Three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude type scanning track

Abstract

The invention provides a three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on a longitude and latitude type scanning track, and belongs to the technical field of micro-nano device and cell surface physical property characterization methods. In combination with an eccentric distance real-time compensation control algorithm, latitude scanning path parameters are established, online compensation of eccentric displacement is realized in the process of rotating along the latitude, and a normal bending deformation signal of a probe micro-cantilever is used as feedback through an upper computer, so that displacement control of a scanning positioning platform is realized. And thus, synchronous scanning imaging of the surface morphology and the nano-mechanical property of the sample is realized. A probe integrated with a protuberant tip structure is used as a micro-force sensor, a novel controllable vector angle single-point servo detection method is combined, a normal bending signal of the probe is used as feedback, and synchronous measurement of the three-dimensional surface topography and the three-dimensional surface mechanical property of a micro-nano sphere sample is realized along a longitude and latitude scanning path.

Description

Technical Field

[0001] The present invention belongs to the technical field of methods for characterizing physical properties of micro-nano devices and cell surfaces, and in particular relates to a three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectories. Background Art

[0002] Atomic force microscopy (AFM) is an instrument for measuring micro-nano surface properties with atomic-level high resolution. It is widely used in research in the fields of micro-electromechanical systems, electronic chips, biological cells, etc. Based on a specific AFM system configuration method, it is possible to quantitatively characterize a variety of physical parameters such as the surface morphology and mechanical properties of micro-nano samples. Raster tracking trajectory is a common scanning path form in AFM measurement systems. At present, two-dimensional / three-dimensional micro-nano surface property characterization methods based on raster trajectory scanning have been deeply developed and applied. However, for microsphere device structures or suspended spherical cells with drastic changes in surface curvature, conventional raster scanning trajectories are difficult to match the tracking servo speed of the positioning platform, and the mapping results of three-dimensional micro-nano spherical morphology and mechanical properties have problems such as uneven mapping result quality and local distortion.

[0003] Micro-nano surface morphology represents the contour changes of the surface of micro-nano devices or biological samples, including various physical information such as surface roughness and geometric key dimensions. The surface morphology distribution of micro-nano electronic devices is closely related to their functional characteristics such as threshold voltage, cutoff current, and photoelectric conversion efficiency. Micro-nano surface mechanical properties include mechanical parameters such as surface adhesion, Young's modulus, and stiffness. These parameters are not only key factors affecting the integrated assembly process of micro-electromechanical systems, but also indirectly reflect the stress state inside micro-nano devices. In addition, cell surface morphology and mechanical properties have an important influence on life processes such as cell migration, differentiation, and growth. Therefore, quantitatively evaluating the coupling relationship between the surface morphology of three-dimensional micro-nano devices and the three-dimensional surface mechanical properties can provide detection technology support for optimizing the structure of three-dimensional micro-nano devices and improving device performance, and can provide a data basis for in-depth analysis and understanding of the diverse functional mechanisms of the basic life units of cells, which is of great significance for semiconductor chip quality improvement and biomedical research.

[0004] In the field of microelectronics research, the surface of three-dimensional micro-nano devices contains diversified topological features. Microlens arrays, microfluidic regulators, and some microsensors and micro-nano control devices use spherical shapes to improve focusing, adjust flow rate, enhance sensitivity, and improve positioning accuracy. Three-dimensional micro-nano spherical structures are often used in complex environments such as high temperature, high pressure, and corrosive media. The characterization of physical parameters of the surface of three-dimensional micro-nano spheres helps to fully understand the changes in the characteristics of micro-nano spherical surfaces under different environments, which is very important for the design of micro-nano device structural materials and engineering application optimization. In biomedical research, adherent cells and suspended cells are two common forms of cells in in vitro culture. Suspended cells are mostly spherical. In addition, some special cells such as oocytes do not exist in the form of adherent cells. The simultaneous characterization of the surface morphology and mechanical properties of three-dimensional spherical cells is crucial for exploring and controlling the life process of cells. In summary, the development of a three-dimensional micro-nano spherical multi-parameter mapping method can improve the AFM characterization function, expand the application of AFM, and provide necessary detection methods for the study of micro-nano spherical surface characteristics.

[0005] Since most traditional AFM 3D surface mapping methods use a raster path to perform scanning imaging, the measured 3D micro-nanostructure can be regarded as a combination of single planes with different tilt angles. Except for the joint corners between the planes, there is no continuous and significant curvature change on the surface. The 3D curved surface is also a possible surface morphology in micro-nano devices, but the curvature of the 3D micro-nanosphere surface varies greatly. Due to the displacement compensation speed of the nanopositioning stage, the conventional raster scanning path is difficult to adapt to the 3D spherical surface characterization object with continuous and significant curvature changes. Summary of the invention

[0006] In view of the shortcomings of the prior art, the present invention proposes a three-dimensional micro-nano spherical surface multi-parameter synchronous mapping method based on longitude and latitude scanning trajectories, and three-dimensional micro-nano spherical surface multi-parameter synchronous mapping based on atomic force microscope tracking trajectory feedforward compensation control and longitude and latitude scanning paths to achieve the synchronous measurement of three-dimensional surface morphology and three-dimensional surface mechanical properties of micro-nano spherical samples.

[0007] The present invention adopts the following technical solutions to solve the above problems:

[0008] A three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectories includes but is not limited to two longitude and latitude scanning strategies: longitude fast scanning-latitude slow scanning and longitude slow scanning-latitude fast scanning. The method comprises the following steps:

[0009] S1: Use the prior knowledge pre-calibration method to establish the longitude scanning path parameters including the scanning angle step length and the scanning step number, and combine the eccentricity real-time compensation control algorithm to establish the latitude scanning path parameters;

[0010] S2: Based on the rotation sample stage hardware unit and the normal bending signal feedback control with the protruding needle tip probe in the atomic force microscope 3D micro-nano spherical surface characterization system, the 3D surface morphology measurement of a single micro-nano spherical sample, or the simultaneous measurement of the 3D surface morphology and mechanical properties of the micro-nano spherical sample;

[0011] S3: In the actual characterization process, based on the pre-calibrated longitude scanning profile, combined with the controllable vector angle servo method, the interaction force feedback between the needle tip and the sample is used to compensate for small displacement errors, and online compensation for eccentric displacement is achieved during rotation along the latitude. Combined with the longitude and latitude scanning strategy of longitude fast scanning-latitude slow scanning or longitude slow scanning-latitude fast scanning, the three-dimensional surface morphology and mechanical properties scanning imaging of micro-nano spherical samples are achieved.

