Non-contact rotary metal spraying instrument

Abstract

The invention discloses a non-contact rotary type metal spraying instrument, and relates to the technical field of metal spraying instruments, the non-contact rotary type metal spraying instrument comprises outer ring magnetic attraction movement devices, a metal spraying device and a control console, the metal spraying device is installed above the control console, and the outer ring magnetic attraction movement devices are distributed on the outer side of the metal spraying device in the circumferential direction; the outer ring magnetic attraction movement device is installed in the center of the control table through a supporting column, and the control table is used for controlling the outer ring magnetic attraction movement device and the metal spraying device. The device is simple in structure and convenient to use, drives the turntable to rotate through magnetic adsorption, so that a metal spraying electrode can spray metal on a sample more comprehensively and efficiently, the position of the metal spraying electrode on a displacement platform can be freely adjusted, the metal spraying operation area is increased, the power of a vacuum pump can be adjusted in real time, and the working efficiency is improved. Therefore, the sealing performance of the base and the glass cover is further ensured.

Description

Technical Field

[0001] The invention relates to the technical field of metal spraying apparatus, in particular to a non-contact rotary metal spraying apparatus. Background Art

[0002] Gold sputtering instrument, also known as ion sputtering instrument, is an instrument that uses ion sputtering to perform film coating. The basic structure of ion sputtering instrument includes ion source, accelerator, target material, substrate and vacuum system. Ion source is a device that generates ion beam, accelerator is a device that accelerates ion beam to high energy, target material is the material to be bombarded, substrate is the material to deposit thin film, and vacuum system is a device to ensure the transmission of ion beam in vacuum environment. Its working principle is as follows: bombarding the solid surface with particles or particle beams with kinetic energy of more than several hundred electron volts, so that the atoms close to the solid surface obtain part of the energy carried by the incident particles and leave the solid and enter the vacuum. This phenomenon is called sputtering. In a closed chamber, an anode target (usually a gold target) is placed, filled with gas and maintained at a certain vacuum degree. High voltage is applied between the anode and the cathode, and glow discharge occurs. Ionized gas ions will bombard and erode the anode target, and the target atoms will diffuse around and deposit on the sample, eventually forming a uniform coating on the sample surface.

[0003] When the existing gold spraying instrument sprays gold on the sample, since the sample is directly placed in the gold spraying instrument, the sample cannot be rotated evenly, nor can the sample be sprayed with gold comprehensively, which will also reduce the efficiency of sample gold spraying and make it inconvenient for the staff to use. Moreover, the existing gold spraying chamber has poor sealing performance, and the staff needs to press the sealing cover above the gold spraying chamber to ensure the sealing performance of the gold spraying chamber when in use, which will inevitably increase the workload of the staff. It is also possible that due to the negligence of the staff, the gold spraying chamber is not completely sealed, thereby reducing the quality of the gold spraying instrument on the sample, causing certain defects in the subsequent scanning of the sample. Therefore, a non-contact rotary gold spraying instrument is needed to solve the above technical problems. Summary of the invention

[0004] In view of this, the present invention provides a non-contact rotary gold spraying instrument. Compared with the traditional gold spraying instrument, the present invention drives the turntable to rotate through magnetic adsorption, so that the gold spraying electrode can spray gold on the sample more comprehensively and efficiently, and the position of the gold spraying electrode on the displacement platform can be freely adjusted, thereby increasing the gold spraying operation area, and the power of the vacuum pump can be adjusted in real time, thereby further ensuring the sealing of the base and the glass cover.

[0005] In order to achieve the above object, the present invention adopts the following technical solution:

[0006] A non-contact rotary gold spraying instrument comprises an outer ring magnetic motion device, a gold spraying device and a control console, wherein the gold spraying device is installed above the control console, and the outer ring magnetic motion device is circumferentially distributed outside the gold spraying device, and the outer ring magnetic motion device 2 is installed at the center of the control console 1 through a support column, and the control console is used to control the outer ring magnetic motion device and the gold spraying device, and a base is fixedly installed on the top of the control console, and an air extraction hole is arranged on the base, and the base is rotatably connected with a turntable through a bearing, and a permanent magnet is arranged at the bottom of the turntable, and a transparent glass cover is arranged at the edge of the base, and a sealing cover is arranged on the top of the transparent glass cover, and a displacement platform is arranged at the bottom of the sealing cover, and a gold spraying electrode is arranged on the displacement platform, and the gold spraying electrode is electrically connected to the control console.

[0007] Furthermore, the outer ring magnetic attraction motion device includes an annular rack guide and a magnetic attraction device, the magnetic attraction device includes a gear, a motor and a permanent magnet 2, the gear and the annular rack guide are meshed with each other, the input end of the motor is communicatively connected to the console, the output end of the motor is connected to the gear, and the permanent magnet 2 is magnetically attracted to the permanent magnet 1 in the gold spraying device.

