A collision gas flow rate state control device

Abstract

The application relates to the technical field of gas flow control of ion source equipment, in particular to a collision gas flow state control device which comprises a mounting mechanism, and clamping communication assemblies are fixedly installed at the two ends of the front face of the mounting mechanism. In the application, the sealing gasket ring is located on the inner side of the butt joint socket and the butt joint spigot, and the sealing performance is good after installation. When the collision gas flow flows at high speed in the pipeline of the ion source equipment, the conical wind wheel is pushed, the rotating disc is driven to rotate, the cleaning brush plate on the connecting rod continuously rotates along the inner wall of the filter screen cover and is closely attached to the inner wall, a good cleaning effect is achieved, the filter screen cover is conical, the filtering area is increased, the air flow speed in the pipeline is maintained, the inner conical wall is obliquely arranged, impurities can be guided to flow downward into the impurity storage groove during each cleaning, the filter screen cover has an automatic cleaning function, the influence of impurities on air flow is avoided, and the stability of the overall application of the flow pressure regulating valve is improved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of ion source device gas flow control, in particular to a collision gas flow state control device. BACKGROUND

[0002] Electrospray ion source is an important ionization method in mass spectrometer, which can make small droplets charged by applying high voltage to the tip of a quartz capillary filled with sample solution, and then the droplets "burst" to produce single ions through auxiliary desolvation as the solvent evaporates. The ion source can generate multiple charged ions from large mass organic molecules, expanding the molecular weight range that can be analyzed by mass spectrometry, and is particularly suitable for analyzing strong polar large molecular organic compounds such as drugs, peptides, sugars, proteins and nucleic acids. The ionization process is not prone to produce fragment peaks, which is beneficial to molecular weight confirmation. However, it also has limitations, such as the requirement that the sample can form ions in solution, the influence of buffer salt type and concentration in the mobile phase on sensitivity, and the matrix suppression phenomenon.

[0003] The collision gas flow of the electrospray ion source is a neutral gas flow provided by an external gas source (such as nitrogen, argon, etc.). It is introduced into the collision region of the ion source through a pipeline and valve system. Its functions include: 1) assisting ion desolvation. After the charged droplets are generated by electrospray, the ions collide with the neutral gas molecules in the collision gas flow to accelerate solvent evaporation, improving ionization and transmission efficiency; 2) ion focusing and transmission. The collision changes the ion motion trajectory, and the pressure and flow rate gradient effectively guide the ions to the mass analyzer inlet, reducing ion diffusion and loss; 3) regulating ion energy. Energy exchange occurs when ions collide with gas molecules, and the ion kinetic energy can be adjusted by controlling the gas flow parameters. It also affects the analysis results, improves mass resolution, makes the ions more regular before entering the mass analyzer, reduces ion beam width and energy dispersion, and helps to distinguish ions with different mass-to-charge ratios. At the same time, it also affects the fragmentation pattern. Different gas flow conditions can induce ions to produce different fragment ions, which is important for analyzing compound structure.

[0004] Currently, the collision gas flow state control of the electrospray ion source is usually assisted by a flow pressure regulating valve. According to the relationship between flow and pressure, the pressure difference in the pipeline is adjusted by changing the valve opening to control the collision gas flow. It has the advantages of high precision control, wide adjustment range, and adaptation to multiple gases. However, the use needs to consider the influence of different gas characteristics and the coordination with other equipment, such as gas purity requirements, sensor cooperation and system integration.

[0005] The existing pressure regulating valve is usually installed and fixed by combining multiple bolts with a flange plate during application. It is not easy to disassemble when maintenance is needed, and it is also troublesome to install.

[0006] The utility model discloses a novel self -force pressure regulating valve discloses a novel self -force pressure regulating valve, including diaphragm box and link disc, diaphragm box installs on the upper end outer wall of link disc, link disc is provided with two together, a novel self -force pressure regulating valve on the basis of the existing self -force pressure regulating valve improves innovation, makes the practical performance of self -force pressure regulating valve greatly increases in actual work, guarantees the neat inside of regulating valve, ensures the smooth progress of the adjustment work, a novel self -force pressure regulating valve on the existing self -force pressure regulating valve adds flow -through pipe, one -way cover, first flow -through hole, second flow -through hole, one -way piece, threaded rod and filter screen etc.

