Pressure-sensitive adhesive tape for acrylate copolymer and CMP (chemical mechanical polishing) pad and preparation method of pressure-sensitive adhesive tape

Abstract

The invention relates to an acrylate copolymer, a pressure-sensitive adhesive tape for a CMP (chemical mechanical polishing) pad and a preparation method, the acrylate copolymer comprises an azobenzene acrylate monomer repetitive unit, the azobenzene acrylate monomer repetitive unit has the following structure: # imgabs0 #, R1 is H or methyl, R2 is C2-12 alkyl, R3 is C2-16 fluorine-containing alkyl, R1 is H or methyl, R2 is C3-12 alkyl, R3 is C3-16 fluorine-containing alkyl, and R2 is C3-16 fluorine-containing alkyl. N is any integer from 1 to 3. The acrylate copolymer can endow the pressure-sensitive adhesive tape with higher shear resistance and easy stripping characteristic after illumination, and also endow the pressure-sensitive adhesive tape with hydrophobicity and high chemical corrosion resistance, so that the performance and the service life of the pressure-sensitive adhesive tape are further improved, and the use requirements of the pressure-sensitive adhesive tape in chemical mechanical polishing can be met.

Description

Technical Field

[0001] The present disclosure relates to the technical field of polymer materials, and in particular to an acrylate copolymer and a pressure-sensitive adhesive tape for a CMP polishing pad and a preparation method thereof. Background Art

[0002] Pressure-sensitive adhesive is a pressure-sensitive adhesive that can achieve tight adhesion to the surface of the adherend through finger touch pressure. There are many types of pressure-sensitive adhesives, and the most widely used one is acrylate pressure-sensitive adhesive. This type of pressure-sensitive adhesive is copolymerized by various acrylate monomers, including copolymers, external additives (such as initiators, cross-linking agents, tackifying resins and emulsifiers, etc.), media in the polymerization process (such as water and solvents, etc.) and residual monomers. Although acrylate pressure-sensitive adhesives perform well in a variety of applications, they still have obvious disadvantages in certain special environments. For example, traditional acrylate pressure-sensitive adhesives often show problems such as insufficient bonding performance, low shear resistance, poor chemical resistance and difficulty in peeling. These disadvantages limit their use in applications that require high performance and specific functions.

[0003] Chemical mechanical polishing (CMP) technology is an indispensable part of the semiconductor manufacturing process. Its unique surface flattening ability provides strong support for the miniaturization and performance improvement of semiconductor devices. Compared with traditional mechanical polishing, CMP technology effectively reduces surface damage and improves the flattening degree through the dual effects of chemistry and mechanics, thus providing a reliable guarantee for the manufacture of high-precision and high-density semiconductor devices. In the CMP process, the role of polishing materials is crucial. The design and material selection of the polishing pad directly affect the effect of CMP technology. The polishing pad not only needs to carry the polishing liquid and remove the polishing waste, but also must maintain stable performance under high pressure and high-speed rotation. Therefore, the bonding technology of the polishing pad has become an important research field in CMP technology. Due to the special environmental requirements in the CMP process, the bonding layer of the polishing pad must have high strength, chemical corrosion resistance and easy-to-control peeling performance, which puts extremely high demands on the selection of pressure-sensitive adhesives. The application of pressure-sensitive adhesives in CMP technology requires the formation of a strong bond between the polishing pad and the polishing table, while being able to resist mechanical pressure and chemical corrosion during the polishing process, and ultimately achieve controlled peeling under specified conditions. This means that pressure-sensitive adhesives must have high adhesion, high shear resistance, high chemical resistance and easy peeling. Although some studies have modified pressure-sensitive adhesives to give them certain excellent properties, there is currently no pressure-sensitive adhesive that has all of the above characteristics. Summary of the invention

[0004] The purpose of the present invention is to provide an acrylate copolymer and a pressure-sensitive tape for a CMP polishing pad and a preparation method. The acrylate copolymer can make the pressure-sensitive tape have high shear resistance and easy peeling properties after light exposure, and at the same time make the pressure-sensitive tape hydrophobic and highly resistant to chemical corrosion, further improving the performance and service life of the pressure-sensitive tape and meeting the use requirements of the pressure-sensitive tape in chemical mechanical polishing.

[0005] In order to achieve the above object, the present disclosure provides an acrylate copolymer in a first aspect, wherein the acrylate copolymer comprises an azobenzene acrylate monomer repeating unit, and the azobenzene acrylate monomer repeating unit has the following structure: , Wherein, R1 is H or methyl, R2 is C 2~12 Alkyl, R3 is C 2~16 A fluorinated alkyl group, wherein n is any integer from 1 to 3.

[0006] Optionally, R2 is C 2~10 The straight-chain alkyl group is preferably one or more of n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl and n-decyl; and / or, R3 is C 2~12 Preferably, R3 is C2, C4, C6, C8, C 10 or C 12 of perfluoroalkyl.

[0007] Optionally, the acrylate copolymer further comprises acrylate soft monomer repeating units, acrylate hard monomer repeating units, carboxyl acrylic acid monomer repeating units and hydroxyl acrylic acid monomer repeating units; Relative to 100 parts by weight of the acrylate soft monomer repeating unit, the content of the acrylate hard monomer repeating unit is 5 to 60 parts by weight, the content of the carboxyl acrylic acid monomer repeating unit is 1 to 20 parts by weight, the content of the hydroxyl acrylate monomer repeating unit is 1 to 30 parts by weight, and the content of the azobenzene acrylate monomer repeating unit is 5 to 50 parts by weight.

[0008] Optionally, relative to 100 parts by weight of the acrylate soft monomer repeating unit, the content of the acrylate hard monomer repeating unit is 10 to 40 parts by weight, the content of the carboxyl acrylic acid monomer repeating unit is 1 to 10 parts by weight, the content of the hydroxyl acrylate monomer repeating unit is 3 to 15 parts by weight, and the content of the azobenzene acrylate monomer repeating unit is 15 to 30 parts by weight.

