Driving unit, material moving device and semiconductor processing equipment

Abstract

The invention discloses a driving unit, a material moving device and semiconductor processing equipment, the driving unit comprises a driving part, a transmission transition shaft part, a transmission output shaft part and a universal joint, the driving part is in transmission connection with the transmission transition shaft part and is used for driving the transmission transition shaft part to rotate, and the universal joint is used for driving the transmission output shaft part to rotate. The transmission transition shaft component is connected with the transmission output shaft component through the universal joint and used for driving the transmission output shaft component to rotate. According to the driving unit, the stability of power transmission can be improved, faults can be reduced, and the continuity and stability of production can be guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a driving unit, a material moving device and semiconductor processing equipment. Background Art

[0002] In the field of semiconductor processing, the transmission shaft of the robot used for loading and unloading is relatively long. During long-term use, it is easy to bend and deform, which will affect the transmission effect of the transmission shaft, causing the material moving device to malfunction and trigger an alarm.

[0003] Therefore, how to provide a solution to overcome or alleviate the above-mentioned defects is still a technical problem that needs to be solved urgently by those skilled in the art. Summary of the invention

[0004] The object of the present invention is to provide a drive unit, a material moving device and a semiconductor processing equipment, wherein the drive unit can improve the stability of power transmission, reduce the occurrence of failures, and help ensure the continuity and stability of production.

[0005] In order to solve the above technical problems, the present invention provides a driving unit, including a driving component, a transmission transition shaft component, a transmission output shaft component and a universal joint. The driving component and the transmission transition shaft component are transmission connected to drive the transmission transition shaft component to rotate. The transmission transition shaft component is connected to the transmission output shaft component through the universal joint and is used to drive the transmission output shaft component to rotate.

[0006] In the above scheme, the embodiment of the present invention configures the integrated transmission shaft in the traditional technology as a split transmission transition shaft component and a transmission output shaft component, wherein the transmission transition shaft component is connected to the driving component, and the transmission transition shaft component and the transmission output shaft component are connected through a universal joint. The universal joint can effectively absorb the angular deviation between the transmission transition shaft component and the transmission output shaft component, so that the power transmission between the transmission output shaft component and the transmission transition shaft component can be relatively stable, which can effectively reduce the occurrence of faults and the alarm problems caused by the occurrence of faults, which is conducive to ensuring the continuity and stability of production.

[0007] In addition, the separate arrangement of the transmission transition shaft component and the transmission output shaft component can also make the axial dimensions of the two components relatively short, so that the processing and preparation of the two components can be easily realized. At the same time, the structural rigidity of the transmission transition shaft component and the transmission output shaft component can also be relatively high, which can reduce the bending of the two components during use, that is, the service life of the transmission transition shaft component and the transmission output shaft component can also be longer.

[0008] Optionally, it further comprises a frame body, the transmission output shaft component and the universal joint are both located in the frame body, the frame body is provided with a self-aligning bearing, and the transmission transition shaft component is connected to the self-aligning bearing.

[0009] Optionally, the transmission transition shaft component includes a main shaft section, a secondary shaft section and a first coupling, the main shaft section is transmission-connected to the driving component, the secondary shaft section is connected to the main shaft section via the first coupling, the secondary shaft section is connected to the self-aligning bearing, and the secondary shaft section is connected to the universal joint.

[0010] Optionally, the driving component includes a driving shaft and a second coupling, and the driving shaft is connected to the transmission transition shaft component through the second coupling.

[0011] Optionally, the transmission transition shaft component is fixedly installed with a guide key, the universal joint is provided with a keyway, the guide key is located in the keyway, and the guide key and the keyway are clearance fit, and the transmission transition shaft component can slide along the extension direction of the keyway through the guide key.

[0012] Optionally, the transmission transition shaft component further includes a connecting piece, the guide key is provided with a mounting hole, and the connecting piece can pass through the mounting hole to fix the guide key.