[0007] The above-mentioned pressure regulating valve is obviously connected by flange during actual application, and filter screen is arranged in the interior during specific application process to play an auxiliary filtering role. However, during use, impurities filtered by the filter screen will inevitably adhere to the surface of the filter screen. With continuous use of the pressure regulating valve, the filter screen will be gradually blocked. Once the filter screen is blocked, the gas flow rate in the pressure regulating valve will be affected during use, which will directly affect the normal use and operation of the electrospray ion source equipment. If the filter screen needs to be cleaned, the operation is extremely cumbersome and inconvenient. Overall, cleaning and maintenance during subsequent use consumes a lot of time. Obviously, the pressure regulating valve has many inconvenient places during use. Therefore, in order to improve the use efficiency and convenience and meet the stable operation requirements of the electrospray ion source equipment, it is urgent to improve the pressure regulating valve. SUMMARY

[0008] In order to improve the maintenance convenience and improve the running stability of the device, the application provides a collision gas flow state control device.

[0009] The collision gas flow state control device provided by the application adopts the following technical scheme: a mounting mechanism is provided, clamping communication assemblies are fixedly installed at the two ends of the front surface of the mounting mechanism, a flow pressure regulating valve is installed on the front surface of the mounting mechanism through the clamping communication assemblies, filter mechanisms are movably installed at the two ends of the flow pressure regulating valve, and the filter mechanisms are arranged between the inner sides of the clamping communication assemblies at the two ends of the flow pressure regulating valve.

[0010] The installation mechanism includes an installation plate, a fixed track is fixedly installed on the front of the installation plate, an adjustment component is movably installed inside the fixed track, a limit component is fixedly connected to one end of the front of the installation plate, the limit component and the adjustment component are interlocked, and the clamping and connecting component is fixedly installed on both ends of the front of the adjustment component.

[0011] Optionally, side mounting plates are fixedly installed at both ends of the mounting plate, and fixing holes are provided at both ends of the side mounting plates, which are countersunk holes.

[0012] Optionally, the adjusting component includes a lead screw, which is rotatably connected to the inside of a fixed track. The two ends of the lead screw have opposite threads, and both ends of the lead screw are threadedly connected to sliding blocks. The front of the sliding blocks is fixedly connected to a clamping and communicating component. One end of the lead screw passes through the fixed track, and an adjusting disc is fixedly installed on the other end of the lead screw through the fixed track. Anti-slip protrusions are fixedly connected at equal intervals on the outer side of the adjusting disc.

[0013] Optionally, the limiting component includes a side frame and limiting holes. The side frame is fixedly installed on one end of the front of the mounting plate. A limiting spring is fixedly installed inside the side frame. A slider is fixedly connected to the outer end of the limiting spring. A limiting rod is fixedly connected to the front side of the slider. The limiting holes are arranged in a ring at equal intervals on the outer side of the adjusting plate. The end of the limiting rod is inserted into the inner side of the limiting hole.

[0014] Optionally, the limiting rod has an overall L-shaped top view, and a pull ring is fixedly connected to the outer end of the limiting rod.

[0015] Optionally, the clamping and connecting assembly includes a side connecting rod and a docking tube. The docking tube is fixedly installed at both ends of the flow and pressure regulating valve. The side connecting rod is fixedly installed on the front of the slider. A docking sleeve is fixedly connected to the lower outer end of the side connecting rod. The docking tube is inserted into the inside of the docking sleeve. The filtering mechanism is located between the inner sides of the docking tube and the docking sleeve. A delivery hose is fixedly connected to the outer end of the docking sleeve.

[0016] Optionally, a connecting pipe is fixedly connected to the outer end of the delivery hose, and a connecting flange is fixedly installed at the outer end of the connecting pipe. The outer side of the connecting flange is provided with mounting holes arranged in a ring at equal intervals.

[0017] Optionally, the filtration mechanism includes a sealing gasket ring disposed between the inner sides of the docking tube and the docking sleeve. A filter screen is fixedly connected to the side of the sealing gasket ring near the docking tube, and a cleaning component is movably installed on the inner side of the filter screen.

