Argon convection anti-suffocation device for single crystal furnace

Abstract

The invention belongs to the technical field of single crystal furnaces, and particularly relates to a single crystal furnace argon convection anti-suffocation device which comprises a rack, and a U-shaped protective cover is mounted on the outer side of the rack; a mounting plate is mounted on the upper end face of the rack, a guide seat is mounted on the edge of the upper end face of the mounting plate, an air cylinder is mounted on the side wall of the guide seat, a guide rod is mounted above the guide seat, and multiple sets of connecting pieces are arranged on the peripheral face of the guide rod. The argon residual in the single crystal furnace can flow out, the problem of suffocation hidden danger caused by argon residual and illegal operation after evacuation leakage detection is avoided, beneficial effects are brought to workers for installing thermal field assemblies, convection is formed by matching with slight opening and closing of the furnace cover, the speed of recovering normal pressure in the single crystal furnace is increased, and the production efficiency is improved. The blind plate is opened in the later period, so that oxide in the main vacuum pipeline can be in contact with air in advance for recombustion, the normal pressure recovery process and the recombustion process are carried out in parallel, and the production efficiency of the single crystal furnace is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnaces, in particular to an argon convection anti-suffocation device for a single crystal furnace. Background Art

[0002] The working principle of the single crystal furnace is to put the polysilicon raw material into the crucible, install it in the main furnace chamber, and the vacuum pump will evacuate the main furnace chamber and then continuously introduce protective gas argon. The main furnace chamber pressure is maintained at 1300Pa~2600Pa by controlling the opening of the regulating valve at the front end of the vacuum pump. After the polysilicon raw material is heated and melted, the silicon rod in the sub-chamber is extended into the chamber of the furnace through the pulling head for crystal pulling. After the crystal pulling is completed, the single crystal silicon rod usually needs to be cooled in the sub-chamber for about 6 hours before it can be taken out. After the single crystal silicon rod is taken out, the next furnace can be put into production.

[0003] During the production process of a single crystal furnace, the furnace needs to be evacuated for leak detection and shut down for cleaning. However, there are potential safety hazards in these steps. First, when evacuating for leak detection, the vacuum pipe blind plate needs to be opened. If the argon gas is not exhausted during the opening, workers will be at risk of suffocation when installing the thermal field components. Secondly, the vacuum pipe blind plate needs to be opened after the furnace is shut down and dismantled. In order to avoid the problem of re-ignition of oxides in the pipe inside the single crystal furnace after the vacuum pipe blind plate is opened, it is necessary to control the argon filling and wait slowly after opening the furnace cover, which is inefficient and time-consuming. If the dismantling work is carried out directly in order to reduce the time cost, there will be a risk of burns and scalds if the workers violate the regulations. If they wait for the oxide to re-ignite, the time cost will increase.

[0004] To this end, the present invention provides an argon convection anti-suffocation device for a single crystal furnace. Summary of the invention

[0005] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0006] The technical solution adopted by the present invention to solve its technical problem is: the argon convection anti-suffocation device of a single crystal furnace described in the present invention comprises a frame, a protective cover is installed on the outer side of the frame, and the shape of the protective cover is U-shaped; a mounting plate is installed on the upper end surface of the frame, a guide seat is installed at the edge of the upper end surface of the mounting plate, a cylinder is installed on the side wall of the guide seat, a guide rod is installed above the guide seat, and a plurality of groups of connecting plates are arranged on the outer peripheral surface of the guide rod, a roller is installed on the bottom end of the telescopic end of the cylinder, and the telescopic end of the cylinder can drive the roller to move, so that the roller contacts the blind plate of the vacuum pipe of the single crystal furnace and opens the blind plate at a certain angle; when the anti-suffocation device in the embodiment of the present invention is used, the telescopic end of the cylinder is Facing the vacuum pipe blind plate of the single crystal furnace, the telescopic end of the cylinder is then controlled to drive the roller to move to the side close to the vacuum pipe blind plate, and then the roller will contact the vacuum pipe blind plate, and then the vacuum pipe blind plate will be rotated at a certain angle toward the inside of the single crystal furnace, thereby pushing out the vacuum pipe blind plate. At this time, the residual argon gas in the single crystal furnace will flow out, avoiding the argon gas residue after vacuuming and the hidden danger of suffocation caused by illegal operation, which brings beneficial effects for workers to install thermal field components, and cooperates with the slight opening and closing of the furnace cover to form convection, which speeds up the recovery of normal pressure in the single crystal furnace. Opening the blind plate in the later stage can make the oxide in the main vacuum pipe contact with the air in advance for re-ignition, and the process of restoring normal pressure and the process of re-ignition are carried out in parallel, thereby improving the production efficiency of the single crystal furnace.

