Small melting chamber

Abstract

The invention provides a small melting chamber which comprises an upper water cooling plate, the top face of the upper water cooling plate is connected with an electrode opening and closing mechanism through three connecting columns, the bottom face of the upper water cooling plate is installed on the small melting chamber through a telescopic corrugated pipe, the opening and closing angle of the electrode opening and closing mechanism is 8 degrees, the electrode opening and closing mechanism comprises six electrodes which are arranged at intervals, and the six electrodes are connected with the telescopic corrugated pipe. Six electrode opening and closing kidney-shaped holes are formed in the upper water cooling plate at intervals, the six electrodes penetrate through the corresponding electrode opening and closing kidney-shaped holes respectively, and the length of each electrode opening and closing kidney-shaped hole is 120 mm. An electrode opening and closing mechanism with the opening and closing angle of 8 degrees is adopted, an upper water cooling plate is connected to the lower portion of a motor opening and closing mechanism through a connecting column, the stroke range of the upper water cooling plate is increased and decreased by about 800 mm along with opening and closing of a motor, a telescopic corrugated pipe is used for sealing, and the telescopic corrugated pipe is made of a high-temperature-resistant stainless steel material; and the length of the electrode opening and closing waist hole of the small melting chamber through which the electrode penetrates is reduced to 120mm from the original length, so that the sealing performance is better.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment, and in particular to a small melting chamber. Background Art

[0002] The small melting chamber is sealed with a quartz slider; the lower water-cooling plate is installed with a fixed bracket, and then the blowing mechanism is installed on the bracket. The lower water-cooling plate is fixed and the blowing mechanism is also fixed relative to the lower water-cooling plate; there is an air blowing mechanism on the top of the small melting chamber for air intake, and an air inlet on the bottom for air intake, which has the following technical defects: 1) The sealing effect is not ideal after using the quartz slider, and the quartz slider is not actually used on site; 2) The bracket and the lower water-cooling plate are fixed, and the lower water-cooling plate is fixed, and the blowing mechanism is also fixed relative to the lower water-cooling plate, which cannot meet the use requirements; 3) The air intake of the blowing mechanism and the air inlet, the gases collide with each other in the process of flowing to the water-cooled exhaust duct, forming an extremely turbulent spatial airflow.

[0003] Therefore, how to design a small melting chamber becomes an urgent problem to be solved. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides a small melting chamber to solve at least one of the above technical problems.

[0005] The technical solution of the present invention is: a small melting chamber, including an upper water-cooled plate, the top surface of the upper water-cooled plate is connected to the electrode opening and closing mechanism through three connecting columns, the bottom surface of the upper water-cooled plate is installed on the small melting chamber through a telescopic bellows, the opening and closing angle of the electrode opening and closing mechanism is 8°, the electrode opening and closing mechanism includes six electrodes arranged at intervals, and six electrode opening and closing waist holes arranged at intervals are arranged on the upper water-cooled plate. The six electrodes pass through the corresponding electrode opening and closing waist holes respectively, and the length of the electrode opening and closing waist hole is 120 mm.

[0006] The present invention adopts an electrode opening and closing mechanism with an opening and closing angle of 8°. The upper water-cooling plate is connected to the bottom of the motor opening and closing mechanism by a connecting column. The weight of the upper water-cooling plate is about 300kg, so 12 counterweights are added, each weighing 25kg. The length of the connecting column is lengthened. After assembly, the stroke of the lower counterweight is measured to be 800mm. The stroke range of the upper water-cooling plate is about 800mm as the motor opens and closes. A telescopic bellows is used for sealing. The telescopic bellows is made of high-temperature resistant stainless steel material and can withstand high temperatures above 500°C. The maximum stroke is 800mm and the minimum length is about 50mm. The matching electrode opening and closing stroke is designed; the electrode opening and closing waist hole of the small melting chamber through which the electrode passes is reduced from the original length to 120mm, and the small melting chamber has better sealing performance, which solves the technical defects of the prior art that the sealing effect is not ideal after using a quartz slider and the quartz slider is not actually used on site.

[0007] Preferably, the top surface of the small melting chamber is provided with second guide mechanisms arranged at intervals and second lifting motor structures arranged at intervals, and the output ends of the two second lifting motor structures and the two second guide mechanisms are connected to the lower water cooling plate.

