High-precision granulating device

Abstract

The invention provides a high-precision granulating device, which is applied to the technical field of granulating devices for high-purity metals, and is characterized in that the high-precision granulating device comprises a material melting cylinder, and the material melting cylinder is used for containing materials to be granulated; the material receiving crucible is arranged below the material melting cylinder and is used for containing pure water; the drop blowing mechanism comprises a material dropping pipe and a drop blowing pipe; the material dropping pipe is arranged between the material melting cylinder and the material receiving crucible and is used for communicating the material melting cylinder with the material receiving crucible; the drop blowing pipe is arranged on the material receiving crucible and is externally connected with inert gas; the piston type driving mechanism is used for pressing the to-be-granulated material downwards so as to inject the to-be-granulated material into the material dripping pipe and extruding the to-be-granulated material, the to-be-granulated material is accumulated at the outlet of the material dripping pipe due to tension and forms material granules, and the dripping blowing pipe blows inert gas towards one side of the outlet of the material dripping pipe and blows the material granules into the pure water in the material receiving crucible; the device has the technical effects that the particle size can be accurately controlled, the ultra-high purity of granules is ensured, and the particle size precision and the yield after granulation are improved.

Description

Technical Field

[0001] The invention relates to the technical field of high-purity metal granulation devices, in particular to a high-precision granulation device. Background Art

[0002] In the semiconductor industry or some specific industries, there are strict requirements on the particle size of raw materials. The existing granulation technology mostly adopts the method of melting the material and then dripping it into granules by its own weight and screening it. However, for the requirement of smaller particle size (such as less than 1mm), the existing granulation device is difficult to achieve, and the yield after screening is extremely low. It is often necessary to repeat secondary granulation and screening, which not only increases the cost, but also reduces the purity of the granulation.

[0003] At present, a Chinese invention with publication number CN104307435B discloses a granulator, including a correspondingly arranged melting material device, a dripping mechanism, a rotating granulation receiving disk, a scraping mechanism and a granulation collecting device, the scraping mechanism including its scraping head, the rotating granulation receiving disk including a disk body and a rotating shaft connected to the disk body, the scraping head and the disk body are placed in a sealable granulation bin, the melting material device and the dripping mechanism are also arranged in the granulation bin, the interior of the disk body has a guide cavity connected to a heat transfer fluid medium circulation device, the rotating granulation receiving disk can be fine-tuned up and down, and the center distance and spacing of the drip nozzle and the scraping head of the dripping mechanism relative to the rotating granulation receiving disk can be fine-tuned.

[0004] The granulation principle of the existing granulator is also to rely on the self-weight of the material to drip and form. Although the particle size can be adjusted by the spacing of the dripping mechanism, the particle size cannot be accurately controlled, and the particle size distribution is wide, which leads to a low granulation yield. Summary of the invention

[0005] The purpose of the present invention is to provide a high-precision granulation device, which has the advantages of accurately controlling the particle size and ensuring the ultra-high purity of the granulation, and improving the particle size accuracy and finished product rate after granulation.

[0006] To achieve the above objectives and other related objectives, the present invention provides the following technical solutions:

[0007] A high-precision granulation device comprises a material-forming cylinder containing materials to be granulated;

[0008] A material receiving crucible, which is arranged below the material-forming cylinder and contains pure water;

[0009] A drop blowing mechanism, the drop blowing mechanism comprising a drop feeding pipe arranged between the material forming cylinder and the material receiving crucible and used to connect the material forming cylinder and the material receiving crucible, and a drop blowing pipe arranged on the material receiving crucible and externally connected to an inert gas;

[0010] A piston-type driving mechanism, wherein the piston-type driving mechanism is used to press down the material to be granulated so as to inject the material to be granulated into the dripping pipe and extrude it. The material to be granulated accumulates at the outlet of the dripping pipe due to tension and forms material particles. The dripping pipe blows inert gas toward one side of the outlet of the dripping pipe and blows the material particles into the pure water in the receiving crucible;

[0011] A collecting box is connected to the material receiving crucible, and a filter screen for filtering material particles is arranged in the collecting box.

[0012] In one embodiment of the present invention, a chemical material heater is provided outside the chemical material tank, and the heating temperature of the chemical material heater is 50°C-300°C.

