Centering assembly, crystal pulling furnace and centering method

Abstract

The invention provides a centering assembly, a crystal pulling furnace and a centering method, the centering assembly is used for centering a seed crystal rope of the crystal pulling furnace, and the centering assembly comprises a centering cone which can be connected to the lower end of the seed crystal rope with the cone tip downward, and the cone tip has magnetism; the centering disc can be arranged in a main furnace chamber of the crystal pulling furnace and is concentric with the main furnace chamber, and the central position of the centering disc can be magnetically attracted with the conical tip; the plurality of range finder groups are distributed around the seed crystal rope, each range finder group comprises a plurality of range finders, and the connecting line of the plurality of range finders of any range finder group is parallel to the center line of the crystal pulling furnace. When the seed crystal rope is centered, under the action of magnetic force, the cone tip of the centring cone is directly aligned with the center position of the centring disc and is in magnetic attraction connection with the center position of the centring disc, so that the seed crystal rope is positioned, then the positioned seed crystal rope is subjected to accurate distance measurement by a plurality of distance measuring instrument groups, and then the seed crystal rope is centered under the condition that the lower end of the seed crystal rope is positioned and does not shake. The centering of the seed crystal rope can be realized more simply and conveniently according to the offset, time and labor are saved, and the operation difficulty is low.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a centering component, a crystal pulling furnace and a centering method. Background Art

[0002] In the process of using a crystal pulling furnace to produce single crystal silicon by the direct pulling method, seed crystals are needed to guide the growth of single crystal silicon by pulling. The seed crystals are suspended in the crystal pulling furnace by seed crystal ropes. Before starting to produce single crystal silicon, the seed crystal ropes need to be centered to ensure that the seed crystal ropes are located on the center line of the crystal pulling furnace. Otherwise, the single crystal silicon rods formed by the growth of single crystal silicon will deviate from the center line and collide with the thermal field in the furnace and other components of the crystal pulling furnace, causing damage to the thermal field components and possibly causing production accidents in which the single crystal silicon rods fall.

[0003] However, during the centering operation, since the seed crystal rope is in a suspended state, it is easily affected by the surrounding environment and shakes, which makes it impossible for the operator to accurately determine the centering situation. The centering is difficult, time-consuming and labor-intensive. Summary of the invention

[0004] In view of this, the present application provides a centering assembly, which can realize the centering of the seed rope more simply and conveniently, and significantly improves the centering efficiency. In addition, the present application also provides a crystal pulling furnace including the centering assembly, and a centering method applicable to the centering assembly or the crystal pulling furnace.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] A centering assembly for centering a seed rope of a crystal pulling furnace, the centering assembly comprising:

[0007] A centering cone, which can be connected to the lower end of the seed crystal rope with the cone tip downward, and the cone tip is magnetic;

[0008] A centering plate can be arranged in the main furnace chamber of the crystal pulling furnace and kept concentric with the main furnace chamber, and the center position of the centering plate can be magnetically attracted to the cone tip;

[0009] A plurality of distance meter groups are distributed around the seed rope, each of the distance meter groups comprises a plurality of distance meters, and a connecting line of the plurality of distance meters included in any of the distance meter groups is parallel to a center line of the crystal pulling furnace.

[0010] Optionally, in the above-mentioned centering component, a groove allowing the cone tip to enter is provided at the center position of the centering disk, and a magnetic member having a different magnetic pole from that of the cone tip is provided at the bottom of the groove.

[0011] Optionally, in the above-mentioned centering component, among the multiple distance meter groups distributed circumferentially around the seed crystal rope, the central angles corresponding to any two adjacent distance meter groups in the circumferential direction are equal, and the central angle is 60° to 120°.

[0012] Optionally, in the above-mentioned centering component, there are two rangefinder groups, the central angle corresponding to the two rangefinder groups is 90°, and each rangefinder group includes two rangefinders.

[0013] Optionally, in the above-mentioned centering assembly, in the same distance meter group, the spacing between adjacent distance meters distributed along the extension direction of the center line of the crystal pulling furnace is 2500 mm to 2800 mm.

[0014] Optionally, the above-mentioned centering component further includes a display screen electrically connected to the rangefinder, wherein the display screen is used to display all distance parameters measured by the rangefinder;

[0015] Furthermore, in the extension direction of the center line of the crystal pulling furnace, the installation height of the display screen is within the deviation range of the upper end height of the seed crystal rope.