[0008] The present invention adopts a second lifting motor structure for lifting the lower water-cooling plate up and down, and a second guide mechanism is connected to the upper end of the small melting chamber. The lower water-cooling plate is driven by the second lifting motor structure to make vertical movements relative to the mold, and the position of the lower water-cooling plate relative to the mold can be adjusted. The stroke is about 270mm. The structure of the lower water-cooling plate that lifts up and down is more flexible. Compared with the structure with unchanged position, it is less rigid and better adapts to the use requirements. It solves the technical defect that the prior art adopts a fixed bracket and a lower water-cooling plate, the lower water-cooling plate is fixed, and the blowing mechanism is also fixed relative to the position of the lower water-cooling plate, which cannot adapt to the use requirements.

[0009] Preferably, a water-cooled exhaust duct is provided in the small melting chamber, the outlet of the water-cooled exhaust duct is located at one end of the lower water-cooling plate, and a blowing mechanism is provided at the other end of the lower water-cooling plate; an air inlet is provided in the middle of one end surface of the small melting chamber, the air inlet is close to the blowing mechanism, and the air inlet is higher than the lower water-cooling plate.

[0010] The present invention adopts a water-cooled exhaust duct with an outlet located at one end of the lower water-cooled plate, and an air inlet and a blowing mechanism located at the other end of the lower water-cooled plate. The air inlet is consistent with the air outlet direction of the blowing mechanism, and the air inlet is higher than the lower water-cooled plate. The air inlet of the prior art is moved from below the lower water-cooled plate to above the lower water-cooled plate, thereby improving the air flow environment inside the small melting chamber and solving the technical defects of the prior art in which the blowing mechanism and the air inlet intake air, the gases collide with each other in the process of flowing to the water-cooled exhaust duct, thereby forming extremely turbulent spatial airflow. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional diagram of the installation structure of the present invention.

[0012] Figure 2 It is a structural schematic diagram of the connection between the upper water cooling plate and the electrode opening and closing mechanism of the present invention.

[0013] Figure 3 It is a schematic structural diagram of the lower water cooling plate lifting mechanism of the present invention.

[0014] Figure 4 It is a schematic diagram of the air inlet structure of the rear panel of the present invention.

[0015] In the figure: 1. Electrode opening and closing mechanism; 2. First connecting column; 3. Upper water-cooled plate; 4. Second connecting column; 5. Telescopic bellows; 6. First guide mechanism; 7. First lifting motor structure; 8. First connecting bracket; 9. Second connecting bracket; 10. Second lifting motor structure; 11. Water-cooled exhaust duct; 12. Lower water-cooled plate; 13. Blowing mechanism; 14. Air inlet; 15. Second guide mechanism. DETAILED DESCRIPTION

[0016] The present invention will be further described below in conjunction with the accompanying drawings.

[0017] See also Figure 1-4 The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the present invention. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the present invention without substantially changing the technical content.

[0018] Embodiment 1: A small melting chamber, referring to Figure 1 , Figure 2, including an upper water-cooled plate 3, the top surface of the upper water-cooled plate 3 is connected to the electrode opening and closing mechanism 1 through three connecting columns, the bottom surface of the upper water-cooled plate 3 is installed on the small melting chamber through a telescopic bellows 5, the opening and closing angle of the electrode opening and closing mechanism 1 is 8°, the electrode opening and closing mechanism 1 includes six electrodes arranged at intervals, and six electrode opening and closing waist holes arranged at intervals are provided on the upper water-cooled plate 3. The six electrodes pass through the corresponding electrode opening and closing waist holes respectively, and the length of the electrode opening and closing waist hole is 120 mm. The present invention adopts an electrode opening and closing mechanism with an opening and closing angle of 8°. The upper water-cooling plate is connected to the bottom of the motor opening and closing mechanism by a connecting column. The weight of the upper water-cooling plate is about 300kg, so 12 counterweights are added, each weighing 25kg. The length of the connecting column is lengthened. After assembly, the stroke of the lower counterweight is measured to be 800mm. The stroke range of the upper water-cooling plate is about 800mm as the motor opens and closes. A telescopic bellows is used for sealing. The telescopic bellows is made of high-temperature resistant stainless steel material and can withstand high temperatures above 500°C. The maximum stroke is 800mm and the minimum length is about 50mm. The matching electrode opening and closing stroke is designed; the electrode opening and closing waist hole of the small melting chamber through which the electrode passes is reduced from the original length to 120mm, and the small melting chamber has better sealing performance, which solves the technical defects of the prior art that the sealing effect is not ideal after using a quartz slider and the quartz slider is not actually used on site.