[0007] Preferably, an opening and closing sensor is installed on the side wall of the mounting plate, and the opening and closing sensor is arranged on a side close to the roller. The opening and closing sensor is used to monitor the opening and closing status of the blind plate of the vacuum pipe of the single crystal furnace. When working, the opening and closing sensor is designed to monitor in real time the opening and closing status of the vacuum blind plate itself when the roller opens the vacuum pipe blind plate, so that it is convenient for the controller to stop whether the cylinder drives the roller to stop.

[0008] Preferably, a rotating shaft is rotatably installed inside the protective cover, and two rotating shafts are provided and are symmetrically arranged relative to the cylinder. A plurality of groups of fan blades are fixedly installed at the end edges of the rotating shaft, and a linkage unit is provided at the telescopic end of the cylinder. When the telescopic end of the cylinder moves, it can drive the rotating shaft to rotate through the linkage unit, so that the fan blades rotate to generate wind; when working, when the telescopic end of the cylinder drives the roller to move and opens and closes the vacuum pipe blind plate, the telescopic end of the cylinder will simultaneously drive the linkage unit to move, so that the linkage unit drives the rotating shaft to rotate, and the rotating shaft drives the fan blades to rotate, and the fan blades will generate a certain wind force when rotating, so that the wind blows to one side of the vacuum pipe blind plate, so that the outflowing argon gas can be blown away as soon as possible, which is convenient for subsequent staff to install the thermal field component.

[0009] Preferably, the linkage unit includes two groups of L-shaped pressing frames fixedly mounted on the outer circumference of the telescopic end of the cylinder, a ratchet plate is slidably arranged inside the protective cover, a gear ring is mounted on the outer circumference of the rotating shaft through a bracket, the gear ring and the ratchet plate are meshed and connected, an arc block 1 is mounted on the upper end surface of the ratchet plate, and an arc block 2 is mounted on the lower end surface of the cross plate of the L-shaped pressing frame. When the telescopic end of the cylinder drives the L-shaped pressing frame to move, the arc block 2 on the lower end surface of the cross plate of the L-shaped pressing frame will contact the arc block 1 and The arc block 1 is squeezed to move the ratchet plate downward; during operation, when the telescopic end of the cylinder moves, the telescopic end of the cylinder will simultaneously drive the two sets of L-shaped pressure frames to move. During the movement of the two sets of L-shaped pressure frames, the arc block 2 connected thereto will contact and squeeze the arc block 1, so that the arc block 1 drives the ratchet plate downward, and the ratchet plate drives the gear ring meshing with it to rotate, the gear ring drives the rotating shaft to rotate, and the rotating shaft drives the fan blades to rotate, so that the fan blades rotate to generate wind force to blow the argon gas away from one side of the single crystal furnace.

[0010] Preferably, the diameter of arc block 2 is larger than that of arc block 1, and the shapes of arc block 2 and arc block 1 are both semicircular arcs; during operation, such a setting can facilitate the contact between arc block 2 and arc block 1, so that arc block 1 drives the ratchet plate to move downward.

[0011] Preferably, an L-shaped circular frame is installed on the inner wall of the protective cover and on one side of the rotating shaft, the end of the rotating shaft away from the fan blades passes into the interior of the L-shaped circular frame, and a power storage unit is provided at the end of the rotating shaft and inside the L-shaped circular frame, and the power storage unit is used to drive the rotating shaft to rotate rapidly.

[0012] Preferably, the force storage unit includes a scroll torsion spring sleeved on the outer circumferential surface of the rotating shaft, a circular groove matching the rotating shaft is opened inside the L-shaped circular frame, and the scroll torsion spring is arranged inside the circular groove.

[0013] Preferably, a limiting bracket is installed inside the protective cover, and the bottom end of the ratchet plate is slidably arranged inside the limiting bracket, and a limiting groove adapted to the ratchet plate is opened inside the limiting bracket; when working, the limiting bracket and the limiting groove are provided, which can facilitate the up and down movement of the ratchet plate, thereby facilitating the ratchet plate to drive the gear ring to rotate.

