Method and device for measuring diameters of auxiliary furnace and crystal bar of crystal pulling furnace

Abstract

The invention provides an auxiliary furnace of a crystal pulling furnace, and a crystal bar diameter measuring method and device. The auxiliary furnace of the crystal pulling furnace comprises an auxiliary furnace chamber, a seed crystal clamp and a diameter measuring device, the seed crystal clamp is arranged at the top of the auxiliary furnace chamber and is used for fixing a seed crystal at one end of a crystal bar in the auxiliary furnace chamber; the diameter measuring device comprises a measuring device main body, four range finders and a calculation module, the measuring device main body is of an annular structure and is arranged at the bottom of the auxiliary furnace chamber, and the crystal bar penetrates through the measuring device main body; the four range finders are uniformly arranged on the inner wall of the measuring device main body, are flush with the inner wall of the auxiliary furnace chamber and are used for measuring the distance to the surface of the crystal bar; and the calculation module is arranged on the measuring device main body and is used for calculating the diameter of the crystal bar according to the distance between the range finder and the surface of the crystal bar. The problem that in the prior art, after crystal pulling is finished, a crystal bar needs to be moved out of a crystal pulling furnace, and then diameter measurement can be conducted is solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a crystal pulling furnace auxiliary furnace, a crystal rod diameter measurement method and a device. Background Art

[0002] At present, the diameter of the crystal rod product is measured by using a diameter measuring device. Specifically, after the crystal pulling is completed, the crystal rod is removed from the crystal pulling furnace and then transferred to the diameter measuring device for measurement. However, the use of the diameter measuring device movement to measure the diameter results in an additional transfer procedure during the wafer processing, increasing the risk of crystal rod collision. In addition, the diameter measuring device requires a certain waiting time when measuring the diameter of the crystal rod, resulting in low overall efficiency in wafer production. Summary of the invention

[0003] The embodiment of the present invention provides a crystal pulling furnace auxiliary furnace, a crystal rod diameter measurement method and device, which are used to solve the problem in the prior art that the crystal rod needs to be moved out of the crystal pulling furnace after crystal pulling is completed in order to measure the diameter.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0005] In a first aspect, an embodiment of the present invention provides a crystal pulling furnace auxiliary furnace, comprising:

[0006] Auxiliary furnace chamber, seed crystal fixture and diameter measuring device;

[0007] The seed crystal clamp is arranged at the top of the auxiliary furnace chamber, and is used to fix the seed crystal at one end of the crystal rod in the auxiliary furnace chamber;

[0008] The diameter measuring device is used to measure the diameter of the crystal rod, and includes:

[0009] The measuring device body, four rangefinders and a computing module;

[0010] The measuring device body is a ring-shaped structure, which is arranged at the bottom of the auxiliary furnace chamber, and the crystal rod passes through the measuring device body;

[0011] The four distance meters are evenly arranged on the inner wall of the measuring device body and flush with the inner wall of the auxiliary furnace chamber, and are used to measure the distance to the surface of the crystal rod;

[0012] The calculation module is arranged on the measuring device body, and is used to calculate the diameter of the crystal rod according to the distance from the distance meter to the surface of the crystal rod.

[0013] Furthermore, a flange is provided at the bottom of the auxiliary furnace chamber;

[0014] After the auxiliary furnace chamber is separated from the main furnace chamber of the crystal pulling furnace, the measuring device body is connected to the flange through fasteners.

[0015] Furthermore, the measuring device body is nested in the auxiliary furnace chamber and fixedly connected to the auxiliary furnace chamber.

[0016] Furthermore, the diameter measuring device further comprises: an early warning device;

[0017] The early warning device is arranged on the main body of the measuring device, and is used to send out an early warning signal when the distance from the surface of the crystal rod measured by any of the distance meters is less than a preset threshold.

[0018] Furthermore, the rangefinder comprises:

[0019] Signal transceiver;

[0020] The signal transceiver is used to transmit a measurement signal to the surface of the crystal rod, receive the measurement signal reflected by the surface of the crystal rod, and calculate the distance from the signal transceiver to the surface of the crystal rod according to a first time when the signal transceiver transmits the measurement signal and a second time when the signal transceiver receives the reflected measurement signal;

[0021] The signal transceiver includes: an optical signal transceiver and / or an acoustic signal transceiver.