[0018] Optionally, the overall side surface of the filter screen is conical, and the inner side of the sealing gasket ring is provided with an impurity collection groove.

[0019] Optionally, a turntable is rotatably connected to the inside of the filter screen near the docking tube. A connecting rod is fixedly connected to the outside of the turntable. Cleaning brush plates are fixedly installed on the outer surface of the connecting rod in a ring at equal intervals. The cleaning brush plates are inclinedly arranged inside the filter screen. The outer side of the cleaning brush plates is in close contact with the inner wall of the filter screen. The cleaning brush plates and the inner wall of the filter screen are inclined. A conical impeller is fixedly connected to the outer surface of the connecting rod inside the cleaning brush plates. A spiral extending impeller is fixedly connected to the outer side of the conical impeller.

[0020] In summary, this application includes the following beneficial technical effects:

[0021] 1. The installation mechanism makes this device more convenient to use in practice. The mounting plate can be fixed in a suitable position with bolts. After the mounting plate is fixed, the flow and pressure regulating valve is placed between the two clamping and connecting mechanisms. At this time, the docking tube is located inside the docking sleeve. Pulling the pull ring can make the limit rod disengage from the limit hole, the limit spring is stretched, the adjusting plate is twisted to drive the screw to rotate, and then drive the sliding block to slide, so that the clamping and connecting components are displaced. The side connecting rod drives the docking sleeve to be sleeved on the outside of the docking tube. The inner sealing gasket ring improves the sealing performance and assists in the installation of the flow and pressure regulating valve. After the operation is completed, the pull ring is released, the limit spring is reset to make the limit rod insert back into the limit hole, and the adjusting plate is fixed. After the installation is completed, the ion source equipment pipeline is connected through the connecting flange to complete the connection installation. During use, the flow rate of the collision gas of the ion source equipment can be adjusted through the flow regulating valve. The same operation can be used for quick disassembly and assembly, which improves the convenience of use.

[0022] 2. The filtration mechanism enhances the stability of this device. During use, the sealing gasket is located inside the docking tube and the docking sleeve, providing strong sealing performance after installation. When the colliding airflow flows at high speed in the ion source equipment pipeline, it pushes the conical impeller, which in turn drives the turntable to rotate. This causes the cleaning brush on the connecting rod to rotate continuously along the inside of the filter screen and fit tightly against the inner wall, achieving a good cleaning effect. The filter screen is conical, increasing the filtration area and maintaining the airflow speed in the pipeline. The inner wall of the cone is inclined, guiding impurities downward into the impurity collection tank with each cleaning. The filter screen has an automatic cleaning function, preventing impurities from affecting airflow and improving the overall stability of the flow and pressure regulating valve application.

[0023] 3. The installation mechanism and the filtration mechanism work together to bring many advantages to the device. The installation mechanism enables quick disassembly and maintenance of the flow and pressure regulating valve, greatly improving ease of use. The automatic cleaning function of the filter screen of the filtration mechanism effectively prevents impurities from affecting airflow and ensures the stability of the device. At the same time, the installation mechanism allows for quick disassembly and assembly of the filter, facilitating thorough cleaning of the filter screen and impurity collection tank. This allows the device to flexibly adjust the collision gas flow state while maintaining good sealing performance and stable operation in the use of ion source equipment, bringing great convenience to users and improving the overall practicality and reliability of the device. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure in an embodiment of this application;

[0025] Figure 2 This is a bottom-view structural diagram of an embodiment of this application;

[0026] Figure 3 This is a schematic diagram of the rear view structure in an embodiment of this application;

[0027] Figure 4 This is a top view of the structure in an embodiment of this application;

[0028] Figure 5 This is a schematic diagram of the gas pressure regulating valve in a split state in an embodiment of this application;

[0029] Figure 6 This is a schematic diagram of the gas pressure regulating valve and clamping communication assembly in an embodiment of this application;

[0030] Figure 7 This is a schematic diagram of the limiting component structure in an embodiment of this application;

[0031] Figure 8 This is a schematic diagram of the overall structure of the filtering mechanism in the embodiments of this application;

[0032] Figure 9 This is a schematic diagram of the separation state structure of the filter mechanism in the embodiments of this application.

