Rod taking device of single crystal furnace

Abstract

The invention belongs to the technical field of single crystal furnace rod taking, and particularly relates to a single crystal furnace rod taking device which comprises a plurality of supporting legs, a base is fixedly connected to the tops of the supporting legs, a placement seat and a main frame are fixedly connected to the top of the base, a main furnace barrel is fixedly connected to the top of the placement seat, and a clamping piece is fixedly connected to the outer portion of the main frame. A climbing frame is fixedly connected to the upper portion of the outer edge of the clamping piece, and a mounting plate is fixedly connected to the rear end of the clamping piece. According to the single crystal furnace rod taking device, the guide plate moves upwards along the limiting groove, the guide plate drives the driving pad to move synchronously, when the guide plate moves to the uppermost portion of the limiting groove, binding force during rotation is lost, and the guide plate rotates along the transverse groove opening of the limiting groove; and the single crystal rod is taken out and then rotated to other positions to be placed, so that the equipment has the functions of completing lifting and rotating according to one driving source, the operation steps are simplified, the cost is saved, and the rod is convenient to take out.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnace rod taking, in particular to a single crystal furnace rod taking device. Background Art

[0002] Single crystal furnaces play a key role in the semiconductor industry. They are used to produce single crystal silicon, which is the basic material for manufacturing integrated circuits and electronic devices. The growth process of single crystal silicon involves multiple steps, including furnace cleaning, furnace loading, evacuation, inflation, preheating, etc. These steps together ensure the quality and purity of single crystal silicon, thereby meeting the needs of high-end electronic products. In the growth process of single crystal silicon, rod removal is an important link, which marks the end of the single crystal silicon growth cycle. The purpose of rod removal is to remove the completed single crystal rod from the single crystal furnace for subsequent processing and testing. This step is not only related to the quality of single crystal silicon, but also directly affects the performance and reliability of the final electronic product.

[0003] In order to reduce costs, many factories have adopted the method of increasing the size of the thermal field and the amount of charge. For example, the charge of a 16-inch thermal field can reach 60kg, while that of a 20-inch thermal field can exceed 100kg, that of a 28-inch thermal field can reach 250KG, and that of a 32-inch thermal field can even exceed 350kg. As the thermal field increases and the amount of charge increases, the diameter and weight of the single crystal also increase. The original method of taking out single crystals also has certain limitations. For example, if the tail of the single crystal is dropped into the furnace, the larger diameter and weight will cause difficulty in operation for personnel, and even damage to components such as the currently used graphite crucible; the original hydraulic single crystal robot arm cannot be operated either, so a single crystal furnace rod taking device is needed. Summary of the invention

[0004] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0005] The technical solution adopted by the present invention to solve its technical problems is: a single crystal furnace rod taking device described in the present invention comprises a plurality of supporting legs, a base is fixedly connected to the top of the plurality of supporting legs, a placement seat and a main frame are fixedly connected to the top of the placement seat, a main furnace barrel is fixedly connected to the top of the main frame, a clamp is fixedly connected to the outside of the main frame, a climbing frame is fixedly connected to the upper part of the outer edge of the clamp, a mounting plate is fixedly connected to the rear end of the clamp, a support column is transferred to the top of the clamp, a feeder is arranged on the outside of the main furnace barrel, a crystal taking component and an expansion component are arranged in the main furnace barrel, the expansion component is used to expand the opening of the main furnace barrel, the crystal taking component melts the raw material by adjusting the temperature in the furnace, and adheres to the inserted rod after growth is completed to form a single crystal rod, a rod taking component is arranged on the top of the clamp, and the rod taking component is used to take out the single crystal rod by lifting and rotating, an auxiliary furnace barrel is transferred to the inside of the main furnace barrel, a seed crystal is rotatably connected to the bottom end of the auxiliary furnace barrel, and a quartz crucible is fixedly connected to the inside of the main furnace barrel.

[0006] Furthermore, the top of the rod-taking assembly includes a rotating shaft that passes through the mounting plate, one end of the rotating shaft is externally connected to a servo motor, the other end of the rotating shaft is fixedly connected to a bevel gear rod, a gear is provided at the bottom end of the support column, the outside of the bevel gear rod is meshed with the gear of the support column, the inside of the support column is connected to a main ring cylinder, the outer periphery of the main ring cylinder is connected to a guide plate, the top of the guide plate is fixedly connected to a driving pad, and the inside of the sleeve is connected to the guide plate.

