A point evaporation source nozzle for improving coating uniformity

Abstract

The present invention discloses a point evaporation source nozzle for improving the uniformity of coating, which belongs to the technical field of coating. The second steam channel hole is pressed by a pressing splicing ring superimposed on the second steam channel hole to avoid loosening, and the second steam channel hole is a trumpet-shaped structure. During the process of leading out the steam in the first steam channel hole, the steam is guided to both sides through the second steam channel hole to achieve more uniform steam distribution. During the rotation process, a sealing silicone structure is provided at the joint between the inside of the rotating limiter and the half gear, which effectively avoids the problem of steam leakage. The second steam channel hole is pressed by a pressing splicing ring superimposed on the second steam channel hole to avoid loosening, and the second steam channel hole is a trumpet-shaped structure. During the process of leading out the steam in the first steam channel hole, the steam is guided to both sides through the second steam channel hole to achieve more uniform steam distribution.

Description

Technical Field

[0001] The invention relates to a point evaporation source nozzle for improving film coating uniformity, belonging to the technical field of film coating. Background Art

[0002] In the silicon-based OLED industry, single-point evaporation coating is often used. This method has obvious disadvantages. The uniformity of the coating is maintained at about 3%. In order to obtain greater uniformity, the OFFSET needs to be designed to be larger and the source needs to be placed farther away, resulting in a huge waste of materials. A large amount of material is coated on the chamber, and the wafer receives less. In addition, the larger the chamber, the overall cost will increase significantly.

[0003] For example, an evaporation source nozzle disclosed in application number: 201911325298.2 includes a nozzle body, the nozzle body includes a channel for circulating evaporation material; an inner sleeve, a rotating component is arranged between the inner sleeve and the inner wall of the channel, at least part of the inner sleeve is rotatably arranged in the channel through the rotating component, at least part of the inner sleeve of the evaporation source nozzle is rotatably arranged in the channel through the rotating component, which is conducive to the evaporation of condensed material attached to the inner sleeve or its return to the crucible, thereby reducing the possibility of clogging the nozzle after the evaporation material is condensed, and improving the quality of evaporation.

[0004] The principle of single-point evaporation is shown in Figure A below. The evaporated liquid is thick in the middle and thin at the edges, and the curve presented is an arc state, so the uniformity is poor.

[0005] The crucible adopts a single open design, as shown in Figure B, and there are two types of designs of similar size;

[0006] There is also a design method of separating the upper and lower parts, and the size of the mouth can be changed according to the specific usage conditions, which is the reason for poor uniformity and low material utilization. Summary of the invention

[0007] The main purpose of the present invention is to provide a point evaporation source nozzle for improving the uniformity of coating.

[0008] The purpose of the present invention can be achieved by adopting the following technical solutions:

[0009] A point evaporation source nozzle for improving uniformity of coating, comprising a nozzle body for steam extraction;

[0010] An internal adjustment steering nozzle, a first steam channel connecting pipe, a second steam channel connecting pipe, an outer sealing rotating connecting piece, a limiting ring, a half gear, teeth, a limiting shell, a pressed splicing ring, a rotating limiting piece and a splicing thread are fixedly installed in the nozzle body;

[0011] An inner adjustable steering nozzle is placed in the nozzle body, and the inner adjustable steering nozzle is fixedly connected to the nozzle body through the second steam channel connecting pipe and the outer sealing rotating connecting piece. The outer end of the inner adjustable steering nozzle is surrounded by the first steam channel connecting pipe, and the second steam channel connecting pipe is installed inside the first steam channel connecting pipe. The outer ring of the inner adjustable steering nozzle is installed with the outer sealing rotating connecting piece.

[0012] A half gear is installed on the inner adjustable steering nozzle, and teeth for driving the inner adjustable steering nozzle are installed around the outer ring of the half gear. A rotation limiter is provided on the outer ring cover of the half gear, and the lower end of the rotation limiter is fixedly connected to the nozzle body;

[0013] A splicing thread is coiled around the outer side of the rotation limiter, a limit ring is sleeved on the rotation limiter, and a limit shell is installed on one side of the limit ring;

[0014] A pressed splicing ring is pressed and installed on the limiting ring.

[0015] Preferably, a rotating rod, a gear and a rotating driving member are installed in the limiting shell;

[0016] A rotating rod is installed in the limiting shell, a gear is sleeved on the rotating rod, the outer end of the rotating rod is installed on the output end of the rotating driving member, and the teeth on the gear and the half gear are meshed with each other.

