FOUP Conveyor System Conveyor Control Method, System and Industrial Control Computer

Abstract

This invention discloses a conveying control method, system, and industrial control computer for a FOUP conveying system. The conveying control method determines in real time whether a FOUP is placed on each conveying device used for docking with overhead cranes and / or with storage equipment. When a FOUP is determined to be placed on a conveying device, that conveying device is defined as the starting point. When the starting point is a conveying device used for docking with overhead cranes or with storage equipment, an optimal conveying path is determined based on the attributes configured for the corresponding object in a one- or two-dimensional map to convey the FOUP to a conveying device used for docking with storage equipment or overhead cranes. The conveying devices along the determined optimal conveying path are controlled to operate so that the FOUP is conveyed to the endpoint of the optimal conveying path. This invention eliminates the need to develop different control programs for different scenarios, greatly reducing development costs and improving equipment versatility.

Description

Technical Field

[0001] This invention relates to the field of automated material handling equipment, and in particular to a conveying control method, system, and industrial computer for FOUP conveying systems. Background Technology

[0002] In semiconductor manufacturing, the FOUP (Overhead Hoist Transport) system is positioned between the OHT (Overhead Hoist Transport) and the stocker to automate the movement of FOUPs between the OHT and the stocker.

[0003] FOUP conveyor systems transport FOUPs through a series of conveyor devices arranged according to predetermined requirements. Typically, a PLC is used as the main controller to control each conveyor. However, due to the process-oriented programming paradigm of PLCs, the layout of the conveyor devices will vary depending on the different field environments. Therefore, different control programs need to be developed for the PLC to meet the control requirements, which greatly increases the development time and manpower costs and reduces the efficiency of the equipment in field applications. Summary of the Invention

[0004] The purpose of this invention is to solve the above-mentioned problems existing in the prior art and to provide a transmission control method, system and industrial control computer for a FOUP transmission system.

[0005] The objective of this invention is achieved through the following technical solution:

[0006] The FOUP conveyor system uses an industrial control computer for control, and the conveyor control method includes the following steps:

[0007] Real-time determination of whether each conveyor used for docking with the overhead crane is placed in a FOUP by the overhead crane and / or whether each conveyor used for docking with the storage equipment is placed in a FOUP by the storage equipment.

[0008] When a FOUP is placed on a conveyor device used for docking with an overhead crane and / or a FOUP is placed on a conveyor device used for docking with a storage device, the conveyor device used for docking with the overhead crane or the conveyor device used for docking with the storage device is defined as the starting point; when the starting point is a conveyor device used for docking with an overhead crane, an optimal conveying path is determined based on the attributes configured for the corresponding objects of each conveyor device in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor device used for docking with the storage device; when the starting point is a conveyor device used for docking with a storage device, an optimal conveying path is determined based on the attributes configured for the corresponding objects of each conveyor device in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor device used for docking with an overhead crane.

[0009] The transmission equipment on the determined optimal transmission path is controlled to operate so that the FOUP is transmitted to the end of the optimal transmission path.

[0010] Preferably, in the transmission control method of the FOUP transmission system, each of the transmission devices is provided with an input detection sensor at its input end, an output detection sensor at its output end, and an presence / absence detection sensor located between the output detection sensor and the input detection sensor.

[0011] Preferably, in the conveying control method of the FOUP conveying system, when an input detection sensor on a conveying device detects a FOUP and the upstream conveying device is conveying, the conveying device starts to convey;

[0012] When the input detection sensor on a conveying device switches from being able to detect FOUP to being unable to detect FOUP, the conveying device is controlled to stop conveying, and it is determined whether the next conveying device on the optimal conveying path meets the conveying conditions. If it does, the conveying device is controlled to carry out conveying; otherwise, it waits.

[0013] When the output detection sensor of a conveying device switches from being able to detect FOUP to being unable to detect FOUP, the conveying device stops conveying.

[0014] Preferably, in the transmission control method of the FOUP transmission system, the attributes that each object needs to be configured include: number, whether it is enabled, the corresponding type of transmission device, whether the corresponding transmission device has a horizontal rotation function, and the corresponding inbound / outbound mode of the transmission device.

[0015] Preferably, in the transmission control method of the FOUP transmission system, the number includes the X and Y coordinates of the object in a two-dimensional map.

[0016] Preferably, in the transmission control method of the FOUP transmission system, the two-dimensional map includes M*N objects distributed in a matrix, where M and N are integers not less than 5.

