Radio frequency heating rod and semiconductor production equipment

Abstract

The present invention provides a radio frequency heating rod and semiconductor production equipment. The radio frequency heating rod includes a main body, and the main body includes a heating part and a cooling part. The two ends of the heating part are respectively connected to the heating plate and the cooling part. The interior of the cooling part is provided with a cold water channel and a water inlet and a water outlet that penetrate from the outer surface of the cooling part to the cold water channel. The cold water channel is extended along the height direction of the cooling part; wherein, cold water enters the cold water channel from the water inlet and flows along the extension direction of the cold water channel to be discharged from the water outlet. The radio frequency heating rod of the present application includes a heating part and a cooling part. The heating part is connected to the heating plate and the cooling part. Cold water is introduced into the cold water channel through the water inlet and the cold water is made to flow in the cooling channel until it is discharged from the water outlet, so that the cold water absorbs heat and cools the cooling part along the cold water channel, so as to avoid the radio frequency heating rod from being too high in temperature, causing the radio frequency heating rod to be ablated, and affecting the operation of the equipment; at the same time, the cooling part and the heating plate are spaced apart to avoid affecting the heating effect of the heating plate.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor production, and in particular to a radio frequency heating rod and semiconductor production equipment. Background Art

[0002] As a key material in the field of intelligent technology, semiconductors have increasingly higher production technology requirements. In the prior art, the CCP (Capacitance Couple Plasma) discharge of semiconductor process equipment requires upper and lower electrodes for discharge, and the lower electrode uses a heating plate, which is designed to heat the wafer with the internal heating wire while introducing the RF current into the ground; the RF heating rod is an efficient heating method, which uses the heat generated by the RF current in the conductor to heat the object; in CCP discharge, the RF heating rod is connected to the heating plate, and the RF heating rod is mainly used for auxiliary heating and precise temperature control. Unlike the heating plate, the RF heating rod can respond to temperature control requirements more quickly and accurately, and the heat it generates can be transferred to the silicon wafer or process material by direct contact or indirect radiation, thereby achieving more precise temperature control; in addition, the RF heating rod is also energy-efficient, which can reduce energy waste and improve process efficiency.

[0003] However, when the process temperature is too high, for example, above 500°, and a relatively large RF power is used, the impedance between the RF heating rod at the bottom of the heating plate and the next-level connecting structure is discontinuous. At the same time, due to the influence of heat conduction and RF current heating, the bottom of the RF heating rod will have ablation problems, which will affect the stability of the equipment and even the production process. Summary of the invention

[0004] The embodiments of the present invention provide a radio frequency heating rod and a semiconductor production device to achieve cooling of the radio frequency heating rod and prevent ablation of the bottom of the radio frequency heating rod without affecting the heating effect of the heating plate.

[0005] The present invention provides a radio frequency heating rod, which comprises:

[0006] The main body includes a heating part and a cooling part, wherein the two ends of the heating part are connected to the heating plate and the cooling part respectively, and the cooling part is provided with a cold water channel and a water inlet and a water outlet extending from the cooling part to the cold water channel, and the cold water channel is extended along the height direction of the cooling part;

[0007] Wherein, cold water enters the cold water channel from the water inlet and flows along the extension direction of the cold water channel to be discharged from the water outlet.

[0008] In the radio frequency heating rod provided by the present invention, the cold water channel includes a cooling channel and a reflux channel, the reflux channel is arranged in the middle of the cooling part, and one end of the reflux channel is connected to the water outlet, the cooling channel is arranged around the outside of the reflux channel, one end of the cooling channel is connected to the water inlet, and the other end is communicated with the reflux channel;

[0009] Wherein, cold water enters the cooling channel through the water inlet, and then flows to the reflux channel until it flows out through the water outlet.

[0010] In the RF heating rod provided by the present invention, the cooling channel is extended along the circumference of the cooling part, the bottom end of the cooling channel is connected to the water inlet, the top end of the cooling channel is communicated with the top end of the reflux channel, and the bottom end of the reflux channel is connected to the water outlet.

[0011] In the radio frequency heating rod provided by the present invention, the cold water channel further comprises a connecting port, and the connecting port is arranged between the reflux channel and the cooling channel along the circumference of the cooling portion, and is used to connect the cooling channel and the reflux channel.

