A tray assembly and basket device for wet processing of metal membranes

Abstract

The application relates to the technical field of metal diaphragm manufacturing processes, in particular to a tray assembly and a basket device for wet processing of metal diaphragms. The tray assembly comprises a first tray and a second tray, the two trays are the same in structure and are arranged in mirror symmetry; process round holes for clamping metal diaphragms are arranged on the two trays respectively, and the two trays are connected through positioning pins, fixing pins and spacing pins. The basket device comprises a basket frame assembly, a fixing assembly and the tray assembly; the basket frame assembly is used for being connected with external equipment and can carry at least one tray assembly; the fixing assembly is arranged on the basket frame assembly and can fix the tray assembly on the basket frame assembly. The application solves the process surface shielding problem in the wet processing of metal diaphragms to a certain extent, meets the requirements of multi-workpiece processing and compatibility, ensures that the metal diaphragm is placed firmly, greatly reduces the difficulty of operators and improves the production efficiency.

Description

Technical Field

[0001] This application relates to the field of metal diaphragm manufacturing technology, and in particular to a tray assembly and basket device for wet processing of metal diaphragms. Background Technology

[0002] In the metal diaphragm fabrication process, the diaphragm products to be processed need to be fixed in place so that they can be moved by a robotic arm to complete the fabrication. The simultaneous processing of multiple diaphragms and the need for compatibility with existing wafer designs significantly increase the design difficulty and complexity of the related basket-lifting device. Furthermore, the process surface of the diaphragm generally needs to be unobstructed to prevent interference from the fixtures. Because wet processing requires multiple steps, the stability of the fixed diaphragm must be high, and it must not rotate or wobble.

[0003] In existing technologies, clamps are often used to hold the edge of the process surface to combine the product with the fixed clamp, or tape is used to stick the process surface of the product for subsequent operations. This has problems such as process surface obstruction and poor fixation stability. Summary of the Invention

[0004] This application provides a tray assembly and basket device for wet processing of metal diaphragms, which can solve the problem of process surface obstruction to a certain extent, meet the requirements of multi-workpiece processing and compatibility, and ensure that the workpiece diaphragm is firmly placed.

[0005] In a first aspect, this application provides a tray assembly for wet processing of metal films, including a first tray and a second tray;

[0006] The first and second material trays have the same structure and are arranged in a mirror-symmetric manner.

[0007] The first and second material trays are respectively provided with a plurality of process circular holes arranged in an array and corresponding one to one for clamping metal films;

[0008] The first and second material trays are each provided with at least two corresponding positioning pin holes, and positioning pins are inserted to connect the first and second material trays; the edges of the first and second material trays are provided with multiple corresponding fixing pin holes at intervals, and the first and second material trays are connected by multiple fixing pins; at least one of the first and second material trays is also provided with a spacer pin hole, and the first and second material trays are separated by inserting a spacer pin.

[0009] In a preferred embodiment, the outer side of the process hole is chamfered.

[0010] In a preferred embodiment, the metal diaphragm is cylindrical in shape, closed at one end and open at the other end, and the open section of the metal diaphragm is bent outward to form a stop end; the outer diameter of the cylindrical portion is smaller than the diameter of the process hole, and the outer diameter of the stop end is larger than the diameter of the process hole, so that the metal diaphragm can pass through the process hole and be clamped between the first material tray and the second material tray.

[0011] In a preferred embodiment, the spacer pin includes a pin body and a pin head. The pin body can be inserted into the spacer pin hole, and the pin head is a flat structure with a certain thickness, which can separate the first tray and the second tray.

[0012] Secondly, this application provides a basket lifting device, including a basket frame assembly, a fixing assembly, and the aforementioned tray assembly;

[0013] The basket frame assembly is used to connect to external equipment and is capable of supporting at least one of the tray assemblies;

[0014] The fixing component is disposed on the basket frame assembly and can fix the tray assembly to the basket frame assembly.

[0015] In a preferred embodiment, the basket rack assembly includes a basket hanging plate, a connecting plate, a basket support rod, and a basket baffle.

[0016] The upper end of the connecting plate is fixedly connected to the basket hanging plate perpendicularly to each other, and the basket hanging plate is provided with a hanging part for connecting to external equipment;

[0017] At least two of the basket support rods pass vertically through the lower end of the connecting plate, and each end of the basket support rod is connected to a basket baffle, so that the basket support rods, the connecting plate and the basket baffle form a space for supporting the tray assembly.