[0007] Furthermore, a sleeve 1 is fixedly connected to the outer periphery of the support column, and a texture corresponding to the outer periphery of the main ring tube is provided inside the guide plate.

[0008] Furthermore, a receiving plate is fixedly connected to the outer surface of sleeve one, sleeve two is fixedly connected to the top of the receiving plate, two electromagnetic locks are clamped on the inner side of sleeve two, one of the electromagnetic locks is connected to an electric telescopic rod on its side, and the electric telescopic rod has a rod body, a sensor, and a processor inside.

[0009] Furthermore, the outer periphery of the support column and the outer periphery of the first sleeve are both provided with a sliding groove adapted to the guide plate, the limiting groove is in the shape of an inverted "L", and the second sleeve is a semicircular structure.

[0010] Furthermore, the main ring tube passes through the interior of the sleeve 1 and the clamp, and the bottom end of the main ring tube is fixedly connected to the center of the gear.

[0011] Furthermore, the crystal extraction assembly includes an insulation tube installed in the main furnace barrel, two T-shaped hot plates are fixedly connected to the outer periphery of the insulation tube, a quartz crucible is fixedly connected between the two T-shaped hot plates, a docking tube is connected through the outer periphery of the main furnace barrel, the top of the main furnace barrel is connected to the auxiliary furnace barrel, a wiping strip is clamped on the inner wall of the auxiliary furnace barrel, a cushion layer is fixedly connected to the top of the wiping strip, and a speed reduction pad is connected to the middle of the front side of the cushion layer.

[0012] Furthermore, the butt-joint pipe is made of stainless steel, and the butt-joint pipe passes through the main furnace tube and extends to the outside of the quartz crucible.

[0013] Furthermore, the interior of the butt-joint tube is hollow, the bottom of the heat-insulating tube is connected to the placement seat, the outer side of the T-shaped hot plate is connected to the inner wall of the main furnace tube, and the interior of the auxiliary furnace tube is provided with a through groove corresponding to the seed crystal.

[0014] Furthermore, an extension component is installed on the inner top wall of the main furnace barrel, and the extension component includes an inverted cone barrel installed outside the seed crystal, a clamping ring is hinged at the bottom of the inverted cone barrel, a plurality of bells are fixedly connected to the inner wall of the top of the inverted cone barrel, a plurality of mounting parts are fixedly connected to the inner wall of the clamping ring, a plurality of mounting parts are connected through the sides of the mounting parts, a wiping plate is connected through the top of the mounting parts, the fixing ring and the wiping plate do not overlap inside the mounting parts, the wiping plate is "L" shaped, the upper part of the main furnace barrel is made of elastic material, the material of the main furnace barrel is NiCrTi elastic alloy, the inner wall of the main furnace barrel is connected to the inverted cone barrel, and the clamping ring is clamped to the inner wall of the top of the main furnace barrel.

[0015] The beneficial effects of the present invention are as follows: 1. A single crystal furnace rod taking device described in the present invention moves upward along the limit groove through the guide plate, and the guide plate drives the driving pad to move synchronously. When the guide plate moves to the uppermost part of the limit groove, the other side is separated from the upper edge of the main furnace barrel and loses the restraining force during rotation. The guide plate rotates along the lateral notch of the limit groove, so that the single crystal rod is taken out and rotated to other positions for placement, so that the equipment has the function of completing lifting and rotation according to a driving source, which simplifies the operation steps, saves costs, and facilitates the convenience of taking out the rod.

[0016] 2. The single crystal furnace rod removal device described in the present invention, when the seed crystal is inserted downward along the inside of the attached furnace barrel, the seed crystal will drive the cushion layer to move downward synchronously, and the speed reduction pad moves synchronously with the cushion layer, and the speed reduction pad gradually rubs the inner wall of the attached furnace barrel, and the wiping strip moves downward and is inserted into the inner cavity of the attached furnace barrel. With the effect of weight, the wiping strip is inserted into the inner cavity of the attached furnace barrel to form a supporting force, thereby preventing it from falling downward due to the large gravity. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below in conjunction with the accompanying drawings.