[0012] In the radio frequency heating rod provided by the present invention, two water inlets are provided, and the two water inlets are arranged on two sides of the cooling portion opposite to each other and are respectively communicated with two sides of the cooling channel.

[0013] In the radio frequency heating rod provided by the present invention, the cooling channel is a spiral structure or a linear structure.

[0014] In the radio frequency heating rod provided by the present invention, a layer of low dielectric constant metal compound is plated on the surface of the cold water channel.

[0015] In the radio frequency heating rod provided by the present invention, the water inlet and the water outlet are both provided with sealing members to prevent cold water leakage.

[0016] In the radio frequency heating rod provided by the present invention, the main body further comprises a connecting portion, one end of which is connected to the bottom end of the cooling portion, and the other end of which is connected to other structural members.

[0017] The present invention also provides a semiconductor production equipment, comprising:

[0018] Heating plate;

[0019] A radio frequency heating rod, wherein the radio frequency heating rod is any of the radio frequency heating rods described above, and one end of the heating portion is fixedly connected to the heating plate.

[0020] The main body of the RF heating rod of the present application includes a heating part and a cooling part, the heating part is connected to the heating disk and the cooling part, and cold water is introduced into the cold water channel inside the cooling part through the water inlet and the cold water flows in the cooling channel until it is discharged from the water outlet, so that the cold water absorbs heat and cools the cooling part along the extension direction of the cold water channel, so as to avoid the RF heating rod having an excessively high temperature, causing the RF heating rod to be ablated and affecting the operation of the equipment; at the same time, since the heating part is also included between the cooling part and the heating disk, there is a certain distance between the cooling part and the heating disk, so that the cooling effect of the cooling part will not affect the heating effect of the heating disk. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0022] Figure 1a-Figure 1c These are cross-sectional views of the assembly of the radio frequency heating rod and the heating plate in the embodiment of the present invention;

[0023] Figure 2 for Figure 1a The enlarged view of point A in the middle;

[0024] Figure 3 for Figure 1b The enlarged view of point B in the middle;

[0025] Figure 4 for Figure 1b Enlarged view of point C in the middle;

[0026] Figure 5a-Figure 5b The structural diagrams of the radio frequency heating rod and the heating plate in the embodiment of the present invention;

[0027] Figure 6 It is a structural diagram of the assembly of the radio frequency heating rod and the heating plate in an embodiment of the present invention;

[0028] The reference numerals in the figures are:

[0029] 1. RF heating rod; 11. Heating part; 12. Cooling part; 121. Cold water channel; 1211. Cooling channel; 1212. Reflux channel; 1213. Connecting port; 122. Water inlet; 123. Water outlet; 13. Connecting part; 2. Heating plate. DETAILED DESCRIPTION

[0030] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. Now, in conjunction with the accompanying drawings, the preferred embodiments of the present invention are described in detail.

[0031] Reference Figures 1a to 6 As shown, it shows an embodiment of the radio frequency heating rod 1 of the present invention. The radio frequency heating rod 1 includes a main body, and the main body includes a heating part 11 and a cooling part 12. The two ends of the heating part 11 are respectively connected to the heating plate 2 and the cooling part 12. The cooling part 12 is provided with a cold water channel 121 inside and a water inlet 122 and a water outlet 123 that penetrate from the outer surface of the cooling part 12 to the cold water channel 121. The cold water channel 121 is extended along the height direction of the cooling part 12; wherein, cold water enters the cold water channel 121 from the water inlet 122 and flows along the extension direction of the cold water channel 121 to the water outlet 123 for discharge.

[0032] Specifically, the RF heating rod 1 is a highly efficient heating method that uses the heat generated by RF current in a conductor to heat an object. In CCP (Capacitance Couple Plasma) discharge, one end of the RF heating rod 1 is connected to the heating plate 2. The RF heating rod 1 is mainly used for auxiliary heating and precise temperature control. Unlike the heating plate 2, the RF heating rod 1 can respond to temperature control requirements more quickly and accurately. The heat it generates can be transferred to the silicon wafer or process material by direct contact or indirect radiation, thereby achieving more precise temperature control. At the same time, the other end of the RF heating rod 1 is connected to the connector to guide the RF current to the structure below.

