Sintering method of tubular target material

Abstract

The present invention relates to a sintering method of a tubular target material, which adopts a tubular target material supporting device, the device comprises a disc base and a plurality of L-shaped supporting blocks, a through hole is opened in the middle of the disc base, a plurality of slideways and radial strip grooves are evenly arranged on the disc base, the L-shaped supporting block is composed of a transverse slider and a longitudinal supporting block, the transverse slider is placed in the slideway of the disc base and is movable; the specific operation steps of the method are: a layer of alumina fine sand is spread in the slideway of the disc base and on the surface of the disc base, a tubular target material blank is vertically placed on the disc base, the longitudinal supporting block of the L-shaped supporting block is adjusted to fit the inner wall of the tubular target material blank, and then sintering is performed. The method adopts a movable L-shaped supporting block which can contact with the inner wall of the tube target to provide effective support for the tube target, and can move with the contraction of the inner diameter of the tube target, which can effectively prevent the deformation of the tube target during sintering, and will not hinder the contraction of the target material, and can improve the density of the target material and the sintering yield rate.

Description

Technical Field

[0001] The invention relates to a target material sintering method, in particular to a tubular target material sintering method. Background Art

[0002] Vertical sintering is usually adopted for sintering tubular targets. This sintering method has the advantages of high furnace utilization, easy operation, and good sintering effect. However, due to gravity during the vertical sintering process, the tube target is prone to internal collapse, bending and other deformations when there is no support inside due to gravity. With the continuous development of thinner and lower-priced liquid crystal module products, the corresponding glass substrates have also shown a clear trend of large-scale. Large-scale single-piece target size is inevitable, and reducing the number of splicing and high-density targets can effectively reduce nodules during magnetron sputtering coating. In order to avoid problems such as low density, internal collapse, and bending during the sintering of tubular targets, the conventional method in the industry is to design fixed support columns inside the tube target. However, the inner diameter shrinks during the sintering and densification of the target, and the method of fixed support inner wall will hinder the shrinkage and densification of the target.

[0003] Chinese utility model patent CN218065947U discloses a support for sintering a rotating target material. The support still has an immovable support column. When in use, the rotating target material is sleeved outside the support column. The inner wall of the rotating target material and the outer wall of the support column form a chamber, that is, the support column does not contact the target material, and an effective support effect cannot be achieved. The support column can only provide support when the target material collapses; since a shrinkage space needs to be reserved between the support column and the inner wall of the tube target, there is still a risk of deformation when the tube target is sintered. Summary of the invention

[0004] The technical problem to be solved by the present invention is: to provide a method for sintering a tubular target material, wherein a tubular target material supporting device adopted in the method is provided with a movable L-shaped supporting block, wherein the vertical supporting block of the L-shaped supporting block can not only contact with the inner wall of the tube target to provide effective support for the tube target, but also can move with the contraction of the inner diameter of the tube target, thereby effectively preventing the tube target from being deformed during sintering, and will not hinder the contraction of the target material; the method is simple and easy to operate, and can improve the density of the target material and the sintering yield.

[0005] The technical solution to solve the above technical problems is: a sintering method for a tubular target material, using a tubular target material supporting device, the tubular target material supporting device includes a disc base and N L-shaped supporting blocks, a through hole is opened in the middle of the disc base, N slideways are evenly distributed on the disc base, and 3 to 15 radial strip grooves are opened on the disc base of two adjacent slideways. The L-shaped supporting block is composed of a transverse slider and a longitudinal supporting block connected to one end of the transverse slider. A plurality of protrusions for supporting the target material are arranged on the side surface of the longitudinal support block facing the transverse slider, and grooves are formed between the protrusions. The end face of the protrusion in contact with the target material is an arc surface. The transverse slider of the L-shaped supporting block is placed in the slideway of the disc base, and one end of the transverse slider connected to the longitudinal support block faces inward. The width of the slideway is greater than the width of the transverse slider, and the value of N is any integer from 2 to 8.

