Steam distribution valve for vacuum coating and vacuum coating method

Abstract

The invention relates to the technical field of vacuum coating, in particular to a steam distribution valve for vacuum coating and a vacuum coating method.A substrate to be coated transversely penetrates into an evaporation chamber, a gas distribution assembly comprises a gas distribution cover plate connected to the bottom end of the evaporation chamber in a sealed mode, a gas channel is connected to the gas distribution cover plate, and the top end of the gas channel extends into the evaporation chamber; an a-area steam nozzle, a b-area steam nozzle and a c-area steam nozzle are sequentially arranged in the length direction of the air distribution cover plate, the air control chamber is obliquely connected to the bottom end of the air distribution cover plate, the bottom end of the air channel extends into the air control chamber and is correspondingly provided with a valve hole a, a valve hole b and a valve hole c, the evaporator is connected to the lower portion of the side end of the air control chamber, and the valve element is driven by the driver to move in the axial direction of the valve element. And the valve elements are used for adjusting the distances between the head ends of the valve elements and the corresponding valve hole a, the valve hole b and the valve hole c, so that the air outlet proportion of the nozzles is adjusted and controlled, and regional real-time flow control of steam is achieved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a steam distribution valve for vacuum coating and a vacuum coating method. Background Art

[0002] Vacuum coating refers to a process method in which material molecules are evaporated or sputtered in a physical or chemical manner under vacuum conditions, and then reach and condense on the surface of the coated part to form a thin film. In the existing vacuum evaporation process, solid materials can be heated to gasify or sublimate to produce particle vapor. Due to the mechanical energy of heating and the density change caused by heating, the vapor is naturally ejected upward from the upper opening or multiple openings of the crucible, and flies to the surface of the substrate in the form of thermodynamic motion to solidify into a film. For example, a vertical vapor distribution device for coating vapor and its use method disclosed in Chinese patent document CN118996341A realizes the solution of coating in the form of vertical upward vapor flow of a horizontal evaporator or in the form of lateral horizontal spray vapor flow. Among them, the method of natural upward spray of evaporator vapor commonly used in the existing vacuum evaporation process cannot realize the real-time flow control of steam in different regions, that is, it is impossible to control the thickness of the evaporated film in each region on the coated substrate in real time, so it needs further optimization and improvement. Summary of the invention

[0003] In view of this, the purpose of the present invention is to propose a steam distribution valve for vacuum coating and a vacuum coating method to solve the problem that the existing vacuum evaporation process cannot achieve real-time flow control of steam in different regions, that is, it is impossible to control the thickness of the evaporated film in each area on the coating substrate in real time.

[0004] Based on the above purpose, the present invention provides a steam distribution valve for vacuum coating, which is arranged in a vacuum coating system. The vacuum coating system includes a evaporation chamber, a gas distribution component, a gas control chamber, and an evaporator connected in sequence:

[0005] The evaporation chamber is designed to be horizontal, and the substrate to be coated is placed horizontally in the evaporation chamber;

[0006] The gas distribution assembly includes a gas distribution cover plate sealedly connected to the bottom end of the evaporation chamber, the gas distribution cover plate is connected to a gas channel, the top end of the gas channel extends into the evaporation chamber, and steam nozzles in area a, area b, and area c are sequentially arranged along the length direction thereof, the gas control chamber is obliquely connected to the bottom end of the gas distribution cover plate, the bottom end of the gas channel extends into the gas control chamber, and valve holes a, valve holes b, and valve holes c are correspondingly opened, and the evaporator is connected to the lower side end of the gas control chamber;

[0007] The bottom end of the air control chamber is sealed and connected with a distribution valve flange, and a distribution valve assembly is connected to the distribution valve flange. The distribution valve assembly includes a base fixedly connected to the outside of the distribution valve flange, and a plurality of drivers are connected to the base. A plurality of valve cores are penetrated through the distribution valve flange, and the axial direction of each valve core corresponds to the axial direction of valve hole a, valve hole b, and valve hole c respectively. The tail end of the valve core extends out of the air control chamber and is transmission-connected to the driver. The valve core is driven by the driver to move along its axial direction, so as to adjust the distance between the head end of each valve core and the corresponding valve hole a, valve hole b, and valve hole c.

