Vacuum valves and semiconductor process equipment

Abstract

The present disclosure provides a vacuum valve and semiconductor process equipment, which relate to the field of semiconductor technology. The vacuum valve includes: a valve body and a valve plate, wherein the valve plate is located at one end of the valve body; a first driving mechanism connected to the valve plate, used to drive the valve plate to move relative to the valve body in a first direction; a second driving mechanism connected to the valve plate, used to drive the valve plate to move relative to the valve body in a second direction, wherein the second direction is perpendicular to the first direction; wherein the second driving mechanism includes: a second driving member, a first transmission assembly and a second transmission assembly, wherein the first transmission assembly is used to amplify the driving force provided by the second driving member and transmit the amplified force to the second transmission assembly, and the second transmission assembly is used to convert the amplified force into a force along the second direction to drive the valve plate to move along the second direction.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and in particular to vacuum valves and semiconductor process equipment. Background Art

[0002] In the semiconductor field, some processing processes need to be carried out under high cleanliness and high vacuum conditions, so at least part of the reaction chambers in semiconductor process equipment are usually configured as vacuum chambers. Among them, vacuum valves are usually required to achieve the disconnection or connection between the vacuum chamber and the external space, so how to reasonably design the vacuum valve so that the vacuum valve can withstand a large reverse pressure is one of the problems that need to be solved urgently. Summary of the invention

[0003] The present disclosure provides a vacuum valve and semiconductor process equipment, wherein the vacuum valve can withstand relatively large reverse pressure.

[0004] According to one aspect of the present disclosure, a vacuum valve is provided for use in semiconductor process equipment, the vacuum valve comprising: a valve body and a valve plate, the valve plate being located at one end of the valve body; a first driving mechanism connected to the valve plate, and used to drive the valve plate to move relative to the valve body in a first direction; a second driving mechanism connected to the valve plate, and used to drive the valve plate to move relative to the valve body in a second direction, the second direction being perpendicular to the first direction; wherein the second driving mechanism comprises: a second driving member, a first transmission assembly, and a second transmission assembly, the first transmission assembly being used to amplify the driving force provided by the second driving member and transmit the amplified force to the second transmission assembly, the second transmission assembly being used to convert the amplified force into a force along the second direction, so as to drive the valve plate to move along the second direction.

[0005] In some embodiments, the first driving mechanism includes: a first cylinder, a first bracket and a push rod; the first cylinder is fixedly connected to the valve body, the first cylinder has at least two, and the output end of the first cylinder is fixedly connected to the first bracket; the push rod has at least two, one end of the two push rods is respectively connected to the first bracket, and the other end of the two push rods is respectively fixedly connected to the valve plate, so that the first cylinder can drive the first bracket, the push rod and the valve to move along the first direction.

[0006] In some embodiments, the first bracket is provided with a long hole, and the long hole extends along the second direction, so that the output end of the first cylinder can move along the second direction relative to the first bracket.

[0007] In some embodiments, the vacuum valve further includes: a bellows, the bellows is located at the end of the valve body facing the valve plate, and the bellows is sleeved outside the push rod, the bellows is respectively sealed with the valve body and the push rod to isolate the internal space of the reaction chamber in the semiconductor process equipment from the external space.

[0008] In some embodiments, the first transmission assembly includes: a first bevel gear, a second bevel gear, a first mounting shaft and a second mounting shaft; the first bevel gear is mounted on the first mounting shaft, the first bevel gear is meshed with the second bevel gear, and the second bevel gear is mounted on the second mounting shaft; the axial direction of the first mounting shaft is parallel to the second direction; the direction of the second mounting shaft is parallel to the first direction.

[0009] In some embodiments, the second driving member includes a second cylinder, which is fixedly connected to the valve body; the second cylinder has at least one; a second bracket is provided at the output end of the second cylinder; the first transmission assembly also includes: a rack and a spur gear, the rack is fixedly connected to the second bracket, the rack is meshed with the spur gear, and the spur gear is fixedly connected to the first mounting shaft.

[0010] In some embodiments, the second cylinder is fixedly connected to the end of the valve body facing away from the valve plate; and the first cylinder in the first driving mechanism is fixedly connected to the end of the valve body facing the valve plate.

[0011] In some embodiments, the first transmission assembly further includes: a turbine and a worm, the turbine meshing with the worm, the worm and the second mounting shaft being fixedly connected so that the worm and the second mounting shaft rotate with the second bevel gear.

