Spectrum calibration method, calibration device and angle resolution optical path system

Abstract

The invention discloses a spectrum calibration method, a spectrum calibration device and an angle resolution light path system. The calibration method comprises the following steps: controlling a plurality of objective lenses with different set multiplying powers to collect incident light reflected by a standard diffuse reflection plate at a plurality of different set collection angles to obtain a plurality of pieces of reflection spectrum information; establishing a calibration database according to all the obtained reflection spectrum information; the calibration database comprises calibration values corresponding to objective lenses with multiple magnifications under multiple set collection angles, and the multiple set collection angles comprise all the set collection angles; acquiring the actual spectral information of the light emitted by the to-be-detected sample and received by the objective lens and the actual magnification and the actual collection angle of the objective lens for receiving the light emitted by the to-be-detected sample; and correcting the actual spectral information according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information. According to the spectrum calibration method, the calibration device and the angle resolution light path system, the calibration process is simple and convenient, and the spectrum calibration effect can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrum calibration, and in particular to a spectrum calibration method, a calibration device and an angle-resolving optical path system. Background Art

[0002] Semiconductor light-emitting devices are widely used in the fields of consumption, communication systems, medical instruments, etc. Whether from the perspective of science and technology or economic development, semiconductor light-emitting devices have broad application prospects and have received extensive attention and research. As the size of semiconductor light-emitting devices becomes smaller and smaller, even below 10μm, the sidewall light extraction efficiency of semiconductor light-emitting devices seriously affects the overall light extraction effect of semiconductor light-emitting devices. It is particularly important to study the sidewall light extraction performance of semiconductor light-emitting devices.

[0003] In the process of production and research and development, angle-resolved optical systems are usually used to analyze and test the light-emitting performance of semiconductor light-emitting devices. Taking Micro-LED devices as an example, the semiconductor sample is first placed on the sample stage, and then the luminous semiconductor sample is analyzed and tested by the angle-resolved optical system.

[0004] However, it is currently difficult to produce a standard semiconductor light-emitting device with controllable and known light intensity at each light-emitting angle, so that the light collected by the calibration device at each light-emitting angle is affected by inconsistent light intensity, resulting in low accuracy in calibrating the actual spectral information of the semiconductor light-emitting device. Summary of the invention

[0005] The present invention provides a spectrum calibration method, a calibration device and an angle-resolved optical path system. The calibration process is simple and convenient, and the spectrum calibration effect can be improved.

[0006] According to one aspect of the present invention, a spectrum calibration method is provided, the spectrum calibration method comprising:

[0007] Controlling multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information; wherein the set collection angle is the angle between a first set vertical line and a second set vertical line, the first set vertical line is perpendicular to the surface of the standard diffuse reflection plate reflecting the incident light, and the second set vertical line is perpendicular to the surface of the objective lens receiving light;

[0008] A calibration database is established based on all the acquired reflectance spectrum information; wherein the calibration database includes calibration values ​​corresponding to objective lenses of multiple magnifications at multiple set collection angles, and the multiple set collection angles include all the set collection angles;

[0009] Acquire the actual spectrum information of the light emitted by the sample to be tested received by the objective lens and the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested; wherein the actual collection angle is the angle between the surface of the sample to be tested emitting light and the second set vertical line;

[0010] The actual spectral information is corrected according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

[0011] Optionally, establishing a calibration database according to all the acquired reflectance spectrum information includes:

[0012] Obtaining the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens;

[0013] Finding the reference peak intensity corresponding to each objective lens of the set magnification from all the maximum peak intensities corresponding to each objective lens of the set magnification;

[0014] Based on the reference peak intensity, normalizing the maximum peak intensity corresponding to each of the set collection angles under each of the set magnification objective lenses to obtain a normalized value corresponding to each of the set collection angles under each of the set magnification objective lenses;

[0015] The calibration database is established based on all of the normalized values.

[0016] Optionally, establishing the calibration database based on all the normalized values ​​includes:

[0017] Taking each of the set collection angles under each of the set magnification objective lenses and the corresponding normalized values ​​as the calibration function corresponding to each of the set magnification objective lenses;

[0018] The calibration database is established according to the calibration function corresponding to each objective lens of the set magnification.

[0019] Optionally, based on the reference peak intensity, normalizing the maximum peak intensity corresponding to each set collection angle under each objective lens of the set magnification to obtain a normalized value corresponding to each set collection angle under each objective lens of the set magnification includes:

[0020] The ratio of the maximum peak intensity corresponding to each set collection angle under each objective lens of the set magnification to the reference peak intensity is used as the normalized value corresponding to each set collection angle.

[0021] Optionally, the actual spectral information is corrected according to the calibration database, the actual magnification and the actual collection angle to obtain the calibrated spectral information, including:

[0022] Determine a calibration function corresponding to the actual magnification according to the actual magnification and the calibration database;

[0023] Finding a normalized value corresponding to a collection angle equal to the actual collection angle in the calibration function corresponding to the actual magnification, and using the normalized value as the actual calibration value;

[0024] The calibration spectrum information is determined according to the actual spectrum information and the actual calibration value.

[0025] Optionally, establishing a calibration database according to all the acquired reflectance spectrum information includes:

[0026] Obtaining the peak wavelength corresponding to the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens;

[0027] Finding the reference wavelength corresponding to each objective lens of the set magnification from all the peak wavelengths corresponding to each objective lens of the set magnification;

[0028] Determine the wavelength shift corresponding to each peak wavelength under each objective lens of the set magnification according to the reference wavelength corresponding to each objective lens of the set magnification;

[0029] Taking each of the set collection angles under each of the set magnification objective lenses and the corresponding wavelength offset as a calibration function corresponding to each of the set magnification objective lenses;

[0030] The calibration database is established according to the calibration function corresponding to each objective lens of the set magnification.