[0033] Reference numerals: 1. Mounting mechanism; 11. Mounting plate; 12. Fixed track; 13. Adjusting component; 131. Lead screw; 132. Sliding block; 133. Adjusting disc; 14. Side mounting plate; 15. Fixing hole; 16. Limiting component; 161. Side frame; 162. Limiting hole; 163. Limiting spring; 164. Slider; 165. Limiting rod; 166. Pull ring; 2. Clamping and connecting component; 21. Side connecting rod; 22. Connecting tube; 23. Connecting sleeve; 24. Conveying hose; 25. Connecting pipe; 26. Connecting flange; 3. Filtering mechanism; 31. Sealing gasket; 32. Filter screen; 33. Cleaning component; 331. Turntable; 332. Connecting rod; 333. Cleaning brush; 334. Conical impeller; 335. Spiral extending impeller; 34. Impurity collection trough; 4. Flow and pressure regulating valve. Detailed Implementation

[0034] The following is in conjunction with the appendix Figures 1-9 This application will be described in further detail.

[0035] This application discloses a collision airflow state control device. For example... Figures 1-8 As shown, it includes an installation mechanism 1. Clamping and connecting components 2 are fixedly installed at both ends of the front of the installation mechanism 1. A flow and pressure regulating valve 4 is installed on the front of the installation mechanism 1 through the clamping and connecting components 2. A filter mechanism 3 is movably installed at both ends of the flow and pressure regulating valve 4. The filter mechanism 3 is located between the inner sides of the clamping and connecting components 2 at both ends of the flow and pressure regulating valve 4.

[0036] The mounting mechanism 1 includes a mounting plate 11. A fixed rail 12 is fixedly mounted on the front of the mounting plate 11. An adjusting component 13 is movably mounted inside the fixed rail 12. A limiting component 16 is fixedly connected to one end of the front of the mounting plate 11. The limiting component 16 and the adjusting component 13 are interlocked. A clamping and connecting component 2 is fixedly mounted on both ends of the front of the adjusting component 13. The mounting plate 11 provides a stable mounting foundation for the entire device and can be firmly fixed with bolts to ensure that the device will not easily shake during use. The fixed rail 12 provides a stable operating environment for the adjusting component 13, making the adjustment process more precise and reliable. The adjusting component 13 can be flexibly adjusted. The position of the clamping and connecting component 2 facilitates the installation and removal of the flow and pressure regulating valve 4, improving operational convenience. The limiting component 16 and the regulating component 13 are interlocked to ensure that the regulating component 13 will not move accidentally after installation, thus ensuring the stability of the device. The clamping and connecting component 2 is fixedly installed on both ends of the front of the regulating component 13, which can tightly clamp the flow and pressure regulating valve 4. At the same time, it cooperates with the filter mechanism 3 to ensure the normal flow and filtration of gas, improving the overall performance and reliability of the device. In addition, the overall design of the installation mechanism 1 is simple and efficient, and the components work together to provide a reliable solution for the installation and use of the flow and pressure regulating valve 4.

[0037] Please refer to Figures 1-5 Side mounting plates 14 are fixedly installed at both ends of the mounting plate 11. Fixing holes 15 are provided at both ends of the side mounting plates 14. The fixing holes 15 are countersunk holes. The side mounting plates 14 provide additional mounting support points for the mounting plate 11, increasing the stability of the installation. Secondly, the fixing holes 15 are used to install and fix the mounting plate 11 with bolts, ensuring that the mounting plate 11 can be firmly installed in the required position. The countersunk holes allow the bolt heads to be recessed into the holes, avoiding the bolt heads from protruding and affecting the installation of other components or causing safety hazards. At the same time, the countersunk hole design makes the mounting surface flatter, reducing the possible scratches or collisions caused by bolt protrusion. During the installation process, the countersunk holes also help to improve the accuracy and consistency of the installation, making the installation more convenient and faster.