[0017] Preferably, the nozzle body is provided with a first steam passage hole, a second steam passage hole, a first evaporation hole, a second evaporation hole and a rotation limiting thread;

[0018] A first steam passage hole is formed around the nozzle body, and a second steam passage hole is installed at the inner axis of the first steam passage hole;

[0019] The first steam passage hole and the second steam passage hole are respectively provided with a first hole evaporation hole and a second hole evaporation hole inside.

[0020] Preferably, the second steam duct hole is an open structure, and the outer circle of the second steam duct hole is an inclined structure that is narrow inside and wide outside.

[0021] Preferably, the first steam channel connecting pipe and the second steam channel connecting pipe are respectively connected to the first evaporation hole and the second evaporation hole.

[0022] Preferably, the outer end of the nozzle body is a narrow-wide structure, and the limiting ring is threadedly spliced ​​with the rotation limiting member.

[0023] Preferably, the second steam channel hole is a surrounding structure with at least one gas-conducting structure, and the first steam channel connecting pipe and the second steam channel connecting pipe are spliced ​​with or semi-covered by the first evaporation hole and the second evaporation hole.

[0024] Preferably, the first steam channel connecting pipe and the first evaporation hole are folded structures, and the interface between the first evaporation hole and the first steam channel connecting pipe is a magnetic attraction structure.

[0025] Preferably, the outlet direction of the steam is adjusted by the inclination angle of the second steam channel hole.

[0026] Preferably, the first steam channel hole, the first evaporation hole and the cavity in the first steam channel connecting pipe are straight tube structures or inclined structures.

[0027] Beneficial technical effects of the present invention:

[0028] The present invention provides a point evaporation source nozzle for improving the uniformity of coating.

[0029] 1. The second steam hole is pressed by a pressing splicing ring superimposed on the evaporation hole to avoid looseness, and the second steam hole is a trumpet-shaped structure. During the steam in the first steam hole, the steam is guided to both sides through the second steam hole to achieve more uniform steam distribution;

[0030] 2. During the rotation process, a sealing silicone structure is provided at the joint between the inside of the rotating limiter and the half gear, which effectively avoids the problem of steam leakage. The second steam hole is pressed by a pressing splicing ring superimposed on the evaporation hole to avoid loosening. The second steam hole is a trumpet-shaped structure. During the process of steam being discharged from the first steam hole, the steam is guided to both sides through the second steam hole to achieve more uniform steam distribution. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is Figure A in the prior art;

[0032] Figure 2 It is Figure B in the prior art;

[0033] Figure 3 It is a schematic diagram of the overall structure of a preferred embodiment of a point evaporation source nozzle for improving the uniformity of coating according to the present invention;

[0034] Figure 4 A schematic diagram of a steam channel of a preferred embodiment of a point evaporation source nozzle for improving uniformity of coating according to the present invention;

[0035] Figure 5 A schematic diagram of a steam guide connection structure of a preferred embodiment of a point evaporation source nozzle for improving film coating uniformity according to the present invention;

[0036] Figure 6 A bottom view of a steam guide connection structure of a preferred embodiment of a point evaporation source nozzle for improving film coating uniformity according to the present invention;

[0037] Figure 7 A top view of a steam guide connection structure of a preferred embodiment of a point evaporation source nozzle for improving film coating uniformity according to the present invention;

[0038] Figure 8 A schematic diagram of a rotation limiting structure of a preferred embodiment of a point evaporation source nozzle for improving film coating uniformity according to the present invention;

[0039] Fig. 9 A schematic diagram of a limit drive structure of a preferred embodiment of a point evaporation source nozzle for improving film coating uniformity according to the present invention;

[0040] Fig.10 A schematic diagram of steam outlet according to a preferred embodiment of a point evaporation source nozzle for improving film coating uniformity according to the present invention;

[0041] Fig.11 The figure is a schematic diagram of the vapor diffusion range structure of a preferred embodiment of a point evaporation source nozzle for improving the uniformity of coating according to the present invention.

