High-precision light-transmitting piezoelectric deflecting mirror

Abstract

The invention relates to the technical field of precise instruments, and discloses a high-precision light-transmitting piezoelectric deflecting mirror which comprises a top cover, a bottom cover, a flexible hinge mechanism, piezoelectric ceramics and a shell. And the flexible hinge mechanism is fixedly connected with the top cover and the bottom cover. The first piezoelectric ceramic is arranged between the first flexible hinge arm and the second flexible hinge arm, the second piezoelectric ceramic is arranged between the second flexible hinge arm and the third flexible hinge arm, and the third piezoelectric ceramic is arranged between the first flexible hinge arm and the third flexible hinge arm. The structural arrangement of the three piezoelectric ceramics is matched with the return-difference-free flexible hinge mechanism, so that the three-degree-of-freedom steering mechanism has three degrees of freedom of Z-direction displacement, rotation around the X axis and rotation around the Y axis, and the high-stability and high-precision steering function is guaranteed. The flexible hinge mechanism, the bottom cover and the top cover are integrally formed, so that the product is small in size, compact in structure and small in motion coupling. A through hole is formed in the middle of the lens, and the lens can adapt to optical application scenes.

Description

Technical Field

[0001] The invention belongs to the technical field of precision instruments, and in particular relates to a high-precision light-transmissive piezoelectric deflecting mirror. Background Art

[0002] Laser rapid scanning systems have been increasingly used in the fields of semiconductor technology, aerospace, biomedicine, nanoscience research, etc., and the performance requirements are becoming increasingly higher. Affected by many factors such as its volume, scanning frequency, scanning accuracy, scanning resolution, etc., more miniaturized, high-speed, and precise scanning application scenarios have emerged. Piezoelectric deflection mirrors have become the core components of laser rapid scanning systems with their advantages of small size, high precision, and high resonant frequency.

[0003] The commonly used piezoelectric deflection mirror uses piezoelectric ceramics as the driving element and is equipped with a lens, which can reflect or refract light to complete the positioning and control of the optical path. In many optical experiments, the accuracy of the test results is very important. In order to obtain more accurate readings, the piezoelectric deflection mirror is sometimes required to be as small as possible to reduce the impact on the experimental results. In addition, in some special experiments, it is necessary to filter the light and select the appropriate optical path to complete the experiment, but many existing products cannot achieve the above functions at the same time.

[0004] Based on the above, the problem to be solved at present is: to provide a high-precision, light-transmissive piezoelectric deflection mirror with small size, high accuracy and stability, small motion coupling, fast response speed, and the ability to achieve X and Y axis deflection and Z axis linear motion. Summary of the invention

[0005] The purpose of the present invention is to provide a high-precision light-transmitting piezoelectric deflecting mirror, aiming to solve the problems in the prior art that the piezoelectric deflecting mirror is large in size, poor in test accuracy and stability, has large motion coupling, slow in response speed, and has no light filtering function.

[0006] The present invention is implemented as follows: a high-precision light-transmissive piezoelectric deflecting mirror comprises: a top cover, a bottom cover, a flexible hinge mechanism, a piezoelectric ceramic and a housing;

[0007] The flexible hinge mechanism is fixedly connected to the top cover and the bottom cover; the flexible hinge mechanism comprises a first flexible hinge arm, a second flexible hinge arm and a third flexible hinge arm;

[0008] The piezoelectric ceramic includes a first piezoelectric ceramic, a second piezoelectric ceramic and a third piezoelectric ceramic; the first piezoelectric ceramic is arranged between the first flexible hinge arm and the second flexible hinge arm, the second piezoelectric ceramic is arranged between the second flexible hinge arm and the third flexible hinge arm, and the third piezoelectric ceramic is arranged between the first flexible hinge arm and the third flexible hinge arm;

[0009] The piezoelectric ceramic comprises a moving end and a fixed end, the moving end is connected to the top cover and is used to drive the top cover to realize X-axis and Y-axis deflection and Z-axis linear motion, and the fixed end is fixedly connected to the bottom cover;

[0010] The shell is arranged on the outer sides of the top cover, the flexible hinge mechanism and the piezoelectric ceramic, and is fixed on the bottom cover; the top cover, the flexible hinge mechanism, the bottom cover and the middle of the shell are all provided with light-transmitting through holes.

[0011] Furthermore, the top cover is provided with three positioning holes, each positioning hole is threadedly connected with a recessed head screw, a steel ball is placed below the recessed head screw, a tungsten steel sheet is provided below the steel ball, and the tungsten steel sheet is connected to the moving end of the piezoelectric ceramic below.

[0012] Furthermore, the moving ends of the first piezoelectric ceramic, the second piezoelectric ceramic and the third piezoelectric ceramic are evenly arranged on the same circular ring.