[0038] Please refer to Figures 1-5 The adjusting assembly 13 includes a lead screw 131, which is rotatably connected to the inside of the fixed track 12. The two ends of the lead screw 131 have opposite threads, and both ends of the lead screw 131 are threadedly connected to sliding blocks 132. The front of the sliding blocks 132 is fixedly connected to the clamping and communicating assembly 2. One end of the lead screw 131 passes through the fixed track 12, and an adjusting disc 133 is fixedly installed on the other end of the lead screw 131 through the fixed track 12. Anti-slip protrusions are fixedly connected at equal intervals on the outer side of the adjusting disc 133. The lead screw 131 in the adjusting assembly 13 is rotatably connected to the inside of the fixed track 12, and the two ends have opposite threads. This design allows the sliding blocks 132 at both ends to move in the same direction when the lead screw 131 rotates. The components move in opposite directions, causing the clamping and connecting components 2 to shift relative to each other. The threaded connection between the lead screw 131 and the sliding block 132 ensures the accuracy and stability of the movement, making the adjustment process more reliable. One end of the lead screw 131 passes through the fixed track 12 and is fixedly installed on the adjusting plate 133, which facilitates the operator's adjustment operation. Anti-slip protrusions are fixedly connected at equal intervals on the outer side of the adjusting plate 133, increasing the friction and making it easier for the operator to apply force when rotating the adjusting plate 133, preventing hand slippage and improving the convenience and safety of operation. The entire adjusting component 13 is designed to be simple and efficient, with each component cooperating with each other, providing an effective means of adjustment for the installation and disassembly of the flow and pressure regulating valve 4.

[0039] Please refer to Figures 1-7The limiting component 16 includes a side frame 161 and limiting holes 162. The side frame 161 is fixedly installed on one end of the front of the mounting plate 11. A limiting spring 163 is fixedly installed inside the side frame 161. A slider 164 is fixedly connected to the outer end of the limiting spring 163. A limiting rod 165 is fixedly connected to the front side of the slider 164. The limiting holes 162 are arranged in a ring at equal intervals on the outer side of the adjusting plate 133. The end of the limiting rod 165 is inserted into the inner side of the limiting hole 162. The overall top view of the limiting rod 165 is L-shaped. A pull ring 166 is fixedly connected to the outer end of the limiting rod 165. The side frame 161 is fixed to one end of the front of the mounting plate 11 and has the limiting spring 163 and slider 164 installed inside. The limiting spring 163 is connected to the slider 164. A limiting rod 165 is fixed to the front of the slider 164. Limiting holes 162 are arranged in a ring at equal intervals on the outer side of the adjusting disc 133. The end of the limiting rod 165 can be inserted into the inner side of the limiting hole 162. The limiting rod 165 is L-shaped when viewed from above, and a pull ring 166 is fixed to the outer end. When it is necessary to fix the adjusting disc 133, the limiting rod 165 is inserted into the limiting hole 162 to prevent the lead screw 131 from rotating accidentally and to ensure the stability of the adjusted position. When adjustment is needed, the limiting rod 165 is pulled by the pull ring 166 to disengage the end from the limiting hole 162. The operation is convenient and quick. This design allows the adjusting disc 133 to be reliably fixed after adjustment, ensuring the stability of the device. At the same time, the fixed state can be quickly released when adjustment is needed, improving the flexibility and convenience of operation.

[0040] Please refer to Figures 1-6The clamping and connecting assembly 2 includes a side connecting rod 21 and a docking tube 22. The docking tube 22 is fixedly installed at both ends of the flow and pressure regulating valve 4. The side connecting rod 21 is fixedly installed on the front of the slider 164. A docking sleeve 23 is fixedly connected to the lower outer end of the side connecting rod 21. The docking tube 22 is inserted into the inside of the docking sleeve 23. The filter mechanism 3 is located between the inner sides of the docking tube 22 and the docking sleeve 23. A delivery hose 24 is fixedly connected to the outer end of the docking sleeve 23. A connecting pipe 25 is fixedly connected to the outer end of the delivery hose 24. A connecting flange 26 is fixedly installed on the outer end of the connecting pipe 25. Mounting holes are arranged in a ring at equal intervals on the outer side of the connecting flange 26. The docking tube 22 is fixed at both ends of the flow and pressure regulating valve 4. The side connecting rod 21 is fixed to the front of the slider 164. The lower outer end of the side connecting rod 21 is connected to the docking sleeve 23. The tube 22 can be inserted into the docking sleeve 23. The filter mechanism 3 is located between the inner sides of the docking tube 22 and the docking sleeve 23. The outer end of the docking sleeve 23 is connected to the delivery hose 24, and the outer end of the delivery hose 24 is connected to the connecting pipe 25. The outer end of the connecting pipe 25 is equipped with a connecting flange 26. The outer side of the connecting flange 26 has mounting holes arranged in a ring at equal intervals. This design makes the installation and connection of the flow and pressure regulating valve 4 more convenient and quick. The cooperation between the docking tube 22 and the docking sleeve 23 can ensure the tightness of the connection and prevent gas leakage. The delivery hose 24 can be flexibly adjusted to adapt to different installation requirements. The connecting flange 26 and the mounting holes facilitate connection with other equipment, improving the versatility and compatibility of the device. The design of the entire clamping and connecting assembly 2 is simple and practical. The components cooperate with each other to provide a reliable connection method for gas delivery and control.