[0042] In the figure: 1. nozzle body; 101. first steam channel hole; 102. second steam channel hole; 103. first channel evaporation hole; 104. second channel evaporation hole; 105. rotation limit thread; 2. internal adjustment steering nozzle; 201. first steam channel connecting pipe; 202. second steam channel connecting pipe; 203. outer sealing rotating connecting piece; 204. limiting ring; 205. half gear; 206. teeth; 207. limiting shell; 208. pressed splicing ring; 209. rotation limit piece; 210. rotating rod; 211. gear; 212. splicing thread; 213. rotating driving piece. DETAILED DESCRIPTION

[0043] In order to make the technical solution of the present invention more clear and specific to those skilled in the art, the present invention is further described in detail below in conjunction with embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0044] like Figure 3 - Fig.11 As shown, the present embodiment provides a point evaporation source nozzle for improving the uniformity of coating, comprising a nozzle body 1 for introducing steam;

[0045] The nozzle body 1 is fixedly installed with an inner adjustable steering nozzle 2, a first steam channel connecting pipe 201, a second steam channel connecting pipe 202, an outer sealing rotating connecting piece 203, a limiting ring 204, a half gear 205, teeth 206, a limiting shell 207, a pressed splicing ring 208, a rotating limiting piece 209 and a splicing thread 212;

[0046] An inner adjustable steering nozzle 2 is placed in the nozzle body 1, and the inner adjustable steering nozzle 2 is fixedly connected to the nozzle body 1 through the second steam channel connecting pipe 202 and the outer sealing rotating connecting piece 203. The outer end of the inner adjustable steering nozzle 2 is surrounded by the first steam channel connecting pipe 201, and the second steam channel connecting pipe 202 is installed inside the first steam channel connecting pipe 201. The outer ring of the inner adjustable steering nozzle 2 is installed with the outer sealing rotating connecting piece 203;

[0047] A half gear 205 is installed on the inner adjustable steering nozzle 2. The outer ring of the half gear 205 is surrounded by teeth 206 for driving the inner adjustable steering nozzle 2. The outer ring of the half gear 205 is covered with a rotation limiter 209. The lower end of the rotation limiter 209 is fixedly connected to the nozzle body 1.

[0048] A splicing thread 212 is formed around the outer side of the rotation limiter 209, a limit ring 204 is sleeved on the rotation limiter 209, and a limit housing 207 is installed on one side of the limit ring 204;

[0049] A pressed splicing ring 208 is pressed and installed on the limiting ring 204 .

[0050] A rotating rod 210, a gear 211 and a rotating driving member 213 are installed in the limiting housing 207;

[0051] A rotating rod 210 is installed in the limiting shell 207 . A gear 211 is sleeved on the rotating rod 210 . The outer end of the rotating rod 210 is installed on the output end of the rotating driving member 213 . The gear 211 meshes with the teeth 206 on the half gear 205 .

[0052] The nozzle body 1 is provided with a first steam passage hole 101, a second steam passage hole 102, a first passage evaporation hole 103, a second passage evaporation hole 104 and a rotation limiting thread 105;

[0053] A first steam passage hole 101 is formed around the nozzle body 1, and a second steam passage hole 102 is installed at the inner axis of the first steam passage hole 101;

[0054] The first steam passage hole 101 and the second steam passage hole 102 are respectively provided with a first evaporation hole 103 and a second evaporation hole 104 .

[0055] The second steam passage hole 102 is an open structure, and the outer circle of the second steam passage hole 102 is an inclined structure with a narrow inner side and a wide outer side.

[0056] The first steam channel connecting pipe 201 and the second steam channel connecting pipe 202 are respectively connected to the first hole evaporation holes 103 and the second hole evaporation holes 104 correspondingly.

[0057] The outer end of the nozzle body 1 is a narrow and wide structure, and the limiting ring 204 is connected to the rotation limiting member 209 by threaded splicing.

[0058] The second steam channel hole 102 is a surrounding structure with at least one gas guide, and the first steam channel connecting pipe 201 and the second steam channel connecting pipe 202 are spliced ​​with or semi-covered by the first evaporation hole 103 and the second evaporation hole 104.

[0059] The first steam channel connecting pipe 201 and the first evaporation hole 103 are folded structures, and the interface between the first evaporation hole 103 and the first steam channel connecting pipe 201 is a magnetic attraction structure.

[0060] The direction of steam discharge is regulated by the inclination angle of the second steam passage hole 102 .

[0061] The first steam channel hole 101, the first channel evaporation hole 103 and the cavity inside the first steam channel connecting pipe 201 are straight tube structures or inclined structures.