[0012] In some embodiments, the second transmission assembly includes: a lead screw, a first nut and a slider; the axial direction of the lead screw is parallel to the second direction, the lead screw is fixedly connected to the turbine, the lead screw is meshed with the first nut, and the first nut is fixedly connected to the slider; the valve body is provided with a sliding hole, and the slider is arranged in the sliding hole, so that the turbine can drive the slider to move relative to the valve along the second direction through the lead screw and the first nut.

[0013] In some embodiments, the slider is provided with a through hole, the push rod in the first driving mechanism is inserted into the through hole, and the push rod is sealed with the through hole, so that the slider can drive the push rod and the valve plate to move relative to the valve along the second direction.

[0014] In some embodiments, one end of the lead screw is fixedly connected to the turbine, and the other end of the lead screw is rotatably connected to the valve body via a lead screw bearing.

[0015] In some embodiments, the first mounting shaft is rotatably connected to the valve body via at least one first bearing.

[0016] In some embodiments, the second mounting shaft is rotatably connected to the valve body via at least one second bearing.

[0017] According to another aspect of the present disclosure, there is provided a semiconductor process equipment, comprising: a vacuum valve and a reaction chamber as described in any one of the above items, wherein the vacuum valve is used to connect or isolate the internal space of the reaction chamber with the external space.

[0018] The vacuum valve provided by the present disclosure can withstand relatively large reverse pressure and meet the process requirements of semiconductor process equipment.

[0019] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are used to better understand the present solution and do not constitute a limitation of the present disclosure.

[0021] Figure 1 Schematic diagram of a vacuum valve provided according to an embodiment of the present disclosure Figure 1 ;

[0022] Figure 2 Schematic diagram of a vacuum valve provided according to an embodiment of the present disclosure Figure 2 ;

[0023] Figure 3 Schematic diagram of a vacuum valve provided according to an embodiment of the present disclosure Figure 3 ;

[0024] Figure 4 is a cross-sectional schematic diagram of a vacuum valve provided according to an embodiment of the present disclosure;

[0025] Figure 5 It is a partial cross-sectional schematic diagram of a vacuum valve provided according to an embodiment of the present disclosure.

[0026] Explanation of the reference numerals: 100-valve body; 101-sliding hole; 200-valve plate; 300-first driving mechanism; 301-first cylinder; 302-first bracket; 302a-long hole; 303-push rod; 304-fastening nut; 400-second driving mechanism; 401-second cylinder; 402-second bracket; 403-rack; 404-spur gear; 430-first transmission assembly; 431-first bevel gear; 432-second bevel gear; 433-first mounting shaft; 434-second mounting shaft; 435-first bearing; 436-second bearing; 437-worm; 438-turbine; 450-second transmission assembly; 451-screw; 452-first nut; 453-slider; 454-screw bearing; 500-bellows. DETAILED DESCRIPTION

[0027] The following is a description of exemplary embodiments of the present disclosure in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered as merely exemplary. Therefore, it should be recognized by those of ordinary skill in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0028] In the related art, in semiconductor process equipment, the pressure on both sides of the vacuum valve will change due to different process conditions. In some scenarios, larger-sized vacuum valves need to withstand greater reverse pressure, which places higher requirements on the mechanical structure of the vacuum valve.

[0029] In order to overcome the above-mentioned problems, the present embodiment provides a vacuum valve, which is provided with a second driving mechanism. The first transmission component in the second driving mechanism is used to amplify the driving force provided by the second driving member in the second driving mechanism and transmit the amplified force to the second transmission component in the second driving mechanism. The second transmission component is used to convert the amplified force into a force along the second direction to drive the valve plate to move along the second direction, so that the force applied to the valve plate by the second transmission component can withstand the reverse pressure borne by the valve plate.

[0030] Figure 1 Schematic diagram of a vacuum valve provided by an embodiment of the present disclosure Figure 1 ; Figure 2 Schematic diagram of a vacuum valve according to an embodiment of the present disclosure Figure 2 ; Figure 3 is a rear view of a vacuum valve provided according to an embodiment of the present disclosure.

[0031] This embodiment provides a vacuum valve for semiconductor process equipment, which is used to isolate the reaction chamber in the semiconductor process equipment from the external space. Figures 1 to 3The vacuum valve includes: a valve body 100 and a valve plate 200, wherein the valve plate 200 is located at one end of the valve body 100; a first driving mechanism 300, connected to the valve plate 200, for driving the valve plate 200 to move relative to the valve body 100 in a first direction (vertical, i.e., up and down direction); a second driving mechanism 400, connected to the valve plate 200, for driving the valve plate 200 to move relative to the valve body 100 in a second direction (front and back direction), wherein the second direction is perpendicular to the first direction. The second driving mechanism 400 includes: a second driving member, a first transmission assembly 430, and a second transmission assembly 450, wherein the first transmission assembly 430 is used to amplify the driving force provided by the second driving member and transmit the amplified force to the second transmission assembly 450, and the second transmission assembly 450 is used to convert the amplified force into a force along the second direction to drive the valve plate 200 to move along the second direction.