[0041] Please refer to Figure 6 , Figures 7-8 The filter mechanism 3 includes a sealing gasket 31, which is disposed between the inner sides of the docking tube 22 and the docking sleeve 23. A filter screen 32 is fixedly connected to the side of the sealing gasket 31 closest to the docking tube 22. A cleaning component 33 is movably installed on the inner side of the filter screen 32. The overall side shape of the filter screen 32 is conical. An impurity collection groove is formed on the inner side of the sealing gasket 31. In the filter mechanism 3, the sealing gasket 31 is located between the inner sides of the docking tube 22 and the docking sleeve 23, which plays a sealing role and prevents gas leakage. The sealing gasket 31 is connected to the filter screen 32 on one side. The filter screen 32 has a conical shape on the side, which increases the filtration area and improves the filtration efficiency. There is a cleaning component 33 on the inside of the filter screen 32, which can clean the filter screen 32 and prevent impurities from clogging it. An impurity collection groove is opened on the inside of the sealing gasket 31 to collect the filtered impurities for easy subsequent cleaning. The entire filtration mechanism 3 is reasonably designed, and the components cooperate with each other to effectively filter the gas and collect and process impurities, ensuring the purity of the gas and the normal operation of the device.

[0042] Please refer toFigures 7-8 Inside the filter screen 32, near the docking tube 22, a turntable 331 is rotatably connected. A connecting rod 332 is fixedly connected to the outside of the turntable 331. Cleaning brush plates 333 are fixedly installed on the outer surface of the connecting rod 332 in a ring-shaped arrangement at equal intervals. The cleaning brush plates 333 are inclined and positioned inside the filter screen 32. The outer surface of the cleaning brush plates 333 is in close contact with the inner wall of the filter screen 32. The cleaning brush plates 333 and the inner wall of the filter screen 32 are inclined. A conical impeller 334 is fixedly connected to the outer surface of the connecting rod 332, located inside the cleaning brush plates 333. A spiral extending impeller 335 is fixedly connected to the outer surface of the conical impeller 334. Cleaning brushes 333 are installed in a ring at equal intervals on the outer surface of the filter screen 32. The cleaning brushes 333 are inclined and attached to the inner wall of the filter screen 32. The outer side of the connecting rod 332 is fixedly connected to the conical impeller 334 and the spiral extension impeller 335 on the inner side of the cleaning brushes 333. When gas passes through, the airflow pushes the conical impeller 334 and the spiral extension impeller 335 to rotate, which in turn drives the turntable 331 and the connecting rod 332 to rotate, so that the cleaning brushes 333 clean the inner wall of the filter screen 32 and prevent impurities from clogging it. This design can realize automatic cleaning of the filter screen 32, improve filtration efficiency, and ensure the purity of the gas and the normal operation of the device.