[0014] Preferably, a support spring is installed on the groove wall of the limit groove, and the side of the support spring away from the limit groove is connected to the side wall of the ratchet plate; during operation, when the ratchet plate moves downward, the ratchet plate will press down the support spring; after the vacuum pipe blind plate is opened and closed once, the telescopic end of the cylinder drives the L-shaped pressure frame and the arc block 2 away from the arc block 1, and then under the action of the support spring, it will drive the ratchet plate to move up, and the ratchet plate will drive the gear ring to rotate again, so that when the gear ring is not engaged with the ratchet plate, the gear ring will drive the rotating shaft to rotate again, so that the rotating shaft blades will rotate again, thereby blowing excess argon away from the single crystal furnace and diluting the argon in the air.

[0015] Preferably, when the highest point of the second arc-shaped end of the arc-shaped block contacts the highest point of the first arc-shaped block, the vacuum pipe blind plate reaches the most suitable opening and closing state, which can facilitate the ratchet plate to move away from the gear ring.

[0016] The beneficial effects of the present invention are as follows: 1. The argon convection anti-suffocation device for a single crystal furnace described in the present invention drives the roller to move toward the side close to the vacuum pipe blind plate by controlling the telescopic end of the cylinder, and then the roller will contact the vacuum pipe blind plate, and then the vacuum pipe blind plate will be rotated at a certain angle toward the inside of the single crystal furnace, thereby pushing out the vacuum pipe blind plate. At this time, the argon gas remaining in the single crystal furnace will flow out, avoiding the argon gas residue after evacuation and leak detection and the hidden danger of suffocation caused by illegal operation, which brings beneficial effects to workers installing thermal field components, and forms convection with the slight opening and closing of the furnace cover, which speeds up the recovery of normal pressure in the single crystal furnace. Opening the blind plate at a later stage can allow the oxide in the main vacuum pipe to contact the air in advance for re-ignition, and the process of restoring normal pressure and the process of re-ignition are carried out in parallel, thereby improving the production efficiency of the single crystal furnace.

[0017] 2. The argon convection anti-suffocation device for a single crystal furnace described in the present invention, under the elastic force of the scroll torsion spring, the rotating shaft and the gear ring will rotate at a relatively fast speed, thereby accelerating the blowing away of argon, avoiding the potential suffocation problems caused by residual argon after evacuation and leak detection and illegal operations, and bringing beneficial effects to workers installing thermal field components. Moreover, during the rotation of the fan blades, part of the control will enter the single crystal furnace through the opening and closing blind plate, and form convection with the slight opening and closing of the furnace cover, which speeds up the recovery of the single crystal furnace to normal pressure. Opening the blind plate at a later stage can allow the oxide in the main vacuum pipe to contact the air in advance for re-ignition, which has high safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described below in conjunction with the accompanying drawings.

[0019] Figure 1 is a stereogram of the present invention; Figure 2 It is a schematic diagram of the structure of the cylinder part in the present invention; Figure 3It is a schematic diagram of the structure of the rotating shaft part in the present invention; Figure 4 It is a schematic diagram of the structure of the roller part in the present invention; Figure 5 It is a schematic diagram of the structure of the ratchet plate part in the present invention; Figure 6 It is a schematic diagram of the structure of the arc block 2 and the arc block 1 in the present invention; Figure 7 It is a schematic diagram of the structure after the ratchet plate moves to the bottom in the present invention; Figure 8 It is a schematic structural diagram of the ratchet plate in the initial state of the present invention; Fig. 9 It is a schematic diagram of the structure of the L-shaped circular frame part of the present invention; Fig.10 It is a schematic diagram of the structure of the scroll torsion spring part of the present invention; Fig.11 It is a schematic diagram of the structure of the limiting groove and the supporting spring part in the present invention.

