A winding high vacuum magnetron sputtering coating production line and its cooling and straightening equipment

Abstract

The present invention discloses a winding high vacuum magnetron sputtering coating production line and its cooling and straightening equipment, including a cooling and straightening chamber, wherein a second guide roller and a cooling and straightening system for gradient cooling of a flexible substrate are arranged inside the cooling and straightening chamber, wherein the cooling and straightening system is composed of a plurality of continuous cooling areas, wherein the temperatures in the plurality of cooling areas decrease in sequence according to a predetermined gradient, wherein the temperature of the cooling area in the initial stage is the highest, and the temperature of the cooling area in the final stage is the lowest. The present invention has a simple structure, and by dividing the interior of the cooling and straightening chamber into three temperature stages, and setting the temperature, flow velocity and air intake of the cooling medium at the same time, step-by-step heat dissipation is achieved, thereby avoiding wrinkles of the flexible substrate caused by rapid temperature changes; straightening is performed while cooling, and a stress release and a straightening guide are performed on the flexible substrate, thereby effectively improving the yield rate.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum flexible material coating equipment, in particular to a winding high vacuum magnetron sputtering coating production line and cooling and straightening equipment thereof. Background Art

[0002] With the continuous advancement of science and technology and the growing market demand, vacuum coating technology has developed into a technology with broad development prospects. This technology has been widely used in many industries such as electronic films, decorative films, optical films, etc., and with the continuous expansion of application fields, its market potential is huge. In particular, the demand for coating of flexible substrate materials has shown a significant growth trend in recent years. In order to meet this specific demand, vacuum coating technology for flexible substrates is also constantly innovating and developing, and the requirements for coating efficiency and quality are also increasing.

[0003] The flexible substrate high vacuum coating system is a complex integrated system, which mainly includes key components such as process chamber, sample feeding chamber, transition chamber, vacuum acquisition and detection system, substrate fixture system, evaporation source or sputtering source and control system. However, there are some technical challenges in achieving high-quality flexible substrate coating. Especially after the coating is completed, wrinkles are prone to occur during the cooling process of the substrate material. This is because the substrate temperature after coating is high. Under natural cooling or non-uniform cooling conditions, the material may form wrinkles due to thermal stress. In addition, when rollers are used for material transmission, the tension generated by the rotation of the rollers may also cause deformation of the material or additional wrinkles, which not only affects the appearance quality of the product, but also may reduce the performance of the coating layer. For this reason, a winding high vacuum magnetron sputtering coating production line and its cooling and straightening equipment are proposed. Summary of the invention

[0004] The object of the present invention is to provide a winding high vacuum magnetron sputtering coating production line and a cooling and straightening device thereof to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a cooling and straightening device, comprising a cooling and straightening chamber, wherein a second guide roller and a cooling and straightening system for gradient cooling of a flexible substrate are arranged inside the cooling and straightening chamber, wherein the cooling and straightening system is composed of a plurality of continuous cooling areas, wherein the temperatures in the plurality of cooling areas decrease in sequence according to a predetermined gradient, wherein the temperature of the cooling area in the initial stage is the highest, and the temperature of the cooling area in the final stage is the lowest;

[0006] Among them, the cooling area is composed of three cooling and straightening roller assemblies, and the cooling and straightening roller assembly includes an outer roller cylinder and an inner roller cylinder arranged in the outer roller cylinder cavity. The outer roller cylinder and the inner roller cylinder are both provided with multiple air outlets, and the outer roller cylinder and the inner roller cylinder are connected by an adjustment structure for adjusting different gears to change the overlap between the multiple air outlets. A fan structure that promotes the flow of cooling medium in the inner roller cylinder is installed on the inner wall of the outer roller cylinder cavity, and a driving structure that drives the outer roller cylinder to rotate is also installed on the cooling and straightening chamber.

[0007] As a further solution of the present invention: two cooling and straightening roller assemblies are shared between two adjacent cooling areas, and one cooling and straightening roller assembly is shared between two cooling areas separated by a cooling area.

[0008] As a further solution of the present invention: the adjustment structure includes a plurality of limit shafts arranged on the inner wall of the outer roller cylinder, the inner roller cylinder has a plurality of waist-shaped holes corresponding to the positions of the limit shafts, and the ends of the limit shafts are installed with screws that can be tightened to fix the outer roller cylinder and the inner roller cylinder.

[0009] As a further solution of the present invention: the fan structure includes a vacuum motor installed in the outer roller cylinder, and the output end of the vacuum motor extends to the interior of the inner roller cylinder and is installed with turbine blades.