[0017] Preferably, in the transmission control method of the FOUP transmission system, when determining the optimal transmission path, the length of each feasible transmission path is determined according to the following formula:

[0018] L=|X 起 - X 终 |+|Y 起 - Y 终 |+N 旋 ;

[0019] Where L is the length of a feasible transmission path; X 起 The X coordinate of the starting point; X 终 The X coordinate of the endpoint; the Y coordinate of the endpoint. 起 The Y-coordinate of the starting point; Y 终 The Y-coordinate of the endpoint; N 旋 This represents the number of rotations required for the FOUP to travel from the starting point to the ending point.

[0020] Preferably, in the transmission control method of the FOUP transmission system, when it is determined that the FOUP is being transported to a transmission device with horizontal rotation function, it is determined whether the next transmission device in the optimal transmission path with horizontal rotation function is idle.

[0021] When it is determined that the next conveying device is idle, the FOUP is conveyed to the next conveying device; when it is determined that the next conveying device is not idle, the optimal conveying path of the FOUP is re-determined, and the FOUP is conveyed to the destination according to the re-determined optimal conveying path.

[0022] The FOUP conveyor system's conveyor control system is installed in an industrial control computer, and the conveyor control system includes:

[0023] The FOUP positioning detection unit is used to determine in real time whether each conveyor used for docking with the overhead crane is placed in a FOUP by the overhead crane and / or whether each conveyor used for docking with the storage equipment is placed in a FOUP by the storage equipment.

[0024] A path determination unit is configured to define the conveyor for docking with the overhead crane or the conveyor for docking with the storage equipment as a starting point when a FOUP is placed on a conveyor for docking with the overhead crane and / or a FOUP is placed on a conveyor for docking with the storage equipment; when the starting point is a conveyor for docking with the overhead crane, an optimal conveying path is determined based on the attributes configured for the corresponding objects of each conveyor in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor for docking with the storage equipment; when the starting point is a conveyor for docking with the storage equipment, an optimal conveying path is determined based on the attributes configured for the corresponding objects of each conveyor in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor for docking with the overhead crane.

[0025] A transmission unit is used to control the transmission equipment on the determined optimal transmission path to operate so that the FOUP is transmitted to the end of the optimal transmission path.

[0026] An industrial control computer includes a memory and a processor. The memory stores a program that can be executed by the processor. When the program is executed, it implements any of the transmission control methods described above.

[0027] The advantages of the technical solution of this invention are mainly reflected in:

[0028] The method of this invention uses an industrial control computer for control and adopts an object-oriented approach for program development. A two-dimensional map with M*N matrix-distributed configurable objects is predefined in the industrial control computer. All objects are designed in a standardized manner. In actual use, the configuration information of the transmission equipment in different application scenarios can be loaded into the attributes of each object in the two-dimensional map, which can meet the transmission control requirements of different application scenarios. There is no need to develop different control programs for different scenarios, which greatly reduces development costs and improves the versatility of the equipment.

[0029] The method for calculating the optimal transmission path of the present invention can be determined based on the coordinates of the object, which is convenient to calculate and easy to implement.

[0030] During the transmission process of this invention, the route can be dynamically adjusted according to the operating status of the transmission equipment along the path, making the transmission more flexible and efficient. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the FOUP conveying system of the present invention in conjunction with the overhead crane and storage equipment;

[0032] Figure 2 This is a top view of the first transmission device of the present invention;

[0033] Figure 3 This is a schematic diagram of the positioning sensor of the present invention;

[0034] Figure 4 This is a top view of the conveying device of the present invention with two positioning sensors;

[0035] Figure 5 This is a schematic diagram of the connection between the transmission device of the present invention and the industrial control computer;

[0036] Figure 6 This is a schematic diagram of the two-dimensional map of the present invention;

[0037] Figure 7 This is a top view of an example of the FOUP conveying system of the present invention;

[0038] Figure 8 This is a flowchart of the method of the present invention;

[0039] Figure 9 This is a schematic diagram of the objects involved in a specific transmission example of the present invention. Detailed Implementation

[0040] The objectives, advantages, and features of this invention will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this invention, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this invention.

[0041] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0042] Example 1

[0043] The transmission control method of the FOUP transmission system disclosed in this invention will be described below with reference to the accompanying drawings. Figure 1 As shown, the FOUP conveying system includes a set of conveying devices 100. The conveying devices 100 are arranged in a certain way so that the FOUP 400 can be conveyed between the storage device 200 and the overhead crane 300. The specific layout of the conveying devices 100 can be designed according to different environmental needs and is not limited here. The specific structure of the overhead crane and the storage device is known technology and is not an innovation of this invention, so it will not be described in detail here.

