A method and apparatus for measuring the diameter of a crystal pulling furnace auxiliary furnace and a crystal rod.

Abstract

This invention provides a secondary furnace for a crystal pulling furnace, a method and apparatus for measuring the diameter of a crystal rod. The secondary furnace includes a secondary furnace chamber, a seed crystal clamp, and a diameter measuring device. The seed crystal clamp is disposed at the top of the secondary furnace chamber and is used to fix a seed crystal at one end of a crystal rod inside the secondary furnace chamber. The diameter measuring device includes a measuring device body, four distance measuring instruments, and a calculation module. The measuring device body has a ring-shaped structure and is disposed at the bottom of the secondary furnace chamber, with the crystal rod passing through the measuring device body. The four distance measuring instruments are evenly disposed on the inner wall of the measuring device body and flush with the inner wall of the secondary furnace chamber, and are used to measure the distance to the surface of the crystal rod. The calculation module is disposed on the measuring device body and is used to calculate the diameter of the crystal rod based on the distance from the distance measuring instruments to the surface of the crystal rod. This invention solves the problem in the prior art that the crystal rod needs to be removed from the crystal pulling furnace after crystal pulling before diameter measurement can be performed.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and in particular to a sub-furnace for a crystal pulling furnace, a method and apparatus for measuring the diameter of crystal rods. Background Technology

[0002] Currently, the diameter of crystal ingots is measured using diameter measuring equipment. Specifically, after crystal pulling, the ingot is removed from the pulling furnace and then transferred to the diameter measuring equipment for measurement. However, using a diameter measuring equipment mechanism to measure the diameter adds an extra transfer step to the wafer processing, increasing the risk of ingot damage. Furthermore, the diameter measuring equipment requires a certain waiting time to measure the ingot diameter, resulting in lower overall wafer production efficiency. Summary of the Invention

[0003] This invention provides a secondary furnace for a crystal pulling furnace, a method and apparatus for measuring the diameter of crystal rods, to solve the problem in the prior art that the crystal rods need to be removed from the crystal pulling furnace after crystal pulling before the diameter can be measured.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] In a first aspect, embodiments of the present invention provide a secondary furnace for a crystal pulling furnace, comprising:

[0006] Auxiliary furnace chamber, seed crystal fixture, and diameter measuring device;

[0007] The seed crystal clamp is located at the top of the auxiliary furnace chamber and is used to fix the seed crystal at one end of the crystal rod inside the auxiliary furnace chamber.

[0008] The diameter measuring device, used to measure the diameter of the crystal rod, includes:

[0009] The main body of the measuring device, four rangefinders, and a calculation module;

[0010] The main body of the measuring device is a ring-shaped structure, located at the bottom of the auxiliary furnace chamber, and the crystal rod passes through the main body of the measuring device;

[0011] Four of the aforementioned rangefinders are evenly arranged on the inner wall of the main body of the measuring device and flush with the inner wall of the auxiliary furnace chamber, for measuring the distance to the surface of the crystal rod;

[0012] The calculation module is mounted on the main body of the measuring device and is used to calculate the diameter of the crystal rod based on the distance from the rangefinder to the surface of the crystal rod.

[0013] Furthermore, a flange is provided at the bottom of the auxiliary furnace chamber;

[0014] After the auxiliary furnace chamber is separated from the main furnace chamber of the crystal pulling furnace, the main body of the measuring device is connected to the flange by fasteners.

[0015] Furthermore, the main body of the measuring device is nested inside the auxiliary furnace chamber and is fixedly connected to the auxiliary furnace chamber.

[0016] Furthermore, the diameter measuring device also includes: an early warning device;

[0017] The warning device is mounted on the main body of the measuring device and is used to issue a warning signal when the distance measured by any of the rangefinders to the surface of the crystal rod is less than a preset threshold.

[0018] Furthermore, the rangefinder includes:

[0019] Signal transceiver;

[0020] The transceiver is used to transmit a measurement signal to the surface of the crystal rod, receive the measurement signal reflected back through the surface of the crystal rod, and calculate the distance from the transceiver to the surface of the crystal rod based on the first time of transmitting the measurement signal and the second time of receiving the reflected measurement signal.

[0021] The transceiver includes: optical transceiver and / or acoustic transceiver.