[0033] The RF heating rod 1 includes a main body, which extends downward from one end connected to the heating disk 2 to connect to the connector; the main body includes a heating part 11 and a cooling part 12, the heating part 11 is used to assist the heating disk 2 in heating so as to achieve precise temperature control and improve the heating effect; the cooling part 12 is used to cool the RF heating rod 1 to prevent the RF heating rod 1 from being ablated. One end of the heating part 11 is connected to the heating disk 2, and the other end of the heating part 11 is connected to the cooling part 12, that is, the cooling part 12 is at a certain distance from the heating disk 2, so that when the cooling part 12 is water-cooled, it will not affect the heating effect of the heating part 11 and the heating disk 2; a cold water channel 121 is provided inside the cooling part 12, and the cold water channel 121 is a flow channel for cold water, and the cold water channel 121 is extended along the height direction of the cooling part 12, and the cold water channel 121 is formed along the circumferential direction of the cooling part 12; at the same time, the cooling The part 12 is also provided with a water inlet 122 and a water outlet 123, and the water inlet 122 and the water outlet 123 are extended from the outer surface of the cooling part 12 toward the cold water channel 121 until they are connected with the cold water channel 121, and the water inlet 122 is used for introducing cold water, and the water outlet 123 is used for discharging cold water, and the water inlet 122 and the water outlet 123 are located at both ends of the cold water channel 121, so that the cold water can cool down the main body in the cooling part 12 area along the extension direction of the cold water channel 121 to avoid ablation caused by excessive temperature of the RF heating rod 1.

[0034] When in use, an external pipe is connected to the water inlet 122, and cold water is introduced into the cold water channel 121 from the water inlet 122, and the cold water flows along the extension direction of the cold water channel 121 until the cold water flows to the water outlet 123 to be discharged from the inside of the cooling part 12, thereby achieving the cold water absorbing the heat of the cooling part 12 when flowing in the cold water channel 121, so as to cool down the cooling part 12 and prevent the RF heating rod 1 from being overheated and causing ablation.

[0035] The main body of the RF heating rod 1 of the present application includes a heating part 11 and a cooling part 12, the heating part 11 is connected to the heating disk 2 and the cooling part 12, and cold water is introduced into the cold water channel 121 inside the cooling part 12 through the water inlet 122, and the cold water flows in the cooling channel 1211 until it is discharged from the water outlet 123, so that the cold water absorbs heat and cools the cooling part 12 along the extension direction of the cold water channel 121, so as to avoid the temperature of the RF heating rod 1 being too high, resulting in ablation of the RF heating rod 1 and affecting the operation of the equipment; at the same time, since the heating part 11 is also included between the cooling part 12 and the heating disk 2, there is a certain distance between the cooling part 12 and the heating disk 2, so that the cooling effect of the cooling part 12 will not affect the heating effect of the heating disk 2; at the same time, the size of the cooling part 12 can be controlled by different lengths of the cold water channel 121 to further ensure that it will not affect the process.

[0036] In one embodiment, referring to Figures 2 to 4 As shown, the cold water channel 121 includes a cooling channel 1211 and a reflux channel 1212, the reflux channel 1212 is arranged in the middle of the cooling part 12, and one end of the reflux channel 1212 is connected to the water outlet 123, the cooling channel 1211 is arranged on the outside of the reflux channel 1212, one end of the cooling channel 1211 is connected to the water inlet 122, and the other end is connected to the reflux channel 1212; wherein, cold water enters the cooling channel 1211 through the water inlet 122, and then flows to the reflux channel 1212 until it flows out through the water outlet 123. Specifically, the cold water channel 121 includes a cooling channel 1211 and a reflux channel 1212. The reflux channel 1212 is used to guide the cold water in the cooling part 12 to the water outlet 123. The cooling channel 1211 is used to guide the cold water to cool the cooling part 12. Therefore, the cooling channel 1211 is arranged in the area of ​​the cooling part 12 close to its outer side to better cool the cooling part 12; the reflux channel 1212 is arranged in the middle of the cooling part 12, so as to lead the cold water from the middle of the cooling part 12 to the water outlet 123; the cooling channel 1211 is arranged on the outer side of the reflux channel 1212, and one end of the cooling channel 1211 is connected to the water inlet 122, and the other end of the cooling channel 1211 is connected to the reflux channel 1212; the cooling channel 1211 and the reflux channel 1212 are both extended along the height direction of the cooling part 12.