[0044] The specific structure of the conveying device 100 can be designed as needed. To cooperate with the forklift mechanism of the storage device 200, as shown in the attached diagram... Figure 1 Appendix Figure 2 As shown, the conveying device 100 includes two conveying assemblies 110 spaced apart on a frame (not shown). Preferably, each conveying assembly 110 is a belt conveyor. The drive rollers 111 of the two conveying assemblies 110 can be coaxially mounted on the same rotating shaft. This shaft is rotatably mounted on the frame and connected to a drive motor (not shown) that drives its rotation. Thus, the two conveying assemblies 110 can be driven by a single power source. Alternatively, each conveying assembly 110 can have its own power source; for example, the drive rollers 111 of both conveying assemblies 110 can be electrically driven rollers.

[0045] To ensure the reliability of the conveying assembly, the conveying assembly 110 further includes a set of support rollers 113 located between the drive roller 111 and the driven roller 112. The support rollers 113 support the upper belt segment of the conveyor belt 114, thereby effectively reducing the load-bearing deformation of the conveyor belt and ensuring the stability of the conveying. Simultaneously, the conveying assembly 110 also includes tension rollers 115 for adjusting the tension of the conveyor belt.

[0046] Furthermore, some or all of the conveying device 100 includes a rotary drive assembly 120 that drives the frame to rotate, thereby enabling the conveying device 100 to rotate the FOUP horizontally by 90° to switch the conveying direction of the FOUP. The rotary drive assembly 120 can be, for example, a known servo turntable, the specific structure of which is known technology and will not be described in detail here.

[0047] At least one of the conveying devices 100 is used to dock with the overhead crane 300 so that the FOUP 400 can be transferred between the conveying device 100 and the overhead crane 300. The specific number and location of the conveying devices 100 used to dock with the overhead crane 300 can be set as needed and are not limited here. For ease of subsequent explanation, the type of conveying device 100 used to dock with the overhead crane 300 is defined as the first conveying device 101. As shown in the attached figure... Figure 2As shown, the first conveying device 101 is equipped with an E84 photoelectric communication sensor 130 for communicating with the overhead crane 300. Simultaneously, a positioning sensor 140 is also provided at the first conveying device 101 to detect whether the FOUP 400 is accurately and reliably placed on the first conveying device 101. A clamp detection sensor 150 is also provided on the first conveying device 101 to detect the clamps of the overhead crane 300. Furthermore, the first conveying device 101 is equipped with an input detection sensor 160 at its input end, an output detection sensor 170 at its output end, and an presence / absence detection sensor 180 located between the output detection sensor 170 and the input detection sensor 160. The input detection sensor 160 is used to detect whether a FOUP is input from the input end of the first conveying device, and the output detection sensor 170 is used to detect whether a FOUP 400 is conveyed to the first conveying device 101 from its output end and to determine whether the FOUP 400 has completely entered the first conveying device 101. The output detection sensor is used to determine whether the FOUP400 entering the first conveying device 101 exits the first conveying device 101, and the presence / absence detection sensor 180 is used to determine whether there is a FOUP400 on the first conveying device 101. The position sensor 140, clamp detection sensor 150, input detection sensor 160, output detection sensor 170, and presence / absence detection sensor 180 can be known proximity switches. Of course, the input detection sensor 160, output detection sensor 170, and presence / absence detection sensor 180 can also be through-beam sensors, mirror reflection sensors, etc., which are not limited here.

[0048] Furthermore, to ensure that the FOUP is reliably placed on the conveying equipment before being conveyed, in a preferred embodiment, the positioning sensor 140 may have the following structure:

[0049] As attached Figure 3As shown, the positioning sensor 140 includes a connecting base 141, which includes a first component 142 and a second component 143. The first component is mounted on the frame with adjustable mounting height; the second component is mounted on the first component with adjustable position relative to the first component along the axial direction of the rotation axis 144. Specifically, the side plate of the frame of the conveying device is provided with an oblong hole extending along the height direction. The first component has a screw hole on its side facing the side plate. The first component is fixed to the side plate by a bolt passing through the oblong hole and connected to the screw hole of the first component. Furthermore, a support bolt can be provided below the first component to support its bottom. The support bolt is threaded to a fixing plate on the side plate. At the same time, the top surface of the first component is provided with a guide groove. The second component is movably disposed in the guide groove, and the guide groove is provided with a strip hole extending along the axial direction of the rotation axis 144. The bottom surface of the second component is provided with a screw hole. The second component is fixed to the first component by a bolt passing through the strip hole from the bottom and screwed into the screw hole at the bottom of the second component.