[0009] Optionally, the acrylate soft monomer repeating unit is derived from an acrylate soft monomer, and the acrylate soft monomer is selected from one or more of ethyl acrylate, n-propyl acrylate, n-butyl acrylate, n-hexyl acrylate, isooctyl acrylate and lauryl methacrylate; The acrylate hard monomer repeating unit is derived from an acrylate hard monomer, and the acrylate hard monomer is selected from one or more of methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, isobutyl methacrylate, cyclohexyl methacrylate, and isobornyl methacrylate; The hydroxy acrylate monomer repeating unit is derived from a hydroxy acrylate monomer, and the hydroxy acrylate monomer is a hydroxyl-containing acrylate monomer having a hydroxyl functionality of 1. Preferably, the hydroxy acrylate monomer is selected from one or more of hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate and hydroxypropyl methacrylate; The carboxylic acrylate monomer repeating unit is derived from a carboxylic acrylate monomer, and the carboxylic acrylate monomer is a carboxyl-containing acrylate monomer having a carboxyl functionality of 1. Preferably, the carboxylic acrylate monomer is selected from acrylic acid and / or methacrylic acid.

[0010] Optionally, the acrylate copolymer has a glass transition temperature of -45 to -20°C.

[0011] A second aspect of the present disclosure provides a method for preparing a pressure-sensitive adhesive tape, the method comprising: The acrylic ester copolymer, tackifying resin, curing agent and fourth organic solvent described in the first aspect of the present disclosure are mixed to obtain a rubber compound; the rubber compound is coated on a substrate and then cured.

[0012] Optionally, the method further comprises compounding the cured adhesive layer with a release paper; Optionally, the release paper has a thickness of 0.10-0.18 mm; The curing conditions include: a curing temperature of 50-100°C and a curing time of 1-5h.

[0013] Optionally, relative to 100 parts by weight of the acrylate copolymer, the content of the tackifying resin is 5 to 30 parts by weight, the content of the curing agent is 0.5 to 3 parts by weight, and the content of the fourth organic solvent is 20 to 100 parts by weight; wherein the method satisfies one of the following conditions: (a) the fourth organic solvent is selected from ethyl acetate and / or toluene; (b) the tackifying resin is selected from one or more of rosin resin, rosin resin derivatives, terpene resin, terpene phenolic resin, styrene terpene resin, C5 petroleum resin and C9 petroleum resin; (c) the curing agent is an isocyanate curing agent having an isocyanate functionality of 2 or more, selected from one or more of hexylene diisocyanate, diphenylmethane diisocyanate, xylylene diisocyanate, toluene diisocyanate, and isophorone diisocyanate; (d) the solid content of the rubber compound is 20-50 wt %, and the viscosity of the rubber compound at 25° C. is 500-4000 cP; (e) The substrate comprises polyethylene terephthalate and / or polypropylene, preferably polyethylene terephthalate; and the thickness of the substrate is 0.01-0.1 mm.

[0014] A third aspect of the present disclosure provides a pressure-sensitive adhesive tape prepared by the method described in the second aspect of the present disclosure.

[0015] A fourth aspect of the present disclosure provides a use of the pressure-sensitive adhesive tape described in the third aspect of the present disclosure in chemical mechanical polishing.

[0016] Through the above technical solution, the acrylate copolymer disclosed in the present invention comprises azobenzene acrylate monomer repeating units, and the azobenzene acrylate monomer comprises an easily polymerizable acrylate group and a flexible alkyl group. When forming a polymer, the azobenzene group is more likely to undergo isomerization transformation on the side chain of the polymer. When such a polymer is used to prepare a pressure-sensitive adhesive tape, the pressure-sensitive adhesive tape can have a higher shear resistance and easy peeling properties after light exposure. In addition, the tail group of the azobenzene acrylate monomer repeating unit of the acrylate copolymer disclosed in the present invention comprises a fluorinated alkyl chain. The pressure-sensitive adhesive tape prepared using the copolymer has hydrophobicity and high chemical corrosion resistance, which can further improve the performance and service life of the pressure-sensitive adhesive tape and meet the use requirements of the pressure-sensitive adhesive tape in chemical mechanical polishing pads.

[0017] Other features and advantages of the present disclosure will be described in detail in the following detailed description. DETAILED DESCRIPTION

[0018] The specific embodiments of the present disclosure are described in detail below. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present disclosure, and are not used to limit the present disclosure.

[0019] The first aspect of the present disclosure provides an acrylate copolymer, wherein the acrylate copolymer comprises an azobenzene acrylate monomer repeating unit, and the azobenzene acrylate monomer repeating unit has the following structure: , Wherein, R1 is H or methyl, R2 is C 2~12 Alkyl, R3 is C 2~16 A fluorinated alkyl group, wherein n is any integer from 1 to 3.

[0020] The acrylate copolymer disclosed in the present invention comprises azobenzene acrylate monomer repeating units, and the azobenzene acrylate monomer comprises an easily polymerizable acrylate group and a flexible alkyl group. When forming a polymer, the azobenzene group is more likely to undergo isomerization transformation on the side chain of the polymer. When such a polymer is used to prepare a pressure-sensitive adhesive tape, the pressure-sensitive adhesive tape can have a higher shear resistance and easy peeling properties after light exposure. In addition, the tail group of the azobenzene acrylate monomer repeating unit of the acrylate copolymer disclosed in the present invention comprises a fluorinated alkyl chain. The pressure-sensitive adhesive tape prepared using the copolymer has hydrophobicity and high chemical corrosion resistance, which can further improve the performance and service life of the pressure-sensitive adhesive tape and meet the use requirements of the pressure-sensitive adhesive tape in chemical mechanical polishing pads.

[0021] In this disclosure, Represents a chemical bond.

[0022] The inventors of the present application have discovered that there are two isomers of the azobenzene group in the azobenzene acrylate monomer, namely the rod-shaped trans isomer and the bent cis isomer. The trans isomer is planar, while the benzene ring of the cis isomer is perpendicular to the CN=N plane, giving the entire molecule a bent structure. The ground state energy level of the trans isomer is 50 kJ / mol lower than that of the cis isomer, which is a thermodynamically stable conformation, so the trans isomer is more stable than the cis isomer. Due to the π-π stacking effect of azobenzene in the trans isomer, aggregates can be formed, and the type of aggregate depends on the angle (θ) between the coplanar transition dipoles of the groups and the directions of the interconnected axes. When θ>54.7° (critical angle θ c When θ is less than 54.7°, H aggregates can be formed; when θ is less than 54.7°, J aggregates can be formed. The strong supramolecular interaction between trans-isomer azobenzene aggregates can make the pressure-sensitive adhesive tape have strong shear resistance.

[0023] Furthermore, the azobenzene group is an optically active group that can undergo trans-cis or cis-trans isomerization under the action of light or heat. Under the irradiation of light with a wavelength of about 365 nm, trans-azobenzene can be converted into cis isomers; under the irradiation of light with a wavelength of about 530 nm, the cis isomer can be converted back into trans isomers. Cis-azobenzene cannot form aggregates due to its non-coplanar structure, and the intermolecular interaction is weakened, resulting in a decrease in the viscosity of the pressure-sensitive adhesive system. This property can be used to make the pressure-sensitive adhesive tape easy to peel after ultraviolet light.