[0020] In the figure: 1, frame; 101, protective cover; 2, mounting plate; 3, guide seat; 301, guide rod; 4, cylinder; 5, connecting plate; 6, roller; 7, opening and closing sensor; 8, rotating shaft; 801, fan blade; 9, L-shaped pressure frame; 10, ratchet plate; 11, gear ring; 12, arc block one; 13, arc block two; 14, L-shaped round frame; 15, scroll torsion spring; 16, round groove; 17, limit bracket; 18, limit groove; 19, support spring. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0022] like Figures 1 to 5 As shown, an argon convection anti-suffocation device for a single crystal furnace described in an embodiment of the present invention comprises a frame 1, a protective cover 101 is installed on the outer side of the frame 1, and the shape of the protective cover 101 is U-shaped; a mounting plate 2 is installed on the upper end surface of the frame 1, a guide seat 3 is installed at the edge of the upper end surface of the mounting plate 2, a cylinder 4 is installed on the side wall of the guide seat 3, a guide rod 301 is installed above the guide seat 3, and a plurality of groups of connecting plates 5 are arranged on the outer peripheral surface of the guide rod 301, a roller 6 is installed at the bottom end of the telescopic end of the cylinder 4, and the telescopic end of the cylinder 4 can drive the roller 6 to move, so that the roller 6 contacts the blind plate of the vacuum pipe of the single crystal furnace and opens the blind plate at a certain angle; During the production of single crystal furnaces and the process of evacuation and leak detection, if the argon gas is not exhausted, workers will be at risk of suffocation when installing the thermal field components later. Moreover, after the vacuum pipe blind plate is opened after the furnace is shut down, the entry of air will cause some unburned oxides to reignite. If workers operate directly, there will be a risk of burns and scalds. If they wait for the oxides to reignite, it will increase the time cost. Therefore, when the anti-suffocation device in the embodiment of the present invention is used, the telescopic end of the cylinder 4 is directed to the vacuum pipe blind plate of the single crystal furnace, and then the telescopic end of the cylinder 4 is controlled to drive the roller 6 to move toward the side close to the vacuum pipe blind plate, and then the roller 6 will contact the vacuum pipe blind plate, and then the vacuum pipe blind plate is rotated at a certain angle toward the inside of the single crystal furnace, so that the vacuum pipe blind plate is pushed out, and the argon gas remaining in the single crystal furnace will flow out at this time, avoiding the suffocation hidden danger caused by the residual argon gas and illegal operation when emptying and picking up leaks, which brings beneficial effects to the workers for the subsequent installation of the thermal field components, and the convection is formed by the slight opening and closing of the furnace cover, which speeds up the speed of restoring the normal pressure in the single crystal furnace. Opening the blind plate in the later stage can make the oxide in the main vacuum pipe contact the air in advance for re-ignition, and the process of restoring the normal pressure and the process of re-ignition are carried out in parallel, thereby improving the production efficiency of the single crystal furnace; a protective cover 101 is provided, which can protect the entire device, and a guide seat 3 and a guide rod 301 are provided, which can limit the moving direction of the cylinder 4, so as to facilitate the opening of the vacuum pipe blind plate of the single crystal furnace.

[0023] An opening and closing sensor 7 is installed on the side wall of the mounting plate 2. The opening and closing sensor 7 is arranged on a side close to the roller 6. The opening and closing sensor 7 is used to monitor the opening and closing state of the vacuum pipe blind plate of the single crystal furnace. When working, the opening and closing sensor 7 is designed to monitor the opening and closing state of the vacuum blind plate itself in real time when the roller 6 opens the vacuum pipe blind plate, so that it is convenient for the controller to stop whether the cylinder 4 drives the roller 6 to stop.

[0024] like Figures 2 to 6 As shown, a rotating shaft 8 is rotatably installed inside the protective cover 101, two rotating shafts 8 are provided, and are symmetrically arranged relative to the cylinder 4, and multiple groups of fan blades 801 are fixedly installed at the end edge of the rotating shaft 8, and a linkage unit is provided at the telescopic end of the cylinder 4. When the telescopic end of the cylinder 4 moves, the rotating shaft 8 can be driven to rotate through the linkage unit, so that the fan blades 801 rotate to generate wind; During operation, when the telescopic end of the cylinder 4 drives the roller 6 to move and opens and closes the vacuum pipe blind plate, the telescopic end of the cylinder 4 will simultaneously drive the linkage unit to move, so that the linkage unit drives the rotating shaft 8 to rotate, and the rotating shaft 8 drives the fan blades 801 to rotate. When the fan blades 801 rotate, a certain wind force will be generated, so that the wind blows to one side of the vacuum pipe blind plate, thereby blowing away the outflowing argon gas as soon as possible, making it convenient for subsequent staff to install the thermal field components.