[0022] In a second aspect, an embodiment of the present invention provides a method for measuring the diameter of a crystal rod, which is applied to the auxiliary furnace of the crystal pulling furnace as described above, comprising:

[0023] Obtaining a first distance, a second distance, a third distance, and a fourth distance from the surface of the crystal rod respectively measured by the four distance meters;

[0024] The diameter of the crystal rod is calculated according to the first distance, the second distance, the third distance and the fourth distance.

[0025] Further, calculating the diameter of the crystal rod according to the first distance, the second distance, the third distance and the fourth distance includes:

[0026] When the first distance, the second distance, the third distance and the fourth distance are all the same, the diameter of the crystal rod is determined to be twice the difference between the radius of the inner wall of the auxiliary furnace chamber and the first distance;

[0027] When at least two of the first distance, the second distance, the third distance, and the fourth distance are different, the diameter of the crystal ingot is calculated according to the fifth distance and the sixth distance; the fifth distance is the distance from the axis of the crystal ingot to the first straight line, the sixth distance is the distance from the axis of the crystal ingot to the second straight line, the first straight line is a straight line formed by connecting the first and third distance meters that are relatively arranged, and the second straight line is a straight line formed by connecting the second and fourth distance meters that are relatively arranged;

[0028] Wherein, the fifth distance and the sixth distance are determined according to the first distance, the second distance, the third distance, the fourth distance and the diameter of the auxiliary furnace chamber.

[0029] Further, determining the fifth distance and the sixth distance according to the first distance, the second distance, the third distance, the fourth distance and the diameter of the auxiliary furnace chamber includes:

[0030] The fifth distance is determined by the following formula:

[0031]

[0032] Wherein, L6 is the fifth distance, D is the diameter of the auxiliary furnace chamber, L1 is the first distance, and L3 is the third distance;

[0033] The sixth distance is determined by the following formula:

[0034]

[0035] Among them, L7 is the sixth distance, L2 is the second distance, and L4 is the fourth distance.

[0036] Furthermore, the crystal rod diameter measurement method further includes:

[0037] When any one of the first distance, the second distance, the third distance and the fourth distance is smaller than a preset threshold, a warning signal is issued.

[0038] In a third aspect, an embodiment of the present invention provides a device for measuring a diameter of a crystal rod, comprising:

[0039] An acquisition module, used to acquire a first distance, a second distance, a third distance and a fourth distance from the surface of the crystal rod measured by four distance meters;

[0040] A calculation module is used to calculate the diameter of the crystal rod according to the first distance, the second distance, the third distance and the fourth distance.

[0041] The beneficial effects of the present invention are:

[0042] The auxiliary furnace of the crystal pulling furnace of the embodiment of the present invention can measure the diameter of the crystal rod while it is still in the auxiliary furnace chamber by arranging a diameter measuring device at the bottom of the auxiliary furnace chamber, thereby avoiding unnecessary collisions during the transfer of the crystal rod to the diameter measuring device and reducing the risk of damage to the surface of the crystal rod; the four distance meters can ensure the accuracy of measuring the diameter of the crystal rod, thus solving the problem in the prior art that the crystal rod needs to be moved out of the crystal pulling furnace before the diameter can be measured after the crystal pulling is completed. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 A schematic diagram showing the structure of a crystal pulling furnace auxiliary furnace according to an embodiment of the present invention;

[0044] Figure 2 A schematic diagram showing the structure of the measuring device body according to an embodiment of the present invention;

[0045] Figure 3 A schematic diagram showing the structure of a diameter measuring device according to an embodiment of the present invention;

[0046] Figure 4 A schematic diagram showing the steps of a method for measuring a crystal rod diameter according to an embodiment of the present invention;

[0047] Figure 5 One schematic diagram showing the principle of the method for measuring the diameter of a crystal rod according to an embodiment of the present invention;

[0048] Figure 6 A second schematic diagram showing the principle of the method for measuring the diameter of a crystal rod according to an embodiment of the present invention;

[0049] Figure 7 A schematic diagram of a module of a crystal rod diameter measuring device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0050] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will be described in detail in conjunction with the accompanying drawings and specific embodiments. In the following description, specific details such as specific configurations and components are provided only to help fully understand the embodiments of the present invention. Therefore, it should be clear to those skilled in the art that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. In addition, for clarity and brevity, the description of known functions and structures is omitted.