[0024] In addition, fluorine atoms have high electronegativity and small atomic radius. The mutual repulsion between adjacent fluorine atoms causes the fluorine atoms to be distributed along the carbon chain spirally, tightly wrapping the carbon chain, making it difficult for other atoms to embed. Therefore, the fluorinated alkyl chain does not react with most known strong chemical reagents, strong acids and strong bases, and has good chemical corrosion resistance. At the same time, due to the high electronegativity and small atomic radius of fluorine atoms, the surface energy of fluorine-containing materials is very low, showing excellent hydrophobic properties. The inventors of the present application make the tail group of the azobenzene acrylate monomer a fluorinated alkyl chain, which can make the pressure-sensitive tape have hydrophobic and chemical corrosion resistance.

[0025] According to one embodiment of the present disclosure, R2 is C 2~10 The straight-chain alkyl group is preferably one or more of n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl and n-decyl. The above embodiment is conducive to the azobenzene acrylate monomer after polymerization, and the azobenzene group on the side chain of the acrylate copolymer is more likely to undergo cis-trans isomer conversion, and is less constrained by the main chain, further making the pressure-sensitive adhesive tape have better easy-to-peel properties.

[0026] According to one embodiment of the present disclosure, R3 is C 2~12 Preferably, R3 is C2, C4, C6, C8, C 10 or C 12 The above implementation is conducive to making the pressure-sensitive adhesive tape have hydrophobic and chemical corrosion resistance properties.

[0027] In one embodiment, the method for preparing azobenzene acrylate monomer comprises: S1, subjecting a fluoroalkyl alcohol to a first esterification reaction with dicarboxy azobenzene to obtain a first fluorinated product; S2, subjecting the first fluorinated product to a second esterification reaction with an alkyl glycol to obtain a second product; S3, subjecting the second product to a substitution reaction with an acyl chloride; Wherein, the fluoroalkyl alcohol has a structure as shown in formula (1), the alkyl diol has a structure as shown in formula (2), the acyl chloride has a structure as shown in formula (3); and the dicarboxy azobenzene has a structure as shown in formula (4); , , Wherein, R1 is H or CH3 alkyl, R2 is C 2~12 Alkyl, R3 is C 2~16 A fluorinated alkyl group, wherein n is any integer from 1 to 3.

[0028] According to one embodiment of the present disclosure, R2 is C 2~10R3 is a straight-chain alkyl group, preferably one or more of n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl and n-decyl; R4 is C 2~12 Preferably, R3 is C2, C4, C6, C8, C 10 or C 12 of perfluoroalkyl chains.

[0029] According to one embodiment of the present disclosure, step S1 is carried out in a first organic solvent in the presence of a first dehydrating agent and a first catalyst; the first dehydrating agent and the first catalyst may be types well known to those skilled in the art, for example, the first dehydrating agent may be selected from N,N'-dicyclohexylcarbodiimide, and the first catalyst may be selected from 6-dimethylaminopurine; the molar ratio of the dicarboxyazobenzene, the fluoroalkyl alcohol, the N,N'-dicyclohexylcarbodiimide and the 6-dimethylaminopurine is (2~15):(1~3):(1~3):(1~3); the first organic solvent may include one or more of dichloromethane, acetone, butanone and N,N-dimethylformamide.

[0030] According to an embodiment of the present disclosure, the conditions of the first esterification reaction include: a reaction temperature of 20-40° C. and a reaction time of 8-24 hours. The above embodiment is conducive to the preparation of azobenzene acrylate monomer.

[0031] According to an embodiment of the present disclosure, step S2 is carried out in the presence of a second dehydrating agent and a second catalyst in a second organic solvent; the second dehydrating agent and the second catalyst may be types well known to those skilled in the art, for example, the second dehydrating agent may be selected from N,N'-dicyclohexylcarbodiimide, and the second catalyst may be selected from 6-dimethylaminopurine; the molar ratio of the alkyl glycol, the first fluorinated product, the N,N'-dicyclohexylcarbodiimide and the 6-dimethylaminopurine is (2-15): (1-3): (1-3): (1-3); the second organic solvent includes one or more of dichloromethane, acetone, butanone and N,N-dimethylformamide. The above embodiment is conducive to the preparation of azobenzene acrylate monomer.

[0032] According to an embodiment of the present disclosure, the conditions of the second esterification reaction include: a reaction temperature of 20-40° C. and a reaction time of 8-24 hours. The above embodiment is conducive to the preparation of azobenzene acrylate monomer.

[0033] According to an embodiment of the present disclosure, in step S3, the molar ratio of the second product to the acyl chloride is 1: (3-5); the conditions of the substitution reaction may include: the reaction temperature is 20-40°C, and the reaction time is 8-24h. The substitution reaction disclosed in the present disclosure is a conventional technique in the art, and the present disclosure is not specifically limited, for example, including contacting the second product and triethylamine in an anhydrous organic solvent, adding acyl chloride under ice-water bath conditions for substitution reaction; the water content of the anhydrous organic solvent is less than 100ppm, and the temperature of the ice-water bath is less than 0°C. The above embodiment is conducive to the preparation of azobenzene acrylate monomer.

[0034] According to one embodiment of the present disclosure, the acrylic ester copolymer further comprises one or more of acrylic ester soft monomer repeating units, acrylic ester hard monomer repeating units, carboxyl acrylic acid monomer repeating units and hydroxy acrylic acid monomer repeating units.

[0035] According to one embodiment of the present disclosure, the acrylate copolymer further comprises acrylate soft monomer repeating units, acrylate hard monomer repeating units, carboxyl acrylic acid monomer repeating units and hydroxyl acrylic acid monomer repeating units; relative to 100 parts by weight of the acrylate soft monomer repeating units, the content of the acrylate hard monomer repeating units is 5 to 60 parts by weight, the content of the carboxyl acrylic acid monomer repeating units is 1 to 20 parts by weight, the content of the hydroxyl acrylic acid monomer repeating units is 1 to 30 parts by weight, and the content of the azobenzene acrylic acid monomer repeating units is 5 to 50 parts by weight. The above embodiment is conducive to making the obtained acrylate copolymer have strong shear resistance, easy peeling characteristics, hydrophobicity and chemical corrosion resistance when used in pressure-sensitive adhesive tapes.

