A beam quality analyser

Abstract

The application provides a light beam quality analyzer, relates to the technical field of lasers, and comprises a light source, a spectral filter, a light filtering unit, an achromatic lens group, a mirror group and an image sensor, wherein the spectral filter, the light filtering unit, the achromatic lens group and the mirror group are sequentially arranged along the light emitting direction of the light source; the laser emitted by the light source sequentially passes through the spectral filter, the light filtering unit and the achromatic lens group, the achromatic lens group outputs an adjusted light beam, the adjusted light beam is reflected by the mirror group, and the adjusted light beam is transmitted to the image sensor; the achromatic lens group comprises a first lens, a second lens and a third lens which are sequentially arranged along the light emitting direction of the light source; the focal length of the first lens and the focal length of the second lens satisfy the relationship: f / 5<|f1|<|f2|<f / 4. The application helps to improve the measurement accuracy and stability of the light beam quality analyzer.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of laser technology, and in particular to a light beam quality analyzer. BACKGROUND

[0002] With the rapid development of laser technology, laser beams are increasingly widely used in scientific research, industry, medical treatment and other fields. As an important indicator for measuring laser performance, light beam quality directly affects the efficiency and stability of the laser system.

[0003] A high-precision near-infrared laser beam quality measurement and analysis device is disclosed in Chinese Patent No. CN108287059B. The device is placed along the optical path in the order of a laser power adjustable attenuation device, a non-diffractive focusing lens, a high-reflective mirror group, a beam splitter, and two charge-coupled device cameras. The laser power adjustable attenuation device is composed of neutral density filters of different attenuation levels placed on a rotating wheel; the second high-reflective mirror is placed in the reflection path of the first high-reflective mirror, and both are placed on a movable guide rail; the first CCD camera is placed in the reflection path of the beam splitter, and the second CCD camera is placed in the transmission path of the beam splitter. The above-mentioned scheme does not perform spectral filtering on the measured laser, which cannot eliminate the influence of stray light spectrum in the laser on the measurement under general measurement, and does not perform achromatic processing, resulting in insufficient measurement accuracy of wide-spectrum light. Therefore, it is necessary to provide a light beam quality analyzer to improve the measurement accuracy and stability of the light beam quality analyzer. SUMMARY

[0004] Therefore, the present application provides a light beam quality analyzer. By using the achromatic design of the three-piece achromatic lens group, the chromatic aberration of light of different wavelengths can be effectively compensated, the dispersion phenomenon in the optical system is reduced, and the measurement accuracy and stability of the light beam quality analyzer are improved.

[0005] The present application provides a light beam quality analyzer, comprising a light source, a spectral filter, a light filtering unit, an achromatic lens group, a mirror group, and an image sensor, wherein,

[0006] The spectral filter, the light filtering unit, the achromatic lens group, and the mirror group are sequentially arranged along the light emitting direction of the light source;

[0007] The laser emitted by the light source sequentially passes through the spectral filter, the light filtering unit, and the achromatic lens group. The achromatic lens group outputs an adjusted light beam, which is reflected by the mirror group to be transmitted to the image sensor;

[0008] The achromatic lens group comprises a first lens, a second lens, and a third lens arranged in the order along the light emitting direction of the light source;

[0009] The focal length of the first lens and the focal length of the second lens satisfy:

[0010] f / 5 < |f1| < |f2| < f / 4

[0011] Wherein, f1 represents the focal length of the first lens, f2 represents the focal length of the second lens, and f represents the focal length of the achromatic lens group.

[0012] On the basis of the above technical solutions, preferably, the object side of the first lens is convex near the optical axis, the image side of the first lens is convex near the optical axis, the curvature radius of the object side of the first lens is smaller than the curvature radius of the image side of the first lens, the object side of the second lens is concave near the optical axis, the image side of the second lens is flat near the optical axis, the object side of the third lens is convex near the optical axis, the image side of the third lens is concave near the optical axis, and the curvature radius of the object side of the third lens is smaller than the curvature radius of the image side of the third lens.

[0013] On the basis of the above technical solutions, preferably, the achromatic lens group satisfies the following conditions:

[0014] 6 < |R1 / R2| < 6.2

[0015] 1.3 < |R5 / R4| < 1.4

[0016] Wherein, R1 represents the curvature radius of the object side of the first lens, R2 represents the curvature radius of the image side of the first lens, R4 represents the curvature radius of the object side of the third lens, and R5 represents the curvature radius of the image side of the third lens.