[0031] Optionally, the calibration spectrum information includes wavelength information;

[0032] The actual spectral information is corrected according to the calibration database, the actual magnification and the actual collection angle, and the calibrated spectral information obtained includes:

[0033] Determine a calibration function corresponding to the actual magnification according to the actual magnification and the calibration database;

[0034] Finding a wavelength offset corresponding to a set collection angle equal to the actual collection angle in the calibration function corresponding to the actual magnification, and using the wavelength offset as an actual calibration value;

[0035] The calibration spectrum information is determined according to a difference between the actual spectrum information and the actual calibration value.

[0036] Optionally, the set collection angle includes -90° to 90°; and / or

[0037] The objective lenses controlling the plurality of different set magnifications collect the incident light reflected by the standard diffuse reflection plate at a plurality of different set collection angles to obtain a plurality of reflection spectrum information, including:

[0038] Selecting an objective lens with the set magnification;

[0039] Controlling the objective lens of the current magnification to collect the incident light reflected by the standard diffuse reflection plate at a plurality of different set collection angles in sequence, and obtaining the reflection spectrum information corresponding to each set collection angle;

[0040] Adjust the magnification of the objective lens, and return to the step of controlling the objective lens of the current magnification to collect the incident light reflected by the standard diffuse reflection plate at a plurality of different set collection angles in sequence, until all the objective lenses of the set magnifications collect the incident light reflected by the standard diffuse reflection plate at different set collection angles.

[0041] According to another aspect of the present invention, a spectrum calibration device is provided, the spectrum calibration device comprising: a light acquisition module, a database determination module, an information acquisition module and a calibration module;

[0042] The light acquisition module is used to control multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information; wherein the set collection angle is the angle between a first set vertical line and a second set vertical line, the first set vertical line is perpendicular to the surface of the standard diffuse reflection plate reflecting the incident light, and the second set vertical line is perpendicular to the surface of the objective lens receiving light;

[0043] The database determination module is used to establish a calibration database according to all the acquired reflection spectrum information; wherein the calibration database includes calibration values ​​corresponding to objective lenses of multiple magnifications at multiple collection angles;

[0044] The information acquisition module is used to obtain the actual spectrum information of the light emitted by the sample to be tested received by the objective lens and the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested; wherein the actual collection angle is the angle between the surface of the sample to be tested emitting light and the second set vertical line;

[0045] The calibration module is used to correct the actual spectral information according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

[0046] According to another aspect of the present invention, there is provided an angle-resolved optical path system, wherein the angle-resolved optical path system comprises the spectrum calibration device provided by any embodiment of the present invention.

[0047] The present invention provides a spectrum calibration method, which comprises: controlling multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information, then establishing a calibration database based on all the obtained reflection spectrum information, then obtaining the actual spectrum information of the light emitted by the sample to be tested received by the objective lens and the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested, and finally correcting the actual spectrum information according to the calibration database, the actual magnification and the actual collection angle to obtain the calibration spectrum information; it can be seen that the process of correcting the actual spectrum information of the present invention is simple. The present invention adopts a standard diffuse reflection plate to replace the self-luminous sample, and the light intensity of the reflected light on the surface of the standard diffuse reflection plate in each area is consistent, which can avoid the influence of the light intensity of the reflected light on the calibration result, and effectively solves the problem of difficulty in calibration caused by the lack of a standard semiconductor light-emitting device. Since the magnification and collection angle of the objective lens will affect the information of the light collected by the objective lens, the present embodiment calibrates the actual spectrum information in combination with the actual magnification and the actual collection angle, so as to improve the accuracy of the correction. In summary, the spectrum calibration method provided by the present embodiment has a simple calibration process and can improve the spectrum calibration effect.

[0048] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0050] Figure 1 is a schematic flow chart of a spectrum calibration method provided according to an embodiment of the present invention;

[0051] Figure 2 is a schematic structural diagram of an angle-resolving optical path system provided according to an embodiment of the present invention;

[0052] Figure 3 is a schematic diagram of the structure of a carrier platform at different angles provided according to an embodiment of the present invention;

[0053] Figure 4 is a schematic diagram of light beam collection conditions at different set collection angles provided according to an embodiment of the present invention;

[0054] Figure 5 is a schematic flow chart of another spectrum calibration method provided according to an embodiment of the present invention;

[0055] Figure 6 is a schematic diagram of multiple calibration functions provided according to an embodiment of the present invention;

[0056] Figure 7 is a schematic flow chart of another spectrum calibration method provided according to an embodiment of the present invention;

[0057] Figure 8 is a schematic diagram of the corresponding relationship between the actual collection angle and the maximum peak intensity before correction;

[0058] Fig. 9 is a schematic diagram of the corresponding relationship between the actual collection angle and the calibration light intensity value after calibration using the spectrum calibration method provided in this embodiment;

[0059] Fig.10 is a schematic flow chart of another spectrum calibration method provided according to an embodiment of the present invention;

[0060] Fig.11 is a schematic structural diagram of a spectrum calibration device provided according to an embodiment of the present invention;

[0061] Fig.12 It is a structural schematic diagram of another angle-resolving optical path system provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0062] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0063] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0064] refer to Figure 1 , Figure 1 is a flow chart of a spectrum calibration method provided according to an embodiment of the present invention. The spectrum calibration method provided in this embodiment comprises the following steps:

[0065] S110, controlling multiple objective lenses with different set magnifications to collect incident light reflected by the standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information.