[0008] Furthermore, the annular rack guide rail is arranged outside the transparent glass cover and is arranged on the same horizontal plane as the turntable in the gold spraying device.

[0009] Furthermore, a vacuum pump is provided outside the console, and the vacuum pump is connected to the air extraction hole through an air extraction pipe.

[0010] Furthermore, sealing strips are fixedly installed on the inner sides of the base and the sealing cover for matching with the transparent glass cover.

[0011] Furthermore, a pressure sensor is also provided in the gold spraying device, and the pressure sensor is communicatively connected with the console and is used to detect the pressure in the glass cover.

[0012] The beneficial effects of the present invention are:

[0013] 1. The present invention starts the outer ring magnetic attraction motion device, drives the turntable in the vacuum environment to rotate through the magnetic adsorption of the magnetic attraction device, and then drives the sample to rotate through the rotation of the turntable, so that the gold-sprayed electrode can spray gold on the sample more comprehensively and efficiently.

[0014] 2. The present invention controls the linear motion of the gold-spraying electrode through a displacement platform, thereby adjusting the gold-spraying position and increasing the gold-spraying operation area.

[0015] 3. The present invention can adjust the power of the vacuum pump in real time by setting a pressure sensor, so that the environmental pressure can be stably controlled during gold spraying, thereby further ensuring the sealing of the base and the glass cover, thereby avoiding leakage inside the transparent glass cover when the gold spraying electrode is spraying gold on the sample, thereby reducing the quality of the sample spraying. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 It is a cross-sectional view of the overall structure of the present invention;

[0019] Figure 3 It is a schematic diagram of the structure of the outer ring magnetic attraction motion device of the present invention;

[0020] Figure 4 The structural diagram of the magnetic attraction device of the present invention is

[0021] Among them, in the figure:

[0022] 1- control console; 2- outer ring magnetic attraction motion device; 3- gold-spraying device; 4- base; 5- turntable; 6- permanent magnet 1; 7- transparent glass cover; 8- sealing cover; 9- displacement platform; 10- gold-spraying electrode; 11- annular rack guide; 12- magnetic attraction device; 13- pressure sensor; 14- vacuum pump; 15- gear; 16- motor; 17- permanent magnet 2. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] Please refer to the attached Figure 1-4The present invention provides a non-contact rotary gold spraying instrument, comprising an outer ring magnetic attraction motion device 2, a gold spraying device 3 and a control console 1, wherein the gold spraying device 3 is installed above the control console 1, and the outer ring magnetic attraction motion device 2 is distributed circumferentially outside the gold spraying device 3, and the control console 1 is used to control the outer ring magnetic attraction motion device 2 and the gold spraying device 3, and a base 4 is fixedly installed on the top of the control console 1, and an air extraction hole is arranged on the base 4, and a turntable 5 is rotatably connected to the base 4 through a bearing, and a permanent magnet 6 is arranged at the bottom of the turntable 5, and a transparent glass cover 7 is arranged at the edge of the base 4, and a sealing cover 8 is arranged on the top of the transparent glass cover 7, and a locking device can be installed on the sealing cover 8 to further ensure the sealing of the device, and a displacement platform 9 is arranged at the bottom of the sealing cover 8, and a gold spraying electrode 10 is arranged on the displacement platform 9, and the gold spraying electrode 10 is electrically connected to the control console 1, and the displacement platform 9 adopts a linear XY two-dimensional motion platform, and the displacement platform 9 can realize the linear motion of the gold spraying electrode 10, thereby increasing the position of the gold spraying and the gold spraying operation area.

[0025] Preferably, the outer ring magnetic attraction motion device 2 includes an annular rack guide 11 and a magnetic attraction device 12, the magnetic attraction device 12 includes a gear 15, a motor 16 and a permanent magnet 2 17, the gear 15 is meshed with the annular rack guide 11, the input end of the motor 16 is communicatively connected to the console 1, the output end of the motor 16 is connected to the gear 15, the permanent magnet 2 17 is magnetically attracted to the permanent magnet 1 6 in the gold spraying device 3, and the magnetic attraction of the magnetic attraction device 12 drives the turntable 5 in the vacuum environment to rotate, and then the rotation of the turntable 5 drives the sample to rotate, so that the gold spraying electrode 10 can spray gold on the sample more comprehensively and efficiently.

[0026] Preferably, the annular rack guide rail 11 is arranged outside the transparent glass cover 7 and is arranged on the same horizontal plane as the turntable 5 in the gold spraying device 3 .

[0027] Preferably, a vacuum pump 14 is provided outside the console 1, and the vacuum pump 14 is connected to the exhaust hole through an exhaust pipe. The vacuum pump 14 can evacuate the transparent glass cover 7 to a vacuum, and a valve is also installed on the exhaust pipe to prevent air leakage during gold spraying.