[0013] Optionally, the connecting member includes a head and a rod, the mounting hole includes a large-diameter hole section and a small-diameter hole section, the head is located in the large-diameter hole section, and the rod passes through the small-diameter hole section.

[0014] Optionally, an outer wall surface of the transmission transition shaft component is provided with a mounting groove, and a portion of the guide key is located in the mounting groove.

[0015] The present invention further provides a material moving device, comprising a picking unit and a driving unit, wherein the driving unit is connected to the picking unit, and the driving unit is the driving unit mentioned above.

[0016] The present invention also provides a semiconductor processing equipment, comprising a material moving device, wherein the material moving device is the above-mentioned material moving device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the structure of a driving unit provided by the present invention;

[0018] Figure 2 for Figure 1 The local structure diagram of the auxiliary shaft section and the connection between the auxiliary shaft section and the frame body are partially cut away;

[0019] Figure 3 for Figure 1 Section view in AA direction;

[0020] Figure 4 for Figure 3 A partial enlarged view of the middle countershaft section, guide key and connecting parts.

[0021] Reference numerals:

[0022] 1000-drive unit; 1100-drive component; 1110-power device; 1120-reducer; 1130-drive shaft; 1140-second coupling; 1200-transmission transition shaft component; 1210-main shaft section; 1220-secondary shaft section; 1221-mounting groove; 1230-first coupling; 1240-guide key; 1241-mounting hole; 1241A-large diameter hole section; 1241B-small diameter hole section; 1241C-step surface; 1250-connector; 1251-head; 1252-rod; 1300-transmission output shaft component; 1400-universal joint; 1410-keyway; 1500-frame body; 1510-self-aligning bearing. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] In the description of the embodiments of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0025] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium.

[0026] In the description of the embodiments of the present invention, the terms "comprises", "includes" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0027] Please refer to Figure 1-Figure 4 , Figure 1A schematic diagram of the structure of a driving unit provided by the present invention; Figure 2 for Figure 1 The local structure diagram of the auxiliary shaft section and the connection between the auxiliary shaft section and the frame body are partially cut away; Figure 3 for Figure 1 Section view in AA direction; Figure 4 for Figure 3 A partial enlarged view of the middle countershaft section, guide key and connecting parts.

[0028] like Figure 1 and Figure 2 As shown, an embodiment of the present invention provides a driving unit 1000 , including a driving component 1100 , a transmission transition shaft component 1200 , a transmission output shaft component 1300 and a universal joint 1400 .

[0029] The driving component 1100 is a power module of the driving unit 1000 , and is used to provide driving force for the actions of other components in the driving unit 1000 .

[0030] In some optional implementations, such as Figure 1 As shown, the driving component 1100 may include a power device 1110 and a reducer 1120. The power device 1110 may be a motor or the like, which is used to directly generate a driving force, and the reducer 1120 may be connected to the power device 1110 to achieve deceleration and torque increase. The reducer 1120 has a drive shaft 1130, which is used to output the above-mentioned driving force to the outside. The specific structural form of the reducer 1120 is not limited here, and can be selected according to actual needs.

[0031] It should be understood that in some other implementations of the embodiments of the present invention, the driving component 1100 may also adopt other structural forms, as long as it can meet the requirements of use. For example, the above-mentioned power device 1110 may also adopt other power elements such as rotary cylinders that can output rotational driving force. For another example, the above-mentioned reducer 1120 may also not be set. In this case, the driving component 1100 may only include the power device 1110, and the drive shaft 1130 may be the output shaft of the power device 1110. The structural form of the driving component 1100 is relatively simple.

[0032] The driving component 1100 is in transmission connection with the transmission transition shaft component 1200 to drive the transmission transition shaft component 1200 to rotate.