[0010] As a further solution of the present invention: the driving structure includes a coupling and a motor connected to the cooling and straightening chamber through the coupling, and the output end of the motor extends to the interior of the cooling and straightening chamber and is connected to the outer roller cylinder.

[0011] As a further solution of the present invention: the inner wall of the cooling and straightening chamber is provided with an annular sealing outer ring, the inner part of the annular sealing outer ring is rotatably connected with an annular sealing inner ring connected to the outer roller drum, and the cooling and straightening chamber is also provided with an air inlet at the end which leads into the cooling and straightening roller assembly.

[0012] A winding high-vacuum magnetron sputtering coating production line includes cooling and straightening equipment, a cleaning and preheating chamber, a process chamber and a winding chamber. The process chamber is located between the cleaning and preheating chamber and the cooling and straightening chamber. A Kaufman ion source is installed on the cleaning and preheating chamber. A vacuum system is installed on the process chamber and the cooling and straightening chamber.

[0013] As a further solution of the present invention: a lofting system and a first tensioning roller are provided in the cleaning and preheating chamber, and a plurality of first guide rollers are also provided in the cleaning and preheating chamber, and the upper surfaces of the plurality of first guide rollers are all in the same plane.

[0014] As a further solution of the present invention: a main roller assembly, a guide roller system and a tensioning roller system are provided in the process chamber, guide roller systems and tensioning roller systems are provided on both sides of the roller assembly, a plurality of temperature measuring components are provided in the process chamber, and the plurality of temperature measuring components are adjacent to the outer side of the main roller assembly, and a sputtering system is installed on the process chamber.

[0015] As a further solution of the present invention: a sample collection roller assembly, a third guide roller and a second tensioning roller are respectively installed in the winding chamber, and the second tensioning roller is located between the third guide roller and the sample collection roller assembly.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. The cooling and straightening chamber is divided into three temperature stages. At the same time, the cooling medium temperature, flow rate and air intake are set to achieve step-by-step heat dissipation to avoid wrinkles on the flexible substrate caused by rapid temperature changes. Cooling and straightening are performed at the same time, and the flexible substrate is subjected to stress release and straightening guidance, which effectively improves the yield rate.

[0018] 2. By adding an ion source pretreatment process in the front stage, the gas and impurities adsorbed on the surface are removed, and the flexible substrate is preheated at the same time, which effectively improves the adhesion of subsequent coating and improves the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the high vacuum magnetron sputtering coating production line of the present invention;

[0020] Figure 2 It is a schematic diagram of the cooling and straightening system of the present invention;

[0021] Figure 3 It is a schematic diagram of the outer roller drum and the inner roller drum overlap adjustment state 1 of the present invention;

[0022] Figure 4 It is a schematic diagram of the outer roller drum and the inner roller drum overlap adjustment state 2 of the present invention;

[0023] Figure 5 It is a schematic diagram of the cooling area distribution of the present invention;

[0024] In the figure:

[0025] 1. Cleaning and preheating chamber; 11. Lofting system; 12. First tensioning roller; 13. First guide roller;

[0026] 2. Process chamber; 21. Main roller assembly; 22. Guide roller system; 23. Tension roller system; 24. Temperature measurement assembly; 25. Sputtering system;

[0027] 3. Cooling and straightening chamber; 31. Second guide roller; 32. Cooling and straightening system; 321. Cooling and straightening roller assembly; 321-1. Outer roller cylinder; 321-2. Inner roller cylinder; 321-3. Adjustment structure; 321-3-1. Limiting shaft; 321-3-2. Waist-shaped hole; 321-3-3. Screw; 321-4. Air outlet; 321-5. Fan structure; 321-5-1. Vacuum motor; 321-5-2. Turbine fan blade; 321-6. Driving structure; 321-6-1. Coupling; 321-6-2. Motor; 33. Annular sealing outer ring; 34. Annular sealing inner ring; 35. Air inlet;

[0028] 4. Winding chamber; 41. Sample collecting roller assembly; 42. Third guide roller; 43. Second tensioning roller;

[0029] 5. Kaufman ion source; 6. Vacuum system. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] See also Figure 1-5 In an embodiment of the present invention, a cooling and straightening device includes a cooling and straightening chamber 3, a second guide roller 31 and a cooling and straightening system 32 for gradient cooling of the flexible substrate are arranged inside the cooling and straightening chamber 3, the cooling and straightening system 32 is composed of a plurality of continuous cooling areas, the temperatures in the plurality of cooling areas decrease in sequence according to a predetermined gradient, the temperature of the cooling area in the initial stage is the highest, and the temperature of the cooling area in the final stage is the lowest, wherein the cooling area that first contacts the flexible substrate is the initial stage, and then the temperature in each cooling area is lower than the temperature of the previous cooling area;