[0008] Preferably, the top of the air control chamber is connected to an air control flange, and is connected to the bottom of the air distribution cover plate through the air control flange. The top of the evaporator is provided with an inclined air outlet, and the top of the inclined air outlet is connected to a steam flange, and is connected to the lower side end of the air control chamber through the steam flange.

[0009] Preferably, the top length direction of the gas channel is perpendicular to the lateral moving direction of the substrate, and multiple groups of gas distribution components, gas control chambers, and evaporators are arranged at intervals along the lateral moving direction of the substrate.

[0010] Preferably, the output end of the driver is connected to a driving slide rod, one end of the driving slide rod is connected to a driving connecting rod, and one end of the driving connecting rod is connected to the valve core.

[0011] Preferably, a sealing bellows is sleeved on one end of the valve core extending into the air control chamber.

[0012] Preferably, the sealing bellows is divided into a first bellows connected to the bottom end of the air control chamber, and a second bellows connected to the upper end of the first bellows. The first bellows is elastically connected to the bottom end of the air control chamber, a connecting ring is connected between the first bellows and the second bellows, a sealing ring is connected to the top end of the second bellows, the sealing ring is fixedly connected to the valve core, a movable sleeve is elastically connected to the bottom end of the air channel, a connecting rope is connected between the movable sleeve and the connecting ring, and the air pressure fluctuation in the air control chamber drives the movable sleeve to move back and forth along its axial direction, and drives the connecting ring to move synchronously.

[0013] Preferably, the connecting rope is designed as a retaining net structure at the outer side of the sealing bellows.

[0014] The present invention also provides a vacuum coating method, comprising the following steps:

[0015] S1. The evaporation material is heated to the evaporation temperature in the evaporator, the evaporation material is vaporized to generate a particle vapor flow, and the vapor enters the gas control chamber;

[0016] S2. The heater in the gas control room further heats the steam entering the gas control room to a higher gasification temperature;

[0017] S3. Each valve core is opened according to the control ratio, so that the steam enters the gas distribution component through valve hole a, valve hole b, and valve hole c respectively;

[0018] S4. The heater of the gas distribution component further heats the steam entering the gas distribution component to a higher vaporization temperature, and the steam is ejected through the steam nozzles in area a, area b, and area c respectively, and reaches the surface of the substrate to solidify into a film.

[0019] Preferably, a sealing bellows is sleeved on one end of the valve core extending into the air control chamber, and the sealing bellows can be divided into a first bellows connected to the bottom end of the air control chamber, and a second bellows connected to the upper end of the first bellows, a connecting ring is connected between the first bellows and the second bellows, a sealing ring is connected to the top end of the second bellows, the sealing ring is fixedly connected to the valve core, and at the same time, a movable sleeve is sleeved on the bottom end of the air channel, and a connecting rope is connected between the movable sleeve and the connecting ring. During evaporation coating, the movable sleeve is affected by the air pressure fluctuations in the evaporator and the air control chamber, and is pushed to move unidirectionally or reciprocatingly along its axial direction, so that the distance between the head end of the valve core and the valve hole is adaptively adjusted, and at the same time, the connecting ring is driven to move synchronously, and the first bellows and the second bellows are driven to telescope.

