Laser direct writing imaging control method and system and related equipment

Abstract

The embodiment of the invention provides a laser direct-writing imaging control method, a laser direct-writing imaging control system and related equipment, which are used for improving the precision and the consistency of laser direct-writing imaging. The method provided by the embodiment of the invention comprises the following steps: calculating a difference value Di between a theoretical position and a fitting coordinate of each laser light source, wherein i is a laser light source number; calculating a small-cycle scanning line number L = (Di (max)-Di (min)) / P + 1; after the laser array is reversely moved for Di (max) in the direction perpendicular to the scanning direction, the laser array is controlled to conduct small-period scanning; in each small-cycle scanning process, L times of scanning are sequentially carried out, in each scanning process, only the laser light source with the current position located at the theoretical exposure position is started and scans the corresponding pixel row, and after each time of scanning is completed, one pixel interval is moved in the vertical direction of scanning; and after each small-period scanning, moving S1 relative to the initial position of the previous small period in the vertical direction of the scanning direction, and then continuing the next small-period scanning until C times of small-period scanning are completed.

Description

Technical Field

[0001] The present invention relates to the technical field of laser direct writing imaging, and in particular to a laser direct writing imaging control method, system and related equipment. Background Art

[0002] Laser direct writing imaging refers to the process of selectively exposing pixels on the photosensitive coating by controlling a light source array composed of laser light sources to scan the exposure surface, then developing the exposed photosensitive coating, and thereby generating the desired developed image on the photosensitive coating.

[0003] For example, taking a light source array with 10 laser light sources arranged equidistantly, and the spacing between adjacent laser light sources is 3 times the pixel spacing, in each scanning cycle, the pixels on the 1st column, the 2nd column, and the 3rd column need to be exposed in sequence, and the 4th step needs to take a larger step length to enter the starting position of the next cycle. Figure 1 As shown in the decomposition diagram, the exposure points in the first row are decomposed and exposed in the exposure order of the second row to the sixth row.

[0004] The applicant found that if Figure 1 In a similar scanning method, three adjacent pixel columns are exposed by the same laser light source. If the laser energy of the adjacent laser light sources is uneven (the exposure energy intensity is different), there will be obvious exposure differences in the adjacent exposure areas of the adjacent laser light sources (for example, the area where the 1st to 3rd columns are located and the area where the 4th to 6th columns are located), and the consistency of the exposure of the entire format is poor. In addition, the laser light source will deviate from the theoretical installation position due to installation errors, which will cause overlaps or gaps in the exposure areas of adjacent laser light sources, affecting the exposure accuracy of the format. In order to solve any of the above problems, it is necessary to improve the existing laser direct writing imaging control method. Summary of the invention

[0005] The embodiments of the present invention provide a laser direct writing imaging control method, system and related equipment, which are used to improve the accuracy and consistency of laser direct writing imaging.

[0006] A first aspect of an embodiment of the present invention provides a laser direct writing imaging control method, which may include:

[0007] Calculate the difference D between the theoretical position and the fitted coordinates of each laser source i , i is the laser light source number;

[0008] Calculate the number of scan lines in a small cycle L = (D i (max)-D i (min)) / P+1; where D i (max), D i (min) respectively D iThe maximum and minimum values ​​in , P is the pixel spacing;

[0009] The laser array is moved in the reverse direction perpendicular to the scanning direction by D i (max), the laser array is controlled to perform small-cycle scanning; in each small-cycle scanning process, L scans are performed in sequence, and in each scanning process, only the laser light source at the current position at the theoretical exposure position is started and scans the corresponding pixel row, and after each scan is completed, it moves 1 pixel spacing in the vertical direction of the scan;

[0010] After each small cycle scan, the next small cycle scan is continued after moving S1 in the vertical direction of the scanning direction relative to the initial position of the previous small cycle until C small cycle scans are completed; the ratio of S1 to the pixel pitch P is an integer greater than 1, and C is an integer value of the ratio of the theoretical gap W between adjacent laser light sources to the pixel pitch P.