[0018] Figure 1 It is an overall schematic diagram of the present invention; Figure 2 It is a three-dimensional schematic diagram of the main furnace drum in the present invention; Figure 3 It is a schematic diagram of the cooperation between the rod taking assembly and the attached furnace drum in the present invention; Figure 4 is a side view of the rod taking assembly of the present invention; Figure 5 It is a schematic diagram of the cooperation between the support column and the main ring tube in the present invention; Figure 6 It is a schematic diagram of the structure of the receiving plate in the rod taking assembly of the present invention; Figure 7 It is a schematic diagram of the structure of the crystal-out assembly in the present invention; Figure 8It is a partial enlarged schematic diagram of the crystal-out assembly in the present invention; Fig. 9 It is a schematic diagram of the expansion component in the present invention; Fig.10 It is a schematic diagram of the cooperation between the expansion component and the seed crystal in the present invention.

[0019] In the figure: 1. support leg; 2. base; 3. placement seat; 4. climbing frame; 5. clamp; 6. support column; 601. sleeve one; 602. receiving plate; 603. sleeve two; 604. electromagnetic lock; 605. electric telescopic rod; 606. driving pad; 607. guide plate; 608. servo motor; 609. bevel gear rod; 600. limit groove; 610. rotating shaft; 611. main ring tube; 7. mounting plate; 8. main furnace tube; 81. insulation tube; 82. T-shaped hot plate; 83. quartz crucible; 84. seed crystal; 85. auxiliary furnace tube; 86. butt tube; 87. wiping strip; 88. cushion layer; 89. speed reduction pad; 841. inverted cone tube; 842. clamping ring; 843. fixing ring; 844. mounting piece; 845. wiping plate; 846. bell; 9. main frame. DETAILED DESCRIPTION

[0020] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0021] Combination Figure 1 and Figure 2 As shown, a single crystal furnace rod taking device described in an embodiment of the present invention comprises a plurality of supporting legs 1, a base 2 is fixedly connected to the top of the plurality of supporting legs 1, a placement seat 3 and a main frame 9 are fixedly connected to the top of the base 2, a clamp 5 is fixedly connected to the outside of the main frame 9, a main furnace barrel 8 is fixedly connected to the top of the placement seat 3, a climbing frame 4 is fixedly connected to the upper part of the outer edge of the clamp 5, a mounting plate 7 is fixedly connected to the rear end of the clamp 5, a support column 6 is transferred to the top of the clamp 5, a feeder is arranged on the outside of the main furnace barrel 8, a crystal taking component and an expansion component are arranged in the main furnace barrel 8, the crystal taking component melts the raw material by adjusting the temperature in the furnace, a rod taking component is arranged on the top of the clamp 5, the rod taking component takes out the single crystal rod by lifting and rotating, the expansion component is used to expand the opening of the main furnace barrel 8, an auxiliary furnace barrel 85 is transferred to the inside of the main furnace barrel 8, a seed crystal 84 is rotatably connected to the bottom end of the auxiliary furnace barrel 85, and a quartz crucible 83 is fixedly connected to the inside of the main furnace barrel 8; When working, the device is first applied to the use scenario of a single crystal furnace. In the process of removing the seed crystal 84, the single crystal rod formed by the seed crystal 84 tends to gradually become heavier due to the adhesion of more raw material solution, which makes it more difficult to remove the seed crystal 84. Using the embodiment of the present invention, the seed crystal 84 is first transported to the main furnace drum 8 through an externally arranged feeder. After the main furnace drum 8 is started, the quartz crucible 83 heats the inside of the main furnace drum 8 to generate high-temperature melting to form a molten pool. The temperature in the main furnace drum 8 is controlled, and the seed crystal 84 is inserted from top to bottom into the molten pool for seeding. The raw material solution in the molten pool is adsorbed on the seed crystal 84. After a layer of raw material in the molten pool is coated on the outside of the seed crystal 84, a single crystal rod is gradually formed. After seeding, the single crystal rod is taken out by lifting and rotating the rod taking assembly. It should be noted that the temperature, speed reduction and position of the seed crystal 84 need to be controlled during operation to ensure the quality and yield of the single crystal rod. Then connect the rod taking assembly to the auxiliary furnace barrel 85, and the auxiliary furnace barrel 85 is rotated and screwed on the top of the main furnace barrel 8 to be fixed. Then start the rod taking assembly, and the rod taking assembly rotates under the power drive. When rotating, the upward force is generated by the squeezing between the threads. When the force rises upward, the auxiliary furnace barrel 85 is linked to move upward synchronously. The auxiliary furnace barrel 85 and the seed crystal 84 are lifted as a whole, and the single crystal rod formed inside the auxiliary furnace barrel 85 is driven synchronously. When it rises to the position of the opening at the top of the main furnace barrel 8, the rotational force will not be blocked by the inner wall of the main furnace barrel 8 at this time, so it rotates to other suitable rod taking positions, so that the single crystal rod is removed and processed; and the opening of the main furnace barrel 8 is expanded by the expansion assembly to solve the problem of single crystal rods that cannot be taken out after their diameter and weight become larger.