[0032] The cooling area is composed of three cooling and straightening roller assemblies 321, which include an outer roller barrel 321-1 and an inner roller barrel 321-2 arranged in the cavity of the outer roller barrel 321-1. Multiple air outlets 321-4 are provided on the outer roller barrel 321-1 and the inner roller barrel 321-2, and the outer roller barrel 321-1 and the inner roller barrel 321-2 are connected by an adjustment structure 321-3 for adjusting different gears so that the overlap between the multiple air outlets 321-4 on the outer roller barrel 321-1 and the inner roller barrel 321-2 is changed. A fan structure 321-5 for promoting the flow of cooling medium in the inner roller barrel 321-1 is installed on the inner wall of the cavity of the outer roller barrel 321-1, and a driving structure 321-6 for driving the outer roller barrel 321-1 to rotate is also installed on the cooling and straightening chamber 3;

[0033] In the present embodiment, preferably, the number of cooling zones is three, and the three cooling zones are composed of five cooling straightening roller assemblies 321, and the five cooling straightening roller assemblies 321 are arranged in a wave-like manner. The layout of the cooling zones is that three cooling zones are arranged in sequence from the entrance to the exit of the flexible substrate, wherein two adjacent cooling zones share two cooling straightening roller assemblies 321, and two cooling zones separated by a cooling zone share one cooling straightening roller assembly 321. The first cooling straightening roller assembly 321 contacted by the flexible substrate has the highest temperature, which is close to the discharge temperature of the flexible substrate after processing. As the flexible substrate passes through each subsequent cooling straightening roller assembly 321, the temperature of the blown cooling medium provided by these assemblies gradually decreases, which can effectively avoid the large temperature drop gradient caused by single cooling, resulting in substrate wrinkling. At the same time, this method of slowly cooling and straightening during the cooling process can effectively reduce the internal stress of the flexible substrate material.

[0034] Examples:

[0035] like Figure 5 As shown, in the layout of the cooling system, we clearly divide the three cooling areas into the first cooling area, the second cooling area and the third cooling area, and correspondingly name the five cooling straightening roller assemblies 321 as the first cooling straightening roller assembly, the second cooling straightening roller assembly, the third cooling straightening roller assembly, the fourth cooling straightening roller assembly and the fifth cooling straightening roller assembly.

[0036] Specifically, the first cooling area includes a first cooling straightening roller assembly, a second cooling straightening roller assembly and a third cooling straightening roller assembly, which blow out cooling media at 150°C, 130°C and 110°C respectively, forming a temperature environment in this area; then, the second cooling area is composed of a second cooling straightening roller assembly, a third cooling straightening roller assembly and a fourth cooling straightening roller assembly, which blow out cooling media at 130°C, 110°C and 90°C respectively, acting together on this area; finally, the third cooling area is composed of a third cooling straightening roller assembly, a fourth cooling straightening roller assembly and a fifth cooling straightening roller assembly, which blow out cooling media at 110°C, 90°C and 70°C respectively, regulating the temperature of this area in a comprehensive manner. Therefore, the temperature in each cooling zone is a combination of cooling media of different temperatures blown out by the cooling and straightening roller assemblies contained therein, namely, the first cooling zone is composed of 150°C, 130°C, and 110°C, the second cooling zone is composed of 130°C, 110°C, and 90°C, and the third cooling zone is composed of 110°C, 90°C, and 70°C. In this way, through the different temperature settings of each cooling and straightening roller assembly 321, the temperature of each cooling zone can be precisely controlled, and the temperature of the cooling medium blown out by each cooling and straightening roller assembly 321 includes but is not limited to the above-mentioned temperature, which can be adjusted according to actual conditions, and the temperature of the cooling zone only needs to decrease according to the gradient.