[0043] The implementation principle of the collision airflow state control device in this application embodiment is as follows: By setting the installation mechanism 1, the device can be firmly fixed in a suitable position by bolts during actual use. After the installation plate 11 is installed, the flow pressure regulating valve 4 can be placed between the inner sides of the two clamping and connecting mechanisms. At this time, the docking tube 22 is precisely located inside the docking sleeve 23. By gently pulling the pull ring 166, the limiting rod 165 can be driven to disengage from the limiting hole 162. During this process, the limiting spring 163... In the stretched state, the adjusting disc 133 can then be rotated. The rotation of the adjusting disc 133 will in turn drive the lead screw 131 inside the fixed track 12 to rotate. The rotation of the lead screw 131 can drive the sliding block 132 to slide smoothly inside the fixed track 12. By adjusting the sliding position of the sliding block 132, the clamping and connecting components 2 can be displaced relative to each other. At this time, the side connecting rod 21 will drive the docking sleeve 23 to accurately fit onto the outside of the docking insertion tube 22. Because the docking sleeve 23 and the docking insertion tube 22 are interlocked, and their inner sides... A sealing gasket 31 is provided, which greatly improves the sealing performance of the mating sleeve 23 and the mating insertion tube 22. This facilitates the installation of the flow and pressure regulating valve 4. After the operation is completed, releasing the pull ring 166 causes the limit spring 163 to quickly return to its original position, causing the end of the limit rod 165 to be inserted back into the limit hole 162. Through the mutual limiting action of the limit rod 165 and the limit hole 162, the adjusting disc 133 at the end of the fixing screw 131 can be engaged and secured. Once the flow and pressure regulating valve 4 is installed, it can then be used... The connecting flange 26 is connected to the pipeline of the ion source equipment to complete the connection installation. During use, the flow rate of the collision gas in the ion source equipment can be adaptively adjusted and controlled according to actual needs via the flow regulating valve. When disassembly is required, simply pull the pull ring 166 again to move the limit rod 165 out of the limit hole 162, and then adjust the adjustment disc 133 to rotate, allowing for quick disassembly and assembly of the flow and pressure regulating valve 4. Therefore, this device is easy to disassemble and maintain quickly, greatly improving its overall ease of use.

[0044] By setting up the filter mechanism 3, the sealing gasket 31 is located between the inner sides of the docking tube 22 and the docking sleeve 23 during use. After the flow and pressure regulating valve 4 is installed, it can give it extremely strong sealing performance. During use, when the collision airflow flows at high speed inside the ion source equipment pipeline, this high-speed airflow can powerfully push the conical impeller 334. The outer end of the conical impeller 334 is provided with a spiral extension impeller 335, which can increase the contact area between the conical impeller 334 and the high-speed collision airflow, thereby causing the conical impeller 334 to be pushed, which in turn drives the turntable 331 to rotate. The rotation of the turntable 331 will drive the cleaning brush plate 333 on the connecting rod 332 to rotate. The cleaning brush plate 333 rotates continuously along the inside of the filter screen 32 and is always in close contact with the inner wall of the filter screen 32. In this way, This design effectively cleans the inside of the filter screen 32. Because the filter screen 32 is conical, this shape further increases the filtration area, maintaining the airflow speed within the pipe. Furthermore, the inclined inner wall of the cone ensures that each brushing action guides the filtered impurities downwards into the impurity collection tank 34. Thus, the filter screen 32 of this device has an automatic cleaning function, effectively preventing impurities from adhering to the filter and affecting airflow. This significantly improves the overall stability of the flow and pressure regulating valve 4 during operation. Moreover, the installation mechanism 1 allows for quick disassembly and assembly of the filter mechanism 3, facilitating the removal and cleaning of the filter screen 32 and enabling thorough cleaning of the filter and the inside of the impurity collection tank 34, greatly enhancing the convenience of using this device.

