Precision measuring device and method for galvanometer assembly

Abstract

A galvanometer assembly precision measuring device disclosed by the present invention comprises a support plate, a support rod, a camera and a bottom plate, a lens assembly and a line laser are both fixed on the lower surface of the support plate, the line laser can project line laser onto a lens, and the lens reflects the line laser onto the bottom plate; the camera can collect the line laser projected on the bottom plate. The testing device can be used for projection precision testing, rotation precision testing and repeated precision testing. Comprehensively evaluating whether the precision of the galvanometer meets the detection requirement or not and the operation stability of the galvanometer assembly; the scheme is ingenious in design, convenient to build, capable of effectively monitoring the performance stability of the galvanometer assembly and assisting workers in rapid model selection, rapid and accurate in testing process and high in automation degree.

Description

Technical Field

[0001] The invention relates to the field of precision verification, and in particular to a device and method for measuring the precision of a galvanometer component. Background Art

[0002] The surface structured light 3D vision sensor is a key component for obtaining the 3D point cloud coordinate information of an object. Its basic components are a camera and a surface structured light generator. According to the different ways of generating structured light, it is divided into DLP surface structured light sensors and laser galvanometer surface structured light sensors.

[0003] DLP surface structured light sensors have the characteristics of good data surface quality and high precision, and are widely used. However, for bright objects and dark objects, DLP brightness is limited, which will cause a large number of point cloud missing when reconstructing the point cloud. For this reason, laser galvanometer surface structured light sensors came into being for such objects. Their point cloud integrity performance on reflective bright and dark objects is better than that of DLP surface structured light sensors.

[0004] The laser galvanometer structured light sensor is mainly composed of a galvanometer assembly (galvanometer, main control board (driver board), laser) and a camera. In order to ensure the final measurement accuracy of the sensor, it is necessary to verify the performance accuracy of the galvanometer assembly. The galvanometers commonly seen on the market are generally used in laser marking machines, including lenses in the X and Y directions. In the laser galvanometer surface structured light sensor, the galvanometer assembly only includes one lens, which is controlled by a motor, and its periodic rotation is controlled by the motor. The laser projects stripes, and the camera exposes and collects the stripe image (the image contains multiple parallel stripes). In this process, the lens is driven to rotate by the motor, and the motor is greatly affected by the accuracy of the control voltage signal, high and low temperature environment, and vibration environment, thereby affecting the rotation accuracy, resulting in inaccurate rotation angles and poor consistency of the galvanometer, which further leads to inaccurate position and angle of the projected stripes. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a galvanometer assembly accuracy measurement device and a galvanometer aging accuracy test method, which are used to evaluate whether the galvanometer rotation accuracy meets the detection requirements and evaluate the stability of the galvanometer assembly. This scheme is cleverly designed and easy to build, and can effectively monitor the performance stability of the galvanometer assembly, assisting staff in rapid selection, and the testing process is fast, accurate and highly automated.

[0006] To this end, the technical solution of the present invention is as follows:

[0007] A precision measuring device for a galvanometer assembly, the galvanometer assembly comprising: a lens assembly, a driving plate and a line laser;

[0008] The lens assembly includes a driving mechanism and a lens that rotates with the driving mechanism, and the two are packaged together inside the housing;

[0009] The driving mechanism and the line laser are both controlled by the driving board; the line laser projects the line laser to the lens according to the opening and closing signals sent by the driving board; the driving mechanism drives the lens to rotate according to the rotation signal sent by the driving board, and reflects the line laser to the surface of the object to be measured;

[0010] The precision measuring device comprises: a support plate, a support rod, a camera and a bottom plate, wherein the support plate is parallel to the bottom plate, and the support rod fixes the support plate above the bottom plate;

[0011] The support plate is used to fix the lens assembly, the line laser and the camera respectively;

[0012] The lens assembly and the line laser are both fixed on the lower surface of the support plate, the line laser can project the line laser onto the lens, and the lens reflects the line laser onto the bottom plate;

[0013] The camera is fixed around the lens assembly and the line laser, and can collect the line laser projected onto the base plate.