[0018] In a preferred embodiment, an elongated hole is provided along the longitudinal direction of the connecting plate, and a reinforcing rod is inserted into the elongated hole.

[0019] In a preferred embodiment, the reinforcing rod is made of 304 stainless steel or 316L stainless steel.

[0020] In a preferred embodiment, the fixing component includes a tray fixing block, a fixing block rotating shaft, and a fixing block stop shaft;

[0021] The fixed block shaft passes through the middle of the connecting plate, and the material tray fixing block is rotatably connected to the fixed block shaft; the fixed block stop shaft passes through the connecting plate and is located on one side of the material tray fixing block.

[0022] In a preferred embodiment, a fastening screw is also provided on the side of the connecting plate for locking the rotating shaft of the fixing block.

[0023] In a preferred embodiment, the basket frame assembly, the fixing assembly, and the tray assembly are all made of high-performance engineering plastics or rubber materials.

[0024] This application has the following beneficial effects:

[0025] This application solves the problem of process surface obstruction in the wet processing of metal diaphragms to a certain extent, while meeting the requirements of multi-workpiece processing and compatibility, ensuring that the metal diaphragms are firmly placed, greatly reducing the difficulty for operators and improving production efficiency. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is an isometric schematic diagram of the tray assembly provided in the embodiments of this application;

[0028] Figure 2 This is a front view of the tray assembly provided in the embodiments of this application;

[0029] Figure 3 This is a side view of the tray assembly provided in an embodiment of this application;

[0030] Figure 4 This is a front view of the first tray provided in an embodiment of this application;

[0031] Figure 5 This is a longitudinal sectional view of the first tray provided in this application embodiment when the workpiece diaphragm, fixing pin, spacer pin and positioning pin are installed;

[0032] Figure 6 This is an isometric schematic diagram of the workpiece diaphragm for the tray assembly provided in the embodiments of this application;

[0033] Figure 7 for Figure 6 A longitudinal sectional view of the diaphragm in the workpiece;

[0034] Figure 8 This is an isometric schematic diagram of the basket device provided in the embodiments of this application;

[0035] Figure 9 This is a side view of the basket device provided in the embodiments of this application;

[0036] Figure 10 This is a front view diagram of the basket device provided in the embodiments of this application;

[0037] Figure 11 This is a schematic diagram of the structure of the basket hanging plate and connecting plate provided in the embodiments of this application;

[0038] Numbering on the map:

[0039] 1-First material tray; 103-Process circular hole; 104-Interval pin hole; 105-Fixing pin hole; 106-Positioning pin hole;

[0040] 2-Second tray; 3-Metal diaphragm; 4-Spacer pin; 5-Fixing pin; 6-Positioning pin; 7-Basket hanging plate; 8-Connecting plate; 9-Basket support rod; 10-Basket baffle; 11-Pattern fixing block; 12-Fixing block pivot; 13-Fixing block stop shaft; 14-Reinforcing rod; 15-Elongated hole; 16-Fastening screw. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and labeled in the accompanying drawings can generally be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0043] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0044] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0045] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0046] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0047] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0048] like Figures 1 to 5 As shown, the tray assembly provided in this embodiment includes a first tray 1 and a second tray 2;

[0049] The first tray 1 and the second tray 2 have the same structure and are arranged in a mirror-symmetric manner.

[0050] The first tray 1 and the second tray 2 are provided with a plurality of process circular holes 103 arranged in an array for clamping the metal film 3; the outer side of the process circular holes 103 is provided with chamfers to ensure that the metal film 3 can be processed uniformly.

[0051] The upper and lower ends of the first tray 1 and the second tray 2 are respectively set as parallel sections to facilitate positioning. A corresponding positioning pin hole 106 is set at the center of the upper and lower ends of the first tray 1 and the second tray 2, and positioning pins 6 are inserted to connect and align the first tray 1 and the second tray 2. Multiple corresponding fixing pin holes 105 are set at intervals on the edges of the first tray 1 and the second tray 2, and multiple fixing pins 5 are used to connect the first tray 1 and the second tray 2. The fixing pins 5 and the positioning pins 6 can align and clamp the first tray 1 and the second tray 2.

[0052] At least one of the first material tray 1 and the second material tray 2 is provided with a spacer pin hole 104, and the first material tray 1 and the second material tray 2 are separated by inserting a spacer pin 4, so as to ensure a stable gap and good parallelism between the first material tray 1 and the second material tray 2.