[0025] like Figures 2 to 8 As shown, the linkage unit includes two groups of L-shaped pressing frames 9 fixedly mounted on the outer peripheral surface of the telescopic end of the cylinder 4, a ratchet plate 10 is slidably arranged inside the protective cover 101, a gear ring 11 is mounted on the outer peripheral surface of the rotating shaft 8 through a bracket, the gear ring 11 and the ratchet plate 10 are meshed and connected, an arc block 12 is mounted on the upper end surface of the ratchet plate 10, and an arc block 2 13 is mounted on the lower end surface of the horizontal plate of the L-shaped pressing frame 9. When the telescopic end of the cylinder 4 drives the L-shaped pressing frame 9 to move, the arc block 2 13 on the lower end surface of the horizontal plate of the L-shaped pressing frame 9 will contact the arc block 12 and squeeze the arc block 12 to make the ratchet plate 10 move downward; During operation, when the telescopic end of the cylinder 4 moves, the telescopic end of the cylinder 4 will simultaneously drive the two groups of L-shaped pressing frames 9 to move. During the movement of the two groups of L-shaped pressing frames 9, the arc block 2 13 connected thereto will contact and squeeze the arc block 12, so that the arc block 12 drives the ratchet plate 10 to move downward, and the ratchet plate 10 drives the gear ring 11 meshing with it to rotate, and the gear ring 11 drives the rotating shaft 8 to rotate, and the rotating shaft 8 drives the fan blade 801 to rotate, so that the fan blade 801 rotates to generate wind force, and the argon gas is blown away from one side of the single crystal furnace. At the same time, a small amount of air can be blown into the single crystal furnace, which speeds up the speed of restoring the normal pressure in the single crystal furnace. Opening the blind plate at a later stage can allow the oxide in the main vacuum pipeline to contact the air in advance for re-ignition. It should be noted that argon is a colorless, odorless inert gas with extremely inactive chemical properties and is difficult to react chemically with other substances. Therefore, when it is discharged into the atmosphere, argon will not produce harmful substances and will not cause direct pollution or damage to the environment.

[0026] The diameter of the arc block 2 13 is greater than that of the arc block 1 12, and the shapes of the arc block 2 13 and the arc block 1 12 are both semicircular arcs; during operation, such a setting can facilitate the contact between the arc block 2 13 and the arc block 1 12, so that the arc block 1 12 drives the ratchet plate 10 to move downward.

[0027] like Figures 2 to 8 As shown, an L-shaped frame 14 is installed on the inner wall of the protective cover 101 and on one side of the rotating shaft 8, and the end of the rotating shaft 8 away from the fan blade 801 passes through the inside of the L-shaped frame 14, and a power storage unit is arranged at the end of the rotating shaft 8 and located inside the L-shaped frame 14, and the power storage unit is used to drive the rotating shaft 8 to rotate quickly; when working, when the ratchet plate 10 moves down and drives the gear ring 11 and the rotating shaft 8 to rotate, the rotating shaft 8 will simultaneously drive the power storage unit to store power, and when the arc block 2 13 presses the arc block 12 and causes the ratchet plate 10 to move to the attached Figure 7As shown, the ratchet teeth on the surface of the ratchet plate 10 are not meshed with the ratchet teeth on the surface of the gear ring 11, so under the reaction of the power storage unit, the rotating shaft 8 can rotate quickly, thereby rotating the fan blade 801 quickly, increasing the rotation speed of the fan blade 801, thereby increasing the wind speed and accelerating the blowing away of the argon gas; It should be noted that, in the initial state, the ratchet teeth on the surface of the ratchet plate 10 and the toothed ring 11 do not contact each other. Figure 8 shown.