[0016] A crystal pulling furnace comprises a main furnace chamber, an auxiliary furnace chamber and the above-mentioned centering component.

[0017] Optionally, in the above-mentioned crystal pulling furnace, the distance meter is arranged on the outside of the crystal pulling furnace, and the auxiliary furnace chamber is provided with a plurality of distance measuring holes aligned one by one with the distance meter, the distance measuring holes keep the auxiliary furnace chamber sealed and allow the distance meter to measure the distance of the seed crystal rope.

[0018] Optionally, in the above-mentioned crystal pulling furnace, the crystal pulling furnace comprises:

[0019] A pulling head is arranged above the auxiliary furnace chamber, and the upper end of the seed crystal rope is connected to the pulling head;

[0020] A position adjusting member, used for adjusting the position of the pulling head on a plane perpendicular to the center line of the crystal pulling furnace;

[0021] There are multiple position adjustment members arranged in the circumferential direction of the pulling head, the number of the position adjustment members is equal to the number of the distance measuring instrument groups, and in the extension direction of the center line of the crystal pulling furnace, each position adjustment member is aligned with one distance measuring instrument group.

[0022] A centering method is applicable to the centering assembly or the crystal pulling furnace, and the method comprises the following steps:

[0023] Under the action of magnetic force, the tip of the centering cone is magnetically connected to the center position of the centering disk to position the seed crystal rope;

[0024] Each of the distance measuring device groups measures the distance of the seed crystal rope and obtains multiple groups of distance parameters;

[0025] The offset parameters of the seed rope are obtained according to the multiple sets of distance parameters, and the position of the seed rope is adjusted according to the offset parameters until the seed rope coincides with the center line of the crystal pulling furnace.

[0026] The centering assembly provided in the present application makes the tip of the centering cone magnetic, and also enables the center position of the centering disk to be magnetically attracted to the tip of the cone. When centering the seed crystal rope, the centering cone is connected to the lower end of the seed crystal rope and the tip of the cone is kept downward. The centering disk is set in the main furnace chamber of the crystal pulling furnace, and the centering disk is concentric with the main furnace chamber. In the process of the centering cone suspended by the seed crystal rope moving down and approaching the centering disk, under the action of magnetic force, the tip of the centering cone will directly align with the center position of the centering disk and be magnetically connected, thereby realizing the positioning of the seed crystal rope. On this basis, a plurality of distance meter groups distributed around the seed crystal rope are used to accurately measure the distance of the positioned seed crystal rope, so that the actual position of the seed crystal rope can be accurately and efficiently obtained and the offset can be calculated. Then, when the lower end of the seed crystal rope is positioned without shaking, the centering of the seed crystal rope can be realized more simply and conveniently based on the offset, which not only saves time and effort but also has low operating difficulty. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0028] Figure 1 A schematic diagram of the structure in which the centering cone of the centering assembly provided in an embodiment of the present application is connected to the lower end of the seed crystal rope;

[0029] Figure 2 This is the main view of the centering plate;

[0030] Figure 3 It is a top view of the centering plate;

[0031] Figure 4 It is a schematic diagram of the structure of the centering assembly cooperating with the auxiliary furnace chamber, the pulling head and the position adjustment member of the crystal pulling furnace;

[0032] Figure 5 This is a schematic diagram of the structure of the distance meter set outside the auxiliary furnace chamber to measure the distance of the seed crystal rope.

[0033] exist Figure 1-Figure 5 middle:

[0034] 1-seed crystal rope, 2-centering cone, 3-centering plate, 4-distance meter, 5-auxiliary furnace chamber, 6-distance hole, 7-lifting head, 8-position adjustment part;