[0037] See also Figure 3-4In one embodiment, in this embodiment, preferably, the adjustment structure 321-3 includes a plurality of limit shafts 321-3-1 arranged on the inner wall of the outer roller cylinder 321-1, and the inner roller cylinder 321-2 has a plurality of waist-shaped holes 321-3-2 corresponding to the positions of the limit shafts 321-3-1. In this embodiment, the number of the limit shafts 321-3-1 and the waist-shaped holes 321-3-2 are the same, and the positions of the two are one-to-one corresponding. The end of the limit shaft 321-3-1 is installed with a screw 321-3-3 that can be tightened to fix the outer roller cylinder 321-1 and the inner roller cylinder 321-2. When the inner roller cylinder 321-2 is placed in the outer roller cylinder 321-1, the limit shaft 321-3-1 just enters the inner part of the waist-shaped hole 321-3-2, and the waist-shaped hole 321-3-2 can provide a certain range of motion for the limit shaft 321-3-1. The inner roller cylinder 321-2 and the outer roller cylinder 321-1 are convenient for the staff to rotate and adjust the inner roller cylinder 321-2 and the outer roller cylinder 321-1, so as to change the overlap of the air outlet 321-4 on the inner roller cylinder 321-2 and the outer roller cylinder 321-1. When the two completely overlap, the amount of cooling medium gas blown out through the air outlet 321-4 is the largest; when the two do not overlap at all, the amount of cooling medium gas blown out through the air outlet 321-4 is the smallest. Since there is a gap between the inner roller cylinder 321-2 and the outer roller cylinder 321-1, the cooling medium can be blown out even if the air outlets 321-4 of the above two do not completely overlap. At the same time, by tightening the screw 321-3-3 on the limit shaft 321-3-1 so that one end of the screw 321-3-3 squeezes the inner wall of the inner roller cylinder 321-2, the position of the inner roller cylinder 321-2 and the outer roller cylinder 321-1 can be fixed.

[0038] See also Figure 2 In one embodiment, in this embodiment, preferably, the driving structure 321-6 includes a coupling 321-6-1 and a motor 321-6-2 connected to the cooling and straightening chamber 3 through the coupling 321-6-1, and the output end of the motor 321-6-2 extends to the interior of the cooling and straightening chamber 3 and is connected to the outer roller cylinder 321-1. When the motor 321-6-2 is turned on, it can drive the outer roller cylinder 321-1 located in the cooling and straightening chamber 3 to rotate.

[0039] See also Figure 2In one embodiment, in this embodiment, preferably, the fan structure 321-5 includes a vacuum motor 321-5-1 installed in the outer roller drum 321-1, the output end of the vacuum motor 321-5-1 extends to the inside of the inner roller drum 321-2 and is installed with a turbine blade 321-5-2, and the vacuum motor 321-5-1 drives the turbine blade 321-5-2 to rotate, and the inner wall of the cooling and straightening chamber 3 is provided with an annular sealing outer ring 33, and the inner part of the annular sealing outer ring 33 is rotatably connected with an annular sealing inner ring 34 connected to the outer roller drum 321-1, and the cooling and straightening chamber 3 is also provided with an air inlet 35 whose end is connected to the cooling and straightening roller assembly 321. Due to the motor 321-6-2 The output shaft is directly connected to the outer roller cylinder 321-1, which will appear unbalanced when rotated for a long time. The combination of the annular sealing outer ring 33 and the annular sealing inner ring 34 can provide a balanced supporting force for the outer roller cylinder 321-1. Secondly, the external cooling medium can also enter the annular sealing outer ring 33 through the air inlet 35, and then enter the inner roller cylinder 321-2 through the air vent. The air vent runs through the annular sealing inner ring 34, the outer roller cylinder 321-1 and the inner roller cylinder 321-2, thereby realizing the transmission of the cooling medium. After being combined with the fan structure 321-5, different cooling speeds and temperatures of the cooling area can be obtained by controlling the cooling medium intake and the rotation speed of the fan blades.

[0040] A winding high vacuum magnetron sputtering coating production line includes a cooling and straightening device, a cleaning and preheating chamber 1, a process chamber 2 and a winding chamber 4, wherein the process chamber 2 is located between the cleaning and preheating chamber 1 and the cooling and straightening chamber 3, and the cleaning and preheating chamber 1, the process chamber 2, the cooling and straightening chamber 3 and the winding chamber 4 are all connected through a neck tube, wherein a vacuum gauge and an observation window are also installed in the cleaning and preheating chamber 1, so that during the vacuuming process, external staff can better observe the vacuum state in the chamber, a sample placement system 11 and a first tensioning roller 12 are provided in the cleaning and preheating chamber 1, so as to ensure that the flexible substrate sent out by the sample placement system 11 is in a tight state, and a plurality of first tensioning rollers 12 are also provided in the cleaning and preheating chamber 1. A guide roller 13, and the upper surfaces of multiple first guide rollers 13 are all in the same plane to realize the transportation of the flexible substrate. A Kaufman ion source 5 is also installed on the cleaning and preheating chamber 1. The Kaufman ion source 5 is used to clean the surface of the flexible substrate in a vacuum environment before the flexible substrate is coated, so as to remove impurities on the surface, achieve the purpose of surface cleaning, and increase the bonding force between the film and the substrate. On the other hand, the energy in the cleaning process causes the surface temperature of the substrate to rise, which plays a role of preheating the substrate before coating, and is more conducive to the formation of the film. A vacuum system 6 is installed on the process chamber 2 and the cooling and straightening chamber 3. The vacuum system 6 is a prior art and will not be described in detail here. It can be purchased directly on the market.