[0066] Combined with reference Figure 2 and Figure 3 , Figure 2 is a schematic structural diagram of an angle-resolving optical path system provided according to an embodiment of the present invention. Figure 3 1 is a schematic diagram of the structure of a carrier platform at different angles according to an embodiment of the present invention. The angle-resolving optical path system can collect incident light reflected by a standard diffuse reflection plate. The angle-resolving optical path system includes a detection module 110 and a carrier platform 120. The detection module 110 includes an objective lens 111. The carrier platform 120 is used to carry the standard diffuse reflection plate.

[0067] The collection angle α is set to be the angle between the first set vertical line 101 and the second set vertical line 102. The first set vertical line 101 is perpendicular to the surface of the standard diffuse reflection plate reflecting the incident light, and the second set vertical line 102 is perpendicular to the surface of the objective lens 111 receiving light.

[0068] Specifically, the setting of the collection angle α can be controlled by the deflection detection module 110 or the carrier 120. When only the carrier 120 is deflected and the position of the objective lens 111 is kept unchanged, the setting of the collection angle α will change with the deflection angle of the carrier 120. The standard diffuse reflection plate 200 is fixed on the carrier 120, and the standard diffuse reflection plate 200 always remains relatively still with the carrier 120 during the deflection process of the carrier 120.

[0069] The standard diffuse reflection plate 200 may be a white plate. The standard diffuse reflection plate 200 includes a Teflon white coating having a uniformly slightly rough surface. The Teflon white coating can make the incident light generate diffuse reflection light uniformly reflected in all directions on the surface of the standard diffuse reflection plate 200, thereby ensuring that the light intensity of the reflected light of the standard diffuse reflection plate 200 in all directions is the same or almost the same. Using this principle, a standard diffuse reflection plate 200 can be used to replace a self-luminous sample (such as a semiconductor light-emitting device), and light can be projected onto the surface of the standard diffuse reflection plate 200 to generate diffuse reflection light at various angles. Then, the detection module 110 collects the incident light reflected back from each set collection angle α to obtain the reflection spectrum information of each set collection angle α.

[0070] The light transmitted by the objective lens 111 is irradiated on the standard diffuse reflection plate 200 and becomes a diffuse reflection Lambertian beam pattern that spreads evenly in all directions. Rotating the objective lens 111 still does not change the diffuse reflection Lambertian beam pattern of the reflected light. However, since the objective lens 111 has a collection angle θ, it will only collect reflected light within a certain angle. Figure 4 , Figure 4 is a schematic diagram of light beam collection conditions at different set collection angles provided according to an embodiment of the present invention, Figure 4 The black solid line represents the incident light 310, the black dotted line represents the reflected light 320, and the red line represents the reflected light 330 that can be collected by the objective lens 111 within the collection angle θ. The collection angle θ of the objective lens 111 of different magnifications is different, and the collection efficiency of the objective lens 111 of the same magnification at different set collection angles is also different. The difference in collection angle θ will result in different reflection spectrum information collected by the objective lens of the same set magnification at different set collection angles.

[0071] S120: Establish a calibration database according to all acquired reflection spectrum information.

[0072] The calibration database includes calibration values ​​corresponding to objective lenses of multiple magnifications at multiple set collection angles, and the multiple set collection angles include all set collection angles.

[0073] Specifically, each set collection angle under the objective lens of the same set magnification corresponds to a reflection spectrum information. The calibration function corresponding to each objective lens of the set magnification can be determined according to the multiple reflection spectrum information corresponding to the objective lens of each set magnification, and then the calibration database is established according to the calibration function corresponding to each objective lens of the set magnification. The calibration function can include the collection angle and its corresponding calibration value.

[0074] For example, the calibration database looks like this:

[0075]

[0076]

[0077] S130, obtaining actual spectrum information of the light emitted by the sample to be tested and received by the objective lens, as well as actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested.

[0078] The actual collection angle is the angle between the surface of the sample to be tested that emits light and the second set vertical line.

[0079] Specifically, Figure 2 As shown, before executing step S130, the sample to be tested is first fixed on the carrier 120 and the sample to be tested is controlled to emit light. The sample to be tested can be a semiconductor light-emitting device, specifically a Micro-LED device. The second set vertical line 102 here is perpendicular to the surface of the objective lens 111 receiving the light emitted by the sample to be tested.

[0080] The actual collection angle and the actual magnification can be set according to actual needs. The actual collection angle can range from -90° to 90°, the actual collection angle can be equal to one of the multiple set collection angles α, and the actual magnification can be equal to one of the multiple set magnifications.

[0081] S140, correcting the actual spectral information according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

[0082] The calibration database includes calibration values ​​corresponding to objective lenses of multiple magnifications and multiple set collection angles. According to the actual magnification and the actual collection angle, the calibration value corresponding to the magnification equal to the actual magnification and the set collection angle equal to the actual collection angle can be found in the calibration database, and then the actual spectrum information is corrected by the calibration value to obtain the calibration spectrum information.