[0019] Embodiment 2: Based on Embodiment 1, refer to Figure 3 The top surface of the small melting chamber is provided with a second guide mechanism 15 arranged at intervals and a second lifting motor structure 10 arranged at intervals. The output ends of the two second lifting motor structures 10 and the two second guide mechanisms 15 are connected to the lower water-cooling plate 12. The present invention adopts a second lifting motor structure and a second guide mechanism for lifting the lower water-cooling plate up and down to connect the upper end of the small melting chamber. The lower water-cooling plate is driven by the second lifting motor structure to make vertical movements relative to the mold. The driving force is sufficient to adjust the position of the lower water-cooling plate relative to the mold. The stroke is about 270mm. The structure of the lower water-cooling plate that lifts up and down is more flexible. Compared with the structure with unchanged position, it is less rigid and better adapts to the use requirements. It solves the technical defects of the prior art that the fixed bracket and the lower water-cooling plate are used, the lower water-cooling plate is fixed, and the blowing mechanism is also fixed relative to the position of the lower water-cooling plate, which cannot adapt to the use requirements.

[0020] Embodiment 3: On the basis of Embodiment 1, a water-cooled exhaust duct 11 is provided in the small melting chamber, the outlet of the water-cooled exhaust duct 11 is located at one end of the lower water-cooled plate 12, and a blowing mechanism 13 is provided at the other end of the lower water-cooled plate 12; an air inlet 14 is provided in the middle of one end surface of the small melting chamber, the air inlet 14 is close to the blowing mechanism 13, and the air inlet 14 is higher than the lower water-cooled plate 12. The present invention adopts that the outlet of the water-cooled exhaust duct is located at one end of the lower water-cooled plate, the air inlet and the blowing mechanism are located at the other end of the lower water-cooled plate, the air inlet and the blowing mechanism have the same air outlet direction, the air inlet is higher than the lower water-cooled plate, and the air inlet of the prior art is moved from below the lower water-cooled plate to above the lower water-cooled plate, thereby improving the air flow environment inside the small melting chamber and solving the technical defects of the prior art that the air inlet of the blowing mechanism and the air inlet collide with each other in the process of flowing to the water-cooled exhaust duct, thus forming an extremely turbulent air flow in the space.

[0021] Embodiment 4: Based on Embodiment 3, the water-cooled exhaust duct 11 is an L-shaped structure, the corners of the L-shaped structure are rounded, first connecting brackets 8 are arranged on both sides of the vertical pipe of the L-shaped structure, and second connecting brackets 9 are arranged on both sides of the horizontal pipe of the L-shaped structure. The present invention adopts an L-shaped water-cooled exhaust duct, a first connecting bracket is arranged on both sides of the vertical pipe of the L-shaped structure, and a second connecting bracket is arranged on both sides of the horizontal pipe of the L-shaped structure, and a lifting motor structure that lifts up and down is connected through the first connecting bracket and the first connecting bracket.

[0022] Embodiment 5, on the basis of embodiment 4, the top surface of the small melting chamber is provided with first guide mechanisms 6 arranged at intervals and first lifting motor structures 7 arranged at intervals, the two first guide mechanisms 6 are connected to the first connecting bracket 8, and the output ends of the two first lifting motor structures 7 are connected to the second connecting bracket 9. The present invention adopts a first lifting motor structure and a first guide mechanism for lifting up and down the water-cooled exhaust pipe to be connected to the upper end of the small melting chamber, the water-cooled exhaust pipe is driven by the first lifting motor structure to make vertical movements relative to the mold, the position of the water-cooled exhaust pipe relative to the mold can be adjusted, and the up and down lifting mechanism of the water-cooled exhaust pipe and the up and down lifting mechanism of the lower water-cooled plate are electrically linked.

[0023] Embodiment 6: Based on Embodiment 4, the six electrodes are evenly distributed around the circumference, and the six electrodes are fixedly connected to the first connecting column 2 through connecting rods. The present invention uses six electrodes evenly distributed around the circumference, and the six electrodes are fixedly connected to the first connecting column 2 through connecting rods, so that each electrode can form a motor opening and closing mechanism with an opening and closing angle of 8°.

[0024] Embodiment 7, on the basis of embodiment 4, the three connecting columns include a first connecting column 2, a second connecting column 4 arranged at intervals, the specifications of the three connecting columns are 70 mm in diameter and 150 mm in length, and the connecting flange of each connecting column is fixedly connected using 16 M12 bolts. The present invention uses a first connecting column to connect six electrodes, and two second connecting columns to connect the small melting chamber and the mounting bracket of the first connecting column, which strengthens the strength of the structure and makes the structure stable.