[0022] Combination Figure 3 to Figure 4 As shown, the top of the rod-taking assembly includes a rotating shaft 610 that passes through the mounting plate 7, one end of the rotating shaft 610 is externally connected to a servo motor 608, the other end of the rotating shaft 610 is fixedly connected to a bevel gear rod 609, a gear is provided at the bottom end of the support column 6, the outside of the bevel gear rod 609 is meshed with the gear of the support column 6, a main ring tube 611 is connected inside the support column 6, the outer periphery of the main ring tube 611 is connected with a guide plate 607, the top of the guide plate 607 is fixedly connected to a driving pad 606, and the inside of a sleeve 601 is connected to the guide plate 607; a sleeve 601 is fixedly connected to the outer periphery of the support column 6, a limiting groove 600 is provided inside the sleeve 601, and a texture corresponding to the outer periphery of the main ring tube 611 is provided inside the guide plate 607.

[0023] During operation, when performing crystal retrieval processing, two actions, lifting and rotating, are often required, and these two actions usually require two power sources, but this method is more costly. Using the embodiment of the present invention, the servo motor 608 is energized to drive the rotating shaft 610 to rotate, and the rotating shaft 610 drives the bevel gear rod 609 to rotate, and the bevel gear rod 609 is meshed with the gear of the main ring cylinder 611, and the main ring cylinder 611 starts to rotate. When the main ring cylinder 611 rotates, it twists with the internal thread of the guide plate 607, and the guide plate 607 moves along the limit groove. 600 moves upward, and the guide plate 607 drives the driving pad 606 to move synchronously. When the guide plate 607 moves to the uppermost part of the limiting groove 600, the other side is separated from the upper edge of the main furnace barrel 8 and loses the restraining force during rotation. The guide plate 607 rotates along the horizontal notch of the limiting groove 600, so that the single crystal rod is taken out and rotated to other positions for placement, so that the equipment has the function of completing lifting and rotation according to one driving source, which simplifies the operation steps, saves costs, and facilitates the convenience of taking the rod.

[0024] Combination Figures 3 to 6 As shown, a receiving plate 602 is fixedly connected to the outer surface of sleeve 1 601, a sleeve 2 603 is fixedly connected to the top of the receiving plate 602, two electromagnetic locks 604 are clamped on the inner side of sleeve 2 603, one of the electromagnetic locks 604 is connected to an electric telescopic rod 605 on the side, and the electric telescopic rod 605 has a rod body, a sensor, and a processor inside; the outer periphery of the support column 6 and the outer periphery of the sleeve 1 601 are provided with a sliding groove that is compatible with the guide plate 607, the limiting groove 600 is in the shape of an inverted "L", and the sleeve 2 603 is a semicircular structure; the main ring tube 611 passes through the interior of the sleeve 1 601 and the clamp 5, and the bottom end of the main ring tube 611 is fixedly connected to the center of the gear.