[0013] In one embodiment of the present invention, a drip tube heater is fixedly provided on the outer side of the drip tube, and the heating temperature of the drip tube heater is 80°C-300°C.

[0014] In one embodiment of the present invention, the drop blowing pipe supplies pure argon gas through a high-frequency pulse electromagnetic valve, and the temperature of the pure argon gas blown out by the drop blowing pipe is 25° C.-350° C.

[0015] In one embodiment of the present invention, the angle between the dripping pipe and the dripping pipe is 15°-30°, and the distance between the air blowing port of the dripping pipe and the outlet of the dripping pipe is 2mm-10mm.

[0016] In one embodiment of the present invention, the receiving crucible comprises a receiving barrel, an outer barrel and a refrigerant liquid, the upper end of the receiving barrel is fixedly connected to a dripping pipe, the lower end of the receiving barrel is provided with a discharge pipe, the discharge pipe is connected with a discharge valve, and a balance pipe for balancing the internal air pressure of the receiving barrel is provided on the upper side wall of the receiving barrel;

[0017] The outer barrel is located below the dripping pipe and is integrally formed on the outside of the receiving barrel. An interlayer cavity is formed between the outer barrel and the receiving barrel. The interlayer cavity contains a refrigerant liquid, and the temperature of the refrigerant liquid is -25°C-0°C.

[0018] A cooling water inlet communicating with the interlayer cavity is arranged on the bottom side wall of the outer barrel, and a cooling water outlet communicating with the interlayer cavity is arranged on the top side wall of the outer barrel.

[0019] In one embodiment of the present invention, a collecting box is further included. The collecting box is located below the receiving crucible and is connected to the discharge valve. A filter screen for filtering material particles is arranged in the collecting box. A discharge valve is arranged at the bottom of the collecting box.

[0020] In one embodiment of the present invention, a protective gas inlet and a protective gas outlet are provided on the upper side wall of the collection box.

[0021] In one embodiment of the present invention, a recoil pipe is connected to the bottom of the collection box, the other end of the recoil pipe is connected to the discharge pipe, and a circulation pump is provided on the recoil pipe.

[0022] In one embodiment of the present invention, a liquid adding pipe connected to an external pure water is connected to the top of the collection box, and a liquid adding valve is provided on the liquid adding pipe;

[0023] The liquid adding pipe is connected with a reflux pipe which is in communication with the material receiving barrel.

[0024] As described above, a high-precision granulation device of the present invention has the following beneficial effects:

[0025] 1. The chemical heater is used to heat the chemical cylinder to melt the material to be granulated. The piston drive mechanism injects the melted material to be granulated into the dripping tube under controllable downward pressure and extrude it. The dripping tube heater is used to heat the dripping tube to adjust the viscosity of the melted material to be granulated in the dripping tube, so that the material to be granulated accumulates at the outlet of the dripping tube due to tension and forms material particles. The dripping tube blows an inert gas of a certain temperature toward one side of the outlet of the dripping tube and blows the material particles into the pure water in the receiving crucible. By controlling the heating temperature of the chemical heater, the heating temperature of the dripping tube heater, and the blowing temperature of the dripping tube, the material to be granulated can be secondary condensed into standard microspheres under tension after dripping. The particle size can be accurately controlled and the ultra-high purity of the granulation can be ensured, thereby improving the particle size accuracy and finished product rate after granulation.

[0026] 2. The interlayer cavity in the middle of the receiving crucible is used to hold the refrigerant liquid, which is used to cool the pure water in the receiving barrel and the material particles mixed in the pure water, thereby realizing rapid cooling and forming of the material particles and improving the yield of the granulation product;

[0027] 3. One end of the recoil pipe is connected to the bottom of the collecting box, and the other end is connected to the discharge pipe. A circulating pump is also provided on the recoil pipe. The circulating pump is used to supply water to the discharge pipe through the recoil pipe so that pure water flows into the receiving barrel through the discharge pipe, so that the water and particle mixture in the receiving barrel is always in a tumbling or swirling state, thereby avoiding the adhesion and accumulation of the prepared material particles, which affects the yield of granulation;

