Coating Machine

Abstract

The present invention relates to a coating machine, which comprises: a frame, an adsorption device, a gantry device, a liquid supply device and an air knife device. The adsorption device comprises a coating platform, which is mounted on the frame, and the coating platform is used to place a substrate to be coated. The gantry device comprises a gantry and a coating die head, and the gantry is mounted on the frame and is movable relative to the coating platform along a first direction. The coating die head is mounted on the gantry and is located above the coating platform. The coating die head extends along a second direction, and the first direction, the second direction and the up and down directions of the frame are orthogonal to each other. The liquid supply device is connected to the coating die head to supply coating liquid to the coating die head. The air knife device is mounted on the gantry, and the air knife device has an air jet, which extends along the second direction and can blow air toward the coating platform. The coating area of ​​the coating machine of the present invention is large, and the uniformity during coating can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of coating machines, and in particular to a coating machine. Background Art

[0002] Typically in the manufacturing process of semiconductor devices and flat panel displays, in order to make a thin film that performs a specific function on a processed substrate, such as an oxide film, a metal film, a semiconductor film, etc., form a pattern in a desired shape, a process of coating a photosensitive liquid that reacts with a light source on the film is performed.

[0003] Among them, slit coating is a coating technology that presses the coating liquid along the mold gap under a certain pressure and transfers it to a moving substrate. It represents the future development direction of wet coating with its fast coating speed, good coating uniformity and wide coating window.

[0004] With the rapid development of perovskite battery technology, the conversion efficiency has been greatly improved. Perovskite solar cells are one of the most popular research directions in the application field of perovskite materials. The breakthrough of many technologies has enabled perovskites to have the foundation to move out of the laboratory and towards industrialization. Slit coating is a deposition technology with broad prospects. It has good deposition accuracy and good material utilization, which is conducive to accelerating industrial-scale production and improving potential commercial value.

[0005] In the related art, most coating machines are laboratory coating machines, that is, the coating platform of the product is a mobile structure, and the slit coating head is a fixed structure. However, the coating area of ​​the above scheme is small, and the uniformity and consistency of the film thickness are poor. Summary of the invention

[0006] The present invention aims to solve one of the technical problems in the related art at least to a certain extent.

[0007] To this end, an embodiment of the present invention provides a coating machine with a large coating area and improved coating uniformity.

[0008] The coating machine of an embodiment of the present invention includes: a frame; an adsorption device, the adsorption device includes a coating platform, the coating platform is installed on the frame, and the coating platform is used to place a substrate to be coated; a gantry device, the gantry device includes a gantry and a coating die head, the gantry is installed on the frame and is movable relative to the coating platform along a first direction, the coating die head is installed on the gantry and is located above the coating platform, the coating die head extends along a second direction, and the first direction, the second direction and the up and down directions of the frame are orthogonal to each other; a liquid supply device, the liquid supply device is connected to the coating die head to supply coating liquid to the coating die head; an air knife device, the air knife device is installed on the gantry, the air knife device has an air jet, the air jet extends along the second direction and can blow air toward the coating platform.

[0009] According to the coating machine of the embodiment of the present invention, the substrate to be coated can be placed on the coating platform, and then the gantry can move relative to the coating platform in the first direction to drive the coating die head to coat the substrate. In addition, the air knife device moves synchronously with the gantry, and the air jet of the air knife device blows toward the substrate, which can quickly remove the solvent components in the coating liquid, so that the coating liquid on the surface of the substrate is more uniform and has a higher flatness after crystallization. Therefore, the coating area of ​​the coating machine of the embodiment of the present invention is large, and the uniformity and flatness of the coating film can be improved.

[0010] In some embodiments, the wind knife device includes a wind knife, a first drive component and a second drive component, the air jet is arranged on the wind knife, the first drive component and the second drive component are both connected to the wind knife, the first drive component is used to drive the wind knife to move along the up and down directions, and the second drive component is used to drive the wind knife to rotate along its circumference to adjust the jet angle of the air jet.

[0011] In some embodiments, the wind knife device also includes a first frame, the first frame extends along the second direction, there are two first drive components and they are respectively arranged at both ends of the first frame, the first frame is connected to the gantry through the first drive component, and the wind knife and the second drive component are both installed on the first frame; and / or, the wind knife device also includes a pressure regulating valve, which is connected to the wind knife to control the pressure of nitrogen entering the wind knife; and / or, the wind knife device also includes a throttle valve, which is connected to the wind knife to control the flow of nitrogen entering the wind knife.

[0012] In some embodiments, a vacuum groove is arranged on the upper end surface of the coating platform, and the vacuum groove is a mesh structure, and the vacuum groove is connected to a vacuum generator for generating a vacuum; and / or, a drainage groove is provided on the upper end surface of the coating platform, and at least part of the drainage groove is arranged circumferentially around the coating platform.

[0013] In some embodiments, the adsorption device further includes a positioning mechanism, which is multiple and arranged along the circumference of the coating platform, and the positioning mechanism includes a positioning column, which is movable relative to the coating platform for positioning the position of the substrate; and / or, the adsorption device further includes a height sensor, which is at least two and arranged on the coating platform along the second direction, and the height sensor is used to detect the height difference of the coating die head along the second direction.