[0032] The valve body 100 is the main bearing component of the vacuum valve, and some components of the first drive mechanism 300 and the second drive mechanism 400 are installed on the valve body 100. Part of the surface of the valve body 100 is fixedly connected to the reaction chamber in the semiconductor process equipment. A valve plate 200 is provided at one end of the valve body 100, and under the driving action of the first drive mechanism 300 and the second drive mechanism 400, the valve plate 200 can move relative to the valve body 100.

[0033] For ease of description, taking the valve plate 200 located at the upper end of the valve body 100 as an example, the up and down direction is the vertical direction, that is, the up and down direction is the first direction; the second direction is the front and back direction, and the left and right direction is perpendicular to the first and second directions.

[0034] The valve body 100 may include a substantially prismatic bearing frame or bearing box. Taking the case where the valve body 100 includes a bearing frame as an example, the bearing frame may include a top plate and a bottom plate that are relatively arranged, and a left plate and a right plate that are relatively arranged, and the left plate and the right plate are respectively connected between the top plate and the bottom plate; the bearing frame encloses an installation space. When the valve body 100 includes a bearing box, the bearing box may include a top plate and a bottom plate that are relatively arranged, a left plate and a right plate that are relatively arranged, and a front cover plate and a rear cover plate that are relatively arranged, and the left plate and the right plate, the front cover plate and the rear cover plate are respectively connected between the top plate and the bottom plate, and the left plate and the right plate are respectively connected between the front cover plate and the rear cover plate; the bearing box encloses an installation space. In addition, the valve body 100 may also include a structure such as a bracket or a mounting plate for mounting other components, which may be specifically arranged according to actual needs. It can be understood that the specific structure of the valve body 100 is not limited to this, and this embodiment is only used as an example here; the specific structure of the valve body 100 may be arranged according to actual needs.

[0035] The valve plate 200 is located at the upper end of the valve body 100, and the valve plate 200 is located outside the installation space. The valve plate 200 can be roughly flat. The specific size of the valve plate 200 can be set according to actual needs. For example, the valve plate 200 is roughly rectangular, the length direction of the valve plate 200 is the left-right direction, the width direction of the valve plate 200 is the up-down direction, and the thickness direction of the valve plate 200 is the front-back direction.

[0036] At least part of the first driving mechanism 300 is located in the installation space of the valve body 100. Exemplarily, the first driving mechanism 300 can be a cylinder driving mechanism or a motor driving mechanism. Taking the cylinder driving mechanism as an example, the first driving mechanism 300 can include a first cylinder 301, which can be fixedly mounted on the valve body 100, and the output end of the first cylinder 301 can be fixedly connected to the valve plate 200. Taking the motor driving mechanism as an example, the first driving mechanism 300 can include a driving motor, which can be a stepping motor or a servo motor; the driving motor can be fixedly mounted on the valve body 100, and the output end of the driving motor is provided with a threaded rod; the valve plate 200 can be provided with a mounting hole, and the mounting hole is provided with an internal thread, and the threaded rod of the driving motor is inserted into the mounting hole and the external thread of the threaded rod is engaged with the internal thread of the mounting hole, so that the driving motor can drive the valve plate 200 to move up and down.

[0037] At least part of the second drive mechanism 400 is located in the installation space of the valve body 100. Exemplarily, the second drive mechanism 400 includes a second drive member, a first transmission assembly 430 and a second transmission assembly 450 connected in sequence. Among them, the second drive member can be a drive motor or a cylinder. The output end of the second drive member is connected to the first transmission assembly 430, and the first transmission assembly 430 can include at least one of a worm gear transmission assembly and a gear transmission assembly. The first transmission assembly 430 is used to amplify the thrust provided by the second drive member by several times, and the specific amplification factor is related to the reduction ratio of the first transmission assembly 430. The first transmission assembly 430 is connected to the second transmission assembly 450, and the second transmission assembly 450 is used to convert the rotational motion output by the first transmission assembly 430 into a linear movement along the second direction. The second transmission assembly 450 can include one of a screw nut assembly and a gear rack assembly.