[0036] According to an embodiment of the present disclosure, relative to 100 parts by weight of the acrylate soft monomer repeating unit, the content of the acrylate hard monomer repeating unit is 10 to 40 parts by weight, the content of the carboxyl acrylic acid monomer repeating unit is 1 to 10 parts by weight, the content of the hydroxy acrylate monomer repeating unit is 3 to 15 parts by weight, and the content of the azobenzene acrylate monomer repeating unit is 15 to 30 parts by weight. The above embodiment is conducive to making the prepared acrylate copolymer have strong shear resistance, easy peeling properties, hydrophobicity and chemical corrosion resistance when used in pressure-sensitive adhesive tape.

[0037] According to one embodiment of the present disclosure, the acrylate soft monomer repeating unit is derived from an acrylate soft monomer, and the acrylate soft monomer is a conventional type in the art, and the present disclosure does not specifically limit it. For example, it can be an acrylate soft monomer whose homopolymer glass transition temperature is below 0°C, and can be selected from one or more of ethyl acrylate, n-propyl acrylate, n-butyl acrylate, n-hexyl acrylate, isooctyl acrylate, and lauryl methacrylate. In the present disclosure, when the acrylate soft monomer repeating unit includes multiple monomer repeating units, the present disclosure does not specifically limit the ratio of each monomer repeating unit, and those skilled in the art can make the glass transition temperature of the acrylate copolymer within the desired target temperature range according to conventional technical means.

[0038] According to one embodiment of the present disclosure, the acrylate hard monomer repeating unit is derived from an acrylate hard monomer, and the acrylate hard monomer is a conventional type in the art, and the present disclosure does not specifically limit it. For example, it can be an acrylate hard monomer whose homopolymer glass transition temperature is above 25°C, and can be selected from one or more of methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, isobutyl methacrylate, cyclohexyl methacrylate, and isobornyl methacrylate. In the present disclosure, when the acrylate hard monomer repeating unit includes multiple monomer repeating units, the present disclosure does not specifically limit the ratio of each monomer repeating unit, and those skilled in the art can make the glass transition temperature of the acrylate copolymer within the desired target temperature range according to conventional technical means.

[0039] According to one embodiment of the present disclosure, the hydroxyl acrylate monomer repeating unit is derived from a hydroxyl acrylate monomer, and the hydroxyl acrylate monomer can be a hydroxyl-containing acrylate monomer having a hydroxyl functionality of 1, for example, can be selected from one or more of hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate and hydroxypropyl methacrylate.

[0040] According to one embodiment of the present disclosure, the carboxyl acrylate monomer repeating unit is derived from a carboxyl acrylate monomer, and the carboxyl acrylate monomer may be a carboxyl-containing acrylate monomer having a carboxyl functionality of 1, for example, may be selected from acrylic acid and / or methacrylic acid.

[0041] In one embodiment, the method for preparing the acrylic ester copolymer described in the first aspect of the present disclosure comprises polymerizing acrylic ester soft monomers, acrylic ester hard monomers, carboxyl acrylic acid monomers, hydroxy acrylic acid monomers and azobenzene acrylic acid monomers.

[0042] According to an embodiment of the present disclosure, the polymerization reaction is carried out in a third organic solvent, and the conditions of the polymerization reaction include: in the presence of an initiator, the solid content of the polymerization reaction system is 20-50wt%; the polymerization reaction temperature is 50-100°C, and the polymerization reaction time is 4-12h. The above embodiment is conducive to obtaining an acrylate copolymer.

[0043] According to one embodiment of the present disclosure, the content of the initiator is 0.5 to 1 part by weight relative to 100 parts by weight of the acrylic soft monomer. The initiator can be a conventional free radical initiator in the art, and can be selected from one of azobisisobutyronitrile, benzoyl peroxide and cumene hydroperoxide. The third organic solvent is a good solvent for various acrylic esters, for example, can be selected from ethyl acetate and / or toluene.

[0044] According to one embodiment of the present disclosure, the glass transition temperature of the acrylic ester copolymer is -45 to -20° C. The above embodiment can improve the initial adhesion of the pressure-sensitive adhesive tape.

[0045] A second aspect of the present disclosure provides a method for preparing a pressure-sensitive adhesive tape, the method comprising: The acrylic ester copolymer, tackifying resin, curing agent and fourth organic solvent described in the first aspect of the present disclosure are mixed to obtain a rubber compound; the rubber compound is coated on a substrate and then cured.

[0046] According to one embodiment of the present disclosure, relative to 100 parts by weight of the acrylic ester copolymer, the content of the tackifying resin is 5 to 30 parts by weight, the content of the curing agent is 0.5 to 3 parts by weight, and the content of the fourth organic solvent is 20 to 100 parts by weight; the fourth organic solvent is selected from ethyl acetate and / or toluene. The above embodiment is conducive to preparing a pressure-sensitive adhesive tape with strong shear resistance, easy peeling properties, hydrophobicity, oleophobicity and chemical corrosion resistance.

[0047] According to an embodiment of the present disclosure, the curing treatment conditions include: the curing treatment temperature is 50-100° C., and the curing treatment time is 1-5 hours. The above embodiment is conducive to preparing a pressure-sensitive adhesive tape with strong shear resistance, easy peeling properties, hydrophobicity, oleophobicity and chemical corrosion resistance.

[0048] According to one embodiment of the present disclosure, the tackifying resin may be selected from one or more of rosin resin, rosin resin derivatives, terpene resin, terpene phenolic resin, styrene terpene resin, C5 petroleum resin and C9 petroleum resin.

[0049] According to one embodiment of the present disclosure, the curing agent can be an isocyanate curing agent with an isocyanate functionality of 2 or more, selected from one or more of hexylene diisocyanate, diphenylmethane diisocyanate, xylene diisocyanate, toluene diisocyanate, and isophorone diisocyanate.

[0050] According to an embodiment of the present disclosure, the solid content of the rubber is 20-50 wt %, and the viscosity of the rubber at 25° C. is 500-4000 cP.

[0051] According to one embodiment of the present disclosure, the substrate includes polyethylene terephthalate and / or polypropylene, preferably polyethylene terephthalate; the thickness of the substrate is 0.01-0.1 mm.

[0052] According to an embodiment of the present disclosure, the method further comprises compounding the cured adhesive layer with a release paper.

[0053] According to one embodiment of the present disclosure, the release paper can be selected from one of coated release paper, double-adhesive release paper, yellow silicone paper, white card release paper, embossed silicone oil paper, kraft silicone oil paper, writing paper release paper, glassine release paper, and CCK release paper; the thickness of the release paper can be 0.10~0.18mm.