[0028] like Figures 4 to 11 As shown, the power storage unit includes a scroll torsion spring 15 sleeved on the outer circumferential surface of the rotating shaft 8, and a circular groove 16 adapted to the rotating shaft 8 is opened inside the L-shaped circular frame 14, and the scroll torsion spring 15 is arranged inside the circular groove 16; when working, when the ratchet plate 10 drives the gear ring 11 to rotate, and the gear ring 11 drives the rotating shaft 8 and the fan blade 801 to rotate, the rotating shaft 8 will simultaneously drive the scroll torsion spring 15 at its end to retract, and as the arc block 2 13 squeezes the arc block 1 12, the ratchet plate 10 will gradually move away from the gear ring 11 and move to the position as shown in the attached figure. Figure 7 As shown, at this time, the ratchet teeth of the two do not mesh with each other, so the rotating shaft 8 and the scroll torsion spring 15 on its outer surface are no longer stressed. Under the elastic force of the scroll torsion spring 15, the rotating shaft 8 and the gear ring 11 will rotate at a relatively fast speed, thereby accelerating the blowing away of argon gas, avoiding the argon gas residue after evacuation and leak detection and the hidden danger of suffocation caused by illegal operation, which brings beneficial effects to workers installing thermal field components. In addition, during the rotation of the fan blade 801, part of the control will enter the single crystal furnace through the opening and closing blind plate, and form convection with the slight opening and closing of the furnace cover, which speeds up the speed of restoring normal pressure in the single crystal furnace. Opening the blind plate at a later stage can allow the oxide in the main vacuum pipeline to contact the air in advance for re-ignition, which is highly safe. It should be noted that, in the embodiment of the present invention, when the arc block 2 13 contacts the highest point of the arc block 1 12, the ratchet plate 10 reaches the maximum stroke, and the ratchet teeth on the surface of the ratchet plate 10 and the ratchet teeth on the surface of the toothed ring 11 do not contact each other, and the vacuum pipe blind plate also reaches the most suitable opening and closing state; it should also be noted that, in the embodiment of the present invention, when the initial toothed ring 11 drives the rotating shaft 8 to rotate, a small amount of air can be blown into the single crystal furnace, and subsequently, under the action of the volute spring 15, when the blowing force is enhanced, the argon can be quickly blown away. With the two complementing each other, first, when the vacuum blind plate is opened, too much air can be prevented from entering the single crystal furnace, affecting the production process of the single crystal furnace, and it can also prevent excessive air from entering and affecting the release of argon. Second, when the vacuum blind plate is closed, the argon can be quickly blown away. Compared with the existing method of only using a fan, the present invention has strong flexibility, good effect, and is easy to operate. It does not require the use of external control switches, thereby reducing the workload of the staff.

[0029] A limiting bracket 17 is installed inside the protective cover 101, and the bottom end of the ratchet plate 10 is slidably arranged inside the limiting bracket 17. A limiting groove 18 adapted to the ratchet plate 10 is opened inside the limiting bracket 17. When working, the limiting bracket 17 and the limiting groove 18 are provided to facilitate the up and down movement of the ratchet plate 10, thereby facilitating the ratchet plate 10 to drive the gear ring 11 to rotate.

[0030] like Figures 6 to 11 As shown, a support spring 19 is installed on the groove wall of the limit groove 18, and the side of the support spring 19 away from the limit groove 18 is connected to the side wall of the ratchet plate 10; during operation, when the ratchet plate 10 moves down, the ratchet plate 10 will press down the support spring 19; after the vacuum pipe blind plate is opened and closed once, the telescopic end of the cylinder 4 drives the L-shaped pressing frame 9 and the arc block 2 13 away from the arc block 1 12, and then under the action of the support spring 19, the ratchet plate 10 will be driven to move up, and the ratchet plate 10 will drive the gear ring 11 to rotate again, and then the ratchet plate 10 will move to the initial attachment Figure 8 position, so that when the gear ring 11 is not meshed with the ratchet plate 10, the gear ring 11 will drive the rotating shaft 8 to rotate again, so that the fan blades 801 of the rotating shaft 8 rotate again, thereby blowing the excess argon away from the single crystal furnace and diluting the argon in the air.

[0031] When the highest point of the arc end of the arc block 2 13 contacts the highest point of the arc block 1 12 , the vacuum pipe blind plate reaches the most suitable opening and closing state, which can facilitate the ratchet plate 10 to move away from the gear ring 11 .

