Scraping head, scraper device and extension tail gas treatment equipment

Abstract

The embodiment of the invention provides a scraping head, a scraper device and extension tail gas treatment equipment, the scraping head comprises an annular part, the outer diameter of the annular part is configured to be matched with the inner diameter of a pipeline so that the annular part can move in the pipeline to scrape away adherends on the inner wall of the pipeline; the rod part is connected to the inner surface of the annular part and extends to pass through the central axis of the annular part so as to receive driving force at the position of the central axis to enable the annular part to move, the thickness of the annular part in the radial direction of the annular part ranges from 1.5 mm to 2.5 mm, and the thickness of the rod part in the radial direction of the annular part ranges from 1.5 mm to 2.5 mm. And the radial dimension of the rod part in a plane vertical to the central axis is between 1.5 mm and 2.5 mm.

Description

Technical Field

[0001] The present disclosure relates to the technical field of semiconductor wafer production, and in particular to a scraper head, a scraper device and epitaxial tail gas treatment equipment. Background Art

[0002] Wafer epitaxy is a key step in the semiconductor manufacturing process, which aims to form a single-crystalline thin film on the surface of the wafer. This process is usually carried out in a specific epitaxial reactor, using techniques such as chemical vapor deposition (CVD) or molecular beam epitaxy (MBE). In this process, the wafer is placed in the reactor and a gas containing a silicon source, such as silane (SiH 4 ) and hydrogen (H 2 ), chemical reactions are carried out at high temperatures to deposit silicon atoms on the surface of the wafer to form an epitaxial layer. In addition, byproducts such as hydrogen chloride (HCl) and carbon tetrachloride (TCS) may also be produced during the epitaxial process. These gases need to be effectively treated to avoid contamination of the environment and equipment.

[0003] During the wafer epitaxial processing, due to the complexity of chemical reactions, some pollutants and impurities will be generated, such as silicon dioxide (SiO 2 ). These pollutants will adhere to the inner wall of the epitaxial exhaust gas flow pipe. Over time, the adhesion will gradually accumulate, resulting in a reduction in the cross-sectional area of ​​the inner wall of the pipe, thus affecting the gas flow. This blockage phenomenon will not only reduce the exhaust gas treatment efficiency, but may also cause unstable gas flow rate, which will lead to pressure fluctuations in the epitaxial reactor chamber, produce particulate contamination, and ultimately affect the quality and yield of the wafer.

[0004] In order to solve the above-mentioned adhesion blockage problem, the commonly used method is to use a scraper for cleaning. The scraper is usually composed of a cylinder, a metal rod and a scraper head. 2 ) is driven by a metal rod, which pushes the scraper head downward to scrape off the adhesion on the inner wall of the pipe. However, the existing scraper structure has certain limitations. First, more and more silica solids will gradually accumulate at the bottom of the scraper head and in the fan-shaped holes, causing the scraper itself to be blocked. Secondly, the fan-shaped holes are the only circulation channel for the exhaust gas at the bottom of the scraper. Once they are severely blocked, the gas flow rate will be unstable, causing large pressure fluctuations in the chamber of the epitaxial reactor, which is easy to produce particles and reduce the quality of the produced wafers. Therefore, the existing scraper structure and material limit its cleaning efficiency and effect, and further technical improvements are needed to improve the overall performance and quality of wafer epitaxial processing. Summary of the invention

[0005] In order to solve the above technical problems, the embodiments of the present disclosure hope to provide a scraper head, a scraper device and epitaxial exhaust gas treatment equipment, aiming to improve the cleaning efficiency and effect by improving the structural design of the scraper, thereby effectively solving the problem of blockage of the inner wall of the pipeline by adhesions.

[0006] The technical solution of the present disclosure is achieved as follows: In a first aspect, an embodiment of the present disclosure provides a shaving head, the shaving head comprising: an annular portion, the outer diameter of which is configured to match the inner diameter of the pipe so as to scrape off adhesions on the inner wall of the pipe by moving in the pipe; a rod portion connected to the inner surface of the annular portion and extending through the central axis of the annular portion to receive a driving force at the position of the central axis to move the annular portion, The thickness of the annular portion in the radial direction is between 1.5 mm and 2.5 mm, and the radial dimension of the rod portion in a plane perpendicular to the central axis is between 1.5 mm and 2.5 mm.