[0038] The vacuum valve provided in this embodiment is in an open state, and the valve plate 200 is in the lowest position; when it needs to be switched to a closed state, the first drive mechanism 300 drives the valve plate 200 to move to the highest position, and the second drive mechanism 400 drives the valve plate 200 to move in a direction away from the observation position, so as to achieve the sealing of the vacuum valve. The observation position can be the front side or the rear side of the vacuum valve, which can be set according to actual needs.

[0039] The vacuum valve provided in this embodiment, through the above-mentioned arrangement, the first transmission component 430 can amplify the driving force provided by the second driving component, and the second transmission component 450 can convert the amplified driving force into a force along the second direction to drive the valve plate 200 to move along the second direction, so that the force applied to the valve plate 200 by the second transmission component 450 can withstand the reverse pressure borne by the valve plate 200, thereby enabling the vacuum valve to be applied in scenarios that need to withstand greater reverse pressure, thereby meeting the process requirements of semiconductor process equipment.

[0040] In some embodiments, in order to make the structure of the vacuum valve more compact, the first driving mechanism 300 includes: a first cylinder 301, a first bracket 302 and a push rod 303. The first cylinder 301 is fixedly connected to the valve body 100, the axial direction of the first cylinder 301 can be parallel to the up-down direction, and the output end of the first cylinder 301 is fixedly connected to the first bracket 302. The axial direction of the push rod 303 can be parallel to the up-down direction, one end of the push rod 303 is connected to the first bracket 302, and the other end of the push rod 303 is fixedly connected to the valve plate 200, so that the first cylinder 301 can drive the first bracket 302, the push rod 303 and the valve plate 200 to move along the first direction (i.e., the up-down direction).

[0041] In order to improve the stability of the movement, there are at least two first cylinders 301, and the at least two first cylinders 301 can be spaced apart in the left-right direction, and the first cylinder 301 can perform telescopic movement in the up-down direction. Taking the case where there are two first cylinders 301 as an example, the two first cylinders 301 are respectively arranged near the left and right sides of the valve body 100, for example, the two first cylinders 301 can be symmetrically distributed.

[0042] The first bracket 302 is extended in the left-right direction, which is convenient for the first bracket 302 to be connected with the output end of each first cylinder 301. The output end of the first cylinder 301, such as the piston rod, can be inserted into the first bracket 302. The piston rod of the first cylinder 301 is provided with a limiting boss, which is used to be mounted on the upper surface of the first bracket 302; the limiting boss can be formed by a sleeve or a fastening nut 304 sleeved on the piston rod. The part of the piston rod of the first cylinder 301 that extends downward from the first bracket 302 can cooperate with the fastening nut 304, and the fastening nut 304 can abut against the lower surface of the first bracket 302. In this way, it can be ensured that the first bracket 302 moves downward or upward with the piston rod of the first cylinder 301.

[0043] Optionally, the first bracket 302 is provided with a long hole 302 a, and the long hole 302 a extends along the second direction, that is, the front-to-back direction, so that the output end of the first cylinder 301 can move along the front-to-back direction relative to the first bracket 302 .

[0044] The axial direction of the push rod 303 is parallel to the up-down direction. There are at least two push rods 303, one end of each of the two push rods 303 is fixedly connected to the first bracket 302, and the other end of each of the two push rods 303 is fixedly connected to the valve plate 200. The top plate of the valve body 100 is provided with a first through hole adapted to the push rod 303, and the aperture of the first through hole can be slightly larger than the diameter of the push rod 303, so as to avoid friction loss between the push rod 303 and the hole wall of the first through hole when the push rod 303 moves relative to the valve body 100.

[0045] In other examples, the lower end of the first cylinder 301 can be fixedly connected to the first bracket 302; the lower end of the push rod 303 can be movably connected to the first bracket 302, so that the push rod 303 can move up or down with the first bracket 302, and the push rod 303 can move in a second direction relative to the first bracket 302.

[0046] In some examples, the vacuum valve further includes: a bellows 500, which is located at the end of the valve body 100 facing the valve plate 200, and the bellows 500 is sleeved outside the push rod 303, and the bellows 500 is sealed with the valve body 100 and the push rod 303 respectively to isolate the internal space of the reaction chamber in the semiconductor process equipment from the external space.