[0012] Furthermore, in S1, a tracking trajectory feedforward compensation control algorithm is adopted, that is, the curvature change trend of the microsphere surface is pre-calibrated, and the pre-calibration result is used as prior knowledge and integrated into the scanning and detection process of the longitudinal spherical profile, so as to compensate the motion displacement of the XZ axis in advance, and the eccentricity between the center of the sphere and the center of the rotating table is pre-calibrated, and the pre-calibration result is integrated into the scanning and detection process of the latitudinal spherical profile, so as to compensate in real time for the eccentricity error introduced by the incomplete coincidence of the center of the sphere and the center of the rotating table, so as to ensure the precise and continuous in-situ measurement of the needle tip.

[0013] Furthermore, in S2, the three-dimensional micro-nano spherical surface characterization system includes a multi-degree-of-freedom AFM system integrating a micro-nano positioning platform and a rotating sample stage, and a host computer. The host computer uses the normal bending deformation signal of the probe micro-cantilever as feedback to achieve imaging of a single sample surface morphology, or synchronous scanning imaging of the sample surface morphology and nanomechanical properties.

[0014] Furthermore, when measuring a single three-dimensional micro-nano spherical surface morphology, the probe is mechanically driven at the first-order bending resonance frequency of the probe; when measuring the three-dimensional micro-nano spherical surface morphology and mechanical properties simultaneously, the probe is mechanically driven at a low frequency lower than the first-order resonance frequency of the probe.

[0015] Furthermore, in S2, the specific test process of measuring the three-dimensional surface morphology of the single micro-nano sphere sample is as follows:

[0016] S211: Based on the atomic force microscope, a periodically changing voltage input is used to displace a piezoelectric ceramic or electromagnetic coil, and a piezoelectric drive or a magnetic field drive method is used to mechanically excite the probe at the first-order bending resonance frequency of the probe to make it vibrate at a fixed bending amplitude;

[0017] S212: making the probe approach the sample along a custom oblique angle, and obtaining a voltage signal curve at the needle tip position when the probe intermittently contacts the sample;

[0018] S213: Continue to move the probe close to the sample along the custom oblique angle until the contact voltage between the probe and the sample reaches a set value, and record the absolute displacement value of the sample at this moment, which is the surface morphology of the sample.

[0019] Furthermore, in S2, the specific test process of synchronously measuring the three-dimensional surface morphology and mechanical properties of the micro-nano sphere sample is as follows:

[0020] S221: Based on the atomic force microscope, a periodically changing voltage is used to input a displacement piezoelectric ceramic or electromagnetic coil, and a piezoelectric drive or magnetic field drive method is used to mechanically excite the probe at a low frequency of 1 to 2 kHz to make it vibrate at a fixed bending amplitude, and a voltage signal curve of the free state vibration of the needle tip is obtained when the probe approaches the sample;

[0021] S222: Make the probe approach the sample along a custom oblique angle, obtain a voltage signal curve of the needle tip position when the probe intermittently contacts the sample, and obtain a voltage signal curve of the probe force from the voltage curves of the probe in a free vibration state and an intermittent contact vibration state;

[0022] S223: Continue to move the probe close to the sample along a custom oblique angle until the contact voltage between the probe and the sample reaches a set value, and obtain a force-displacement curve by combining the probe stiffness and the measurement system sensitivity;

[0023] S224: According to the force displacement curve and in combination with the corresponding mechanical model, the corresponding physical properties of the material are obtained, including parameters such as surface morphology, adhesion, and Young's modulus;

[0024] S225: moving the sample to the next test point along the longitude or latitude direction, and adjusting the scanner to keep the feedback signal of the probe under mechanical excitation equal to the set value of the interaction voltage between the probe and the sample;

[0025] S226: Repeat step S225 to achieve synchronous imaging measurement of the surface morphology and mechanical properties of three-dimensional micro-nano spherical samples.

[0026] Furthermore, the test data of each point during the scanning process is obtained by the following methods:

[0027] (1) obtaining a three-dimensional surface topography image of the sample by recording the X-axis coordinate value, Y-axis coordinate value, and Z-axis coordinate value of the scanner when the probe reaches the set value of the interaction force;

[0028] (2) During the test, the sample surface adhesion force is manifested as the maximum negative force generated when the needle tip moves away from the sample surface, which can be obtained by calculating the minimum force value in the interaction force curve between the probe and the sample;

[0029] (3) By using a suitable contact mechanics model in AFM to fit the interaction curve data, the three-dimensional surface Young's modulus mapping result of the sample can be obtained;

[0030] (4) Fitting the data of the positive indentation area of ​​the interaction force curve to obtain the equivalent stiffness in the process, and after decoupling the probe stiffness, obtaining the imaging results of the three-dimensional surface stiffness distribution of the sample;

[0031] (5) The mechanical energy loss generated during the entire process of the needle tip approaching and moving away from the sample is expressed as energy dissipation. The integral area between the approach and withdrawal curve data in the interaction force curve is fitted to obtain the three-dimensional surface energy dissipation distribution result of the sample;

[0032] (6) Corresponding to the X-axis coordinate value, Y-axis coordinate value, and Z-axis coordinate value recorded at this time, the four-dimensional data corresponding to the surface morphology and surface mechanical properties of the sample can be obtained.

[0033] Furthermore, the contact mechanics model includes but is not limited to the Hertz model, the Sneddon model, the DMT model and the JKR model.

[0034] Furthermore, during the longitude and latitude scanning process, based on the tracking trajectory feedforward compensation control and real-time eccentricity compensation algorithm, combined with the deformation of the probe with a protruding needle tip structure and the single-point controllable vector angle servo method, the design concept of synchronous characterization of the surface morphology and mechanical properties of large curvature three-dimensional micro-nano spheres is realized.

[0035] Furthermore, the multi-degree-of-freedom three-dimensional micro-nano spherical surface characteristic characterization system configuration of the integrated rotating sample stage and micro-nano positioning stage in the rotating sample stage hardware unit includes but is not limited to piezoelectrically driven and magnetically driven probe mechanical excitation methods.

