Roll-to-roll plasma treatment method for surface treatment

Abstract

The invention provides a roll-to-roll plasma treatment method for surface treatment. The roll-to-roll plasma treatment method comprises the steps that programmable pulse plasma cavities are installed in all functional areas of a treatment line; a low-energy-density plasma source and an auxiliary cleaning device are arranged in the pretreatment area; a high and low frequency pulse modulation and multi-path gas switching device is applied in the function modification area; a movable nozzle and a focusing pulse plasma source are integrated in the local functional area; a passivation plasma source and an infrared source are arranged in the post-treatment area; detecting instruments are arranged at the tail ends of the partitions and the processing lines; running a pre-trained machine learning model in the control system; and recording each batch of processing parameters and detection results in a database, and regularly updating the machine learning model. According to the method, cleaning, modification and functionalization can be synergistically completed in the same process through multi-partition treatment, the overall turnover period of the material is remarkably shortened, and the treatment precision between batches can be more easily kept consistent; the production efficiency is improved, and the occupied time and energy consumption of equipment can be reduced.

Description

Technical Field

[0001] The invention relates to the technical field of plasma surface treatment, and in particular to a roll-to-roll plasma treatment method for surface treatment. Background Art

[0002] Roll-to-roll plasma surface treatment technology has a relatively mature application form in the fields of large-area thin-film substrates or flexible electronic materials. The common practice is to use a single partition or a small number of treatment areas to achieve a certain degree of cleaning and surface activation, and simple online detection methods can meet basic requirements.

[0003] Existing technologies can often only work in a relatively fixed processing environment, lack the flexibility to switch between multiple gas ratios and complex pulse modes, and are difficult to perform differentiated modification or functionalization of local areas. Traditional methods are mainly based on manual sampling or periodic monitoring in terms of detection and feedback, and are unable to instantly grasp the changes in surface state during the processing process, which not only leads to high energy consumption, but also limits the possibility of fine-tuning the material properties.

[0004] Since most production lines fail to develop the ability to automatically adjust the parameters of each partition in real time, the processing results are easily affected by batch differences, environmental fluctuations or personnel experience, and uneven surface treatment or excessive modification often occurs. Once defects or errors occur, they usually can only be reworked or defective products are eliminated afterwards, resulting in low overall production efficiency, insufficient material utilization, and large fluctuations in product quality. In addition, when high performance requirements or large-scale production are required, it is more likely to lead to additional costs and delivery risks due to increased non-conforming rates. Summary of the invention

[0005] In order to overcome the shortcomings of the prior art, the present invention proposes a roll-to-roll plasma treatment method for surface treatment. The system can adaptively adjust parameters according to batch differences and environmental fluctuations, and can continuously accumulate data for model iteration in long-term production; this not only significantly improves process consistency, but also makes switching to different materials or new functional requirements more convenient, which helps companies maintain flexible production capabilities in a changing market.

[0006] To achieve the above object, the present invention provides a roll-to-roll plasma treatment method for surface treatment, comprising the following steps: Step 1: The pretreatment area, functional modification area, local functionalization area and post-treatment area are sequentially configured on the production line. Each area is equipped with an independent programmable pulse plasma source, gas supply pipeline and flow control valve, and the treatment range and upper limit of process parameters of each area are set in the control system; Step 2: Set up a low-energy density plasma source and an additional cleaning device (such as a brush roller or air knife) in the pretreatment area. After the material is introduced into this area, the floating dust and attachments on the surface of the material are removed by combining oxygen or inert gas and other formulas. At the same time, the initial surface state data of the material is obtained through online detection instruments; Step 3: In the functional modification area, the ion bombardment and passivation sequence with different energy levels is realized through the high-low frequency superposition pulse mode and the multi-channel gas switching valve; the pulse timing (such as microsecond or millisecond pulse width) is preset in the control system so that the material can complete the surface activation and modification operations in sequence when passing through this area; Step 4: Install a movable or scanning nozzle in the local functionalization area to spray the precursor compound to a specific part of the material; complete the local deposition or functionalization under ion bombardment conditions, and adjust the nozzle trajectory and pulse energy focusing range according to the feedback from the material tension sensor or position detection system; Step 5: In the post-processing area, the material surface is passivated or lightly annealed by a relatively low-power plasma source or a low-temperature heating device, and the vacuum degree or gas type is adjusted as needed to ensure that the generated functional layer or modified layer is further solidified or stabilized under controlled conditions; Step 6: Install surface monitoring probes, optical detectors or surface energy measuring devices at each partition and at the end of the roll-to-roll process, and transmit the measured data (temperature, surface condition, etc.) to the centralized control unit in real time to compare the set process parameters and record the complete production process data; Step 7: Run the pre-trained machine learning algorithm in the centralized control unit to automatically calculate the adjustment amount of each partition power, pulse frequency, gas ratio and line speed based on the online detection data and set goals; send the adjustment command to the corresponding plasma source and valve to make fine adjustments to the system during operation; Step 8: After each batch of production is completed, all process parameters, test data and final material status are recorded in the database, and the training set of the machine learning model is updated regularly; new process parameter configurations are loaded in subsequent batches of production to achieve rapid switching and adaptive processing of different materials or new functional requirements.