[0035] 201-cone tip, 301-groove. DETAILED DESCRIPTION

[0036] The following will describe the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0037] like Figure 1-Figure 5 As shown, an embodiment of the present application provides a centering component, which can be installed on a crystal pulling furnace to realize the centering of the seed rope 1. Generally, the main furnace chamber (not shown in the figure) of the crystal pulling furnace, the crucible (not shown in the figure) located in the main furnace chamber, and the auxiliary furnace chamber 5 arranged above the main furnace chamber are all coaxially arranged, and the centering of the seed rope 1 means that the seed rope 1 is also coaxial with the main furnace chamber, the crucible and the auxiliary furnace chamber 5 without shaking, that is, it coincides with the center line of the crystal pulling furnace (this center line can also be called the axis line), so that the seed rope 1 can pull the single crystal silicon rod along the center line of the crystal pulling furnace to achieve single crystal silicon growth. The centering component mainly includes a centering cone 2, a centering disk 3 and a rangefinder 4, wherein the centering cone 2 has at least a conical surface to form a cone tip 201, and its overall structure can be a cone or a pyramid, or it can also be as follows Figure 1The structure of the column plus cone shown in the figure is also made so that at least the cone tip 201 of the centering cone 2 is magnetic, that is, the cone tip 201 of the centering cone 2 is a magnetic cone tip. Of course, more parts of the centering cone 2 can also be made magnetic, for example, the entire centering cone 2 is made of iron or a magnet. When using the centering cone 2, the centering cone 2 is first connected to the lower end of the seed crystal rope 1 to suspend the centering cone 2 through the seed crystal rope 1, and when connected, the cone tip 201 of the centering cone 2 is downward so that it can cooperate with the centering disk 3 during centering. The centering disk 3 is used to be set in the pulling The main furnace chamber of the crystal pulling furnace is located below the centering cone 2. When setting, the centering plate 3 is kept concentric with the main furnace chamber. This concentricity means that the center line of the crystal pulling furnace passes vertically through the center position of the centering plate 3, and the center position of the centering plate 3 can be magnetically attracted to the cone tip 201 of the centering cone 2. At the same time, in order to reduce the impact on the centering, other parts of the centering plate 3 will not be magnetically attracted to the centering cone 2. In this way, the cone tip 201 can be directly aligned with the center position of the centering plate 3 and magnetically attracted under the action of magnetic force during the downward movement of the centering cone 2, so that the lower end of the seed rope 1 Positioning is achieved by magnetic attraction of the centering cone 2 and the centering plate 3; multiple groups of distance meters 4 are arranged on the crystal pulling furnace, that is, multiple distance meter groups are formed, these distance meter groups are distributed around the seed crystal rope 1, and each distance meter group includes multiple distance meters 4, and the connection line formed by multiple distance meters 4 belonging to the same distance meter group is parallel to the center line of the crystal pulling furnace, that is, multiple distance meters 4 of the same distance meter group are distributed along the height direction of the crystal pulling furnace, so that different distance meter groups can measure the distance of the seed crystal rope 1 at multiple different angles in the circumferential direction of the seed crystal rope 1. At the same time, different distance meters 4 belonging to the same group can also be used to measure the distance of different parts of the seed rope 1 in the height direction, so that the actual position of the seed rope 1 can be measured. At this time, if the seed rope 1 is not in the center position, the seed rope 1 will be tilted relative to the center line of the crystal pulling furnace (that is, the seed rope 1 has an angle with the center line and there is an offset), and the difference between the actual position of the seed rope 1 and the center line position is calculated to obtain the offset of the seed rope 1, and then the position of the seed rope 1 can be adjusted accordingly according to the offset until the seed rope 1 coincides with the center line. Specifically, the distance meter 4 can be a laser distance meter, an ultrasonic distance meter, or an infrared distance meter.

[0038] The centering component of the above structure cooperates with the distance meter 4 through magnetic positioning to measure the offset of the seed crystal rope 1, so as to significantly improve the measurement accuracy of the seed crystal rope 1 and quickly realize the centering. Specifically, when the centering cone 2 moves down and approaches the centering disk 3, under the action of the magnetic force, the cone tip 201 will automatically find the center position of the centering disk 3 and connect with the center position by magnetic attraction. Since the centering cone 2 is connected to the lower end of the seed crystal rope 1, the positioning of the lower end of the seed crystal rope 1 can be realized through this magnetic connection. Since the upper end of the seed crystal rope 1 is connected to the pulling head 7 described later, it will not move before the initial distance measurement is completed, so the positioning of the lower end is realized by magnetic attraction at the same time. The overall positioning of the seed crystal rope 1 before ranging is achieved, the seed crystal rope 1 will not shake during the ranging process, the ranging can be completed more accurately and quickly, and in the process of moving the pulling head 7 to center the seed crystal rope 1, it can also be more simple and convenient to judge whether the positioned seed crystal rope 1 is in the centered position (this judgment result can be achieved by human eye observation, or by measurement by the rangefinder 4). In this way, the centering of the seed crystal rope 1 can be achieved more conveniently, which not only saves time and effort, but also has low operating difficulty, thereby significantly improving the centering efficiency, and avoiding errors caused by shaking in the centering judgment, making the centering effect more prominent.