[0014] Furthermore, it also includes a controller, wherein the controller includes a projection accuracy test module and / or a repeatability accuracy test module;

[0015] The projection accuracy test module is used to obtain a fringe projection image and verify the position accuracy of the galvanometer assembly when projecting the fringe based on the difference between the angle between the fringe and the theoretical angle value of the lens deflection;

[0016] The repeatability accuracy test module is used to obtain single-line light strip images multiple times, and based on the coordinate differences of specific pixel points in the multiple single-line light strip images, verify the position accuracy of the galvanometer assembly when repeatedly projecting.

[0017] Preferably, the projection accuracy test module is used to send a start signal to the drive board and the camera respectively, control the galvanometer assembly to start synchronously with the camera, and the line laser in the galvanometer assembly projects the line laser to the lens according to the opening and closing signal sent by the drive board; the drive mechanism drives the lens to rotate periodically according to the rotation cycle signal sent by the drive board; within the exposure time of the camera, the galvanometer assembly projects a fringe projection pattern on the bottom plate, and the camera collects the fringe projection image;

[0018] The projection accuracy test module is also used to receive the collected fringe projection image, and obtain the fringe center line corresponding to each fringe in the image, and record the ceil(N / 2)th fringe center line as the zero position center line, where N represents the total number of projected fringes, and ceil represents rounding up operation;

[0019] The angle values ​​between the center line of each fringe and the center line of the zero position are obtained respectively, and then the obtained angle values ​​are compared with their corresponding theoretical values ​​respectively to obtain multiple difference values, and the maximum difference value is taken and recorded as the projection index;

[0020] The theoretical value is: compared with the projection zero position center line, the angle value of the lens rotation when projecting the current stripe center line;

[0021] Verifying whether the projection accuracy of the galvanometer assembly is qualified based on the projection index;

[0022] Preferably, the angle value θ between the center line of the i-th fringe and the center line of the zero position is obtained i The method is:

[0023] Where H is the distance between the center point of the lens and the base plate; L i Indicates obtaining the physical distance between the center line of the i-th light strip and the zero position center line.

[0024] Preferably, the repeatability accuracy test module is used to obtain a single-line light stripe image multiple times; wherein the acquisition process of obtaining a single-line light stripe image once is:

[0025] The laser is turned on only once when the lens in the galvanometer assembly rotates to a specific angle, projecting a single light line onto the bottom plate. The camera collects the image of the single light line and the lens is reset.

[0026] The repeatability test module is also used to extract the coordinates of specific pixels in multiple single-line light strip images;

[0027] The maximum difference between the multiple coordinates is obtained as a repetition index, and whether the repetition accuracy of the galvanometer assembly is qualified is verified based on the repetition index.

[0028] Preferably, it also includes a support frame and a photoelectric counter-beam sensor, wherein the support plate is provided with a through hole, the through hole is located directly above the lens, and the support frame is fixed to the upper surface of the support plate and is located around the through hole; the photoelectric counter-beam sensor is fixed on the support frame, and the light signal it emits can pass through the through hole and be projected onto the lens that has not rotated.

[0029] In order to further improve the diversity and robustness of the test results, a high and low temperature box is also included, and the high and low temperature box is used to adjust the temperature of the galvanometer assembly; so that the test process is carried out at different temperatures;

[0030] Preferably, in order to enable the light signal emitted by the photoelectric corresponding sensor to be smoothly projected onto the lens, the support frame includes a first support frame and a second support frame, the first support frame is fixed to the upper surface of the support plate, the second support frame is connected to the first support frame, and a rotating shaft is provided therebetween, and the second support frame can rotate around the first support frame through the rotating shaft.

[0031] Preferably, the controller also includes a rotation accuracy testing module; the rotation accuracy testing module is used to obtain a pulse signal generated by the lens in the galvanometer assembly blocking the photoelectric radiation sensor during periodic rotation, obtain the time interval based on the pulse signal, and verify the resetting accuracy of the lens when the galvanometer assembly performs periodic rotation by comparing multiple groups of time intervals.

[0032] Preferably, the rotation accuracy test module is used to control the photoelectric beam sensor to be normally open and perform the following processing:

[0033] When the lens does not start to rotate, it blocks the photoelectric sensor, and this pulse signal is recorded as I;

[0034] The galvanometer assembly is controlled to start, and the lens rotates periodically. After the rotation is completed, the lens is reset to the initial position to block the photoelectric sensor again. This pulse signal is recorded as II.