[0014] In some embodiments, the adsorption device further includes a flatness adjustment component, wherein the flatness adjustment components are multiple and are arranged at intervals at the lower end of the coating platform, the flatness adjustment component includes a connecting flange, an adjusting screw and an adjusting flange, the connecting flange is arranged at the upper end of the adjusting screw and is connected to the coating platform, the adjusting flange is arranged at the lower end of the adjusting screw and is connected to the frame, and the adjusting screw is threadedly matched with at least one of the adjusting flange and the connecting flange; and / or, the adsorption device further includes a lifting component, the lifting component is arranged at the lower end of the coating platform, and the lifting component is used to drive the substrate to move up and down; and / or, the adsorption device further includes a supporting component, the supporting component includes a supporting frame, an ejector pin and an ejector pin plate, the supporting frame is arranged below the coating platform, the ejector pin plate is arranged at the lower end surface of the coating platform, the ejector pin is multiple and is arranged at intervals, the upper end of the ejector pin is connected to the ejector pin plate, and the lower end of the ejector pin is connected to the supporting frame.

[0015] In some embodiments, there are at least two groups of gantry devices, and both groups of gantry devices are arranged above the coating platform and are movable relative to the coating platform along the first direction.

[0016] In some embodiments, the gantry device also includes a third drive assembly, and the third drive assembly is two and is respectively arranged on both sides of the gantry along the second direction. The gantry device also includes a die mounting plate, and the two ends of the die mounting plate along the second direction are respectively connected to the two third drive assemblies, and the coating die is mounted on the die mounting plate.

[0017] In some embodiments, the gantry device also includes a die foreign object plate, which is mounted on the die mounting plate, and the lower end of the die foreign object plate is closer to the coating platform than the lower end of the coating die; and / or, the gantry device also includes a substrate thickness sensor, which is mounted on the die mounting plate, and the substrate thickness sensor is used to detect the thickness of the substrate; and / or, the gantry device also includes a foreign object sensor, which is provided on the gantry to detect whether there is a foreign object on the movement trajectory of the gantry.

[0018] In some embodiments, the coating machine also includes a cleaning and soaking device, which includes a soaking box and a waste liquid box, both of which are installed on the frame, and the soaking box is used to store cleaning liquid. The coating die head can be moved into the soaking box for cleaning and soaking, and the waste liquid box is used to store waste liquid discharged from the soaking box.

[0019] In some embodiments, the cleaning and soaking device also includes a scraper assembly, which includes a scraper and a fourth drive assembly. The fourth drive assembly is connected to the scraper to drive the scraper to move along the second direction. The coating die head can move to the scraper position and cooperate with the scraper.

[0020] In some embodiments, there are at least two scrapers and they are arranged at intervals along the second direction; and / or, the cleaning and soaking device also includes a nozzle assembly, which is disposed on the frame and can spray cleaning liquid, and the fourth driving assembly can drive the scraper to move below the nozzle assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is an isometric view of a coating machine according to an embodiment of the present invention.

[0022] Figure 2 It is an isometric view of an air knife device of a coating machine according to an embodiment of the present invention.

[0023] Figure 3 It is an isometric view of the adsorption device of the coating machine according to the embodiment of the present invention.

[0024] Figure 4 This is an enlarged view of A in 3.

[0025] Figure 5 This is an enlarged view of B in 3.

[0026] Figure 6 It is a front view of the adsorption device of the coating machine according to the embodiment of the present invention.

[0027] Figure 7 It is an isometric view of a frame of a coating machine according to an embodiment of the present invention.

[0028] Figure 8 Schematic diagram of a gantry device of a coating machine according to an embodiment of the present invention.

[0029] Fig. 9 It is a cross-sectional view of a gantry device of a coating machine according to an embodiment of the present invention.

[0030] Fig.10 It is a top view of the gantry device of the coating machine according to the embodiment of the present invention.

[0031] Fig.11 It is an axonometric view of a cleaning and soaking device of a coating machine according to an embodiment of the present invention.

[0032] Fig.12 It is a cross-sectional view of a cleaning and soaking device of a coating machine according to an embodiment of the present invention.

[0033] Fig.13 It is a schematic internal diagram of a liquid supply device of a coating machine according to an embodiment of the present invention.

[0034] Fig.14 It is a front view of the liquid supply device of the coating machine according to the embodiment of the present invention.

[0035] Reference numerals:

[0036] 1. Frame; 11. Base; 12. Left frame; 13. Right frame; 14. Buffer; 15. Adjustment gasket;

[0037] 2. Adsorption device; 21. Coating platform; 211. Vacuum tank; 212. Drain tank; 22. Positioning mechanism; 221. Positioning column; 222. Horizontal push cylinder; 223. Lifting cylinder; 224. Lifting mounting plate; 225. Horizontal push mounting plate; 23. Height sensor; 24. Flatness adjustment assembly; 241. Connecting flange; 242. Adjusting screw; 243. Adjusting flange; 25. Lifting assembly; 251. Second motor module; 252. Servo mounting plate; 253. Dust cover; 254. Guide shaft; 26. Support assembly; 261. Support frame; 262. Ejector; 263. Ejector plate;

[0038] 3. Gantry device; 31. Gantry; 32. Coating die; 331. Die mounting plate; 332. Die foreign body plate; 34. Substrate thickness sensor; 35. Foreign body sensor; 36. Linear motor assembly; 361. Linear motor stator; 362. Linear motor mover; 363. Precision air bearing; 364. Side precision air bearing; 37. Third drive assembly; 371. Third motor module; 372. Ball screw pair; 373. Linear guide pair; 374. Photoelectric switch; 381. First grating ruler; 382. Second grating ruler;