[0007] The scraper head disclosed in the present invention receives the driving force through the rod portion at the central axis, which simplifies the application of the driving force and ensures that the pressure of the annular portion on the inner wall of the pipeline is uniform, avoiding deflection and allowing the annular portion to move smoothly. The thinner design of the annular portion and the rod portion increases the aperture of the through hole, reduces the impact on the fluid flow rate, and maintains the stability of the gas flow. The thickness of the annular portion in its radial direction and the radial dimension of the rod portion are controlled between 1.5mm and 2.5mm, reducing the adhesion area of ​​silicon dioxide solids and avoiding clogging of the scraper head. This design improves the cleaning efficiency and effect, reduces pipeline clogging and particulate contamination, and improves wafer quality.

[0008] In some embodiments, there are multiple rod portions, and each rod portion extends from the same point on the central axis along the radial direction of the annular portion to the inner surface of the annular portion.

[0009] The scraper head structure design gives it better rigidity and structural strength. Multiple force-bearing parts start from the same point on the central axis and extend radially along the scraper part to the inner surface, dispersing the force and enhancing the scraper head's ability to resist deformation. Uniform force distribution helps maintain shape and structural stability, improve durability and reliability, and reduce maintenance requirements and replacement frequency. The uniform force and good structural strength of the scraper part ensure that it can effectively scrape off the adhesion on the inner wall of the pipeline, keep the inner wall of the pipeline clean, and reduce pipeline blockage and pressure fluctuations.

[0010] In some embodiments, the number of the rod portions is three and the rod portions are evenly distributed in the circumferential direction of the annular portion.

[0011] The three rods ensure the rigidity and strength of the structure, while maximizing the internal holes of the annular part, which is conducive to the stable flow of fluid and reduces the impact of speed. The evenly distributed rods ensure the uniform transmission of driving force, provide uniform pressure, avoid the deflection of the annular part, and ensure its smooth movement in the pipeline. The maximized through-hole diameter minimizes the resistance to fluid flow, ensures the stability of gas flow, and has little impact on speed.

[0012] In some embodiments, the scraper head is made of a copper alloy.

[0013] The scraper head is made of copper alloy to ensure rigidity and structural strength, high tensile strength, acid and corrosion resistance, suitable for acidic environment, smooth surface to reduce friction, reduce energy consumption and improve moving efficiency.

[0014] In some embodiments, the copper alloy has a copper content of 78.5% to 81.5% by mass.

[0015] The scraper head uses a specific proportion of copper alloy, which has high rigidity and strength. The high copper content enhances hardness and deformation resistance. It has good acid resistance and is suitable for acidic environments. The smooth surface reduces friction in the pipeline, reduces energy consumption and improves efficiency.

[0016] In some embodiments, each rod portion is welded to the inner surface of the annular portion.

[0017] Each rod in the scraper head is connected to the inner surface of the annular part by welding, providing high structural strength. Welding is stronger than mechanical connection, simplifying the manufacturing process, reducing time and cost. Automated welding improves production efficiency, ensures quality consistency, and is suitable for mass production. Welded connections are durable and reliable, reducing maintenance and replacement, which is essential for the continuous operation of the equipment.

[0018] In some embodiments, the cross section of the rod is rectangular.

[0019] The cross section of the rod is rectangular, which facilitates straight edge welding and improves welding accuracy and efficiency. The rectangular shape is easy to machine, simplifies the molding steps, facilitates dimensional control, and ensures component accuracy, which is critical to scraper performance and compatibility. This design is suitable for mass production, rapid replication, and consistency to meet large-scale manufacturing needs.

[0020] In a second aspect, an embodiment of the present disclosure provides a scraper device, the scraper device comprising: The shaving head according to the first aspect; Cylinder-piston assembly; A driving rod is connected to the piston of the cylinder-piston assembly and is used to provide the driving force.

[0021] The cylinder-piston assembly provides high-efficiency force transmission. The piston moves in the cylinder, converting pressure energy into linear motion, with low energy loss and high efficiency. The assembly can accurately control the driving force, and by adjusting the air pressure or hydraulic pressure, the piston movement speed and force can be controlled, thereby controlling the scraping action of the scraper head. The assembly adapts to high temperature, high pressure and corrosive environments and maintains stable performance. The compact design takes up little space and is easy to integrate into the scraper device, improving the compactness of the overall design and facilitating installation and operation.

[0022] In some embodiments, the cylinder of the cylinder-piston assembly is a gas cylinder.