[0033] In some optional implementations, such as Figure 1As shown, the driving component 1100 may further include a second coupling 1140, which may specifically be a rigid coupling. The driving shaft 1130 may be connected to the transmission transition shaft component 1200 via the second coupling 1140, so as to directly transmit the driving force to the transmission transition shaft component 1200. At this time, the driving shaft 1130 and the transmission transition shaft component 1200 may be substantially coaxially arranged, which can reduce the space occupied in the direction perpendicular to the axial direction of the driving shaft 1130.

[0034] It should be understood that in some other implementations of the embodiment of the present invention, the drive shaft 1130 and the transmission transition shaft component 1200 may also be connected by other transmission structures, as long as they can meet the requirements of power transmission. For example, the drive shaft 1130 and the transmission transition shaft component 1200 may be connected by transmission structures in the form of gear structures, sprocket structures, pulley structures, etc., in which case the size of the drive unit 1000 provided by the embodiment of the present invention in the axial direction of the drive shaft 1130 may be relatively small.

[0035] The transmission transition shaft component 1200 is connected to the transmission output shaft component 1300 via a universal joint 1400 and is used to drive the transmission output shaft component 1300 to rotate, while the transmission output shaft component 1300 is used to output driving force outward.

[0036] In this way, the embodiment of the present invention configures the one-piece transmission shaft in the traditional technology into a split transmission transition shaft component 1200 and a transmission output shaft component 1300, wherein the transmission transition shaft component 1200 is connected to the driving component 1100, and the transmission transition shaft component 1200 and the transmission output shaft component 1300 are connected via a universal joint 1400. The universal joint 1400 can effectively absorb the angular deviation between the transmission transition shaft component 1200 and the transmission output shaft component 1300, so that the power transmission between the transmission output shaft component 1300 and the transmission transition shaft component 1200 can be relatively stable, which can effectively reduce the occurrence of faults and the alarm problems caused by the occurrence of faults, which is conducive to ensuring the continuity and stability of production.

[0037] In addition, the separate arrangement of the transmission transition shaft component 1200 and the transmission output shaft component 1300 can also make the axial dimensions of the two relatively short, so that the two can be easily processed and prepared. At the same time, the structural rigidity of the transmission transition shaft component 1200 and the transmission output shaft component 1300 can also be relatively high, which can reduce the bending of the two during use, that is, the service life of the transmission transition shaft component 1200 and the transmission output shaft component 1300 can also be longer.

[0038] In some optional implementations, such as Figure 1 and Figure 2 As shown, the driving unit 1000 provided in the embodiment of the present invention may further include a frame portion 1500 .

[0039] The aforementioned transmission output shaft component 1300 and universal joint 1400 may be located in the frame portion 1500 so as to be assembled in an integrated manner through the frame portion 1500. The transmission output shaft component 1300 and the frame portion 1500 may be assembled specifically through rolling bearings, etc., so as to accommodate the relative rotation between the transmission output shaft component 1300 and the frame portion 1500. Here, the embodiment of the present invention does not limit the specific structural form of the above-mentioned frame portion 1500. In actual applications, those skilled in the art may select it according to specific needs, as long as it can meet the requirements of use. For example, the frame portion 1500 may be Figure 2 The frame structure shown.

[0040] A self-aligning bearing 1510 may be provided in the frame 1500. The transmission transition shaft component 1200 may be inserted into the self-aligning bearing 1510. The self-aligning bearing 1510 has an automatic self-aligning function, and can effectively absorb the angular offset between the frame 1500 and the transmission transition shaft component 1200, and further can adapt to the angular offset between the transmission output shaft component 1300 and the transmission transition shaft component 1200. In this way, the stress on the frame 1500 can also be effectively reduced, so that the service life of the frame 1500 can be largely guaranteed.

[0041] The transmission transition shaft component 1200 may be an integrated structure.

[0042] Or, if Figure 1 and Figure 2 As shown, the transmission transition shaft component 1200 may also be a split structure, including a main shaft section 1210 , a secondary shaft section 1220 and a first coupling 1230 .