[0035] Calculate the time interval between pulse signal I and pulse signal II;

[0036] Controlling the lens in the galvanometer assembly to perform periodic rotation multiple times, calculating the corresponding time interval each time the periodic rotation is completed, and obtaining multiple time intervals;

[0037] The maximum values ​​of the differences between the multiple time intervals are counted as rotation indicators, and whether the rotation accuracy of the galvanometer assembly is qualified is verified based on the rotation indicators.

[0038] Preferably, the controller further comprises an index integration module; the index integration module is used to respectively receive the index data output by the projection accuracy test module, the repeatability accuracy test module, and the rotation accuracy test module;

[0039] When multiple indicators are received, first evaluate whether each indicator is less than its corresponding threshold value. If not, the galvanometer component is unqualified. If so, then weighted fusion of each indicator is performed to obtain a comprehensive indicator to evaluate whether the comprehensive indicator meets the preset conditions. If so, the galvanometer component is qualified; if not, the galvanometer component is unqualified.

[0040] The present invention also relates to a method for performing accuracy measurement using the accuracy testing device, comprising the following steps:

[0041] Perform one or more of the projection accuracy test method, the rotation accuracy test method, and the repeatability accuracy test method;

[0042] Wherein, the projection accuracy testing method comprises the following steps:

[0043] 1) The galvanometer assembly is turned on synchronously with the camera, and the line laser in the galvanometer assembly projects the line laser to the lens according to the on-off signal sent by the driving board; the driving mechanism drives the lens to rotate periodically according to the rotation cycle signal sent by the driving board; within the exposure time of the camera, the galvanometer assembly projects a fringe projection pattern on the bottom plate, and the camera collects the fringe projection image;

[0044] 2) Obtain the fringe center lines corresponding to each fringe in the fringe projection image, and record the ceil(N / 2)th fringe center line as the zero position center line, where N represents the total number of projected fringes and ceil represents rounding up operation;

[0045] The angle values ​​between the center line of each fringe and the center line of the zero position are obtained respectively, and then the obtained angle values ​​are compared with their corresponding theoretical values ​​respectively to obtain multiple difference values, and the maximum difference value is taken and recorded as the projection index;

[0046] The theoretical value is: compared with the projection zero position center line, the angle value of the lens rotation when projecting the current stripe center line;

[0047] Verifying whether the projection accuracy of the galvanometer assembly is qualified based on the projection index;

[0048] Wherein, the repeatability test method comprises the following steps:

[0049] S1, rotate the lens in the galvanometer assembly from the initial angle to a specific angle, turn on the laser once, project a single light line to the bottom plate, collect the single light line image with the camera, and reset the lens;

[0050] S2, repeat step S1 multiple times to obtain multiple single-line light strip images;

[0051] Extract the coordinates of specific pixels from multiple single-line light strip images;

[0052] The maximum difference between the multiple coordinates is obtained as a repetition index, and whether the repetition accuracy of the galvanometer assembly is qualified is verified based on the repetition index.

[0053] Wherein, the rotation accuracy testing method comprises the following steps:

[0054] ①Control the photoelectric sensor to be normally open;

[0055] ② When the lens does not start to rotate, it blocks the photoelectric sensor, and this pulse signal I is recorded;

[0056] The galvanometer assembly is controlled to start, and the lens rotates periodically. After the rotation is completed, the lens is reset to the initial position to block the photoelectric sensor again. This pulse signal is recorded as II.

[0057] Calculate the time interval between pulse signal I and pulse signal II;

[0058] ③ Repeat step ② multiple times to obtain multiple time intervals;

[0059] The maximum values ​​of the differences between the multiple time intervals are counted as rotation indicators, and whether the rotation accuracy of the galvanometer assembly is qualified is verified based on the rotation indicators.

[0060] The present invention has the following beneficial effects:

[0061] The components of this device are simple and easy to install, and can effectively test the projection accuracy, repeatability and rotation accuracy of the galvanometer assembly, and evaluate the overall performance of the galvanometer assembly. It can be used in equipment selection, aging testing, performance evaluation and other fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] Figure 1 It is a schematic diagram of the structure of the galvanometer assembly in a specific implementation manner.

[0063] Figure 2 It is a structural schematic diagram of the accuracy testing device in a specific implementation manner.

[0064] Figure 3 It is a schematic diagram of a fringe projection image in a specific implementation manner.