[0028] 4. A liquid adding pipe for external pure water is connected to the top of the collecting box, and a liquid adding valve is arranged on the liquid adding pipe. When the liquid adding valve is opened, water is added to the collecting box through the liquid adding pipe; a reflux pipe connected to the receiving barrel is connected to the liquid adding pipe; since the circulating pump continuously injects pure water into the receiving barrel through the backwash pipe, the liquid level in the receiving barrel will continue to rise. When the liquid level in the receiving barrel reaches the height of the pipe mouth of the reflux pipe, the pure water will flow back to the collecting box through the reflux pipe and the filter screen; thereby, the pure water in the receiving barrel is always in a circulating flow state, which can effectively prevent the prepared material particles from sticking in the water and improve the yield of granulation. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention.

[0030] Figure numerals: 1. material tank; 11. material to be granulated; 12. material heater; 2. material receiving crucible; 21. pure water; 23. material receiving barrel; 24. outer barrel; 25. refrigerant liquid; 26. discharge pipe; 27. discharge valve; 28. balance pipe; 231. cooling water inlet; 232. cooling water outlet; 3. drop blowing mechanism; 31. drop pipe; 32. drop blowing pipe; 33. drop pipe heater; 4. piston drive mechanism; 5. material pellets; 6. collecting box; 7. filter screen; 61. discharge valve; 62. protective gas inlet; 63. protective gas outlet; 8. recoil pipe; 81. circulation pump; 9. liquid adding pipe; 91. liquid adding valve; 92. reflux pipe. DETAILED DESCRIPTION

[0031] The following is a description of the implementation of the present invention by means of specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0032] See also Figure 1 . It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the present invention. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of the present invention without substantially changing the technical content.

[0033] See also Figure 1 The present invention provides a high-precision granulation device, comprising a material-forming cylinder 1, the material-forming cylinder 1 containing a material 11 to be granulated;

[0034] The receiving crucible 2 is arranged below the material tank 1 and contains pure water 21; the pure water 21 in this embodiment is high-purity deionized water.

[0035] The blowing mechanism 3 includes a blowing pipe 31 disposed between the material-forming cylinder 1 and the receiving crucible 2 and used to connect the material-forming cylinder 1 and the receiving crucible 2, and a blowing pipe 32 disposed on the receiving crucible 2 and connected to an inert gas;

[0036] The piston drive mechanism 4 is used to press down the material 11 to be granulated so as to inject the material 11 into the dripping pipe 31 and extrude it. The material 11 to be granulated accumulates at the outlet of the dripping pipe 31 due to tension and forms material particles 5. The dripping pipe 32 blows inert gas toward one side of the outlet of the dripping pipe 31 and blows the material particles 5 into the pure water 21 in the receiving crucible 2.

[0037] The collecting box 6 is connected to the receiving crucible 2 , and a filter screen 7 for filtering the material particles 5 is arranged in the collecting box 6 .

[0038] A chemical material heater 12 is arranged on the outside of the chemical material cylinder 1. The heating temperature of the chemical material heater 12 in this embodiment is 50°C-300°C. The chemical material heater 12 is used to heat the chemical material cylinder 1 to melt the material 11 to be granulated. The material of the chemical material cylinder 1 is metal, and the inner surface of the chemical material cylinder 1 is sprayed with an anti-sticking layer, which can be a ceramic coating or a polytetrafluoroethylene coating.

[0039] The receiving crucible 2 includes a receiving barrel 23, an outer barrel 24 and a refrigerant liquid 25. The upper end of the receiving barrel 23 is fixedly connected to the dripping pipe 31, and the lower end of the receiving barrel 23 is integrally formed with a discharge pipe 26, and the discharge pipe 26 is connected to a discharge valve 27. The collecting box 6 is located below the receiving barrel 23 and is connected to the discharge valve 27. The discharge valve 27 is opened to put the prepared material particles 5 and the pure water 21 into the collecting box 6 together, and the material particles 5 and the pure water 21 pass through the filter screen 7, and the filter screen 7 is used to filter out the material particles 5;

[0040] A balance pipe 28 for balancing the internal air pressure of the material receiving barrel 23 is provided on the upper side wall of the material receiving barrel 23; the balance pipe 28 is used to discharge the excess inert gas in the material receiving barrel 23; because the dripping pipe 32 continuously blows inert gas in the material receiving barrel 23, the material receiving barrel 23 needs to be deflated to balance the pressure;

[0041] The outer barrel 24 is located below the drip tube 31 and is integrally formed on the outside of the receiving barrel 23. An interlayer cavity is formed between the outer barrel 24 and the receiving barrel 23. The interlayer cavity contains a refrigerant liquid 25. The temperature of the refrigerant liquid 25 is -25°C-0°C. The refrigerant liquid 25 is used to cool the pure water 21 in the receiving barrel 23 and the material particles 5 mixed in the pure water 21, thereby realizing rapid cooling and forming of the material particles 5.