[0007] Furthermore, step 1 is as follows: Step 1.1: Divide the physical locations of the pretreatment area, functional modification area, local functionalization area and post-treatment area, and reserve appropriate space for tension control and winding devices; Step 1.2: Reserve interfaces and fixed positions in each partition, configure independent plasma generators, power controllers and gas pipelines, and lay the foundation for subsequent precise control; Step 1.3: According to the process requirements of each partition, set up independent gas supply valve groups and flow meters to ensure that the gas ratio and flow between different partitions can be controlled separately; Step 1.4: Install the main controller in the control room or central monitoring platform, and connect each partition equipment, sensor and safety interlock system to a unified communication network.

[0008] Furthermore, step 2 is as follows: Step 2.1: Load the material into the unwinding unit and operate it stably through the tension sensor or the deviation correction device to ensure that the material is flat and wrinkle-free when passing through the pre-treatment area; Step 2.2: Select a plasma mode with lower energy density for the pretreatment area and match the corresponding gas formula (such as argon / oxygen mixture) to remove surface dust or oil stains; Step 2.3: Use a brush roller or air knife in a low-energy plasma environment to clean the material surface mechanically or with airflow to improve the decontamination efficiency; Step 2.4: Install an online measuring instrument (optical probe or surface energy meter) at the exit of the pretreatment area and record the detected material status data in the central control system.

[0009] Furthermore, step 3 is as follows: Step 3.1: Input the pulse frequency, duty cycle and upper and lower limits of power on the plasma source of the functional modification area, and select high frequency / low frequency or mixed pulse mode according to the material characteristics; Step 3.2: Connect nitrogen, oxygen, hydrogen or other reactive gases and preset the switching sequence in the control system to complete multiple surface chemical treatments in the same partition; Step 3.3: Use high energy pulses to ion bombard the material surface for activation, and then switch to low energy pulses for passivation or functional group introduction to form a composite treatment process; Step 3.4: An optical or surface energy detector is set at the exit of the functional modification area. If the detection value deviates too much from the target range, the pulse power or gas ratio is automatically adjusted.

[0010] Furthermore, step 4 is as follows: Step 4.1: Integrate a programmable robotic arm or slide rail system in the local functionalized area to ensure that the nozzle can be accurately positioned in the width direction of the material; Step 4.2: Connect the supply line of the specific functional precursor (such as fluorine-containing, silicon-containing or metal-doped compound) and configure the atomization or injection device to enable the liquid or gas to be evenly dispersed; Step 4.3: Synchronously start the pulse plasma source in the nozzle area to ion activate or bond the sprayed precursor to the material surface to form a local functional layer; Step 4.4: Dynamically fine-tune the nozzle motion trajectory and plasma source energy output through roll-to-roll position information and sensor feedback to ensure that the functional layer is formed in the predetermined area and maintain processing uniformity.