[0039] 4. Liquid supply device; 41. Coating pump; 42. Coating liquid gas control valve; 43. Pressure sensor; 44. Coating liquid storage tank; 45. Cleaning liquid gas control valve; 46. Waste liquid buffer tank; 47. Protection cabinet; 48. Pressure barrel A; 49. Magnetic pump; 410. Pressure barrel B; 411. Gas control valve A; 412. Gas control valve B; 413. Coating liquid buffer tank A; 414. Solenoid valve group; 415. Pressure gauge; 416. Coating liquid buffer tank B;

[0040] 5. Wind knife device; 51. Wind knife; 52. First drive assembly; 521. First slide plate; 522. First motor module; 53. Second drive assembly; 531. Rotating motor; 532. Bearing seat; 533. Coupling; 54. First frame; 55. Pressure regulating valve;

[0041] 6. Cleaning and soaking device; 61. Soaking assembly; 611. Soaking box; 612. Profile bottom plate; 613. Short profile; 614. Soaking vertical plate; 62. Waste liquid collecting assembly; 621. Waste liquid box; 622. Long profile; 623. Profile block; 624. Column; 63. Scraper assembly; 631. Scraper; 632. Limit block; 633. Guide plate; 634. Rotating shaft; 635. Bearing block; 636. Guide column; 637. Oil-free bushing; 638. Bushing plate; 639. Liquid-proof sheet metal; 6310. Protective sheet metal; 6311. Rotating bearing; 64. Fourth drive assembly; 65. Nozzle assembly; 651. Cleaning nozzle; 652. Nozzle stand; 653. Cylinder mounting block; 654. Slide cylinder; 655. Nozzle adapter plate. DETAILED DESCRIPTION

[0042] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0043] Please refer to the following Figures 1 to 14 A coating machine according to an embodiment of the present invention is described.

[0044] like Figures 1 to 14 As shown, the coating machine according to the embodiment of the present invention includes: a frame 1, an adsorption device 2, a gantry device 3, a liquid supply device 4 and an air knife device 5.

[0045] The adsorption device 2 includes a coating platform 21, which is mounted on the frame 1. The coating platform 21 is used to place a substrate to be coated, for example, the substrate is glass. The gantry device 3 includes a gantry frame 31 and a coating die head 32. The gantry frame 31 is mounted on the frame 1 and is movable relative to the coating platform 21 along a first direction. The coating die head 32 is mounted on the gantry frame 31 and is located above the coating platform 21. The coating die head 32 extends along a second direction. The first direction, the second direction and the up and down direction of the frame 1 are orthogonal to each other. It can be understood that the first direction is Figure 1 The front-to-back direction in the second direction is Figure 1 The left and right direction in .

[0046] The liquid supply device 4 is connected to the coating die 32 for supplying coating liquid to the coating die 32. The wind knife device 5 is installed on the gantry 31. The wind knife device 5 has a jet nozzle, which extends along the second direction and can blow air toward the coating platform 21. That is, the wind knife device 5 moves with the coating die 32 to blow the coating liquid coated onto the substrate by the coating die 32.

[0047] The principle of the wind knife device 5 is as follows: after the compressed gas enters the wind knife device 5, it is discharged from the air jet port to form a high-strength airflow film, which can evenly sweep the coating liquid (perovskite precursor solution) and quickly take away the solvent components in the coating liquid to promote uniform explosive nucleation and growth of the coating liquid, so that the prepared perovskite film has good crystallinity, and can maintain the uniformity of the perovskite film over a large range, without defects or holes.

[0048] According to the coating machine of the embodiment of the present invention, the substrate to be coated can be placed on the coating platform 21, and then the gantry 31 can move relative to the coating platform 21 in the first direction to drive the coating die 32 to coat the substrate. In addition, the air knife device 5 moves synchronously with the gantry 31, and the air jet of the air knife device 5 blows toward the substrate, which can quickly take away the solvent components in the coating liquid, so that the coating liquid on the surface of the substrate is more uniform and has a higher flatness after crystallization. Therefore, the coating area of ​​the coating machine of the embodiment of the present invention is large, and the uniformity and flatness of the coating film can be improved.

[0049] Alternatively, if Figure 2As shown, the air knife device 5 includes an air knife 51, a first drive assembly 52 and a second drive assembly 53. The air jet is arranged on the air knife 51. The first drive assembly 52 and the second drive assembly 53 are both connected to the air knife 51. The first drive assembly 52 is used to drive the air knife 51 to move in the up-down direction, and the second drive assembly 53 is used to drive the air knife 51 to rotate in its circumferential direction to adjust the air jet angle of the air jet. It can be understood that the first drive assembly 52 can adjust the position of the air knife 51 in the up-down direction, and the second drive assembly 53 can adjust the air jet angle of the air knife 51, so that the air knife device 5 can adapt to the coating scenes of different coating thicknesses and different types of coating liquids, thereby expanding the application range of the air knife device 5.

[0050] Specifically, Figure 2 As shown, the wind knife device 5 also includes a first frame 54, the first frame 54 extends along the second direction, there are two first drive assemblies 52, which are respectively arranged at both ends of the first frame 54, the first frame 54 is connected to the gantry 31 through the first drive assembly 52, and the wind knife 51 and the second drive assembly 53 are both installed on the first frame 54. The coating machine of the embodiment of the present invention is conducive to ensuring the accuracy of the lifting and lowering of the wind knife 51 by installing the first drive assembly 52 at both ends of the first frame 54, and will not interfere with the blowing path of the wind knife 51.