[0041] See also Figure 1In one embodiment, in this embodiment, preferably, a main roller assembly 21, a guide roller system 22 and a tension roller system 23 are provided in the process chamber 2. The process chamber 2 is welded with 316 stainless steel to facilitate the sputtering system to achieve the best effect. After welding, electrolytic polishing is performed to improve the surface quality and facilitate the acquisition of high vacuum. Guide roller systems 22 and tension roller systems 23 are provided on both sides of the main roller assembly 21. In this embodiment, the guide roller system 22 and the tension roller system 23 each include two rollers, of which the two rollers close to the main roller assembly 21 are responsible for providing a tensioning function to ensure the proper tension of the material during the transmission process; and the other two rollers away from the main roller assembly 21 act as guide rollers for guiding the material. Correct path and direction; multiple temperature measuring components 24 are arranged in the process chamber 2, and multiple temperature measuring components 24 are close to the outside of the main roller assembly 21, and multiple temperature measuring components 24 are distributed in the middle area of ​​the cathode sputtering target of the main roller assembly 21 and the tensioning roller system 23 before and after the process, which are used to monitor the temperature of the flexible substrate at different stages. A sputtering system 25 is installed on the process chamber 2, wherein the sputtering system 25 includes a rotating cathode and a supporting component. The rotating cathodes are distributed at the upper end of the process chamber 2, with a total of 3 groups, which are distributed at intervals of 30 degrees. The main function of using a rotating cathode is to improve the target material utilization and storage rate, increase the target material use cycle, and at the same time improve the thin film deposition rate, make the process more stable, significantly improve the arc discharge phenomenon, and improve efficiency.

[0042] See also Figure 1 In one embodiment, in this embodiment, preferably, a sample collecting roller assembly 41, a third guide roller 42 and a second tensioning roller 43 are respectively installed in the winding chamber 4, and the second tensioning roller 43 is located between the third guide roller 42 and the sample collecting roller assembly 41. Under the action of the second tensioning roller 43, it can be ensured that the flexible substrate wound on the sample collecting roller assembly 41 is always kept in a taut state, so as to achieve smooth winding of the flexible substrate after processing.

[0043] The working principle and use process of the present invention are as follows: first, the initial end of the flexible substrate is passed through the cleaning and preheating chamber 1, the process chamber 2, the cooling and straightening chamber 3 and the winding chamber 4 in sequence; secondly, the vacuum system 6 is turned on to make the above-mentioned chambers have a vacuum environment; and the presence of the Kaufman ion source 5 can clean the flexible substrate before coating; the cleaned flexible substrate enters the interior of the process chamber 2 for processing; when the flexible substrate is processed, it enters the interior of the cooling and straightening chamber 3; under the action of multiple gradient-designed cooling areas inside the cooling and straightening chamber 3, the just-processed flexible substrate is gradiently cooled to avoid the phenomenon of wrinkles on the flexible substrate during the processing; the flexible substrate after cooling and straightening enters the interior of the winding chamber 4 to complete the final winding.

[0044] Although this specification is described according to implementation modes, not every implementation mode includes only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

[0045] Therefore, the above description is only a preferred embodiment of the present application and is not intended to limit the scope of implementation of the present application; that is, all equivalent changes made according to the scope of the claims of the present application are within the protection scope of the claims of the present application.