[0054] A third aspect of the present disclosure provides a pressure-sensitive adhesive tape prepared by the method described in the second aspect of the present disclosure.

[0055] A fourth aspect of the present disclosure provides a use of the pressure-sensitive adhesive tape described in the third aspect of the present disclosure in a chemical mechanical grinding polishing pad.

[0056] The present disclosure is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present disclosure, but are not intended to limit the present disclosure in any form.

[0057] Unless otherwise specified, the reagents used in the present disclosure are all commercially available. In the embodiments of the present disclosure, the viscosity of the rubber is tested by a spinning instrument with a model number of TR-100EU-C. The glass transition temperature of the acrylic copolymer is tested by a differential scanning calorimeter (DSC) with a model number of Mettler Toledo DSC 3.

[0058] Preparation Example 1 S1: Weigh fluorinated alkyl alcohol, N,N'-dicyclohexylcarbodiimide (DCC) and 6-dimethylaminopurine (DMAP) respectively and dissolve them in a dry first organic solvent, add dicarboxy azobenzene under ice-salt bath conditions, react at 25°C for 12 hours, filter after the reaction is completed, add dichloromethane to the filtrate to dilute the reaction system, add deionized water for washing, take the organic phase, and dry it to obtain the first fluorinated product; wherein the molar ratio of dihydroxyazobenzene, fluorinated alkyl alcohol, N,N'-dicyclohexylcarbodiimide and 6-dimethylaminopurine is 5:1:1:1; the first organic solvent is dichloromethane; S2: Weigh alkyl glycol, N,N'-dicyclohexylcarbodiimide (DCC) and 6-dimethylaminopurine (DMAP) respectively and dissolve them in a dry second organic solvent, add the first fluorinated product under ice-salt bath conditions, react at 25°C for 12 hours, filter after the reaction is completed, add dichloromethane to the filtrate to dilute the reaction system, add deionized water for washing, take the organic phase, and dry it to obtain the second product; wherein the molar ratio of alkyl glycol, the second product, N,N'-dicyclohexylcarbodiimide and 6-dimethylaminopurine is 5:1:1:1; the second organic solvent is dichloromethane; S3: The second product and triethylamine are dissolved in anhydrous dichloromethane, and the acyl chloride is added dropwise under ice-water bath conditions. After the addition is completed, the reaction is carried out at 25°C for 24 hours, and the organic phase is collected, dried, and purified by silica gel column chromatography to obtain azobenzene acrylate monomer. The water content of the anhydrous organic solvent is less than 100 ppm. The ice-water bath condition is a temperature below 0°C, wherein the molar ratio of the second product to the acyl chloride is 1:2.

[0059] In this preparation example, the fluoroalkyl alcohol has a structure as shown in formula (1), R3 is a C6 perfluoroalkyl group, and n is 2; the alkyl diol has a structure as shown in formula (2), R2 is C 10 The acyl chloride has a structure as shown in formula (3), and R1 is a methyl group; the dicarboxy azobenzene has a structure as shown in formula (4); , ; The prepared azobenzene acrylate monomer has the structure shown below.

[0060] , Among them, R1 is methyl, R2 is C 10 R3 is a C6 perfluoroalkyl group, and n is 2.

[0061] Comparative Preparation Example 1 S1: Weigh linear alkyl alcohol, N,N'-dicyclohexylcarbodiimide (DCC) and 6-dimethylaminopurine (DMAP) respectively and dissolve them in a dry first organic solvent, add dicarboxy azobenzene under ice-salt bath conditions, react at 25°C for 12 hours, filter after the reaction is completed, add dichloromethane to the filtrate to dilute the reaction system, add deionized water for washing, take the organic phase, and dry it to obtain the first fluorinated product; wherein the molar ratio of dihydroxyazobenzene, linear alkyl alcohol, N,N'-dicyclohexylcarbodiimide and 6-dimethylaminopurine is 5:1:1:1; the first organic solvent is dichloromethane; S2: Weigh alkyl glycol, N,N'-dicyclohexylcarbodiimide (DCC) and 6-dimethylaminopurine (DMAP) respectively and dissolve them in a dry second organic solvent, add the first fluorinated product under ice-salt bath conditions, react at 25°C for 12 hours, filter after the reaction is completed, add dichloromethane to the filtrate to dilute the reaction system, add deionized water for washing, take the organic phase, and dry it to obtain the second product; wherein the molar ratio of the second product, alkyl glycol, N,N'-dicyclohexylcarbodiimide and 6-dimethylaminopurine is 1:5:1:1; the second organic solvent is dichloromethane; S3: The second product and triethylamine are dissolved in anhydrous dichloromethane, and the acyl chloride is added dropwise under ice-water bath conditions. After the addition is completed, the reaction is carried out at 25°C for 24 hours, and the organic phase is collected, dried, and purified by silica gel column chromatography to obtain azobenzene acrylate monomer. The water content of the anhydrous organic solvent is less than 100 ppm. The ice-water bath condition is a temperature below 0°C, wherein the molar ratio of the second product to the acyl chloride is 1:2.

[0062] In this preparation example, the straight-chain alkyl alcohol has a structure as shown in formula (1), R3' is a C8 straight-chain alkyl group, and n is 2; the alkyl diol has a structure as shown in formula (2), R2 is a n-decyl group; the acyl chloride has a structure as shown in formula (3), R1 is a methyl group; the dicarboxy azobenzene has a structure as shown in formula (4); , ; The prepared azobenzene acrylate monomer has the structure shown below: , Wherein, R1 is methyl, R2 is n-decyl, R3' is C8 straight chain alkyl, and n is 2.

[0063] Example 1 The acrylate copolymer of Example 1 is obtained by copolymerizing an azobenzene acrylate monomer, an acrylate soft monomer, an acrylate hard monomer, a hydroxy acrylate monomer, and a carboxyl acrylate monomer; wherein the azobenzene acrylate monomer is the azobenzene acrylate monomer obtained in Preparation Example 1; the acrylate soft monomer is selected from isooctyl acrylate and n-butyl acrylate, the acrylate hard monomer is selected from methyl methacrylate, the hydroxy acrylate monomer is selected from hydroxyethyl acrylate, and the carboxyl acrylate monomer is selected from acrylic acid; Relative to 100 parts by weight of the acrylic ester soft monomer, the content of methyl methacrylate is 20 parts by weight, the content of azobenzene acrylate monomer is 25 parts by weight, the content of acrylic acid is 8 parts by weight, and the content of hydroxyethyl acrylate is 10 parts by weight; wherein the acrylic ester soft monomer includes 80 parts by weight of isooctyl acrylate and 20 parts by weight of n-butyl acrylate.