[0050] As attached Figure 3 As shown, the rotating shaft 144 is rotatably connected to the second component of the connecting seat 141 via a bearing. The rotating shaft 144 is fixedly connected to the gravity balance bar 145, and the rotating shaft 144 is connected to the middle position of the gravity balance bar 145. The gravity balance bar is connected to the outer end of the rotating shaft, and the two are screwed together.

[0051] The shape of the gravity balance bar can be designed as needed; preferably, as shown in the attached figure. Figure 3 As shown, the gravity balance bar is generally L-shaped and includes a main body 146. When the gravity balance bar is in the balanced position, the main body 146 is tilted and the extension direction of the main body forms an acute angle with the horizontal input direction of the conveying component.

[0052] The upper end of the main body 146 is rotatably connected to the roller 147. The portion of the gravity balance bar located below the rotating shaft 144 is provided with a counterweight 148 for keeping the gravity balance bar in a normal state. Specifically, the counterweight 148 is connected to the shorter part 149 of the gravity balance bar. The counterweight 148 can be fixed to the shorter part 149 by screwing.

[0053] As attached Figure 3 As shown, a stop 14a is provided on the connecting seat 141 to limit the gravity balance bar to the equilibrium position. The stop 14a may be a bolt connected to the second component.

[0054] The balance bar detection sensor 14b can be a known proximity switch, a through-beam sensor, etc., and preferably, it is a known slotted sensor. Furthermore, the balance bar detection sensor 14b can detect the gravity balance bar when it is in the balanced position, but cannot detect it when the gravity balance bar rotates to the point where the roller 147 moves below the conveying surface. Preferably, to ensure reliable triggering, the balance bar detection sensor 14b is unable to detect the gravity balance bar when it is in the balanced position, but can detect the self-balancing swing bar when the roller 147 moves below the conveying surface.

[0055] During operation, when the FOUP is placed vertically downwards onto the conveyor, the left and right sides of the FOUP's bottom surface press against the tops of the two rollers 147. This causes the gravity balance bar to rotate, bringing the tops of the rollers 147 flush with the conveyor belt's conveying surface. At this point, the gravity balance bar triggers the balance bar detection sensor 14b, indicating that the FOUP is in place. Because the system detects both sides of the FOUP's bottom surface, a conveying trigger signal is only generated when both sides of the FOUP are in place, effectively ensuring the safety of the conveying control. After the FOUP is in place, the conveyor starts to transport the FOUP horizontally. Since the rollers 147 are in contact with the bottom of the FOUP, they do not interfere with the horizontal transport of the FOUP. Furthermore, when the FOUP is transported back to the conveyor in the opposite direction, because the angle between the swing arm mechanism and the bottom of the FOUP is acute, there is no significant impact vibration between the horizontally transported FOUP and the placement sensor 140.

[0056] As attached Figure 4 As shown, the positioning sensors 140 are two, each located close to a conveying device.

[0057] At least one of the conveying devices 100 is used to dock with the storage device 200, so that the FOUP 400 can be transferred between the conveying device 100 and the storage device 200. The specific number and position of the conveying devices 100 used to dock with the storage device 200 can be set as needed and are not limited here. For ease of explanation later, the type of conveying device 100 used to dock with the storage device 200 is defined as the second conveying device 102. The storage device includes at least one fork mechanism, and the fork mechanism can be translated to cooperate with multiple second conveying devices, or there can be multiple fork mechanisms, each fork mechanism corresponding to one second conveying device. The second conveying device 102 is provided with an E84 photoelectric communication sensor 130 for communicating with the storage device 200. The second conveying device 102, like the first conveying device 101, is provided with a position sensor 140, an input detection sensor 160, an output detection sensor 170, and an presence / absence detection sensor 180.

[0058] The type of transmission device 100 located between the first transmission device 101 and the second transmission device 102 is defined as intermediate transmission device 100. The intermediate transmission device 100 is provided with the input detection sensor 160, the output detection sensor 170 and the presence / absence detection sensor 180.

[0059] During the FOUP400 conveying process, the process of conveying FOUP400 from the overhead crane 300 to the storage device 200 for storage is defined as the warehousing process; the process of conveying FOUP400 from the storage device 200 to the overhead crane 300 via the FOUP conveying system is defined as the outbound process.