[0013] Furthermore, the flexible hinge mechanism also includes three wiring grooves, and the three wiring grooves are respectively arranged below the first flexible hinge arm, the second flexible hinge arm and the third flexible hinge arm.

[0014] Furthermore, the top cover is also provided with a connecting hole for connecting the optical lens.

[0015] Furthermore, the height of the outer shell is lower than the height of the top cover.

[0016] Furthermore, the housing is provided with a sheath for the external wire to pass through.

[0017] Furthermore, the top cover, the bottom cover and the flexible hinge mechanism are integrally formed.

[0018] The high-precision light-transmitting piezoelectric deflecting mirror provided by the present invention has the following beneficial effects:

[0019] The structural setting of the piezoelectric ceramics of the present invention (the structural setting is bisected by approximately 120°), combined with the flexible hinge mechanism without backlash, enables the present invention to have three degrees of freedom: Z-axis displacement, rotation around the X axis and around the Y axis, ensuring a highly stable and highly accurate steering function, and having a very high resolution and sub-millisecond response speed. The structural design of the piezoelectric ceramics enables the present invention to have a wider operating temperature range.

[0020] The flexible hinge mechanism of the present invention is integrally formed with the bottom cover and the top cover, so the product has the advantages of small size, compact structure and small motion coupling. Through holes suitable for light transmission applications are processed in the middle of the top cover, the flexible hinge mechanism, the bottom cover and the shell. The top cover can produce different functions by connecting various optical lenses to meet the needs of special environments, such as optical experiments, especially special experiments with light filtering requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the three-dimensional structure of the high-precision light-transmissive piezoelectric deflecting mirror provided by the present invention;

[0022] Figure 2 An exploded view of the high-precision light-transmissive piezoelectric deflecting mirror provided by the present invention;

[0023] Figure 3 A partial structural front view of the high-precision light-transmissive piezoelectric deflecting mirror provided by the present invention;

[0024] Figure 4 The present invention provides Figure 3 Schematic diagram of the AA-direction section structure;

[0025] Figure 5 The present invention provides Figure 3 BB direction section structure schematic diagram;

[0026] In the figure: 1-top cover; 101-positioning hole; 102-connecting hole; 2-bottom cover; 3-housing; 4-flexible hinge mechanism; 401-first flexible hinge arm; 402-second flexible hinge arm; 403-third flexible hinge arm; 404-wiring groove; 5-piezoelectric ceramic; 501-first piezoelectric ceramic; 502-second piezoelectric ceramic; 503-third piezoelectric ceramic; 6-recessed head screw; 7-steel ball; 8-tungsten steel sheet; 9-sheath. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0028] The implementation of the present invention is described in detail below in conjunction with specific embodiments.

[0029] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limitations on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0030] Reference Figure 1-5 The figure shows a preferred embodiment of the present invention.

[0031] A high-precision light-transmissive piezoelectric deflection mirror comprises a top cover 1, a bottom cover 2, a flexible hinge mechanism 4, a piezoelectric ceramic 5 and a housing 3, referring to Figure 1-2 The outer shell 3 is arranged outside the top cover 1, the flexible hinge mechanism 4 and the piezoelectric ceramic 5, and is fixed above the bottom cover 2. The outer shell 3 is mounted on the outside of the whole, and is glued to the bottom cover 2 to protect the internal components. It is preferred that the height of the bottom cover 2 is slightly lower than the top cover 1 to prevent interference between the optical lens and the outer shell 3 after the optical lens is installed on the top cover 1.

[0032] The top and bottom of the flexible hinge mechanism 4 are fixedly connected to the top cover 1 and the bottom cover 2, respectively. Preferably, the top cover 1, the bottom cover 2 and the flexible hinge mechanism 4 are integrally formed. The volume is reduced by the special flexible hinge mechanism 4. At the same time, the middle of the top cover 1, the bottom cover 2 and the flexible hinge mechanism 4 are all provided with through holes, and the size of the through holes can be customized. The through holes are used for light to pass through. The top cover 1 can be connected to various optical lenses to produce different functions to meet the needs of special environments.

[0033] The flexible hinge mechanism 4 is provided with a first flexible hinge arm 401, a second flexible hinge arm 402 and a third flexible hinge arm 403 on one side close to the top cover 1. Grooves for mounting the piezoelectric ceramic 5 are provided between the first flexible hinge arm 401 and the second flexible hinge arm 402, between the second flexible hinge arm 402 and the third flexible hinge arm 403, and between the first flexible hinge arm 401 and the third flexible hinge arm 403.