[0006] The sintering method of the tubular target comprises the following steps: (1) Place the tubular target support device in a sintering furnace, spread a layer of alumina fine sand on the surface of the disc base inside the slideway of the disc base and outside the radial strip groove, place the transverse slider of the L-shaped support block on the alumina fine sand in the slideway of the disc base, and the upper end surface of the transverse slider is 1 to 3 mm higher than the upper end surface of the disc base; (2) Place the tubular target blank vertically on the disc base, with the longitudinal support block of the L-shaped support block located in the inner circle of the tubular target; (3) Adjust the position of the L-shaped support block so that the longitudinal support block of the L-shaped support block fits the inner wall of the tubular target material embryo; (4) Sintering the tubular target material blank.

[0007] Furthermore, in step (4), the tubular target material blank is placed in a normal pressure oxygen atmosphere sintering furnace and sintered at 1500-1700° C. for 6-15 hours.

[0008] Furthermore, the width of the transverse slider is 20-50 mm, and the height of the longitudinal support block is 100-800 mm.

[0009] Furthermore, the thickness of the alumina fine sand is 1 to 3 mm.

[0010] Furthermore, the radial strip groove has a width of 3 to 10 mm and a depth of 2 to 5 mm.

[0011] Furthermore, the disc base and the L-shaped support block are made of high temperature resistant alumina or silicon carbide.

[0012] Due to the above structure, the present invention has the following beneficial effects: 1. The method of the present invention is simple and easy to operate. Before sintering, the tube target blank is preliminarily positioned on the tubular target material support device so that the L-shaped support block fits the inner wall of the tube target. During the sintering process, the L-shaped support block can move with the shrinkage of the tube target, and can provide support for the target material without hindering the densification and shrinkage of the target material, thereby preventing the target material from collapsing and deforming, and improving the target material density and sintering yield rate. Experiments have shown that the sintering yield rate of the method of the present invention can basically reach 100%.

[0013] 2. In the tubular target material support device adopted in the present invention, a protrusion and a groove are provided on the side of the longitudinal support block of the L-shaped support block that contacts the target material. The protrusion contacts the inner wall of the tube target to provide support, and the groove provides space for oxygen circulation, which increases the contact surface between the target material and oxygen without affecting the support effect, and is beneficial to improving the target material density.

[0014] 3. In the present invention, a layer of fine aluminum oxide sand is laid between the lateral slider of the L-shaped support block and the slideway of the disc base and on the upper surface of the disc base, which can reduce the shrinkage resistance of the tube target.

[0015] The technical features of a sintering method for a tubular target material of the present invention will be further described below in conjunction with the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 : A three-dimensional diagram of the tubular target material support device of the present invention.

[0017] Figure 2 : Front view of the tubular target material support device of the present invention.

[0018] Figure 3 : Top view of the tubular target material support device of the present invention.

[0019] Figure 4 : Figure 3 AA section view.

[0020] Figure 5 : A diagram showing the use status of the tubular target material support device of the present invention.

[0021] In the figure: 1-disc base, 11-slideway, 12-radial strip groove, 13-through hole, 2-L-shaped support block, 21-transverse slider, 22-longitudinal support block, 23-bump, 24-groove, 3-alumina fine sand.

[0022] P represents a tubular target. DETAILED DESCRIPTION

[0023] To better illustrate the purpose, technical solutions and advantages of the present invention, the present invention will be further described below in conjunction with specific embodiments. It should be understood by those skilled in the art that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0024] The tubular target sintering support device used in each embodiment of the present invention is as follows: Figure 1-Figure 4 As shown, it includes a disc base 1 and four L-shaped support blocks 2. A through hole 13 is opened in the middle of the disc base 1. Four slideways 11 are evenly distributed on the disc base. Seven radial strip grooves 12 are opened on the disc base of two adjacent slideways 11. The radial strip grooves can increase the oxygen contact amount of the bottom target and reduce the shrinkage resistance. The L-shaped support block 2 is composed of a transverse slider 21 and a longitudinal support block 22 connected to one end of the transverse slider. A plurality of protrusions 23 arranged up and down for supporting the target are arranged on one side of the longitudinal support block 22 facing the transverse slider. A groove is formed between the two protrusions. A longitudinal support block 22 has multiple grooves, which can increase the contact surface between the target and oxygen. The end surface of the protrusion 23 in contact with the target is an arc surface. The transverse slider 21 of the L-shaped support block is placed in the slideway 11 of the disc base, and one end of the transverse slider connected with the longitudinal support block 22 faces inward, that is, the longitudinal support block 22 can be located above the through hole 13 of the disc base, there is a gap between the transverse slider and the slideway, the width of the slideway 11 is 1 to 3 mm greater than the width of the transverse slider 21, and the L-shaped support block can move in the slideway 11 of the disc base. The width of the radial strip groove is 3 to 10 mm, the depth is 2 to 5 mm, the width of the transverse slider is 20 to 50 mm, and the height of the longitudinal support block is 100 to 800 mm.