[0047] Among them, each push rod 303 is respectively sleeved with a bellows 500. The upper end of the bellows 500 is fixedly connected to the top plate of the valve body 100 and sealed. The lower end of the bellows 500 is fixedly connected to the push rod 303 and sealed. When the push rod 303 moves in the vertical direction, the bellows 500 is compressed or stretched accordingly. When the push rod 303 moves in the front-back direction, the bellows 500 can also be deformed accordingly. In this way, the bellows 500 can not only reliably isolate the internal space of the reaction chamber from the external space, but also allow the push rod 303 to move in the first direction and the second direction relative to the valve body 100.

[0048] In some embodiments, the first transmission assembly 430 may include a gear transmission assembly; the gear transmission assembly includes: a first bevel gear 431, a second bevel gear 432, a first mounting shaft 433, and a second mounting shaft 434; the axial direction of the first mounting shaft 433 is parallel to the second direction (i.e., the front-to-back direction); the direction of the second mounting shaft 434 is parallel to the first direction (i.e., the up-down direction); the first bevel gear 431 is mounted on the first mounting shaft 433, the first bevel gear 431 is meshed with the second bevel gear 432, and the second bevel gear 432 is mounted on the second mounting shaft 434. The reduction ratio of the gear transmission assembly can be set according to actual needs.

[0049] In some examples, the second driving member includes a second cylinder 401, which is fixedly connected to the valve body 100; a second bracket 402 is provided at the output end of the second cylinder 401. The first transmission assembly 430 also includes a rack 403 and a spur gear 404, the rack 403 is fixedly connected to the second bracket 402, the rack 403 and the spur gear 404 are meshed, and the spur gear 404 is fixedly connected to the first mounting shaft 433.

[0050] Optionally, the second cylinder 401 is fixedly connected to the end of the valve body 100 facing away from the valve plate 200, that is, the second cylinder 401 is arranged close to the bottom end of the valve body 100, for example, the second cylinder 401 can be fixedly connected to the bottom plate of the valve body 100. The first cylinder 301 in the first driving mechanism 300 is fixedly connected to the end of the valve body 100 facing the valve plate 200, for example, the first cylinder 301 is fixedly connected to the top plate in the valve body 100.

[0051] The second cylinder 401 has at least one. For example, the second cylinder 401 has two, and the lower ends of the two second cylinders 401 are fixedly connected to the second bracket 402 respectively. The upper end of the second cylinder 401 can be fixedly connected to the second bracket 402. The second bracket 402 may include a long strip-shaped support plate, and the length direction of the support plate is parallel to the left and right direction; the support plate may be connected to a vertical mounting plate, and the vertical mounting plate is extended in the up-down direction, and the vertical mounting plate is fixedly mounted with a rack 403, and the rack 403 is extended in the up-down direction. Among them, the length of the rack 403 extending in the up-down direction can be set according to actual needs.

[0052] The spur gear 404 meshing with the rack 403 may be located at the front side (or rear side) of the first bevel gear 431. In order to prevent the second bracket 402 from interfering with the rotation of the spur gear 404 and the first mounting shaft 433, the support plate in the second bracket 402 may be staggered with the first mounting shaft 433, and the support plate may be located at the front side (or rear side) of the spur gear 404, and the support plate is located at the lower side (or upper side) of the first mounting shaft 433; the vertical mounting plate may be connected to the rear side (or front side) of the support plate, and the vertical mounting plate is located at the left side or right side of the spur gear 404, so as to facilitate the meshing of the rack 403 mounted on the vertical mounting plate with the spur gear 404.

[0053] like Figure 4As shown, the first installation shaft 433 is rotatably connected to the valve body 100 through at least one first bearing 435. Exemplarily, a first installation seat may be provided in the valve body 100, and the first bearing 435 is fixedly connected to the first installation seat, and the first installation shaft 433 cooperates with the first bearing 435 to reliably support the first installation shaft 433 through the first bearing 435, thereby ensuring the installation reliability of the first installation shaft 433. The number of the first bearings 435 can be set according to actual needs; when there are multiple first bearings 435, the multiple first bearings 435 can be distributed at intervals along the axial direction of the first installation shaft 433.

[0054] The specific shape and setting position of the first mounting seat can be set according to actual needs, as long as it does not interfere with other components. For example, the first mounting seat may include a fixing portion, which may be a column with a central hole, and the first bearing 435 is fixed in the central hole; the fixing portion may be connected to a mounting lug, and the mounting lug may have at least two mounting lugs, and the mounting lugs are used to fix and install the first mounting seat. The mounting lugs may be connected to the valve body 100 through a bracket, or the mounting lugs may be connected to other components that are relatively fixed to the valve body 100.