[0032] During operation, when the anti-suffocation device in the embodiment of the present invention is used, the telescopic end of the cylinder 4 is directed toward the vacuum pipe blind plate of the single crystal furnace, and then the telescopic end of the cylinder 4 is controlled to drive the roller 6 to move toward the side close to the vacuum pipe blind plate, and then the roller 6 will contact the vacuum pipe blind plate, and then the vacuum pipe blind plate will be rotated at a certain angle toward the inside of the single crystal furnace, thereby pushing the vacuum pipe blind plate out, and at this time, the argon gas remaining in the single crystal furnace will flow out, avoiding the argon gas residue after evacuation and leak detection and the hidden danger of suffocation caused by illegal operation, which brings beneficial effects for workers to install the thermal field components, and forms convection with the slight opening and closing of the furnace cover, which speeds up the single crystal furnace. The speed of restoring the normal pressure inside the vacuum pipe can be increased by opening the blind plate in the later stage so that the oxide in the main vacuum pipe can contact the air in advance for re-ignition. The process of restoring the normal pressure and the process of re-ignition are carried out in parallel, thereby improving the production efficiency of the single crystal furnace. When the telescopic end of the cylinder 4 drives the roller 6 to move and opens and closes the vacuum pipe blind plate, the telescopic end of the cylinder 4 will simultaneously drive the linkage unit to move, so that the linkage unit drives the rotating shaft 8 to rotate, and the rotating shaft 8 drives the fan blade 801 to rotate. When the fan blade 801 rotates, a certain wind force will be generated, so that the wind blows to one side of the vacuum pipe blind plate, thereby blowing away the outflowing argon as soon as possible, which is convenient for subsequent staff to install the thermal field components. When the telescopic end of the cylinder 4 moves, the telescopic end of the cylinder 4 will simultaneously drive the two groups of L-shaped pressing frames 9 to move. During the movement of the two groups of L-shaped pressing frames 9, the arc block 2 13 connected thereto will contact and squeeze the arc block 1 12, so that the arc block 12 drives the ratchet plate 10 to move downward, and the ratchet plate 10 drives the gear ring 11 meshing with it to rotate, and the gear ring 11 drives the rotating shaft 8 to rotate, and the rotating shaft 8 drives the fan blade 801 to rotate, so that the fan blade 801 rotates to generate wind force to blow the argon gas away from one side of the single crystal furnace; When the ratchet plate 10 moves downward and drives the gear ring 11 and the rotating shaft 8 to rotate, the rotating shaft 8 will simultaneously drive the power storage unit to store power. When the arc block 2 13 presses the arc block 1 12 and makes the ratchet plate 10 move to the attached Figure 7 As shown, at this time, the ratchet teeth on the surface of the ratchet plate 10 are not engaged with the ratchet teeth on the surface of the toothed ring 11, so under the reaction of the power storage unit, the rotating shaft 8 can rotate rapidly, thereby rotating the fan blades 801 rapidly, increasing the rotation speed of the fan blades 801, thereby increasing the wind speed and accelerating the blowing away of the argon gas; when the ratchet plate 10 drives the toothed ring 11 to rotate, and the toothed ring 11 drives the rotating shaft 8 and the fan blades 801 to rotate, the rotating shaft 8 will simultaneously drive the scroll torsion spring 15 at its end to retract, and as the arc block 2 13 squeezes the arc block 1 12, the ratchet plate 10 will gradually move away from the toothed ring 11 and move to the position shown in the attached figure. Figure 7 As shown, at this time, the ratchet teeth of the two do not mesh with each other, so the rotating shaft 8 and the scroll torsion spring 15 on its outer surface are no longer stressed. Under the elastic force of the scroll torsion spring 15, the rotating shaft 8 and the gear ring 11 will rotate at a faster speed, thereby accelerating the blowing away of the argon gas, avoiding the argon gas residue after evacuation and leak detection and the hidden danger of suffocation caused by illegal operation, which brings beneficial effects to workers installing thermal field components. In addition, during the rotation of the fan blade 801, part of the control will enter the single crystal furnace through the opening and closing of the blind plate, and form convection with the slight opening and closing of the furnace cover, which speeds up the recovery of the single crystal furnace to normal pressure. Opening the blind plate at a later stage can allow the oxide in the main vacuum pipeline to contact the air in advance for re-ignition, which has high safety.

[0033] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An argon convection anti-suffocation device for a single crystal furnace, characterized in that: The invention comprises a frame (1), wherein a protective cover (101) is installed on the outer side of the frame (1), and the shape of the protective cover (101) is U-shaped; a mounting plate (2) is installed on the upper end surface of the frame (1), a guide seat (3) is installed at the edge of the upper end surface of the mounting plate (2), a cylinder (4) is installed on the side wall of the guide seat (3), a guide rod (301) is installed above the guide seat (3), and a plurality of groups of connecting plates (5) are arranged on the outer peripheral surface of the guide rod (301); a roller (6) is installed at the bottom end of the telescopic end of the cylinder (4), and the telescopic end of the cylinder (4) can drive the roller (6) to move, so that the roller (6) contacts with the blind plate of the vacuum pipeline of the single crystal furnace and opens the blind plate at a certain angle.