[0042] A cooling water inlet 231 communicating with the interlayer cavity is provided on the bottom side wall of the outer barrel 24 , and a cooling water outlet 232 communicating with the interlayer cavity is provided on the top side wall of the outer barrel 24 ; the cooling water inlet 231 and the cooling water outlet are used for external forced cooling circulation of the refrigerant liquid 25 .

[0043] A dropper heater 33 is fixedly arranged on the outside of the dropper tube 31, and the heating temperature of the dropper heater 33 is 80°C-300°C; the dropper heater 33 can heat the dropper tube 31 separately, and adjust the viscosity of the material 11 to be granulated in the dropper tube 31 by changing the temperature of the dropper tube 31;

[0044] In this embodiment, the dripping tube 31 is provided with a drop blowing tube 32 around it. The material of the drop blowing tube 32 can be ceramic, and the drop blowing tube 32 is tilted on the material tank 1, wherein the angle between the blowing port of the drop blowing tube 32 and the outlet of the drop blowing tube 31 is 15°-30°, and the distance between the blowing port of the drop blowing tube 32 and the outlet of the drop blowing tube 31 is 2mm-10mm; the drop blowing tube 32 is supplied with an inert gas by a high-frequency pulse solenoid valve, the inert gas is high-purity argon gas, and the temperature of the high-purity argon gas blown out by the drop blowing tube 32 is 25°C-350°C; therefore, through the angle set by the drop blowing tube 32 and the distance between it and the drop blowing tube 31, the drop blowing tube 32 supplies high-purity argon gas through the high-frequency pulse solenoid valve, which can blow the material particles 5 accumulated at the outlet of the drop blowing tube 31 due to tension into the high-purity deionized water in the receiving barrel 23 below;

[0045] By controlling the heating temperature of the material heater 12, the heating temperature of the heater of the drop pipe 31, and the blowing temperature of the drop blowing pipe 32, the material can be secondary condensed into standard microsphere beads under the action of tension after dripping.

[0046] The piston drive mechanism 4 includes a pressing piston sealed with the chemical cylinder 1 and a driving member connected with the pressing piston and used to drive the pressing piston to reciprocate vertically in the chemical cylinder 1; wherein the pressing piston is located in the chemical cylinder 1, and a sealing ring is installed on the pressing piston, and the sealing ring is used to form a dynamic seal between the pressing piston and the inner surface of the chemical cylinder 1, and the sealing ring material can be polytetrafluoroethylene or rubber containing polytetrafluoroethylene; the driving member in this embodiment can be a servo motor or a stepper motor, and the servo motor or the stepper motor can realize precise position control and speed control of the pressing piston; wherein the transmission mode between the driving member and the pressing piston can be a ball screw transmission or a gear rack transmission;

[0047] Since the speed of the downward piston can be precisely controlled, the blowing frequency and duty cycle of the blowing tube 32 can be adjusted, and the two are matched to produce material particles 5 with different diameters, that is, the volume of the material particles 5 is completely determined by the two.

[0048] A drain valve 61 is provided at the bottom of the collecting box 6, and the drain valve 61 is used for draining when the pure water 21 is replaced; a protective gas inlet 62 and a protective gas outlet 63 are provided on the upper side wall of the collecting box 6, and the protective gas inlet 62 and the protective gas outlet 63 are both above the liquid level of the pure water 21 in the collecting box 6, the protective gas inlet 62 is used for the access of high-purity argon gas, and the protective gas outlet 63 is used for gas discharge. When the high-purity argon gas is introduced for a long enough time, all the air in the collecting box 6 can be replaced by high-purity argon gas;

[0049] A recoil pipe 8 is connected to the bottom of the collecting box 6, and the other end of the recoil pipe 8 is connected to the discharge pipe 26. A circulation pump 81 is provided on the recoil pipe 8. The circulation pump 81 is used to supply water to the discharge pipe 26 through the recoil pipe 8 so that the water in the discharge pipe 26 flows into the receiving barrel 23, so that the water and particle mixture in the receiving barrel 23 is always in a tumbling or swirling state, thereby avoiding the adhesion and accumulation of the prepared material particles 5.