[0036] Advantages of the present invention:

[0037] 1. It breaks through the tracking speed limit of synchronous measurement of large curvature three-dimensional micro-nano surface morphology and mechanical properties based on raster scanning trajectory. Based on longitude and latitude scanning trajectory, using the normal bending signal feedback of the probe, combined with controllable vector angle servo, it can realize the synchronous characterization of three-dimensional surface morphology and three-dimensional surface mechanical properties of three-dimensional micro-nano spherical structures;

[0038] 2. The three-dimensional micro-nano sphere surface property characterization method based on longitude and latitude scanning tracking strategy provides a new idea for further research on three-dimensional micro-nano spherical electronic devices, spherical cell spatial surface morphology and nanomechanical properties;

[0039] 3. The probe with a protruding needle tip can detect the physical properties of the space surface below the equator of the three-dimensional micro-nano spherical sample, expanding the scanning range of the longitude and latitude tracking trajectory;

[0040] 4. Configuration of a three-dimensional measurement system integrating piezoelectric drive and magnetic drive. Compared with traditional AFM, this method can achieve the simultaneous characterization of the three-dimensional surface morphology and three-dimensional surface nanomechanical properties of micro-nano spherical samples by using the bending signal of the probe as feedback. It is of great significance for the monitoring and control of the overall performance of three-dimensional micro-nano electronic devices and life science research. It is compatible with the functions of conventional AFM nanomechanical property test systems and has high practical value in the field of AFM test methods and system research. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the specific embodiments of the present invention, the drawings required for use in the description of the specific embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0042] Figure 1 It is a schematic diagram of the system structure of the present invention;

[0043] Figure 2 for Figure 1 A partial enlarged view of the middle A;

[0044] Figure 3 It is a schematic diagram of the longitude and latitude scanning detection strategy of the present invention;

[0045] Figure 4 A schematic diagram of a longitude and latitude scanning area of ​​the present invention;

[0046] Figure 5 It is a schematic diagram of the eccentricity compensation principle in the latitude scanning process of the present invention;

[0047] Figure 6 It is a schematic diagram of the prior knowledge pre-calibration process of the meridian scanning of the present invention;

[0048] Figure 7 It is a schematic diagram of the interaction force curve collection process of the present invention;

[0049] Figure 8 is a structural global view of the scanning device used in Example 2;

[0050] Fig. 9 yes Figure 8 A schematic diagram of the structure of the probe of the device;

[0051] Fig.10 yes Figure 8 Schematic diagram of the structure of the probe hand of the device;

[0052] Fig.11 yes Figure 8 A schematic diagram of the structure of the rotating sample stage of the device;

[0053] Fig.12 It is the scanning imaging result diagram of the present invention.

[0054] Among them, 1: rack; 2: four-quadrant position detector two-dimensional adjustment micro-platform; 3: first one-dimensional adjustment micro-platform; 4: four-quadrant position detector; 5: reflective laser convex lens; 6: laser reflector; 7: probe hand; 7-1: probe hand base; 7-2: displacement piezoelectric ceramic; 7-3: probe seat; 7-4: probe with protruding needle tip; 7-4-1: clampable silicon base; 7-4-2: magnetic ball; 7-4-3: micro cantilever; 7-4-4: protruding needle tip; 7-5: probe fixing plate; 7-6: high-frequency excitation piezoelectric ceramic sheet; 7-7: terminal block; 8: first XYZ micron positioning stage; 9: first XYZ nano positioning stage; 10: probe hand support Frame; 11: one-dimensional large-range adjustment micro-platform; 12: table; 13: second XYZ micron positioning stage; 14: second XYZ nano positioning stage; 15: sample stage bracket; 16: rotating sample stage; 16-1: rotating sample stage base; 16-2: electromagnetic coil support; 16-3: rotating positioning stage; 16-4: sample holder; 16-5: sample; 16-6: set screw; 16-7: electromagnetic coil; 16-8: ferrite core; 16-9: electromagnetic coil connecting wire; 17: incident laser focusing convex lens; 18: second one-dimensional adjustment micro-platform; 19: semiconductor laser generator; 20: laser generator angle adjustment mechanism; 21: optical microscope. DETAILED DESCRIPTION

[0055] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0056] The present invention adopts a priori knowledge pre-calibration method to establish longitude scanning path parameters including scanning angle step length and scanning step number; based on the rotating sample stage hardware unit, combined with the eccentricity real-time compensation control algorithm, the latitude scanning path parameters are established to realize the online compensation of eccentric displacement during the rotation along the latitude; the three-dimensional micro-nano spherical surface characteristic characterization system is mainly composed of a multi-degree-of-freedom AFM system integrating a micro-nano positioning platform and a rotating sample stage, and a host computer; when facing a single three-dimensional micro-nano spherical surface morphology measurement, the probe is mechanically driven at the first-order bending resonance frequency of the probe; when facing the synchronous measurement of the three-dimensional micro-nano spherical surface morphology and mechanical properties, the probe is mechanically driven at a low frequency lower than the first-order resonance frequency of the probe; the host computer uses the normal bending deformation signal of the probe micro-cantilever as feedback to realize the displacement control of the scanning positioning platform, and then realizes the synchronous scanning imaging of the sample surface morphology and nanomechanical properties.

[0057] Example 1

[0058] like Figure 1-Figure 7As shown, the present invention proposes a three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectories, including but not limited to two longitude and latitude scanning strategies: longitude fast scanning-latitude slow scanning and longitude slow scanning-latitude fast scanning. Figure 3 (A) is a longitude scanning detection strategy for fast axis longitude & slow axis latitude scanning, (B) is a latitude scanning detection strategy for fast axis latitude & slow axis longitude; the system structure schematic diagram of the present invention is shown in Figure 1 , Figure 2 As shown, Figure 1 ① piezoelectric ceramic drive, ② magnetic field drive; Figure 2 In the figure, B is the direction of the electromagnetic field, m is the magnetization direction of the magnetic ball, and τ is the direction of the torque on the magnetic ball. The specific steps include:

[0059] S1: The prior knowledge pre-calibration method is used to establish the longitude scanning path parameters including the scanning angle step and the scanning step number, and the latitude scanning path parameters are established by combining the eccentricity real-time compensation control algorithm.