[0064] Preparation of acrylic acid ester copolymer: weigh the monomers of the above components in proportion, add 1 part by weight of initiator azobisisobutyronitrile and 430 parts by weight of ethyl acetate, and heat and stir at 60° C. under nitrogen protection to carry out polymerization reaction for 8 hours; After characterization, the acrylic ester copolymer includes the following structure: , R1 is methyl, R2 is C 10 R3 is a straight-chain alkyl group, R6 is a perfluoroalkyl group, and n is 2; the glass transition temperature of the acrylic ester copolymer is -38°C.

[0065] Preparation of pressure-sensitive adhesive tape: The prepared acrylate copolymer, tackifying resin rosin resin, curing agent diphenylmethane diisocyanate (MDI-50), and fourth organic solvent ethyl acetate are mixed to obtain a rubber compound, wherein the solid content of the rubber compound is 30wt%, and the viscosity at 25°C is 2500cP; the rubber compound is coated on a PET substrate with a thickness of 50μm, and cured at 65°C for 2h, and the cured rubber layer is compounded with a release paper, wherein the release paper is yellow silicon paper; wherein, relative to 100 parts by weight of the acrylate copolymer, the content of the curing agent is 0.5 parts by weight, the tackifying resin is 30 parts by weight, and the fourth organic solvent is 70 parts by weight.

[0066] Example 2 The acrylate copolymer of Example 2 is obtained by copolymerizing an azobenzene acrylate monomer, an acrylate soft monomer, an acrylate hard monomer, a hydroxy acrylate monomer, and a carboxyl acrylate monomer; wherein the azobenzene acrylate monomer is the azobenzene acrylate monomer obtained in Preparation Example 1; the acrylate soft monomer is selected from isooctyl acrylate and n-butyl acrylate, the acrylate hard monomer is selected from methyl methacrylate, the hydroxy acrylate monomer is selected from hydroxyethyl acrylate, and the carboxyl acrylate monomer is selected from acrylic acid; Relative to 100 parts by weight of acrylic acid ester soft monomer, the content of methyl methacrylate is 30 parts by weight, the content of azobenzene acrylate monomer is 15 parts by weight, the content of acrylic acid is 8 parts by weight, and the content of hydroxyethyl acrylate is 10 parts by weight; wherein the acrylic acid ester soft monomer includes 80 parts by weight of isooctyl acrylate and 20 parts by weight of n-butyl acrylate.

[0067] Preparation of acrylic copolymer: Weigh the monomers of the above components in proportion, add 1 part by weight of initiator benzoyl peroxide and 310 parts by weight of ethyl acetate, and heat and stir at 70°C for polymerization under nitrogen protection for 7 hours. The glass transition temperature of the acrylic copolymer is -32°C.

[0068] Preparation of pressure-sensitive adhesive tape: The prepared acrylate copolymer, tackifying resin rosin resin, curing agent diphenylmethane diisocyanate (MDI-50), and fourth organic solvent ethyl acetate are mixed to obtain a rubber compound, wherein the solid content of the rubber compound is 35wt%, and the viscosity at 25°C is 3200cP; the rubber compound is coated on a PET substrate with a thickness of 55μm, and cured at 65°C for 2h, and the cured rubber layer is compounded with a release paper, and the release paper is yellow silicon paper; wherein, relative to 100 parts by weight of the acrylate copolymer, the content of the curing agent is 0.5 parts by weight, the tackifying resin is 30 parts by weight, and the fourth organic solvent is 60 parts by weight.

[0069] Example 3 The acrylic acid ester copolymer of this embodiment 3 is obtained by copolymerizing an azobenzene acrylic acid ester monomer, an acrylic acid ester soft monomer, an acrylic acid ester hard monomer, a hydroxy acrylic acid ester monomer, and a carboxyl acrylic acid ester monomer; wherein the azobenzene acrylic acid ester monomer is the azobenzene acrylic acid ester monomer obtained in Preparation Example 1; the acrylic acid ester soft monomer is selected from isooctyl acrylate and n-butyl acrylate, the acrylic acid ester hard monomer is selected from methyl methacrylate, the hydroxy acrylic acid ester monomer is selected from hydroxyethyl acrylate, and the carboxyl acrylic acid ester monomer is selected from acrylic acid; Relative to 100 parts by weight of the acrylic ester soft monomer, the content of methyl methacrylate is 30 parts by weight, the content of azobenzene acrylate monomer is 25 parts by weight, the content of acrylic acid is 5 parts by weight, and the content of hydroxyethyl acrylate is 10 parts by weight; wherein the acrylic ester soft monomer includes 75 parts by weight of isooctyl acrylate and 25 parts by weight of n-butyl acrylate.

[0070] Preparation of acrylic ester copolymer: weigh the monomers of the above components in proportion, add 0.5 parts by weight of initiator azobisisobutyronitrile and 380 parts by weight of ethyl acetate, and heat and stir at 55°C under nitrogen protection to carry out polymerization reaction for 10 hours. The glass transition temperature of the acrylic ester copolymer is -27°C.

[0071] Preparation of pressure-sensitive adhesive tape: The prepared acrylate copolymer, tackifying resin rosin resin, curing agent diphenylmethane diisocyanate (MDI-50), and fourth organic solvent ethyl acetate are mixed to obtain a rubber compound, wherein the solid content of the rubber compound is 31wt%, and the viscosity at 25°C is 2700cP; the rubber compound is coated on a PET substrate with a thickness of 50μm, and cured at 65°C for 2.5h, and the cured rubber layer is compounded with a release paper, and the release paper is yellow silicon paper; wherein, relative to 100 parts by weight of the acrylate copolymer, the content of the curing agent is 1 part by weight, the tackifying resin is 20 parts by weight, and the fourth organic solvent is 45 parts by weight.

[0072] Example 4 The acrylic acid ester copolymer of this embodiment 4 is obtained by copolymerizing an azobenzene acrylic acid ester monomer, an acrylic acid ester soft monomer, an acrylic acid ester hard monomer, a hydroxy acrylic acid ester monomer, and a carboxyl acrylic acid ester monomer; wherein the azobenzene acrylic acid ester monomer is the azobenzene acrylic acid ester monomer obtained in Preparation Example 1; the acrylic acid ester soft monomer includes isooctyl acrylate, lauryl methacrylate, and n-butyl acrylate; the acrylic acid ester hard monomer includes isobornyl acrylate; the carboxyl acrylic acid ester monomer is selected from acrylic acid; and the hydroxy acrylic acid ester monomer is selected from hydroxyethyl acrylate; Relative to 100 parts by weight of the acrylic acid ester soft monomer, the content of isobornyl methacrylate is 30 parts by weight, the content of azobenzene acrylate monomer is 20 parts by weight, the content of acrylic acid is 5 parts by weight, and the content of hydroxyethyl acrylate is 8 parts by weight; wherein the acrylic acid ester soft monomer includes 50 parts by weight of isooctyl acrylate, 30 parts by weight of lauryl methacrylate, and 20 parts by weight of n-butyl acrylate.