[0053] The outer side of the process hole is chamfered to ensure that the metal diaphragm 3 can be processed uniformly.

[0054] The first tray 1 and the second tray 2 are constructed using non-metallic materials to avoid interference from metal-sensitive materials. High-performance engineering plastics or rubber materials are preferred, such as PEEK (polyether ether ketone), PI (polyimide), PPS (polyphenylene sulfide), and fluororubber.

[0055] The metal diaphragm 3 is used as a sensor wafer, and its material is 1Cr18Ni9Ti. For example... Figure 6 and Figure 7 As shown, the metal diaphragm 3 is cylindrical in shape, closed at one end and open at the other end, and the open section of the metal diaphragm 3 is bent outward to form a stop.

[0056] The overall height L of the metal diaphragm 3 is no greater than 5mm. The outer diameter d1 of the cylindrical portion is 0.5mm to 1mm smaller than the diameter of the process hole 103, and the outer diameter D of the stop end is 0.5mm to 1mm larger than the diameter of the process hole 103, so that the metal diaphragm 3 can pass through the process hole 103 and be clamped between the first material tray 1 and the second material tray 2. The inner diameter d2 of the cylindrical portion can be set according to design requirements.

[0057] The spacer pin 4 includes a pin body and a pin head. The pin body can be inserted into the spacer pin hole 104. The pin head is a flat cylindrical structure with a thickness of 1.5mm to 2mm. Its diameter is 1mm to 2mm larger than the diameter of the spacer pin hole 104, which can separate the first material tray 1 and the second material tray 2.

[0058] like Figures 8 to 11 As shown, this embodiment also provides a basket lifting device, including a basket frame assembly, a fixing assembly, and the aforementioned tray assembly.

[0059] Specifically, the basket rack assembly includes a basket hanging plate 7, a connecting plate 8, a basket support rod 9, and a basket baffle 10;

[0060] The upper side of the connecting plate 8 is fixedly connected to the basket hanging plate 7 perpendicularly. The basket hanging plate 7 is provided with a hanging part for connecting to external equipment, such as screws, hooks, clips and other structures.

[0061] At least two basket support rods 9 pass vertically through the lower end of the connecting plate 8, and each end of the basket support rod 9 is connected to a basket baffle 10, so that the basket support rods 9, the connecting plate 8 and the basket baffle 10 form a space for carrying the tray assembly, and the tray assembly can be tilted and rest between the connecting plate 8 and the basket baffle 10.

[0062] An elongated hole 16 is provided along the longitudinal direction of the connecting plate 8, and a reinforcing rod 14 is inserted into the elongated hole 15. The reinforcing rod 14 is made of 304 stainless steel or 316L stainless steel and passes through the elongated hole 15 of the connecting plate 8 to ensure the strength of the basket frame assembly.

[0063] The fixing assembly includes a tray fixing block 11, a fixing block rotating shaft 12, and a fixing block stop shaft 13; the fixing block rotating shaft 12 passes through the middle of the connecting plate 8, and the tray fixing block 11 is rotatably connected to the fixing block rotating shaft 12; the fixing block stop shaft 13 passes through the connecting plate 8 and is located on one side of the tray fixing block 11.

[0064] The tray fixing block 11 is fan-shaped and can press the upper end of the tray assembly onto the connecting plate 8 to prevent it from flipping outward and avoid problems such as rotation and shaking of the tray assembly during the process.

[0065] The fixed block shaft 13 can limit the rotation range of the material tray fixed block 11.

[0066] The side of the connecting plate 8 is also provided with fastening screws 16, which are used to lock the rotating shaft 12 of the fixing block to prevent it from rotating or loosening.

[0067] The basket frame assembly, the fixing assembly, and the tray assembly are all made of high-performance engineering plastics or rubber materials.

[0068] The basket hanging plate 7, connecting plate 8, basket support rod 9, basket baffle 10, tray fixing block 11, fixing block pivot 12 and fixing block stop pivot 13 are all made of non-metallic materials to avoid metal-sensitive interference. High-performance engineering plastics or rubber materials are preferred, such as PEEK (polyether ether ketone), PI (polyimide), PPS (polyphenylene sulfide) and fluororubber.