[0011] Optionally, as a possible implementation manner, the laser direct writing imaging control method in the embodiment of the present invention may further include:

[0012] The adjustment step length S1 is calculated as A*WP, where A is an integer value of N / C; and N is the number of non-overlapping laser light sources in a direction perpendicular to the scanning direction.

[0013] Optionally, as a possible implementation manner, the laser direct writing imaging control method in the embodiment of the present invention may further include:

[0014] The laser array is controlled to adjust its position in the direction perpendicular to the scanning direction according to the period step S2 and then continues the next large-period scan, each large-period scan comprising C small-period scans; wherein S2 = W*N-S1*(C-1).

[0015] Optionally, as a possible implementation manner, the laser direct writing imaging control method in the embodiment of the present invention may further include:

[0016] According to the actual installation position of each laser light source, the closest pixel integer position coordinate is determined as the fitting coordinate.

[0017] A second aspect of an embodiment of the present invention provides a laser direct writing imaging control system, which may include:

[0018] The first calculation module calculates the difference D between the theoretical position of each laser light source and the fitted coordinates i , i is the laser light source number;

[0019] The second calculation module calculates the number of small cycle scanning lines L = (D i (max)-D i (min)) / P+1; where Di (max), D i (min) respectively D i The maximum and minimum values ​​in , P is the pixel spacing;

[0020] The scanning control module moves the laser array in the reverse direction perpendicular to the scanning direction by D i (max), the laser array is controlled to perform small-cycle scanning; in each small-cycle scanning process, L scans are performed in sequence, and in each scanning process, only the laser light source at the current position at the theoretical exposure position is started and scans the corresponding pixel row, and after each scan is completed, it moves 1 pixel spacing in the vertical direction of the scan;

[0021] The first adjustment module, after each small cycle scan, moves S1 in the vertical direction of the scanning direction relative to the initial position of the previous small cycle and then continues the next small cycle scan until C small cycle scans are completed; the ratio of S1 to the pixel pitch P is an integer greater than 1, and C is an integer value of the ratio of the theoretical gap W between adjacent laser light sources to the pixel pitch P.

[0022] Optionally, as a possible implementation manner, the laser direct writing imaging control system in the embodiment of the present invention may further include:

[0023] The third calculation module calculates the adjustment step size S1 = A*WP, where A is an integer value of N / C; and N is the number of non-overlapping laser light sources in a direction perpendicular to the scanning direction.

[0024] Optionally, as a possible implementation manner, the laser direct writing imaging control system in the embodiment of the present invention may further include:

[0025] The second adjustment module controls the laser array to adjust its position in the vertical direction of the scanning direction according to the period step S2 and then continue the next large-cycle scan, each large-cycle scan includes C small-cycle scans; wherein, S2 = W*N-S1*(C-1).

[0026] Optionally, as a possible implementation manner, the laser direct writing imaging control system in the embodiment of the present invention may further include:

[0027] The fitting module determines the closest pixel integer position coordinates as fitting coordinates according to the actual installation positions of each laser light source.

[0028] A third aspect of an embodiment of the present invention provides a computer device, the computer device comprising a processor, the processor being configured to implement the steps in the first aspect and any possible implementation manner of the first aspect when executing a computer program stored in a memory.

[0029] A fourth aspect of an embodiment of the present invention provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the steps in the first aspect and any possible implementation of the first aspect are implemented.

[0030] It can be seen from the above technical solutions that the embodiments of the present invention have the following advantages:

[0031] In an embodiment of the present invention, the laser array is moved in the opposite direction in the vertical direction of the scanning direction according to the spacing between the theoretical position of the laser light source and the actual fitting position. The laser light source corresponding to the maximum deviation value in the laser array after adjustment will not miss the first row of pixels in its theoretical scanning interval, and all pixel rows of the allocated theoretical scanning interval can be scanned to avoid overlap or gaps in the exposed pixel rows. Therefore, in an embodiment of the present application, the theoretical scanning interval of each laser light source does not need to be affected by the installation error, and the on-demand adjustment of the theoretical scanning interval is achieved. Secondly, after each small cycle scan, the next small cycle scan is continued after adjusting S1 in the vertical direction of the scanning direction, so that two adjacent scans of the same laser correspond to non-adjacent pixel rows respectively, which can avoid obvious exposure differences caused by differences in the light output power of the laser, and improve the consistency of the overall format exposure. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A schematic diagram of the laser scanning steps in the related art;