[0083] It should be noted that step S130 and step S140 in the present embodiment are for correcting the actual spectral information corresponding to an actual collection angle of the sample to be tested under an objective lens with an actual magnification. When it is necessary to correct the actual spectral information at other actual collection angles, the actual collection angle and / or the actual magnification can be adjusted, and step S130 and step S140 can be executed again, so as to obtain multiple calibrated spectral information of multiple actual collection angles under objective lenses with multiple set magnifications.

[0084] The present embodiment provides a spectrum calibration method, which includes: controlling multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information, then establishing a calibration database based on all the obtained reflection spectrum information, then obtaining the actual spectrum information of the light emitted by the sample to be tested received by the objective lens and the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested, and finally correcting the actual spectrum information according to the calibration database, the actual magnification and the actual collection angle to obtain the calibration spectrum information. It can be seen that the process of correcting the actual spectrum information in the present embodiment is simple. In the present embodiment, the self-luminous sample is replaced by a standard diffuse reflection plate, and the light intensity of the reflected light on the surface of the standard diffuse reflection plate in each area is consistent, which can avoid the influence of the light intensity of the reflected light on the calibration result, and effectively solve the problem of difficulty in calibration caused by the lack of a standard semiconductor light-emitting device. Since the difference in the magnification and collection angle of the objective lens will affect the information of the light collected by the objective lens, the present embodiment calibrates the actual spectrum information in combination with the actual magnification and the actual collection angle, which can improve the accuracy of the correction. In summary, the spectrum calibration method provided in this embodiment has a simple calibration process and can improve the spectrum calibration effect.

[0085] Optional, Figure 5 is a flow chart of another spectrum calibration method provided according to an embodiment of the present invention, referring to Figure 5 The spectrum calibration method provided in this embodiment includes the following steps:

[0086] S210, controlling multiple objective lenses with different set magnifications to collect incident light reflected by the standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information.

[0087] The content of step S210 is the same as that of step S110. For the description of step S210, please refer to the description of step S110, which will not be repeated here.

[0088] S220, obtaining the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens.

[0089] Each set collection angle under each set magnification objective lens corresponds to a piece of reflection spectrum information, and the reflection spectrum information includes the correspondence between wavelength and light intensity, and the maximum peak intensity is the maximum value of the light intensity in the reflection spectrum information. Each piece of reflection spectrum information corresponds to a maximum peak intensity, that is, each set collection angle under each set magnification objective lens corresponds to a maximum peak intensity. Obtain multiple maximum peak intensities under each set magnification objective lens.

[0090] S230, finding the reference peak intensity corresponding to each objective lens of the set magnification from all the maximum peak intensities corresponding to each objective lens of the set magnification.

[0091] The reference peak intensity corresponding to the objective lens of the set magnification is one of the maximum peak intensities among the plurality of maximum peak intensities corresponding to the objective lens of the set magnification.

[0092] Combination Figure 4 , the collection angle θ of the objective lenses of different magnifications is different, and the design of the detection module is difficult to be completely symmetrical. The combined influence of these two factors leads to differences in the collection efficiency of each set collection angle α. The inventor extracted the reflection spectrum information collected by the objective lenses of different magnifications at different set collection angles α, and found that the higher the magnification of the objective lens, the greater the attenuation of the collection efficiency as the absolute value of the set collection angle α increases. Therefore, the reference peak intensity in this embodiment can be the maximum peak intensity corresponding to the set collection angle α with the smallest absolute value under the objective lens of the same set magnification. When the set collection angle α includes 0°, the maximum peak intensity corresponding to 0° is the reference peak intensity.

[0093] S240, based on the reference peak intensity, normalize the maximum peak intensity corresponding to each set collection angle under each set magnification objective lens to obtain a normalized value corresponding to each set collection angle under each set magnification objective lens.

[0094] Each objective lens of a set magnification corresponds to a reference peak intensity, and multiple maximum peak intensities corresponding to the objective lens of the same set magnification are normalized based on the reference peak intensity corresponding to the objective lens of the set magnification.

[0095] By normalizing each maximum peak intensity, each maximum peak intensity can be adjusted to the same scale, thereby improving the efficiency of correcting the actual spectral information. By normalizing based on the reference peak intensity, all maximum peak intensities corresponding to the objective lens of the set magnification can be related to the reference peak intensity corresponding to the objective lens of the set magnification.

[0096] Optionally, the ratio of the maximum peak intensity corresponding to each set collection angle under the objective lens of each set magnification to the reference peak intensity is used as the normalized value corresponding to each set collection angle.

[0097] Specifically, the ratio of the maximum peak intensity corresponding to each set collection angle under each set magnification objective lens to the reference peak intensity can reflect the collection efficiency of each set collection angle. It can be seen that the normalized value is related to the collection efficiency, and the collection efficiency will affect the actual spectral information. This embodiment can further improve the calibration effect by correcting the actual spectral information through the normalized value.

[0098] S250 , establishing a calibration database based on all normalized values.

[0099] The calibration database may include normalized values ​​corresponding to each set collection angle under each set magnification objective lens.

[0100] Optionally, a calibration database is established based on all normalized values, comprising the following steps:

[0101] S251, taking each set collection angle under each set magnification objective lens and its corresponding normalized value as a calibration function corresponding to each set magnification objective lens.