[0069] In this embodiment, the metal diaphragm 3 is made of 1Cr18Ni9Ti, with an outer diameter D of 9.5mm at the end and an outer diameter d1 of 8mm for the cylindrical portion. Multiple metal diaphragms 3 are installed onto the first tray 1 manually or automatically, and the positions of the first tray 1 and the second tray 2 are aligned using positioning pins 6. The fixing pins 5 are then tightened. The fixed tray assembly is placed tangentially on the basket support rod 9, with one side pressed against the connecting plate 8. The tray fixing block 11 is rotated to completely lock the tray assembly. The entire basket device is connected to an external robotic arm, and subsequent wet etching, development, and resist removal processes are performed via an electronic control system.

[0070] In another embodiment, the tray assembly can be replaced with a standard 6-inch wafer, which is clamped and fixed on the basket frame assembly, allowing for subsequent wet etching, development, and resist removal processes.

[0071] This embodiment utilizes the ductility of the diaphragm workpiece to modify it into a circular diaphragm with flanges for easier positioning. A tray assembly is used for initial fixation, and spacer pins and positioning pins are added to ensure clamping clearance and stability. Two tray assemblies can be used simultaneously for mass production, significantly increasing production efficiency and ensuring the stability of finished products. Furthermore, the basket frame assembly is compatible with standard 6-inch wafer fixing, enabling more process options and the production of various product types.

[0072] This application solves to some extent the problem of process surface obstruction in the wet processing of metal diaphragms, while meeting the requirements for multi-workpiece processing and compatibility, ensuring that the metal diaphragms are firmly placed, greatly reducing the difficulty for operators and improving production efficiency.

[0073] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A basket-lifting device, characterized in that, Includes basket rack assembly, fixing assembly, and tray assembly; The basket frame assembly is used to connect to external equipment and can support at least one of the tray assemblies; the fixing assembly is disposed on the basket frame assembly and can fix the tray assembly to the basket frame assembly. The tray assembly includes a first tray and a second tray; the first tray and the second tray have the same structure and are arranged in a mirror image symmetrical arrangement; the first tray and the second tray are respectively provided with a plurality of process circular holes arranged in an array and corresponding to each other for clamping metal films; The first and second material trays are each provided with at least two corresponding positioning pin holes, and positioning pins are inserted to connect the first and second material trays; the edges of the first and second material trays are provided with multiple corresponding fixing pin holes at intervals, and the first and second material trays are connected by multiple fixing pins; at least one of the first and second material trays is also provided with a spacer pin hole, and the first and second material trays are separated by inserting a spacer pin. The metal diaphragm is cylindrical in shape, closed at one end and open at the other end, with the open section of the metal diaphragm bent outward to form a stop end; the outer diameter of the cylindrical part is smaller than the diameter of the process circular hole, and the outer diameter of the stop end is larger than the diameter of the process circular hole, so that the metal diaphragm can pass through the process circular hole and be clamped between the first material tray and the second material tray. The basket rack assembly includes a basket hanging plate, a connecting plate, a basket support rod, and a basket baffle. The upper end of the connecting plate is fixedly connected to the basket hanging plate perpendicularly to each other. The basket hanging plate is provided with a hook-on part for connecting to external equipment. At least two basket support rods pass vertically through the lower end of the connecting plate, and each end of the basket support rod is connected to a basket baffle, so that the basket support rods, the connecting plate and the basket baffle form a space for supporting the tray assembly.

2. The basket lifting device according to claim 1, characterized in that, The outer side of the process hole is chamfered.

3. The basket lifting device according to claim 1, characterized in that, The spacer pin includes a pin body and a pin head. The pin body can be inserted into the spacer pin hole, and the pin head is a flat structure with a certain thickness, which can separate the first material tray and the second material tray.

4. The basket lifting device according to claim 1, characterized in that, An elongated hole is provided along the longitudinal direction of the connecting plate, and a reinforcing rod is inserted into the elongated hole.

5. The basket lifting device according to claim 1, characterized in that, The fixing component includes a tray fixing block, a fixing block rotating shaft, and a fixing block stop shaft; The fixed block shaft passes through the middle of the connecting plate, and the material tray fixing block is rotatably connected to the fixed block shaft; the fixed block stop shaft passes through the connecting plate and is located on one side of the material tray fixing block.

6. The basket-lifting device according to claim 5, characterized in that, Fastening screws are also provided on the side of the connecting plate to lock the rotating shaft of the fixing block.

7. The basket-lifting device according to claim 1, characterized in that, The basket frame assembly, the fixing assembly, and the tray assembly are all made of high-performance engineering plastics or rubber materials.

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