[0060] A tracking trajectory feedforward compensation control algorithm is adopted, that is, the curvature change trend of the microsphere surface is pre-calibrated, and the pre-calibration result is used as a priori knowledge and integrated into the scanning and detection process of the longitudinal spherical profile, the motion displacement of the XZ axis is compensated in advance, the eccentricity between the center of the sphere and the center of the rotating table is pre-calibrated, and the pre-calibration result is integrated into the scanning and detection process of the latitudinal spherical profile, and the eccentricity error introduced by the incomplete coincidence of the center of the sphere and the center of the rotating table is compensated in real time to ensure the precise and continuous in-situ measurement of the needle tip; if the scanning measurement process is not compensated in real time, the measured spherical surface will be offset relative to the needle tip at the next point to be measured after rotation. After compensation, it can be ensured that the offset point is moved back to its original position, so that the actual measured point and the next point that should be measured theoretically can be guaranteed to be consistent, thereby improving the accuracy.

[0061] S2: Based on the rotation sample stage hardware unit and the normal bending signal feedback control with the protruding needle tip probe in the atomic force microscope 3D micro-nano spherical surface characterization system, the 3D surface morphology measurement of a single micro-nano spherical sample, or the simultaneous measurement of the 3D surface morphology and mechanical properties of the micro-nano spherical sample;

[0062] The three-dimensional micro-nano spherical surface characteristic characterization system includes a multi-degree-of-freedom AFM system integrated with a micro-nano positioning platform and a rotating sample stage, and a host computer. The host computer uses the normal bending deformation signal of the probe micro-cantilever as feedback to realize single sample surface morphology imaging, or synchronous scanning imaging of the sample surface morphology and nanomechanical properties. When measuring a single three-dimensional micro-nano spherical surface morphology, the probe is mechanically driven at the first-order bending resonance frequency of the probe. When measuring the three-dimensional micro-nano spherical surface morphology and mechanical properties synchronously, the probe is mechanically driven at a low frequency lower than the first-order resonance frequency of the probe.

[0063] The specific test process of measuring the three-dimensional surface morphology of a single micro-nano sphere sample is as follows:

[0064] S211: Based on the atomic force microscope, a periodically changing voltage input is used to displace a piezoelectric ceramic or electromagnetic coil, and a piezoelectric drive or a magnetic field drive method is used to mechanically excite the probe at the first-order bending resonance frequency of the probe to make it vibrate at a fixed bending amplitude;

[0065] S212: making the probe approach the sample along a custom oblique angle, and obtaining a voltage signal curve at the needle tip position when the probe intermittently contacts the sample;

[0066] S213: Continue to move the probe close to the sample along the custom oblique angle until the contact voltage between the probe and the sample reaches a set value, and record the absolute displacement value of the sample at this moment, which is the surface morphology of the sample.

[0067] The specific test process of simultaneous measurement of three-dimensional surface morphology and mechanical properties of micro-nano sphere samples is as follows:

[0068] S221: Based on the atomic force microscope, a periodically changing voltage is used to input a displacement piezoelectric ceramic or electromagnetic coil, and a piezoelectric drive or magnetic field drive method is used to mechanically excite the probe at a low frequency of 1 to 2 kHz to make it vibrate at a fixed bending amplitude, and a voltage signal curve of the free state vibration of the needle tip is obtained when the probe approaches the sample;

[0069] S222: Make the probe approach the sample along a custom oblique angle, obtain a voltage signal curve of the needle tip position when the probe intermittently contacts the sample, and obtain a voltage signal curve of the probe force from the voltage curves of the probe in a free vibration state and an intermittent contact vibration state;

[0070] S223: Continue to move the probe close to the sample along the custom oblique angle until the contact voltage between the probe and the sample reaches a set value, and obtain a force-displacement curve by combining the probe stiffness and the measurement system sensitivity.

[0071] S224: According to the force-displacement curve and in combination with the corresponding mechanical model, the corresponding physical properties of the material are obtained, including parameters such as surface morphology, adhesion, and Young's modulus.

[0072] S225: moving the sample to the next test point along the longitude or latitude direction, and adjusting the scanner to keep the feedback signal of the probe under mechanical excitation equal to the set value of the interaction voltage between the probe and the sample;

[0073] S226: Repeat step S225 to achieve synchronous imaging measurement of the surface morphology and mechanical properties of three-dimensional micro-nano spherical samples.

[0074] S3: In the actual characterization process, based on the pre-calibrated longitude scanning profile, combined with the controllable vector angle servo method, the interaction force feedback between the needle tip and the sample is used to compensate for small displacement errors, and online compensation for eccentric displacement is achieved during rotation along the latitude. Combined with the longitude and latitude scanning strategy of longitude fast scanning-latitude slow scanning or longitude slow scanning-latitude fast scanning, the three-dimensional surface morphology and mechanical properties scanning imaging of micro-nano spherical samples are achieved.

[0075] It should be noted that the test data of each point during the scanning process is obtained in the following ways:

[0076] (1) obtaining a three-dimensional surface topography image of the sample by recording the X-axis coordinate value, Y-axis coordinate value, and Z-axis coordinate value of the scanner when the probe reaches the set value of the interaction force;

[0077] (2) During the test, the sample surface adhesion force is manifested as the maximum negative force generated when the needle tip moves away from the sample surface, which can be obtained by calculating the minimum force value in the interaction force curve between the probe and the sample;

[0078] (3) Adopting a suitable contact mechanics model in AFM, the contact mechanics model includes but is not limited to the Hertz model, Sneddon model, DMT model and JKR model.

[0079] By fitting the interaction curve data, the three-dimensional surface Young's modulus mapping results of the sample can be obtained;

[0080] (4) Fitting the data of the positive indentation area of ​​the interaction force curve to obtain the equivalent stiffness in the process, and after decoupling the probe stiffness, obtaining the imaging results of the three-dimensional surface stiffness distribution of the sample;

[0081] (5) The mechanical energy loss generated during the entire process of the needle tip approaching and moving away from the sample is expressed as energy dissipation. The integral area between the approach and withdrawal curve data in the interaction force curve is fitted to obtain the three-dimensional surface energy dissipation distribution result of the sample;

[0082] (6) Corresponding to the X-axis coordinate value, Y-axis coordinate value, and Z-axis coordinate value recorded at this time, the four-dimensional data corresponding to the surface morphology and surface mechanical properties of the sample can be obtained.