[0055] In other examples, the second driving member may include a driving motor, which may be a servo motor or a stepper motor; the output end of the driving motor may be connected to the first mounting shaft 433 through a coupling, or the output end of the driving motor may be provided with an output gear, and the first mounting shaft 433 may be provided with a spur gear 404 meshing with the output gear.

[0056] In some embodiments, the first transmission assembly 430 further includes a worm gear transmission assembly. The worm gear transmission assembly includes: a turbine 438 and a worm 437. The turbine 438 is meshed with the worm 437. The worm 437 is fixedly connected to the second mounting shaft 434, so that the worm 437 and the second mounting shaft 434 rotate with the second bevel gear 432. The axial direction of the worm 437 is parallel to the up and down direction. The upper and lower ends of the worm 437 can be fixedly connected to the second mounting shaft 434 respectively; or, the worm 437 can be integrally arranged with the second mounting shaft 434.

[0057] The worm gear transmission assembly has good compactness and good motion reliability; this embodiment utilizes the torque-increasing function of the worm gear assembly to amplify the thrust of the second cylinder 401 by several times, and the amplification factor of the thrust of the second cylinder 401 by the worm gear assembly is related to, for example, equal to, the reduction ratio of the worm gear transmission assembly, and the reduction ratio of the worm gear transmission assembly can be set according to actual needs, which is not specifically limited in this embodiment. In addition, the worm gear transmission assembly can also have a self-locking performance, which is conducive to reliably keeping the valve plate 200 in a preset position.

[0058] Optionally, the second bevel gear 432 may be fixedly disposed at the lower end of the second mounting shaft 434 , and the worm 437 may be disposed relatively close to the middle of the second mounting shaft 434 .

[0059] Optionally, the second installation shaft 434 is rotatably connected to the valve body 100 through at least one second bearing 436. Exemplarily, the upper end and the lower end of the second installation shaft 434 are supported by the second bearings 436 respectively; wherein, the second bearing 436 supporting the upper end of the second installation shaft 434 can be fixedly connected to the top plate of the valve body 100; the second bearing 436 supporting the lower end of the second installation shaft 434 can be fixedly connected to the bearing fixing plate, and the bearing fixing plate is fixedly connected to the valve body 100. It can be understood that the shape and setting position of the bearing fixing plate can be set according to actual needs, as long as it does not interfere with other components.

[0060] Figure 4 is a cross-sectional schematic diagram of a vacuum valve provided according to an embodiment of the present disclosure; Figure 5 is a partial cross-sectional schematic diagram of a vacuum valve provided according to an embodiment of the present disclosure. Figure 4 The schematic cross-sectional view is a forward-looking cross-sectional view with a plane passing through the central axes of the two push rods and parallel to the up-down direction as the cross-sectional view; Figure 5 It is a schematic diagram of a partial section looking to the right, with the section plane passing through the center axis of the screw and parallel to the up and down directions as the section plane. Figures 1 to 3 , hide the slider.

[0061] Please refer to Figure 4 and Figure 5 , and continue to refer to Figures 1 to 3 In some embodiments, the second transmission assembly 450 includes: a lead screw 451, a first nut 452 and a slider 453; the axial direction of the lead screw 451 is parallel to the second direction, that is, the front-to-back direction, the lead screw 451 is fixedly connected to the turbine 438, the lead screw 451 is meshed with the first nut 452, and the first nut 452 is fixedly connected to the slider 453; the valve body 100 is provided with a sliding hole 101, and the slider 453 is slidably arranged in the sliding hole 101, so that the turbine 438 can drive the slider 453 to move relative to the valve body 100 along the second direction, that is, the front-to-back direction, through the lead screw 451 and the first nut 452.

[0062] Exemplarily, the rear end of the lead screw 451 can be fixedly connected to the turbine 438; for example, the turbine 438 can be provided with an axial hole, and the rear end of the lead screw 451 is inserted into the axial hole; in order to ensure that the lead screw 451 and the turbine 438 rotate synchronously, the turbine 438 and the lead screw 451 can also be connected by a key. The front end of the lead screw 451 can be matched with the lead screw bearing 454, and the lead screw bearing 454 can be fixedly connected to the valve body 100, thereby improving the installation reliability of the lead screw 451. Of course, the rear end of the lead screw 451 can also be fixed to the valve body 100 through the lead screw bearing 454, and the front end of the lead screw 451 can be matched with the turbine 438.