[0065] Figure 4 It is a schematic diagram of a single-line light strip image in a specific implementation manner.

[0066] Figure 5 It is a schematic diagram of modules in the controller in a specific implementation manner. DETAILED DESCRIPTION

[0067] The technical solution of the present invention is described in detail below in conjunction with the accompanying drawings and embodiments.

[0068] A precision measuring device for a galvanometer assembly, such as Figure 1 As shown, the galvanometer assembly includes: a lens assembly, a drive plate 2 and a line laser 4;

[0069] The lens assembly includes a driving mechanism 1 and a lens 3 that rotates with the driving mechanism, and the two are encapsulated together inside a housing;

[0070] The driving mechanism 1 and the line laser 4 are both controlled by the driving board; the line laser projects the line laser to the lens 3 according to the opening and closing signals sent by the driving board; the driving mechanism 1 drives the lens 3 to rotate according to the rotation signal sent by the driving board, and reflects the line laser to the surface of the object to be measured;

[0071] like Figure 2 As shown, the precision measuring device includes: a support plate 5, a support rod 6, a camera and a bottom plate 7, the support plate 5 is parallel to the bottom plate 7, and the support rod 6 fixes the support plate 5 above the bottom plate 7;

[0072] The support plate 5 is used to fix the lens assembly, the line laser 4 and the camera 10 respectively;

[0073] The lens assembly and the line laser 4 are fixed on the lower surface of the support plate 5. The line laser 4 can project the line laser onto the lens 3, and the lens 3 reflects the line laser onto the bottom plate 7.

[0074] The camera is fixed around the lens assembly and the line laser 4 , and can collect the line laser projected onto the base plate 7 .

[0075] The precision measuring device further comprises a controller, such as Figure 5 As shown, the controller includes a projection accuracy testing module and / or a repeatability accuracy testing module;

[0076] The projection accuracy test module is used to obtain fringe projection images (such as Figure 3 ), based on the difference between the angle between the stripes and the theoretical angle value of the lens deflection, verify the position accuracy of the galvanometer assembly when projecting stripes;

[0077] The repeatability test module is used to obtain single-line light strip images multiple times (such as Figure 4 ), based on the coordinate differences of specific pixel points in multiple single-line light strip images, the position accuracy of the galvanometer assembly during repeated projection is verified.

[0078] Specifically, the projection accuracy test module is used to send an opening signal to the driving board and the camera respectively, control the galvanometer assembly to start synchronously with the camera, and the line laser in the galvanometer assembly projects the line laser to the lens 3 according to the opening and closing signal sent by the driving board; the driving mechanism 1 drives the lens 3 to rotate periodically according to the rotation cycle signal sent by the driving board; during the exposure time of the camera, the galvanometer assembly projects a stripe projection pattern on the bottom plate, and the camera collects the stripe projection image (such as Figure 3 );

[0079] The projection accuracy test module is also used to receive the collected fringe projection image, and obtain the fringe center line corresponding to each fringe in the image, and record the ceil(N / 2)th fringe center line as the zero position center line, where N represents the total number of projected fringes, and ceil represents rounding up operation;

[0080] The angle values ​​between the center line of each fringe and the center line of the zero position are obtained respectively, and then the obtained angle values ​​are compared with their corresponding theoretical values ​​respectively to obtain multiple difference values, and the maximum difference value is taken and recorded as the projection index;

[0081] The theoretical value is: compared with the projection zero position center line, the angle value of the lens 3 when projecting the current stripe center line;

[0082] Verify whether the projection accuracy of the galvanometer assembly is qualified based on the projection indicators.

[0083] Wherein, theoretical value = i × β, i represents the center line of the i-th light strip, and β represents the preset single rotation angle of the galvanometer assembly;

[0084] Taking 7 stripes as an example, N=7, the 4th stripe is the zero position center line, L_4=0, θ_4=0, the preset total rotation angle of the galvanometer=14°, and the single rotation angle β=2°.

[0085] As a preferred embodiment, the angle value θ between the center line of the i-th fringe and the center line of the zero position is obtained. i The method is:

[0086] Where H is the distance between the center point of the lens and the base plate; L i Indicates obtaining the physical distance between the center line of the i-th light bar and the zero position center line.

[0087] The physical distance is calculated by first calculating the pixel distance between the two center lines, and then using the pixel equivalent to obtain the physical distance.