[0022] In a second aspect, embodiments of the present invention provide a method for measuring the diameter of a crystal rod, applied to a secondary furnace of a crystal pulling furnace as described above, comprising:

[0023] The first distance, second distance, third distance, and fourth distance to the surface of the crystal rod are obtained by the four rangefinders respectively;

[0024] The diameter of the crystal rod is calculated based on the first distance, the second distance, the third distance, and the fourth distance.

[0025] Further, calculating the diameter of the crystal rod based on the first distance, the second distance, the third distance, and the fourth distance includes:

[0026] When the first distance, the second distance, the third distance, and the fourth distance are all the same, the diameter of the crystal rod is determined to be twice the difference between the radius of the inner wall of the auxiliary furnace chamber and the first distance;

[0027] If at least two of the first distance, the second distance, the third distance, and the fourth distance are different, the diameter of the crystal rod is calculated based on the fifth distance and the sixth distance; the fifth distance is the distance from the axis of the crystal rod to the first straight line, and the sixth distance is the distance from the axis of the crystal rod to the second straight line; the first straight line is a straight line formed by connecting the first and third rangefinders that are arranged opposite each other, and the second straight line is a straight line formed by connecting the second and fourth rangefinders that are arranged opposite each other;

[0028] The fifth distance and the sixth distance are determined based on the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber.

[0029] Further, determining the fifth and sixth distances based on the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber includes:

[0030] The fifth distance is determined by the following formula:

[0031]

[0032] Wherein, L6 is the fifth distance, D is the diameter of the auxiliary furnace chamber, L1 is the first distance, and L3 is the third distance;

[0033] The sixth distance is determined by the following formula:

[0034]

[0035] Wherein, L7 is the sixth distance, L2 is the second distance, and L4 is the fourth distance.

[0036] Furthermore, the method for measuring the diameter of the crystal rod also includes:

[0037] If any one of the first distance, the second distance, the third distance, and the fourth distance is less than a preset threshold, an early warning signal is issued.

[0038] Thirdly, embodiments of the present invention provide a crystal rod diameter measuring device, comprising:

[0039] The acquisition module is used to acquire the first distance, second distance, third distance and fourth distance to the crystal rod surface measured by four rangefinders;

[0040] The calculation module is used to calculate the diameter of the crystal rod based on the first distance, the second distance, the third distance, and the fourth distance.

[0041] The beneficial effects of the present invention are:

[0042] The auxiliary furnace of the crystal pulling furnace in this embodiment of the invention, by setting a diameter measuring device at the bottom of the auxiliary furnace chamber, allows for the measurement of the crystal rod's diameter while it is still inside the auxiliary furnace chamber. This avoids unnecessary bumps and knocks during the transfer of the crystal rod to the diameter measuring device, reducing the risk of surface damage to the crystal rod. The four measuring instruments ensure the accuracy of the crystal rod's diameter measurement. This solves the problem in the prior art where the crystal rod needs to be removed from the crystal pulling furnace after pulling to measure its diameter. Attached Figure Description

[0043] Figure 1 A schematic diagram showing the structure of the auxiliary furnace of the crystal pulling furnace according to an embodiment of the present invention;

[0044] Figure 2 A schematic diagram showing the structure of the main body of the measuring device according to an embodiment of the present invention;

[0045] Figure 3 This is a schematic diagram showing the structure of the diameter measuring device according to an embodiment of the present invention;

[0046] Figure 4 A schematic diagram illustrating the steps of the crystal rod diameter measurement method according to an embodiment of the present invention;

[0047] Figure 5 One of the schematic diagrams illustrating the principle of the crystal rod diameter measurement method according to an embodiment of the present invention;

[0048] Figure 6 A second schematic diagram illustrating the principle of the crystal rod diameter measurement method according to an embodiment of the present invention;

[0049] Figure 7 This is a schematic diagram of the module of the crystal rod diameter measuring device according to an embodiment of the present invention. Detailed Implementation

[0050] To make the technical problems, technical solutions, and advantages of this invention clearer, a detailed description will be provided below in conjunction with the accompanying drawings and specific embodiments. In the following description, specific details such as particular configurations and components are provided merely to aid in a comprehensive understanding of the embodiments of this invention. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this invention. Furthermore, for clarity and brevity, descriptions of known functions and structures have been omitted.