[0063] The first nut 452 can be fixedly connected to the slider 453 by common fixing methods such as welding or fastening, or the first nut 452 and the slider 453 can be integrally arranged by an integral molding process. Exemplarily, a through hole is arranged in the slider 453, and the axial direction of the through hole is parallel to the second direction, that is, the front-to-back direction; the first nut 452 is inserted into the through hole, and the first nut 452 has a connecting portion extending along its radial direction, and the connecting portion is arranged near the front end of the first nut 452, and the connecting portion is fastened to the slider 453 by a fastener. Among them, the slider 453 can be cylindrical, that is, the slider 453 can be a cylinder, and the axial direction of the slider 453 is parallel to the second direction, that is, the front-to-back direction; the sliding hole 101 in the valve body 100 is a circular hole for the slider 453 to slide along the second direction.

[0064] Optionally, in order to improve the compactness of the structure, a avoidance groove is provided at the rear end of the first nut 452, and the shape of the avoidance groove is adapted to the shape of the turbine 438, so that when the slider 453 and the first nut 452 move backward, the avoidance groove can accommodate at least part of the turbine 438.

[0065] In this example, by adopting the lead screw and nut mechanism, precise control of the movement of the valve plate 200 along the second direction can be achieved, which is beneficial to improving the accuracy of the movement control of the valve plate 200.

[0066] In some examples, the slider 453 is provided with a through hole, the axial direction of the through hole is parallel to the up-down direction, and the number of the through holes can be equal to the number of the push rods 303; for example, when there are two push rods 303, there are also two through holes. The push rod 303 in the first driving mechanism 300 is inserted into the through hole, and the push rod 303 is sealed with the through hole, so that when the second transmission assembly 450 drives the slider 453 to move in the second direction, the slider 453 can drive the push rod 303 and the valve plate 200 to move together.

[0067] The vacuum valve provided in this embodiment is in a state where the reaction chamber is opened, and the valve plate 200 is in the lowest position; when it is necessary to switch to a state where the reaction chamber is closed, the piston rod of the first cylinder 301 is retracted, and the piston rod of the first cylinder 301 drives the first bracket 302 and the push rod 303 to move upward, and the push rod 303 drives the valve plate 200 to move upward until the valve plate 200 moves to the highest position; then, the piston rod of the second cylinder 401 extends, driving the rack 403 to move vertically upward, and the rack 403 drives the spur gear meshing therewith. 404 rotates counterclockwise, the spur gear 404 drives the first bevel gear 431 to rotate counterclockwise through the first mounting shaft 433, the first bevel gear 431 drives the second bevel gear 432 and the second mounting shaft 434 to rotate from left to right, the worm 437 fixed on the second mounting shaft 434 drives the turbine 438 and the lead screw 451 to rotate counterclockwise, the lead screw 451 drives the slider 453 to move in the direction away from the observation position through the first nut 452, and finally drives the push rod 303 and the valve plate 200 to move in the direction away from the observation position, so as to achieve the sealing of the vacuum valve. Among them, the observation position can be the front side or the rear side of the vacuum valve, which can be set according to actual needs.

[0068] When the reaction chamber needs to be switched to an open state, the second cylinder 401 can be controlled to be retracted, and the valve plate 200 can be driven to move to a position toward the observation position, and then the first cylinder 301 can be controlled to be extended, and the valve plate 200 is located at the lowest position.

[0069] This embodiment also provides a semiconductor process equipment, including: a vacuum valve and a reaction chamber as described in any of the above items, wherein the vacuum valve is used to connect or isolate the internal space of the reaction chamber with the external space. The structure, function and implementation process of the vacuum valve are the same as those of the vacuum valve in any of the above embodiments, and will not be described in detail in this embodiment.

[0070] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0071] In the description of the present disclosure, it is necessary to understand that the terms "up", "down", "left", "right", "top", "bottom", "inside", "outside", "axial", "longitudinal", "lateral", "vertical", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure.

[0072] In addition, the terms "first", "second", etc. used in the embodiments of the present disclosure are only used for descriptive purposes and should not be understood as indicating or implying relative importance, or implicitly indicating the number of technical features indicated in the embodiments. Therefore, the features defined by the terms "first", "second", etc. in the embodiments of the present disclosure may explicitly or implicitly indicate that at least one of the features is included in the embodiment. In the description of the present disclosure, the word "multiple" means at least two or two or more, such as two, three, four, etc., unless otherwise clearly and specifically defined in the embodiments.

[0073] In the present disclosure, unless otherwise clearly specified or limited in the embodiments, the terms "installed", "connected", "connected" and "fixed" etc. appearing in the embodiments should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integrated connection. It can be understood that it can also be a mechanical connection, an electrical connection, etc.; of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements, or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific implementation situation.