[0060] In one embodiment, all conveying devices 100 in the FOUP conveying system can be used for both inbound and outbound operations. In a more preferred embodiment, some conveying devices 100 can be dedicated solely to inbound operations, while others can be dedicated solely to outbound operations. Furthermore, the input and output terminals of each conveying device are determined based on whether it is used for inbound or outbound operations.

[0061] As attached Figure 5As shown, each of the conveying devices 100 is connected to a controller 500, which is an industrial personal computer (IPC). The IPC uses EtherCAT technology to collect signals from the sensors of each conveying device 100 in real time and controls the conveying component 110 and the rotation drive component of each conveying device 100. The corresponding technology is known and will not be described in detail here. Of course, the IPC can also communicate with each conveying device using other feasible wired or wireless communication methods; this is not limited here. Simultaneously, the controller 500 is connected to a touchscreen 600 via a connecting cable, and the IPC is configured with a control program to implement the corresponding control.

[0062] When controlling the operation of each of the conveying devices 100 through the controller 500, it is necessary to first configure each object 710 in the two-dimensional map 700 configured in the control program according to the actual layout of all conveying devices 100 in the FOUP conveying system, their types, and other information. (See attached...) Figure 6 As shown, the two-dimensional map 700 includes M*N objects 710 distributed in a matrix, where M and N are integers not less than 5, and can be configured as needed. For example, each time the control program starts, it will generate a two-dimensional map 700 by default, including 10*10 configurable objects 710. Then, a pre-edited map configuration file can be loaded into the attributes of the 100 objects 710 of the map, thereby obtaining a two-dimensional map 700 that conforms to the actual FOUP transport system. The map configuration file can be pre-edited and stored in the system according to the actual layout of all transport devices 100 of the FOUP transport system, the type of each transport device, and other information so that it can be loaded when the program starts. Of course, the attributes of each object 710 can also be configured and changed manually at the human-computer interaction interface.

[0063] The attributes that need to be configured for each object 710 include: number, whether it is enabled, the type of the corresponding conveyor device, whether the corresponding conveyor device 100 has a horizontal rotation function, and the inbound / outbound mode of the corresponding conveyor device 100. Of course, the attributes configured for each object 710 may also include the numbers of the other conveyor devices 100 around it.

[0064] The number includes the X and Y coordinates of the object 710 in the two-dimensional map 700. More preferably, the number includes 4 digits, with the first two digits representing the X coordinate and the last two digits representing the Y coordinate. The X coordinate is the column number of each object 710 in the two-dimensional map 700, and the Y coordinate is the row number of each object 710 in the two-dimensional map 700. When determining the column number, for example, it is counted from left to right; when determining the row number, for example, it is counted from bottom to top.

[0065] Whether an object 710 is enabled or not refers to whether the object 710 has a corresponding transmission device 100. When an object 710 does not have a corresponding transmission device 100, the object 710 is not enabled. Conversely, when an object has a corresponding transmission device 100, the object 710 is enabled.

[0066] The corresponding type of conveying device refers to a type of conveying device corresponding to each activated object 710. For example, if the conveying device 100 corresponding to an activated object 710 is used to dock with the overhead crane 300, then the type of conveying device corresponding to the object 710 is the first conveying device 101; or, if the conveying device 100 corresponding to an activated object is used to dock with the storage device 200, then the type of conveying device corresponding to the object 710 is the second conveying device 102.

[0067] Whether the corresponding transmission device 100 has a horizontal rotation function is determined based on the actual function of the transmission device 100 corresponding to each enabled object 710. When the transmission device 100 corresponding to an object 710 has a horizontal rotation function, then the transmission device 100 corresponding to the object 710 has a horizontal rotation function; otherwise, the transmission device 100 corresponding to the object 710 does not have a horizontal rotation function.

[0068] The corresponding inbound / outbound mode of the conveying device 100 refers to whether the conveying device 100 corresponding to each enabled object 710 is used for inbound or outbound operations.

[0069] For example, as shown in the appendix Figure 7 As shown, the FOUP conveying system includes 11 conveying devices 100 for warehousing. The 11 conveying devices 100 for warehousing are distributed in a small h-shape, and the top three conveying devices 100 are the first conveying devices 101, and the bottom two conveying devices are the second conveying devices 102.

[0070] The FOUP conveyor system also includes 10 conveyor devices 100 for outbound shipment. The 10 conveyor devices 100 for outbound shipment are arranged in a small h-shape, with the top three conveyor devices 100 being the first conveyor devices 101 and the bottom two conveyor devices being the second conveyor devices 102.