[0020] The beneficial effects of the present invention are as follows: the evaporation chamber is designed to be horizontal, and the substrate to be coated is horizontally arranged in the evaporation chamber, the gas distribution component includes an air distribution cover plate sealed and connected to the bottom end of the evaporation chamber, the air distribution cover plate is connected to an air channel, the top of the air channel extends into the evaporation chamber, and steam nozzles in area a, area b, and area c are sequentially arranged along its length direction, the air control chamber is obliquely connected to the bottom end of the air distribution cover plate, the bottom end of the air channel extends into the air control chamber, and valve holes a, valve holes b, and valve holes c are correspondingly opened, the evaporator is connected to the lower side end of the air control chamber, the bottom end of the air control chamber is sealed and connected to a distribution valve flange, the distribution valve flange is connected to a distribution valve component, and the distribution valve component includes a base fixedly connected to the outer side of the distribution valve flange , multiple drivers are connected to the base, and multiple valve cores are penetrated on the distribution valve flange. The axial direction of each valve core corresponds to the axial direction of valve hole a, valve hole b, and valve hole c respectively. The tail end of the valve core extends out of the air control chamber and is connected to the driver for transmission. The valve core is driven by the driver to move along its axial direction to adjust the distance between the head end of each valve core and the corresponding valve hole a, valve hole b, and valve hole c, thereby adjusting the proportion of steam evaporated from the evaporator flowing along valve hole a, valve hole b, and valve hole c respectively, so as to control the gas outlet ratio of the steam nozzle in area a, the steam nozzle in area b, and the steam nozzle in area c, thereby realizing real-time flow control of steam in different regions, that is, real-time control of the thickness of the evaporated film in each region on the coating substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic diagram of the overall top view of the vacuum coating system of the present invention;

[0023] Figure 2 It is a schematic diagram of the overall structure of the vacuum coating system of the present invention when viewed from above;

[0024] Figure 3 It is a schematic diagram of the top view of the evaporation chamber of the present invention;

[0025] Figure 4 It is a front view structural schematic diagram of the evaporation chamber of the present invention;

[0026] Figure 5 It is a schematic diagram of the explosion structure of the vacuum coating system of the present invention;

[0027] Figure 6 It is a schematic diagram of the internal structure of the vacuum coating system of the present invention;

[0028] Figure 7 It is a structural schematic diagram of the air distribution assembly of the present invention;

[0029] Figure 8 It is a schematic diagram of the overall structure of the gas control chamber of the present invention;

[0030] Fig. 9 It is a schematic diagram of the internal structure of the gas control chamber of the present invention;

[0031] Fig.10 It is a structural schematic diagram of the distribution valve assembly of the present invention;

[0032] Fig.11 It is a schematic diagram of the internal structure of the vacuum coating system with a movable sleeve and a connecting rope in the present invention;

[0033] Fig.12 It is a structural schematic diagram of the movable sleeve of the present invention.

[0034] The markings in the figure are:

[0035] 100. substrate; 1. evaporation chamber; 2. gas distribution assembly; 3. gas control chamber; 31. gas control flange; 4. evaporator; 41. inclined gas outlet; 42. steam flange; 5. gas distribution cover; 6. gas channel; 60. movable sleeve; 61. steam nozzle in area a; 62. steam nozzle in area b; 63. steam nozzle in area c; 64. valve hole a; 65. valve hole b; 66. valve hole c; 7. distribution valve flange; 8. distribution valve assembly; 80. valve core; 81. base; 82. driver; 83. driving slide rod; 84. driving connecting rod; 9. sealing bellows; 91. first bellows; 92. second bellows; 93. connecting ring; 94. sealing ring; 10. connecting rope. DETAILED DESCRIPTION

[0036] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0037] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0038] A steam distribution valve for vacuum coating, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10As shown, it is arranged in a vacuum coating system, and the vacuum coating system includes a deposition chamber 1, an air distribution component 2, an air control chamber 3, and an evaporator 4 connected in sequence. The deposition chamber 1 is horizontally designed, and the substrate 100 to be coated is horizontally arranged in the deposition chamber 1. The air distribution component 2 includes an air distribution cover plate 5 sealed and connected to the bottom end of the deposition chamber 1, and an air channel 6 is connected to the air distribution cover plate 5. The top of the air channel 6 extends into the deposition chamber 1, and steam nozzles 61 in area a, steam nozzles 62 in area b, and steam nozzles 63 in area c are arranged in sequence along the length direction thereof. The air control chamber 3 is obliquely connected to the bottom end of the air distribution cover plate 5, and the bottom end of the air channel 6 extends into the air control chamber 3, and valve holes a64, valve holes b65, and valve holes c66 are opened correspondingly. The evaporator 4 is connected Below the side end of the air control chamber 3, the bottom end of the air control chamber 3 is sealed and connected with a distribution valve flange 7, and a distribution valve assembly 8 is connected to the distribution valve flange 7. The distribution valve assembly 8 includes a base 81 fixedly connected to the outer side of the distribution valve flange 7, and a plurality of drivers 82 are connected to the base 81. A plurality of valve cores 80 are penetrated by the distribution valve flange 7, and the axial direction of each valve core 80 corresponds to the axial direction of the valve hole a64, the valve hole b65, and the valve hole c66 respectively. The tail end of the valve core 80 extends out of the air control chamber 3 and is transmission-connected with the driver 82. The valve core 80 is driven by the driver 82 to move along its axial direction, so as to adjust the distance between the head end of each valve core 80 and the corresponding valve hole a64, the valve hole b65, and the valve hole c66.