[0033] Figure 2 A schematic diagram of an embodiment of a laser direct writing imaging control method in an embodiment of the present invention;

[0034] Figure 3 It is a schematic diagram of the decomposition of scanning steps in a specific application embodiment of the present invention;

[0035] Figure 4 FIG. 4 is a schematic diagram of an embodiment of a computer device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0037] The terms "first", "second", "third", "fourth", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0038] In the description of this application, unless otherwise specified, "multiple" means two or more. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two components.

[0039] For ease of understanding, the specific process in the embodiment of the present invention is described below. Figure 1 , an embodiment of a laser direct writing imaging control method in an embodiment of the present invention may include:

[0040] S201: Determine the pixel integer position coordinates closest to the actual installation position of each laser light source, and calculate the difference D between the theoretical position of each laser light source and the pixel integer position coordinates i ;

[0041] In the embodiment of the present application, for ease of control, the laser array is theoretically designed to be arranged at equal intervals in the direction perpendicular to the scanning direction. However, due to actual installation errors, the actual position of the laser light source in the laser array (in the direction perpendicular to the laser scanning direction) will be offset. In order to reduce the imaging error caused by the offset of the installation position, it is necessary to obtain the theoretical position coordinates and actual installation position coordinates of each laser light source in the direction perpendicular to the scanning direction in advance, so as to adjust the corresponding laser direct writing imaging control strategy according to the installation error.

[0042] After obtaining the theoretical position coordinates and actual installation position coordinates of each laser light source in the vertical direction of scanning, in order to facilitate the assignment of pixel rows to the closest laser light source, the actual installation position of each laser light source can be fitted to the closest pixel integer position coordinate.

[0043] For example, a certain pixel integer position (i.e., the coordinates of the position are integer multiples of the pixel pitch P) X, and its corresponding interval (X-(P / 2), X+(P / 2)) can be discretized into the same theoretical position X. If higher accuracy is required, the range of the interval can be further narrowed, which is not limited here. For example, P=10, and the theoretical pitch set for each laser light source is 60. Assuming that the theoretical position coordinates are P1={0, 60, 120, 180, 240, 300}, and assuming that there is an error between the actual installation of the actual laser light source and the theory, such as P2={0, 52, 128, 179, 261, 304}, the laser light source A with a theoretical position of 60 is actually installed at position 52. 52 is not within the interval (55, 65) of the theoretical position 60, but is within the interval (45, 55) of the pixel integer position 50. Therefore, the pixel integer position coordinate closest to the laser light source A can be determined as 50. By analogy, after the group of laser light sources is discretized, the pixel integer position coordinate closest to the actual installation position of each laser light source is used as the fitting coordinate P3 = {0, 50, 130, 180, 260, 300}.

[0044] After determining the fitting coordinates of each laser light source, the difference D between the theoretical position of each laser light source and the fitting coordinates can be further calculated. i , i is the laser light source number. For example, D1 to D6 between the theoretical coordinates P1 = {0, 60, 120, 180, 240, 300} and the fitting coordinates P3 = {0, 50, 130, 180, 260, 300} are respectively: 0, -10, 10, 20, 0. It can be understood that in the embodiment of the present application, the difference between the actual position and the theoretical position can also be directly calculated and then rounded.