[0039] Further, such as Figure 2 and Figure 3 As shown, a groove 301 for allowing the cone tip 201 to enter is provided at the center of the centering disk 3 , and a magnetic member having a different magnetic pole from that of the cone tip 201 is provided at the bottom of the groove 301 . The groove 301 is arranged at the center position of the centering disk 3, so that the centering cone 2 can be better aligned with the centering disk 3, and the probability of the cone tip 201 accidentally deviating from the center position can be reduced. There are many options for the shape of the groove 301. For example, the opening area of ​​the groove 301 can be made larger than the cross-sectional area of ​​the part where the cone tip 201 enters the groove 301, that is, the opening of the groove 301 can be made larger, and the shape of the longitudinal section of the groove 301 can be made V-shaped or arc-shaped, so that the opening can guide the cone tip 201, so that the cone tip 201 can enter the groove 301 more easily for alignment. Alternatively, the groove 301 can be a conical groove matching the cone tip 201, so that the cone tip 201 can fit tightly with the groove 301 after entering the groove 301, and the probability of the cone tip 201 escaping from the groove 301 is reduced. By providing a magnetic member with a different magnetic pole from the cone tip 201 at the bottom of the groove (for example, the cone tip 201 is an N-pole magnet and the magnetic member is an S-pole magnet), the adsorption force between the cone tip 201 and the center position can be increased, and the probability of the cone tip 201 accidentally deviating from the center position can be reduced, so that the positioning of the lower end of the seed rope 1 is more reliable and the distance measurement is more accurate.

[0040] In addition, the center position of the centering disk 3 can also be the same plane as other positions of the centering disk 3, and when the cone tip 201 is a magnet, the center position of the centering disk 3 can be only iron without different magnetism.

[0041] In an optional embodiment, among the multiple distance meter groups distributed circumferentially around the seed rope 1, the center angles corresponding to any two adjacent distance meter groups in the circumferential direction are equal, and the center angles are 60° to 120°. That is to say, among the distance meters 4 distributed around the seed rope 1, the distance meters 4 are evenly distributed in the circumferential direction of the seed rope 1 in groups, so that the actual position of the seed rope 1 at various angles can be measured more accurately, and the center angle formed by the center line of the circle formed by any two adjacent distance meter groups and the seed rope 1 on the plane perpendicular to the midline is 60° to 120°, specifically 60°, 90° or 120°, when the center angle is 60°, there are six distance meter groups; when the center angle is 90°, there are four distance meter groups; when the center angle is 120°, there are three distance meter groups.

[0042] In an optional embodiment, two rangefinder groups are provided, the central angles of the two rangefinder groups are 90°, and each rangefinder group includes two rangefinders 4. By providing two rangefinder groups with a corresponding central angle of 90°, the centering accuracy and convenience of the seed rope 1 can be improved while simplifying the structure, because the centering adjustment of the seed rope 1 is achieved by adjusting the position of the lifting head 7, and the position adjustment member 8 for adjusting the lifting head 7 is generally provided with four positions around the lifting head 7, and the four position adjustment members 8 are provided at intervals of 90° in the circumferential direction of the lifting head 7, so as to achieve the position adjustment of the lifting head 7 in four directions, and correspondingly, four rangefinder groups can be provided, so that each rangefinder group can be aligned with a position adjustment member 8, so that each rangefinder group can measure the distance of the seed rope 1 in the adjustment direction of the position adjustment member 8 aligned with it, and the adjustment direction is the same as the distance measurement direction, so as to improve the accuracy and convenience of distance measurement. Furthermore, since the four distance meter groups spaced 90° apart will be aligned in pairs when set, and the two aligned distance meter groups actually measure the offset of the seed rope 1 on the same plane, that is, the two aligned distance meter groups play the same role, in order to further simplify the structure, the two aligned distance meter groups can be reduced to one, that is, all the distance meter groups 4 only include two groups, and the interval angle of the two distance meter groups is 90°. In addition, the distance meter groups each include only two distance meters 4 because in the direction of the center line extension (that is, the height direction of the crystal pulling furnace), the two distance meters 4 are already able to measure the position deviation of different parts of the seed rope 1, which meets the measurement requirements. Therefore, in order to simplify the structure and reduce costs, each distance meter group includes only two distance meters 4.