[0083] It should be noted that, during the longitude and latitude scanning process, based on the tracking trajectory feedforward compensation control and real-time eccentricity compensation algorithm, combined with the deformation of the probe with a protruding needle tip structure and the single-point controllable vector angle servo method, the design concept of synchronous characterization of the surface morphology and mechanical properties of large curvature three-dimensional micro-nano spheres is realized.

[0084] It should be noted that the multi-degree-of-freedom three-dimensional micro-nano spherical surface characteristic characterization system configuration of the integrated rotating sample stage and micro-nano positioning stage in the rotating sample stage hardware unit includes but is not limited to piezoelectrically driven and magnetically driven probe mechanical excitation methods.

[0085] Example 2

[0086] As a preferred embodiment of the present invention, Figure 8 -- Fig.10 As shown, the atomic force microscope three-dimensional micro-nano spherical surface characteristic characterization system includes a table 12, on which a frame 1, a one-dimensional large-range adjustment micro-platform 11, a second XYZ micron positioning stage 13 and an optical microscope 21 are installed. Among them, the rotating sample stage 16 is installed on the second XYZ micron positioning stage 13 through the sample stage bracket 15 and the second XYZ nanopositioning stage 14, the laser force measurement system is installed on the frame 1, and the probe hand 7 is installed on the one-dimensional large-range adjustment micro-platform 11 through the probe hand bracket 10, the first XYZ nanopositioning stage 9 and the first XYZ micropositioning stage 8. The first XYZ nanopositioning stage 9 and the second XYZ nanopositioning stage 14 are independent of each other, and the controllable vector angle servo between the probe and the sample is completed through decoupled motion coordination.

[0087] The laser force measurement system is composed of a laser generator angle adjustment mechanism 20, a semiconductor laser generator 19, an incident laser focusing convex lens 17, a laser reflector 6, a reflecting laser convex lens 5 and a four-quadrant position detector 4, as well as a second one-dimensional adjustment micro-platform 18, a first one-dimensional adjustment micro-platform 3 and a four-quadrant position detector two-dimensional adjustment micro-platform 2.

[0088] The probe hand 7 is composed of a probe hand base 7-1, a displacement piezoelectric ceramic 7-2, a probe seat 7-3, a probe 7-4 with a protruding needle tip, a probe fixing plate 7-5, a high-frequency excitation piezoelectric ceramic sheet 7-6 and a terminal 7-7. Among them, there are insulating sheets between the probe hand base 7-1 and the displacement piezoelectric ceramic 7-2, between the displacement piezoelectric ceramic 7-2 and the probe seat 7-3, between the probe seat 7-3 and the high-frequency excitation piezoelectric ceramic sheet 7-6, and between the high-frequency excitation piezoelectric ceramic sheet 7-6 and the probe fixing plate 7-5, and the displacement piezoelectric ceramic 7-2 and the high-frequency excitation piezoelectric ceramic sheet 7-6 are electrically connected to the interface of the corresponding terminal 7-7. The terminal 7-7 is electrically connected to the corresponding electrical equipment. The force deformation of the probe is measured by a laser force measurement system.

[0089] The schematic diagram of the rotating sample stage of the present invention is as follows Fig.11As shown, (A) and (B) are respectively an axonometric view and a top view and a cross-sectional view of the rotating stage, the rotating sample stage 16 is respectively composed of a rotating sample stage base 16-1, an electromagnetic coil support 16-2, a rotating positioning stage 16-3, a sample holder 16-4, a sample 16-5, a set screw 16-6, an electromagnetic coil 16-7, a ferrite core 16-8, and an electromagnetic coil connecting wire 16-9, wherein the sample 16-5 is fixed together with the sample holder 16-4, and the two are mounted on the rotating positioning stage 16-3 by a set screw 16-6, and the rotating positioning stage 16 -3. The electromagnetic coil support 16-2 and the rotating sample stage base 16-1 are connected as a whole by a set screw 16-6. The ferrite core 16-8 and the electromagnetic coil 16-7 are fixed in the hollow inner cavity of the rotating positioning table 16-3 by the electromagnetic coil support 16-2, and the electromagnetic coil connecting line 16-9 is led out to be electrically connected to the corresponding electrical equipment. It can generate a uniform magnetic field to achieve magnetic drive of the probe. There are insulating sheets between the ferrite core 16-8 and the electromagnetic coil 16-7 and the electromagnetic coil support 16-2 and the rotating positioning table 16-3.

[0090] The probe 7-4 with a protruding tip is composed of a clampable silicon base 7-4-1, a magnetic ball 7-4-2, a micro cantilever 7-4-3 and a protruding tip 7-4-4. The function of the magnetic ball 7-4-3 is to drive the probe through the magnetic field generated by the electromagnetic coil 16-7. During the test, the protruding tip 7-4-4 of the probe interacts with the surface of the three-dimensional micro-nano spherical sample, causing the probe to be subjected to normal bending deformation. The signal is detected by the laser force measurement system and used for feedback control of the entire scanning process. Based on the controllable vector angle servo method, the distance error between the sample and the tip can be compensated by the relative movement of the first XYZ nanopositioning stage 9 along a custom oblique angle, and then combined with longitude and latitude scanning to achieve three-dimensional imaging.

[0091] The specific contents of the longitude and latitude scanning strategy are as follows: in the latitude scanning process, the rotation step angle is set to Δθ, the number of steps is m, and the total angle size in the latitude scanning direction is θ (θ=m×Δθ); the latitude scanning process is completed by using a rotating sample stage (16). During this period, due to the eccentricity between the spherical sample to be measured and the rotation center, it is necessary to drive the XY axis movement displacement of the second XYZ nanopositioning stage (14) to perform real-time eccentricity compensation. If the eccentricity size is R e , then each time a rotation step is completed, the compensation displacement of the second XYZ nanopositioning stage (14) is:

[0092] ΔX=R e (1-cos(Δθ))

[0093] ΔY=R e sin(Δθ)

[0094] Where Δθ is the rotation step angle, R e is the distance between the center of the sphere and the center of rotation, i.e., the eccentricity, and ΔX and ΔY are the displacements to be compensated in the X-axis and Y-axis of the second XYZ nanopositioning stage (14), respectively.