[0037] When cold water is introduced into the cooling channel 1211 , the cold water enters the cooling channel 1211 through the water inlet 122 , flows along the extension direction of the cooling channel 1211 , flows into the reflux channel 1212 , and then is discharged from the interior of the cooling portion 12 along the reflux channel 1212 through the water outlet 123 .

[0038] In this embodiment, the cooling channel 1211 and the reflux channel 1212 are provided so that the cold water first flows through the cooling channel 1211 to cool the cooling part 12 and then flows out from the reflux channel 1212, thereby increasing the contact area between the cold water and the cooling part 12 to improve the cooling effect of the cold water.

[0039] In a specific embodiment, refer to Figures 2 to 4 As shown, the cooling channel 1211 is arranged to extend along the circumference of the cooling portion 12, the bottom end of the cooling channel 1211 is connected to the water inlet 122, the top end of the cooling channel 1211 is communicated with the top end of the reflux channel 1212, and the bottom end of the reflux channel 1212 is connected to the water outlet 123. Specifically, the cooling channel 1211 is arranged to extend along the circumference of the cooling portion 12, so that when cold water flows through the cooling channel 1211, the cold water contacts the cooling portion 12 to the maximum extent, thereby taking away the heat in the cooling portion 12 area more evenly; the bottom end of the cooling channel 1211 is connected to the water inlet 122, the top end of the cooling channel 1211 is communicated with the reflux channel 1212, and the bottom end of the reflux channel 1212 is connected to the water outlet 123, therefore, when cold water flows into the cooling channel 121 through the water inlet 122 1, the cold water flows upward from the bottom end of the cooling channel 1211 to the top end of the cooling channel 1211, and enters the top end of the return channel 1212 from the top end of the cooling channel 1211, and the cold water flows downward along the return channel 1212 through the top end of the return channel 1212 to the bottom end of the return channel 1212, and is finally discharged from the water outlet 123 to the inside of the cooling part 12, so that the cold water absorbs heat and cools the cooling part 12 from bottom to top, and flows out from top to bottom, so as to increase the surface area of ​​the cold water in contact with the heat source and improve the cooling efficiency.

[0040] More specifically, the water outlet 123 is located below the water inlet 122, that is, the length of the cooling channel 1211 is smaller than the length of the return channel 1212, thereby ensuring that the cold water return path is longer than the cold water cooling path, ensuring the flow rate of the cold water during return, so as to improve the smoothness of the cold water and the structural stability of the RF heating rod 1.

[0041] In one embodiment, referring to Figure 4As shown, the cold water channel 121 further includes a communication port 1213 , which is disposed between the reflux channel 1212 and the cooling channel 1211 along the circumferential direction of the cooling portion 12 , and is used to connect the cooling channel 1211 with the reflux channel 1212 . Specifically, the cold water channel 121 also includes a connecting port 1213, which is used to connect the cooling channel 1211 and the return channel 1212. The connecting port 1213 is extended along the circumference of the cooling part 12, and the connecting port 1213 is located between the cooling channel 1211 and the return channel 1212, so that the cold water flowing into the cooling channel 1211 can pass through the connecting port 1213 along the circumference of the cooling channel 1211 to enter the return channel 1212, thereby ensuring the smooth flow of cold water in the cooling channel 1211 and the return channel 1212, ensuring the flow rate of cold water, and improving the structural stability of the RF heating rod 1.

[0042] More specifically, the connecting port 1213 is arranged at the top of the return channel 1212 and the cooling channel 1211 along the circumference of the return channel 1212. When cold water flows into the cooling channel 1211 through the water inlet 122, the cold water flows upward from the bottom end of the cooling channel 1211 to the top end of the cooling channel 1211, and enters the top end of the return channel 1212 through the connecting port 1213. The cold water flows downward along the return channel 1212 through the top end of the return channel 1212 to the bottom end of the return channel 1212, and is finally discharged from the inside of the cooling part 12 through the water outlet 123, so that the cold water absorbs heat and cools the cooling part 12 from bottom to top, and flows out from top to bottom, so as to increase the surface area of ​​the cold water in contact with the heat source and improve the cooling efficiency.