[0051] It should be understood that the phrase "one embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of the invention. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification do not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0052] This invention addresses the problem in the prior art that the crystal rod needs to be removed from the crystal pulling furnace after crystal pulling before its diameter can be measured, by providing a secondary furnace for the crystal pulling furnace, a method and apparatus for measuring the diameter of the crystal rod.

[0053] like Figures 1 to 3 As shown, an embodiment of the present invention provides a secondary furnace for a crystal pulling furnace, comprising:

[0054] Auxiliary furnace chamber 1, seed crystal clamp 2, and diameter measuring device 3;

[0055] The seed crystal clamp 2 is disposed at the top of the auxiliary furnace chamber 1 and is used to fix the seed crystal at one end of the crystal rod 4 in the auxiliary furnace chamber;

[0056] The diameter measuring device 3 is used to measure the diameter of the crystal rod 4, and includes:

[0057] The measuring device main body 31, four rangefinders 32-35, and a calculation module;

[0058] The main body 31 of the measuring device has a ring-shaped structure and is located at the bottom of the auxiliary furnace chamber 1, and the crystal rod 4 passes through the main body 31 of the measuring device;

[0059] Four rangefinders 32-35 are evenly arranged on the inner wall of the main body 31 of the measuring device and flush with the inner wall of the auxiliary furnace chamber 1, for measuring the distance to the surface of the crystal rod 4;

[0060] The calculation module is mounted on the main body 31 of the measuring device and is used to calculate the diameter of the crystal rod 4 based on the distance from the rangefinder 32-35 to the surface of the crystal rod 4.

[0061] Optionally, the rangefinder includes:

[0062] First rangefinder 32, second rangefinder 33, third rangefinder 34 and fourth rangefinder 35.

[0063] The first end of the crystal rod is the end closest to the top of the auxiliary furnace chamber.

[0064] By aligning the rangefinder with the inner wall of the auxiliary furnace chamber, the diameter of the crystal rod can be measured and calculated more quickly and accurately.

[0065] The auxiliary furnace of the crystal pulling furnace in this embodiment of the invention, by setting a diameter measuring device at the bottom of the auxiliary furnace chamber, allows for the measurement of the crystal rod's diameter while it is still inside the auxiliary furnace chamber. This avoids unnecessary bumps and knocks during the transfer of the crystal rod to the diameter measuring device, reducing the risk of surface damage to the crystal rod. The four measuring instruments ensure the accuracy of the crystal rod's diameter measurement. This solves the problem in the prior art where the crystal rod needs to be removed from the crystal pulling furnace after pulling to measure its diameter.

[0066] Optionally, a flange 5 is provided at the bottom of the auxiliary furnace chamber 1;

[0067] After the auxiliary furnace chamber 1 is separated from the main furnace chamber of the crystal pulling furnace, the main body 31 of the measuring device is connected to the flange 5 by fasteners 36.

[0068] Optionally, a second flange 6 is provided on the top of the auxiliary furnace chamber 1;

[0069] The seed crystal clamp 2 is fixed to the top of the auxiliary furnace chamber 1 by the second flange 6.

[0070] It should be noted that the main body of the measuring device is connected to the flange by fasteners; while the auxiliary furnace chamber and the main furnace chamber are connected by an isolation valve or vacuum adsorption. Therefore, the diameter measuring device can only be installed at the bottom of the auxiliary furnace chamber after the auxiliary furnace chamber is separated from the main furnace chamber.

[0071] In one embodiment of the present invention, after crystal pulling is completed, the auxiliary furnace chamber is separated from the main furnace chamber. After separation, the auxiliary furnace chamber is controlled to move in the horizontal direction so that the orthographic projection of the auxiliary furnace chamber on a first plane does not overlap with the orthographic projection of the main furnace chamber on the first plane. The first plane is the plane between the auxiliary furnace chamber and the main furnace chamber in the horizontal direction. Then, the diameter measuring device is connected to the flange through the fastener.

[0072] Optionally, the fastener includes:

[0073] Bolt and nut combinations, studs, screw and nut combinations, and pins.