[0034] The piezoelectric ceramic 5 includes a first piezoelectric ceramic 501, a second piezoelectric ceramic 502 and a third piezoelectric ceramic 503. The first piezoelectric ceramic 501 is arranged in a groove between the first flexible hinge arm 401 and the second flexible hinge arm 402, the second piezoelectric ceramic 502 is arranged in a groove between the second flexible hinge arm 402 and the third flexible hinge arm 403, and the third piezoelectric ceramic 503 is arranged in a groove between the first flexible hinge arm 401 and the third flexible hinge arm 403.

[0035] The top cover 1 is provided with three positioning holes 101 for connecting with the piezoelectric ceramic 5. The positioning hole 101 is a threaded through hole. The positioning hole 101 is internally threaded with a recessed head screw 6. The piezoelectric ceramic 5 includes a moving end and a fixed end. A steel ball 7 is placed under the recessed head screw 6, and a tungsten steel sheet 8 is placed under the steel ball 7. The tungsten steel sheet 8 is bonded to the moving end of the first piezoelectric ceramic 501, the second piezoelectric ceramic 502, or the third piezoelectric ceramic 503. The tungsten steel sheet 8 can prevent the steel ball 7 from damaging the piezoelectric ceramic 5 during operation. The fixed end of the piezoelectric ceramic 5 is fixedly connected to the bottom cover 2. The cross-sections of the top cover 1 and the bottom cover 2 are preferably in the shape of a circular ring, and the positioning holes 101 are displayed in a circular ring on the top cover 1. Preferably, the moving ends of the first piezoelectric ceramic 501, the second piezoelectric ceramic 502, and the third piezoelectric ceramic 503 are displayed in a circular ring corresponding to the positioning holes 101, respectively. In the top view from the mobile end to the fixed end, the line connecting the mobile end of the first piezoelectric ceramic 501 and the center of the top cover 1 is L, the line connecting the mobile end of the second piezoelectric ceramic 502 and the center of the top cover 1 is M, and the line connecting the mobile end of the third piezoelectric ceramic 503 and the center of the top cover 1 is K. The angles between L and M, M and K, and K and M are about 120°. The three piezoelectric ceramics of the present invention are arranged in a structure that divides about 120° in half, and with a flexible hinge mechanism without backlash, the present invention has three degrees of freedom: Z-axis displacement, rotation around the X axis and around the Y axis, ensuring a highly stable and highly accurate steering function, and having a very high resolution and sub-millisecond response speed.

[0036] Reference Figure 3-4 The first flexible hinge arm 401, the second flexible hinge arm 402 and the third flexible hinge arm 403 are provided with empty grooves through wire cutting to realize the transmission function. The flexible hinge mechanism 4 also includes a wiring groove 404. The three wiring grooves 404 are respectively arranged below the first flexible hinge arm 401, the second flexible hinge arm 402 and the third flexible hinge arm 403, forming a C-shaped structure for internal wiring. The housing 3 is also provided with a sheath 9, and the external wiring is connected to the outside world through the sheath 9. The sheath 9 is a large-diameter through hole.

[0037] The top cover 1 is also provided with a connection hole 102 for connecting the optical lens, preferably three connection holes 102 are provided. Preferably, the three connection holes 102 are evenly arranged between the three positioning holes 101. The connection hole 102 is a custom threaded hole, which can be processed according to the structure of the optical lens to be installed later. The bottom of the bottom cover 2 has a mounting hole, which can position and install the high-precision light-transmissive piezoelectric deflection mirror as a whole.

[0038] Working principle: Refer to Figure 5 The first piezoelectric ceramic 501, the second piezoelectric ceramic 502 and the third piezoelectric ceramic 503 are arranged at intervals of about 120 degrees. Different working attitudes of the piezoelectric ceramic 5 (elongation or unchanged) will cause the top cover 1 to produce X-axis deflection, Y-axis deflection and Z-axis displacement.

[0039] The top cover 1 realizes X-axis deflection: the first piezoelectric ceramic 501 and the second piezoelectric ceramic 502 change synchronously, while the third piezoelectric ceramic 503 has an opposite working state to the first piezoelectric ceramic 501 and the second piezoelectric ceramic 502, that is, the first piezoelectric ceramic 501 and the second piezoelectric ceramic 502 extend synchronously, and the third piezoelectric ceramic 503 remains unchanged; or the first piezoelectric ceramic 501 and the second piezoelectric ceramic 502 remain unchanged synchronously, and the third piezoelectric ceramic 503 extends.

[0040] The top cover 1 realizes Y-axis deflection: the working states of the first piezoelectric ceramic 501 and the second piezoelectric ceramic 502 are opposite (one is extended and the other remains unchanged), and the extended length of the third piezoelectric ceramic 503 is controlled to be half of the extended state of the first piezoelectric ceramic 501 or the second piezoelectric ceramic 502, that is, the first piezoelectric ceramic 501 is extended, the second piezoelectric ceramic 502 remains unchanged, and the extended length of the third piezoelectric ceramic 503 is half of the extended length of the first piezoelectric ceramic 501; or the first piezoelectric ceramic 501 remains unchanged, the second piezoelectric ceramic 502 is extended, and the extended length of the third piezoelectric ceramic 503 is half of the extended length of the second piezoelectric ceramic 502.