[0011] Furthermore, step 5 is as follows: Step 5.1: Arrange a low energy density plasma source in the post-treatment area and set stable power and pulse parameters in the control system to limit further activation reactions on the material surface; Step 5.2: Install infrared or near-infrared heating modules in the post-processing area, combine with temperature sensors, and maintain the preset heating temperature through the central control system to ensure that the material substrate is not deformed due to excessive temperature; Step 5.3: According to the material characteristics and upstream processing requirements, use an adjustable vacuum pump or introduce inert gas in the post-processing area, and use a flow control valve to independently set the environment in the area; Step 5.4: Install a temperature and surface detector at the exit of the post-processing area to record the state parameters of the material after low-energy plasma and heat treatment, and compare them with the set process benchmark.

[0012] Furthermore, step 6 is as follows: Step 6.1: Arrange optical detection probes, temperature sensors or surface energy measuring devices at the entrances or exits of the pretreatment area, functional modification area, local functionalization area and post-treatment area, and connect them to the centralized control system; Step 6.2: The signals of each probe are transmitted to the central control system in real time through the data acquisition card or controller via industrial Ethernet or serial bus to ensure that the sensor information is complete and available during the processing; Step 6.3: Set the upper or lower alarm limits for key parameters (such as temperature, power, and vacuum) in the monitoring software, and set the sampling interval for data recording to facilitate subsequent analysis and abnormality troubleshooting; Step 6.4: Regularly compare the collected data with manual measurement results or standard sample data. If any deviation occurs, calibrate the sensor or update the sampling frequency in time to ensure the reliability of process monitoring.

[0013] Furthermore, step 7 is as follows: Step 7.1: Load the existing machine learning model in the central control system and establish an interface with the online detection data so that the model can read the material status and process parameters in real time; Step 7.2: Map the outputs of power, gas ratio, pulse frequency or line speed calculated by the model to the corresponding programmable logic controller (PLC) or process control module in the control software; Step 7.3: Set the model update cycle according to the production line speed and detection frequency; if prediction errors or parameter mismatches are found, shorten the update interval or increase the data sampling rate; Step 7.4: When the production line is running, the model continuously adjusts the key parameters of each partition based on the collected data; if the deviation exceeds the limit, the system will issue a prompt and automatically reduce the speed or shut down for protection when necessary.

[0014] Furthermore, step 8 is as follows: Step 8.1: During the operation of the production line, the material batch information, partition setting parameters, sensor detection data, and parameter adjustment records of the model output are uniformly stored in the database or cloud storage; Step 8.2: Number the processed materials and associate them with the corresponding process logs to facilitate subsequent inquiries on the processing details and parameter settings of specific batches in each partition; Step 8.3: During production breaks or designated maintenance windows, extract recent production data from the database and use it together with previous data for model retraining or parameter optimization; Step 8.4: After confirming that the new model has passed the test verification, it is deployed to the control system for use in the next batch or new material processing to achieve continuous process improvement and adaptive processing.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention provides a roll-to-roll plasma treatment method for surface treatment, which can complete multiple steps from pretreatment to local functionalization on one production line, reducing the extra time and energy loss caused by transporting materials between different equipment or multiple unwinding and rewinding; this can reduce the redundancy of the production process, thereby reducing equipment occupancy costs and personnel investment.

[0016] 2. The present invention provides a roll-to-roll plasma processing method for surface treatment. Through independently configured programmable pulse plasma sources and multi-way gas switching valves, the process can perform a variety of different processing modes such as high-energy activation, low-energy passivation, and functional precursor introduction in a single pass; while reducing the cost of multi-stage production line transformation, it also effectively avoids material surface damage or uneven modification caused by repeated processing.

[0017] 3. The present invention provides a roll-to-roll plasma treatment method for surface treatment. With the help of a movable or scanning nozzle in a local functionalized area, the precursor compound can be accurately deposited in the target area, and fine patterning can be achieved in conjunction with an ion source. This controllability not only meets the needs for product differentiation and high added value, but also makes the process more flexible, avoiding the cumbersome operation of setting up a separate functionalized production line or modifying a large number of equipment in the past.