[0025] The disc base 1 and the L-shaped support block 2 in the embodiment of the present invention are made of high temperature resistant aluminum oxide. As an alternative, the disc base and the L-shaped support block can also be made of high temperature resistant silicon carbide.

[0026] Example 1

[0027] The tubular target material support device is placed in the sintering furnace, and a layer of alumina fine sand with a thickness of 2mm is laid on the surface of the disc base inside the slideway of the disc base and outside the radial strip groove. The transverse slider of the L-shaped support block is placed on the alumina fine sand in the slideway of the disc base, and the upper end surface of the transverse slider 21 is 2mm higher than the upper end surface of the disc base 1. In this way, the gravity of the tube target can be concentrated on the L-shaped support block during the sintering process, ensuring that when the tube target shrinks, the L-shaped support block can move synchronously without blocking the shrinkage of the tube target and can also support the inner wall of the tube target. The height of the L-shaped support block is 600mm, the diameter of the disc base is 200mm, and the inner diameter is 100mm.

[0028] (2) Place the ITO tube target (indium oxide: tin oxide = 90:10) blank vertically on the disc base, with the longitudinal support block of the L-shaped support block located in the inner circle of the tube target. The tube target blank is 600 mm long, 186 mm in outer diameter, and 174 mm in inner diameter.

[0029] (3) Adjust the position of the L-shaped support block so that the longitudinal support block of the L-shaped support block fits the inner wall of the tube target embryo, such as Figure 5 shown.

[0030] (4) Place the target material in a normal pressure oxygen atmosphere sintering furnace and sinter at 1600°C for 10 hours.

[0031] 20 ITO tube targets were sintered simultaneously in the same sintering furnace, with an average relative density of 99.52%. The targets had no collapse, bending, cracking, etc., and the sintering yield was 100%.

[0032] Example 2

[0033] (1) Place the tubular target support device in a sintering furnace, spread a layer of alumina fine sand with a thickness of 1 mm on the surface of the disc base inside the slideway of the disc base and outside the radial strip groove, and place the transverse slider of the L-shaped support block on the alumina fine sand in the slideway of the disc base. The upper end surface of the transverse slider 21 is 1 mm higher than the upper end surface of the disc base 1. The height of the L-shaped support block is 200 mm, the diameter of the disc base is 270 mm, and the inner diameter is 150 mm.

[0034] (2) Place the ITO tube target (indium oxide: tin oxide = 90:10) blank vertically on the disc base, with the L-shaped support block located in the inner circle of the tube target. The tube target blank is 250 mm long, 250 mm in outer diameter, and 210 mm in inner diameter.

[0035] (3) Adjust the position of the L-shaped support block so that the longitudinal support block of the L-shaped support block fits the inner wall of the target embryo.

[0036] (4) Place the target material in a normal pressure oxygen atmosphere sintering furnace and sinter at 1600°C for 10 hours.

[0037] 15 ITO tube targets were sintered simultaneously in the same sintering furnace, with an average relative density of 99.63%. There was no collapse, bending, cracking or other phenomena on the targets, and the sintering yield was 100%.

[0038] Example 3

[0039] (1) Place the tubular target support device in the sintering furnace, spread a layer of alumina fine sand with a thickness of 3 mm on the surface of the disc base inside the slideway of the disc base and outside the radial strip groove, and place the transverse slider of the L-shaped support block on the alumina fine sand in the slideway of the disc base. The upper end surface of the transverse slider 21 is 3 mm higher than the upper end surface of the disc base 1. The height of the L-shaped support block is 800 mm, the diameter of the disc base is 300 mm, and the inner diameter is 160 mm.

[0040] (2) Place the ITO tube target (indium oxide: tin oxide = 90:10) blank vertically on the disc base, with the L-shaped support block located in the inner circle of the tube target. The tube target blank is 950 mm long, 260 mm in outer diameter, and 215 mm in inner diameter.