[0043] Optionally, in the same rangefinder group, the spacing between adjacent rangefinders 4 distributed along the centerline extension direction of the crystal pulling furnace is 2500mm to 2800mm. In the centerline extension direction of the crystal pulling furnace, if the spacing between two adjacent rangefinders 4 in a rangefinder group is small, the difference in distance parameters measured by the two rangefinders 4 will be small, which cannot fully reflect the actual position of the seed rope 1, and the small difference is not conducive to centering adjustment. Therefore, in order to more fully reflect the actual position of the seed rope 1 and to improve the convenience of centering adjustment, it is preferred that there is a larger distance between two upper and lower adjacent rangefinders 4 in a rangefinder group, and this distance is preferably 2500mm to 2800mm. In a specific example, such as Figure 5 As shown in FIG. 1 , if the seed rope 1 is not in the center line position, and the distances measured by the upper and lower distance meters 4 in the same distance meter group are L1 and L2 respectively, and L1>L2, then the position adjustment member 8 is required to adjust the pulling head 7 to the center line position. Figure 5 Move to the left side in the middle so that the upper end of the seed crystal rope 1 moves to the left until L1=L2, at which time the seed crystal rope 1 is in the center line position.

[0044] In the prior art, when centering the seed rope 1, two people are required to work together, one of whom observes the centering of the lower end of the seed rope 1, and the other stands at a high place to adjust the position adjustment member 8 located at the top of the crystal pulling furnace according to the observation information reported by the observer to change the position of the seed rope 1, which will take up more human resources, and the effect of the cooperation is not very ideal. In view of this situation, in an optional embodiment of the present application, the centering component also includes a display screen (not shown in the figure) electrically connected to the distance meter 4, and the display screen is used to display all the distance parameters measured by the distance meter 4; and in the extension direction of the center line of the crystal pulling furnace, the installation height of the display screen is within the deviation range of the upper end height of the seed rope 1. In this setting, the installation height of the display screen is within the deviation range of the upper end height of the seed crystal rope 1, which means that the display screen is set on the top of the crystal pulling furnace so that the display screen is close to the position adjustment member 8. The degree of this closeness is characterized by the deviation range, and the deviation range is the height H of the upper end of the seed crystal rope 1 plus or minus a certain height difference h, that is, the value of the deviation range is Hh~H+h, and the value of h is selected based on the standard of easy observation for the adjustment personnel standing at a high place to operate the position adjustment member 8, for example, 0.5m. Since the display screen can display the measurement results of each rangefinder 4, the observer can be replaced by adding a display screen, so that the adjustment personnel standing at a high place can directly view the value displayed on the display screen, and determine the adjustment direction based on the value to directly operate the position adjustment member 8. This not only saves human resources, but also eliminates the need for coordinated operations, so that the entire centering process of the seed crystal rope 1 can be completed more accurately and efficiently.

[0045] In addition, the present application also provides a crystal pulling furnace, comprising a main furnace chamber, an auxiliary furnace chamber 5 and the above-mentioned centering assembly. Before producing single crystal silicon, the crystal pulling furnace first uses the above-mentioned centering assembly to center the seed rope 1, and then removes the centering cone 2 and the centering plate 3 after the centering is completed.