[0043] In a specific embodiment, refer to Figure 2 As shown, the main body is provided with two water inlets 122, which are relatively arranged on both sides of the cooling part 12 and are respectively connected to both sides of the cooling channel 1211. Specifically, the main body is provided with two water inlets 122, which are relatively arranged on both sides of the cooling part 12, that is, the two water inlets 122 are respectively passed through from both sides of the outer surface of the cooling part 12 to both sides of the cooling channel 1211, so that cold water can enter the cooling channel 1211 from both sides of the cooling part 12, so as to increase the water inlet rate of cold water, thereby improving the cooling efficiency.

[0044] In one embodiment, the cooling channel 1211 is a spiral structure or a linear structure (not shown in the figure). Specifically, the cooling channel 1211 is arranged to extend from bottom to top in a spiral structure or a linear structure; when the cooling channel 1211 extends from bottom to top around the return channel 1212 in a spiral structure, one end of the cooling channel 1211 is connected to the water inlet 122, and the other end is connected to the return channel 1212. Cold water can enter the cooling channel 1211 from the water inlet 122 and flow upward around the return channel 1212 in a spiral flow until it flows into the return channel 1212 and is discharged from the water outlet 123. At this time, the cold water can be maximized. The cooling portion 12 is contacted with the cooling part 12 to the maximum extent, thereby increasing the cooling area and thus improving the cooling effect; when the cooling channel 1211 extends from bottom to top in a straight line structure, one end of the cooling channel 1211 is connected to the water inlet 122, and the other end is connected to the return channel 1212. Cold water can enter the cooling channel 1211 from the water inlet 122, and flow upward in a straight line around the return channel 1212 until it flows into the return channel 1212 and is discharged from the water outlet 123, thereby increasing the flow rate of cold water and improving the cooling efficiency.

[0045] In a specific embodiment, the surface of the cold water channel 121 in contact with the cold water is covered with a layer of low dielectric constant metal compound (not shown in the figure). Specifically, the low dielectric constant metal compound refers to a metal compound material with a relatively low dielectric constant. The low dielectric constant material changes less in the electric field, which is conducive to reducing signal loss and delay. Therefore, a layer of low dielectric constant metal compound is also covered in the cold water channel 121, that is, a layer of low dielectric constant metal compound (such as ALF) is isolated between the cold water and the main body to achieve the effect of isolating the radio frequency, thereby avoiding the radio frequency coupling on the main body into the cold water, ensuring that the cold water does not take away too much radio frequency energy, and further protecting the stability and process performance of the equipment; at the same time, the cooling effect of the radio frequency heating rod 1 is more uniform and better radio frequency shielding is performed.

[0046] In one embodiment, the water inlet 122 and the water outlet 123 are both provided with a seal (not shown in the figure) to prevent cold water leakage. Specifically, the water inlet 122 and the water outlet 123 are the inlet and outlet for cold water. To ensure that the cold water is not leaked, a seal is provided on the water inlet 122 and the water outlet 123. The seal has a sealing property. The seal is used to seal the water inlet 122 and the water outlet 123 to ensure the sealing of the water inlet 122 and the water outlet 123 to prevent cold water leakage; more specifically, the seal is made of high temperature resistant material (such as high temperature silicone rubber or metal sealing ring), so that when the RF heating rod 1 passes cold water into the water inlet 122 or discharges cold water through the water outlet 123 under high temperature and high pressure conditions, the cold water does not leak, thereby increasing the service life of the seal.