[0095] In the process of meridian scanning, the meridian step angle is set to Δβ, the number of steps is n, and the total angle size in the meridian scanning direction is β (β=n×Δβ); the second XYZ nanopositioning platform (14) is used to control the meridian scanning process, and the meridian angular displacement is decomposed into the motion displacement (ΔX and ΔZ) of the XZ axis of the second XYZ nanopositioning platform (14); when the step angle is Δβ, the motion displacement size of the XZ axis of the second XYZ nanopositioning platform (14) is driven to be:

[0096] ΔX=R sp (cos(β0+Δβ)-cos(β0))

[0097] ΔZ=R sp (sin(β0+Δβ)-sin(β0))

[0098] In the formula, R sp is the radius of the microsphere obtained by preliminary calibration, β0 is the angle between the tip-sphere center and the horizontal line after the previous scanning step, that is, the initial angle before the current step scanning starts, Δβ is the longitudinal step angle, and ΔX and ΔZ are the X-axis and Z-axis step displacements of the XYZ nanopositioning stage II (14), respectively.

[0099] A tracking trajectory feedforward compensation control algorithm is applied in the above-mentioned meridian scanning process, that is, the curvature change trend of the microsphere surface is pre-calibrated, and the pre-calibration result is used as a priori knowledge to be integrated into the scanning detection process of the meridian spherical profile to compensate the movement displacement of the XZ axis of the second XYZ nanopositioning stage (14) in advance; in the actual characterization process, based on the compensated spherical profile, combined with the controllable vector angle servo method, the interaction force feedback between the needle tip and the sample is used to achieve compensation for small displacement errors; thereby, the problems of slow tracking speed and distorted scanning results of the nanopositioning stage are solved, and the scanning speed and measurement accuracy are improved; the pre-calibration content includes calibrating the radius, spherical center coordinates and initial scanning point coordinates of the microsphere sample to be detected, and the initial angle β0 is determined by the spherical center coordinates and the initial scanning point coordinates, and then the initial angle before each step is iterated according to the meridian step angle Δβ, thereby obtaining ΔX and ΔZ, and completing the meridian scanning detection; the final scanning area size can be expressed as a circular sector area covered by the θ×β angle.

[0100] This invention breaks through the limitation that the traditional raster scanning trajectory can only be applied to the surface characteristics of two-dimensional micro-nano samples and regular three-dimensional micro-nano samples without continuous and significant curvature changes. By using the feedback control of the normal bending signal with a protruding needle tip probe, the three-dimensional surface morphology and mechanical properties of micro-nano spherical samples can be measured. The specific implementation scheme of the present invention is described in more detail below:

[0101] 1. Initialize the system, calibrate the coordinates of the center point of the rotating sample stage 16, fix the prepared micro-nanosphere sample 16-5 to the sample holder 16-4, and use high-precision micro-operation technology to accurately place the micro-nanosphere sample 16-5 at the center point of the rotating sample stage 16; install the probe 7-4 with a protruding needle tip on the probe hand 7, and then install the rotating sample stage 16 and the probe hand 7 on the sample stage bracket 15 and the first XYZ nanopositioning stage 9 respectively, and finally electrically connect the terminal blocks to the corresponding equipment.

[0102] 2. Move the second XYZ micrometer positioning stage 13, preliminarily position the sample 16 - 5 through the optical microscope 21, select a suitable measurement area, and move the area to the center of the field of view of the optical microscope 21.

[0103] 3. The distance between the calibration ball sample 16-5 and the center of the rotating sample stage 16, i.e., the eccentricity R e , move the one-dimensional large-range adjustment micro-platform 11 and the first XYZ micron positioning stage 8, roughly align the probe 7-4 with the protruding needle tip, place the probe needle tip above the appropriate measurement area selected in step 2, and adjust the laser spot of the probe 7-4 to the front end center of the probe micro-cantilever.

[0104] 4. Pre-calibrate the surface profile of the micro-nano sphere sample 16-5, including the sphere diameter, sphere center, and initial scanning point position coordinates. Set the voltage reference value when the probe contacts the sample, drive the second XYZ nanopositioning stage 14 to rise along the Z axis until the probe deformation voltage signal reaches the set value, and record the X-axis coordinate value, Y-axis coordinate value, and Z-axis coordinate value at this time.

[0105] 5. Lower the second XYZ nanopositioning stage 14 along the Z axis and drive it to move laterally along the X axis, repeat step 4 again, repeat 6 times in a row, and fit the sphere center coordinates and sphere radius according to the position coordinates of the 6 recorded spherical points.

[0106] 6. Determine the scanning position, drive the second XYZ nanopositioning stage 14 along a certain angle α, so that the probe contacts the sample and reaches the contact voltage reference value, record the X-axis coordinate value, Y-axis coordinate value and Z-axis coordinate value at this time, and then return the second XYZ nanopositioning stage 14 to the initial position at the beginning of step 6, and use the recorded coordinate values ​​and the coordinates of the fitting sphere center to determine the initial scanning angle β0;

[0107] 7. Drive the first XYZ nanopositioning stage 9 along the same relative vector angle α as in step 6, so that the probe 7-4 is fed toward the sample 16-5 along the same angle as in step 6 until the probe 7-4 contacts the sample 16-5 and reaches the set value of the interaction force between the probe and the sample.

[0108] 8. Re-adjust the laser spot of the probe 7-4 with the protruding needle tip to the front end center of the probe micro-cantilever, and prepare to start the host computer-position servo control.

[0109] 9. Mechanically excite the probe at the first bending resonance frequency of the probe (U m ), the present invention introduces two driving modes, but is not limited to these two driving modes: 1) piezoelectric ceramic drive, through the displacement piezoelectric ceramic 7-2 driven by sinusoidal voltage to realize the mechanical vibration of the probe at its first-order bending resonance frequency; 2) magnetic field drive, using the electromagnetic coil 16-7 in the rotating sample stage 16 to generate an alternating magnetic field under the drive of a sinusoidal voltage signal to drive the magnetic ball 7-4-2 magnetized in a specified direction, thereby realizing the mechanical vibration of the probe at its first-order bending resonance frequency through the action of the electromagnetic torque τ; using a laser force measurement system to detect the deformation signal (voltage signal) generated by the probe 7-4, calculate the difference between the deformation voltage of the probe and the set voltage, and then start the position servo control to control the X-axis coordinate and Z-axis coordinate of the first XYZ nanopositioning stage 9, so that the probe 7-4 quickly approaches the sample 16-5 at a custom vector angle in the XZ plane until the processed probe deformation voltage is equal to the set value, and the absolute displacement value of the sample at this moment is recorded as the surface morphology of the sample.