[0074] In the present disclosure, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0075] Although the embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present disclosure. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present disclosure.

Claims

1. A vacuum valve for semiconductor process equipment, the vacuum valve comprising: A valve body and a valve plate, wherein the valve plate is located at one end of the valve body; a first driving mechanism, connected to the valve plate, and used to drive the valve plate to move relative to the valve body along a first direction; a second driving mechanism connected to the valve plate and used to drive the valve plate to move relative to the valve body along a second direction, wherein the second direction is perpendicular to the first direction; Among them, the second driving mechanism includes: a second driving member, a first transmission assembly and a second transmission assembly, the first transmission assembly is used to amplify the driving force provided by the second driving member and transmit the amplified force to the second transmission assembly, and the second transmission assembly is used to convert the amplified force into a force along the second direction to drive the valve plate to move along the second direction.

2. The vacuum valve according to claim 1, wherein: The first driving mechanism comprises: a first cylinder, a first bracket and a push rod; The first cylinder is fixedly connected to the valve body, the first cylinder has at least two, and the output end of the first cylinder is fixedly connected to the first bracket; There are at least two push rods, one end of each of the push rods is connected to the first bracket, and the other end of each of the push rods is fixedly connected to the valve plate, so that the first cylinder can drive the first bracket, the push rod and the valve to move along the first direction.

3. The vacuum valve according to claim 2, wherein the first bracket is provided with a long hole, and the long hole extends along the second direction, so that the output end of the first cylinder can move along the second direction relative to the first bracket.

4. The vacuum valve according to claim 2, further comprising: The bellows is located at the end of the valve body facing the valve plate, and the bellows is sleeved outside the push rod. The bellows is respectively sealed with the valve body and the push rod to isolate the internal space of the reaction chamber in the semiconductor process equipment from the external space.

5. The vacuum valve according to claim 1, wherein: The first transmission assembly includes: a first bevel gear, a second bevel gear, a first mounting shaft and a second mounting shaft; the first bevel gear is mounted on the first mounting shaft, the first bevel gear is meshed with the second bevel gear, and the second bevel gear is mounted on the second mounting shaft; The axial direction of the first mounting axis is parallel to the second direction; The direction of the second mounting axis is parallel to the first direction.

6. The vacuum valve according to claim 5, wherein: The second driving member comprises a second cylinder, the second cylinder is fixedly connected to the valve body; the second cylinder has at least one; the output end of the second cylinder is provided with a second bracket; The first transmission assembly further includes: a rack and a spur gear, wherein the rack is fixedly connected to the second bracket, the rack is meshed with the spur gear, and the spur gear is fixedly connected to the first mounting shaft.

7. The vacuum valve according to claim 6, wherein: The second cylinder is fixedly connected to the end of the valve body away from the valve plate; The first cylinder in the first driving mechanism is fixedly connected to the end of the valve body facing the valve plate.

8. The vacuum valve according to claim 5, wherein the first transmission assembly further comprises: A turbine and a worm, the turbine is meshed with the worm, and the worm is fixedly connected to the second mounting shaft, so that the worm and the second mounting shaft rotate with the second bevel gear.

9. The vacuum valve according to claim 8, wherein: The second transmission assembly comprises: a lead screw, a first nut and a slider; the axial direction of the lead screw is parallel to the second direction, the lead screw is fixedly connected to the turbine, the lead screw is meshed with the first nut, and the first nut is fixedly connected to the slider; The valve body is provided with a sliding hole, and the sliding block is arranged in the sliding hole, so that the turbine can drive the sliding block to move relative to the valve along the second direction through the lead screw and the first nut.

10. The vacuum valve according to claim 9, wherein: The slider is provided with a through hole, the push rod in the first driving mechanism is inserted into the through hole, and the push rod is sealed and matched with the through hole, so that the slider can drive the push rod and the valve plate to move relative to the valve along the second direction.

11. The vacuum valve according to claim 9, wherein: One end of the lead screw is fixedly connected to the turbine, and the other end of the lead screw is rotatably connected to the valve body via a lead screw bearing.

12. The vacuum valve according to claim 5, wherein: The first mounting shaft is rotatably connected to the valve body via at least one first bearing.

13. The vacuum valve according to claim 5, wherein: The second mounting shaft is rotatably connected to the valve body via at least one second bearing.

14. A semiconductor process equipment comprising: The vacuum valve and reaction chamber according to any one of claims 1 to 13, wherein the vacuum valve is used to connect or isolate the internal space of the reaction chamber with the external space.

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