[0074] In the auxiliary furnace of the crystal pulling furnace of this embodiment of the invention, the diameter measuring unit is connected to the flange at the bottom of the auxiliary furnace chamber by fasteners, so that the diameter of the crystal rod can be measured before the crystal rod is taken out of the auxiliary furnace chamber, thereby reducing the risk of collision with the crystal rod.

[0075] Optionally, the main body 31 of the measuring device is nested inside the auxiliary furnace chamber 1 and is fixedly connected to the auxiliary furnace chamber 1.

[0076] It should be noted that by placing the main body of the measuring device in the auxiliary furnace chamber, the diameter of the crystal rod can be measured in real time, thereby enabling better control of the crystal pulling process; and the diameter of the crystal rod can be measured before it is removed from the auxiliary furnace chamber, reducing the risk of collision with the crystal rod while saving measurement time.

[0077] Optionally, the diameter measuring device further includes: an early warning device 37;

[0078] The warning device 37 is disposed on the main body 31 of the measuring device and is used to issue a warning signal when the distance measured by any of the rangefinders to the surface of the crystal rod 4 is less than a preset threshold.

[0079] It should be noted that the seed crystal clamp only fixes the seed crystal portion at the first end of the crystal rod. Therefore, during the horizontal movement of the auxiliary furnace chamber, the second end of the crystal rod is prone to shaking. When the shaking amplitude is large, it will collide with the interior of the auxiliary furnace chamber.

[0080] If the distance measured by any of the rangefinders to the surface of the crystal rod is less than a preset threshold, it means that the crystal rod is shaking severely in the auxiliary furnace chamber. If this is not controlled, it will cause it to collide with the interior of the auxiliary furnace chamber.

[0081] Optionally, the warning signal includes:

[0082] The warning includes business alerts, text alerts, and image alerts.

[0083] The auxiliary furnace of the crystal pulling furnace in this embodiment of the invention, by setting the aforementioned early warning device, can monitor the degree of crystal rod shaking, thereby issuing an early warning when the crystal rod shakes violently, and avoiding collision between the crystal rod and the auxiliary furnace chamber.

[0084] Optionally, the rangefinder includes:

[0085] Signal transceiver;

[0086] The transceiver is used to transmit a measurement signal to the surface of the crystal rod, receive the measurement signal reflected back through the surface of the crystal rod, and calculate the distance from the transceiver to the surface of the crystal rod based on the first time of transmitting the measurement signal and the second time of receiving the reflected measurement signal.

[0087] The transceiver includes: optical transceiver and / or acoustic transceiver.

[0088] In the auxiliary furnace of the crystal pulling furnace of this embodiment of the invention, the new high-speed transceiver is used as a rangefinder, which can accurately measure the distance from the rangefinder to the surface of the crystal rod without being affected by the measurement environment, thereby accurately calculating the diameter of the crystal rod.

[0089] like Figure 4 As shown, this embodiment of the invention also provides a method for measuring the diameter of a crystal rod, applied to the auxiliary furnace of the crystal pulling furnace as described above, comprising the following steps:

[0090] Step 401: Obtain the first distance, second distance, third distance and fourth distance to the surface of the crystal rod measured by the four rangefinders respectively;

[0091] Step 402: Calculate the diameter of the crystal rod based on the first distance, the second distance, the third distance, and the fourth distance.

[0092] The crystal rod diameter measurement method of this invention can measure the diameter of the crystal rod while it is still in the auxiliary furnace chamber, avoiding unnecessary bumps during the transfer of the crystal rod to the diameter measuring device and reducing the risk of damage to the crystal rod surface.

[0093] like Figure 5 and Figure 6 As shown, the first distance is L1, the second distance is L2, the third distance is L3, and the fourth distance is L4.

[0094] It should be noted that when the crystal rod does not shake, the first distance, the second distance, the third distance, and the fourth distance are all the same; when the crystal rod shakes, at least two of the first distance, the second distance, the third distance, and the fourth distance are different.