[0017] Further preferably, the achromatic lens group satisfies the following conditions:

[0018] L1 / L2 > 3

[0019] L2 < L3 < L4

[0020] Wherein, L1 represents the center thickness of the first lens, L2 represents the center thickness of the second lens, L3 represents the distance between the second lens and the third lens, and L4 represents the center thickness of the third lens.

[0021] Further preferably, the first lens and the second lens form a cemented lens, and the focal length of the cemented lens satisfies:

[0022] 2.5f < f12 < 3f

[0023] Wherein, f12 represents the focal length of the cemented lens, and f represents the focal length of the achromatic lens group.

[0024] More preferably, the ratio of the focal length of the cemented lens to the focal length of the third lens satisfies:

[0025] 1.8 < f12 / f3 < 2

[0026] Wherein, f12 represents the focal length of the cemented lens, and f3 represents the focal length of the third lens.

[0027] More preferably, the refractive index of the first lens is 1.55-1.59, the dispersion coefficient of the first lens is 68-75, the refractive index of the second lens is 1.6-1.63, the dispersion coefficient of the second lens is 53-58, the refractive index of the third lens is 1.52-1.56, and the dispersion coefficient of the third lens is 58-62.

[0028] More preferably, the moving guide rail is further included, the mirror group is fixed to the sliding block of the moving guide rail, and the moving guide rail is used to adjust the distance between the mirror group and the achromatic lens group.

[0029] More preferably, the mirror group includes a first mirror and a second mirror with an inclination angle of 45°, the first mirror and the second mirror are arranged perpendicularly to each other, and the center of the first mirror and the center of the light source are located on the same optical axis.

[0030] More preferably, the light filtering unit, the achromatic lens group, the mirror group, and the moving guide rail are arranged in the packaging shell, the spectral filter and the image sensor are arranged outside the packaging shell, the spectral filter is arranged between the light source and the light filtering unit, and the image sensor and the second mirror are located on the same optical axis.

[0031] The light beam quality analyzer provided by the application has the following beneficial effects relative to the prior art:

[0032] (1) By adopting the achromatic design of the three-piece achromatic lens group, the chromatic aberration of different wavelengths of light can be effectively compensated, the dispersion phenomenon in the optical system is reduced, the first lens is arranged to have positive refractive power, the second lens has negative refractive power, the combination of the two lenses with positive and negative refractive power makes the incident light transition smoothly, which is conducive to correcting the on-axis spherical aberration of the achromatic lens group, the combination of the first lens and the second lens into the cemented lens and the third lens with positive refractive power can balance the spherical aberration and the on-axis chromatic aberration of each other, the focal length is configured as f / 5 < |f1| < |f2| < f / 4, the combination of the two lenses with high and low dispersion coefficients of the material reduces the dispersion while controlling the spherical aberration of the cemented lens, and through the achromatic lens group, the precise measurement of the wide-spectrum light by the light beam analyzer is realized.

[0033] (2) The focal length relationship f / 5<|f1|<|f2|<f / 4 ensures the moderate convergence and divergence of the light beam, the curvature ratio 6<|R1 / R2|<6.2 and 1.3<|R5 / R4|<1.4 of the first lens and the third lens optimizes the spherical aberration and aberration correction effect, and the specific configuration of the lens thickness and the interval L1 / L2>3 and L2<L3<L4 reasonably controls the optical path difference, so that the optical system has good compensation ability, not only ensures the feasibility of the machining and manufacturing of the optical system, but also realizes the precise control of the light beam quality and the stable and reliable optical performance.

[0034] (3) The spectral filter can eliminate the stray spectral components contained in the measuring laser, so as to measure the light beam quality of the main laser, which is beneficial to improve the accuracy of the light beam measurement. BRIEF DESCRIPTION OF DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0036] Figure 1 A flowchart of a light beam quality analyzer provided by the present application is shown.

[0037] Figure 2 A structure diagram of an achromatic lens group provided by the present application is shown.

[0038] Figure 3 An axial aberration curve diagram of the achromatic lens group provided by the present application is shown.

[0039] Figure 4 A ray fan diagram of the achromatic lens group provided by the present application is shown.