[0073] Preparation of acrylic copolymer: Weigh the monomers of the above components in proportion, add 1 part by weight of initiator azobisisobutyronitrile and 490 parts by weight of ethyl acetate, and heat and stir at 60°C for polymerization under nitrogen protection for 10 hours. The glass transition temperature of the acrylic copolymer is -25°C.

[0074] Preparation of pressure-sensitive adhesive tape: The prepared acrylate copolymer, tackifying resin rosin resin, curing agent diphenylmethane diisocyanate (MDI-50), and fourth organic solvent ethyl acetate are mixed to obtain a rubber compound, wherein the solid content of the rubber compound is 25wt%, and the viscosity at 25°C is 1500cP; the rubber compound is coated on a PET substrate with a thickness of 55μm, and cured at 65°C for 2.5h, and the cured rubber layer is compounded with a release paper, and the release paper is yellow silicon paper; wherein, relative to 100 parts by weight of the acrylate copolymer, the content of the curing agent is 0.7 parts by weight, the tackifying resin is 10 parts by weight, and the fourth organic solvent is 30 parts by weight.

[0075] Example 5 This embodiment 5 is the same as embodiment 1, except that the content of the azobenzene acrylate monomer is 10 parts by weight. The glass transition temperature of the acrylate copolymer is -40°C.

[0076] Example 6 This Example 6 is the same as Example 1, except that the content of acrylic acid is 12 parts by weight and the content of hydroxyethyl acrylate is 16 parts by weight. The glass transition temperature of the acrylic ester copolymer is -30°C.

[0077] Example 7 This embodiment 7 is the same as embodiment 1, except that the content of the azobenzene acrylate monomer is 35 parts by weight. The glass transition temperature of the acrylate copolymer is -28°C.

[0078] Comparative Example 1 The acrylic acid ester copolymer of this comparative example 1 is obtained by copolymerizing an acrylic acid ester soft monomer, an acrylic acid ester hard monomer, a hydroxy acrylic acid ester monomer, and a carboxyl acrylic acid ester monomer; wherein the acrylic acid ester soft monomer is selected from isooctyl acrylate and n-butyl acrylate, the acrylic acid ester hard monomer is selected from methyl methacrylate, the hydroxy acrylic acid ester monomer is selected from hydroxyethyl acrylate, and the carboxyl acrylic acid ester monomer is selected from acrylic acid; With respect to 100 parts by weight of the acrylic acid ester soft monomer, methyl methacrylate is 35 parts by weight, acrylic acid is 8 parts by weight, and hydroxyethyl acrylate is 10 parts by weight; the acrylic acid ester soft monomer includes 80 parts by weight of isooctyl acrylate and 20 parts by weight of n-butyl acrylate.

[0079] Preparation of acrylic acid ester copolymer: weigh the monomers of the above components in proportion, add 1 part by weight of initiator azobisisobutyronitrile and 460 parts by weight of ethyl acetate, and heat and stir at 60° C. under nitrogen protection to carry out polymerization reaction for 8 hours.

[0080] Preparation of pressure-sensitive adhesive tape: The prepared acrylate copolymer, tackifying resin rosin resin, curing agent diphenylmethane diisocyanate (MDI-50), and fourth organic solvent ethyl acetate are mixed to obtain a rubber compound, wherein the solid content of the rubber compound is 25wt%, and the viscosity at 25°C is 2500cP; the rubber compound is coated on a PET substrate with a thickness of 50μm, and cured at 65°C for 2h, and the cured rubber layer is compounded with a release paper, and the release paper is yellow silicon paper; wherein, relative to 100 parts by weight of the acrylate copolymer, the content of the curing agent is 0.5 parts by weight, the tackifying resin is 30 parts by weight, and the fourth organic solvent is 90 parts by weight.

[0081] Comparative Example 2 This comparative example 2 is the same as the example 1, except that the azobenzene acrylate monomer is the monomer prepared in the comparative preparation example 1.

[0082] Test Case The peel strength, shear strength, water contact angle, chemical resistance, polishing life and failure mode analysis of the pressure-sensitive adhesive tapes prepared in Examples 1-7 and Comparative Examples 1-2 were performed, and the results are shown in Tables 1-2.

[0083] The test method is as follows: Peel strength test: GB / T 2792-2014 was used to test the peel strength before and after UV irradiation.

[0084] Tensile shear strength test: GB / T 7124-2008 was used to test the tensile shear strength before and after UV irradiation.

[0085] Contact angle test: ASTM D7334-08 was used to test the contact angle of the pressure-sensitive adhesive layer.

[0086] Test of chemical resistance strength change rate: Pour the polishing liquid into a glass container and put the sample to be tested in it. Make sure that the polishing liquid can completely immerse the sample. Close the container cover until it is completely sealed. Soak for 40 hours. Wash the polishing liquid remaining on the surface of the sample with water and wipe it dry. Use the above method to test the peel strength and tensile shear strength of the sample, and use the formula shown below to calculate the change rate of chemical resistance strength: Δδ = (δ0-δ) / δ0×100%, Where: Δδ—Change rate of chemical resistance of pressure-sensitive adhesive (%), δ0—is the average value of initial peel strength or tensile shear strength, δ—is the average value of peel strength or tensile shear strength after immersion in polishing liquid.

[0087] Polishing life and failure analysis: The polishing pad and polishing table are bonded with pressure-sensitive tape for on-machine verification, and the service life and failure mode of the polishing pad are tested.

[0088] Ultraviolet light experiment: 365nm ultraviolet light was used for irradiation, and the light intensity was 200mW / cm 2 , the illumination time is 5min.