[0041] (3) Adjust the position of the L-shaped support block so that the longitudinal support block of the L-shaped support block fits the inner wall of the target embryo.

[0042] (4) Place the target material blank in a normal pressure oxygen atmosphere sintering furnace and sinter at 1600°C for 10 hours.

[0043] Ten ITO tube targets were sintered simultaneously in the same sintering furnace, with an average relative density of 99.46%. The targets had no collapse, bending, cracking, etc., and the sintering yield was 100%.

[0044] Comparative Example: (1) Use a sintering bracket with a fixed support column to sinter the tube target. The support column is 600 mm high, the disk base is 200 mm in diameter, the inner diameter is 100 mm, and a gap is reserved between the support column and the inner wall of the tube target.

[0045] (2) Place the ITO tube target (indium oxide: tin oxide = 90:10) blank vertically on the disc, with the support column located in the inner circle of the tube target. The tube target blank is 600 mm long, 186 mm in outer diameter, and 174 mm in inner diameter.

[0046] (3) Place the target material in a normal pressure oxygen atmosphere sintering furnace and sinter at 1600°C for 10 hours.

[0047] 20 ITO tube targets were sintered simultaneously in the same sintering furnace, with an average relative density of 99.38%. Some targets (including 2 targets) had collapse, bending, cracking and other phenomena, and the sintering yield was 90%.

[0048] The test results of the target materials obtained by sintering the embodiments of the present invention and the comparative examples are summarized in the following table.

[0049]

[0050] It can be seen from the above table that the average relative density and yield rate of the tubular target material sintered by the present invention are better than those of the target material sintered by the fixed support column method in the comparative example.

Claims

1. A sintering method for a tubular target, characterized in that: A tubular target material support device is used, the tubular target material support device comprising a disc base (1) and N L-shaped support blocks (2), the disc base having a through hole (13) in the middle, the disc base having N slideways (11) evenly distributed thereon, the disc base of two adjacent slideways having 3 to 15 radial strip grooves (12), the L-shaped support block (2) comprising a transverse slider (21) and a longitudinal support block (22) connected to one end of the transverse slider, a plurality of protrusions (23) for supporting the target material being arranged on a side surface of the longitudinal support block facing the transverse slider, grooves (24) being formed between the protrusions, the end surface of the protrusion contacting the target material being an arc surface, the transverse slider of the L-shaped support block being placed in the slideway of the disc base, one end of the transverse slider connected to the longitudinal support block facing inward, the width of the slideway being greater than the width of the transverse slider, and the value of N being any integer between 2 and 8; The following steps are involved: (1) Place the tubular target support device in a sintering furnace, spread a layer of alumina fine sand on the surface of the disc base inside the slideway of the disc base and outside the radial strip groove, place the transverse slider of the L-shaped support block on the alumina fine sand in the slideway of the disc base, and the upper end surface of the transverse slider is 1 to 3 mm higher than the upper end surface of the disc base; (2) Place the tubular target blank vertically on the disc base, with the longitudinal support block of the L-shaped support block located in the inner circle of the tubular target; (3) Adjust the position of the L-shaped support block so that the longitudinal support block of the L-shaped support block fits the inner wall of the tubular target material embryo; (4) Sintering the tubular target material blank.

2. The sintering method of a tubular target according to claim 1, characterized in that: In step (4), the tubular target material blank is placed in a normal pressure oxygen atmosphere sintering furnace and sintered at 1500-1700° C. for 6-15 hours.

3. A sintering method for a tubular target according to claim 1 or 2, characterized in that: The width of the transverse slider is 20 to 50 mm, and the height of the longitudinal support block is 100 to 800 mm.

4. A sintering method for a tubular target according to claim 1 or 2, characterized in that: The thickness of the aluminum oxide fine sand is 1 to 3 mm.

5. A sintering method for a tubular target according to claim 1 or 2, characterized in that: The width of the radial strip groove is 3-10 mm, and the depth is 2-5 mm.

6. A sintering method for a tubular target according to claim 1 or 2, characterized in that: The disc base and the L-shaped support block are made of high temperature resistant aluminum oxide or silicon carbide.

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