A self-locking starting and closing device for vacuum valve
By designing a vacuum valve self-locking start-up closing device, the self-locking principle of the drive cylinder and worm gear is used to solve the problem of vacuum valve losing its bond due to wear and insufficient air pressure, achieving maintenance of vacuum state and simplification of structure, reducing cost and particle generation.
Patent Information
- Application Number
- CN202510114516.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-24
- Publication Date
- 2025-04-04
AI Technical Summary
After use for a period of time, existing vacuum valves are prone to lose their bonding due to wear and insufficient air pressure or oil pressure, resulting in the vacuum capsule losing its sealing and the vacuum state cannot be maintained. At the same time, the existing structure is complex and it is impossible to ensure that the connecting rod group is just at the dead point, which increases the structural volume and cost.
A vacuum valve self-locking start-closing device is designed, which drives the drive shaft and cross rod up and down through the drive cylinder. Using the self-locking principle of worm gear and worm, when the cylinder or oil cylinder is insufficient, the valve and vacuum capsule are prevented from losing its closeness, and through the coordination of the transmission assembly and rope, the valve plate is effectively adjusted for efficient switching and action stroke.
It effectively prevents the valve and vacuum capsule from losing their closeness, maintaining the vacuum state, reducing structural complexity and cost, and at the same time, it achieves the effect of rapid start-up and closing and small action amplitude, reducing particle generation.
Smart Images
Figure CN119755357A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of vacuum valves, in particular to a self-locking starting and closing device for a vacuum valve. Background Art
[0002] Wafers, TFTs, MOCVD, PECVD, and LCD glass substrates are often processed in a vacuum chamber. The vacuum chamber usually contains an openable / closeable valve, which is driven by an opening and closing device. When the valve is open, the processed object can enter and exit the vacuum chamber through the valve. After the processed object is sent into the vacuum chamber, the valve is closed to make the vacuum chamber sealed, and then the vacuum chamber is evacuated to create a vacuum state.
[0003] For the opening or closing of the valve, the existing technology generally relies on the air cylinder or oil cylinder to drive the transmission mechanism, and the transmission mechanism drives the valve to open and close. When the valve is sealed with the vacuum chamber, in order to maintain the airtight effect of the vacuum chamber, the pneumatic cylinder or oil cylinder needs to continue to press the valve against the vacuum chamber with air pressure or oil pressure to prevent the valve from losing its seal with the vacuum chamber. However, after the machine has been used for a period of time, wear problems are inevitable. In particular, the air cylinder or oil cylinder is prone to insufficient air pressure or oil pressure due to pipeline problems, which causes the valve to lose its seal with the vacuum chamber and cannot maintain the vacuum state. On the other hand, relying on a power source to drive the transmission mechanism cannot solve or requires a high cost to solve the contradiction between the rapid start-up and closing requirements of the valve and the small amplitude of the closing action to reduce particle generation.
[0004] Moreover, the existing valve structure requires a multi-section connecting rod assembly structure and a linear slide rail, which is not only complex in structure, but also cannot ensure that the connecting rod assembly is exactly at the dead point, which increases the structure volume and cost and has the risk of the vacuum chamber suddenly losing its vacuum tightness. Summary of the invention
[0005] In view of the deficiencies in the prior art, the present invention provides a self-locking starting and closing device for a vacuum valve, which solves the problem of sudden loss of vacuum tightness in a vacuum chamber.
[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a self-locking starting and closing device for a vacuum valve, comprising two valves, a frame fixedly connected to the top of the valve on one side, a cover plate penetrating through and slidably connected to one end of the frame, an evenly distributed threaded groove is opened on the inner wall of one end of the frame, a driving cylinder is fixedly connected to the bottom of the inner wall of the frame, fixed rods are fixedly connected to the bottoms of both sides of the inner wall of the frame, a worm gear is rotatably connected to the outer wall of the fixed rod, a threaded sleeve valve stem is penetrated and slidably connected to both sides of the bottom of the inner wall of the frame, a transmission assembly is provided on the inner wall of the threaded sleeve valve stem, a driving shaft is fixedly connected to the output end of the driving cylinder, a cross bar is penetrated and provided on the outer ring of the driving shaft, a driving assembly is provided on both sides of the cross bar, and adjusting screws are penetrated and threadedly connected to both sides of the top of the frame.
[0007] Preferably, the transmission assembly includes a threaded rod, the outer wall of the threaded rod is threadedly connected to the inner wall of the threaded sleeve valve stem, the top of the threaded rod is fixedly connected to a worm, the outer ring of the worm is meshingly connected to a worm wheel, the top of the worm is fixedly connected to a sliding rod, and the top of the sliding rod is rotatably connected to a rope rod.