[0039] The present invention is based on the existing vacuum vapor coating equipment and process, including a vacuum coating system, the vacuum coating system including a deposition chamber 1, a gas distribution component 2, a gas control chamber 3, and an evaporator 4 connected in sequence, the deposition chamber 1 is horizontally designed, the substrate 100 to be coated is horizontally arranged in the deposition chamber 1, and the film is coated on the substrate 100 by naturally spraying steam upward, the gas distribution component 2 includes a gas distribution cover plate 5 sealed and connected to the bottom end of the deposition chamber 1, and the gas distribution cover plate 5 is connected to an air channel 6, The top of the gas channel 6 extends into the evaporation chamber 1, and is provided with steam nozzles 61 in zone a, steam nozzles 62 in zone b, and steam nozzles 63 in zone c in sequence along its length direction. The gas control chamber 3 is obliquely connected to the bottom end of the gas distribution cover plate 5. The bottom end of the gas channel 6 extends into the gas control chamber 3, and valve holes a64, valve holes b65, and valve holes c66 are correspondingly opened. The evaporator 4 is connected to the lower side end of the gas control chamber 3. The bottom end of the gas control chamber 3 is sealed and connected to a distribution valve flange 7, and the distribution valve flange 7 is connected There is a distribution valve assembly 8, which includes a base 81 fixedly connected to the outer side of the distribution valve flange 7, and a plurality of drivers 82 are connected to the base 81. A plurality of valve cores 80 are penetrated on the distribution valve flange 7, and the axial directions of each valve core 80 correspond to the axial directions of the valve holes a64, b65 and c66 respectively. The tail end of the valve core 80 extends out of the air control chamber 3 and is connected to the driver 82 for transmission, thereby driving the valve core 80 to move along its axial direction through the driver 82, so as to adjust the distance between the head end of each valve core 80 and the corresponding valve hole a64, b65 and c66, thereby adjusting the proportion of the steam evaporated from the evaporator 4 flowing along the valve holes a64, b65 and c66 respectively, so as to adjust the gas outlet ratio of the steam nozzle 61 in zone a, the steam nozzle 62 in zone b and the steam nozzle 63 in zone c, thereby realizing the real-time flow control of the steam in different regions, that is, the real-time control of the thickness of the evaporated film in each region on the coating substrate.

[0040] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 As shown, the top of the air control chamber 3 is connected to an air control flange 31, and is connected to the bottom end of the air distribution cover plate 5 through the air control flange 31. The top of the evaporator 4 is provided with an inclined air outlet 41, and the top of the inclined air outlet 41 is connected to a steam flange 42, and is connected to the lower side end of the air control chamber 3 through the steam flange 42.

[0041] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 As shown, the top length direction of the air channel 6 is perpendicular to the lateral moving direction of the substrate 100. More preferably, a plurality of groups of the air distribution components 2, the air control chamber 3, and the evaporator 4 are arranged at intervals along the lateral moving direction of the substrate 100.