[0023] When the cylinder of the cylinder-piston assembly is a pneumatic cylinder, inert gases such as nitrogen can be used as a pressure source to avoid chemical reactions and ensure production safety. The pneumatic system is easy to handle emissions, reduce environmental pollution, and has a fast response speed. It is suitable for frequent start-stop cleaning operations. The cylinder responds quickly to the control signal and provides driving force.

[0024] In a third aspect, an embodiment of the present disclosure provides an epitaxial tail gas treatment device, the epitaxial tail gas treatment device comprising: The scraper device according to the second aspect; The pipeline is used for the circulation of epitaxial reaction tail gas.

[0025] By using the scraper device disclosed in the present invention, the epitaxial tail gas treatment equipment can accurately control the flow of source gas and improve the quality of wafers. The scraper device removes adhesions on the inner wall of the pipeline, reduces pollutants, maintains the cleanliness of the reactor interior, and avoids damage to the wafer surface. The design ensures stable gas flow and avoids flow rate fluctuations, which is crucial to reaction uniformity and wafer quality. Maintaining gas flow stability and cleanliness enables the epitaxial tail gas treatment equipment to accurately control epitaxial conditions and achieve high-quality epitaxial layers. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a schematic top view of a shaving head according to an embodiment of the present disclosure; Figure 2 is a front view schematic diagram of a scraper head and a pipeline according to an embodiment of the present disclosure; Figure 3 It is a schematic front view of a scraper device according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure.

[0028] In order to solve the problem of clogging of the inner wall of the pipeline by adhesion during the wafer epitaxial processing, a scraper is generally used for cleaning. This scraper consists of a cylinder, a metal rod and a scraper head. It is driven by nitrogen, and the metal rod pushes the scraper head downward to scrape off the adhesion on the inner wall of the pipeline. However, this scraper has obvious limitations: more and more silica solids will gradually accumulate at the bottom of the scraper head and the fan-shaped holes, causing the scraper itself to be blocked. In addition, the fan-shaped holes are the only circulation channel for the exhaust gas at the bottom of the scraper. Once they are severely blocked, the gas flow rate will be unstable, causing large pressure fluctuations in the chamber of the epitaxial reactor, which is easy to produce particles and reduce the quality of the produced wafers. Therefore, the existing scraper structure and material limit its cleaning efficiency and effect, and further technical improvements are urgently needed to improve the overall performance and quality of wafer epitaxial processing.

[0029] In view of the above shortcomings, the present disclosure proposes a technical solution, which aims to improve the cleaning efficiency and effect of the scraper by improving its structural design, thereby effectively solving the problem of clogging of the inner wall of the pipeline by adhesion. Figure 1 and Figure 2 The present disclosure provides a shaving head 100, which may include: The outer diameter of the annular portion 110 is configured to match the inner diameter of the pipe 20, such as in Figure 2 As shown in FIG. 1 , the adhesion S on the inner wall of the pipe 20 is scraped off by moving in the pipe 20. Figure 2 exemplarily shows that the annular portion 110 moves in the direction of the hollow arrow, thereby scraping off the adhered matter S; The rod portion 120 is connected to the inner surface 110S of the annular portion 110 and extends through the central axis X of the annular portion 110. Figure 1 and Figure 2 It is easy to understand that the annular portion 110 is moved by receiving the driving force F at the position of the central axis X, as shown in FIG. Figure 2 Easy to understand, Among them, as in Figure 1 As shown in FIG. 1 , the thickness D1 of the annular portion 110 in the radial direction thereof is between 1.5 mm and 2.5 mm, and the radial dimension D2 of the rod portion 120 in a plane perpendicular to the central axis X is between 1.5 mm and 2.5 mm.