[0040] Figure 5 A spot diagram of the achromatic lens group provided by the present application is shown.

[0041] The reference signs are explained as follows: 1, light source; 2, spectral filter; 3, light filtering unit; 31, first light filter; 32, second light filter; 4, light blocking plate; 5, achromatic lens group; 51, first lens; 52, second lens; 53, third lens; 6, mirror group; 61, first mirror; 62, second mirror; 7, image sensor; 8, moving guide rail; 9, packaging shell. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of the present application.

[0043] Referring to Figure 1 The application discloses a kind of light beam quality analyzers, including light source 1, spectral filter 2, optical filter unit 3, achromatic lens group 5, mirror group 6 and image sensor 7, wherein,

[0044] Spectral filter 2, optical filter unit 3, achromatic lens group 5 and mirror group 6 are sequentially arranged along the light emitting direction of light source 1.

[0045] The laser emitted by light source 1 sequentially transmits through spectral filter 2, optical filter unit 3 and achromatic lens group 5, and the achromatic lens group 5 outputs an adjusted light beam, which is reflected by mirror group 6 to be transmitted to image sensor 7.

[0046] In the embodiment, the achromatic lens group 5 includes first lens 51, second lens 52 and third lens 53 arranged sequentially along the light emitting direction of light source 1, the object side surface of the first lens 51 is convex near the optical axis, the image side surface of the first lens 51 is convex near the optical axis, the curvature radius of the object side surface of the first lens 51 is smaller than that of the image side surface of the first lens 51, the object side surface of the second lens 52 is concave near the optical axis, the image side surface of the second lens 52 is flat near the optical axis, the object side surface of the third lens 53 is convex near the optical axis, the image side surface of the third lens 53 is concave near the optical axis, and the curvature radius of the object side surface of the third lens 53 is smaller than that of the image side surface of the third lens 53.

[0047] Further referring to Figure 2 There are three lenses with refractive power in the achromatic lens group 5, and the achromatic lens group 5 sequentially includes the first lens 51 with positive refractive power, the second lens 52 with negative refractive power and the third lens 53 with positive refractive power along the optical axis from the object side to the image side.

[0048] In the embodiment, the refractive powers of the three lenses in the achromatic lens group 5 are properly configured, i.e., the first lens 51 is configured to have a positive refractive power, and the second lens 52 has a negative refractive power, the combination of the two lenses with positive and negative refractive powers can be conducive to correcting the on-axis spherical aberration of the achromatic lens group 5, and since the object side and the image side of the first lens 51 are both convex at the near optical axis, the light entering the first lens 51 can be converged, cooperating with the diverging effect of the second lens, so that the deflection angle of the incident light is reduced, realizing a certain converging effect, cooperating with the design that the object side of the third lens 53 is convex and the image side is concave, which can be conducive to suppressing the aberration of the achromatic lens group 5, and the cemented lens cooperates with the third lens 53 with a positive refractive power, which is conducive to balancing the spherical aberration and the on-axis chromatic aberration generated by each lens.

[0049] The refractive index of the first lens 51 is 1.55-1.59, the dispersion coefficient of the first lens 51 is 68-75, the refractive index of the second lens 52 is 1.6-1.63, the dispersion coefficient of the second lens 52 is 53-58, the refractive index of the third lens 53 is 1.52-1.56, and the dispersion coefficient of the third lens 53 is 58-62. The second lens 52 adopts a higher refractive index with a lower dispersion coefficient, the first lens 51 adopts a medium refractive index with a higher dispersion coefficient, and the third lens 53 adopts a lower refractive index with a medium dispersion coefficient. The gradient configuration enables the three lenses to work cooperatively, while ensuring good light beam transmission efficiency, effectively compensating for chromatic aberration through the complementary effect of different dispersion coefficients, and improving the accuracy of wide-spectrum light measurement.