[0051] It should be understood that the references to "one embodiment" or "an embodiment" throughout the specification mean that the specific features, structures, or characteristics associated with the embodiment are included in at least one embodiment of the present invention. Therefore, the references to "in one embodiment" or "in an embodiment" appearing throughout the specification do not necessarily refer to the same embodiment. In addition, these specific features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0052] The present invention aims to solve the problem in the prior art that after crystal pulling is completed, the crystal rod needs to be moved out of the crystal pulling furnace before the diameter can be measured, and provides a crystal pulling furnace auxiliary furnace, a crystal rod diameter measurement method and a device.

[0053] like Figures 1 to 3 As shown, an embodiment of the present invention provides a crystal pulling furnace auxiliary furnace, comprising:

[0054] Auxiliary furnace chamber 1, seed crystal fixture 2 and diameter measuring device 3;

[0055] The seed crystal fixture 2 is disposed at the top of the auxiliary furnace chamber 1 and is used to fix the seed crystal at one end of the crystal rod 4 in the auxiliary furnace chamber;

[0056] The diameter measuring device 3 is used to measure the diameter of the crystal rod 4, and includes:

[0057] The measuring device body 31, four distance meters 32-35 and a computing module;

[0058] The measuring device body 31 is a ring-shaped structure, disposed at the bottom of the auxiliary furnace chamber 1, and the crystal rod 4 passes through the measuring device body 31;

[0059] The four distance meters 32-35 are evenly arranged on the inner wall of the measuring device body 31 and flush with the inner wall of the auxiliary furnace chamber 1, and are used to measure the distance to the surface of the crystal rod 4;

[0060] The calculation module is disposed on the measuring device body 31 , and is used to calculate the diameter of the crystal rod 4 according to the distance from the distance meter 32 - 35 to the surface of the crystal rod 4 .

[0061] Optionally, the rangefinder comprises:

[0062] A first rangefinder 32 , a second rangefinder 33 , a third rangefinder 34 , and a fourth rangefinder 35 .

[0063] Wherein, the first end of the crystal rod is the end close to the top of the auxiliary furnace chamber.

[0064] By aligning the distance meter with the inner wall of the auxiliary furnace chamber, the diameter of the crystal rod can be measured and calculated more quickly and accurately.

[0065] The auxiliary furnace of the crystal pulling furnace of the embodiment of the present invention can measure the diameter of the crystal rod while it is still in the auxiliary furnace chamber by arranging a diameter measuring device at the bottom of the auxiliary furnace chamber, thereby avoiding unnecessary collisions during the transfer of the crystal rod to the diameter measuring device and reducing the risk of damage to the surface of the crystal rod; the four distance meters can ensure the accuracy of measuring the diameter of the crystal rod, thus solving the problem in the prior art that the crystal rod needs to be moved out of the crystal pulling furnace before the diameter can be measured after the crystal pulling is completed.

[0066] Optionally, a flange 5 is provided at the bottom of the auxiliary furnace chamber 1;

[0067] After the auxiliary furnace chamber 1 is separated from the main furnace chamber of the crystal pulling furnace, the measuring device body 31 is connected to the flange 5 via a fastener 36 .

[0068] Optionally, a second flange 6 is provided on the top of the auxiliary furnace chamber 1;

[0069] The seed crystal fixture 2 is fixed to the top of the auxiliary furnace chamber 1 through the second flange 6 .

[0070] It should be noted that the main body of the measuring device is connected to the flange through fasteners; and the auxiliary furnace chamber and the main furnace chamber are connected through an isolation valve or vacuum adsorption. Therefore, the diameter measuring device can only be installed on the bottom of the auxiliary furnace chamber after the auxiliary furnace chamber is separated from the main furnace chamber.

[0071] In one embodiment of the present invention, after crystal pulling is completed, the auxiliary furnace chamber is separated from the main furnace chamber, and after separation, the auxiliary furnace chamber is controlled to move in the horizontal direction so that the orthographic projection of the auxiliary furnace chamber on the first plane does not overlap with the orthographic projection of the main furnace chamber on the first plane; the first plane is the plane between the auxiliary furnace chamber and the main furnace chamber in the horizontal direction; then, the diameter measuring device is connected to the flange through the fastener.

[0072] Optionally, the fastener comprises:

[0073] Bolt and nut combinations, studs, screw and nut combinations and pins.

[0074] The auxiliary furnace of the crystal pulling furnace in the embodiment of the present invention connects the diameter measuring unit to the flange at the bottom of the auxiliary furnace chamber by fasteners, so that the diameter of the crystal rod can be measured before the crystal rod is taken out of the auxiliary furnace chamber, reducing the risk of collision to the crystal rod.