[0042] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 As shown, the output end of the driver 82 is connected to a driving slide rod 83, one end of the driving slide rod 83 is connected to a driving connecting rod 84, and one end of the driving connecting rod 84 is connected to the valve core 80. Specifically, the driver 82 can drive the internal lead screw to rotate, thereby transmitting the movement of the nut member engaged on the internal lead screw, and then driving the driving slide rod 83 fixedly connected to the nut member to move axially. It is also possible to adopt a driving method such as an existing conventional telescopic cylinder to directly drive the driving slide rod 83 to move axially, and then drive the driving connecting rod 84 and the valve core 80 to move synchronously to achieve a regulating effect.

[0043] In an embodiment of the present invention, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 As shown, a sealing bellows 9 is sleeved on one end of the valve core 80 extending into the air control chamber 3 to ensure the sealing inside the air control chamber 3.

[0044] As another optional embodiment of the present invention, Fig.11 , Fig.12As shown, the sealing bellows 9 can be divided into a first bellows 91 connected to the bottom end of the air control chamber 3, and a second bellows 92 connected to the upper end of the first bellows 91. The first bellows 91 is elastically connected to the bottom end of the air control chamber 3. Specifically, the elastic connection between the first bellows 91 and the bottom end of the air control chamber 3 can be achieved by using conventional elastic components such as spring groups. A connecting ring 93 is connected between the first bellows 91 and the second bellows 92. A sealing ring 94 is connected to the top of the second bellows 92. The sealing ring 94 is fixedly connected to the valve core 80, so that the axial position of each valve core 80 is adjusted by the distribution valve assembly 8, and the second bellows 92 is pulled to freely expand and contract. At the same time, the bottom end of the air channel 6 is sleeved with a movable sleeve 60, and conventional elastic components such as spring groups or discs are used between the movable sleeve 60 and the bottom end of the air channel 6. Elastic components such as springs are used to achieve elastic connection, and a connecting rope 10 is connected between the movable sleeve 60 and the connecting ring 93. Therefore, during evaporation coating, although the positions of the valve cores 80 remain unchanged, that is, the steam flow ratio of each passage is kept fixed, there are inevitable air pressure fluctuations in the evaporator 4 and the air control chamber 3. For example, as the fixed material evaporates, the steam flow in the evaporator 4 and the air control chamber 3 has an overall downward trend, thereby pushing the movable sleeve 60 to move unidirectionally or reciprocatingly along its axial direction, so that the distance between the head end of the valve core 80 and the valve hole is also adaptively adjusted without external intervention, and at the same time drives the connecting ring 93 to move synchronously, that is, drives the first bellows 91 and the second bellows 92 to telescope, which is beneficial to avoid that the sealing bellows 9 remains stationary for a long time and is affected by partial steam deposition, thereby affecting its normal telescopic use.

[0045] More preferably, the connecting rope 10 is designed as a retaining net structure at the outer side of the sealing bellows 9, which on the one hand helps to block some steam from being deposited on the sealing bellows 9, and on the other hand helps the connecting rope 10 or the retaining net to scrape the surface of the bellows. More preferably, a scraper strip can be provided on the back of the retaining net to further clean the surface of the bellows.

[0046] The present invention also provides a method for using a steam distribution valve for vacuum coating, comprising the following steps:

[0047] S1. The deposition material is heated in the evaporator 4 to an evaporation temperature such as 270°C, the material is vaporized to generate a particle steam flow, and the steam enters the gas control chamber 3 through the steam flange 42;

[0048] S2. The heater in the gas control chamber 3 further heats the steam entering the gas control chamber 3 to a higher gasification temperature such as 300°C;

[0049] S3. Each valve core 80 is opened according to the control ratio, so that the steam enters the gas distribution component 2 through the valve hole a64, the valve hole b65, and the valve hole c66 respectively;

[0050] S4. The heater of the gas distribution component 2 further heats the steam entering the gas distribution component 2 to a higher vaporization temperature, such as 390°C, and ejects the steam through the steam nozzles 61 in zone a, the steam nozzles 62 in zone b, and the steam nozzles 63 in zone c, and reaches the coating surface to solidify into a film;