[0025] During operation, before the single crystal rod formed inside the main furnace barrel 8 is taken out, the single crystal rod needs to be stabilized to prevent it from falling or getting loose during the process of taking out the rod. When the guide plate 607 rotates along the inside of the sleeve 1 601, the sleeve 1 601 rotates and drives the receiving plate 602 to move synchronously. The receiving plate 602 drives the sleeve 2 603 to rotate. When the sleeve 2 603 rotates, it gradually gets stuck on the outside of the auxiliary furnace barrel 85. At this time, the inner wall of the sleeve 2 603 contacts the outer wall of the auxiliary furnace barrel 85, and the sensor inside the electric telescopic rod 605 receives the The electric signal is received and fed back to the processor of the electric telescopic rod 605. The processor starts to work, and the rod body inside the electric telescopic rod 605 extends. The extension of the rod body pushes the electromagnetic lock 604 on one side to move, and the electromagnetic lock 604 on one side moves to the other side. The two fit each other, and the distance between the two electromagnetic locks 604 gradually shortens. The magnetic forces of the two electromagnetic locks 604 interact with each other, and the two are adsorbed together to form a locking trend, thereby forming a clamping effect on the middle support column 6 to improve the stability of the support column 6 and prevent the single crystal rod from being affected and loosening or falling.

[0026] Combination Figures 7 and 8 As shown, the crystal-out assembly includes an insulation tube 81 installed in the main furnace barrel 8, two T-shaped hot plates 82 are fixedly connected to the outer periphery of the insulation tube 81, and the two T-shaped hot plates 82 are fixedly connected to the quartz crucible 83. A docking tube 86 is connected to the outer periphery of the main furnace barrel 8, and the top of the main furnace barrel 8 is connected to the auxiliary furnace barrel 85; the docking tube 86 is made of stainless steel, and the docking tube 86 passes through the main furnace barrel 8 and extends to the outside of the quartz crucible 83; the inside of the docking tube 86 is hollow, and the bottom of the insulation tube 81 is connected to the placement seat 3; the outer side of the T-shaped hot plate 82 is connected to the inner wall of the main furnace barrel 8, and the inside of the auxiliary furnace barrel 85 is provided with a through groove corresponding to the seed crystal 84, and the inner wall of the auxiliary furnace barrel 85 is clamped with a wiping strip 87, and the top of the wiping strip 87 is fixedly connected to a cushion layer 88, and the front middle of the cushion layer 88 is connected with a speed reduction pad 89.

[0027] During operation, the feeder transfers the single crystal silicon blank into the quartz crucible 83 through the butt joint 86, the T-shaped hot plate 82 heats the temperature, and the quartz crucible 83 performs high-temperature sealing treatment on the single crystal silicon blank, the single crystal silicon blank melts and forms a molten pool, at which time the seed crystal 84 is inserted downward into the quartz crucible 83, and the melted single crystal silicon blank adheres to the outer surface of the seed crystal 84 to form a single crystal rod; When the seed crystal 84 is being processed for rod removal, it often happens that the seed crystal 84 has more crystals and increases in weight, resulting in the problem of falling down due to gravity when being extracted upward, which is not conducive to better rod removal and affects the efficiency of use. When using the embodiment of the present invention, when the seed crystal 84 is inserted downward along the inside of the attached furnace barrel 85, the seed crystal 84 will drive the cushion layer 88 to move downward synchronously, and the speed reduction pad 89 moves synchronously with the cushion layer 88. The speed reduction pad 89 gradually rubs the inner wall of the attached furnace barrel 85, and the wiping strip 87 moves downward and is inserted into the inner cavity of the attached furnace barrel 85. As the weight acts, the wiping strip 87 is inserted into the inner cavity of the attached furnace barrel 85 to form a supporting force, thereby preventing the wiping strip 87 from falling downward due to the large gravity.

[0028] Combination Figures 9 and 10 As shown, an extension component is installed on the top wall of the main furnace barrel 8, and the extension component includes an inverted cone 841 installed on the outside of the seed crystal 84, and a retaining ring 842 is hinged at the bottom of the inverted cone 841. A plurality of bells 846 are fixedly connected to the inner wall of the top of the inverted cone 841, and a plurality of mounting members 844 are fixedly connected to the inner wall of the retaining ring 842. A plurality of mounting members 844 are connected to fixed rings 843 on the sides thereof, and a wiping plate 845 is connected to the top of the mounting member 844. The fixed ring 843 and the wiping plate 845 do not overlap inside the mounting member 844, and the wiping plate 845 is in an "L" shape. The upper part of the main furnace barrel 8 is made of elastic material, and the material of the main furnace barrel 8 is Ni42CrTi elastic alloy. The inner wall of the main furnace barrel 8 is connected to the inverted cone 841, and the retaining ring 842 is clamped to the inner wall of the top of the main furnace barrel 8.