[0030] In the shaving head 100 according to the embodiment of the present disclosure, since the rod portion 120 of the shaving head 100 receives the driving force F at the position of the central axis X, this design ensures that the driving force F is easy to provide, for example, it can be applied by the driving rod along the direction of the central axis X. This central force-bearing method makes the pressing force of the annular portion 110 on the inner wall of the pipe 20 evenly distributed, avoids the deflection of the annular portion 110 relative to the pipe 20, and ensures that the annular portion 110 can move smoothly in the pipe 20, such as Figure 2 The thinner design of the annular portion 110 and the rod portion 120 means that the through hole formed inside the annular portion 110 has a larger aperture, which is conducive to a more stable flow of the fluid in the pipe 20. This design has a very small effect on the speed of the fluid flow, which can be almost ignored, thereby ensuring the stability of the gas flow in the epitaxial reactor chamber. Figure 1 The thickness D1 of the annular portion 110 and the radial dimension D2 of the rod portion 120 are both between 1.5 mm and 2.5 mm. Such a design greatly reduces the effective area of ​​the scraper head 100 that can be adhered to by the silica solids. The smaller effective area reduces the accumulation of silica solids on the scraper head 100, thereby avoiding the problem of the scraper head itself being blocked due to the accumulation of silica solids. Figure 1 As shown. The design of the scraper head 100 not only improves the cleaning efficiency, but also improves the cleaning effect. Since the annular portion 110 can be evenly pressed against the inner wall of the pipeline and has a larger through-hole diameter, the cleaning process is more thorough, and the blockage problem of the pipeline 20 caused by the accumulation of adhesion S is reduced. The design of the scraper head 100 reduces the risk of particle contamination caused by unstable gas flow rate. Since the gas flow is more stable, the environment of the epitaxial reactor chamber is improved, thereby reducing the generation of particles in the production process and improving the quality of the wafer.

[0031] In some embodiments of the present disclosure, see Figure 1 There may be multiple rod portions 120 , and each rod portion 120 extends from the same point on the central axis X along the radial direction of the annular portion 110 to the inner surface 110S of the annular portion 110 .

[0032] Although the annular portion 110 of the scraper head 100 has a thin wall, the structure disclosed in the present invention makes it have better rigidity and overall structural strength. The multiple rods 120 start from the same point on the central axis X and extend along the radial direction of the annular portion 110 to its inner surface 110S. This design disperses the force and enhances the ability of the scraper head 100 to resist deformation. Even under a large external force, the scraper head 100 is not prone to large deformation. The design of multiple rods 120 means that the driving force F can be more evenly distributed over the entire cross-section of the annular portion 110. This uniform force distribution helps the annular portion 110 maintain the stability of its shape and structure when subjected to force, reducing the risk of deformation or damage caused by excessive local force. Since the scraper head 100 has better rigidity and structural strength, its durability and reliability are improved. In the long-term epitaxial reactor tail gas treatment process, the scraper head 100 can withstand repeated scraping actions and external forces, reducing the maintenance requirements and replacement frequency caused by structural deformation. The uniform force and good structural strength of the annular portion 110 ensure that it can effectively scrape off the adhesion S on the inner wall of the pipe 20. This effective scraping action helps to maintain the cleanliness of the inner wall of the pipe and reduce pipe blockage and pressure fluctuations in the epitaxial reactor chamber caused by accumulation of adhesion.

[0033] In some embodiments of the present disclosure, see Figure 1 The number of the rod portions 120 may be three and they are evenly distributed in the circumferential direction of the annular portion 110 .

[0034] There are three rods 120. This design not only ensures the rigidity and overall structural strength, but also maximizes the aperture of the through hole formed inside the annular portion 110. This maximized aperture is conducive to a more stable flow of the fluid in the pipeline 20, reduces the speed impact of the fluid flow, and has almost no obstruction to the fluid flow. There are three rods 120, and they are evenly distributed in the circumference of the annular portion 110. This design ensures that the driving force F can be more evenly transmitted to the annular portion 110, thereby providing a uniform pressing force on the entire circumference of the annular portion 110, avoiding the deflection of the annular portion 110 relative to the pipeline 20, and ensuring that the annular portion 110 can move smoothly in the pipeline 20. Since the aperture of the through hole inside the annular portion 110 is maximized, the resistance to the flow of the fluid in the pipeline 20 is minimized, thereby ensuring the stability of the gas flow in the epitaxial reactor chamber. This design has a very small effect on the speed of the fluid flow, which can be almost ignored.

[0035] In some embodiments of the present disclosure, the scraper head 100 may be made of a copper alloy.

[0036] The scraper head 100 is made of copper alloy, which not only ensures the rigidity and structural strength of the scraper head, but also enables the scraper head 100 to maintain the stability of shape and structure under various external forces due to the high tensile strength and hardness of the copper alloy. The scraper head 100 made of copper alloy has good acid resistance, which enables it to be in an acidic environment for a long time without being corroded, which is in line with the working environment and conditions of the equipment. This acid resistance ensures the reliability and durability of the scraper head 100 when treating acidic exhaust gas. The surface of the copper alloy is relatively smooth, which makes the scraper head 100 less resistant when moving in the pipe 20. The smooth surface reduces the friction between the scraper head and the inner wall of the pipe 20, thereby reducing energy consumption and improving the movement efficiency of the scraper head 100.