[0018] 4. The present invention provides a roll-to-roll plasma processing method for surface treatment, in which online detection sensors are arranged in each partition, and the collected information such as temperature, surface energy and vacuum degree are fed back to the control system in real time to realize rapid closed-loop adjustment; by automatically comparing and setting thresholds and dynamically correcting line speed or plasma power, process errors relying on manual experience can be reduced, and quality instability and rework rate caused by excessive or insufficient processing can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a schematic diagram of the steps of the present invention DETAILED DESCRIPTION

[0021] The technical solution of the present invention will be more clearly and completely explained below through description of preferred embodiments of the present invention in combination with the accompanying drawings.

[0022] like Figure 1 As shown, the present invention is specifically: Step 1: The pretreatment area, functional modification area, local functionalization area and post-treatment area are sequentially configured on the production line. Each area is equipped with an independent programmable pulse plasma source, gas supply pipeline and flow control valve, and the treatment range and upper limit of process parameters of each area are set in the control system; Step 2: A low energy density plasma source and an additional cleaning device are set up in the pretreatment area. After the material is introduced into the pretreatment area, dust and attachments on the surface of the material are removed, and the initial surface state data of the material is obtained through an online detection instrument; Step 3: In the functional modification area, the ion bombardment and passivation sequence with different energy levels is realized through the high-low frequency superposition pulse mode and the multi-channel gas switching valve; the pulse timing is preset in the control system so that the material can complete the surface activation and modification operations in sequence when passing through this area; Step 4: Install a movable or scanning nozzle in the local functionalization area to spray the precursor compound to a specific part of the material; complete the local deposition or functionalization under ion bombardment conditions, and adjust the nozzle trajectory and pulse energy focusing range according to the feedback from the material tension sensor or position detection system; Step 5: In the post-processing area, the material surface is passivated or lightly annealed by a relatively low-power plasma source or a low-temperature heating device, and the vacuum degree or gas type is adjusted as needed; Step 6: Install surface energy measurement devices at each partition and at the end of the roll-to-roll process, and transmit the measured data to the centralized control unit in real time to compare the set process parameters and record the complete production process data; Step 7: Run the pre-trained machine learning algorithm in the centralized control unit to automatically calculate the adjustment amount of each partition power, pulse frequency, gas ratio and line speed based on the online detection data and set goals; send the adjustment command to the corresponding plasma source and valve to make fine adjustments to the system during operation; Step 8: After each batch of production is completed, all process parameters, test data and final material status are recorded in the database, and the training set of the machine learning model is updated regularly; new process parameter configurations are loaded in subsequent batches of production to achieve rapid switching and adaptive processing of different materials.

[0023] As a specific implementation method, it is necessary to first plan the pretreatment area, functional modification area, local functionalization area and post-treatment area on the production line in sequence, and lay out the plasma generator, vacuum pump (using a low-pressure environment), gas source pipeline and corresponding power controller in sequence according to the plant layout, ventilation requirements and safety regulations. Each partition should be equipped with a gas supply valve group and flow meter, and should be connected to a unified communication network in the control room or centralized monitoring platform for subsequent real-time scheduling and data aggregation. After completing the partition configuration, it is necessary to install a programmable pulse plasma source in each partition, and reserve a connection port for the installation of other auxiliary devices, brush rollers, air knives or atomizing nozzles.

[0024] In the pretreatment area, a lower ion energy density and a suitable gas ratio, such as argon / oxygen mixture, are determined according to the material characteristics, and the material is placed in a tension control device before entering this area. At this time, an additional mechanical cleaning device or air knife should be started to remove visible or larger particle contaminants; while ion bombardment is in progress, the passing material is tested online and the initial surface parameters are recorded. If the test results show that the residual particles or oil on the surface exceed the set standards, the ion source power can be appropriately increased or the line speed can be reduced in the control system to enhance the pretreatment effect. After completing the pretreatment, the material continues to be transported to the functional modification area.

[0025] In the functional modification area, it is necessary to set the pulse mode in the control system in advance, including the pulse frequency, duty cycle and power upper limit, and configure the multi-way gas switching valve according to the needs (such as introducing nitrogen, oxygen, hydrogen or other reactive gases at the same time). When the material passes through this area at a constant linear speed, the control program will trigger plasma bombardment and passivation operations at different energy levels in sequence within the preset time sequence, and the online detection device will continuously measure the surface state of the material and transmit the results back to the central control system. If the detection value deviates from the target range, the system will automatically adjust the pulse parameters or the flow ratio of the switching valve until the material index returns to the process setting range. After that, the material will enter the local functionalization area.