[0045] S202: Calculate the number of scan lines in a small cycle L = (D i (max)-D i (min)) / P+1;

[0046] S203: Move the laser array in the opposite direction of the scanning direction by D i (max), the laser array is controlled to perform small-cycle scanning;

[0047] In order to compensate for the overlap or gap that may be caused by the installation error of the laser light source, so that the actual number of scanning pixel rows of each laser light source is closest to its assigned theoretical scanning position, and the laser light source with the largest offset does not miss the theoretical position, in the embodiment of the present application, the laser array is moved in the reverse direction of the scanning direction by D i After (max) (so that the laser light source with the largest deviation does not miss the theoretical position), the laser array is controlled to perform small-cycle scanning.

[0048] In each small cycle scanning process, L scans are performed in sequence (L=(D i (max)-D i (min)) / P+1, each small cycle scanning range can cover D i (max) and D i (min) The maximum offset range between the two). During each scan, only the laser light source at the current position of the theoretical exposure position starts and scans the corresponding pixel row, and after each scan, it moves 1 pixel spacing in the vertical direction of the scan until the laser array scans L times in sequence. Specifically, the theoretical exposure position can be determined according to the small cycle adjustment step S1, and the spacing between adjacent exposure rows of the same laser light source can be set equal to S1. For example Figure 3 The pixel rows sequentially exposed by laser light source No. 1 have coordinates in the vertical direction of the scanning direction of 0, 50, 100, 150...; the pixel rows sequentially exposed by laser light source No. 2 have coordinates in the vertical direction of the scanning direction of 60, 110, 160, 210...

[0049] For example, a group of laser light sources numbered 1 to 6 with the theoretical position coordinates P1={0, 60, 120, 180, 240, 300} is used as an example for explanation. The theoretical scanning positions of the first row of pixels to be exposed by the laser light sources 1 to 6 are 0, 60, 120, 180, 240, 300, respectively. Figure 3 The scanning process is explained in detail with the schematic diagram shown in FIG. i (max)-D i (min)) / P+1=(20+10) / 10+1=4, so each small cycle needs to be scanned 4 times in sequence, and the reverse movement D i (max) = 20 (the coordinate of laser source No. 1 is -20), in the scanning direction ( Figure 3 The vertical direction is the vertical direction) and moves in the opposite direction by 20 (i.e. Figure 3 In the horizontal direction of Step 1), at this position, only the position of laser light source No. 5 is at the theoretical position 240, then only laser light source No. 5 is turned on; after the scan is completed, it moves one pixel distance 10 in the vertical direction of the scanning direction and is located at the position of Step 2. At this position, only laser light source No. 3 is at the theoretical position 120, then only laser light source No. 5 is turned on; after the scan is completed, it moves one pixel distance 10 in the vertical direction of the scanning direction and is located at the position of Step 3. At this position, laser light sources No. 1, 4, and 6 are at the theoretical position 120, then laser light sources No. 1, 4, and 6 are turned on; after the scan is completed, it moves one pixel distance in the vertical direction of the scanning direction and is located at the position of Step 4. At this position, laser light source No. 2 is at the theoretical position 60, then only laser light source No. 2 is turned on.

[0050] S204: After each small cycle scan, the initial position of the previous small cycle is moved S1 in the vertical direction of the scan direction and then continues to scan the next small cycle.

[0051] In order to avoid the same laser light source scanning adjacent pixel rows / columns, the adjustment step length S1 can be obtained in advance, so that after each scan of a small cycle, the position can be adjusted according to S1 and then the next small cycle scan can be continued. Among them, adjusting the position according to S1 means that the vertical direction of the scanning direction is moved by S1 relative to the initial position of the previous small cycle in the vertical direction of the scanning direction and then the next small cycle scan is continued. In the case where the scanning step length is equal to the pixel pitch, the ratio of S1 to the pixel pitch P only needs to be an integer greater than 1, so that the same laser light source can scan non-adjacent pixel rows twice in a row.

[0052] Preferably, as a possible implementation, the value of S1 can be determined as follows: first, the motion coefficient A is calculated as an integer value of N / C, and the adjustment step length S1=A*WP is calculated. Wherein, N is the number of laser light sources in the same column, W is the gap between adjacent laser light sources, and C is the integer value of the ratio of the gap between adjacent laser light sources W to the pixel pitch P. Using (A*WP) as the adjustment step length can maximize the total step length range of scanning within a scanning cycle, minimize the switching of the scanning cycle, and help improve the stability and efficiency of scanning imaging.