[0089] Table 1

[0090] Table 2

[0091] According to the data in Table 1 and Table 2, the easy peeling and hydrophobic properties of the pressure-sensitive tape of the present invention after light exposure can be explained by the fact that the prepared acrylate copolymer contains azobenzene acrylate monomer repeating units, and the monomer repeating units contain azobenzene groups and fluorine-containing tail groups. The azobenzene acrylate monomer provided by the present invention has a specific structure and is used to prepare a pressure-sensitive tape, which can make the pressure-sensitive tape have strong shear resistance, easy peeling after light exposure, high chemical corrosion resistance, and the pressure-sensitive tape has hydrophobic properties, which improves the service life of the pressure-sensitive tape. The adhesive layer of the pressure-sensitive tape of the present application has better chemical resistance and will fail only after the polishing layer fails, while the adhesive layer of the comparative pressure-sensitive tape has poor chemical resistance and fails due to debonding before the polishing layer fails.

[0092] Compared with Example 5 and Example 7, the content of the repeating unit of the azobenzene acrylate monomer in Example 1 is within the preferred range of the present disclosure, and the prepared pressure-sensitive tape has better shear resistance, easy peeling and chemical corrosion resistance, and the pressure-sensitive tape has hydrophobic properties, and the service life of the pressure-sensitive tape is longer.

[0093] Compared with Example 6, the contents of the repeating units of the carboxyl acrylic acid monomer and the repeating units of the hydroxyl acrylic acid monomer in Example 1 are within the preferred content range of the present disclosure, and the prepared pressure-sensitive tape has better shear resistance, easy peeling and chemical corrosion resistance, and the pressure-sensitive tape has hydrophobic properties, and the service life of the pressure-sensitive tape is longer.

[0094] The preferred embodiments of the present disclosure are described in detail above; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0095] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0096] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. An acrylic acid ester copolymer, characterized in that: The acrylate copolymer comprises azobenzene acrylate monomer repeating units, and the azobenzene acrylate monomer repeating units have the structure shown below, ， Wherein, R1 is H or methyl, R2 is C 2~12 Alkyl, R3 is C 2~16 A fluorinated alkyl group, wherein n is any integer from 1 to 3.

2. The acrylate copolymer according to claim 1, wherein R2 is C 2~10 The straight-chain alkyl group is preferably one or more of n-propyl, n-butyl, n-pentyl, n-hexyl, n-octyl, n-heptyl and n-decyl; and / or, R3 is C 2~12 Preferably, R3 is C2, C4, C6, C8, C 10 or C 12 of perfluoroalkyl.

3. The acrylate copolymer according to claim 1, wherein The acrylate copolymer further comprises acrylate soft monomer repeating units, acrylate hard monomer repeating units, carboxyl acrylic acid monomer repeating units and hydroxyl acrylic acid monomer repeating units; Relative to 100 parts by weight of the acrylate soft monomer repeating unit, the content of the acrylate hard monomer repeating unit is 5 to 60 parts by weight, the content of the carboxyl acrylic acid monomer repeating unit is 1 to 20 parts by weight, the content of the hydroxyl acrylate monomer repeating unit is 1 to 30 parts by weight, and the content of the azobenzene acrylate monomer repeating unit is 5 to 50 parts by weight.

4. The acrylate copolymer according to claim 3, wherein Relative to 100 parts by weight of the acrylate soft monomer repeating unit, the content of the acrylate hard monomer repeating unit is 10 to 40 parts by weight, the content of the carboxyl acrylic acid monomer repeating unit is 1 to 10 parts by weight, the content of the hydroxyl acrylate monomer repeating unit is 3 to 15 parts by weight, and the content of the azobenzene acrylate monomer repeating unit is 15 to 30 parts by weight.

5. The acrylate copolymer according to claim 3, wherein The acrylate soft monomer repeating unit is derived from an acrylate soft monomer, and the acrylate soft monomer is selected from one or more of ethyl acrylate, n-propyl acrylate, n-butyl acrylate, n-hexyl acrylate, isooctyl acrylate and lauryl methacrylate; The acrylate hard monomer repeating unit is derived from an acrylate hard monomer, and the acrylate hard monomer is selected from one or more of methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, isobutyl methacrylate, cyclohexyl methacrylate, and isobornyl methacrylate; The hydroxy acrylate monomer repeating unit is derived from a hydroxy acrylate monomer, and the hydroxy acrylate monomer is a hydroxyl-containing acrylate monomer having a hydroxyl functionality of 1. Preferably, the hydroxy acrylate monomer is selected from one or more of hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate and hydroxypropyl methacrylate; The carboxylic acrylate monomer repeating unit is derived from a carboxylic acrylate monomer, and the carboxylic acrylate monomer is a carboxyl-containing acrylate monomer having a carboxyl functionality of 1. Preferably, the carboxylic acrylate monomer is selected from acrylic acid and / or methacrylic acid.

6. The acrylate copolymer according to claim 1, wherein The glass transition temperature of the acrylic ester copolymer is -45 to -20°C.

7. A method for preparing a pressure-sensitive adhesive tape, characterized in that: The method comprises: The acrylate copolymer according to any one of claims 1 to 6, a tackifying resin, a curing agent and a fourth organic solvent are mixed to obtain a sizing material; the sizing material is coated on a substrate and then cured.

8. The method according to claim 7, wherein: The method further comprises compounding the cured adhesive layer with the release paper; Optionally, the release paper has a thickness of 0.10-0.18 mm; The curing conditions include: a curing temperature of 50-100°C and a curing time of 1-5h.

9. The method according to claim 7, wherein: Relative to 100 parts by weight of the acrylate copolymer, the content of the tackifying resin is 5 to 30 parts by weight, the content of the curing agent is 0.5 to 3 parts by weight, and the content of the fourth organic solvent is 20 to 100 parts by weight; wherein the method satisfies one of the following conditions: (a) the fourth organic solvent is selected from ethyl acetate and / or toluene; (b) the tackifying resin is selected from one or more of rosin resin, rosin resin derivatives, terpene resin, terpene phenolic resin, styrene terpene resin, C5 petroleum resin and C9 petroleum resin; (c) the curing agent is an isocyanate curing agent having an isocyanate functionality of 2 or more, selected from one or more of hexylene diisocyanate, diphenylmethane diisocyanate, xylylene diisocyanate, toluene diisocyanate, and isophorone diisocyanate; (d) the solid content of the rubber compound is 20-50 wt %, and the viscosity of the rubber compound at 25° C. is 500-4000 cP; (e) The substrate comprises polyethylene terephthalate and / or polypropylene, preferably polyethylene terephthalate; the thickness of the substrate is 0.01-0.1 mm.

10. A pressure-sensitive adhesive tape prepared by the method according to any one of claims 7 to 9.

11. Use of the pressure-sensitive adhesive tape according to claim 10 in chemical mechanical polishing.

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