmission of the bidirectional meshing output component 5 and the electric push rod 6. The two semi-open insulation sleeves 3 are provided with a clearance space inside, a long U-shaped hose 7 is provided on the top of the base 2, and the two ends of the long U-shaped hose 7 are respectively sleeved on the inner sides of the bottoms of the two semi-open insulation sleeves 3, and a composite negative suction component 11 is provided on one side of the rear end of the base 2. The composite negative suction component 11 includes a vacuum pump 111, a third transition solenoid valve tube 112, and a fourth transition solenoid valve tube 113. The suction end of the vacuum pump 111 is fixedly connected to one end of the third transition solenoid valve tube 112, and the other end of the third transition solenoid valve tube 112 is fixedly connected to the suction end of the vacuum pump 111. The end is fixedly sleeved on the inner side of the middle part of the long U-shaped hose 7, one end of the fourth transition solenoid valve tube 113 is connected to the air outlet end of the vacuum pump 111, and a fixing seat is installed between the shell surface of the vacuum pump 111 and the surface of the rear end of the base 2. The composite negative suction component 11 is used in conjunction with the long U-shaped hose 7. After the two semi-open insulation sleeves 3 are insulated for the bottom furnace structure of the growth furnace body 1, the air in the vacant space inside the two semi-open insulation sleeves 3 is sucked for negative suction, thereby further improving the insulation effect of the two semi-open insulation sleeves 3; The top of the semi-open insulation sleeve 3 connected by the electric push rod 6 is provided with an air pressure detection component 13, which is composed of a protective sleeve 131 and an air pressure sensor 132. The protective sleeve 131 is fixedly sleeved on the inner side of the front end of the top of the corresponding semi-open insulation sleeve 3 and communicates with the clearance space inside the semi-open insulation sleeve 3. The air pressure sensor 132 is sleeved inside the protective sleeve 131, and the air pressure detection component 13 is used to monitor the air pressure state of the clearance space in the corresponding semi-open insulation sleeve 3 in real time; A pumping assembly 8 is arranged on the other side of the rear end of the base 2. The pumping assembly 8 consists of a water pump 81 and a transition water tank 82. The input end of the water pump 81 is sleeved on the inner side of the top of the transition water tank 82. The bottom of the transition water tank 82 is fixedly installed on the surface of the other side of the rear end of the base 2. A liquid replenishing valve tube is fixedly sleeved on one side of the top of the transition water tank 82. A first transition solenoid valve tube 9 is connected between the output end of the water pump 81 and the middle structure of the long U-shaped hose 7. A second transition solenoid valve tube 10 is also fixedly sleeved on the middle part of the long U-shaped hose 7. After the pumping assembly 8 is used in conjunction with the first transition solenoid valve tube 9, the long U-shaped hose 7 and the second transition solenoid valve tube 10, the solution can be pumped into the makeshift space inside the two semi-open insulation sleeves 3, and then the waste heat of the growth furnace body 1 after use is absorbed to perform secondary utilization of the waste heat. An electronic liquid level gauge 12 is installed at the rear end of the top of the semi-open insulation sleeve 3 connected to the transmission connection of the electric push rod 6, and the detection end of the electronic liquid level gauge 12 extends to the corresponding yield space of the semi-open insulation sleeve 3. The electronic liquid level gauge 12 is used to perform real-time detection of the liquid containing state of the yield space inside the semi-open insulation sleeve 3. The middle part of the third transition solenoid valve tube 112 is fixedly connected with the fifth transition solenoid valve tube 114 which is communicated with its own space, and the sixth transition solenoid valve tube 115 is installed between the middle part of the fourth transition solenoid valve tube 113 and the middle part of the long U-shaped hose 7. The fifth transition solenoid valve tube 114 and the sixth transition solenoid valve tube 115 cooperate with the long U-shaped hose 7 and the second transition solenoid valve tube 10 to form a reverse air blowing channel for the yield space inside the two semi-open insulation sleeves 3 to meet the subsequent expansion and use requirements.

[0025] Working principle: When in use, two semi-open insulation sleeves 3 are used to perform thermal insulation protection on the furnace structure at the bottom of the growth furnace body 1 according to the above-mentioned embodiment 1 or embodiment 2; When the growth furnace body 1 still has residual heat after use, the electric push rod 6 can be started, and the output end of the electric push rod 6 drives the corresponding half-open insulation cover plate 3 to move, and under the meshing transmission of the transmission gear 51 inside the two-way meshing output component 5 and the two spur plates 52, the other half-open insulation cover plate 3 will move synchronously with the half-open insulation cover plate 3 driven by the electric push rod 6, until the two half-open insulation cover plates 3 are covered with the furnace structure surface at the bottom of the growth furnace body 1; Next, start the water pump 81 inside the pump assembly 8, open the solenoid valve inside the first transition solenoid valve tube 9, and connect the open port of the second transition solenoid valve tube 10 to the existing recovery container, and then use the water pump 81 to pump the solution inside the transition water tank 82 through the first transition solenoid valve tube 9 and the long U-shaped hose 7 to the makeshift space inside the two semi-open insulation sleeves 3, and then absorb the waste heat emitted by the growth furnace body 1 by heat conduction, and the liquid level inside the two semi-open insulation sleeves 3 will be detected in real time by the electronic liquid level meter 12. After a certain period of time, use the existing infrared radiation thermometer to detect the temperature of the bottom furnace body of the growth furnace body 1. When a low temperature is displayed, open the solenoid valve inside the second transition solenoid valve tube 10 to discharge the heated solution for subsequent secondary utilization; When the pumping component 8 is used and the composite negative suction component 11 is used again, the open port of the second transition solenoid valve tube 10 can be separated from the existing recovery container, and then the solenoid valve inside the sixth transition solenoid valve tube 115 and the solenoid valve inside the fifth transition solenoid valve tube 114 are opened, and the vacuum pump 111 is started. The vacuum pump 111 sucks air through the fifth transition solenoid valve tube 114, and then blows air into the two half-open insulation sleeves 3 through the sixth transition solenoid valve tube 115 and the long U-shaped hose 7, and then the residual solution in the two makeshift spaces is discharged through the second transition solenoid valve tube 10, and the two makeshift spaces are air-dried to meet the subsequent drying conditions.