[0051] In one example, if Figure 2 As shown, the first driving assembly 52 includes a first slide plate 521 and a first motor module 522 connected to each other. The first slide plate 521 is installed on the gantry 31. The first motor module 522 is connected to the first frame 54. The first motor module 522 can drive the first frame 54 to move in the up and down direction, so as to adjust the height of the wind knife 51. The second driving assembly 53 includes a rotating motor 531, a bearing seat 532 and a coupling 533. The bearing seat 532 is installed on the first frame 54. The wind knife 51 is connected to the bearing seat 532 and can rotate relative to the bearing seat 532. The rotating motor 531 is connected to the wind knife 51 through the coupling 533, so that the wind knife 51 can be driven to rotate to adjust the angle of the wind knife 51.

[0052] like Figure 2 As shown, the air knife device 5 also includes a pressure regulating valve 55, which is connected to the air knife 51 to control the pressure of the nitrogen gas introduced into the air knife 51. It can be understood that the pressure regulating valve 55 can adjust the pressure of the input value air knife 51 so that the pressure of the air knife 51 is controlled between 0.2MPa-0.4MPa. The air knife device 5 also includes a throttle valve (not shown), which is connected to the air knife 51 to control the flow rate of the nitrogen gas introduced into the air knife 51. The coating machine of the embodiment of the present invention can easily adjust the air flow film formed by the air knife 51 by adopting the above structure of the air knife device 5.

[0053] Alternatively, if Figure 3 As shown, the upper end surface of the coating platform 21 is provided with a vacuum groove 211, which is a mesh structure, and is connected to a vacuum generator (not shown) for generating a vacuum. For example, the mesh unit holes of the vacuum groove 211 are rectangular, that is, the vacuum groove 211 is a chessboard-shaped mesh structure, which is conducive to adsorbing the substrate on the coating platform 21, and has high reliability. For example, the substrate is glass.

[0054] Alternatively, if Figures 3 to 5 As shown, a drainage groove 212 is provided on the upper end surface of the coating platform 21, and at least part of the drainage groove 212 is arranged circumferentially around the coating platform 21, so that overflowed coating liquid will not splash onto other electrical components of the coating machine, thereby reducing equipment downtime and improving equipment yield.

[0055] In one example, the coating platform 21 is made of marble to facilitate the processing of the coating platform, and has good flatness and is not prone to vibration.

[0056] Furthermore, the coating machine of the embodiment of the present invention adopts a robot (mechanical arm) for loading and unloading, thereby avoiding the problem of interference between the substrate (glass) and the coating machine during loading and unloading, and improving the reliability during loading and unloading.

[0057] In some embodiments, Figure 3 and Figure 4 As shown, the adsorption device 2 further includes a positioning mechanism 22, which is multiple and arranged along the circumference of the coating platform 21. The positioning mechanism 22 includes a positioning column 221, which is movable relative to the coating platform 21 to locate the position of the substrate. For example, there are six positioning mechanisms 22, which are evenly distributed around the coating platform 21.

[0058] Specifically, Figure 4 As shown, the positioning mechanism 22 includes a positioning column 221, a horizontal push cylinder 222, a lifting cylinder 223, a lifting mounting plate 224 and a horizontal push mounting plate 225. The lifting cylinder 223 is connected to the coating platform 21 through the lifting mounting plate 224, the horizontal push cylinder 222 is installed on the lifting cylinder 223, and the positioning column 221 is installed and connected to the lifting cylinder 223 through the horizontal push mounting plate 225. The lifting cylinder 223 can control the rise and fall of the positioning column 221. The horizontal push cylinder 222 can control the translation of the positioning column 221, so that the substrate can be positioned by the positioning column 221 to improve the coating accuracy.

[0059] Alternatively, if Figure 6As shown, the adsorption device 2 further includes a height sensor 23, at least two of which are arranged on the coating platform 21 along the second direction, and the height sensor 23 is used to detect the height difference of the coating die head 32 along the second direction. It can be understood that the two height sensors 23 are respectively arranged on the left and right sides of the coating platform 21, and the two height sensors 23 can respectively measure the height of the corresponding position of the coating die head 32 to obtain the height difference between the left and right sides of the coating die head 32.

[0060] Alternatively, if Figure 5 As shown, the adsorption device 2 also includes a flatness adjustment component 24. The flatness adjustment component 24 is multiple and is arranged at intervals at the lower end of the coating platform 21. The flatness adjustment component 24 includes a connecting flange 241, an adjusting screw 242 and an adjusting flange 243. The connecting flange 241 is arranged at the upper end of the adjusting screw 242 and is connected to the coating platform 21. The adjusting flange 243 is arranged at the lower end of the adjusting screw 242 and is connected to the frame 1. The adjusting screw 242 is threadedly matched with at least one of the adjusting flange 243 and the connecting flange 241.

[0061] For example, Figure 5 As shown, the adjusting screw 242 is threadedly connected to the adjusting flange 243, so that when the flatness of the coating platform 21 needs to be adjusted, the adjusting flange 243 can be rotated to increase or decrease the height of the flatness adjustment component 24 to eliminate the precision error caused by the processing and assembly of the coating platform 21 itself.

[0062] Alternatively, if Figure 6 As shown, the adsorption device 2 further includes a lifting assembly 25, which is disposed at the lower end of the coating platform 21, and is used to drive the substrate to move up and down. It can be understood that the function of the lifting assembly 25 is to lift the substrate when the product is loaded or unloaded. For example, the lifting assembly 25 is divided into two groups, and is arranged at intervals along the front and rear direction of the coating platform 21.

[0063] Furthermore, if Figure 6 As shown, the adsorption device 2 also includes a support assembly 26, which includes a support frame 261, an ejector pin 262 and an ejector plate 263. The support frame 261 is arranged below the coating platform 21, and the ejector plate 263 is arranged on the lower end surface of the coating platform 21. There are multiple ejector pins 262 and they are arranged at intervals. The upper ends of the ejector pins 262 are connected to the ejector plate 263, and the lower ends of the ejector pins 262 are connected to the support frame 261.