[0029] During operation, due to the increase in the heat field and the increase in the amount of material loaded, the diameter and weight of the single crystal rod also become larger and larger. When the single crystal rod is extracted upward after being crystallized, it is easy to be blocked or stuck by the initial opening of the main furnace tube 8. Therefore, when using the embodiment of the present invention, the seed crystal 84 moves upward after its diameter increases. When the seed crystal 84 passes through the inside of the inverted cone tube 841, the upward movement of the seed crystal 84 with an increased diameter will squeeze the inclined portion of the bottom of the wiping plate 845. The mounting member 844 restricts the wiping plate 845. The inclined portion of the bottom of the wiping plate 845 is integrated with the top. The top of the wiping plate 845 is affected and pushed outward, and the wiping plate 845 is wiped. The top of the plate 845 presses the inverted cone 841 outward, and the inverted cone 841 is deformed. The inverted cone 841 pushes the top wall of the main furnace 8 outward to move, and the opening at the top of the main furnace 8 becomes larger, so that the seed crystal 84 with a larger diameter and weight can pass through the main furnace 8 smoothly, and prevents the problem of being stuck at the opening at the top of the main furnace 8; it should be noted that the mounting member 844 supports the fixing ring 843, and the fixing ring 843 facilitates the synchronous movement of multiple wiping plates 845. The function of the inverted cone 841 is to prevent the wiping plate 845 from directly squeezing the inner wall of the main furnace 8 and causing damage, and plays a buffering role; When the top of the inverted cone 841 opens outward, the bell 846 will move and make a sound to attract the attention of the staff and avoid forgetfulness and drowsiness.

[0030] Working principle: When performing crystal extraction processing, two actions, lifting and rotating, are often required, and these two actions usually require two power sources, but this method is more costly. Using the embodiment of the present invention, the servo motor 608 is energized to drive the rotating shaft 610 to rotate, and the rotating shaft 610 drives the bevel gear rod 609 to rotate, and the bevel gear rod 609 is meshed with the gear of the main ring cylinder 611, and the main ring cylinder 611 starts to rotate. When the main ring cylinder 611 rotates, it twists with the internal thread of the guide plate 607, and the guide plate 607 moves along the limit groove. 600 moves upward, and the guide plate 607 drives the driving pad 606 to move synchronously. When the guide plate 607 moves to the uppermost part of the limiting groove 600, the other side is separated from the upper edge of the main furnace barrel 8 and loses the restraining force during rotation. The guide plate 607 rotates along the horizontal notch of the limiting groove 600, so that the single crystal rod is taken out and rotated to other positions for placement, so that the equipment has the function of completing lifting and rotation according to one driving source, which simplifies the operation steps, saves costs, and facilitates the convenience of taking the rod.

[0031] The feeder transfers the single crystal silicon blank into the quartz crucible 83 through the butt joint 86, and the T-shaped hot plate 82 heats the temperature. The quartz crucible 83 performs high-temperature sealing treatment on the single crystal silicon blank, and the single crystal silicon blank melts and forms a molten pool. At this time, the seed crystal 84 is inserted downward into the quartz crucible 83, and the melted single crystal silicon blank adheres to the outer surface of the seed crystal 84 to form a single crystal rod; Before the single crystal rod formed inside the main furnace barrel 8 is taken out, the single crystal rod needs to be stabilized to prevent it from falling or getting loose during the process of taking out the rod. When the guide plate 607 rotates along the inside of the sleeve 1 601, the sleeve 1 601 rotates and drives the receiving plate 602 to move synchronously. The receiving plate 602 drives the sleeve 2 603 to rotate. When the sleeve 2 603 rotates, it gradually gets stuck on the outside of the auxiliary furnace barrel 85. At this time, the inner wall of the sleeve 2 603 contacts the outer wall of the auxiliary furnace barrel 85, and the sensor inside the electric telescopic rod 605 receives the electric The signal is fed back to the processor of the electric telescopic rod 605, and the processor starts to work. The rod body inside the electric telescopic rod 605 extends, and the extension of the rod body pushes the electromagnetic lock 604 on one side to move, and the electromagnetic lock 604 on one side moves to the other side. The two fit each other, and the distance between the two electromagnetic locks 604 gradually shortens. The magnetic forces of the two electromagnetic locks 604 interact with each other, and the two are adsorbed together to form a locking trend, thereby forming a clamping effect on the middle support column 6 to improve the stability of the support column 6 and prevent the single crystal rod from being affected and loosening or falling.