[0071] Each conveying device 100 located at the intersection of the two paths has a horizontal rotation function and is defined as a turning conveying device 104.

[0072] Correspondingly, after configuring the map according to the map configuration file edited in the FOUP delivery system example above, the resulting two-dimensional map is shown in the attached figure. Figure 6As shown, the two-dimensional map 700 includes 100 objects 710. Among these objects, black boxes represent inactive objects 710, red boxes represent objects 710 corresponding to the 11 activated conveyor devices 100 used for data entry, and green boxes represent objects 710 corresponding to the 10 activated conveyor devices 100 used for data exit. The three upper red boxes represent objects 710 whose corresponding conveyor device type is first conveyor device 101, and the two lower red boxes represent objects 710 whose corresponding conveyor device type is second conveyor device 102. Similarly, the three upper green boxes represent objects 710 whose corresponding conveyor device type is first conveyor device 101, and the two lower green boxes represent objects 710 whose corresponding conveyor device type is second conveyor device 102. Furthermore, the attributes of the objects represented by the two red boxes and two green boxes corresponding to the four turning conveyor devices 104 indicate that the corresponding conveyor device 100 has a horizontal rotation function.

[0073] After configuring the 2D map 700, the industrial control computer can automatically control the system based on the configured 2D map 700, as shown in the attached diagram. Figure 8 As shown, the transmission control method includes the following steps:

[0074] The industrial control computer collects signals from the sensors of the conveying equipment 100 used for docking with the overhead crane 300 and the material storage equipment 200.

[0075] In real time, determine whether a conveying device (first conveying device) used for docking with an overhead crane is placed in a FOUP by the overhead crane and / or whether a conveying device (second conveying device) used for docking with a storage device is placed in a FOUP by the storage device.

[0076] When a FOUP is placed on a conveyor device for docking with an overhead crane and / or a FOUP is placed on a conveyor device for docking with a storage device, the conveyor device 100 for docking with the overhead crane 300 or the conveyor device 200 is defined as the starting point; when the starting point is the conveyor device 100 for docking with the overhead crane 300, an optimal conveying path is determined according to the attributes configured for the corresponding objects of each conveyor device in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor device for docking with the storage device; when the starting point is the conveyor device for docking with the storage device, an optimal conveying path is determined according to the attributes configured for the corresponding objects of each conveyor device in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor device for docking with the overhead crane.

[0077] The optimal conveying path is determined and the conveying device 100 on the optimal conveying path is controlled to operate so that the FOUP 400 is conveyed to the end point of the optimal conveying path, which is the conveying device 100 used to dock with the storage device 200 or the conveying device 100 used to dock with the overhead crane 300.

[0078] The following uses the warehousing process as an example to illustrate the specific transfer process. When it is determined that there is no FOUP400 at the first transfer device 101 used for warehousing, the first transfer device 101 waits for the overhead crane 300 to dock. When the overhead crane 300 docks with the first transfer device 101 via E84 communication and places a FOUP400 on it, the presence / absence detection sensor 180 of the first transfer device 101 detects the FOUP400. At this time, the industrial control computer determines the optimal transfer path for the FOUP400 to be put into storage. When determining the optimal transfer path, the length of each feasible transfer path is determined according to the following formula:

[0079] L=|X 起 - X 终 |+|Y 起 - Y 终 |+N 旋 ;

[0080] Where L is the length of a feasible transmission path; X 起 The X coordinate of the starting point; X 终 The X coordinate of the endpoint; the Y coordinate of the endpoint. 起 The Y-coordinate of the starting point; Y 终 The Y-coordinate of the endpoint; N 旋 This refers to the number of rotations required for FOUP400 to travel from the starting point to the destination.

[0081] When the FOUP transmission system includes multiple second transmission devices 102, the feasible transmission path includes feasible paths from the starting point to each second transmission device 102. After determining the length of each feasible transmission path, the shortest feasible transmission path is selected as the optimal transmission path.

[0082] Once the optimal transmission path is determined, it is determined whether the next transmission device 100 connected downstream of the first transmission device 101 where FOUP400 is currently located is idle. When the next transmission device 100 is idle, the first transmission device 101 where FOUP400 is currently located is activated to transport FOUP400 to the next transmission device 100. When it is determined that the movement of FOUP400 triggers the output detection sensor 170 of the first transmission device 101 where it is currently located, the next transmission device 100 starts to cooperate in the transmission. When FOUP400 stops triggering the output detection sensor 170 of the first transmission device 101 where it is currently located, the first transmission device 101 where it is currently located stops the transmission and waits for re-interaction with the overhead crane 300. When the FOUP400 stops triggering the input detection sensor 160 of the next conveying device 100, it is determined that the FOUP400 has completely entered the next conveying device 100, the next conveying device 100 stops conveying, and it is determined whether the next conveying device 100 of the optimal conveying path is idle. Then the above process is repeated until the FOUP400 is conveyed to the second conveying device 102 at the destination.