[0047] In a specific embodiment, refer to Figure 1a to Figure 1c As shown, the main body also includes a connecting portion 13, one end of which is connected to the bottom end of the cooling portion 12, and the other end is connected to other structural parts. Specifically, the main body also includes a connecting portion 13, one end of which is connected to the bottom end of the cooling portion 12, that is, the cooling portion 12 is located between the connecting portion 13 and the heating portion 11, the heating portion 11 is used to assist in heating the heating plate 2, the cooling portion 12 is used to cool the main body, and the connecting portion 13 is used to connect other structural parts, that is, the top end of the cooling portion 12 is connected to the heating portion 11, the bottom end of the cooling portion 12 is connected to the top end of the connecting portion 13, and the bottom end of the connecting portion 13 is connected to other structural parts.

[0048] When the RF heating rod 1 is in use, the heat generated by the RF heating rod 1 will be absorbed by the cold water in the cooling part 12 to cool the RF heating rod 1, thereby reducing the heat of the connecting part 13 and avoiding ablation of the RF heating rod 1, especially avoiding ablation and adhesion of the connecting part 13 to other structural parts.

[0049] The present embodiment also provides a semiconductor production device (not shown in the figure), which includes a heating plate 2 and a radio frequency heating rod 1. The radio frequency heating rod 1 can adopt any radio frequency heating rod 1 provided by the present invention. Since the specific structure and working principle of the radio frequency heating rod 1 have been introduced in detail in the previous description, they will not be repeated here for the sake of brevity. One end of the heating part 11 is fixedly connected to the heating plate 2.

[0050] The semiconductor production equipment in this embodiment adopts the RF heating rod 1 provided by the present invention to achieve cooling of the RF heating rod 1, thereby preventing ablation problems from occurring at the bottom of the RF heating rod 1, while not affecting the heating effect of the heating plate 2, thereby ensuring the production stability and production process of the semiconductor production equipment.

[0051] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present invention, and these modifications or replacements should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A radio frequency heating rod, characterized in that: include: The main body includes a heating part and a cooling part, wherein the two ends of the heating part are connected to the heating plate and the cooling part respectively, and the cooling part is provided with a cold water channel and a water inlet and a water outlet extending from the cooling part to the cold water channel, and the cold water channel is extended along the height direction of the cooling part; Wherein, cold water enters the cold water channel from the water inlet and flows along the extension direction of the cold water channel to be discharged from the water outlet.

2. The radio frequency heating rod according to claim 1, characterized in that: The cold water channel includes a cooling channel and a reflux channel, wherein the reflux channel is arranged in the middle of the cooling part, and one end of the reflux channel is connected to the water outlet, and the cooling channel is arranged around the outside of the reflux channel, one end of the cooling channel is connected to the water inlet, and the other end is communicated with the reflux channel; Wherein, cold water enters the cooling channel through the water inlet, and then flows to the reflux channel until it flows out through the water outlet.

3. The radio frequency heating rod according to claim 2, characterized in that: The cooling channel is extended along the circumference of the cooling part, the bottom end of the cooling channel is connected to the water inlet, the top end of the cooling channel is communicated with the top end of the reflux channel, and the bottom end of the reflux channel is connected to the water outlet.

4. The radio frequency heating rod according to claim 2, characterized in that: The cold water channel further includes a communication port, which is provided between the reflux channel and the cooling channel along the circumferential direction of the cooling portion and is used to connect the cooling channel and the reflux channel.

5. The radio frequency heating rod according to claim 2, characterized in that: The water inlets are provided with two, and the two water inlets are arranged at two sides of the cooling part opposite to each other and are communicated with two sides of the cooling channel respectively.

6. The radio frequency heating rod according to claim 2, characterized in that: The cooling channel is a spiral structure or a linear structure.

7. The radio frequency heating rod according to claim 1, characterized in that: A layer of low dielectric constant metal compound is plated on the surface of the cold water channel.

8. The radio frequency heating rod according to claim 1, characterized in that: The water inlet and the water outlet are both provided with sealing members to prevent cold water leakage.

9. The radio frequency heating rod according to any one of claims 1 to 8, characterized in that: The main body also includes a connecting portion, one end of which is connected to the bottom end of the cooling portion, and the other end of which is connected to other structural members.

10. A semiconductor production equipment, characterized in that: include: Heating plate; A radio frequency heating rod, wherein the radio frequency heating rod is the radio frequency heating rod according to any one of claims 1 to 9, and one end of the heating part is fixedly connected to the heating plate.

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