[0008] Preferably, the driving assembly includes two sliders, one end of each slider is fixedly connected to one side of the cross bar, and limit blocks are provided on both sides of the bottom of the slider. A rope is fixedly connected to the middle of the top of the limit block on the same side, and the outer ring of the rope passes through and contacts one side of the rope rod.
[0009] Preferably, windows are penetrated and opened on both sides of the middle of one end of the cover plate, and the outer wall of one end of the window is penetrated and threadedly connected with evenly distributed first bolts, and the outer wall of the first bolt is threadedly connected to the inner wall of the thread groove, and a second sealing gasket is provided at the other end of the cover plate.
[0010] Preferably, the sliding rod has second limiting grooves passing through and opening on both sides of the top, the rope rod has first limiting grooves passing through and opening on both sides of the top, a plug-in ring is provided on the top of the rope rod, and the plug-in ring has insertion rods fixedly connected on both sides of the bottom, and the outer walls of the insertion rods are slidably connected to the inner walls of the first limiting groove and the second limiting groove, respectively.
[0011] Preferably, a nut is threadedly connected to the top of the outer wall of the driving shaft, and the nut is in contact with the cross bar.
[0012] Preferably, a valve stem ring is fixedly connected to the bottom of the outer wall of the threaded sleeve valve stem, and a valve plate is fixedly connected to the bottom of the valve stem ring.
[0013] Preferably, a first sealing gasket is provided between the valves, and a second bolt penetrates and is threadedly connected to an outer ring of one end of the valve.
[0014] The present invention provides a self-locking start-close device for a vacuum valve. It has the following beneficial effects: 1. The present invention removes the plug-in ring from the slide rod, engages the plug-in rod on the plug-in ring with the rope rod, and then rotates the rope rod to drive the rope to rotate, thereby controlling the switch height of the valve plate. By rotating the rope rod, the number of turns of the rope on the slide rod is changed to adapt to different valve sizes and adjust the action stroke.
[0015] 2. In the present invention, when the cross bar applies pressure to the slider and pulls it back and forth, friction is generated between the rope and the transmission assembly. This friction enables the transmission assembly to rotate following the movement of the rope, thereby converting the linear motion of pulling the cross bar into the rotational motion of the transmission assembly, providing power for opening or closing the valve plate. Because the initial state of the rope causes the slider to generate an upward or downward force, it will be more labor-saving during the operation of the drive cylinder.
[0016] 3. The present invention opens the driving cylinder, and the output end of the driving cylinder drives the driving shaft to move upward or downward, the driving shaft drives the cross bar to move up and down, and the cross bar drives the driving assembly to move up and down. Through the self-locking principle of the worm gear, when the air cylinder or the oil cylinder is prone to insufficient air pressure or oil pressure due to pipeline problems, the driving shaft driven by the driving cylinder will not move up and down, thereby avoiding the valve and the vacuum chamber from losing their seal and being unable to maintain the vacuum state, thereby preventing the valve plate from automatically opening due to the reverse thrust of the valve plate, and preventing the valve from accidentally losing the vacuum seal of the vacuum chamber due to factors such as insufficient power of the driving cylinder. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 A perspective view of the present invention; Figure 2 It is a front view of the present invention; Figure 3 It is a schematic diagram of the framework of the present invention; Figure 4 It is a schematic diagram of the transmission assembly of the present invention; Figure 5 It is a schematic diagram of the slide bar of the present invention; Figure 6 This is a schematic diagram of opening the cover of the present invention; Figure 7 It is a schematic diagram of the cover plate of the present invention.
[0018] Among them, 1. valve; 2. frame; 3. cover plate; 4. window; 5. first bolt; 6. adjusting screw; 7. second bolt; 8. threaded sleeve valve stem; 9. drive cylinder; 10. fixing rod; 11. worm gear; 12. slider; 13. limit block; 14. rope; 15. rope rod; 16. threaded groove; 17. threaded rod; 18. worm; 19. slide rod; 20. plug-in ring; 21. plug-in rod; 22. first limit groove; 23. second limit groove; 24. valve plate; 25. valve stem ring; 26. drive shaft; 27. nut; 28. cross bar; 29. first sealing gasket; 30. second sealing gasket. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the specification of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0020] Example: Please see attached Figure 1 -Attached Figure 7 The embodiment of the present invention provides a self-locking starting and closing device for a vacuum valve, comprising two valves 1, a frame 2 is fixedly connected to the top of one side of the valve 1, a cover plate 3 is penetrated and slidably connected to one end of the frame 2, a uniformly distributed threaded groove 16 is opened on the inner wall of one end of the frame 2, a driving cylinder 9 is fixedly connected to the bottom of the inner wall of the frame 2, a fixing rod 10 is fixedly connected to the bottom of both sides of the inner wall of the frame 2, a worm gear 11 is rotatably connected to the outer wall of the fixing rod 10, a threaded sleeve valve stem 8 is penetrated and slidably connected to both sides of the bottom of the inner wall of the frame 2, a transmission assembly is arranged on the inner wall of the threaded sleeve valve stem 8, a driving shaft 26 is fixedly connected to the output end of the driving cylinder 9, a cross bar 28 is penetrated and arranged on the outer ring of the driving shaft 26, a driving assembly is arranged on both sides of the cross bar 28, and adjusting screws 6 are penetrated and threadedly connected to both sides of the top of the frame 2.