[0050] In the embodiment, the light beam quality analyzer further comprises a moving guide rail 8 and a light blocking sheet 4, the mirror group 6 is fixed on the sliding block of the moving guide rail 8, the moving guide rail 8 is used to adjust the distance between the mirror group 6 and the achromatic lens group 5, and the light blocking sheet 4 is arranged between the light filtering unit 3 and the achromatic lens group 5. The mirror group 6 comprises a first mirror 61 and a second mirror 62 with an inclination angle of 45°, the first mirror 61 and the second mirror 62 are arranged perpendicular to each other, and the center of the first mirror 61 is located on the same optical axis as the center of the light source 1. The light filtering unit 3, the achromatic lens group 5, the mirror group 6 and the moving guide rail 8 are arranged in the packaging shell 9, the spectral filter 2 and the image sensor 7 are arranged outside the packaging shell 9, the spectral filter 2 is arranged between the light source 1 and the light filtering unit 3, and the image sensor 7 and the second mirror 62 are located on the same optical axis.

[0051] Further, the light to be measured emitted by the light source 1 passes through the spectral filter 2, the light filtering unit 3, and the focused light beam is turned by the mirror group 6 on the moving guide rail 8 to enter the image sensor 7. The spectral filter 2 can be a spectral filter 2 turntable, and different spectral filters 2 can be used by rotating the turntable, so that the stray spectral components in the laser light can be eliminated, and different filters can be used for different waveband lasers. The light filtering unit 3 includes a first filter 31 and a second filter 32, and the first filter 31 and the second filter 32 are both gradient neutral filters, and the relative displacement of the first filter 31 and the second filter 32 can realize continuous stepless adjustment of the laser power density. The light blocking plate 4 is used to block light when not measuring to prevent strong light from entering, the achromatic lens group 5 can eliminate the chromatic aberration of wide spectrum light, and the accuracy of measuring wideband light is increased, the mirror group 6 is fixed on the slider of the guide rail module, and the slider is controlled to move by a high-precision servo motor, so that the optical path between the achromatic lens group 5 and the image sensor 7 (CCD or CMOS) is changed, the light spots at multiple positions before and after the beam waist of the focused light beam are changed, and the characteristic parameters of the focused light beam are fitted when measuring different positions, so that the beam parameters of the light to be measured are calculated.

[0052] In the embodiment of the application, the achromatic lens group 5 satisfies the following relationship equation:

[0053] f / 5<|f1|<|f2|<f / 4

[0054] 6<|R1 / R2|<6.2

[0055] 1.3<|R5 / R4|<1.4

[0056] L1 / L2>3

[0057] L2<L3<L4

[0058] wherein, f1 represents the focal length of the first lens 51, f2 represents the focal length of the second lens 52, f represents the focal length of the achromatic lens group 5, R1 represents the radius of curvature of the object side surface of the first lens 51, R2 represents the radius of curvature of the image side surface of the first lens 51, R4 represents the radius of curvature of the object side surface of the third lens 53, R5 represents the radius of curvature of the image side surface of the third lens 53, L1 represents the central thickness of the first lens 51, L2 represents the central thickness of the second lens 52, L3 represents the distance between the second lens 52 and the third lens 53, and L4 represents the central thickness of the third lens 53. The focal length relationship (f / 5<|f1|<|f2|<f / 4) ensures the moderate convergence and divergence of the light beam, the curvature ratio of the first lens 51 and the third lens 53 (6<|R1 / R2|<6.2 and 1.3<|R5 / R4|<1.4) optimizes the spherical aberration and coma correction effect, and the specific configuration of the lens thickness and the distance (L1 / L2>3 and L2<L3<L4) reasonably controls the optical path difference, so that the optical system has good compensation ability, not only ensures the feasibility of the machining and manufacturing of the optical system, but also realizes the precise control of the light beam quality and the stable and reliable optical performance.

[0059] For the cemented lens composed of the first lens 51 and the second lens 52 in the achromatic lens group 5, the cemented lens satisfies the following relationship equation:

[0060] 2.5f<f12<3f

[0061] 1.8<f12 / f3<2

[0062] wherein, f12 represents the focal length of the cemented lens, f represents the focal length of the achromatic lens group 5, and f3 represents the focal length of the third lens 53. By cementing the first lens 51 and the second lens 52, and strictly controlling the focal length range of the cemented lens (2.5f<f12<3f) and the focal length ratio with the third lens 53 (1.8<f12 / f3<2), the specific focal length configuration relationship ensures that the cemented lens and the third lens 53 have good optical matching, realize better chromatic aberration correction effect and spherical aberration control ability, and make the entire achromatic lens group 5 have the characteristics of compact structure and stable reliability.