[0064] Specifically, Figure 6As shown, the lifting assembly 25 includes a second motor module 251, a servo mounting plate 252, a dust cover 253 and a guide shaft 254. The second motor module 251 is mounted on the support frame 261, and the servo mounting plate 252 is connected to the second motor module 251. The second motor module 251 can drive the ejector plate 263 and the servo mounting plate 252 to move up and down to control the lifting of the substrate. The guide shaft 254 can guide the up and down movement of the substrate, and the dust cover 253 is installed outside the guide shaft 254 to prevent the guide shaft 254 from being exposed to the air, thereby ensuring the cleanliness of the environment around the coating machine.

[0065] In some embodiments, Figure 7 As shown, the frame 1 includes a base 11, a left frame 12, a right frame 13, a buffer 14 and an adjustment pad 15. The base 11 is made of marble to reduce the vibration amplitude of the frame 1. The left frame 12 and the right frame 13 are arranged on the left and right sides of the base 11 respectively, and the left frame 12 and the right frame 13 provide guidance for the movement of the gantry 31. The adjustment pad 15 is installed at the lower end of the base 11 to adjust the flatness of the frame 1 and has a certain anti-vibration effect.

[0066] In some embodiments, Figure 1 As shown, there are at least two groups of gantry devices 3, both of which are arranged above the coating platform and are movable relative to the coating platform along the first direction. In the embodiment of the present application, there are two groups of gantry devices 3, and the two groups of gantry devices 3 are arranged on the front and rear sides of the frame 1 respectively, and the coating die head 32 of each group of gantry devices 3 can respectively apply different coating liquids. In other words, the coating machine is equipped with two sets of gantry mechanisms, which can respectively apply two different solutions, so as to automatically switch the solutions according to different processes, save space, and have high cost performance of a single machine.

[0067] Alternatively, if Figure 8 and Fig. 9 As shown, the gantry device 3 also includes a third driving assembly 37, and the third driving assembly 37 is two and is respectively arranged on both sides of the gantry 31 along the second direction. The gantry device 3 also includes a die mounting plate 331, and the two ends of the die mounting plate 331 along the second direction are respectively connected to the two third driving assemblies 37, and the coating die 32 is installed on the die mounting plate 331.

[0068] In one example, if Fig. 9As shown, the third drive assembly 37 includes a third motor module 371, a ball screw pair 372, a linear guide pair 373 and a photoelectric switch 374. The third motor module 371 is connected to the die head mounting plate 331 through the ball screw pair 372 and the linear guide pair 373. The photoelectric switch 374 can detect the movement position of the third drive assembly 37. The first grating ruler 381 is installed at the lower end of the gantry 31, and the second grating ruler 382 is installed on the third drive assembly 37. The first grating ruler 381 and the second grating ruler 382 can improve the accuracy of the movement of the gantry 31 and the third drive assembly 37.

[0069] Furthermore, if Fig. 9 As shown, the linear motor assembly 36 also includes a linear motor mover 362, a precision air bearing 363 and a side precision air bearing 364. The linear motor mover 362 is installed on the gantry 31 and cooperates with the linear motor stator 361, thereby driving the gantry 31 to move along the first direction. The precision air bearing 363 and the side precision air bearing 364 are respectively arranged on the upper and lower sides of the linear motor mover 362 to support the linear motor mover 362. Figure 7 As shown, the linear motor stator 361 is installed on the left frame 12 and the right frame 13. Compared with the existing coating machine using a linear motor plus a linear slide rail, the present application has higher precision and smoother operation.

[0070] In one example, if Figure 8 As shown, the coating die head 32 is hingedly mounted so that the parallelism between the coating nozzle of the coating die head 32 and the coating platform 21 can be adjusted. The system error between the nozzle and the coating platform 21 can be automatically corrected by measuring the height sensor 23 on the coating platform 21 and the dimensions on both sides of the nozzle, which greatly improves the coating uniformity. The coating nozzle is a slit extrusion type, and its internal pipeline performs flow channel analysis based on the flow rate, liquid viscosity, pressure, and inlet and outlet diameters to simulate the internal pressure of the hole and the deviation of the coating thickness. The nozzle blade of the coating die head 32 is made of a new super-hard alloy material, which is greatly improved compared to the existing coating machine blade material SUS630. For example, the straightness of the flow channel surface can reach 0.75um, and the surface roughness can reach Rz0.1. Its hardness is 2 times higher than that of SUS630, and its wear is greatly reduced, which can reduce the interference caused by glass and cause blade damage.

[0071] like Figure 8 As shown, the gantry device 3 also includes a die foreign object plate 332, which is mounted on the die mounting plate 331. The lower end of the die foreign object plate 332 is closer to the coating platform than the lower end of the coating die 32, so that the die foreign object plate 332 can protect the coating die 32 from colliding with foreign objects on the substrate.

[0072] like Figure 8As shown, the gantry device 3 also includes a substrate thickness sensor 34, which is mounted on the die mounting plate and is used to detect the thickness of the substrate. When there is a foreign object (diameter must be greater than 100um) on the substrate, it can be detected in advance by the substrate thickness sensor 34 to prevent the coating thickness from changing due to the change in substrate thickness, and to prevent the problem of the substrate becoming thicker and colliding with the coating die 32.