[0026] In the local functionalization area, it is necessary to integrate a movable or scanning nozzle at a specified position and connect the supply line of the functional precursor, such as fluorine-containing, silicon-containing or doped metal compounds. When the material is transported to this area, the nozzle and the ion source work together through the control system: after detecting that the material has reached the predetermined position, the nozzle sprays or atomizes the precursor compound according to the set trajectory, and at the same time cooperates with the pulse plasma to perform local bombardment or chemical bonding on the surface of the material. It is necessary to program a suitable movement path and switching timing for the nozzle according to the width direction and tape speed of the material, and correct the positioning and pulse energy of the nozzle in real time through sensor data to ensure that the functional layer is deposited only in the required area. After completing the functionalization operation, the material will continue to enter the post-processing area.

[0027] In the post-processing area, the plasma source is set in low-energy mode according to the pre-process requirements, and an infrared or near-infrared heating module can be optionally equipped; the goal here is to passivate or lightly heat treat the modified or functionalized materials. If it is necessary to reduce the residence time of the material at high temperature, the appropriate heating power and vacuum should be set in the control system. Before the material leaves the post-processing area, a temperature and surface detector needs to be installed at the exit to record the final state after treatment. If the temperature or vacuum does not meet the requirements, the heating intensity or gas formula should be adjusted in time to avoid overheating or accumulation of residual active substances.

[0028] Optical detection probes, surface energy meters, temperature sensors or vacuum meters are arranged at the entrance or exit of each partition, and the collected data is transmitted to the central control system via industrial Ethernet or serial bus. Alarm values ​​and sampling cycles should be set for each key parameter in the control software, and operators should be notified in time or shutdown protection should be automatically triggered when an abnormality occurs. To prevent sensor drift, it is necessary to regularly compare sensor readings with control samples or multiple measurement methods and perform calibration.

[0029] Import the trained machine learning model into the central control system and maintain continuous interaction with the online detection data. When the system detects a slight deviation in the surface state of the material, the model will automatically calculate new instructions such as power or gas ratio, and send the control instructions to the corresponding partitioned plasma source or valve, thereby achieving dynamic fine-tuning of the entire processing process. As the production line runs, the model will continuously update the output at the set frequency. When the deviation exceeds the limit, the system will also retain the manual intervention interface for emergency correction. After the entire production is completed, the batch number, pulse parameters used during processing, gas formula, detection data, model output and other information should be uniformly saved to the database or cloud storage, and the actual processing of the material should be associated with the corresponding process log.

[0030] Regularly extract the latest production data to retrain or optimize the machine learning model, and replace it with the online control program after confirming the convergence and stability of the model for use in the next batch or new material production. When spot-checking the processed materials, the test results should be compared with the relevant parameters recorded in the database to verify the consistency of the treatment and record any deviations. If a large-scale process modification is required, such as replacing a new precursor compound or increasing the processing speed, the model can be expanded and trained and put into mass production after a small-scale trial run, so as to maintain the continuity and traceability of the entire process.

[0031] As a specific embodiment, a company in a certain city performs roll-to-roll plasma treatment on a PET substrate with a thickness of about 50 microns, a width of 1 meter, and a total length of 1000 meters. The specific operations of applying this method are as follows: Four functional areas are planned in the factory according to the preset layout: pretreatment area, functional modification area, local functionalization area and post-treatment area, and each area is equipped with an independent programmable pulse plasma source and multi-channel gas supply pipeline. The company installs the substrate on the unwinding unit and maintains the flatness of the material through the correction roller and tension sensor, and conveys it forward at a set initial line speed of 2 meters per minute. After the substrate enters the pretreatment area, the control system starts the low energy density plasma mode (about 100~200 W of RF power), mainly introducing argon gas with a volume fraction of about 80% and oxygen gas with a volume fraction of 20%. The actual flow rate is limited to about 50 sccm and 10 sccm by the flowmeter; a pair of brush rollers are also installed above the area, and an air knife is set to blow to remove attachments or dust. The online optical probe at the exit of the pretreatment area measures the surface scattering intensity and local particle state of the material in real time, and transmits the data to the central control system to verify whether the set cleanliness threshold is reached.