[0083] When the FOUP400 is delivered to the second conveying device 102 at the destination, the second conveying device 102 waits for the storage device 200 to dock. After the storage device 200 docks with the second conveying device 102 via E84 communication, the storage device 200 takes the FOUP400 from the second conveying device 102 and transfers it to the storage device 200. The second conveying device 102 then waits for another delivery and docking.

[0084] Furthermore, when it is determined that the FOUP400 is delivered to a conveyor device 100 with a horizontal rotation function, it is determined whether the next conveyor device 100 in the optimal conveying path is idle. If it is determined that there is no FOUP400 at the next conveyor device 100 and its operating status is normal, then the next conveyor device 100 is determined to be idle. Conversely, if it is determined that there is a FOUP400 or an abnormality at the next conveyor device 100, then the next conveyor device 100 is determined to be not idle.

[0085] When it is determined that the next transmission device 100 is idle, the FOUP 400 is transported to the next transmission device 100; when it is determined that the next transmission device 100 is not idle, the optimal transmission path of the FOUP 400 is re-determined, and the FOUP 400 is transmitted to the destination according to the re-determined optimal transmission path.

[0086] For example, see attached Figure 9As shown, when a FOUP400 is placed on the first conveyor 101 corresponding to object 710 (number 0103) by an overhead crane, the optimal transmission path for the FOUP400 is determined to be from the first conveyor 101 corresponding to object 710 (number 0103) to the conveyor 100 corresponding to object 710 (number 0102), and then to the second conveyor corresponding to object 710 (number 0101). Simultaneously, the two conveyor 100s corresponding to objects 710 (numbers 0102 and 0202) are conveyor 100s with horizontal rotation capabilities.

[0087] Therefore, when FOUP400 is transmitted from the first transmission device 101 corresponding to object 710 with number 0103 to the transmission device 100 corresponding to object 710 with number 0102, if it is determined that there is FOUP400 at the second transmission device 102 corresponding to object 710 with number 0101, then the new optimal transmission route is determined to first transmit to the transmission device 100 corresponding to object 710 with number 0202, and then transmit to the second transmission device corresponding to object 710 with number 0201.

[0088] The process of FOUP400 being sent out of storage equipment 200 via the FOUP conveyor system is the reverse of the above-mentioned inbound process, and will not be described in detail here.

[0089] Example 2

[0090] This embodiment discloses a conveying control system for a FOUP conveying system, which is installed in an industrial control computer. The conveying control system includes:

[0091] The FOUP positioning detection unit is used to determine in real time whether each conveyor used for docking with the overhead crane is placed in a FOUP by the overhead crane and / or whether each conveyor used for docking with the storage equipment is placed in a FOUP by the storage equipment.

[0092] A path determination unit is configured to, when determining a FOUP (Folded Up Container) placed on a conveyor for docking with an overhead crane and / or a FOUP placed on a conveyor for docking with a storage device, define the conveyor for docking with the overhead crane or the conveyor for docking with the storage device as a starting point; when the starting point is a conveyor for docking with the overhead crane, determine an optimal conveying path based on the coordinates of each conveyor in a two-dimensional matrix map and the attributes configured for the corresponding objects of each conveyor in the two-dimensional map to convey the FOUP from the starting point to a conveyor for docking with the storage device; when the starting point is a conveyor for docking with the storage device, determine an optimal conveying path based on the attributes configured for the corresponding objects of each conveyor in the two-dimensional map to convey the FOUP from the starting point to a conveyor for docking with the overhead crane.

[0093] A transmission unit is used to control the transmission equipment on the determined optimal transmission path to operate so that the FOUP is transmitted to the end of the optimal transmission path.

[0094] Example 3

[0095] This embodiment discloses an industrial control computer, including a memory and a processor. The memory stores a program that can be executed by the processor. When the program is executed, it implements any of the transmission control methods described above.

[0096] This invention has many other embodiments, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this invention.