[0032] When the seed crystal 84 is being processed for rod removal, it is often the case that the seed crystal 84 has more crystals and heavier weight, which causes the seed crystal 84 to fall downward due to gravity when being extracted upward, which is not conducive to better rod removal and affects the efficiency of use. When the seed crystal 84 is inserted downward along the inside of the attached furnace barrel 85, the seed crystal 84 will drive the cushion layer 88 to move downward synchronously, and the speed reduction pad 89 moves synchronously with the cushion layer 88. The speed reduction pad 89 gradually rubs the inner wall of the attached furnace barrel 85, and the wiping strip 87 moves downward and is inserted into the inner cavity of the attached furnace barrel 85. With the effect of weight, the wiping strip 87 forms a supporting force after being inserted into the inner cavity of the attached furnace barrel 85, thereby preventing the seed crystal from falling downward due to heavy gravity. Due to the increase in the heat field and the increase in the amount of charge, the diameter and weight of the single crystal rod are getting larger and larger. When the single crystal rod is extracted upward after the crystal is produced, it is easy to be blocked or stuck by the opening at the top of the main furnace barrel 8. Therefore, using the embodiment of the present invention, the seed crystal 84 moves upward after the diameter becomes larger. When the seed crystal 84 passes through the inside of the inverted cone 841, the upward movement of the seed crystal 84 with the increased diameter will squeeze the inclined part of the bottom of the wiping plate 845. The mounting member 844 restricts the wiping plate 845. The inclined part of the bottom of the wiping plate 845 is integrated with the top. The top of the wiping plate 845 is affected and pushed outward. The top of the wiping plate 845 squeezes the inverted cone 841 outward, and the inverted cone 841 is deformed. The inverted cone 841 pushes the top wall of the main furnace barrel 8 outward to move, and the opening at the top of the main furnace barrel 8 becomes larger, so that the seed crystal 84 with an increased diameter and weight can pass through the main furnace barrel 8 smoothly, thereby preventing the problem of being stuck at the opening at the top of the main furnace barrel 8. When the top of the inverted cone 841 opens outward, the bell 846 will move and make a sound to attract the attention of the staff and avoid forgetfulness and drowsiness.

[0033] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A single crystal furnace rod removal device, characterized in that: The invention comprises a plurality of supporting legs (1), wherein the tops of the plurality of supporting legs (1) are fixedly connected to a base (2), the tops of the bases (2) are fixedly connected to a placement seat (3) and a main frame (9), the tops of the placement seat (3) are fixedly connected to a main furnace barrel (8), the outside of the main frame (9) is fixedly connected to a clamp (5), the rear end of the clamp (5) is fixedly connected to a mounting plate (7), the top of the clamp (5) is connected to a support column (6), the upper part of the outer edge of the clamp (5) is fixedly connected to a climbing frame (4), the outside of the main furnace barrel (8) is provided with a charging machine, and the inside of the main furnace barrel (8) is provided with a A crystal taking component and an expansion component are arranged. The crystal taking component melts the raw material by adjusting the temperature in the furnace. After the growth is completed, the raw material adheres to the inserted rod to form a single crystal rod. A rod taking component is arranged on the top of the clamp (5). The rod taking component is used to take out the single crystal rod by lifting and rotating. The expansion component is used to expand the opening of the main furnace barrel (8). The main furnace barrel (8) is connected with an auxiliary furnace barrel (85) inside. The bottom end of the auxiliary furnace barrel (85) is rotatably connected to a seed crystal (84). A quartz crucible (83) is fixedly connected to the main furnace barrel (8).