[0102] refer to Figure 6 , Figure 6 According to the schematic diagram of multiple calibration functions provided by the embodiment of the present invention, the normalized values ​​are plotted according to polar coordinate distribution to obtain the following Figure 6 The calibration function curves corresponding to the objective lenses with different magnification settings are shown. Figure 6 The calibration functions corresponding to the objective lens setting magnifications of 5, 10, 20 and 50 are shown. For example, when the objective lens setting magnification is 5 and the collection angle is set to -90°, the corresponding normalized value is a3 in polar coordinates; when the objective lens setting magnification is 10 and the collection angle is set to -50°, the corresponding normalized value is close to a7 in polar coordinates.

[0103] You can Figure 6 Under the same set magnification, these discrete points are used as the calibration function corresponding to the objective lens of the set magnification. These discrete points can also be connected in sequence to form a curve, and the curve is used as the calibration function.

[0104] S252, establishing a calibration database according to the calibration function corresponding to each objective lens with a set magnification.

[0105] The calibration functions corresponding to each objective lens with a set magnification can be combined to form a calibration database. For example, continue to refer to Figure 6 , Figure 6 The combination of calibration functions corresponding to the set magnifications of 5, 10, 20 and 50 can be a calibration database. In addition, the calibration functions corresponding to the objective lenses of other magnifications can be determined based on the calibration functions corresponding to the known set magnifications, and then the combination of all these calibration functions forms a calibration database. For example, multiple set magnifications include 5, 10, 20 and 50. According to the calibration functions corresponding to the set magnifications of 5, 10, 20 and 50, the calibration function corresponding to the objective lens of 30 can be determined by using an interpolation algorithm, and the calibration function corresponding to the objective lens of 40 can be determined by using an interpolation algorithm, and then the calibration functions corresponding to the magnifications of 5, 10, 20, 30, 40 and 50 are combined to form a calibration database.

[0106] S260, obtaining actual spectrum information of the light emitted by the sample to be tested and received by the objective lens, and actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested.

[0107] The content of step S260 is the same as that of step S130. For the description of step S260, please refer to the description of step S130, which will not be repeated here.

[0108] S270, correcting the actual spectral information according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

[0109] The content of step S270 is the same as that of step S140. For the description of step S270, please refer to the description of step S140, which will not be repeated here.

[0110] Optional, Figure 7 is a flow chart of another spectrum calibration method provided according to an embodiment of the present invention, referring to Figure 7 The spectrum calibration method provided in this embodiment includes the following steps:

[0111] S310, controlling multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information.

[0112] The content of step S310 is the same as that of step S210. For the description of step S310, please refer to the description of step S210, which will not be repeated here.

[0113] S320, obtaining the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens.

[0114] The content of step S320 is the same as that of step S220. For the description of step S320, please refer to the description of step S220, which will not be repeated here.

[0115] S330, finding the reference peak intensity corresponding to each objective lens of the set magnification from all the maximum peak intensities corresponding to each objective lens of the set magnification.

[0116] The content of step S330 is the same as that of step S230. For the description of step S330, please refer to the description of step S230, which will not be repeated here.

[0117] S340, based on the reference peak intensity, normalize the maximum peak intensity corresponding to each set collection angle under each set magnification objective lens to obtain a normalized value corresponding to each set collection angle under each set magnification objective lens.

[0118] The content of step S340 is the same as that of step S240. For the description of step S340, please refer to the description of step S240, which will not be repeated here.

[0119] S350, taking each set collection angle under each set magnification objective lens and its corresponding normalized value as a calibration function corresponding to each set magnification objective lens.

[0120] The content of step S350 is the same as that of step S251. For the description of step S350, please refer to the description of step S251, which will not be repeated here.

[0121] S360, establishing a calibration database according to the calibration function corresponding to each objective lens with a set magnification.

[0122] The content of step S360 is the same as that of step S252. For the description of step S360, please refer to the description of step S252, which will not be repeated here.

[0123] S370, obtaining actual spectrum information of the light emitted by the sample to be tested and received by the objective lens, as well as actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested.

[0124] The content of step S370 is the same as that of step S260. For the description of step S370, please refer to the description of step S260, which will not be repeated here.

[0125] S380, determining a calibration function corresponding to the actual magnification according to the actual magnification and a calibration database.

[0126] A calibration function corresponding to a set magnification equal to the actual magnification is found in the calibration database, and the function is used as the calibration function corresponding to the actual magnification.

[0127] S390. Find a normalized value corresponding to a collection angle equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the normalized value as the actual calibration value.

[0128] For example, continue to refer to Fig.10 , the calibration database includes that when the set magnification of the objective lens is 5 and the set collection angle is -90°, the normalized value is a3 in polar coordinates. When the actual magnification is 5 and the actual collection angle is -90°, it can be determined that the actual calibration value is a3. It should be noted that a3 here is a value in polar coordinates.

[0129] S391. Determine calibration spectrum information according to actual spectrum information and actual calibration value.

[0130] The actual spectrum information is the spectrum information of the light of the sample to be tested after passing through the objective lens. The actual spectrum information includes the light intensity corresponding to each wavelength. The ratio of each light intensity in the actual spectrum information to the actual calibration value can be used as the calibration light intensity, and the corresponding relationship between the calibration light intensity and the wavelength can be used as the calibration spectrum information. The calibration spectrum information includes the calibration light intensity corresponding to each wavelength.

[0131] Due to the asymmetry of the optical path inside the detection module, it is difficult for the collection efficiency on both sides to be completely consistent. If the collection efficiency on both sides is greatly different, completely opposite pseudo data may appear. After correction, almost opposite results will appear. For details, please refer to Figure 8 and Fig. 9 .