[0028] Preferably, sealing strips are fixedly installed on the inner sides of the base 4 and the sealing cover 8 to match the transparent glass cover 7. The sealing strips can ensure the vacuum environment inside the transparent glass cover 7 and increase the sealing performance.

[0029] Preferably, a pressure sensor 13 is also provided in the gold spraying device 3. The pressure sensor 13 is communicatively connected with the console 1 and is used to detect the pressure in the glass cover so that the ambient pressure is stably controlled during gold spraying, thereby further ensuring the sealing between the base 4 and the glass cover, thereby avoiding air leakage inside the transparent glass cover 7 when the gold spraying electrode 10 sprays gold on the sample, thereby reducing the quality of the sample gold spraying.

[0030] The specific method of use of the present invention is:

[0031] Put the sample on the turntable 5 of the gold spraying device 3, cover the sealing cover 8, completely lock the transparent glass cover 7 with the base 4 and the sealing cover 8, start the vacuum pump 14 to evacuate the inside of the transparent glass cover 7, and adjust the power of the vacuum pump 14 in real time by setting the pressure sensor 13, so that the environmental pressure can be stably controlled during gold spraying, start the gold spraying electrode 10 to start gold spraying on the sample, according to the demand of gold spraying, control the linear motion of the gold spraying electrode 10 through the displacement platform 9, and start the outer ring magnetic attraction motion device 2, and drive the turntable 5 in the vacuum environment to rotate through the magnetic attraction of the magnetic attraction device 12, and then drive the sample to rotate through the rotation of the turntable 5, so that the sample can be sprayed with gold more comprehensively and efficiently, and finally close the outer ring magnetic attraction motion device 2 and the gold spraying electrode 10 through the control console 1, open the sealing cover 8, take out the sample, and complete the gold spraying operation.

[0032] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the scope of protection of the invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on these embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in this field can still combine, add, delete or make other adjustments to the features in the various embodiments of the present invention according to the circumstances without conflict, without making creative work, so as to obtain different other technical solutions that do not deviate from the concept of the present invention in essence, and these technical solutions also belong to the scope of protection of the present invention.

Claims

1. A non-contact rotary gold spraying instrument, characterized in that: The invention comprises an outer ring magnetic attraction motion device (2), a gold spraying device (3) and a control console (1). The gold spraying device (3) is installed above the control console (1). The outer ring magnetic attraction motion device (2) is circumferentially distributed outside the gold spraying device (3). The outer ring magnetic attraction motion device (2) is installed at the center of the control console (1) through a support column. The control console (1) is used to control the outer ring magnetic attraction motion device (2) and the gold spraying device (3). A base (4) is fixedly installed on the top of the control console (1). The base (4) is provided with an air extraction hole. The base (4) is rotatably connected to a turntable (5) through a bearing. A permanent magnet (6) is provided at the bottom of the turntable (5). A transparent glass cover (7) is provided at the edge of the base (4). A sealing cover (8) is provided at the top of the transparent glass cover (7). A displacement platform (9) is provided at the bottom of the sealing cover (8). A gold spraying electrode (10) is provided on the displacement platform (9). The gold spraying electrode (10) is electrically connected to the control console (1).

2. A non-contact rotary spraying instrument according to claim 1, characterized in that: The outer ring magnetic attraction motion device (2) comprises an annular rack guide rail (11) and a magnetic attraction device (12); the magnetic attraction device (12) comprises a gear (15), a motor (16) and a second permanent magnet (17); the gear (15) and the annular rack guide rail (11) are meshed with each other; the input end of the motor (16) is communicatively connected to the control console (1); the output end of the motor (16) is connected to the gear (15); and the second permanent magnet (17) is magnetically attracted to a first permanent magnet (6) in the gold-spraying device (3).

3. A non-contact rotary spraying instrument according to claim 2, characterized in that: The annular rack guide rail (11) is arranged outside the transparent glass cover (7) and is arranged on the same horizontal plane as the rotating disk (5) in the gold spraying device (3).

4. A non-contact rotary spray metallization apparatus according to claim 1, characterized in that: A vacuum pump (14) is provided outside the console (1), and the vacuum pump (14) is connected to the air extraction hole via an air extraction pipe.

5. The non-contact rotary spray metallization apparatus according to claim 1, characterized in that: Sealing strips are fixedly mounted on the inner sides of the base (4) and the sealing cover (8) for matching with the transparent glass cover (7).

6. The non-contact rotary spray metallization apparatus according to claim 4, characterized in that: A pressure sensor (13) is also provided in the gold spraying device (3). The pressure sensor (13) is communicatively connected with the control console (1) and is used to detect the pressure in the glass cover.

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