2. The single crystal furnace rod taking device according to claim 1, characterized in that: The top of the rod taking assembly comprises a rotating shaft (610) passing through the mounting plate (7); one end of the rotating shaft (610) is externally connected to a servo motor (608); the other end of the rotating shaft (610) is fixedly connected to a bevel gear rod (609); a gear is provided at the bottom end of the support column (6); the outside of the bevel gear rod (609) is meshed with the gear of the support column (6); a main ring tube (611) is connected inside the support column (6); a guide plate (607) is connected to the outer periphery of the main ring tube (611); and a driving pad (606) is fixedly connected to the top end of the guide plate (607).

3. The single crystal furnace rod taking device according to claim 2, characterized in that: The outer periphery of the support column (6) is fixedly connected to a sleeve 1 (601), and a limiting groove (600) is provided inside the sleeve 1 (601). The limiting groove (600) is in the shape of an inverted "L". The guide plate (607) is provided with a texture corresponding to the outer periphery of the main ring tube (611), and the interior of the sleeve 1 (601) is connected to the guide plate (607).

4. The single crystal furnace rod removal device according to claim 3, characterized in that: The outer surface of the sleeve one (601) is fixedly connected to a receiving plate (602), the top of the receiving plate (602) is fixedly connected to the sleeve two (603), the inner side of the sleeve two (603) is clamped with two electromagnetic locks (604), one of the electromagnetic locks (604) is connected to an electric telescopic rod (605) on its side, and the electric telescopic rod (605) has a rod body, a sensor, and a processor inside.

5. The single crystal furnace rod taking device according to claim 2, characterized in that: The outer periphery of the support column (6) and the outer periphery of the first sleeve (601) are both provided with a sliding groove adapted to the guide plate (607), and the second sleeve (603) is a semicircular structure.

6. The single crystal furnace rod taking device according to claim 2, characterized in that: The main ring tube (611) passes through the interior of the sleeve 1 (601) and the clamp (5), and the bottom end of the main ring tube (611) is fixedly connected to the center of the gear.

7. The single crystal furnace rod taking device according to claim 1, characterized in that: The crystal taking assembly comprises a heat preservation tube (81) installed in a main furnace tube (8), two T-shaped hot plates (82) are fixedly connected to the outer periphery of the heat preservation tube (81), and a quartz crucible (83) is fixedly connected between the two T-shaped hot plates (82). A butt-joint tube (86) is connected through the outer periphery of the main furnace tube (8), and the top end of the main furnace tube (8) is connected through the auxiliary furnace tube (85). A wiping strip (87) is clamped on the inner wall of the auxiliary furnace tube (85), and a cushion layer (88) is fixedly connected to the top end of the wiping strip (87). A speed reduction pad (89) is connected to the middle of the front of the cushion layer (88), and a through groove corresponding to the seed crystal (84) is arranged inside the auxiliary furnace tube (85).

8. The single crystal furnace rod taking device according to claim 7, characterized in that: The butt-joint pipe (86) is made of stainless steel, and passes through the main furnace tube (8) and extends to the outside of the quartz crucible (83).

9. The single crystal furnace rod taking device according to claim 7, characterized in that: The interior of the butt-joint tube (86) is hollow, the bottom of the heat-insulating tube (81) is connected to the placement seat (3), and the outer side of the T-shaped heat plate (82) is connected to the inner wall of the main furnace tube (8).

10. The single crystal furnace rod taking device according to claim 1, characterized in that: An extension component is installed on the inner top wall of the main furnace barrel (8), and the extension component includes an inverted cone barrel (841) installed outside the seed crystal (84), a clamping ring (842) is hinged on the bottom of the inverted cone barrel (841), a plurality of bells (846) are fixedly connected to the inner wall of the top of the inverted cone barrel (841), a plurality of mounting members (844) are fixedly connected to the inner side wall of the clamping ring (842), and a fixing ring (843) is connected to the side edges of the plurality of mounting members (844), and the mounting members (844) are connected to the inner side walls of the plurality of mounting members (844). A wiping plate (845) is connected to the top of the main furnace drum (844), the fixing ring (843) and the wiping plate (845) do not overlap inside the mounting member (844), the wiping plate (845) is in an "L" shape, the upper portion of the main furnace drum (8) is made of elastic material, the material of the main furnace drum (8) is Ni42CrTi elastic alloy, the inner side wall of the main furnace drum (8) is connected to the inverted cone drum (841), and the clamping ring (842) is clamped to the inner wall of the top of the main furnace drum (8).

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