[0051] Among them, when the steam enters the gas control chamber 3, each valve core 80 needs to be controlled from level 0 (completely closed) to level 10 (completely opened), and the control distance between the conical top of the front end of the axially sliding valve core 80 and the valve hole is 0-50mm (equivalent to the opening level 0-10); after the valve core 80 slides downward along the axial direction, the corresponding valve hole is opened, and the steam is diverted through the corresponding valve hole to enter the gas distribution box, and finally sprayed to the substrate 100 from the steam nozzle of the corresponding area to form a film. The opening control ratio of each valve core 80 is adjusted accordingly according to the requirements of the process film thickness control. For example, the opening ratio of each valve core 80 is 3:3.5:3, and the jet flow ratio of the corresponding steam nozzle 61 in area a, the steam nozzle 62 in area b, and the steam nozzle 63 in area c is 3:3.5:3.

[0052] Preferably, a sealing bellows 9 is sleeved on one end of the valve core 80 extending into the air control chamber 3. The sealing bellows 9 can be divided into a first bellows 91 connected to the bottom end of the air control chamber 3, and a second bellows 92 connected to the upper end of the first bellows 91. A connecting ring 93 is connected between the first bellows 91 and the second bellows 92. A sealing ring 94 is connected to the top of the second bellows 92. The sealing ring 94 is fixedly connected to the valve core 80. At the same time, a movable sleeve 60 is sleeved on the bottom end of the air channel 6, and the movable sleeve 60 and the connecting ring 93 are connected. A connecting rope 10 is connected therebetween, so that during evaporation coating, although the position of each valve core 80 remains stationary, due to the inevitable pressure fluctuations in the evaporator 4 and the gas control chamber 3, the movable sleeve 60 is pushed to move unidirectionally or reciprocatingly along its axial direction, so that the distance between the head end of the valve core 80 and the valve hole is also adaptively adjusted, and at the same time, the connecting ring 93 is driven to move synchronously, that is, the first bellows 91 and the second bellows 92 are driven to telescope, which is beneficial to avoid the sealing bellows 9 from being affected by partial vapor deposition while remaining stationary for a long time.

[0053] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

Claims

1. A steam distribution valve for vacuum coating, provided in a vacuum coating system, wherein the vacuum coating system comprises a deposition chamber (1), a gas distribution assembly (2), a gas control chamber (3), and an evaporator (4) connected in sequence, characterized in that: The evaporation chamber (1) is of horizontal design, and the substrate (100) to be coated is arranged transversely in the evaporation chamber (1); The gas distribution assembly (2) comprises a gas distribution cover plate (5) sealedly connected to the bottom end of the vapor deposition chamber (1); the gas distribution cover plate (5) is connected to a gas channel (6); the top end of the gas channel (6) extends into the vapor deposition chamber (1); and steam nozzles (61) in zone a, steam nozzles (62) in zone b, and steam nozzles (63) in zone c are sequentially arranged along the length direction thereof; the gas control chamber (3) is obliquely connected to the bottom end of the gas distribution cover plate (5); the bottom end of the gas channel (6) extends into the gas control chamber (3), and valve holes a (64), valve holes b (65), and valve holes c (66) are correspondingly opened; and the evaporator (4) is connected to the lower side end of the gas control chamber (3); The bottom end of the air control chamber (3) is sealedly connected to a distribution valve flange (7), and a distribution valve assembly (8) is connected to the distribution valve flange (7). The distribution valve assembly (8) includes a base (81) fixedly connected to the outer side of the distribution valve flange (7), and a plurality of drivers (82) are connected to the base (81). A plurality of valve cores (80) are passed through the distribution valve flange (7), and the axial direction of each valve core (80) corresponds to the axial direction of the valve hole a (64), the valve hole b (65), and the valve hole c (66). The tail end of the valve core (80) extends out of the air control chamber (3) and is transmission-connected to the driver (82). The driver (82) drives the valve core (80) to move along its axial direction, so as to adjust the distance between the head end of each valve core (80) and the corresponding valve hole a (64), valve hole b (65), and valve hole c (66).