[0037] In some embodiments of the present disclosure, the mass percentage of copper in the copper alloy may be between 78.5% and 81.5%.

[0038] When the scraper head 100 is made of the copper alloy of the above-mentioned specific proportion, it is ensured that the scraper head 100 has excellent rigidity and structural strength, and the high copper content of the copper alloy provides the necessary hardness and deformation resistance, so that the scraper head 100 is not easy to deform when subjected to external force. The precise control of the mass percentage of copper in the copper alloy makes the scraper head 100 have good acid resistance and can be in an acidic environment for a long time without being corroded, which is particularly important for epitaxial reactors that process acidic tail gas, ensuring the reliability and durability of the scraper head 100 in harsh working environments. The high copper content of the copper alloy also helps to keep the surface of the scraper head 100 smooth, which reduces the friction between the scraper head 100 and the inner wall when it moves in the pipeline 20, reduces energy consumption and improves scraping efficiency. The smooth surface means that the scraper head 100 is subject to less resistance when moving, and does not affect the operation of the equipment.

[0039] In some embodiments of the present disclosure, each rod portion 120 may be welded to the inner surface 110S of the annular portion 110 .

[0040] In the scraper head 100, each rod 120 is connected to the inner surface 110S of the annular portion 110 by welding. The welding connection provides extremely high structural strength because it realizes molecular bonding between the rod 120 and the annular portion 110 through the metal melting and solidification process. This connection method is stronger than traditional mechanical connections such as bolts or rivets, and can remain stable under various external forces. The welding connection simplifies the manufacturing process of the scraper head 100. Compared with the mechanical connection that requires precise matching and multiple adjustments, the welding can be completed in one go, reducing the assembly time and cost. In addition, the welding process can be carried out by automated equipment, further improving production efficiency. Due to the high efficiency and consistency of the welding connection, it is very suitable for the mass production of the scraper head 100. The automated welding technology can ensure that the production of each scraper head meets the same quality standards, while shortening the production cycle and meeting the needs of large-scale manufacturing. The durability and reliability of the welding connection enable the scraper head 100 to maintain performance during long-term use, reducing maintenance and replacement caused by loose or damaged connection parts. This durable connection method is essential for the continuous operation of the epitaxial reactor tail gas treatment equipment.

[0041] In some embodiments of the present disclosure, the cross section of the rod portion 120 may be rectangular.

[0042] The cross section of the rod 120 is rectangular. This design makes the edges that need to be connected in the rod 120 straight lines, which is easy to accomplish when connected by welding, because the weld required for the straight edge is also straight, making the welding process more accurate and efficient. The cross section of the rod 120 is rectangular, and such a shape is easy to produce by mechanical processing. The simple geometric shape of the rectangular cross section makes the processing process more direct and reduces complex molding steps. Due to the linear characteristics of the rectangular cross section, it is easy to control the size of the rod 120, thereby ensuring that the parts after processing and manufacturing can meet the precise size requirements. This precise size control is crucial to ensure the performance and compatibility of the scraper head 100. Since the rod 120 with a rectangular cross section is easy to process and size control, this makes the scraper head 100 suitable for mass production. During mass production, this design can be quickly replicated and maintained consistent to meet the needs of large-scale manufacturing.

[0043] See also Figure 3 The present disclosure also provides a scraper device 10, which may include: The shaving head 100 according to the aforementioned embodiments of the present disclosure; Cylinder-piston assembly 200; A drive rod 300 is connected to the piston 210 of the cylinder-piston assembly 200 and is used to provide Figure 2 The driving force F is shown in FIG.

[0044] The cylinder-piston assembly 200 provides an efficient force transmission mechanism. In the cylinder-piston assembly 200, the piston 210 moves in the cylinder and directly converts the pressure energy into linear motion. This conversion method has low energy loss and high efficiency. The cylinder-piston assembly 200 can be used to achieve precise control of the driving force F. By adjusting the air pressure or hydraulic pressure entering the cylinder-piston assembly 200, the moving speed and strength of the piston 210 can be accurately controlled, thereby accurately controlling the scraping action of the scraper head 100. The cylinder-piston assembly 200 can adapt to different working environments and conditions. Whether it is high temperature, high pressure or corrosive environment, the cylinder-piston assembly 200 can maintain stable performance by selecting appropriate materials and designs. The cylinder-piston assembly 200 has a compact design and occupies a small space, which is easy to integrate into the scraper device 10. This compactness makes the overall design of the scraper device 10 more compact and easy to install and operate.