[0021] Open the drive cylinder 9, and the output end of the drive cylinder 9 drives the drive shaft 26 to move upward or downward, and the drive shaft 26 drives the cross bar 28 to move up and down, and the cross bar 28 drives the drive assembly to move up and down. Through the self-locking principle of the worm gear 11 and the worm 18, when the air cylinder or the oil cylinder is prone to insufficient air pressure or oil pressure due to pipeline problems, the drive shaft 26 driven by the drive cylinder 9 will not move up and down, thereby avoiding the valve and the vacuum chamber from losing their seal and being unable to maintain the vacuum state, thereby preventing the reverse thrust of the valve plate 24 from causing the valve 1 to open automatically, and preventing the valve 1 from accidentally losing the vacuum seal of the vacuum chamber due to factors such as insufficient power of the drive cylinder 9.
[0022] Please see attached Figure 3 -Attached Figure 4 The transmission assembly includes a threaded rod 17, the outer wall of the threaded rod 17 is threadedly connected to the inner wall of the threaded sleeve valve stem 8, the top of the threaded rod 17 is fixedly connected to a worm 18, the outer ring of the worm 18 is meshedly connected to the worm wheel 11, the top of the worm 18 is fixedly connected to a sliding rod 19, and the top of the sliding rod 19 is rotatably connected to a rope rod 15.
[0023] The driving assembly drives the transmission assembly to rotate, and the rope rod 15 in the driving assembly drives the sliding rod 19 to rotate, thereby driving the worm 18 and the threaded rod 17 to rotate. The rotation of the worm 18 drives the worm wheel 11 to rotate. The rotation of the threaded rod 17 drives the threaded sleeve valve stem 8 to move up and down, thereby opening or closing the valve plate 24.
[0024] Please see attached Figure 1 -Attached Figure 7 The driving assembly includes two sliders 12, one end of each slider 12 is fixedly connected to one side of the cross bar 28, and limit blocks 13 are arranged on both sides of the bottom of the slider 12. A rope 14 is fixedly connected to the middle of the top of the limit block 13 on the same side, and the outer circle of the rope 14 penetrates and contacts one side of the rope rod 15.
[0025] When the cross bar 39 applies pressure to the slider 12 and pulls it back and forth, friction is generated between the rope 14 and the transmission assembly. This friction enables the transmission assembly to rotate following the movement of the rope 14, thereby converting the linear motion of the pulling cross bar 39 into the rotational motion of the transmission assembly, providing power for opening or closing the valve plate. Because the initial state of the rope 14 causes the slider 12 to generate an upward or downward force, it will be more labor-saving during the operation of the drive cylinder 9.
[0026] Please see attached Figure 1 -Attached Figure 2 and attached Figure 7 Windows 4 are penetrated and opened on both sides of the middle of one end of the cover plate 3, and the outer wall of one end of the window 4 is penetrated and threadedly connected with evenly distributed first bolts 5, and the outer wall of the first bolt 5 is threadedly connected to the inner wall of the thread groove 16, and a second sealing gasket 30 is arranged at the other end of the cover plate 3.
[0027] The rope 14 in the frame 2 can be observed through the viewing window 4 , the cover plate 3 can be disassembled or installed through the first bolt 5 , and the frame 2 can be sealed through the second sealing gasket 30 .
[0028] Please see attached Figure 4 -Attached Figure 5The top sides of the slide rod 19 are penetrated and opened with second limiting grooves 23, the top sides of the rope rod 15 are penetrated and opened with first limiting grooves 22, the top of the rope rod 15 is provided with a plug-in ring 20, and the bottom sides of the plug-in ring 20 are fixedly connected with an insertion rod 21, and the outer wall of the insertion rod 21 is slidably connected with the inner wall of the first limiting groove 22 and the inner wall of the second limiting groove 23 respectively.
[0029] By removing the plug-in ring 20 from the slide bar 19, the plug-in rod 21 on the plug-in ring 20 is engaged with the rope rod 15, and then the rope rod 15 is rotated, and the rope rod 15 drives the rope 14 to rotate, so as to control the switching height of the valve plate 24. By rotating the rope rod 15, the number of turns of the rope 14 on the slide bar 19 is changed to adapt to different valve sizes and adjust the action stroke.