[0063] By adopting the achromatic design of the three-piece achromatic lens group 5, the chromatic aberration of different wavelengths of light can be effectively compensated, and the chromatic dispersion phenomenon in the optical system is reduced. At the same time, the first lens 51 is arranged to have positive refractive power, and the second lens 52 has negative refractive power. The combination of the two lenses with positive and negative refractive powers can be beneficial to correcting the on-axis spherical aberration of the achromatic lens group 5 and bearing part of the focal power. The focal length is configured as f / 5<|f1|<|f2|<f / 4, and the cooperation of the cemented lens and the third lens 53 with positive refractive power is beneficial to balancing the spherical aberration and on-axis chromatic aberration generated by each other.

[0064] In one example, the total focal length of the achromatic lens group 5 is 500 mm, and the length of the achromatic lens group 5 is 16 mm. The first lens 51 has a refractive index of 1.57, a dispersion coefficient of 71.3, an object-side radius of curvature of 452 mm, an image-side radius of curvature of 74 mm, a center thickness of 6.7 mm, and a focal length of 112 mm. The second lens 52 has a refractive index of 1.61, a dispersion coefficient of 55.8, an object-side radius of curvature of -74 mm, a center thickness of 2 mm, and a focal length of -121 mm. The refractive index of the third lens 53 is 1.54, the dispersion coefficient of the third lens 53 is 1.54, the radius of curvature of the object side of the third lens 53 is 106 mm, the radius of curvature of the image side of the third lens 53 is 141 mm, the center thickness of the third lens 53 is 3.81 mm, and the focal length of the third lens 53 is 761 mm. The focal length of the cemented lens is 1446 mm.

[0065] like Figure 3 As shown, Figure 3 This is an axial aberration curve for achromatic lens group 5. This curve demonstrates the chromatic aberration correction effect of the optical system within the wavelength range of 0.486 μm to 0.656 μm. As can be seen from the graph, the three curves representing different wavelengths intersect near the zero point, and the curves are relatively flat, indicating that the system has good chromatic aberration correction capability. Furthermore, the aberration range is controlled within a small interval, and the curves do not exhibit drastic fluctuations, indicating that the optical system has stable optical performance and good image quality. Achromatic lens group 5 achieves effective chromatic aberration control and excellent optical performance.

[0066] like Figure 4 As shown, Figure 4 The image shows the light fan plots of achromatic lens group 5, illustrating the propagation of light in both the ey and ex directions. The plots display the propagation trajectories of three different wavelengths (0.486 μm, 0.563 μm, and 0.656 μm). It can be seen that the blue light exhibits a larger arc-shaped distribution, while the red and green light are relatively concentrated. The similar light distribution characteristics shown in the fan plots in both directions indicate that the optical system has consistent light control capabilities in different directions. The convergence and distribution patterns of the light rays demonstrate that the optical system achieves effective chromatic aberration control, reflecting the excellent beam transmission characteristics and stable optical performance of achromatic lens group 5.

[0067] like Figure 5 As shown, Figure 5 The image shown is a dot plot of achromatic lens group 5, illustrating the imaging performance of achromatic lens group 5 at the 0-degree object plane and the 0.000mm image plane. Figure 5The middle shows a regular circular light spot, with an Airy disk radius of 35.83 μm, an RMS radius of 0.026, and a GEO radius of 0.072. The circular profile is clear and complete, and the center point is marked clearly, indicating that the system has good imaging quality. The light rays of three different wavelengths (0.486133 μm, 0.587562 μm, and 0.656273 μm) are converged ideally, reflecting that the achromatic lens group 5 has excellent chromatic aberration correction capability and stable optical performance.

[0068] Unless otherwise defined, technical terms used in the present application shall be understood as commonly understood by one of ordinary skill in the art to which the present application belongs. The terms "first", "second", and similar terms used in the present application do not indicate any order, number, or importance, but are only used to distinguish different components. Similarly, the terms "one" or "an" and the like do not indicate a quantity limitation, but indicate the existence of at least one. The terms "connected" or "connected" and the like do not mean a physical or mechanical connection, but can include an electrical connection, whether direct or indirect. The terms "upper", "lower", "left", "right", and the like are only used to indicate relative positional relationships, and when the absolute positions of the described objects are changed, the relative positional relationships also change accordingly.