[0045] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A collision gas flow rate state control device comprising a mounting mechanism (1), characterized by: The mounting mechanism (1) has clamping and connecting components (2) fixedly installed at both ends of its front side. The mounting mechanism (1) has a flow pressure regulating valve (4) installed on its front side through the clamping and connecting components (2). The flow pressure regulating valve (4) has a filter mechanism (3) movably installed at both ends of its front side. The filter mechanism (3) is located between the inner sides of the clamping and connecting components (2) at both ends of the flow pressure regulating valve (4). The installation mechanism (1) includes an installation plate (11), a fixed track (12) is fixedly installed on the front of the installation plate (11), an adjustment component (13) is movably installed inside the fixed track (12), a limit component (16) is fixedly connected to one end of the front of the installation plate (11), the limit component (16) and the adjustment component (13) are interlocked, and the clamping and connecting component (2) is fixedly installed on both ends of the front of the adjustment component (13). Both ends of the mounting plate (11) are fixedly mounted with side mounting plates (14), and both ends of the side mounting plates (14) are provided with fixing holes (15), which are countersunk holes. The adjusting component (13) includes a lead screw (131), which is rotatably connected to the inside of the fixed track (12). The two ends of the lead screw (131) have opposite threads. Both ends of the lead screw (131) are threaded with sliding blocks (132). The front of the sliding block (132) is fixedly connected to the clamping and connecting component (2). One end of the lead screw (131) passes through the fixed track (12). An adjusting plate (133) is fixedly installed on one end of the lead screw (131) through the fixed track (12). Anti-slip protrusions are fixedly connected at equal intervals on the outer side of the adjusting plate (133). The limiting component (16) includes a side frame (161) and limiting holes (162). The side frame (161) is fixedly installed on one end of the front of the mounting plate (11). A limiting spring (163) is fixedly installed inside the side frame (161). A slider (164) is fixedly connected to the outer end of the limiting spring (163). A limiting rod (165) is fixedly connected to the front side of the slider (164). The limiting holes (162) are arranged in a ring at equal intervals on the outer side of the adjusting plate (133). The end of the limiting rod (165) is inserted into the inner side of the limiting holes (162). The limiting rod (165) has an overall L-shaped top view, and a pull ring (166) is fixedly connected to the outer end of the limiting rod (165).

2. A collision gas flow rate state control device according to claim 1, characterized by: The clamping communication assembly (2) comprises a side connecting rod (21) and a butt joint pipe (22), the butt joint pipe (22) is fixedly installed at both ends of the flow pressure regulating valve (4), the side connecting rod (21) is fixedly installed on the front face of the sliding block (164), the outer side lower end of the side connecting rod (21) is fixedly connected with a butt joint sleeve (23), the butt joint pipe (22) is inserted into the inside of the butt joint sleeve (23), the filter mechanism (3) is arranged between the inside of the butt joint pipe (22) and the butt joint sleeve (23), and the outer end of the butt joint sleeve (23) is fixedly connected with a conveying hose (24).

3. A collision gas flow rate state control device according to claim 2, characterized by: The outer end of the conveying hose (24) is fixedly connected with a communication pipe (25), the outer end of the communication pipe (25) is fixedly installed with a connecting flange (26), and the outer side of the connecting flange (26) is arranged with mounting holes in a ring shape at equal intervals.

4. A collision gas flow rate state control device according to claim 3, characterized by: The filter mechanism (3) comprises a sealing gasket ring (31), the sealing gasket ring (31) is arranged between the inside of the butt joint pipe (22) and the butt joint sleeve (23), the side, close to the butt joint pipe (22), of the sealing gasket ring (31) is fixedly connected with a filter cover (32), and the inside of the filter cover (32) is movably installed with a cleaning assembly (33).

5. A collision gas flow rate state control device according to claim 4, characterized by: The overall side face shape of the filter cover (32) is arranged in a conical shape, and the inside of the sealing gasket ring (31) is arranged with a dirt storage ring groove.

6. A collision gas flow rate state control device according to claim 5, characterized by: The inside of the filter cover (32), close to one end of the butt joint pipe (22), is rotatably connected with a rotating disc (331), the outer side of the rotating disc (331) is fixedly connected with a connecting rod (332), the outer surface of the connecting rod (332) is fixedly installed with cleaning brush plates (333) in a ring shape at equal intervals, the cleaning brush plates (333) are arranged in an inclined manner on the inside of the filter cover (32), the outer side of the cleaning brush plates (333) is connected with the inner wall of the filter cover (32) in a fit manner, the cleaning brush plates (333) and the inner wall of the filter cover (32) are arranged in an inclined manner, the outer side of the connecting rod (332), located on the inside of the cleaning brush plates (333), is fixedly connected with a conical wind wheel (334), and the outer side of the conical wind wheel (334) is fixedly connected with a spiral extension wind wheel (335).

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