[0032] The material then enters the functional modification area, and the control system switches the plasma source to the high- and low-frequency pulse superposition mode. The high-frequency part is 13.56 MHz, the power is about 300~500 W, the low-frequency part is 40 kHz, the power is about 200 W, and the duty cycle is controlled between 30% and 50%. The gas switching valve successively introduces nitrogen and a small amount of hydrogen in a short period of time to achieve a brief ion bombardment of the material surface and subsequent mild passivation. An infrared thermometer is also placed in this area to monitor whether the temperature of the film surface exceeds 60°C. If it approaches the upper limit, the system will automatically lower the pulse energy or reduce the line speed. A surface energy test sensor is installed at the end of the functional modification area. The data of the surface activation degree is collected by rapid dripping or plasma spectrum detection method, and the results are transmitted back to the central control system; if the activation degree does not meet the standard, the system will further reduce the line speed to 1.5 meters / minute, or increase the pulse power before the next batch of materials arrives.

[0033] After entering the local functionalization area, a movable nozzle is installed on the slide rail, which can be corrected along the width of the substrate. The nozzle is connected to an atomizer, and a silicon-containing precursor solution is introduced, and 2030 sccm argon is used as a carrier gas for atomization spraying. At the same time, the plasma source in the local functionalization area adopts a pulse setting with a higher duty cycle (about 60%) and provides a power output of 350400 W in high-frequency mode to form a high-density plasma reaction field in the nozzle atomization area and the material surface. The real-time position detection system provides the central control system with the nozzle movement trajectory based on the web conveying speed and slide rail positioning data; when the nozzle moves to the specified area, the program triggers the atomization spray and pulse ion bombardment to proceed synchronously, so that the precursor is locally deposited on the material surface and completes the bonding. In order to reduce over-spraying or offset, the control system compares the current position of the nozzle, the substrate conveying length and the sprayed amount every few seconds, and ensures that the functional layer is accurately deposited in the expected pattern area by fine-tuning the slide rail speed or the opening and closing timing of the injection valve in a small range.

[0034] After leaving the local functionalization area, the material is transported to the post-processing area. The plasma power in this area is generally maintained at 100-150 W, mainly with a small amount of argon and nitrogen to reduce over-activation; a near-infrared heating module is also set up in the area, and the temperature sensor monitors the surface temperature of the material to maintain it in the range of 40-50°C. The goal at this time is to passivate or slightly anneal the deposited or modified surface in a milder environment. The online measuring instrument at the end of the zone records information such as the temperature and thickness changes of the substrate and feeds it back to the central control system. If the temperature is too high or the ion source fluctuates, the system will automatically reduce the heating power or plasma source power to avoid affecting the material properties.

[0035] At the same time, detection sensors and data acquisition modules are installed at the entrances and exits of each partition of the entire line, including optical detection, surface energy measurement and temperature monitoring. These sensors continuously upload data to the central control system through the industrial Ethernet protocol. The system has a built-in machine learning model that has been trained based on historical batch data. It can automatically calculate the real-time parameter adjustment instructions for power, pulse duty cycle, gas flow and line speed according to the current sensor readings and process setting targets. If a certain detection data deviates greatly from the target value, such as the surface energy measurement value is significantly lower, the system will issue instructions to the corresponding partition to increase the ion source power or extend the material's residence time in the plasma zone. If the deviation exceeds the range that can be automatically corrected, the system will issue an alarm and wait for the operator to confirm on site before deciding whether to re-process the tape or change a wider range of process parameters. After the entire production is completed, the control system will automatically package and store the material batch number, all parameters in the processing process, sensor records and model output commands in the database. Before the next batch of materials goes online, the operator can analyze the data in the database and perform offline laboratory testing, such as combining XPS and adhesion test results, to further improve the machine learning model or correct the parameter configuration. In this way, the company is able to complete deep cleaning, surface modification and local functionalization operations of PET film on the same production line, and can quickly load updated process parameters in subsequent production based on material batch differences and application requirements.