[0088] Specifically, the repeatability accuracy test module is used to obtain a single-line light strip image multiple times; wherein, the acquisition process of a single-line light strip image is as follows:

[0089] The laser is turned on only once when the lens 3 in the galvanometer assembly rotates to a specific angle, and a single light strip is projected onto the bottom plate. The camera collects the image of the single light strip, and the lens 3 is reset.

[0090] The repeatability test module is also used to extract the coordinates of specific pixels in multiple single-line light strip images;

[0091] The maximum difference between multiple coordinates is obtained as a repeatability index, and whether the repeatability accuracy of the galvanometer assembly is qualified is verified based on the repeatability index.

[0092] In specific implementation, the method of obtaining specific pixels is as follows: Figure 4 , a central axis can be made in the image, and the intersection between the central axis and the single-line light strip is recorded as a specific pixel point.

[0093] In order to further measure the rotation accuracy of the galvanometer assembly and analyze whether the lens can be accurately reset every time, in this embodiment, the testing device also includes a support frame 8 and a photoelectric counter-beam sensor 9. A through hole is provided on the support plate 5, and the through hole is located directly above the lens 3. The support frame 8 is fixed on the upper surface of the support plate and is located around the through hole; the photoelectric counter-beam sensor 9 is fixed on the support frame 8, and the light signal it emits can pass through the through hole and be projected onto the lens 3 that has not rotated (initial position).

[0094] More preferably, in order to improve the diversity and robustness of the test results, a high and low temperature box is also included, which is used to adjust the temperature of the galvanometer assembly so that the test process is carried out at different temperatures.

[0095] Among them, in order to enable the light signal emitted by the photoelectric corresponding sensor 9 to be smoothly projected onto the lens, the support frame includes a first support frame and a second support frame, the first support frame is fixed on the upper surface of the support plate, the second support frame is connected to the first support frame, and a rotating shaft is provided between the two, and the second support frame can rotate around the first support frame through the rotating shaft.

[0096] In a specific implementation, the second support frame is screwed onto the first support frame via the horizontal long hole, and can rotate around the first support frame at a small angle along the opening direction of the horizontal long hole.

[0097] At this time, when testing, Figure 5 As shown, the controller also includes a rotation accuracy testing module;

[0098] The rotation accuracy test module is used to obtain the pulse signal generated by the lens in the galvanometer assembly blocking the photoelectric reflection sensor 9 during periodic rotation, obtain the time interval based on the pulse signal, and verify the resetting accuracy of the lens when the galvanometer assembly performs periodic rotation by comparing multiple groups of time intervals.

[0099] Specifically, the rotation accuracy test module is used to control the photoelectric beam sensor 9 to be normally open and perform the following processing:

[0100] When the lens 3 does not start to rotate, it blocks the photoelectric sensor, and this pulse signal I is recorded;

[0101] The galvanometer assembly is controlled to start, and the lens rotates for 3 cycles. After the rotation is completed, the lens is reset to the initial position to block the photoelectric sensor again. This pulse signal is recorded as II.

[0102] Calculate the time interval between pulse signal I and pulse signal II;

[0103] Controlling the lens 3 in the galvanometer assembly to perform periodic rotation multiple times, calculating the corresponding time interval each time the periodic rotation is completed, and obtaining multiple time intervals;

[0104] The maximum value of the difference between multiple time intervals is counted as a rotation index, and whether the rotation accuracy of the galvanometer assembly is qualified is verified based on the rotation index.

[0105] In order to facilitate comprehensive analysis of various index data, the controller also includes an index integration module; the index integration module is used to receive the index data output by the projection accuracy test module, the repeatability accuracy test module, and the rotation accuracy test module respectively;

[0106] When multiple indicators are received, first evaluate whether each indicator is less than its corresponding threshold value. If not, the galvanometer component is unqualified. If so, then weighted fusion of each indicator is performed to obtain a comprehensive indicator to evaluate whether the comprehensive indicator meets the preset conditions. If so, the galvanometer component is qualified; if not, the galvanometer component is unqualified.