[0041] The top cover 1 achieves Z-direction displacement by simultaneously extending the first piezoelectric ceramic 501 , the second piezoelectric ceramic 502 , and the third piezoelectric ceramic 503 to the required displacement length.

[0042] When the piezoelectric ceramic 5 is deformed under the control of the piezoelectric controller, the tungsten steel sheet 8, steel ball 7 and concave head screw 6 above it are driven to move synchronously. When the X-axis and Y-axis are deflected, one side of the top cover 1 is tilted and the other side is stationary. At this time, the stationary side will generate torque and downward pressure, and the steel ball 7 plays a role in alleviating the torque. The piezoelectric ceramic 5 will not be damaged by the steel ball 7 under the protection of the tungsten steel sheet 8. Different optical lenses can be installed on the top of the top cover 1, because the top cover 1, the flexible hinge mechanism 4 and the bottom cover 2 are integrally processed and formed, reducing the coupling movement required for the whole, making the accuracy of the present invention higher. When there is a need to filter light, a special optical lens can be installed on the top of the top cover 1, and a light-transmitting through hole is set in the middle to complete the filtering of light.

[0043] The present invention is not limited thereto, and any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision light-transmissive piezoelectric deflecting mirror, characterized in that: include: A top cover (1), a bottom cover (2), a flexible hinge mechanism (4), piezoelectric ceramics (5) and a housing (3); The flexible hinge mechanism (4) is fixedly connected to the top cover (1) and the bottom cover (2); the flexible hinge mechanism (4) comprises a first flexible hinge arm (401), a second flexible hinge arm (402) and a third flexible hinge arm (403); The piezoelectric ceramic (5) comprises a first piezoelectric ceramic (501), a second piezoelectric ceramic (502) and a third piezoelectric ceramic (503); the first piezoelectric ceramic (501) is arranged between the first flexible hinge arm (401) and the second flexible hinge arm (402), the second piezoelectric ceramic (502) is arranged between the second flexible hinge arm (402) and the third flexible hinge arm (403), and the third piezoelectric ceramic (503) is arranged between the first flexible hinge arm (401) and the third flexible hinge arm (403); The piezoelectric ceramic (5) comprises a movable end and a fixed end, the movable end is connected to the top cover (1) and is used to drive the top cover (1) to achieve deflection along the X and Y axes and linear motion along the Z axis, and the fixed end is fixedly connected to the bottom cover (2); The outer shell (3) is arranged on the outer sides of the top cover (1), the flexible hinge mechanism (4) and the piezoelectric ceramic (5), and is fixed on the bottom cover (2); the top cover (1), the flexible hinge mechanism (4), the bottom cover (2) and the middle of the outer shell (3) are all provided with light-transmitting through holes.

2. The high-precision light-transmissive piezoelectric deflecting mirror according to claim 1, characterized in that: The top cover (1) is provided with three positioning holes (101), each positioning hole (101) is threadedly connected with a recessed head screw (6), a steel ball (7) is placed below the recessed head screw (6), a tungsten steel sheet (8) is placed below the steel ball (7), and the tungsten steel sheet (8) is connected below to the moving end of the piezoelectric ceramic (5).

3. The high-precision light-transmissive piezoelectric deflecting mirror according to claim 1, characterized in that: The moving ends of the first piezoelectric ceramic (501), the second piezoelectric ceramic (502) and the third piezoelectric ceramic (503) are evenly arranged on the same circular ring.

4. The high-precision light-transmissive piezoelectric deflecting mirror according to claim 1, characterized in that: The flexible hinge mechanism (4) further comprises three wiring grooves (404), wherein the three wiring grooves (404) are respectively arranged below the first flexible hinge arm (401), the second flexible hinge arm (402) and the third flexible hinge arm (403).

5. The high-precision light-transmissive piezoelectric deflecting mirror according to claim 1, characterized in that: The top cover (1) is also provided with a connection hole (102) for connecting an optical lens.

6. The high-precision light-transmissive piezoelectric deflecting mirror according to claim 1, characterized in that: The height of the outer shell (3) is lower than the height of the top cover (1).

7. The high-precision light-transmissive piezoelectric deflecting mirror according to claim 1, characterized in that: The housing (3) is provided with a sheath (9) for the external wiring to pass through.

8. The high-precision light-transmissive piezoelectric deflecting mirror according to any one of claims 1 to 7, characterized in that: The top cover (1), the bottom cover (2) and the flexible hinge mechanism (4) are integrally formed.

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