[0073] like Figure 8 As shown, the gantry device 3 also includes a foreign object sensor 35, which is arranged on the gantry 31. The foreign object sensor 35 is used to detect whether there is a foreign object on the movement trajectory of the gantry 31, thereby improving the safety of the movement of the gantry 31.

[0074] In some embodiments, Fig.10 As shown, the liquid supply device 4 includes a coating pump 41, a coating liquid gas-controlled valve 42, a pressure sensor 43, a coating liquid storage tank 44, a cleaning liquid gas-controlled valve 45 and a waste liquid buffer tank 46. The coating pump 41, the coating liquid gas-controlled valve 42, the pressure sensor 43, the coating liquid storage tank 44, the cleaning liquid gas-controlled valve 45 and the waste liquid buffer tank 46 are all installed on the gantry 31 and are interconnected through pipelines. The coating pump 41 can accurately inject the coating liquid into the coating die 32, and the pressure sensor 43 can dynamically monitor the pressure curve of the coating liquid pipeline. For example, the coating pump 41 can use a servo reduction motor as a power source to drive the ball screw to rotate and drive the pump cylinder to reciprocate. It has high repeatability and a stable speed without fluctuations, which is conducive to the formation of a uniform film layer when the coating liquid is extruded from the slit of the coating die 32. The coating liquid gas control valve 42 controls the opening and closing of the coating liquid pipeline, and the cleaning liquid gas control valve 45 controls the opening and closing of the cleaning liquid pipeline. The coating liquid can be transferred and cached in the coating liquid storage tank 44 to improve the coating liquid supply efficiency.

[0075] In some embodiments, Fig.11 As shown, the coating machine further includes a cleaning and soaking device 6, which includes a soaking box 611 and a waste liquid box 621. The soaking box 611 and the waste liquid box 621 are both mounted on the frame 1. The soaking box 611 is used to store cleaning liquid. The coating die 32 can be moved into the soaking box 611 for cleaning and soaking. The waste liquid box 621 is used to store waste liquid discharged from the soaking box 611. The cleaning and soaking device 6 also includes a scraper assembly 63, which includes a scraper 631 and a fourth drive assembly 64. The fourth drive assembly 64 is connected to the scraper 631 to drive the scraper 631 to move in the second direction. The coating die 32 can move to the scraper 631 position and cooperate with the scraper 631.

[0076] It is understandable that if Fig.11As shown, the cleaning and soaking device 6 is mainly used to clean the coating die 32. After each coating action is completed, the scraper assembly 63 cleans the blade head on the coating die 32 to remove the coating liquid remaining on the coating die 32. When the coating machine is stopped, the coating die 32 can be moved to the soaking box 611 for cleaning and soaking to prevent the coating die 32 from being blocked.

[0077] Alternatively, if Fig.11 As shown, there are at least two scrapers 631 arranged at intervals along the second direction, so as to improve the cleaning effect of the coating die head 32. The cleaning and soaking device 6 also includes a nozzle assembly 65, which is arranged on the frame 1 and can spray cleaning liquid, and the fourth driving assembly 64 can drive the scraper 631 to move below the nozzle assembly 65.

[0078] In one example, if Fig.11 As shown, the cleaning and soaking device 6 includes a profile base plate 612, a short profile 613, a soaking plate 614, a soaking box 611, a long profile 622, a profile block 623, a column 624, a waste liquid box 621, a fourth drive assembly 64 (scraper servo module), a nozzle stand 652, a cylinder mounting block 653, a slide cylinder 654, a nozzle adapter plate 655, a cleaning nozzle 651, a limit block 632, a scraper 631, a guide plate 633, a rotating shaft 634, a bearing block 635, a guide column 636, an oil-free bushing 637, a bushing plate 638, a liquid-proof sheet metal 639, a protective sheet metal 6310 and a rotating bearing 6311.

[0079] like Fig.11 As shown, when the coating machine is stopped, the tip of the coating die 32 is immersed in the cleaning liquid in the immersion box 611, so as to prevent the coating liquid from solidifying and clogging the coating die 32. Specifically, the short profile 613 is installed at the lower end of the profile bottom plate 612, the immersion vertical plate 614 is installed at the upper end of the short profile 613, there are two immersion vertical plates 614 and they are arranged on the short profile 613 at intervals, and the immersion box 611 is installed on the immersion vertical plates 614.

[0080] like Fig.11 As shown, the waste liquid collection assembly 62 composed of the long profile 622, the profile block 623, the column 624, and the waste liquid box 621 can collect the waste liquid discharged by the coating die 32 to prevent the machine from being polluted. Specifically, the profile block 623 is installed at the lower end of the long profile 622, the column 624 is installed at the upper end of the profile block 623, the column 624 and the profile block 623 are multiple groups and are arranged at intervals along the length direction of the long profile 622, and the waste liquid box 621 is installed at the upper end of the column 624.

[0081] like Fig.11As shown, the scraper assembly 63 composed of a limit block 632, a scraper 631, a guide plate 633, a rotating shaft 634, a bearing block 635, a guide column 636, an oil-free bushing 637, a bushing plate 638, a liquid-proof sheet metal 639, a protective sheet metal 6310, and a rotating bearing 6311 moves in the Y direction under the drive of the fourth drive assembly 64, and the scraper assembly 63 cleans the residual coating liquid on the tip of the coating die 32. Specifically, the limit block 632 is connected to the fourth drive assembly 64 (scraper servo module), so that the fourth drive assembly 64 can drive the scraper 631 to slide in the left and right directions through the limit block 632. The scraper 631 is connected to the rotating shaft 634 through the guide plate 633, and the rotating shaft 634 is rotatably connected to the bearing block 635 through the rotating bearing 6311, so that the scraper 631 can be rotated in the axial direction by a certain angle to fit the coating nozzle of the coating die. The bearing block 635 is connected to the bushing plate 638 through an oil-free bushing 637 , and the bushing plate 638 is connected to the limit block 632 . A liquid-proof sheet metal 639 is provided at the lower end of the bushing plate 638 , and the surrounding wall of the bushing plate 638 is shielded and protected by a protective sheet metal 6310 .