Claims

1. A transmission control method for a FOUP transmission system, characterized in that, The transmission control method, which uses an industrial control computer for control, includes the following steps: Real-time determination of whether each conveyor used for docking with the overhead crane is placed in a FOUP by the overhead crane and / or whether each conveyor used for docking with the storage equipment is placed in a FOUP by the storage equipment. When it is determined that a FOUP is placed on a conveyor device used for docking with an overhead crane and / or a FOUP is placed on a conveyor device used for docking with a storage device, the conveyor device used for docking with the overhead crane or the conveyor device used for docking with the storage device is defined as the starting point; when the starting point is a conveyor device used for docking with the overhead crane, an optimal conveying path is determined according to the attributes configured for the corresponding objects of each conveyor device in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor device used for docking with the storage device. When the starting point is a conveyor for docking with storage equipment, an optimal conveying path is determined based on the attributes configured for the corresponding objects of each conveyor in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor for docking with an overhead crane. The transmission equipment on the determined optimal transmission path is controlled to operate so that the FOUP is transmitted to the end of the optimal transmission path.

2. The transmission control method of the FOUP transmission system according to claim 1, characterized in that: Each of the conveying devices is provided with an input detection sensor at its input end, an output detection sensor at its output end, and an presence / absence detection sensor located between the output detection sensor and the input detection sensor.

3. The transmission control method of the FOUP transmission system according to claim 1, characterized in that: When an input detection sensor on a conveying device detects a FOUP, and the upstream conveying device is conveying, the conveying device starts conveying. When the input detection sensor on a conveying device switches from being able to detect FOUP to being unable to detect FOUP, the conveying device is controlled to stop conveying, and it is determined whether the next conveying device on the optimal conveying path meets the conveying conditions. If it does, the conveying device is controlled to carry out conveying; otherwise, it waits. When the output detection sensor of a conveying device switches from being able to detect FOUP to being unable to detect FOUP, the conveying device stops conveying.

4. The transmission control method of the FOUP transmission system according to claim 1, characterized in that: The attributes that each object needs to configure include: number, whether it is enabled, the type of corresponding conveying device, whether the corresponding conveying device has horizontal rotation function, and the inbound / outbound mode of the corresponding conveying device.

5. The transmission control method of the FOUP transmission system according to claim 4, characterized in that: The number includes the X and Y coordinates of the object in the two-dimensional map.

6. The transmission control method of the FOUP transmission system according to claim 5, characterized in that: The two-dimensional map includes M*N objects distributed in a matrix, where M and N are integers not less than 5.

7. The transmission control method of the FOUP transmission system according to claim 4, characterized in that: When determining the optimal transmission path, the length of each feasible transmission path is determined according to the following formula: L=|X 起 - X 终 |+|And 起 - AND 终 |+N 旋 ; Where L is the length of a feasible transmission path; X 起 The X coordinate of the starting point; X 终 The X coordinate of the endpoint; the Y coordinate of the endpoint. 起 The Y-coordinate of the starting point; Y 终 The Y-coordinate of the endpoint; N 旋 This represents the number of rotations required for the FOUP to travel from the starting point to the ending point.

8. The transmission control method of the FOUP transmission system according to claim 1, characterized in that: When it is determined that the FOUP is being transported to a conveyor with horizontal rotation capability, it is then determined whether the next conveyor in the optimal conveyor path is idle. When it is determined that the next conveying device is idle, the FOUP is conveyed to the next conveying device; when it is determined that the next conveying device is not idle, the optimal conveying path of the FOUP is re-determined, and the FOUP is conveyed to the destination according to the re-determined optimal conveying path.

9. The conveying control system of the FOUP conveying system, characterized in that, The transmission control system, installed in an industrial computer, includes: The FOUP positioning detection unit is used to determine in real time whether each conveyor used for docking with the overhead crane is placed in a FOUP by the overhead crane and / or whether each conveyor used for docking with the storage equipment is placed in a FOUP by the storage equipment. A path determination unit is configured to define the conveyor for docking with the overhead crane or the conveyor for docking with the storage equipment as a starting point when a FOUP is placed on a conveyor for docking with the overhead crane and / or a FOUP is placed on a conveyor for docking with the storage equipment; when the starting point is a conveyor for docking with the overhead crane, an optimal conveying path is determined based on the attributes configured for the corresponding objects of each conveyor in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor for docking with the storage equipment; when the starting point is a conveyor for docking with the storage equipment, an optimal conveying path is determined based on the attributes configured for the corresponding objects of each conveyor in a one- or two-dimensional map to convey the FOUP from the starting point to a conveyor for docking with the overhead crane. A transmission unit is used to control the transmission equipment on the determined optimal transmission path to operate so that the FOUP is transmitted to the end of the optimal transmission path.

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