[0050] A liquid adding pipe 9 connected to an external pure water 21 is connected to the top of the collecting box 6, and a liquid adding valve 91 is provided on the liquid adding pipe 9, and a reflux pipe 92 connected to the material receiving barrel 23 is connected to the liquid adding pipe 9; when the liquid adding valve 91 is opened, the collecting box 6 is replenished with water through the liquid adding pipe 9; since the circulating pump 81 continuously injects pure water 21 into the material receiving barrel 23 through the recoil pipe 8, the liquid level of the material receiving barrel 23 will continue to rise. When the liquid level in the material receiving barrel 23 reaches the pipe mouth height of the reflux pipe 92, the water and particle mixture in the material receiving barrel 23 will flow to the filter screen 7 through the reflux pipe 92, and the filter screen 7 will filter the material particles 5 in the water and particle mixture, and the pure water 21 will flow back to the collecting box 6 through the filter screen 7; thereby, the pure water 21 in the material receiving barrel 23 is always in a circulating flow state, which can effectively prevent the prepared material particles 5 from sticking in the water.

[0051] Brief description of the usage process:

[0052] 1. Load the material 11 to be granulated into the material tank 1.

[0053] 2. The blowing of the dripping tube 32 is turned on to make the gas form a dynamic flow. After a period of time, the internal air will be completely replaced by high-purity argon.

[0054] 3. Start the material heater 12 and heat the temperature to 50°C-300°C to melt the material 11 to be granulated.

[0055] 4. The refrigerant liquid 25 is injected through the cooling water inlet 231 and discharged from the cooling water outlet 232 to form a cycle, so that the temperature of the refrigerant liquid 25 is maintained at -25°C-0°C.

[0056] 5. High-purity argon gas is injected into the protective gas inlet 62, and the excess gas is discharged from the protective gas outlet 63. After a period of time, the air in the collection box 6 will be completely replaced by high-purity argon gas.

[0057] 6. Turn on the heating of the drip tube heater 33 and set the heating temperature to 80-300°C.

[0058] 7. Open the liquid adding valve 91 and inject high-purity deionized water. When the water volume is sufficient, start the circulation pump 81 to fill the receiving crucible 2 with high-purity deionized water. The excess water will automatically return to the collecting box 6 through the reflux pipe 92, forming a state of water circulation.

[0059] 8. When opening the discharge valve 27, it is necessary to ensure that the water flow rate at the inlet of the backwash pipe 8 is greater than the flow rate flowing through the discharge valve 27 to ensure that the liquid level can reach the height of the pipe opening of the reflux pipe 92.

[0060] 9. According to the calculated downward pressure piston speed and the blowing frequency of the drop blowing tube 32, the work is started and the granulation begins.

[0061] If 3 mg of granules are required, the pressing speed of the pressing piston is calculated based on the weight and density at a blowing frequency of 3000 times per minute;

[0062] After the granulation is sufficient, stop all work, keep the protective gas inlet 62 to continue to inject high-purity argon, remove the collection box 6, quickly put the funnel together with the collected granulated particles into the argon protection transfer box prepared in advance, transfer to the subsequent dryer packaging process, close all valves and inflate, and the granulation is completed.

[0063] In summary, the present invention adopts a downward pressing piston to forcefully press down the material 11 to be granulated and extrude it through the drip tube 31. The drip tube 31 is not limited by the tension of the material solution, and can produce particles with tiny particle sizes; and the function of the drip blowing tube 32 can make the material particles 5 adsorbed at the outlet of the drip tube 31 escape from the tension and enter the high-purity deionized water; through the precise piston downward pressing speed and the precise frequency of the drip blowing tube 32 blowing, particles with extremely high particle size accuracy can be produced; and the entire granulation process does not contact the air, only contacts a small number of components, thereby ensuring purity and solving industry problems.