[0045] In some embodiments of the present disclosure, the cylinder 220 of the cylinder-piston assembly 200 may be a gas cylinder.

[0046] In the case where the cylinder 220 of the cylinder-piston assembly 200 is a gas cylinder, an inert gas such as nitrogen can be used as a pressure source, such as in Figure 3 As schematically shown by the downward arrow in the figure, this option ensures that no undesired chemical reactions occur when cleaning the pipeline 20, because the inert gas will not react with the chemicals in the pipeline, thereby ensuring the safety of the production process. The pneumatic drive system uses gas as the working medium. Compared with the hydraulic drive system, the gas is easier to handle and discharge, and has less impact on the environment. In addition, gas drive does not involve the risk of liquid leakage, reducing pollution to the environment. The pneumatic drive system has a fast response speed and can start and stop quickly, which is particularly important for cleaning operations that require frequent starts and stops. The cylinder of the cylinder-piston assembly 200 can respond quickly to the control signal and provide timely driving force F.

[0047] The present disclosure also provides an epitaxial tail gas treatment device not shown in the drawings, which may include: According to the scraper device 10 described in the aforementioned embodiments of the present disclosure; A pipe 20 is used for the circulation of the tail gas of the epitaxial reaction.

[0048] By utilizing the scraper device 10 according to the embodiment of the present disclosure, the epitaxial tail gas treatment equipment can accurately control the flow of source gas used for epitaxial reaction, thereby significantly improving the quality of the epitaxial wafer finally obtained. The scraper device 10 effectively removes the adhesion on the inner wall of the pipe 20 and reduces the pollutant content in the tail gas. This reduced pollutant content helps to maintain the cleanliness of the internal environment of the epitaxial reactor and avoids adverse effects on the wafer surface. The design and operation of the scraper device 10 ensure the stability of the gas flow in the pipe 20 and avoid the fluctuation of the gas flow rate caused by the accumulation of adhesion on the inner wall of the pipe. This stability is crucial to the uniformity of the epitaxial reaction and the quality of the wafer. By maintaining the stability and cleanliness of the gas flow in the pipe 20, the epitaxial tail gas treatment equipment can more accurately control the epitaxial conditions, such as gas flow, temperature and pressure, which is crucial to achieving high-quality epitaxial layers.

[0049] It should be noted that the technical solutions described in the embodiments of the present disclosure can be combined arbitrarily without conflict.

[0050] The above is only a specific embodiment of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A shaving head, characterized in that: The scraper head comprises: an annular portion, the outer diameter of which is configured to match the inner diameter of the pipe so as to scrape off adhesions on the inner wall of the pipe by moving in the pipe; a rod portion connected to the inner surface of the annular portion and extending through the central axis of the annular portion to receive a driving force at the position of the central axis to move the annular portion, The thickness of the annular portion in the radial direction is between 1.5 mm and 2.5 mm, and the radial dimension of the rod portion in a plane perpendicular to the central axis is between 1.5 mm and 2.5 mm.

2. The shaving head according to claim 1, characterized in that: There are multiple rod portions, and each rod portion starts from the same point on the central axis and extends along the radial direction of the annular portion to the inner surface of the annular portion.

3. The shaving head according to claim 2, characterized in that: The number of the rod portions is three and they are evenly distributed in the circumferential direction of the annular portion.

4. The shaving head according to any one of claims 1 to 3, characterized in that: The scraper head is made of copper alloy.

5. The shaving head according to claim 4, characterized in that: The mass percentage of copper in the copper alloy is between 78.5% and 81.5%.

6. The shaving head according to claim 2 or 3, characterized in that: Each rod portion is welded to the inner surface of the annular portion.

7. The shaving head according to any one of claims 1 to 3, characterized in that: The cross section of the rod portion is rectangular.

8. A scraper device, characterized in that: The scraper device comprises: A shaving head according to any one of claims 1 to 7; Cylinder-piston assembly; A driving rod is connected to the piston of the cylinder-piston assembly and is used to provide the driving force.

9. The scraper device according to claim 8, characterized in that: The cylinder body of the cylinder body-piston assembly is a gas cylinder.

10. An epitaxial tail gas treatment device, characterized in that: The epitaxial tail gas treatment equipment comprises: The scraper device according to claim 8 or 9; The pipeline is used for the circulation of epitaxial reaction tail gas.

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