[0025] Embodiment 8: Based on Embodiment 4, Figure 4 The present invention adopts the arrangement of water-through structures on both sides of the air inlet, which improves the turbulent airflow in the original small melting chamber. The original structure of three plates is changed to the current assembly of four water-cooled plates, and the inlet and outlet of the water-through structure are led to the upper end surface of the small melting chamber, which facilitates the connection of water pipes.

[0026] Embodiment 9: Based on Embodiment 8, the size of the air inlet 14 is 300 mm×1500 mm. The present invention adopts an air inlet with a size of 300 mm×1500 mm, which improves the turbulent air flow in the original small melting chamber.

[0027] Embodiment 10: Based on Embodiment 8, a camera and a camera observation hole are installed on one side of the upper water-cooled plate 3 to facilitate external monitoring of the crucible heating production process; the camera mounting frame is connected by 4-point support waist holes, and the camera can be positioned in the up and down direction. The present invention adopts a camera and a camera observation hole installed on one side of the upper water-cooled plate, and the camera can be positioned in the up and down direction, and recording is performed at a suitable position, which is convenient for monitoring data.

[0028] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A small melting chamber, comprising an upper water cooling plate (3), characterized in that: The top surface of the upper water-cooling plate (3) is connected to the electrode opening and closing mechanism (1) via three connecting columns, and the bottom surface of the upper water-cooling plate (3) is installed on the small melting chamber via a telescopic bellows (5). The opening and closing angle of the electrode opening and closing mechanism (1) is 8°. The electrode opening and closing mechanism (1) comprises six electrodes arranged at intervals. The upper water-cooling plate (3) is provided with six electrode opening and closing waist holes arranged at intervals. The six electrodes respectively pass through the corresponding electrode opening and closing waist holes. The length of the electrode opening and closing waist hole is 120 mm.

2. A small melting chamber according to claim 1, characterized in that: The top surface of the small melting chamber is provided with second guide mechanisms (15) arranged at intervals and second lifting motor structures (10) arranged at intervals, and the output ends of the two second lifting motor structures (10) and the two second guide mechanisms (15) are both connected to the lower water cooling plate (12).

3. A small melting chamber according to claim 1, characterized in that: A water-cooled exhaust pipe (11) is provided in the small melting chamber, the outlet of the water-cooled exhaust pipe (11) is located at one end of the lower water-cooled plate (12), and a blowing mechanism (13) is provided at the other end of the lower water-cooled plate (12); an air inlet (14) is provided in the middle of one end surface of the small melting chamber, the air inlet (14) is close to the blowing mechanism (13), and the air inlet (14) is higher than the lower water-cooled plate (12).

4. A small melting chamber according to claim 3, characterized in that: The water-cooled exhaust pipe (11) is an L-shaped structure, the corners of the L-shaped structure are rounded, first connecting brackets (8) are arranged on both sides of the vertical pipe of the L-shaped structure, and second connecting brackets (9) are arranged on both sides of the horizontal pipe of the L-shaped structure.

5. A small melting chamber according to claim 4, characterized in that: The top surface of the small melting chamber is provided with first guide mechanisms (6) arranged at intervals and first lifting motor structures (7) arranged at intervals, the two first guide mechanisms (6) are connected to a first connecting bracket (8), and the output ends of the two first lifting motor structures (7) are connected to a second connecting bracket (9).

6. A small melting chamber according to claim 4, characterized in that: The six electrodes are evenly distributed around the circumference, and the six electrodes are fixedly connected to the first connecting column (2) via a connecting rod.

7. A small melting chamber according to claim 4, characterized in that: The three connecting columns include a first connecting column (2) and second connecting columns (4) arranged at intervals. The three connecting columns have a diameter of 70 mm and a length of 150 mm. The connecting flange of each connecting column is fixedly connected using 16 M12 bolts.

8. A small melting chamber according to claim 4, characterized in that: Water passing structures are arranged on both sides of the air inlet (14), and the inlet and outlet of the water passing structure are led to the top surface of the small melting chamber.

9. A small melting chamber according to claim 8, characterized in that: The size of the air inlet (14) is 300 mm×1500 mm.

10. A small melting chamber according to claim 8, characterized in that: A camera and a camera observation hole are installed on one side of the upper water cooling plate (3), which facilitates external monitoring of the crucible heating production process; the camera mounting frame is connected by four-point support waist holes, and the camera can be positioned in the up and down directions.

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