[0110] 10. Input the calibrated eccentricity, radius of the micro-nano sphere sample, initial scanning angle and other parameters into the host computer, activate the real-time eccentricity compensation and feedforward compensation control program, set the scanning step and number of scanning points corresponding to the longitude and latitude scanning trajectory, and then start the three-dimensional sphere surface morphology scanning imaging.

[0111] Example 3

[0112] This embodiment is aimed at the simultaneous measurement of three-dimensional micro-nano spherical morphology and mechanical properties. The probe is mechanically driven at a low frequency lower than the first-order resonance frequency of the probe. The remaining technical features are the same as those of Example 2.

[0113] The difference between this embodiment and embodiment 2 is that the mechanical excitation frequencies of single morphology imaging and morphology and mechanical synchronous imaging are different, and the signal processing is simpler.

[0114] The measurement steps 1-8 of this embodiment are the same as those of embodiment 2. After the host computer-position servo control is ready to be turned on, the following steps are included:

[0115] 9', mechanically excite the probe at a frequency of 1 to 2 kHz (U m), the present invention introduces two driving modes, but is not limited to these two driving modes: 1) piezoelectric ceramic drive, through the displacement piezoelectric ceramic 7-2 driven by sinusoidal voltage to realize the mechanical vibration of the probe at low-order frequency; 2) magnetic field drive, using the electromagnetic coil 16-7 in the rotating sample stage 16 to generate an alternating magnetic field under the drive of a sinusoidal voltage signal to drive the magnetic ball 7-4-2 magnetized in a specified direction, thereby realizing the mechanical vibration of the probe at low-order frequency through the action of the electromagnetic torque τ; using a laser force measurement system to detect the deformation signal generated by the probe 7-4, using the driving signal generated by the signal generator as a reference signal, obtaining the difference signal between the real-time deformation signal of the probe and the reference voltage signal through the host computer, and analyzing the peak voltage of the difference signal in a single cycle, calculating the difference between the peak voltage and the interaction set value, and then starting the position servo control to control the X-axis coordinate and Z-axis coordinate of the first XYZ nanopositioning stage 9, so that the probe 7-4 quickly approaches the sample 16-5 at a custom vector angle in the XZ plane until the processed peak voltage is equal to the interaction set value.

[0116] 10'. Input the probe stiffness and system measurement sensitivity into the host computer, and convert the processed interaction voltage signal, that is, the difference signal between the probe real-time deformation signal and the reference voltage signal, into a force-displacement curve. Combined with the corresponding contact mechanics model, the nanomechanical characteristic parameters such as adhesion and Young's modulus are analyzed and obtained.

[0117] 11'. Input the calibrated eccentricity, radius of micro-nano sphere sample, initial scanning angle and other parameters into the host computer, activate the real-time eccentricity compensation and feedforward compensation control program, set the scanning step and number of scanning points corresponding to the longitude and latitude scanning trajectory, and then start the synchronous scanning imaging of the three-dimensional sphere surface morphology and mechanical properties.

[0118] The device and method of the present invention measure and scan the three-dimensional microsphere structure; the three-dimensional scanning image result of the microsphere sample is as follows: Fig.12As shown, (A) is a three-dimensional micro-nano sphere surface morphology image obtained under the condition of single three-dimensional micro-nano sphere surface morphology measurement, and the colored bar in the figure represents the height difference between the Z-axis coordinate and the fitting circle; (B) is a three-dimensional micro-nano sphere surface morphology contour curve corresponding to (A), and the figure shows the fitting circle trajectory and the fitting circle center position; (C) is a three-dimensional micro-nano sphere surface morphology image obtained under the condition of synchronous measurement of three-dimensional micro-nano sphere surface morphology and mechanical properties, and the colored bar in the figure represents the height difference between the Z-axis coordinate and the fitting circle; ( D) is the surface morphology contour curve of the three-dimensional micro-nano sphere corresponding to (C), which shows the fitting circle trajectory and the fitting circle center position; (E) is the surface adhesion force diagram of the three-dimensional micro-nano sphere, and the colored bars in the figure represent the surface adhesion force value; (F) is the Young's modulus diagram of the three-dimensional micro-nano sphere surface, and the colored bars in the figure represent the size of the surface Young's modulus; (G) is the surface stiffness diagram of the three-dimensional micro-nano sphere, and the colored bars in the figure represent the surface stiffness value; (H) is the surface energy dissipation diagram of the three-dimensional micro-nano sphere, and the colored bars in the figure represent the surface energy dissipation value.

[0119] The present invention is described in detail above through the embodiments, but the contents are only preferred embodiments of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made according to the scope of application of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectories, characterized by: Including but not limited to two longitude and latitude scanning strategies: longitude fast scanning-latitude slow scanning and longitude slow scanning-latitude fast scanning, the method comprises the following steps: S1: Use the prior knowledge pre-calibration method to establish the longitude scanning path parameters including the scanning angle step length and the scanning step number, and combine the eccentricity real-time compensation control algorithm to establish the latitude scanning path parameters; S2: Based on the rotation sample stage hardware unit and the normal bending signal feedback control with the protruding needle tip probe in the atomic force microscope 3D micro-nano spherical surface characterization system, the 3D surface morphology measurement of a single micro-nano spherical sample, or the simultaneous measurement of the 3D surface morphology and mechanical properties of the micro-nano spherical sample; S3: In the actual characterization process, based on the pre-calibrated longitude scanning profile, combined with the controllable vector angle servo method, the interaction force feedback between the needle tip and the sample is used to compensate for the small displacement error. Combined with the longitude and latitude scanning strategy of longitude fast scanning-latitude slow scanning or longitude slow scanning-latitude fast scanning, the three-dimensional surface morphology and mechanical properties scanning imaging of micro-nano spherical samples are achieved.

2. The three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectory according to claim 1 is characterized in that: In S1, a tracking trajectory feedforward compensation control algorithm is adopted, that is, the curvature change trend of the microsphere surface is pre-calibrated, and the pre-calibration result is used as prior knowledge and integrated into the scanning and detection process of the longitudinal spherical profile, so as to compensate the motion displacement of the XZ axis in advance, and the eccentricity between the center of the sphere and the center of the rotating table is pre-calibrated, and the pre-calibration result is integrated into the scanning and detection process of the latitudinal spherical profile, so as to compensate in real time for the eccentricity error introduced by the incomplete coincidence of the center of the sphere and the center of the rotating table, so as to ensure the precise and continuous in-situ measurement of the needle tip.