[0069] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A beam quality analyser characterised in that, The application relates to a laser imaging device, comprising a light source (1), a spectral filter (2), a light filtering unit (3), an achromatic lens group (5), a mirror group (6) and an image sensor (7), wherein, The spectral filter (2), the light filtering unit (3), the achromatic lens group (5) and the mirror group (6) are sequentially arranged along the light emitting direction of the light source (1); The laser emitted by the light source (1) sequentially passes through the spectral filter (2), the light filtering unit (3) and the achromatic lens group (5), the achromatic lens group (5) outputs an adjusted light beam, and the adjusted light beam is reflected by the mirror group (6) so as to be transmitted to the image sensor (7); The achromatic lens group (5) comprises a first lens (51), a second lens (52) and a third lens (53) which are sequentially arranged along the light emitting direction of the light source (1); The achromatic lens group (5) satisfies the following conditions: 6 1.3 Wherein, R1 represents the curvature radius of the object side surface of the first lens (51), R2 represents the curvature radius of the image side surface of the first lens (51), R4 represents the curvature radius of the object side surface of the third lens (53), and R5 represents the curvature radius of the image side surface of the third lens (53); The focal length of the first lens (51) and the focal length of the second lens (52) satisfy the following condition: f / 5 Wherein, f1 represents the focal length of the first lens (51), f2 represents the focal length of the second lens (52), and f represents the focal length of the achromatic lens group (5).

2. The beam quality analyzer of claim 1, wherein, The object side surface of the first lens (51) is convex near the optical axis, the image side surface of the first lens (51) is convex near the optical axis, the curvature radius of the object side surface of the first lens (51) is greater than the curvature radius of the image side surface of the first lens (51), the object side surface of the second lens (52) is concave near the optical axis, the image side surface of the second lens (52) is a plane near the optical axis, the object side surface of the third lens (53) is convex near the optical axis, the image side surface of the third lens (53) is concave near the optical axis, and the curvature radius of the object side surface of the third lens (53) is smaller than the curvature radius of the image side surface of the third lens (53).

3. The beam quality analyzer of claim 1, wherein, The achromatic lens group (5) satisfies the following conditions: L1 / L2>3 L2 Wherein, L1 represents the central thickness of the first lens (51), L2 represents the central thickness of the second lens (52), L3 represents the distance between the second lens (52) and the third lens (53), and L4 represents the central thickness of the third lens (53).

4. The beam quality analyzer of claim 1, wherein, The first lens (51) and the second lens (52) form a cemented lens, and the focal length of the cemented lens satisfies the following condition: 2.5f Wherein, f12 represents the focal length of the cemented lens, f represents the focal length of the achromatic lens group (5).

5. The beam quality analyzer of claim 4, wherein, The ratio of the focal length of the cemented lens to the focal length of the third lens (53) satisfies the following condition: 1.8 Wherein, f12 represents the focal length of the cemented lens, and f3 represents the focal length of the third lens (53).

6. The beam quality analyzer of claim 1, wherein, The refractive index of the first lens (51) is 1.55-1.59, the dispersion coefficient of the first lens (51) is 68-75, the refractive index of the second lens (52) is 1.6-1.63, the dispersion coefficient of the second lens (52) is 53-58, the refractive index of the third lens (53) is 1.52-1.56, and the dispersion coefficient of the third lens (53) is 58-62.

7. The beam quality analyzer of claim 1, wherein, The moving guide rail (8) is further included, the mirror group (6) is fixed on the sliding block of the moving guide rail (8), and the moving guide rail (8) is used for adjusting the distance between the mirror group (6) and the achromatic lens group (5).

8. The beam quality analyzer of claim 7, wherein, The mirror group (6) includes a first mirror (61) and a second mirror (62) with an inclination angle of 45°, the first mirror (61) and the second mirror (62) are arranged perpendicular to each other, and the center of the first mirror (61) is located on the same optical axis as the center of the light source (1).

9. The beam quality analyzer of claim 8, wherein, The filter unit (3), the achromatic lens group (5), the mirror group (6) and the moving guide rail (8) are arranged in the packaging shell (9), the spectral filter (2) and the image sensor (7) are arranged outside the packaging shell (9), the spectral filter (2) is arranged between the light source (1) and the filter unit (3), and the image sensor (7) and the second mirror (62) are located on the same optical axis.

Images