[0075] Optionally, the measuring device body 31 is nested in the auxiliary furnace chamber 1 and fixedly connected to the auxiliary furnace chamber 1 .

[0076] It should be noted that, by placing the main body of the measuring device in the auxiliary furnace chamber, the diameter of the crystal rod can be measured in real time, so that the crystal pulling process can be better controlled; and the diameter of the crystal rod can be measured before the crystal rod is taken out of the auxiliary furnace chamber, thereby reducing the risk of collision with the crystal rod and saving measurement time.

[0077] Optionally, the diameter measuring device further comprises: an early warning device 37;

[0078] The warning device 37 is disposed on the measuring device body 31 and is used to send out a warning signal when the distance from the surface of the crystal rod 4 measured by any of the distance meters is less than a preset threshold.

[0079] It should be noted that the seed crystal clamp only fixes the seed crystal part at the first end of the crystal rod. Therefore, when the auxiliary furnace chamber moves horizontally, the second end of the crystal rod is prone to shaking. When the shaking amplitude is large, it will collide with the inside of the auxiliary furnace chamber.

[0080] The distance from the surface of the crystal rod measured by any of the distance meters is less than a preset threshold value, that is, the crystal rod shakes severely in the auxiliary furnace chamber, and if it is not controlled, it will cause a collision with the inside of the auxiliary furnace chamber.

[0081] Optionally, the warning signal includes:

[0082] Warning reminder business, warning reminder text information and warning reminder picture information.

[0083] The auxiliary furnace of the crystal pulling furnace in the embodiment of the present invention can monitor the shaking degree of the crystal rod by providing the early warning device, thereby issuing an early warning when the crystal rod shakes violently to avoid collision between the crystal rod and the auxiliary furnace chamber.

[0084] Optionally, the rangefinder comprises:

[0085] Signal transceiver;

[0086] The signal transceiver is used to transmit a measurement signal to the surface of the crystal rod, receive the measurement signal reflected by the surface of the crystal rod, and calculate the distance from the signal transceiver to the surface of the crystal rod according to a first time when the signal transceiver transmits the measurement signal and a second time when the signal transceiver receives the reflected measurement signal;

[0087] The signal transceiver includes: an optical signal transceiver and / or an acoustic signal transceiver.

[0088] The auxiliary furnace of the crystal pulling furnace of the embodiment of the present invention uses the new high transceiver as a rangefinder, which can accurately measure the distance from the rangefinder to the surface of the crystal rod without being affected by the measurement environment, thereby accurately calculating the diameter of the crystal rod.

[0089] like Figure 4 As shown, an embodiment of the present invention further provides a method for measuring the diameter of a crystal rod, which is applied to the auxiliary furnace of the crystal pulling furnace as described above, and comprises the following steps:

[0090] Step 401, obtaining a first distance, a second distance, a third distance and a fourth distance from the surface of the crystal rod respectively measured by the four distance meters;

[0091] Step 402: Calculate the diameter of the crystal rod according to the first distance, the second distance, the third distance, and the fourth distance.

[0092] The crystal rod diameter measuring method of the embodiment of the present invention can measure the diameter of the crystal rod while the crystal rod is still in the auxiliary furnace chamber, avoiding unnecessary bumps during the process of transferring the crystal rod to the diameter measuring device, and reducing the risk of damage to the crystal rod surface.

[0093] like Figure 5 and Figure 6 As shown, the first distance is L1, the second distance is L2, the third distance is L3, and the fourth distance is L4.

[0094] It should be noted that, when the crystal rod does not shake, the first distance, the second distance, the third distance and the fourth distance are all the same; when the crystal rod shakes, at least two of the first distance, the second distance, the third distance and the fourth distance are different.

[0095] Optionally, calculating the diameter of the crystal rod according to the first distance, the second distance, the third distance and the fourth distance includes:

[0096] When the first distance, the second distance, the third distance and the fourth distance are all the same, the diameter of the crystal rod is determined to be twice the difference between the radius of the inner wall of the auxiliary furnace chamber and the first distance;

[0097] When at least two of the first distance, the second distance, the third distance, and the fourth distance are different, the diameter of the crystal ingot is calculated according to the fifth distance and the sixth distance; the fifth distance is the distance from the axis of the crystal ingot to the first straight line, the sixth distance is the distance from the axis of the crystal ingot to the second straight line, the first straight line is a straight line formed by connecting the first and third distance meters that are relatively arranged, and the second straight line is a straight line formed by connecting the second and fourth distance meters that are relatively arranged;

[0098] Wherein, the fifth distance and the sixth distance are determined according to the first distance, the second distance, the third distance, the fourth distance and the diameter of the auxiliary furnace chamber.