[0053] With the above Figure 3 The actual application example shown in the figure shows that S1 = 1*60-10 = 50. After completing Step 1 to Step 4, the process moves 50 relative to Step 1, that is, Figure 3 The position of Step 5 shown in the figure. Six small cycles in this way constitute a large cycle, and the distance between the initial positions of each small cycle in the vertical direction of the scanning direction is S1. For easy observation, Figure 3 In the figure, all the pixel rows scanned by the laser light source are gathered and illustrated at the top. It can be seen that the interval between two rows of pixels exposed by the same laser light source is 50, that is, the same laser light source does not expose adjacent pixel rows.

[0054] S205: Control the laser array to adjust the position in the direction perpendicular to the scanning direction according to the period step S2 and then continue the next large period scanning.

[0055] Optionally, after completing C small cycle scans, if the required exposure format is not completed, the laser array can continue to be controlled to adjust the position in the vertical direction of the scanning direction according to the cycle step S2 and then continue the next large cycle scan, and each large cycle scan includes C small cycle scans. Specifically, the cycle step S2 = W*N-S1*(C-1), N is the number of laser light sources in the same column, W is the gap between adjacent laser light sources, and C is the integer value of the ratio of the gap W between adjacent laser light sources to the pixel pitch P.

[0056] by Figure 3 The example shown shows that S2 = 60*60-50*50 = 110, which is the last step of the previous cycle ( Figure 3 The laser sources in Step 24) and the first step of the next large cycle ( Figure 3 The spacing between the laser light sources in the vertical direction of the scanning direction is 110, such as Figure 3 The laser source No. 1 in Step 24 and the laser source No. 1 in Step 25 are Figure 3 The spacing in the horizontal direction (i.e., the vertical direction of the scanning direction) is 110.

[0057] It can be understood that in various embodiments of the present application, the size of the serial numbers of the above steps does not mean the order of execution. The execution order of each step should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0058] It can be known from the above disclosure that in the embodiment of the present application, the laser array is moved in the opposite direction in the vertical direction of the scanning direction according to the distance between the theoretical position of the laser light source and the actual fitting position, and the laser light source corresponding to the maximum deviation value in the laser array after adjustment will not miss the first row of pixels in its theoretical scanning interval, and all pixel rows of the allocated theoretical scanning interval can be scanned. Therefore, in the embodiment of the present application, the theoretical scanning interval of each laser light source does not need to be affected by the installation error, and the on-demand adjustment of the theoretical scanning interval is achieved. Secondly, after each small cycle scan, the next small cycle scan is continued after moving S1 in the vertical direction of the scanning direction relative to the initial position of the previous small cycle, so that two adjacent scans of the same laser correspond to non-adjacent pixel rows respectively, which can avoid obvious exposure differences caused by differences in the light output power of the laser, and improve the consistency of the overall format exposure.

[0059] The first calculation module calculates the difference D between the theoretical position of each laser light source and the fitted coordinates i , i is the laser light source number;

[0060] The second calculation module calculates the number of small cycle scanning lines L = (D i (max)-Di (min)) / P+1; where D i (max), D i (min) respectively D i The maximum and minimum values ​​in , P is the pixel spacing;

[0061] The scanning control module moves the laser array in the reverse direction perpendicular to the scanning direction by D i (max), the laser array is controlled to perform small-cycle scanning; in each small-cycle scanning process, L scans are performed in sequence, and in each scanning process, only the laser light source at the current position at the theoretical exposure position is started and scans the corresponding pixel row, and after each scan is completed, it moves 1 pixel spacing in the vertical direction of the scan;

[0062] The first adjustment module, after each small cycle scan, moves S1 in the vertical direction of the scanning direction relative to the initial position of the previous small cycle and then continues the next small cycle scan until C small cycle scans are completed; the ratio of S1 to the pixel pitch P is an integer greater than 1, and C is an integer value of the ratio of the theoretical gap W between adjacent laser light sources to the pixel pitch P.