3. The three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectory according to claim 1 is characterized in that: In S2, the three-dimensional micro-nano spherical surface characterization system includes a multi-degree-of-freedom AFM system integrating a micro-nano positioning platform and a rotating sample stage, and a host computer. The host computer uses the normal bending deformation signal of the probe micro-cantilever as feedback to achieve imaging of a single sample surface morphology, or synchronous scanning imaging of the sample surface morphology and nanomechanical properties.

4. The three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectory according to claim 3 is characterized in that: When measuring a single three-dimensional micro-nano spherical surface morphology, the probe is mechanically driven at the first-order bending resonance frequency of the probe. When measuring the three-dimensional micro-nano spherical surface morphology and mechanical properties simultaneously, the probe is mechanically driven at a low frequency lower than the first-order resonance frequency of the probe.

5. The three-dimensional micro-nano spherical multi-parameter synchronous mapping method based on longitude and latitude scanning trajectory according to claim 1 is characterized in that: In S2, the specific test process of measuring the three-dimensional surface morphology of the single micro-nano sphere sample is as follows: S211: Based on the atomic force microscope, a periodically changing voltage input is used to displace a piezoelectric ceramic or electromagnetic coil, and a piezoelectric drive or a magnetic field drive method is used to mechanically excite the probe at the first-order bending resonance frequency of the probe to make it vibrate at a fixed bending amplitude; S212: making the probe approach the sample along a custom oblique angle, and obtaining a voltage signal curve at the needle tip position when the probe intermittently contacts the sample; S213: Continue to move the probe close to the sample along the custom oblique angle until the contact voltage between the probe and the sample reaches a set value, and record the absolute displacement value of the sample at this moment, which is the surface morphology of the sample.

6. The method for synchronously mapping three-dimensional micro-nano spherical multi-parameters based on longitude and latitude scanning trajectories according to claim 1, characterized in that: In S2, the specific test process of synchronously measuring the three-dimensional surface morphology and mechanical properties of the micro-nano sphere sample is as follows: S221: Based on the atomic force microscope, a periodically changing voltage is used to input a displacement piezoelectric ceramic or electromagnetic coil, and a piezoelectric drive or magnetic field drive method is used to mechanically excite the probe at a low frequency of 1 to 2 kHz to make it vibrate at a fixed bending amplitude, and a voltage signal curve of the free state vibration of the needle tip is obtained when the probe approaches the sample; S222: Make the probe approach the sample along a custom oblique angle, obtain a voltage signal curve of the needle tip position when the probe intermittently contacts the sample, and obtain a voltage signal curve of the probe force from the voltage curves of the probe in a free vibration state and an intermittent contact vibration state; S223: Continue to move the probe close to the sample along a custom oblique angle until the contact voltage between the probe and the sample reaches a set value, and obtain a force-displacement curve by combining the probe stiffness and the measurement system sensitivity; S224: According to the force-displacement curve and in combination with a corresponding mechanical model, obtaining corresponding physical properties of the material, including but not limited to surface morphology, adhesion, and Young's modulus parameters; S225: moving the sample to the next test point along the longitude or latitude direction, and adjusting the scanner to keep the feedback signal of the probe under mechanical excitation equal to the set value of the interaction voltage between the probe and the sample; S226: Repeat step S225 to achieve synchronous imaging measurement of the surface morphology and mechanical properties of three-dimensional micro-nano spherical samples.

7. The method for synchronously mapping three-dimensional micro-nano spherical multi-parameters based on longitude and latitude scanning trajectories according to claim 1 is characterized in that: The test data of each point during the scanning process is obtained by the following methods: (1) obtaining a three-dimensional surface topography image of the sample by recording the X-axis coordinate value, Y-axis coordinate value, and Z-axis coordinate value of the scanner when the probe reaches the set value of the interaction force; (2) During the test, the sample surface adhesion force is manifested as the maximum negative force generated when the needle tip moves away from the sample surface, which can be obtained by calculating the minimum force value in the interaction force curve between the probe and the sample; (3) By using a suitable contact mechanics model in AFM to fit the interaction curve data, the three-dimensional surface Young's modulus mapping result of the sample can be obtained; (4) Fitting the data of the positive indentation area of ​​the interaction force curve to obtain the equivalent stiffness in the process, and after decoupling the probe stiffness, obtaining the imaging results of the three-dimensional surface stiffness distribution of the sample; (5) The mechanical energy loss generated during the entire process of the needle tip approaching and moving away from the sample is expressed as energy dissipation. The integral area between the approach and withdrawal curve data in the interaction force curve is fitted to obtain the three-dimensional surface energy dissipation distribution result of the sample; (6) Corresponding to the X-axis coordinate value, Y-axis coordinate value, and Z-axis coordinate value recorded at this time, the four-dimensional data corresponding to the surface morphology and surface mechanical properties of the sample can be obtained.

8. The method for synchronously mapping three-dimensional micro-nano spherical multi-parameters based on longitude and latitude scanning trajectories according to claim 7 is characterized in that: The contact mechanics model includes but is not limited to the Hertz model, the Sneddon model, the DMT model and the JKR model.

9. The method for synchronously mapping three-dimensional micro-nano spherical multi-parameters based on longitude and latitude scanning trajectories according to any one of claims 1 to 8, characterized in that: During the longitude and latitude scanning process, based on the tracking trajectory feedforward compensation control and real-time eccentricity compensation algorithm, combined with the deformation of the probe with a protruding needle tip structure and the single-point controllable vector angle servo method, the design concept of synchronous characterization of the surface morphology and mechanical properties of large curvature three-dimensional micro-nano spheres is realized.

10. The method for synchronously mapping three-dimensional micro-nano spherical multi-parameters based on longitude and latitude scanning trajectories according to any one of claims 1 to 8, characterized in that: The multi-degree-of-freedom three-dimensional micro-nano spherical surface characteristic characterization system configuration of the integrated rotating sample stage and the micro-nano positioning stage in the rotating sample stage hardware unit includes but is not limited to piezoelectrically driven and magnetically driven probe mechanical excitation methods.

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