Claims

1. A cooling and straightening device, characterized in that: The invention comprises a cooling and straightening chamber (3), wherein a second guide roller (31) and a cooling and straightening system (32) for performing gradient cooling on the flexible substrate are arranged inside the cooling and straightening chamber (3), wherein the cooling and straightening system (32) is composed of a plurality of continuous cooling areas, wherein the temperatures in the plurality of cooling areas decrease in sequence according to a predetermined gradient, wherein the temperature of the cooling area in the initial stage is the highest, and the temperature of the cooling area in the final stage is the lowest; The cooling area is composed of three cooling straightening roller assemblies (321), the cooling straightening roller assembly (321) comprises an outer roller drum (321-1) and an inner roller drum (321-2) arranged in the cavity of the outer roller drum (321-1), the outer roller drum (321-1) and the inner roller drum (321-2) are both provided with a plurality of air outlets (321-4), and the outer roller drum (321-1) and the inner roller drum (321-2) are 2) are connected by an adjustment structure (321-3) for adjusting different gears so as to change the overlap between the plurality of air outlets (321-4); a fan structure (321-5) for promoting the flow of cooling medium in the inner roller cylinder (321-1) is installed on the inner wall of the cavity of the outer roller cylinder (321-1); and a driving structure (321-6) for driving the outer roller cylinder (321-1) to rotate is also installed on the cooling and straightening chamber (3).

2. The cooling and straightening equipment according to claim 1, characterized in that: Two adjacent cooling areas share two cooling straightening roller assemblies (321), and two cooling areas separated by a cooling area share one cooling straightening roller assembly (321).

3. The cooling and straightening equipment according to claim 1, characterized in that: The adjustment structure (321-3) comprises a plurality of limit shafts (321-3-1) arranged on the inner wall of the outer roller cylinder (321-1); the inner roller cylinder (321-2) has a plurality of waist-shaped holes (321-3-2) corresponding to the positions of the limit shafts (321-3-1); and the ends of the limit shafts (321-3-1) are provided with screws (321-3-3) which can be tightened to fix the outer roller cylinder (321-1) and the inner roller cylinder (321-2).

4. The cooling and straightening equipment according to claim 1, characterized in that: The fan structure (321-5) comprises a vacuum motor (321-5-1) installed in an outer roller cylinder (321-1), and an output end of the vacuum motor (321-5-1) extends to the interior of an inner roller cylinder (321-2) and is equipped with a turbine fan blade (321-5-2).

5. The cooling and straightening equipment according to claim 1, characterized in that: The driving structure (321-6) comprises a coupling (321-6-1) and a motor (321-6-2) connected to the cooling and straightening chamber (3) via the coupling (321-6-1), wherein the output end of the motor (321-6-2) extends into the interior of the cooling and straightening chamber (3) and is connected to the outer roller cylinder (321-1).

6. The cooling and straightening equipment according to claim 1, characterized in that: The inner wall of the cooling and straightening chamber (3) is provided with an annular sealing outer ring (33), and the inner part of the annular sealing outer ring (33) is rotatably connected to an annular sealing inner ring (34) connected to the outer roller cylinder (321-1). The cooling and straightening chamber (3) is also provided with an air inlet (35) at the end thereof which leads into the cooling and straightening roller assembly (321).

7. A winding high vacuum magnetron sputtering coating production line comprises the cooling and straightening device according to claim 1, characterized in that: The invention also comprises a cleaning and preheating chamber (1), a process chamber (2) and a winding chamber (4); the process chamber (2) is located between the cleaning and preheating chamber (1) and the cooling and straightening chamber (3); a Kaufman ion source (5) is installed on the cleaning and preheating chamber (1); and a vacuum system (6) is installed on both the process chamber (2) and the cooling and straightening chamber (3).

8. The winding high vacuum magnetron sputtering coating production line according to claim 1 is characterized in that: The cleaning and preheating chamber (1) is provided with a lofting system (11) and a first tensioning roller (12), and the cleaning and preheating chamber (1) is also provided with a plurality of first guide rollers (13), and the upper surfaces of the plurality of first guide rollers (13) are all in the same plane.

9. The roll-to-roll high vacuum magnetron sputtering coating production line according to claim 1, characterized in that: The process chamber (2) is provided with a main roller assembly (21), a guide roller system (22) and a tension roller system (23), and the guide roller system (22) and the tension roller system (23) are provided on both sides of the roller assembly (21). The process chamber (2) is provided with a plurality of temperature measuring assemblies (24), and the plurality of temperature measuring assemblies (24) are all adjacent to the outer side of the main roller assembly (21), and a sputtering system (25) is installed on the process chamber (2).

10. The roll-to-roll high vacuum magnetron sputtering coating production line according to claim 1, characterized in that: The winding chamber (4) is respectively provided with a sample collecting roller assembly (41), a third guide roller (42) and a second tensioning roller (43), wherein the second tensioning roller (43) is located between the third guide roller (42) and the sample collecting roller assembly (41).

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