[0046] In an optional embodiment, when the rangefinder 4 is provided on the crystal pulling furnace, the rangefinder 4 is provided on the outside of the crystal pulling furnace, and a plurality of distance measuring holes 6 aligned with the rangefinder 4 are provided on the auxiliary furnace chamber 5, the distance measuring holes 6 keep the auxiliary furnace chamber 5 sealed and allow the rangefinder 4 to measure the distance of the seed rope 1. The rangefinder 4 is provided on the outside of the crystal pulling furnace, which can not only reduce the difficulty and cost of structural modification of the crystal pulling furnace, but also avoid the rangefinder 4 being located in the crystal pulling furnace and being subjected to the high temperature in the single crystal silicon production process, so that the rangefinder 4 has good working performance and a long working life. In order to ensure that the rangefinder 4 located outside the crystal pulling furnace can normally measure the distance of the seed rope 1 inside the crystal pulling furnace, it is necessary to open a through hole (i.e., the distance measuring hole 6) that allows laser, ultrasonic wave or infrared ray to pass through on the auxiliary furnace chamber 5 of the crystal pulling furnace, and in order not to affect the normal operation of the crystal pulling furnace and ensure the high vacuum state of the crystal pulling furnace when producing single crystal silicon, it is also necessary to seal the distance measuring hole 6, for example, to set a transparent sealing plate on the distance measuring hole 6. The number and position of the ranging holes 6 are the same as the number and position of the ranging instruments 4. On the basis of two ranging instruments being arranged in groups, the two ranging instruments being arranged 90° apart and each ranging instrument group including two ranging instruments 4, Figure 4 As shown, there are four distance measuring holes 6, two of which are located on the front of the auxiliary furnace chamber 5, and the line connecting the centers of the two distance measuring holes 6 is parallel to the center line of the crystal pulling furnace, while the other two distance measuring holes 6 are located on the side of the auxiliary furnace chamber 5, and the line connecting the centers of the two distance measuring holes 6 is also parallel to the center line of the crystal pulling furnace. Among them, the four distance measuring instruments 4 will respectively measure the distance between each hole position and the seed rope 1. If the seed rope 1 is at the center line position, the distances measured by the two hole positions on the same side (i.e., the front or side) of the auxiliary furnace chamber 5 should be equal. If they are not equal, it proves that the seed rope 1 is not at the center line position.

[0047] like Figure 4 and Figure 5As shown, the crystal pulling furnace includes: the above-mentioned pulling head 7, which is arranged above the auxiliary furnace chamber 5, and the upper end of the seed crystal rope 1 is connected to the pulling head 7; the above-mentioned position adjusting member 8 is used to adjust the position of the pulling head 7 on a plane perpendicular to the center line of the crystal pulling furnace; wherein, a plurality of position adjusting members 8 are arranged in the circumferential direction of the pulling head 7, the number of the position adjusting members 8 is equal to the number of the rangefinder groups, and, in the extension direction of the centerline of the crystal pulling furnace, each position adjusting member 8 is aligned with a rangefinder group. Specifically, the lifting head 7 is a disk-shaped member horizontally arranged above the auxiliary furnace chamber 5, and the position adjustment member 8 is used to push the lifting head 7 to translate. This position adjustment member 8 is, for example, a top screw. As mentioned above, four position adjustment members 8 can be evenly arranged around the lifting head 7. When the seed crystal rope 1 deviates in a certain direction, it is only necessary to screw the position adjustment member 8 on the opposite side of the direction to push the lifting head 7 and the upper end of the seed crystal rope 1 to move in the direction so that the upper end of the seed crystal rope 1 is aligned with the lower end. When setting the rangefinder 4, each position adjustment member 8 is aligned with a rangefinder group, so that the ranging direction and the adjustment direction can be the same and the ranging accuracy can be further improved.

[0048] In addition, the present application also provides a centering method, which is applicable to the above-mentioned centering component or the above-mentioned crystal pulling furnace, and the method comprises the following steps:

[0049] After the centering cone 2 is connected to the lower end of the seed crystal rope 1 and the centering plate 3 is set in the main furnace chamber, the centering cone 2 is moved downward under the pull of the seed crystal rope 1 to approach the centering plate 3. Under the action of the magnetic force, the cone tip 201 of the falling centering cone 2 will automatically find the center position of the centering plate 3 and be magnetically connected to the center position to realize the positioning of the lower end of the seed crystal rope 1. Since the upper end of the seed crystal rope 1 is connected to the lifting head 7 and the lifting head 7 will not be adjusted before the initial distance measurement is completed, the positioning of the entire seed crystal rope 1 can be realized by positioning the lower end of the seed crystal rope 1.