[0062] like Figure 3 - Fig.11 As shown, the working process of a point evaporation source nozzle for improving the uniformity of coating provided by the present embodiment is as follows: after the nozzle body 1 is installed, the uniformity of the steam is adjusted by rotating the inner adjustment steering nozzle 2, and the second steam channel connecting pipe 202 and the outer sealing rotating connecting member 203 are adjusted along the thread during the rotation process, and the first steam channel connecting pipe 201 and the first hole evaporation hole 103 are telescopically folded and connected during the rotation of the inner adjustment steering nozzle 2 and the outer sealing rotating connecting member 203, and the first steam channel connecting pipe 201 and the first hole evaporation hole 103 are elastically folded structures, and the joint of the first steam channel connecting pipe 201 and the first hole evaporation hole 103 is a magnetic attraction structure, and the magnetic attraction and folding realize the function of lifting and lowering and fitting during the rotation and movement, and realize independent detachability, easy disassembly, easy adjustment, and better uniformity;

[0063] By starting the rotating driving member 213 to drive the teeth 206 meshing with the half gear 205 to rotate, the half gear 205 adjusts the amount of steam extraction during the forward and reverse rotation, and the function of automatic rotation adjustment can be realized. The rotating limit member 209 is a special-shaped structure, and the half gear 205 can rotate along the inner side of the rotating limit member 209. During the rotation process, a sealing silicone structure is provided at the joint between the inside of the rotating limit member 209 and the half gear 205, which effectively avoids the problem of steam leakage. The pressing splicing ring 208 superimposed on the second hole evaporation hole 104 is pressed to avoid looseness. The second steam channel 102 is a trumpet-shaped structure. During the process of extracting the steam in the first steam channel 101, it is guided to both sides through the second steam channel 102 to achieve a more uniform steam distribution.

[0064] Embodiment 1

[0065] like Figure 3 - Fig. 9 As shown, the nozzle body 1 is surrounded by a first steam passage hole 101, the inner side of the first steam passage hole 101 is provided with a second steam passage hole 102, the inner sides of the first steam passage hole 101 and the second steam passage hole 102 are provided with a first hole evaporation hole 103 and a second hole evaporation hole 104, the outer sides of the first hole evaporation hole 103 and the second hole evaporation hole 104 are provided with an inner adjustable steering nozzle 2, the outer ring of the inner adjustable steering nozzle 2 is provided with an outer sealing rotating connecting piece 203, the outer sealing rotating connecting piece 203 and the second The steam channel connecting pipe 202 is threadedly connected to the second evaporation hole 104 on the inner side of the nozzle body 1 and the nozzle body 1, the outer sealing rotating connecting piece 203 and the second steam channel connecting pipe 202 are inserted into the rotating structure, and a half gear 205 is rotatably installed on the inner adjustment steering nozzle 2, and the outer ring of the half gear 205 is distributed with teeth 206, and a rotation limiter 209 is provided on the half gear 205, and the rotation limiter 209 is fixedly connected to the nozzle body 1, and the half gear 205 is rotatably connected to the rotation limiter 209;

[0066] After the nozzle body 1 is installed, the uniformity of the steam is adjusted by rotating the inner adjustment steering nozzle 2. During the rotation of the second steam duct connecting pipe 202 and the outer sealing rotating connecting piece 203, the adjustment is performed along the thread. During the rotation of the inner adjustment steering nozzle 2 and the outer sealing rotating connecting piece 203, the first steam duct connecting pipe 201 and the first hole evaporation hole 103 are telescopically folded and connected. The first steam duct connecting pipe 201 and the first hole evaporation hole 103 are elastically folded structures. The fitting part of the first steam duct connecting pipe 201 and the first hole evaporation hole 103 is a magnetic structure. The magnetic attraction and folding can realize the function of lifting and fitting during the rotation and movement, so that it can be independently disassembled, easy to disassemble, easy to adjust, and more uniform.

[0067] Embodiment 2

[0068] like Figure 3 - Fig. 9 As shown, the outer ring of the rotation limit member 209 is threadedly connected to the limit ring 204, a limit housing 207 is installed on one side of the limit ring 204, a rotation rod 210 is installed in the limit housing 207, a gear 211 is installed on the rotation rod 210, and the rotation rod 210 is installed at the output end of the rotation driving member 213;

[0069] By starting the rotating driving member 213 to drive the teeth 206 meshing with the half gear 205 to rotate, the half gear 205 adjusts the amount of steam extraction during the forward and reverse rotation, and the function of automatic rotation adjustment can be realized. The rotating limit member 209 is a special-shaped structure, and the half gear 205 can rotate along the inner side of the rotating limit member 209. During the rotation process, a sealing silicone structure is provided at the joint between the inside of the rotating limit member 209 and the half gear 205, which effectively avoids the problem of steam leakage. The pressing splicing ring 208 superimposed on the second hole evaporation hole 104 is pressed to avoid looseness. The second steam channel 102 is a trumpet-shaped structure. During the process of extracting the steam in the first steam channel 101, it is guided to both sides through the second steam channel 102 to achieve a more uniform steam distribution.