[0132] It should be noted that Figure 8 It includes the maximum peak intensity in the actual spectral information corresponding to multiple actual collection angles. Fig. 9 It is the calibration light intensity value after correcting the maximum peak intensity corresponding to each actual collection angle, and the ratio of the maximum peak intensity corresponding to the actual collection angle to the actual calibration value is used as the calibration light intensity value.

[0133] The relationship between the actual spectral information and the actual calibration value is described in detail below:

[0134] The calibration spectrum information is recorded as F(x), the actual spectrum information is recorded as G(x), and the actual calibration value is recorded as η(x). It should be noted that when the magnification of the objective lens and the collection angle are fixed, η(x) is a specific constant.

[0135] There is the following relationship between the calibration spectrum information (F(x)), the actual spectrum information (G(x)) and the actual calibration value (η(x)):

[0136] F(x)·η(x)=G(x) (1)

[0137] Normalizing formula (1) yields:

[0138]

[0139] By rearranging formula (2), we can get the following formula:

[0140]

[0141] The normalized function is named as follows:

[0142] f(x)=κ·F(x),g(x)=ξ·G(x) (4)

[0143] According to formula (3) and formula (4), the following formula can be obtained:

[0144]

[0145] After sorting out formula (5), we can finally get the following formula:

[0146]

[0147] Wherein, κ and ξ are normalization constant coefficients; f(x) is the normalized calibration spectrum information, g(x) is the normalized actual spectrum information, and x is the wavelength.

[0148] Therefore, the ratio of the actual spectral information obtained by the test to the actual calibration value is used as the calibration spectral information.

[0149] Optional, Fig.10 is a flow chart of another spectrum calibration method provided according to an embodiment of the present invention, referring to Fig.10 The spectrum calibration method provided in this embodiment includes the following steps:

[0150] S410, controlling multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information.

[0151] The content of step S410 is the same as that of step S110. For the description of step S410, please refer to the description of step S110, which will not be repeated here.

[0152] S420, obtaining a peak wavelength corresponding to the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens.

[0153] The objective lens has chromatic aberration, which will cause the peak wavelength corresponding to the maximum peak intensity at different set collection angles under the objective lens with the same set magnification to shift. The present embodiment obtains the peak wavelength corresponding to the maximum peak intensity, and the calibration database determined according to the peak wavelength can improve the influence of the chromatic aberration of the objective lens with actual magnification on the actual spectral information.

[0154] You can continue to refer to Figure 4-Figure 7 , we can first find the maximum peak intensity in the reflectance spectrum information curve, and then determine the wavelength corresponding to the maximum peak intensity, which is the peak wavelength.

[0155] S430, finding the reference wavelength corresponding to each objective lens of the set magnification from all peak wavelengths corresponding to each objective lens of the set magnification.

[0156] The reference wavelength in this embodiment may be a peak wavelength of the set collection angle α with the smallest absolute value. When the set collection angle α includes 0°, the peak wavelength corresponding to 0° is the reference wavelength.

[0157] S440, determining a wavelength shift corresponding to each peak wavelength under each objective lens of set magnification according to a reference wavelength corresponding to each objective lens of set magnification.

[0158] The difference between the peak wavelength and the reference wavelength is taken as the wavelength offset. For example, the reference wavelength corresponding to the objective lens with a magnification of 5 is set to λ, and the peak wavelength corresponding to the objective lens with a magnification of 5 and a collection angle of 20° is set to λ. α When the objective lens with a magnification of 5 is set to a collection angle of 20°, the wavelength shift Δλ is Δλ = λ α -λ.

[0159] S450, taking each set collection angle under each set magnification objective lens and its corresponding wavelength offset as a calibration function corresponding to each set magnification objective lens.

[0160] Under the objective lens of the same set magnification, each set collection angle corresponds to a wavelength offset, and the correspondence between these set collection angles and the wavelength offsets is used as the calibration function corresponding to the objective lens of the set magnification.

[0161] S460, establishing a calibration database according to the calibration function corresponding to each objective lens with a set magnification.

[0162] The calibration functions corresponding to all objective lenses with set magnifications can be combined to form a calibration database.

[0163] S470, obtaining actual spectrum information of the light emitted by the sample to be tested and received by the objective lens, as well as actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested.

[0164] The content of step S470 is the same as that of step S130. For the description of step S470, please refer to the description of step S130, which will not be repeated here.

[0165] S480, correcting the actual spectral information according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

[0166] The content of step S480 is the same as that of step S140. For the description of step S480, please refer to the description of step S140, which will not be repeated here.

[0167] Optionally, the calibration spectrum information includes wavelength information;

[0168] The actual spectral information is corrected according to the calibration database, the actual magnification and the actual collection angle to obtain the calibrated spectral information, including the following steps:

[0169] S481. Determine a calibration function corresponding to the actual magnification according to the actual magnification and a calibration database.

[0170] A calibration function corresponding to an objective lens with a set magnification equal to the actual magnification can be found in the calibration database, and the calibration function can be used as the calibration function corresponding to the actual magnification.

[0171] S482. Find the wavelength offset corresponding to the set collection angle equal to the actual collection angle in the calibration function corresponding to the actual magnification, and use the wavelength offset as the actual calibration value.

[0172] The calibration function corresponding to the actual magnification includes multiple set collection angles and wavelength offsets corresponding to the set collection angles. First, find the set collection angle equal to the actual collection angle, then determine the wavelength offset corresponding to the set collection angle, and use the wavelength offset as the actual calibration value.