[0082] like Fig.11 and Fig.12 As shown, the scraper assembly 63 uses double scrapers 631, which has better cleaning effect and less wear of the scraper 631 than the single scraper 631 of the existing coating machine. The scraper 631 mechanism can be fine-tuned perpendicular to the rotation direction under the action of the rotating bearing 6311, the guide column 636, and the oil-free bushing 637, which can better ensure the fit between the scraper 631 and the tip of the coating die 32, and the cleaning effect is better.

[0083] like Fig.12 As shown, the nozzle assembly 65 composed of the nozzle stand 652, the cylinder mounting block 653, the slide cylinder 654, the nozzle adapter plate 655, and the cleaning nozzle 651 mainly cleans the scraper 631. The cleaning liquid sprayed by the cleaning nozzle 651 removes the residual coating liquid on the scraper 631 to prevent the scraper 631 from contaminating the coating die 32 when cleaning. Specifically, the cylinder mounting block 653 is installed on the upper end of the nozzle stand 652, the slide cylinder 654 is installed on the cylinder mounting block 653, the slide cylinder 654 is connected to the nozzle adapter plate 655, and the cleaning nozzle 651 is connected to the nozzle adapter plate 655, so that the slide cylinder 654 can drive the nozzle adapter plate 655 to move up and down, so as to drive the cleaning nozzle 651 to move up and down.

[0084] Furthermore, if Fig.13 and Fig.14As shown, the liquid supply device 4 includes a protective cabinet 47, a pressure barrel A48, a magnetic pump 49, a pressure barrel B410, an air-controlled valve A411, an air-controlled valve B412, a coating liquid buffer tank A413, an electromagnetic valve group 414, a pressure gauge 415 and a coating liquid buffer tank B416. Since the coating machine of the present invention is a double gantry structure, it has two sets of liquid supply devices 4 and corresponds to two gantry frames 31 respectively. The coating liquid is stored in two 15L pressure barrels A48 and pressure barrel B410. Even if one pressure barrel has no liquid, the other pressure barrel can be connected through the air-controlled valve A411. The pressure barrels (pressure barrels A48 and pressure barrels B410) are equipped with stirring motors, and the coating liquid is stirred regularly according to the process requirements to prevent the mixture in the liquid from settling. After the stirring is completed, the vacuum pump evacuates the pressure barrel to extract the bubbles generated by the stirring to prevent the bubbles from affecting the coating effect. The coating liquid is then injected into the coating liquid buffer tank A413 or the coating liquid buffer tank B416 through the magnetic pump 49, and then injected into the coating liquid buffer tank 44 through the pipeline system. This design is helpful to avoid the generation of bubbles when replacing the pressure barrel.

[0085] For example, Fig.13 and Fig.14 As shown, the pressure barrels (pressure barrel A48 and pressure barrel B410) are equipped with liquid level sensors. When the liquid level of the pressure barrel (pressure barrel A48 and pressure barrel B410) is lower than the set value, the operator can be prompted to refill. The entire coating liquid supply pipeline can use clean nitrogen as the power source. The nitrogen pipeline is connected to the pressure barrel (pressure barrel A48 and pressure barrel B410), and the air-controlled valve (air-controlled valve A411 and air-controlled valve B412) controls the opening and closing of the coating liquid. The pressure sensor 43 monitors the nitrogen pressure value and the pressure in the pressure barrel.

[0086] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0087] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0088] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0089] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0090] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0091] Although the above embodiments have been shown and described, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. Changes, modifications, substitutions and variations of the above embodiments by those of ordinary skill in the art are all within the scope of protection of the present invention.

Claims

1. A coating machine, characterized in that: include: Rack (1); An adsorption device (2), the adsorption device (2) comprising a coating platform (21), the coating platform (21) being mounted on the frame (1), the coating platform (21) being used to place a substrate to be coated; A gantry device (3), the gantry device (3) comprising a gantry frame (31) and a coating die head (32), the gantry frame (31) being mounted on the frame (1) and being movable relative to the coating platform (21) along a first direction, the coating die head (32) being mounted on the gantry frame (31) and being located above the coating platform (21), the coating die head (32) extending along a second direction, the first direction, the second direction and the up-down direction of the frame (1) being orthogonal to each other; a liquid supply device (4), the liquid supply device (4) being in communication with the coating die head (32) so as to supply coating liquid to the coating die head (32); A wind knife device (5), wherein the wind knife device (5) is installed on the gantry (31), and the wind knife device (5) has an air jet outlet, wherein the air jet outlet extends along the second direction and can blow air in the direction of the coating platform (21).

2. The coating machine according to claim 1, characterized in that: The wind knife device (5) comprises a wind knife (51), a first driving component (52) and a second driving component (53); the air jet is arranged on the wind knife (51); the first driving component (52) and the second driving component (53) are both connected to the wind knife (51); the first driving component (52) is used to drive the wind knife (51) to move along the up and down directions; the second driving component (53) is used to drive the wind knife (51) to rotate along its circumference to adjust the air jet angle of the air jet.