[0095] Optionally, calculating the diameter of the crystal rod based on the first distance, the second distance, the third distance, and the fourth distance includes:

[0096] When the first distance, the second distance, the third distance, and the fourth distance are all the same, the diameter of the crystal rod is determined to be twice the difference between the radius of the inner wall of the auxiliary furnace chamber and the first distance;

[0097] If at least two of the first distance, the second distance, the third distance, and the fourth distance are different, the diameter of the crystal rod is calculated based on the fifth distance and the sixth distance; the fifth distance is the distance from the axis of the crystal rod to the first straight line, and the sixth distance is the distance from the axis of the crystal rod to the second straight line; the first straight line is a straight line formed by connecting the first and third rangefinders that are arranged opposite each other, and the second straight line is a straight line formed by connecting the second and fourth rangefinders that are arranged opposite each other;

[0098] The fifth distance and the sixth distance are determined based on the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber.

[0099] In this embodiment of the invention, when the crystal rod does not wobble, the crystal rod is coaxial with the auxiliary furnace chamber, and the distances to the surface of the crystal rod measured by the four distance measuring devices are the same; the radius of the crystal rod is the difference between the radius inside the auxiliary furnace chamber and the first distance (second distance, third distance, or fourth distance);

[0100] If the crystal rod is shaken, at least two of the distances from the four rangefinders to the surface of the crystal rod will be different, requiring further calculation of the diameter of the crystal rod.

[0101] Optionally, determining the fifth and sixth distances based on the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber includes:

[0102] The fifth distance is determined by the following formula:

[0103]

[0104] Wherein, L5 is the fifth distance, D is the diameter of the auxiliary furnace chamber, L1 is the first distance, and L3 is the third distance;

[0105] The sixth distance is determined by the following formula:

[0106]

[0107] Wherein, L6 is the sixth distance, L2 is the second distance, and L4 is the fourth distance.

[0108] like Figure 6 As shown, the fifth distance is the distance between point G and point F;

[0109] The sixth distance is the distance between point E and point F;

[0110] The distance between point G and point E is the radius of the crystal rod;

[0111] Therefore, the fifth distance and the sixth distance are determined based on the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber, thereby determining the diameter of the crystal rod.

[0112] Specifically, the diameter of the crystal rod is calculated using the following formula:

[0113]

[0114] Where d is the diameter of the crystal rod.

[0115] Optionally, the method for measuring the diameter of the crystal rod further includes:

[0116] If any one of the first distance, the second distance, the third distance, and the fourth distance is less than a preset threshold, an early warning signal is issued.

[0117] If any of the first distance, the second distance, the third distance, and the fourth distance is less than a preset threshold, it means that the crystal rod has experienced significant shaking in the auxiliary furnace chamber. If the shaking amplitude continues to increase, it will cause the crystal rod to collide with the interior of the auxiliary furnace chamber. Therefore, it is necessary to issue an early warning at this time to remind the operator to control the degree of shaking of the crystal rod and avoid collisions in the furnace chamber.

[0118] like Figure 7 As shown, this embodiment of the invention also provides a crystal rod diameter measuring device 700, comprising:

[0119] The acquisition module 701 is used to acquire the first distance, second distance, third distance and fourth distance to the surface of the crystal rod measured by four rangefinders;

[0120] The calculation module 702 is used to calculate the diameter of the crystal rod based on the first distance, the second distance, the third distance, and the fourth distance.

[0121] The crystal rod diameter measuring device of this invention can measure the diameter of the crystal rod while it is still in the auxiliary furnace chamber, avoiding unnecessary bumps during the transfer of the crystal rod to the diameter measuring device and reducing the risk of damage to the crystal rod surface.

[0122] In addition, a specific embodiment of the present invention also provides a crystal rod diameter measuring device, including a transceiver and a processor;

[0123] The transceiver is used to acquire the first distance, second distance, third distance and fourth distance to the surface of the crystal rod measured by four rangefinders;

[0124] The processor is configured to calculate the diameter of the crystal rod based on the first distance, the second distance, the third distance, and the fourth distance.

[0125] In addition, specific embodiments of the present invention also provide a computer-readable storage medium storing a computer program thereon, which, when executed by a processor, implements the steps of the above-described method for measuring the diameter of a crystal rod. This achieves the same technical effect, and to avoid repetition, will not be described further here.

[0126] This application also provides a computer program product, including computer instructions. When executed by a processor, these computer instructions implement the various processes of the above-described crystal rod diameter measurement method embodiment and achieve the same technical effect. To avoid repetition, they will not be described again here.