[0070] The above description is only a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and concepts of the present invention within the scope disclosed by the present invention, which belong to the protection scope of the present invention.

Claims

1. A point evaporation source nozzle for improving the uniformity of coating, characterized in that: It comprises a nozzle body (1) for introducing steam; An internally adjustable steering nozzle (2), a first steam channel connecting pipe (201), a second steam channel connecting pipe (202), an external sealing rotating connecting piece (203), a limiting ring (204), a half gear (205), teeth (206), a limiting shell (207), a pressed splicing ring (208), a rotating limiting piece (209) and a splicing thread (212) are fixedly installed inside the nozzle body (1); An inner adjustable steering nozzle (2) is placed inside the nozzle body (1); the inner adjustable steering nozzle (2) is fixedly connected to the nozzle body (1) via a second steam channel connecting pipe (202) and an outer sealing rotating connecting piece (203); a first steam channel connecting pipe (201) is installed around the outer end of the inner adjustable steering nozzle (2); a second steam channel connecting pipe (202) is installed inside the first steam channel connecting pipe (201); and an outer sealing rotating connecting piece (203) is installed on the outer ring of the inner adjustable steering nozzle (2); A half gear (205) is mounted on the inner adjustable steering nozzle (2); teeth (206) for driving the inner adjustable steering nozzle (2) are mounted around the outer ring of the half gear (205); a rotation limiter (209) is provided on the outer ring cover of the half gear (205); and the lower end of the rotation limiter (209) is fixedly connected to the nozzle body (1); A splicing thread (212) is wound around the outer side of the rotation limiting member (209), a limiting ring (204) is sleeved on the rotation limiting member (209), and a limiting shell (207) is installed on one side of the limiting ring (204); A pressing splicing ring (208) is pressed and installed on the limiting ring (204).

2. A point evaporation source nozzle for improving coating uniformity according to claim 1, characterized in that: A rotating rod (210), a gear (211) and a rotating driving member (213) are installed in the limiting housing (207); A rotating rod (210) is installed in the limiting shell (207), a gear (211) is sleeved on the rotating rod (210), the outer end of the rotating rod (210) is installed on the output end of the rotating driving member (213), and the gear (211) and the teeth (206) on the half gear (205) are meshed with each other.

3. A point evaporation source nozzle for improving coating uniformity according to claim 2, characterized in that: A first steam passage hole (101), a second steam passage hole (102), a first evaporation hole (103), a second evaporation hole (104) and a rotation limiting thread (105) are installed on the nozzle body (1); A first steam passage hole (101) is formed around the nozzle body (1), and a second steam passage hole (102) is installed at the inner axis of the first steam passage hole (101); A first-hole evaporation hole (103) and a second-hole evaporation hole (104) are respectively installed inside the first steam channel hole (101) and the second steam channel hole (102).

4. A point evaporation source nozzle for improving coating uniformity according to claim 3, characterized in that: The second steam passage hole (102) is an open structure, and the outer circle of the second steam passage hole (102) is an inclined structure that is narrow inside and wide outside.

5. A point evaporation source nozzle for improving coating uniformity according to claim 4, characterized in that: The first steam channel connecting pipe (201) and the second steam channel connecting pipe (202) are respectively connected to the first hole evaporation hole (103) and the second hole evaporation hole (104).

6. A point evaporation source nozzle for improving coating uniformity according to claim 5, characterized in that: The outer end of the nozzle body (1) is a narrow and wide structure, and the limiting ring (204) is threadedly spliced ​​with the rotation limiting member (209).

7. A point evaporation source nozzle for improving coating uniformity according to claim 6, characterized in that: The second steam channel hole (102) is a surrounding structure with at least one gas-conducting structure, and the first steam channel connecting pipe (201) and the second steam channel connecting pipe (202) are mutually spliced ​​or semi-covered with the first channel evaporation hole (103) and the second channel evaporation hole (104).

8. The point evaporation source nozzle for improving the uniformity of coating according to claim 7, characterized in that: The first steam channel connecting pipe (201) and the first evaporation hole (103) are folded structures, and the interface between the first evaporation hole (103) and the first steam channel connecting pipe (201) is a magnetic attraction structure.

9. The point evaporation source nozzle for improving the uniformity of coating according to claim 8, characterized in that: The steam outlet direction is adjusted by the inclination angle of the second steam channel hole (102).

10. The point evaporation source nozzle for improving coating uniformity according to claim 9, characterized in that: The cavities in the first steam channel hole (101), the first channel evaporation hole (103) and the first steam channel connecting pipe (201) are straight tube structures or inclined structures.

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