[0107] This embodiment also discloses a method for measuring the accuracy of the above-mentioned accuracy testing device, comprising the following steps:

[0108] According to the test requirements, users can choose to conduct one or more of the projection accuracy test method, rotation accuracy test method, and repeatability accuracy test method;

[0109] Among them, the projection accuracy test method includes the following steps:

[0110] 1) The galvanometer assembly is turned on synchronously with the camera. The line laser in the galvanometer assembly projects the line laser to the lens 3 according to the on / off signal sent by the driving board. The driving mechanism 1 drives the lens 3 to rotate periodically according to the rotation cycle signal sent by the driving board. During the exposure time of the camera, the galvanometer assembly projects a fringe projection pattern on the bottom plate, and the camera collects the fringe projection image ( Figure 3 );

[0111] 2) Obtain the fringe center lines corresponding to each fringe in the fringe projection image, and record the ceil(N / 2)th fringe center line as the zero position center line, where N represents the total number of projected fringes and ceil represents rounding up operation;

[0112] The angle values ​​between the center line of each fringe and the center line of the zero position are obtained respectively, and then the obtained angle values ​​are compared with their corresponding theoretical values ​​respectively to obtain multiple difference values, and the maximum difference value is taken and recorded as the projection index;

[0113] The theoretical value is: compared with the projection zero position center line, the angle value of the lens 3 when projecting the current stripe center line;

[0114] Verify whether the projection accuracy of the galvanometer assembly is qualified based on the projection index;

[0115] Among them, the repeatability test method includes the following steps:

[0116] S1, rotating the lens 3 in the galvanometer assembly from an initial angle to a specific angle, turning on the laser once, projecting a single light line to the bottom plate, collecting the single light line image with the camera, and resetting the lens 3;

[0117] S2, repeat step S1 multiple times to obtain multiple single-line light strip images ( Figure 4 );

[0118] Extract the coordinates of specific pixels from multiple single-line light strip images;

[0119] The maximum difference between multiple coordinates is obtained as a repeatability index, and whether the repeatability accuracy of the galvanometer assembly is qualified is verified based on the repeatability index.

[0120] The rotation accuracy test method includes the following steps:

[0121] ① Control the photoelectric beam sensor 9 to be normally open;

[0122] ② When the lens 3 does not start to rotate, it blocks the photoelectric sensor, and this pulse signal I is recorded;

[0123] The galvanometer assembly is controlled to start, and the lens rotates for 3 cycles. After the rotation is completed, the lens is reset to the initial position to block the photoelectric sensor again. This pulse signal is recorded as II.

[0124] Calculate the time interval between pulse signal I and pulse signal II;

[0125] ③ Repeat step ② multiple times to obtain multiple time intervals;

[0126] The maximum value of the difference between multiple time intervals is counted as a rotation index, and whether the rotation accuracy of the galvanometer assembly is qualified is verified based on the rotation index.

[0127] For convenience in explanation and precise definition of the appended claims, the terms “upper,” “lower,” “inner,” and “outer” are used to describe features of the exemplary embodiments with reference to the positions of such features as shown in the drawings.

[0128] The foregoing description of the specific exemplary embodiments of the present invention is presented for the purpose of illustration and description. The foregoing description is not intended to be exhaustive, nor is it intended to limit the present invention to the precise form disclosed, and it is apparent that many changes and variations are possible in light of the above teachings. The exemplary embodiments are selected and described to explain the specific principles of the present invention and its practical application, so that other technicians in the field can realize and utilize the various exemplary embodiments of the present invention and its different selected forms and modified forms. The scope of the present invention is intended to be limited by the appended claims and their equivalents.

Claims

1. A device for measuring the accuracy of a galvanometer assembly, the galvanometer assembly comprising: A lens assembly, a drive plate (2) and a line laser (4); The lens assembly comprises a driving mechanism (1) and a lens (3) that rotates along with the driving mechanism, and the two are encapsulated together inside a housing; The driving mechanism (1) and the line laser (4) are both controlled by a driving board; the line laser projects a line laser onto the lens (3) according to an opening and closing signal sent by the driving board; the driving mechanism (1) drives the lens (3) to rotate according to a rotation signal sent by the driving board, and reflects the line laser onto the surface of the object to be measured; The precision measuring device is characterized in that the precision measuring device comprises: a support plate (5), a support rod (6), a camera and a bottom plate (7), wherein the support plate (5) is parallel to the bottom plate (7), and the support rod (6) fixes the support plate (5) above the bottom plate (7); The support plate (5) is used to fix the lens assembly, the line laser (4) and the camera (10) respectively; The lens assembly and the line laser (4) are both fixed on the lower surface of the support plate (5); the line laser (4) can project a line laser onto the lens (3), and the lens (3) reflects the line laser onto the bottom plate (7); The camera is fixed around the lens assembly and the line laser (4), and can collect the line laser projected on the base plate (7).