[0063] Optionally, as a possible implementation manner, the laser direct writing imaging control system in the embodiment of the present invention may further include:

[0064] The third calculation module calculates the adjustment step size S1 = A*WP, where A is an integer value of N / C; and N is the number of non-overlapping laser light sources in a direction perpendicular to the scanning direction.

[0065] Optionally, as a possible implementation manner, the laser direct writing imaging control system in the embodiment of the present invention may further include:

[0066] The second adjustment module controls the laser array to adjust its position in the vertical direction of the scanning direction according to the period step S2 and then continue the next large-cycle scan, each large-cycle scan includes C small-cycle scans; wherein, S2 = W*N-S1*(C-1).

[0067] Optionally, as a possible implementation manner, the laser direct writing imaging control system in the embodiment of the present invention may further include:

[0068] The fitting module determines the closest pixel integer position coordinates as fitting coordinates according to the actual installation positions of each laser light source.

[0069] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0070] The laser direct writing imaging control system in the embodiment of the present invention is described above from the perspective of modular functional entities. Figure 4 , the computer device in the embodiment of the present invention is described below from the perspective of hardware processing:

[0071] The computer device 1 may include a memory 11, a processor 12 and an input / output bus 13. The processor 12 implements the above Figure 1 The steps in the method embodiment shown are, for example, Figure 2 Alternatively, when the processor executes the computer program, the functions of the modules or units in the above-mentioned device embodiments are realized.

[0072] The memory 11 includes at least one type of readable storage medium, and the readable storage medium includes a flash memory, a hard disk, a multimedia card, a card-type memory (for example, an SD or DX memory, etc.), a magnetic memory, a magnetic disk, an optical disk, etc. In some embodiments, the memory 11 may be an internal storage unit of the computer device 1, such as a hard disk of the computer device 1. In other embodiments, the memory 11 may also be an external storage device of the computer device 1, such as a plug-in hard disk equipped on the computer device 1, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (Flash Card), etc. Further, the memory 11 may also include both an internal storage unit of the computer device 1 and an external storage device. The memory 11 may not only be used to store application software and various types of data installed in the computer device 1, such as the code of a computer program, etc., but may also be used to temporarily store data that has been output or is to be output.

[0073] In some embodiments, the processor 12 may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor or other data processing chip, and is used to run program codes or process data stored in the memory 11, such as executing a computer program.

[0074] The input / output bus 13 may be a peripheral component interconnect (PCI) bus or an extended industry standard architecture (EISA) bus, etc. The bus may be divided into an address bus, a data bus, a control bus, etc.

[0075] Furthermore, the computer device may also include a wired or wireless network interface 14. The network interface 14 may optionally include a wired interface and / or a wireless interface (such as a WI-FI interface, a Bluetooth interface, etc.), which is usually used to establish a communication connection between the computer device 1 and other electronic devices.

[0076] Optionally, the computer device 1 may also include a user interface, which may include a display (Display), an input unit such as a keyboard (Keyboard), and optionally, the user interface may also include a standard wired interface and a wireless interface. Optionally, in some embodiments, the display may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, and an OLED (Organic Light-Emitting Diode) touch device, etc. The display may also be appropriately referred to as a display screen or a display unit, which is used to display information processed in the computer device 1 and to display a visual user interface.

[0077] Figure 4 Only the computer device 1 having components 11-14 and a computer program is shown, and those skilled in the art will understand that Figure 4 The structure shown does not constitute a limitation on the computer device 1, and may include fewer or more components than shown in the figure, or combine certain components, or arrange the components differently.

[0078] The present invention also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the following can be achieved: Figure 2 Alternatively, when the processor executes the computer program, the functions of each module or unit in the above-mentioned device embodiments are realized.

[0079] In the several embodiments provided in the present application, it should be understood that the disclosed systems, modules and units can be implemented in other ways. For example, the system embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, which can be electrical, mechanical or other forms.