[0173] S483. Determine calibration spectrum information according to the difference between the actual spectrum information and the actual calibration value.

[0174] The actual spectral information includes the light intensity corresponding to each wavelength. The difference obtained by subtracting the actual calibration value from the wavelength is taken as the calibrated wavelength. The light intensity corresponding to the calibrated wavelength is the same as the light intensity corresponding to the wavelength before calibration. That is, the calibrated spectral information can be obtained by moving the actual spectral information curve as a whole by the absolute value of the actual calibration value.

[0175] Optionally, the set collection angle includes -90° to 90°. Exemplarily, the multiple set collection angles can be 0°, 10°, 20°, 30°, 40°, 50°, 60°, 70°, 80°, 90°, -10°, -20°, -30°, -40°, -50°, -60°, -70°, -80° and -90°, etc.

[0176] Specifically, the collection angle is set to include -90° to 90°, which can collect the reflected light reflected from the front of the standard diffuse reflection plate and the reflected light reflected from the side wall, so that the actual spectral information of the light emitted from the front and side walls of the sample to be tested can be corrected, making the calibration spectral information at the actual collection angle more accurate.

[0177] Optionally, controlling multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information includes the following steps:

[0178] S111, select an objective lens with a set magnification.

[0179] An objective lens with a set magnification can be selected from a plurality of objective lenses with set magnifications.

[0180] S112, controlling the objective lens of the current magnification to sequentially collect the incident light reflected by the standard diffuse reflection plate at a plurality of different set collection angles, and obtaining reflection spectrum information corresponding to each set collection angle.

[0181] The objective lens of the current magnification is controlled to collect the incident light reflected by the standard diffuse reflection plate at a set collection angle, and the reflection spectrum information corresponding to the set collection angle is obtained. Then, the set collection angle is changed by deflecting the objective lens or the carrier, and the incident light reflected by the standard diffuse reflection plate is collected at the changed set collection angle to obtain another reflection spectrum information. This is repeated multiple times, and each time the set collection angle is adjusted, a reflection spectrum information is obtained. After the corresponding reflection spectrum information is obtained for each set collection angle corresponding to the objective lens of the current magnification, step S113 is executed.

[0182] S113, adjusting the magnification of the objective lens, and then returning to step S111, until all objective lenses with set magnifications collect the incident light reflected by the standard diffuse reflection plate at different set collection angles.

[0183] After adjusting the magnification of the objective lens, a plurality of reflection spectrum information corresponding to the adjusted objective lens is obtained according to the method of step S112.

[0184] refer to Fig.11 , Fig.11 4 is a schematic diagram of the structure of a spectrum calibration device provided according to an embodiment of the present invention. The spectrum calibration device provided in this embodiment includes: a light acquisition module 410, a database determination module 420, an information acquisition module 430 and a calibration module 440.

[0185] The light acquisition module 410 is used to control multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information; wherein the set collection angle is the angle between a first set vertical line and a second set vertical line, the first set vertical line is perpendicular to the surface of the standard diffuse reflection plate that reflects the incident light, and the second set vertical line is perpendicular to the surface of the objective lens that receives the light.

[0186] The database determination module 420 is used to establish a calibration database according to all the acquired reflection spectrum information; wherein the calibration database includes calibration values ​​corresponding to objective lenses of multiple magnifications at multiple collection angles.

[0187] The information acquisition module 430 is used to obtain the actual spectral information of the light emitted by the sample to be tested received by the objective lens and the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested; wherein the actual collection angle is the angle between the surface of the sample to be tested emitting light and the second set vertical line.

[0188] The calibration module 440 is used to calibrate the actual spectral information according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

[0189] Specifically, the spectrum calibration device provided in this embodiment may further include a standard diffuse reflection plate.

[0190] The spectral calibration device provided in this embodiment has corresponding beneficial effects with the spectral calibration method provided in any embodiment of the present invention. For technical details not detailed in this embodiment, please refer to the spectral calibration method provided in any embodiment of the present invention.

[0191] This embodiment further provides an angle-resolved optical path system, which includes the spectrum calibration device provided by any embodiment of the present invention.

[0192] refer to Fig.12 , Fig.12 1 is a schematic diagram of the structure of another angle-resolving optical path system provided according to an embodiment of the present invention. The angle-resolving optical path system provided in this embodiment includes a detection module 110 , a spectrum collection module 130 , a control module 140 and a carrier platform 120 .

[0193] The detection module 110 includes a series of microscopic imaging optical paths and spectral collection optical paths, such as an objective lens, a charge coupled device (CCD) camera, a white light illumination component, a lens, a reflector, etc. The control module 140 can be a computer, and the control module 140 is electrically connected to the detection module 110, the spectral collection module 130 and the carrier 120.

[0194] It should be noted that Figure 2 and Fig.12 The difference between the angle-resolved optical systems shown is that the collection angles are set differently.