[0099] In the embodiment of the present invention, when the crystal ingot does not shake, the crystal ingot is coaxial with the auxiliary furnace chamber, and the distances to the surface of the crystal ingot measured by the four distance measuring devices are the same; the radius of the crystal ingot is the difference between the radius inside the auxiliary furnace chamber and the first distance (the second distance, the third distance or the fourth distance);

[0100] When the crystal ingot shakes, at least two of the distances from the four distance meters to the surface of the crystal ingot are different, and the diameter of the crystal ingot needs to be further calculated.

[0101] Optionally, determining the fifth distance and the sixth distance according to the first distance, the second distance, the third distance, the fourth distance and the diameter of the auxiliary furnace chamber includes:

[0102] The fifth distance is determined by the following formula:

[0103]

[0104] Wherein, L5 is the fifth distance, D is the diameter of the auxiliary furnace chamber, L1 is the first distance, and L3 is the third distance;

[0105] The sixth distance is determined by the following formula:

[0106]

[0107] Among them, L6 is the sixth distance, L2 is the second distance, and L4 is the fourth distance.

[0108] like Figure 6 As shown, the fifth distance is the distance between point G and point F;

[0109] The sixth distance is the distance between point E and point F;

[0110] The distance between point G and point E is the radius of the crystal rod;

[0111] Therefore, the fifth distance and the sixth distance are determined according to the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber, thereby determining the diameter of the crystal rod.

[0112] Specifically, the diameter of the crystal rod is calculated by the following formula:

[0113]

[0114] Wherein, d is the diameter of the crystal rod.

[0115] Optionally, the crystal rod diameter measurement method further includes:

[0116] When any one of the first distance, the second distance, the third distance and the fourth distance is smaller than a preset threshold, a warning signal is issued.

[0117] If any one of the first distance, the second distance, the third distance and the fourth distance is smaller than a preset threshold, it means that the crystal rod has been severely shaken in the auxiliary furnace chamber. If the shaking amplitude continues to increase, the crystal rod will collide with the inside of the auxiliary furnace chamber. Therefore, it is necessary to issue an early warning at this time to prompt the operator to control the shaking degree of the crystal rod to avoid collision in the captive chamber.

[0118] like Figure 7 As shown, the embodiment of the present invention further provides a crystal rod diameter measuring device 700, comprising:

[0119] An acquisition module 701 is used to acquire a first distance, a second distance, a third distance and a fourth distance from the surface of the crystal rod measured by four distance meters;

[0120] The calculation module 702 is used to calculate the diameter of the crystal rod according to the first distance, the second distance, the third distance and the fourth distance.

[0121] The crystal rod diameter measuring device of the embodiment of the present invention can measure the diameter of the crystal rod while the crystal rod is still in the auxiliary furnace chamber, avoiding unnecessary bumps during the process of transferring the crystal rod to the diameter measuring device and reducing the risk of damage to the crystal rod surface.

[0122] In addition, a specific embodiment of the present invention further provides a crystal rod diameter measuring device, including a transceiver and a processor;

[0123] The transceiver is used to obtain a first distance, a second distance, a third distance and a fourth distance from the surface of the crystal rod measured by four distance meters;

[0124] The processor is used to calculate the diameter of the crystal rod according to the first distance, the second distance, the third distance and the fourth distance.

[0125] In addition, a specific embodiment of the present invention further provides a computer-readable storage medium on which a computer program is stored, and when the program is executed by a processor, the steps of the above-mentioned method for measuring the diameter of a crystal rod are implemented. And the same technical effect can be achieved, so in order to avoid repetition, it will not be repeated here.

[0126] The embodiment of the present application also provides a computer program product, including computer instructions. When the computer instructions are executed by a processor, the various processes of the above-mentioned crystal rod diameter measurement method embodiment are implemented, and the same technical effect can be achieved. To avoid repetition, they are not repeated here.

[0127] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary personnel in this technical field, several improvements and modifications can be made without departing from the principles described in the present invention. These improvements and modifications are also within the scope of protection of the present invention.