[0043] The main shaft section 1210 can be connected to the driving component 1100. The secondary shaft section 1220 can be connected to the main shaft section 1210 through the first coupling 1230 to achieve power transmission from the main shaft section 1210 to the secondary shaft section 1220; the first coupling 1230 can also be a rigid coupling. The secondary shaft section 1220 can be connected to the self-aligning bearing 1510, and the secondary shaft section 1220 can be connected to the universal joint 1400. With such a configuration, the axial dimensions of the main shaft section 1210 and the secondary shaft section 1220 can be relatively short, and can be easily prepared and installed; at the same time, it is also conducive to ensuring the structural rigidity of the main shaft section 1210 and the secondary shaft section 1220, which can reduce the bending of the two during use, thereby extending the service life.

[0044] It should be understood that in some other implementations of the embodiment of the present invention, the main shaft section 1210 and the secondary shaft section 1220 may also be connected by other transmission structures, as long as they can meet the requirements of power transmission. For example, the main shaft section 1210 and the secondary shaft section 1220 may also be connected by transmission structures in the form of gear structures, sprocket structures, pulley structures, etc., in which case the transmission transition shaft component 1200 provided by the embodiment of the present invention may have a relatively small size in the axial direction, which can reduce the space occupied in the axial direction.

[0045] In some optional implementations, the transmission transition shaft component 1200 may be fixedly mounted with a guide key 1240. The inner wall surface of the universal joint 1400 may be provided with a keyway 1410. The guide key 1240 may be located in the keyway 1410. In other words, the transmission transition shaft component 1200 and the universal joint 1400 may be key-connected, which can conveniently realize power transmission between the transmission transition shaft component 1200 and the universal joint 1400.

[0046] Furthermore, the guide key 1240 and the key slot 1410 may be clearance-matched, and the transmission transition shaft component 1200 may also slide along the extension direction of the key slot 1410 through the guide key 1240. Such a configuration may also accommodate the axial movement between the transmission transition shaft component 1200 and the transmission output shaft component 1300, thereby reducing the axial error. At the same time, the matching of the guide key 1240 and the key slot 1410 may also improve the sliding stability and smoothness of the transmission transition shaft component 1200.

[0047] Combination Figure 3 and Figure 4 The transmission transition shaft component 1200 may further include a connecting member 1250. The connecting member 1250 may specifically be a screw, etc. The guide key 1240 may be provided with a mounting hole 1241, and the connecting member 1250 may pass through the mounting hole 1241, and the connecting member 1250 may be connected to the secondary shaft section 1220, so as to fix the guide key 1250.

[0048] Specifically, the above-mentioned connecting member 1250 may include a head 1251 and a rod 1252, and at least a portion of the rod 1252 may be provided with an external thread; the mounting hole 1241 may include a large diameter hole section 1241A and a small diameter hole section 1241B, and the guide key 1240 may form a step surface 1241C between the large diameter hole section 1241A and the small diameter hole section 1241B; the head 1251 may be located in the large diameter hole section 1241A, and the rod 1252 may pass through the small diameter hole section 1241B, and may be connected to the secondary shaft section 1220, so as to realize the connection and fixation of the guide key 1250 in the transmission transition shaft component 1200.

[0049] The guide key 1240 may be located entirely on the outside of the transmission transition shaft component 1200 .

[0050] Or, if Figure 4 As shown, the outer wall surface of the transmission transition shaft component 1200 may also be provided with a mounting groove 1221, and a portion of the guide key 1240 may be located in the mounting groove 1221. In this way, before the guide key 1240 and the secondary shaft section 1220 are connected by the connecting member 1250, the guide key 1240 may be inserted into the mounting groove 1221 first, so that the guide key 1240 can be pre-positioned, and the subsequent connection of the connecting member 1250 and the secondary shaft section 1220 can be facilitated. In addition, the setting of the mounting groove 1221 can also conveniently adjust the size of the guide key 1240 protruding from the outer wall surface of the secondary shaft section 1220, so as to facilitate the installation and matching of the guide key 1240 and the key groove 1410.