[0030] Please see attached Figure 6 A nut 27 is threadedly connected to the top of the outer wall of the driving shaft 26 , and the nut 27 is in contact with the cross bar 28 .
[0031] The cross bar 28 on the drive shaft 26 can be removed by rotating the nut 27 .
[0032] Please see attached Figure 6 The bottom of the outer wall of the threaded sleeve valve stem 8 is fixedly connected with a valve stem ring 25 , and the bottom of the valve stem ring 25 is fixedly connected with a valve plate 24 .
[0033] The threaded rod 17 rotates, driving the threaded sleeve valve stem 8 to move up and down, thereby driving the valve stem ring 25 to move up and down, thereby driving the valve plate 24 to move up and down.
[0034] Please see attached Figure 2 and attached Figure 6 A first sealing gasket 29 is arranged between the valves 1, and a second bolt 7 is penetrated and threadedly connected to the outer ring of one end of the valve 1.
[0035] The first sealing gasket 29 can prevent the valve 1 from leaking, and the second bolt 7 can be used to assemble the valve 1.
[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A vacuum valve self-locking start-close device, comprising two valves (1), characterized in that: The top of the valve (1) on one side is fixedly connected to a frame (2), one end of the frame (2) is penetrated by and slidably connected to a cover plate (3), one end of the frame (2) is provided with an inner wall with evenly distributed thread grooves (16), the bottom of the inner wall of the frame (2) is fixedly connected to a drive cylinder (9), the bottom of both sides of the inner wall of the frame (2) are fixedly connected to fixed rods (10), the outer wall of the fixed rod (10) is rotatably connected to a worm gear (11), both sides of the bottom of the inner wall of the frame (2) are penetrated by and slidably connected to a threaded sleeve valve stem (8), the inner wall of the threaded sleeve valve stem (8) is provided with a transmission assembly, the output end of the drive cylinder (9) is fixedly connected to a drive shaft (26), the outer ring of the drive shaft (26) is penetrated by and provided with a cross bar (28), both sides of the cross bar (28) are provided with a drive assembly, and both sides of the top of the frame (2) are penetrated by and threadedly connected to adjusting screws (6).
2. A self-locking starting and closing device for a vacuum valve according to claim 1, characterized in that: The transmission assembly comprises a threaded rod (17), the outer wall of the threaded rod (17) being threadedly connected to the inner wall of the threaded sleeve valve stem (8), the top of the threaded rod (17) being fixedly connected to a worm (18), the outer ring of the worm (18) being meshingly connected to a worm wheel (11), the top of the worm (18) being fixedly connected to a slide rod (19), and the top of the slide rod (19) being rotatably connected to a rope rod (15).
3. A self-locking start-close device for vacuum valves according to claim 1, characterized in that: The driving assembly comprises two sliders (12), one end of each slider (12) is fixedly connected to one side of a cross bar (28), and limit blocks (13) are provided on both sides of the bottom of each slider (12). A rope (14) is fixedly connected to the middle of the top of the limit block (13) on the same side, and the outer ring of the rope (14) penetrates and contacts one side of the rope rod (15).
4. A self-locking starting and closing device for a vacuum valve according to claim 1, characterized in that: Windows (4) are penetrated and opened on both sides of the middle of one end of the cover plate (3); evenly distributed first bolts (5) are penetrated and threadedly connected to the outer wall of one end of the window (4); and the outer wall of the first bolt (5) is threadedly connected to the inner wall of the thread groove (16); and a second sealing gasket (30) is provided at the other end of the cover plate (3).
5. A self-locking start-close device for vacuum valves according to claim 2, characterized in that: The top sides of the slide rod (19) are penetrated by and provided with second limit grooves (23), the top sides of the rope rod (15) are penetrated by and provided with first limit grooves (22), the top of the rope rod (15) is provided with a plug-in ring (20), the bottom sides of the plug-in ring (20) are fixedly connected with an insertion rod (21), and the outer wall of the insertion rod (21) is slidably connected to the inner wall of the first limit groove (22) and the inner wall of the second limit groove (23) respectively.
6. A self-locking start-close device for vacuum valves according to claim 1, characterized in that: A nut (27) is threadedly connected to the top of the outer wall of the driving shaft (26), and the nut (27) is in contact with the cross bar (28).
7. A self-locking starting and closing device for a vacuum valve according to claim 1, characterized in that: A valve stem ring (25) is fixedly connected to the bottom of the outer wall of the threaded sleeve valve stem (8), and a valve plate (24) is fixedly connected to the bottom of the valve stem ring (25).
8. A self-locking start-close device for vacuum valves according to claim 1, characterized in that: A first sealing gasket (29) is arranged between the valves (1), and a second bolt (7) is passed through and threadedly connected to the outer ring of one end of the valve (1).