[0036] The above specific implementations are only descriptions of the preferred implementations of the present invention, and do not limit the protection scope of the present invention. Without departing from the design concept and spirit of the present invention, various modifications, substitutions and improvements made by ordinary technicians in this field to the technical solution of the present invention based on the text description and drawings provided by the present invention should all fall within the protection scope of the present invention. The protection scope of the present invention is determined by the claims.

Claims

1. A roll-to-roll plasma treatment method for surface treatment, characterized in that: The following steps are involved: Step 1: The pretreatment area, functional modification area, local functionalization area and post-treatment area are sequentially configured on the production line. Each area is equipped with an independent programmable pulse plasma source, gas supply pipeline and flow control valve, and the treatment range and upper limit of process parameters of each area are set in the control system; Step 2: A low energy density plasma source and an additional cleaning device are set up in the pretreatment area. After the material is introduced into the pretreatment area, dust and attachments on the surface of the material are removed, and the initial surface state data of the material is obtained through an online detection instrument; Step 3: In the functional modification area, the ion bombardment and passivation sequence with different energy levels is realized through the high-low frequency superposition pulse mode and the multi-channel gas switching valve; the pulse timing is preset in the control system so that the material can complete the surface activation and modification operations in sequence when passing through the functional modification area; Step 4: Install a movable and scanning nozzle in the local functionalization area to spray the precursor compound to a specific part of the material; complete the local deposition and functionalization under ion bombardment conditions, and adjust the nozzle trajectory and pulse energy focusing range according to the feedback from the material tension sensor and position detection system; Step 5: In the post-processing area, the material surface is passivated or lightly annealed by a relatively low-power plasma source and a low-temperature heating device, and the vacuum degree or gas type is adjusted as needed; Step 6: Install surface energy measurement devices at each partition and at the end of the roll-to-roll process, and transmit the measured data to the centralized control unit in real time to compare the set process parameters and record the complete production process data; Step 7: Run the pre-trained machine learning algorithm in the centralized control unit to automatically calculate the adjustment amount of each partition power, pulse frequency, gas ratio and line speed based on the online detection data and set goals; send the adjustment command to the corresponding plasma source and valve to make fine adjustments to the system during operation; Step 8: After each batch of production is completed, all process parameters, test data and final material status are recorded in the database, and the training set of the machine learning model is updated regularly; new process parameter configurations are loaded in subsequent batches of production to achieve rapid switching and adaptive processing of different materials.

2. A roll-to-roll plasma treatment method for surface treatment according to claim 1, characterized in that: Step 1 is as follows: Step 1.1: Divide the physical locations of the pretreatment area, functional modification area, local functionalization area and post-treatment area, and reserve appropriate space for tension control and winding devices; Step 1.2: Reserve interfaces and fixed positions in each partition, and configure independent plasma generators, power controllers and gas pipelines; Step 1.3: According to the process requirements of each partition, set up independent gas supply valve groups and flow meters to ensure that the gas ratio and flow between different partitions can be controlled separately; Step 1.4: Install the main controller in the control room or central monitoring platform, and connect each partition equipment, sensor and safety interlock system to a unified communication network.

3. The roll-to-roll plasma processing method for surface treatment according to claim 1, characterized in that: Step 2 is as follows: Step 2.1: Load the material into the unwinding unit, and operate the tension sensor and the deviation correction device stably to ensure that the material is flat and wrinkle-free when passing through the pre-treatment area; Step 2.2: Select a plasma mode with lower energy density for the pretreatment area and match the corresponding gas formula to remove surface dust and oil stains; Step 2.3: Use a brush roller or air knife to clean the material surface mechanically or with airflow in a low-energy plasma environment; Step 2.4: Install online measuring instruments at the exit of the pretreatment area and record the detected material status data in the central control system.