3. The coating machine according to claim 2, characterized in that: The wind knife device (5) further comprises a first frame (54), the first frame (54) extending along the second direction, the first driving components (52) being two and respectively arranged at two ends of the first frame (54), the first frame (54) being connected to the gantry frame (31) via the first driving components (52), and the wind knife (51) and the second driving components (53) being both mounted on the first frame (54); And / or, the air knife device (5) further comprises a pressure regulating valve (55), wherein the pressure regulating valve (55) is connected to the air knife (51) to control the pressure of nitrogen introduced into the air knife (51); And / or, the air knife device (5) further comprises a throttle valve, wherein the throttle valve is connected to the air knife (51) and is used to control the flow rate of nitrogen introduced into the air knife (51).

4. The coating machine according to claim 1, characterized in that: The upper end surface of the coating platform (21) is provided with a vacuum groove (211), the vacuum groove (211) is in a mesh structure, and the vacuum groove (211) is connected to a vacuum generator for generating a vacuum; And / or, a drainage groove (212) is provided on the upper end surface of the coating platform (21), and at least part of the drainage groove (212) is arranged around the circumference of the coating platform (21).

5. The coating machine according to claim 1, characterized in that: The adsorption device (2) further comprises a positioning mechanism (22), wherein the positioning mechanism (22) is multiple and arranged along the circumference of the coating platform (21), and the positioning mechanism (22) comprises a positioning column (221), and the positioning column (221) is movable relative to the coating platform (21) to locate the position of the substrate; And / or, the adsorption device (2) further comprises a height sensor (23), the height sensors (23) being at least two and arranged on the coating platform (21) along the second direction, the height sensors (23) being used to detect a height difference of the coating die head (32) along the second direction.

6. The coating machine according to claim 1, characterized in that: The adsorption device (2) further comprises a flatness adjustment component (24), wherein the flatness adjustment components (24) are multiple and are arranged at intervals at the lower end of the coating platform (21), and the flatness adjustment component (24) comprises a connecting flange (241), an adjusting screw (242) and an adjusting flange (243), wherein the connecting flange (241) is arranged at the upper end of the adjusting screw (242) and is connected to the coating platform (21), and the adjusting flange (243) is arranged at the lower end of the adjusting screw (242) and is connected to the frame (1), and the adjusting screw (242) is threadedly matched with at least one of the adjusting flange (243) and the connecting flange (241); And / or, the adsorption device (2) further comprises a lifting component (25), the lifting component (25) being arranged at the lower end of the coating platform (21), the lifting component (25) being used to drive the substrate to move up and down; And / or, the adsorption device (2) further comprises a support assembly (26), the support assembly (26) comprising a support frame (261), an ejector pin (262) and an ejector pin plate (263), the support frame (261) being arranged below the coating platform (21), the ejector pin plate (263) being arranged on the lower end surface of the coating platform (21), the ejector pins (262) being multiple and arranged at intervals, the upper ends of the ejector pins (262) being connected to the ejector pin plate (263), and the lower ends of the ejector pins (262) being connected to the support frame (261).

7. The coating machine according to claim 1, characterized in that: There are at least two groups of gantry devices (3), and both groups of gantry devices (3) are arranged above the coating platform (21) and are movable relative to the coating platform (21) along the first direction.

8. The coating machine according to claim 1, characterized in that: The gantry device (3) further comprises a third drive assembly (37), wherein the third drive assembly (37) is two and is respectively arranged on both sides of the gantry (31) along the second direction. The gantry device (3) further comprises a die mounting plate (331), wherein the two ends of the die mounting plate (331) along the second direction are respectively connected to the two third drive assemblies (37), and the coating die (32) is mounted on the die mounting plate (331).

9. The coating machine according to claim 8, characterized in that: The gantry device (3) further comprises a die foreign body plate (332), wherein the die foreign body plate (332) is mounted on the die mounting plate (331), and the lower end of the die foreign body plate (332) is closer to the coating platform (21) than the lower end of the coating die (32); And / or, the gantry device (3) further comprises a substrate thickness sensor (34), wherein the substrate thickness sensor (34) is mounted on the die head mounting plate (331), and the substrate thickness sensor (34) is used to detect the thickness of the substrate; And / or, the gantry device (3) further comprises a foreign object sensor (35), wherein the foreign object sensor (35) is arranged on the gantry (31) and is used to detect whether there is a foreign object on the movement track of the gantry (31).

10. The coating machine according to any one of claims 1 to 9, characterized in that: The coating die (32) further comprises a cleaning and soaking device (6), wherein the cleaning and soaking device (6) comprises a soaking box (611) and a waste liquid box (621), wherein the soaking box (611) and the waste liquid box (621) are both mounted on the frame (1), wherein the soaking box (611) is used to store cleaning liquid, and the coating die head (32) can be moved into the soaking box (611) for cleaning and soaking, and the waste liquid box (621) is used to store waste liquid discharged from the soaking box (611).

11. The coating machine according to claim 10, characterized in that: The cleaning and soaking device (6) also includes a scraper assembly (63), and the scraper assembly (63) includes a scraper (631) and a fourth drive assembly (64). The fourth drive assembly (64) is connected to the scraper (631) to drive the scraper (631) to move along the second direction. The coating die head (32) can move to the position of the scraper (631) and cooperate with the scraper (631).

12. The coating machine according to claim 11, characterized in that: There are at least two scrapers (631) arranged at intervals along the second direction; And / or, the cleaning and soaking device (6) further comprises a nozzle assembly (65), wherein the nozzle assembly (65) is arranged on the frame (1) and can spray cleaning liquid, and the fourth driving assembly (64) can drive the scraper (631) to move below the nozzle assembly (65).

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