[0127] The above describes the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications are also within the scope of protection of the present invention.

Claims

1. A method for measuring the diameter of a crystal rod, applied to a secondary furnace of a crystal pulling furnace, characterized in that, The auxiliary furnace of the crystal pulling furnace includes: Auxiliary furnace chamber, seed crystal fixture, and diameter measuring device; The seed crystal clamp is located at the top of the auxiliary furnace chamber and is used to fix the seed crystal at one end of the crystal rod inside the auxiliary furnace chamber. The diameter measuring device, used to measure the diameter of the crystal rod, includes: The main body of the measuring device, four rangefinders, and a calculation module; The main body of the measuring device is a ring-shaped structure, located at the bottom of the auxiliary furnace chamber, and the crystal rod passes through the main body of the measuring device; Four of the aforementioned rangefinders are evenly arranged on the inner wall of the main body of the measuring device and flush with the inner wall of the auxiliary furnace chamber, for measuring the distance to the surface of the crystal rod; The calculation module is mounted on the main body of the measuring device and is used to calculate the diameter of the crystal rod based on the distance from the rangefinder to the surface of the crystal rod. The method includes: The first distance, second distance, third distance, and fourth distance to the surface of the crystal rod are obtained by the four rangefinders respectively; The diameter of the crystal rod is calculated based on the first distance, the second distance, the third distance, and the fourth distance; The step of calculating the diameter of the crystal rod based on the first distance, the second distance, the third distance, and the fourth distance includes: When the first distance, the second distance, the third distance, and the fourth distance are all the same, the diameter of the crystal rod is determined to be twice the difference between the radius of the inner wall of the auxiliary furnace chamber and the first distance; If at least two of the first distance, second distance, third distance, and fourth distance are different, the diameter of the crystal rod is calculated based on the fifth distance and the sixth distance; the fifth distance is the distance GF from point F to point G, where point F is the intersection of the perpendicular line drawn from the axis of the crystal rod to the first straight line and the first straight line, point G is the measurement point on the surface of the crystal rod for measuring the first distance, and the sixth distance is the distance from the axis of the crystal rod to the first straight line, where the first straight line is a straight line formed by connecting the first and third rangefinders that are set opposite to each other; The fifth distance and the sixth distance are determined based on the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber.

2. The method for measuring the diameter of a crystal rod according to claim 1, characterized in that, A flange is provided at the bottom of the auxiliary furnace chamber; After the auxiliary furnace chamber is separated from the main furnace chamber of the crystal pulling furnace, the main body of the measuring device is connected to the flange by fasteners.

3. The method for measuring the diameter of a crystal rod according to claim 1, characterized in that, The main body of the measuring device is nested inside the auxiliary furnace chamber and is fixedly connected to the auxiliary furnace chamber.

4. The method for measuring the diameter of a crystal rod according to claim 1, characterized in that, The diameter measuring device further includes: an early warning device; The warning device is mounted on the main body of the measuring device and is used to issue a warning signal when the distance measured by any of the rangefinders to the surface of the crystal rod is less than a preset threshold.

5. The method for measuring the diameter of a crystal rod according to claim 1, characterized in that, The rangefinder includes: Signal transceiver; The transceiver is used to transmit a measurement signal to the surface of the crystal rod, receive the measurement signal reflected back through the surface of the crystal rod, and calculate the distance from the transceiver to the surface of the crystal rod based on the first time of transmitting the measurement signal and the second time of receiving the reflected measurement signal. The transceiver includes: optical transceiver and / or acoustic transceiver.

6. The method for measuring the diameter of a crystal rod according to claim 1, characterized in that, Determining the fifth and sixth distances based on the first distance, the second distance, the third distance, the fourth distance, and the diameter of the auxiliary furnace chamber includes: The fifth distance is determined by the following formula: Wherein, L6 is the fifth distance, D is the diameter of the auxiliary furnace chamber, L1 is the first distance, and L3 is the third distance; The sixth distance is determined by the following formula: Wherein, L7 is the sixth distance, L2 is the second distance, and L4 is the fourth distance.

7. The method for measuring the diameter of a crystal rod according to claim 1, characterized in that, Also includes: If any one of the first distance, the second distance, the third distance, and the fourth distance is less than a preset threshold, an early warning signal is issued.

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