4. The roll-to-roll plasma processing method for surface treatment according to claim 1, characterized in that: Step 3 is as follows: Step 3.1: Input pulse frequency, duty cycle and upper and lower limits of power on the plasma source of the functional modification area, and select high frequency / low frequency and mixed pulse mode according to material characteristics; Step 3.2: Connect the reactive gas and preset the switching sequence in the control system to complete multiple surface chemical treatments in the same partition; Step 3.3: Use high energy pulses to ion bombard the material surface for activation, and then switch to low energy pulses for passivation or functional group introduction to form a composite treatment process; Step 3.4: An optical and surface energy detector is set at the exit of the functional modification area. If the detection value deviates too much from the target range, the pulse power or gas ratio is automatically adjusted.

5. The roll-to-roll plasma processing method for surface treatment according to claim 1, characterized in that: Step 4 is as follows: Step 4.1: Integrate a programmable robotic arm or slide rail system in the local functionalized area to ensure that the nozzle can be accurately positioned in the width direction of the material; Step 4.2: Connect the supply pipeline of the specific functional precursor and configure the atomization or injection device so that the liquid and gas can be evenly dispersed; Step 4.3: Synchronously start the pulse plasma source in the nozzle area to ion activate and bond the sprayed precursor to the material surface to form a local functional layer; Step 4.4: Dynamically fine-tune the nozzle motion trajectory and plasma source energy output through roll-to-roll position information and sensor feedback to ensure that the functional layer is formed in the predetermined area and maintain processing uniformity.

6. A roll-to-roll plasma processing method for surface treatment according to claim 1, characterized in that: Step 5 is as follows: Step 5.1: Arrange a low energy density plasma source in the post-treatment area and set stable power and pulse parameters in the control system to limit further activation reactions on the material surface; Step 5.2: Install infrared or near-infrared heating modules in the post-processing area, combine with temperature sensors, and maintain the preset heating temperature through the central control system to ensure that the material substrate is not deformed due to excessive temperature; Step 5.3: According to the material characteristics and upstream processing requirements, use an adjustable vacuum pump or introduce inert gas in the post-processing area, and use a flow control valve to independently set the environment in the area; Step 5.4: Install a temperature and surface detector at the exit of the post-processing area to record the state parameters of the material after low-energy plasma and heat treatment, and compare them with the set process benchmark.

7. The roll-to-roll plasma processing method for surface treatment according to claim 1, characterized in that: Step 6 is as follows: Step 6.1: Arrange optical detection probes, temperature sensors or surface energy measuring devices at the entrances or exits of the pretreatment area, functional modification area, local functionalization area and post-treatment area, and connect them to the centralized control system; Step 6.2: The signal of each probe is transmitted to the central control system in real time via a data acquisition card or controller; Step 6.3: Set the upper or lower alarm limit for key parameters in the monitoring software, and set the sampling interval for data recording to facilitate subsequent analysis and abnormality troubleshooting; Step 6.4: Regularly compare the collected data with manual measurement results or standard sample data. If any deviation occurs, calibrate the sensor or update the sampling frequency in time.

8. The roll-to-roll plasma processing method for surface treatment according to claim 1, characterized in that: Step 7 is as follows: Step 7.1: Load the existing machine learning model in the central control system and establish an interface with the online detection data; Step 7.2: Output the data calculated by the model in the control software and map it with the corresponding programmable logic controller or process control module; Step 7.3: Set the model update cycle according to the production line speed and detection frequency; if prediction errors or parameter mismatches are found, shorten the update interval or increase the data sampling rate; Step 7.4: When the production line is running, the model continuously adjusts the key parameters of each partition based on the collected data; if the deviation exceeds the limit, the system will issue a prompt and automatically reduce the speed or shut down for protection when necessary.

9. The roll-to-roll plasma processing method for surface treatment according to claim 1, characterized in that: Step 8 is as follows: Step 8.1: During the operation of the production line, the material batch information, partition setting parameters, sensor detection data, and parameter adjustment records of the model output are uniformly stored in the database or cloud storage; Step 8.2: Number the processed materials and associate them with the corresponding process logs to facilitate subsequent inquiries on the processing details and parameter settings of specific batches in each partition; Step 8.3: During production breaks or designated maintenance windows, extract recent production data from the database and use it together with previous data for model retraining or parameter optimization; Step 8.4: After confirming that the new model has passed the test verification, it is deployed to the control system for use in the next batch or new material processing to achieve continuous process improvement and adaptive processing.

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