Claims

1. A crystal pulling furnace auxiliary furnace, characterized in that: include: Auxiliary furnace chamber, seed crystal fixture and diameter measuring device; The seed crystal clamp is arranged at the top of the auxiliary furnace chamber, and is used to fix the seed crystal at one end of the crystal rod in the auxiliary furnace chamber; The diameter measuring device is used to measure the diameter of the crystal rod, and includes: The measuring device body, four rangefinders and a computing module; The measuring device body is a ring-shaped structure, which is arranged at the bottom of the auxiliary furnace chamber, and the crystal rod passes through the measuring device body; The four distance meters are evenly arranged on the inner wall of the measuring device body and flush with the inner wall of the auxiliary furnace chamber, and are used to measure the distance to the surface of the crystal rod; The calculation module is arranged on the measuring device body, and is used to calculate the diameter of the crystal rod according to the distance from the distance meter to the surface of the crystal rod.

2. The auxiliary furnace of the crystal pulling furnace according to claim 1, characterized in that: A flange is provided at the bottom of the auxiliary furnace chamber; After the auxiliary furnace chamber is separated from the main furnace chamber of the crystal pulling furnace, the measuring device body is connected to the flange through fasteners.

3. The auxiliary furnace of the crystal pulling furnace according to claim 1, characterized in that: The measuring device body is nested in the auxiliary furnace chamber and fixedly connected to the auxiliary furnace chamber.

4. The auxiliary furnace of the crystal pulling furnace according to claim 1, characterized in that: The diameter measuring device further comprises: an early warning device; The early warning device is arranged on the main body of the measuring device, and is used to send out an early warning signal when the distance from the surface of the crystal rod measured by any of the distance meters is less than a preset threshold.

5. The auxiliary furnace of the crystal pulling furnace according to claim 1, characterized in that: The rangefinder comprises: Signal transceiver; The signal transceiver is used to transmit a measurement signal to the surface of the crystal rod, receive the measurement signal reflected by the surface of the crystal rod, and calculate the distance from the signal transceiver to the surface of the crystal rod according to a first time when the signal transceiver transmits the measurement signal and a second time when the signal transceiver receives the reflected measurement signal; The signal transceiver includes: an optical signal transceiver and / or an acoustic signal transceiver.

6. A method for measuring the diameter of a crystal rod, characterized in that: The auxiliary furnace of the crystal pulling furnace according to any one of claims 1 to 5 comprises: Obtaining a first distance, a second distance, a third distance, and a fourth distance from the surface of the crystal rod respectively measured by the four distance meters; The diameter of the crystal rod is calculated according to the first distance, the second distance, the third distance and the fourth distance.

7. The method for measuring the diameter of a crystal rod according to claim 6, characterized in that: The calculating the diameter of the crystal rod according to the first distance, the second distance, the third distance and the fourth distance includes: When the first distance, the second distance, the third distance and the fourth distance are all the same, the diameter of the crystal rod is determined to be twice the difference between the radius of the inner wall of the auxiliary furnace chamber and the first distance; When at least two of the first distance, the second distance, the third distance, and the fourth distance are different, the diameter of the crystal ingot is calculated according to the fifth distance and the sixth distance; the fifth distance is the distance from the axis of the crystal ingot to the first straight line, the sixth distance is the distance from the axis of the crystal ingot to the second straight line, the first straight line is a straight line formed by connecting the first and third distance meters that are relatively arranged, and the second straight line is a straight line formed by connecting the second and fourth distance meters that are relatively arranged; Wherein, the fifth distance and the sixth distance are determined according to the first distance, the second distance, the third distance, the fourth distance and the diameter of the auxiliary furnace chamber.

8. The method for measuring the diameter of a crystal rod according to claim 7, characterized in that: Determining the fifth distance and the sixth distance according to the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber includes: The fifth distance is determined by the following formula: Wherein, L6 is the fifth distance, D is the diameter of the auxiliary furnace chamber, L1 is the first distance, and L3 is the third distance; The sixth distance is determined by the following formula: Among them, L7 is the sixth distance, L2 is the second distance, and L4 is the fourth distance.

9. The method for measuring the diameter of a crystal rod according to claim 6, characterized in that: Also includes: When any one of the first distance, the second distance, the third distance and the fourth distance is smaller than a preset threshold, a warning signal is issued.

10. A crystal rod diameter measuring device, characterized in that: include: An acquisition module, used to acquire a first distance, a second distance, a third distance and a fourth distance from the surface of the crystal rod measured by four distance meters; A calculation module is used to calculate the diameter of the crystal rod according to the first distance, the second distance, the third distance and the fourth distance.

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