[0051] It should be understood that in some other implementations of the present invention, the guide key 1240 and the secondary shaft section 1220 may be connected in other ways as long as the use requirements can be met. For example, the guide key 1240 may be connected to the secondary shaft section 1220 by welding, bonding, interference fitting, etc.

[0052] The embodiment of the present invention further provides a material moving device, including a pickup unit and a drive unit 1000. The drive unit 1000 can be connected to the pickup unit to drive the pickup unit to move, thereby realizing the movement of materials. The drive unit 1000 can specifically be the drive unit 1000 involved in the aforementioned implementation methods. Since the aforementioned drive unit 1000 already has the above technical effects, the material moving device having the drive unit 1000 should also have similar technical effects, so it will not be repeated here.

[0053] An embodiment of the present invention also provides a semiconductor processing equipment, which can specifically adopt equipment using processes such as plasma enhanced chemical vapor deposition (PECVD) and plasma enhanced atomic layer deposition (PEALD), and can include a reactor, a material moving device, etc., and the material moving device can be the above-mentioned material moving device.

[0054] Since the above-mentioned material moving device has the above-mentioned technical effects, the semiconductor processing equipment having the material moving device should also have similar technical effects, so it will not be described in detail here.

[0055] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A drive unit, characterized in that: It includes a driving component, a transmission transition shaft component, a transmission output shaft component and a universal joint. The driving component and the transmission transition shaft component are transmission-connected to drive the transmission transition shaft component to rotate. The transmission transition shaft component is connected to the transmission output shaft component through the universal joint and is used to drive the transmission output shaft component to rotate.

2. The drive unit according to claim 1, characterized in that: It also includes a frame body, the transmission output shaft component and the universal joint are both located in the frame body, the frame body is provided with a self-aligning bearing, and the transmission transition shaft component is connected to the self-aligning bearing.

3. The drive unit according to claim 2, characterized in that: The transmission transition shaft component includes a main shaft section, a secondary shaft section and a first coupling. The main shaft section is transmission-connected to the driving component. The secondary shaft section is connected to the main shaft section via the first coupling. The secondary shaft section is connected to the self-aligning bearing, and the secondary shaft section is connected to the universal joint.

4. The drive unit according to claim 1, characterized in that: The driving component comprises a driving shaft and a second coupling, and the driving shaft is connected to the transmission transition shaft component via the second coupling.

5. The drive unit according to any one of claims 1 to 4, characterized in that: The transmission transition shaft component is fixedly installed with a guide key, the universal joint is provided with a keyway, the guide key is located in the keyway, and the guide key and the keyway are clearance-fitted, and the transmission transition shaft component can slide along the extension direction of the keyway through the guide key.

6. The drive unit according to claim 5, characterized in that: The transmission transition shaft component also includes a connecting piece, and the guide key is provided with a mounting hole. The connecting piece can pass through the mounting hole to fix the guide key.

7. The drive unit according to claim 6, characterized in that: The connecting piece comprises a head and a rod, the mounting hole comprises a large-diameter hole section and a small-diameter hole section, the head is located in the large-diameter hole section, and the rod passes through the small-diameter hole section.

8. The driving unit according to claim 5, characterized in that: The outer wall surface of the transmission transition shaft component is provided with a mounting groove, and a part of the guide key is located in the mounting groove.

9. A material transfer device, characterized in that: It comprises a pickup unit and a driving unit, wherein the driving unit is connected to the pickup unit, and the driving unit is the driving unit according to any one of claims 1 to 8.

10. A semiconductor processing equipment, characterized in that: It comprises a material moving device, and the material moving device is the material moving device according to claim 9.

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