2. The precision measuring device according to claim 1, characterized in that: Also included is a controller, the controller including a projection accuracy testing module and / or a repeatability accuracy testing module; The projection accuracy test module is used to obtain a fringe projection image and verify the position accuracy of the galvanometer assembly when projecting the fringe based on the difference between the angle between the fringe and the theoretical angle value of the lens deflection; The repeatability accuracy test module is used to obtain single-line light strip images multiple times, and based on the coordinate differences of specific pixel points in the multiple single-line light strip images, verify the position accuracy of the galvanometer assembly when repeatedly projecting.

3. The precision measuring device according to claim 2, characterized in that: The projection accuracy test module is used to send a start signal to the drive board and the camera respectively, control the galvanometer assembly to start synchronously with the camera, and the line laser in the galvanometer assembly projects the line laser to the lens (3) according to the on / off signal sent by the drive board; the drive mechanism (1) drives the lens (3) to rotate periodically according to the rotation cycle signal sent by the drive board; within the exposure time of the camera, the galvanometer assembly projects a stripe projection pattern on the bottom plate, and the camera collects the stripe projection image; The projection accuracy test module is also used to receive the collected fringe projection image, and obtain the fringe center line corresponding to each fringe in the image, and record the ceil(N / 2)th fringe center line as the zero position center line, where N represents the total number of projected fringes, and ceil represents rounding up operation; The angle values ​​between the center line of each fringe and the center line of the zero position are obtained respectively, and then the obtained angle values ​​are compared with their corresponding theoretical values ​​respectively to obtain multiple difference values, and the maximum difference value is taken and recorded as the projection index; The theoretical value is: compared with the projection zero position center line, when projecting the current stripe center line, the angle value of the lens (3) rotated; Verifying whether the projection accuracy of the galvanometer assembly is qualified based on the projection index; Preferably, the angle value θ between the center line of the i-th fringe and the center line of the zero position is obtained i The method is: Where H is the distance between the center point of the lens and the base plate; L i Indicates obtaining the physical distance between the center line of the i-th light bar and the zero position center line.

4. The precision measuring device according to claim 2, characterized in that: The repeatability test module is used to obtain a single-line light strip image multiple times; wherein the acquisition process of a single-line light strip image is as follows: The laser is turned on only once when the lens (3) in the galvanometer assembly rotates to a specific angle, and a single light strip is projected onto the bottom plate. The camera collects the image of the single light strip, and the lens (3) is reset. The repeatability test module is also used to extract the coordinates of specific pixels in multiple single-line light strip images; The maximum difference between the multiple coordinates is obtained as a repetition index, and whether the repetition accuracy of the galvanometer assembly is qualified is verified based on the repetition index.

5. The precision measuring device according to claim 2, characterized in that: The invention also comprises a support frame (8) and a photoelectric counter-radiation sensor (9); the support plate (5) is provided with a through hole, the through hole is located directly above the lens (3); the support frame (8) is fixed to the upper surface of the support plate and is located around the through hole; the photoelectric counter-radiation sensor (9) is fixed to the support frame (8), and the light signal emitted by the photoelectric counter-radiation sensor (9) can pass through the through hole and be projected onto the lens (3) that has not rotated.

6. The device for measuring the accuracy of a galvanometer assembly as claimed in claim 5, characterized in that: It also includes a high and low temperature box, which is used to adjust the temperature of the galvanometer assembly so that the test process can be carried out at different temperatures; In order to enable the optical signal emitted by the photoelectric corresponding sensor (9) to be smoothly projected onto the lens, the support frame comprises a first support frame and a second support frame, wherein the first support frame is fixed to the upper surface of the support plate, and the second support frame is connected to the first support frame, and a rotating shaft is provided between the two, and the second support frame can rotate around the first support frame via the rotating shaft.