[0026] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0027] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A corrosion-resistant single crystal growth furnace, comprising a growth furnace body (1) and a base (2) mounted at the bottom of the growth furnace body (1), characterized in that: The inner wall and surface of the growth furnace body (1) are provided with an anti-corrosion coating, the outer sides of the bottom of the growth furnace body (1) are both provided with semi-open insulation sleeves (3), and the front and rear ends of the two semi-open insulation sleeves (3) are fixedly connected to the slide rails (4) on the top surface of the base (2); A bidirectional meshing output component (5) is installed at the front end of the top of the base (2), and an electric push rod (6) is installed on one side of the top of the base (2); the output end of the electric push rod (6) is transmission-connected to a corresponding semi-open thermal insulation sleeve (3), and the two output structures inside the bidirectional meshing output component (5) are transmission-connected to the front end structures of the two semi-open thermal insulation sleeves (3) respectively.

2. The corrosion-resistant single crystal growth furnace according to claim 1, characterized in that: The bidirectional meshing output assembly (5) comprises a transmission gear (51) and two spur-tooth plates (52), one end of the two spur-tooth plates (52) being meshingly connected to the top and bottom of the transmission gear (51), respectively, and the other ends of the two spur-tooth plates (52) serving as output structures of the bidirectional meshing output assembly (5) being transmission-connected to the surfaces of one side of the front ends of two semi-open insulation sleeves (3), respectively, a transmission shaft being fixedly connected to the middle of the transmission gear (51), and one end of the transmission shaft being provided with a bearing seat fixedly mounted on the top of the base (2) via a bearing sleeve.

3. The corrosion-resistant single crystal growth furnace according to claim 1, characterized in that: A support seat is installed between the shell surface of the electric push rod (6) and the surface of one side of the top of the growth furnace body (1), and the two semi-open insulation sleeves (3) can be sheathed and insulated on the bottom of the growth furnace body (1) under the transmission of the bidirectional meshing output component (5) and the electric push rod (6).

4. The corrosion-resistant single crystal growth furnace according to claim 1, characterized in that: The two semi-open insulation sleeves (3) are provided with a clearance space inside, a long U-shaped hose (7) is arranged on the top of the base (2), and the two ends of the long U-shaped hose (7) are respectively sleeved on the inner sides of the bottoms of the two semi-open insulation sleeves (3).

5. The corrosion-resistant single crystal growth furnace according to claim 1, characterized in that: A composite negative suction component (11) is provided on one side of the rear end of the base (2), and the composite negative suction component (11) comprises a vacuum pump (111), a third transition solenoid valve tube (112), and a fourth transition solenoid valve tube (113); an air suction end of the vacuum pump (111) is fixedly connected to one end of the third transition solenoid valve tube (112); the other end of the third transition solenoid valve tube (112) is fixedly sleeved on the inner side of the middle part of the long U-shaped hose (7); one end of the fourth transition solenoid valve tube (113) is connected to an air outlet end of the vacuum pump (111); and a fixing seat is installed between the shell surface of the vacuum pump (111) and the surface of the rear end of the base (2).

6. The corrosion-resistant single crystal growth furnace according to claim 4, characterized in that: The top of the semi-open thermal insulation sleeve (3) to which the electric push rod (6) is connected in a transmission manner is provided with an air pressure detection component (13), the air pressure detection component (13) consisting of a protective sleeve (131) and an air pressure sensor (132), the protective sleeve (131) being fixedly sleeved on the inner side of the front end of the top of the corresponding semi-open thermal insulation sleeve (3) and communicating with the clearance space inside the semi-open thermal insulation sleeve (3), and the air pressure sensor (132) being sleeved inside the protective sleeve (131).

7. The corrosion-resistant single crystal growth furnace according to claim 1, characterized in that: A pump assembly (8) is arranged on the other side of the rear end of the base (2), and the pump assembly (8) is composed of a water pump (81) and a transition water tank (82). The input end of the water pump (81) is sleeved on the inner side of the top of the transition water tank (82), the bottom of the transition water tank (82) is fixedly mounted on the surface of the other side of the rear end of the base (2), and a liquid replenishing valve pipe is fixedly sleeved on one side of the top of the transition water tank (82). A first transition solenoid valve pipe (9) is connected between the output end of the water pump (81) and the middle structure of the long U-shaped hose (7), and a second transition solenoid valve pipe (10) is also fixedly sleeved on the middle of the long U-shaped hose (7).

8. The corrosion-resistant single crystal growth furnace according to claim 1, characterized in that: An electronic liquid level meter (12) is installed at the rear end of the top of the semi-open thermal insulation sleeve (3) to which the electric push rod (6) is transmission-connected, and a detection end of the electronic liquid level meter (12) extends into the clearance space corresponding to the semi-open thermal insulation sleeve (3).

9. The corrosion-resistant single crystal growth furnace according to claim 5, characterized in that: The middle part of the third transition solenoid valve tube (112) is fixedly connected to a fifth transition solenoid valve tube (114) which is in communication with the third transition solenoid valve tube (112), and the sixth transition solenoid valve tube (115) is installed between the middle part of the fourth transition solenoid valve tube (113) and the middle part of the long U-shaped hose (7).

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