[0050] Each distance measuring device group measures the distance of the seed crystal rope 1, and obtains multiple groups of distance parameters of different parts of the seed crystal rope 1 measured in different directions, and the distance parameters are the actual position parameters of the seed crystal rope 1;

[0051] The offset parameters of the seed rope 1 are obtained based on multiple sets of distance parameters, that is, the difference between the actual position parameters and the centerline position parameters is calculated, and the position of the upper end of the seed rope 1 is adjusted according to the offset parameters by operating the position adjustment member 8 and causing the position adjustment member 8 to drive the pulling head 7 to translate, until the seed rope 1 coincides with the centerline of the crystal pulling furnace, and the centering operation is completed.

[0052] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0053] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0054] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0055] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0056] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth" and "sixth" used in the description of the embodiments of the present application are only used to more clearly explain the technical solutions and cannot be used to limit the scope of protection of the present application.

[0057] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A centering assembly, characterized in that: A seed rope for centering a crystal pulling furnace, the centering assembly comprising: A centering cone, which can be connected to the lower end of the seed crystal rope with the cone tip downward, and the cone tip is magnetic; A centering plate can be arranged in the main furnace chamber of the crystal pulling furnace and kept concentric with the main furnace chamber, and the center position of the centering plate can be magnetically attracted to the cone tip; A plurality of distance meter groups are distributed around the seed rope, each of the distance meter groups includes a plurality of distance meters, and a connecting line of the plurality of distance meters included in any of the distance meter groups is parallel to a center line of the crystal pulling furnace.

2. The centering assembly according to claim 1, characterized in that: A groove for allowing the cone tip to enter is arranged at the center position of the centering disk, and a magnetic piece having a different magnetic pole from that of the cone tip is arranged at the bottom of the groove.

3. The centering assembly according to claim 1, characterized in that: Among the plurality of distance meter groups distributed circumferentially around the seed crystal rope, the central angles corresponding to any two adjacent distance meter groups in the circumferential direction are equal, and the central angles are between 60° and 120°.

4. The centering assembly according to claim 3, characterized in that: There are two rangefinder groups, the central angle corresponding to the two rangefinder groups is 90°, and each rangefinder group includes two rangefinders.

5. The centering assembly according to claim 1, characterized in that: In the same distance meter group, the spacing between adjacent distance meters distributed along the extension direction of the center line of the crystal pulling furnace is 2500 mm to 2800 mm.

6. The centering assembly according to any one of claims 1 to 5, characterized in that: Also includes a display screen electrically connected to the rangefinder, the display screen is used to display all distance parameters measured by the rangefinder; Furthermore, in the extension direction of the center line of the crystal pulling furnace, the installation height of the display screen is within the deviation range of the upper end height of the seed crystal rope.

7. A crystal pulling furnace, characterized in that: The invention comprises a main furnace chamber, an auxiliary furnace chamber and a centering assembly as claimed in any one of claims 1 to 6.

8. The crystal pulling furnace according to claim 7, characterized in that: The distance meter is arranged outside the crystal pulling furnace, and the auxiliary furnace chamber is provided with a plurality of distance measuring holes aligned with the distance meter one by one, the distance measuring holes keep the auxiliary furnace chamber sealed and allow the distance meter to measure the distance of the seed rope.

9. The crystal pulling furnace according to claim 7, characterized in that: The crystal pulling furnace comprises: A pulling head is arranged above the auxiliary furnace chamber, and the upper end of the seed crystal rope is connected to the pulling head; A position adjusting member, used for adjusting the position of the pulling head on a plane perpendicular to the center line of the crystal pulling furnace; There are multiple position adjustment members arranged in the circumferential direction of the pulling head, the number of the position adjustment members is equal to the number of the distance measuring instrument groups, and in the extension direction of the center line of the crystal pulling furnace, each position adjustment member is aligned with one distance measuring instrument group.

10. A centering method, characterized in that: The method is applicable to the centering assembly according to any one of claims 1 to 6 or to the crystal pulling furnace according to any one of claims 7 to 9, and comprises the following steps: Under the action of magnetic force, the tip of the centering cone is magnetically connected to the center position of the centering disk to position the seed crystal rope; Each of the distance measuring device groups measures the distance of the seed crystal rope and obtains multiple groups of distance parameters; The offset parameters of the seed rope are obtained according to the multiple sets of distance parameters, and the position of the seed rope is adjusted according to the offset parameters until the seed rope coincides with the center line of the crystal pulling furnace.

Images