[0195] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0196] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A spectrum calibration method, characterized in that: include: Controlling multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information; wherein the set collection angle is the angle between a first set vertical line and a second set vertical line, the first set vertical line is perpendicular to the surface of the standard diffuse reflection plate reflecting the incident light, and the second set vertical line is perpendicular to the surface of the objective lens receiving light; A calibration database is established based on all the acquired reflectance spectrum information; wherein the calibration database includes calibration values ​​corresponding to objective lenses of multiple magnifications at multiple set collection angles, and the multiple set collection angles include all the set collection angles; Acquire the actual spectrum information of the light emitted by the sample to be tested received by the objective lens and the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested; wherein the actual collection angle is the angle between the surface of the sample to be tested emitting light and the second set vertical line; The actual spectral information is corrected according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

2. The spectrum calibration method according to claim 1, characterized in that: The step of establishing a calibration database based on all the acquired reflectance spectrum information comprises: Obtaining the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens; Finding the reference peak intensity corresponding to each objective lens of the set magnification from all the maximum peak intensities corresponding to each objective lens of the set magnification; Based on the reference peak intensity, normalizing the maximum peak intensity corresponding to each of the set collection angles under each of the set magnification objective lenses to obtain a normalized value corresponding to each of the set collection angles under each of the set magnification objective lenses; The calibration database is established based on all of the normalized values.

3. The spectrum calibration method according to claim 2, characterized in that: The establishing the calibration database based on all the normalized values ​​comprises: Taking each of the set collection angles under each of the set magnification objective lenses and the corresponding normalized values ​​as the calibration function corresponding to each of the set magnification objective lenses; The calibration database is established according to the calibration function corresponding to each objective lens of the set magnification.

4. The spectrum calibration method according to claim 2, characterized in that: Based on the reference peak intensity, normalizing the maximum peak intensity corresponding to each set collection angle under each objective lens of the set magnification to obtain a normalized value corresponding to each set collection angle under each objective lens of the set magnification, including: The ratio of the maximum peak intensity corresponding to each set collection angle under each objective lens of the set magnification to the reference peak intensity is used as the normalized value corresponding to each set collection angle.

5. The spectrum calibration method according to claim 3, characterized in that: The actual spectral information is corrected according to the calibration database, the actual magnification and the actual collection angle to obtain the calibrated spectral information, including: Determine a calibration function corresponding to the actual magnification according to the actual magnification and the calibration database; Finding a normalized value corresponding to a collection angle equal to the actual collection angle in the calibration function corresponding to the actual magnification, and using the normalized value as the actual calibration value; The calibration spectrum information is determined according to the actual spectrum information and the actual calibration value.

6. The spectrum calibration method according to claim 1, characterized in that: The step of establishing a calibration database based on all the acquired reflectance spectrum information comprises: Obtaining the peak wavelength corresponding to the maximum peak intensity in the reflection spectrum information corresponding to each set collection angle under each set magnification objective lens; Finding the reference wavelength corresponding to each objective lens of the set magnification from all the peak wavelengths corresponding to each objective lens of the set magnification; Determine the wavelength shift corresponding to each peak wavelength under each objective lens of the set magnification according to the reference wavelength corresponding to each objective lens of the set magnification; Taking each of the set collection angles under each of the set magnification objective lenses and the corresponding wavelength offset as a calibration function corresponding to each of the set magnification objective lenses; The calibration database is established according to the calibration function corresponding to each objective lens of the set magnification.

7. The spectrum calibration method according to claim 6, characterized in that: The calibration spectrum information includes wavelength information; The actual spectral information is corrected according to the calibration database, the actual magnification and the actual collection angle, and the calibrated spectral information obtained includes: Determine a calibration function corresponding to the actual magnification according to the actual magnification and the calibration database; Finding a wavelength offset corresponding to a set collection angle equal to the actual collection angle in the calibration function corresponding to the actual magnification, and using the wavelength offset as an actual calibration value; The calibration spectrum information is determined according to a difference between the actual spectrum information and the actual calibration value.

8. The spectrum calibration method according to any one of claims 1 to 7, characterized in that: The set collection angle includes -90° to 90°; and / or The objective lenses controlling the plurality of different set magnifications collect the incident light reflected by the standard diffuse reflection plate at a plurality of different set collection angles to obtain a plurality of reflection spectrum information, including: Selecting an objective lens with the set magnification; Controlling the objective lens of the current magnification to collect the incident light reflected by the standard diffuse reflection plate at a plurality of different set collection angles in sequence, and obtaining the reflection spectrum information corresponding to each set collection angle; Adjust the magnification of the objective lens, and return to the step of controlling the objective lens of the current magnification to collect the incident light reflected by the standard diffuse reflection plate at a plurality of different set collection angles in sequence, until all the objective lenses of the set magnifications collect the incident light reflected by the standard diffuse reflection plate at different set collection angles.

9. A spectrum calibration device, characterized in that: include: Light acquisition module, database determination module, information acquisition module and calibration module; The light acquisition module is used to control multiple objective lenses with different set magnifications to collect incident light reflected by a standard diffuse reflection plate at multiple different set collection angles to obtain multiple reflection spectrum information; wherein the set collection angle is the angle between a first set vertical line and a second set vertical line, the first set vertical line is perpendicular to the surface of the standard diffuse reflection plate reflecting the incident light, and the second set vertical line is perpendicular to the surface of the objective lens receiving light; The database determination module is used to establish a calibration database according to all the acquired reflection spectrum information; wherein the calibration database includes calibration values ​​corresponding to objective lenses of multiple magnifications at multiple collection angles; The information acquisition module is used to obtain the actual spectrum information of the light emitted by the sample to be tested received by the objective lens and the actual magnification and actual collection angle of the objective lens receiving the light emitted by the sample to be tested; wherein the actual collection angle is the angle between the surface of the sample to be tested emitting light and the second set vertical line; The calibration module is used to correct the actual spectral information according to the calibration database, the actual magnification and the actual collection angle to obtain calibrated spectral information.

10. An angle-resolving optical path system, characterized in that: Includes the spectral calibration device as described in claim 9.

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