7. The precision measuring device according to claim 5, characterized in that: The controller also includes a rotation accuracy testing module; the rotation accuracy testing module is used to obtain a pulse signal generated by a lens in the galvanometer assembly blocking the photoelectric corresponding sensor (9) during periodic rotation, obtain a time interval based on the pulse signal, and verify the resetting accuracy of the lens when the galvanometer assembly performs periodic rotation by comparing multiple groups of time intervals.

8. The precision measuring device according to claim 7, characterized in that: The rotation accuracy test module is used to control the photoelectric beam sensor (9) to be normally open and perform the following processing: When the lens (3) does not start to rotate, it blocks the photoelectric sensor, and this pulse signal I is recorded; The control galvanometer assembly is turned on, and the lens (3) rotates periodically. After the rotation is completed, the lens is reset to the initial position to block the photoelectric sensor again, and this pulse signal II is recorded; Calculate the time interval between pulse signal I and pulse signal II; Controlling the lens (3) in the galvanometer assembly to perform periodic rotation multiple times, calculating the corresponding time interval each time the periodic rotation is completed, and obtaining multiple time intervals; The maximum values ​​of the differences between the multiple time intervals are counted as rotation indicators, and whether the rotation accuracy of the galvanometer assembly is qualified is verified based on the rotation indicators.

9. The precision measuring device according to claim 7, characterized in that: The controller further includes an index integration module; the index integration module is used to receive the index data output by the projection accuracy test module, the repeatability accuracy test module, and the rotation accuracy test module respectively; When multiple indicators are received, first evaluate whether each indicator is less than its corresponding threshold value. If not, the galvanometer component is unqualified. If so, then weighted fusion of each indicator is performed to obtain a comprehensive indicator to evaluate whether the comprehensive indicator meets the preset conditions. If so, the galvanometer component is qualified; if not, the galvanometer component is unqualified.

10. A method for measuring accuracy using the accuracy testing device according to claim 7, characterized in that: The following steps are involved: Perform one or more of the projection accuracy test method, the rotation accuracy test method, and the repeatability accuracy test method; Wherein, the projection accuracy testing method comprises the following steps: 1) The galvanometer assembly is turned on synchronously with the camera, and the line laser in the galvanometer assembly projects the line laser onto the lens (3) according to the on / off signal sent by the driving board; the driving mechanism (1) drives the lens (3) to perform periodic rotation according to the rotation period signal sent by the driving board; within the exposure time of the camera, the galvanometer assembly projects a fringe projection pattern on the bottom plate, and the camera collects the fringe projection image; 2) Obtain the fringe center lines corresponding to each fringe in the fringe projection image, and record the ceil(N / 2)th fringe center line as the zero position center line, where N represents the total number of projected fringes and ceil represents rounding up operation; The angle values ​​between the center line of each fringe and the center line of the zero position are obtained respectively, and then the obtained angle values ​​are compared with their corresponding theoretical values ​​respectively to obtain multiple difference values, and the maximum difference value is taken and recorded as the projection index; The theoretical value is: compared with the projection zero position center line, when projecting the current stripe center line, the angle value of the lens (3) rotated; Verifying whether the projection accuracy of the galvanometer assembly is qualified based on the projection index; Wherein, the repeatability test method comprises the following steps: S1, rotating the lens (3) in the galvanometer assembly from an initial angle to a specific angle, turning on the laser once, projecting a single light line onto the bottom plate, collecting an image of the single light line with a camera, and resetting the lens (3); S2, repeat step S1 multiple times to obtain multiple single-line light strip images; Extract the coordinates of specific pixels from multiple single-line light strip images; The maximum difference between the multiple coordinates is obtained as a repetition index, and whether the repetition accuracy of the galvanometer assembly is qualified is verified based on the repetition index. Wherein, the rotation accuracy testing method comprises the following steps: ① Control the photoelectric beam sensor (9) to be normally open; ② When the lens (3) does not start to rotate, it blocks the photoelectric sensor, and this pulse signal I is recorded; The control galvanometer assembly is turned on, and the lens (3) rotates periodically. After the rotation is completed, the lens is reset to the initial position to block the photoelectric sensor again, and this pulse signal II is recorded; Calculate the time interval between pulse signal I and pulse signal II; ③ Repeat step ② multiple times to obtain multiple time intervals; The maximum values ​​of the differences between the multiple time intervals are counted as rotation indicators, and whether the rotation accuracy of the galvanometer assembly is qualified is verified based on the rotation indicators.

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