2. A steam distribution valve for vacuum coating according to claim 1, characterized in that: The top end of the gas control chamber (3) is connected to an gas control flange (31), and is connected to the bottom end of the gas distribution cover plate (5) via the gas control flange (31); the top end of the evaporator (4) is provided with an inclined gas outlet (41); the top end of the inclined gas outlet (41) is connected to a steam flange (42), and is connected to the lower side end of the gas control chamber (3) via the steam flange (42).

3. A steam distribution valve for vacuum coating according to claim 1, characterized in that: The top length direction of the gas channel (6) is perpendicular to the lateral moving direction of the substrate (100), and the gas distribution assembly (2), the gas control chamber (3), and the evaporator (4) are arranged in multiple groups at intervals along the lateral moving direction of the substrate (100).

4. A steam distribution valve for vacuum coating according to claim 1, characterized in that: The output end of the driver (82) is connected to a driving slide rod (83), one end of the driving slide rod (83) is connected to a driving connecting rod (84), and one end of the driving connecting rod (84) is connected to the valve core (80).

5. The steam distribution valve for vacuum coating according to claim 1, characterized in that: A sealing bellows (9) is sleeved on one end of the valve core (80) extending into the air control chamber (3).

6. A steam distribution valve for vacuum coating according to claim 5, characterized in that: The sealing bellows (9) is divided into a first bellows (91) connected to the bottom end of the air control chamber (3), and a second bellows (92) connected to the upper end of the first bellows (91). The first bellows (91) and the bottom end of the air control chamber (3) are elastically connected. A connecting ring (93) is connected between the first bellows (91) and the second bellows (92). A sealing ring (94) is connected to the top end of the second bellows (92). The sealing ring (94) is fixedly connected to the valve core (80). The bottom end of the air channel (6) is elastically connected to a movable sleeve (60). A connecting rope (10) is connected between the movable sleeve (60) and the connecting ring (93). The air pressure fluctuation in the air control chamber (3) drives the movable sleeve (60) to move back and forth along its axial direction, and drives the connecting ring (93) to move synchronously.

7. A steam distribution valve for vacuum coating according to claim 6, characterized in that: The connecting rope (10) is designed as a retaining net structure at the outer side of the sealing bellows (9).

8. A vacuum coating method, the method using the vacuum coating steam distribution valve according to any one of claims 1 to 7, characterized in that: The steps include: S1. The deposition material is heated to an evaporation temperature in an evaporator (4), the deposition material is vaporized to generate a particle vapor flow, and the vapor enters the gas control chamber (3); S2. The heater in the gas control chamber (3) further heats the steam entering the gas control chamber (3) to a higher gasification temperature; S3. Each valve core (80) is opened in a controlled proportion, so that steam enters the gas distribution assembly (2) through valve hole a (64), valve hole b (65), and valve hole c (66); S4. The heater of the gas distribution component (2) further heats the steam entering the gas distribution component (2) to a higher vaporization temperature, and the steam is ejected through the steam nozzles (61) in zone a, the steam nozzles (62) in zone b, and the steam nozzles (63) in zone c, respectively, and reaches the surface of the substrate (100) to solidify into a film.

9. A vacuum coating method according to claim 8, characterized in that: A sealing bellows (9) is sleeved on one end of the valve core (80) extending into the air control chamber (3). The sealing bellows (9) can be divided into a first bellows (91) connected to the bottom end of the air control chamber (3), and a second bellows (92) connected to the upper end of the first bellows (91). A connecting ring (93) is connected between the first bellows (91) and the second bellows (92). A sealing ring (94) is connected to the top end of the second bellows (92). The sealing ring (94) is fixedly connected to the valve core (80). At the same time, a movable sleeve (60) is sleeved on the bottom end of the air channel (6), and a connecting rope (10) is connected between the movable sleeve (60) and the connecting ring (93). When evaporation coating is performed, the movable sleeve (60) is driven to move unidirectionally or reciprocatingly along its axial direction under the influence of air pressure fluctuations in the evaporator (4) and the air control chamber (3), so that the distance between the head end of the valve core (80) and the valve hole is adaptively adjusted, and at the same time, the connecting ring (93) is driven to move synchronously, and the first bellows (91) and the second bellows (92) are driven to move in a telescopic manner.

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