2. The argon convection anti-suffocation device for a single crystal furnace according to claim 1, characterized in that: An opening and closing sensor (7) is installed on the side wall of the mounting plate (2), and the opening and closing sensor (7) is arranged on a side close to the roller (6). The opening and closing sensor (7) is used to monitor the opening and closing state of the blind plate of the vacuum pipeline of the single crystal furnace.

3. The single crystal furnace argon convection anti-suffocation device according to claim 1, characterized in that: A rotating shaft (8) is rotatably mounted inside the protective cover (101); two rotating shafts (8) are provided and are symmetrically arranged relative to the cylinder (4); multiple groups of fan blades (801) are fixedly mounted at the end edges of the rotating shafts (8); a linkage unit is provided at the telescopic end of the cylinder (4); when the telescopic end of the cylinder (4) moves, the rotating shaft (8) can be driven to rotate by the linkage unit, thereby causing the fan blades (801) to rotate and generate wind.

4. The single crystal furnace argon convection anti-suffocation device according to claim 3, characterized in that: The linkage unit comprises two groups of L-shaped pressing frames (9) fixedly mounted on the outer peripheral surface of the telescopic end of the cylinder (4); a ratchet plate (10) is slidably arranged inside the protective cover (101); a toothed ring (11) is mounted on the outer peripheral surface of the rotating shaft (8) via a bracket; the toothed ring (11) and the ratchet plate (10) are meshingly connected; an arc block 1 (12) is mounted on the upper end surface of the ratchet plate (10); and an arc block 2 (13) is mounted on the lower end surface of the horizontal plate of the L-shaped pressing frame (9); when the telescopic end of the cylinder (4) drives the L-shaped pressing frame (9) to move, the arc block 2 (13) on the lower end surface of the horizontal plate of the L-shaped pressing frame (9) will contact the arc block 1 (12) and squeeze the arc block 1 (12) to move the ratchet plate (10) downward.

5. The single crystal furnace argon convection anti-suffocation device according to claim 4, characterized in that: The diameter of the arc block 2 (13) is greater than the diameter of the arc block 1 (12), and the shapes of the arc block 2 (13) and the arc block 1 (12) are both semicircular arcs.

6. The argon convection anti-suffocation device for a single crystal furnace according to claim 4, characterized in that: An L-shaped circular frame (14) is installed on the inner wall of the protective cover (101) and located on one side of the rotating shaft (8); the end of the rotating shaft (8) away from the fan blade (801) passes through the inside of the L-shaped circular frame (14); and a power storage unit is provided at the end of the rotating shaft (8) and located inside the L-shaped circular frame (14); the power storage unit is used to drive the rotating shaft (8) to rotate rapidly.

7. The single crystal furnace argon convection anti-suffocation device according to claim 6, characterized in that: The power storage unit comprises a scroll torsion spring (15) sleeved on the outer circumferential surface of the rotating shaft (8); a circular groove (16) matching the rotating shaft (8) is provided inside the L-shaped circular frame (14); and the scroll torsion spring (15) is arranged inside the circular groove (16).

8. The single crystal furnace argon convection anti-suffocation device according to claim 6, characterized in that: A limiting bracket (17) is installed inside the protective cover (101), the bottom end of the ratchet plate (10) is slidably arranged inside the limiting bracket (17), and a limiting groove (18) matching the ratchet plate (10) is provided inside the limiting bracket (17).

9. The single crystal furnace argon convection anti-suffocation device according to claim 8, characterized in that: A support spring (19) is installed on the groove wall of the limiting groove (18), and the side of the support spring (19) away from the limiting groove (18) is connected to the side wall of the ratchet plate (10); when the ratchet plate 10 moves downward during operation, the ratchet plate 10 presses down the support spring 19.

10. The single crystal furnace argon convection anti-suffocation device according to claim 4, characterized in that: When the highest point of the arc end of the arc block 2 (13) contacts the highest point of the arc block 1 (12), the vacuum pipe blind plate reaches the most suitable opening and closing state.

Images