[0064] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A high-precision granulation device, characterized in that: It comprises a material-forming cylinder (1), wherein the material-forming cylinder (1) contains materials to be granulated (11); A material receiving crucible (2), wherein the material receiving crucible (2) is arranged below the material-forming tank (1) and contains pure water (21); A droplet blowing mechanism (3), the droplet blowing mechanism (3) comprising a droplet pipe (31) arranged between the material-forming cylinder (1) and the material-receiving crucible (2) and used to connect the material-forming cylinder (1) and the material-receiving crucible (2), and a droplet blowing pipe (32) arranged on the material-receiving crucible (2) and externally connected to an inert gas; A piston drive mechanism (4) is used to press down the material to be granulated (11) so as to inject the material to be granulated (11) into a drip tube (31) and extrude it. The material to be granulated (11) accumulates at the outlet of the drip tube (31) due to tension and forms material particles (5). The drip tube (32) blows inert gas toward one side of the outlet of the drip tube (31) and blows the material particles (5) into the pure water (21) in the receiving crucible (2).

2. A high-precision granulation device according to claim 1, characterized in that: A chemical material heater (12) is arranged outside the chemical material tank (1), and the heating temperature of the chemical material heater (12) is 50°C-300°C.

3. A high-precision granulation device according to claim 1, characterized in that: A drip tube heater (33) is fixedly arranged on the outside of the drip tube (31), and the heating temperature of the drip tube heater (33) is 80°C-300°C.

4. A high-precision granulation device according to claim 1, characterized in that: The drop blowing pipe (32) supplies pure argon gas through a high-frequency pulse electromagnetic valve, and the temperature of the pure argon gas blown out by the drop blowing pipe (32) is 25° C.-350° C.

5. A high-precision granulation device according to claim 1, characterized in that: The angle between the dripping pipe (32) and the dripping pipe (31) is 15°-30°, and the distance between the blowing port of the dripping pipe (32) and the outlet of the dripping pipe (31) is 2mm-10mm.

6. A high-precision granulation device according to claim 1, characterized in that: The receiving crucible (2) comprises a receiving barrel (23), an outer barrel (24) and a refrigerant liquid (25); the upper end of the receiving barrel (23) is fixedly connected to a dripping pipe (31); the lower end of the receiving barrel (23) is provided with a discharge pipe (26); the discharge pipe (26) is connected to a discharge valve (27); and a balance pipe (28) for balancing the internal air pressure of the receiving barrel (23) is provided on the upper side wall of the receiving barrel (23); The outer barrel (24) is located below the dripping pipe (31) and is integrally formed on the outside of the receiving barrel (23). An interlayer cavity is formed between the outer barrel (24) and the receiving barrel (23). The interlayer cavity contains a refrigerant liquid (25). The temperature of the refrigerant liquid (25) is -25°C to 0°C. A cooling water inlet (231) communicating with the interlayer cavity is provided on the bottom side wall of the outer barrel (24), and a cooling water outlet (232) communicating with the interlayer cavity is provided on the top side wall of the outer barrel (24).

7. A high-precision granulation device according to claim 6, characterized in that: The invention also comprises a collecting box (6), the collecting box (6) being located below the receiving crucible (2) and connected to the discharge valve (27), a filter screen (7) for filtering material particles (5) being arranged in the collecting box (6), and a discharge valve (61) being arranged at the bottom of the collecting box (6).

8. A high-precision granulation device according to claim 7, characterized in that: The upper side wall of the collecting box (6) is provided with a protective gas inlet (62) and a protective gas outlet (63).

9. A high-precision granulation device according to claim 7, characterized in that: The bottom of the collecting box (6) is connected to a recoil pipe (8), the other end of the recoil pipe (8) is connected to a discharge pipe (26), and a circulation pump (81) is provided on the recoil pipe (8).

10. A high-precision granulation device according to claim 7, characterized in that: The top of the collecting box (6) is connected to a liquid adding pipe (9) for externally supplying pure water (21), and a liquid adding valve (91) is provided on the liquid adding pipe (9); The liquid adding pipe (9) is connected to a reflux pipe (92) which is in communication with the material receiving barrel (23).

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