[0080] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0081] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0082] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes.

[0083] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A laser direct writing imaging control method, characterized in that: Applied to a laser array arranged at equal intervals in a direction perpendicular to a scanning direction, the method comprises: Calculate the difference D between the theoretical position and the fitted coordinates of each laser source i , i is the laser light source number; Calculate the number of scan lines in a small cycle L = (D i (max)-D i (min)) / P+1; where D i (max), D i (min) respectively D i The maximum and minimum values ​​in , P is the pixel spacing; The laser array is moved in the reverse direction perpendicular to the scanning direction by D i (max), the laser array is controlled to perform small-cycle scanning; in each small-cycle scanning process, L scans are performed in sequence, and in each scanning process, only the laser light source at the current position at the theoretical exposure position is started and scans the corresponding pixel row, and after each scan is completed, it moves 1 pixel spacing in the vertical direction of the scan; After each small cycle scan, the next small cycle scan is continued after moving S1 in the vertical direction of the scanning direction relative to the initial position of the previous small cycle until C small cycle scans are completed; the ratio of S1 to the pixel pitch P is an integer greater than 1, and C is an integer value of the ratio of the theoretical gap W between adjacent laser light sources to the pixel pitch P.

2. The method according to claim 1, characterized in that: Also includes: The adjustment step length S1 is calculated as A*WP, where A is an integer value of N / C; and N is the number of non-overlapping laser light sources in a direction perpendicular to the scanning direction.

3. The method according to claim 1 or 2, characterized in that: Also includes: The laser array is controlled to adjust its position in the direction perpendicular to the scanning direction according to the period step S2 and then continues the next large-period scan, each large-period scan comprising C small-period scans; wherein S2 = W*N-S1*(C-1).

4. The method according to any one of claims 1 to 3, characterized in that Also includes: According to the actual installation position of each laser light source, the closest pixel integer position coordinate is determined as the fitting coordinate.

5. A laser direct writing imaging control system, characterized in that: include: The first calculation module calculates the difference D between the theoretical position of each laser light source and the fitted coordinates i , i is the laser light source number; The second calculation module calculates the number of small cycle scanning lines L = (D i (max)-D i (min)) / P+1; where D i (max), D i (min) respectively D i The maximum and minimum values ​​in , P is the pixel spacing; The scanning control module moves the laser array in the reverse direction perpendicular to the scanning direction by D i (max), the laser array is controlled to perform small-cycle scanning; In each small cycle scanning process, L scans are performed in sequence. In each scanning process, only the laser light source at the current position at the theoretical exposure position is started and scans the corresponding pixel row, and after each scan is completed, it moves 1 pixel spacing in the vertical direction of the scan; The first adjustment module, after each small cycle scan, moves S1 in the vertical direction of the scanning direction relative to the initial position of the previous small cycle and then continues the next small cycle scan until C small cycle scans are completed; the ratio of S1 to the pixel pitch P is an integer greater than 1, and C is an integer value of the ratio of the theoretical gap W between adjacent laser light sources to the pixel pitch P.

6. The system according to claim 5, characterized in that Also includes: The third calculation module calculates the adjustment step size S1 = A*WP, where A is an integer value of N / C; and N is the number of non-overlapping laser light sources in a direction perpendicular to the scanning direction.

7. The system according to claim 5 or 6, characterized in that: Also includes: The second adjustment module controls the laser array to adjust its position in the vertical direction of the scanning direction according to the period step S2 and then continue the next large-cycle scan, each large-cycle scan includes C small-cycle scans; wherein, S2 = W*N-S1*(C-1).

8. The system according to any one of claims 5 to 7, characterized in that Also includes: The fitting module determines the closest pixel integer position coordinates as fitting coordinates according to the actual installation positions of each laser light source.

9. A computer device, characterized in that: The computer device comprises a processor, and the processor is configured to implement the method according to any one of claims 1 to 4 when executing a computer program stored in a memory.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method according to any one of claims 1 to 4 is implemented.

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