Silicon square bar testing equipment

Abstract

The present application discloses a silicon square bar detection device, which includes a frame, a visual detection component, a moving component, and a clamping component; the moving component is used to drive the visual detection component to move along the extension direction of the frame; there is an installation space for placing the silicon square bar between the clamping components, and when the clamping component clamps the silicon square bar, the silicon square bar is suspended above the frame; wherein, the visual detection component includes a shell, a first shooting mechanism and a second shooting mechanism, the shell has a processing volume and covers at least part of the installation space, the first shooting mechanism and the second shooting mechanism are both located in the processing volume and fixed to the shell, the first shooting mechanism is used to detect the surface of the silicon square bar, and the second shooting mechanism is used to detect the edges of the silicon square bar. Through the above arrangement, automatic detection of the appearance of the silicon square bar can be achieved, which is conducive to improving the detection accuracy and detection efficiency of the silicon square bar.

Description

Technical Field

[0001] The present application relates to the technical field of silicon square bar detection, and in particular to a silicon square bar detection device. Background Art

[0002] Silicon square rod is an important semiconductor material, mainly used to manufacture silicon wafers, and then used in photovoltaic and chip fields.

[0003] Before packaging finished silicon square bars, they need to undergo a visual inspection to improve their quality. Existing techniques typically rely on manual visual inspection of the bars, but manual inspections are prone to missed or misjudgment, reducing the accuracy of appearance inspections. Furthermore, manual inspections often require the bars to be flipped multiple times. Due to their heavy weight, manual flipping is difficult, reducing inspection efficiency.

[0004] Therefore, how to improve the detection accuracy and efficiency of silicon square rods is a technical problem that technicians in this field urgently need to solve. Summary of the Invention

[0005] In order to address the deficiencies of the prior art, the present application aims to provide a silicon square bar detection device, which can improve the detection accuracy and detection efficiency of silicon square bars.

[0006] To achieve the above objectives, this application adopts the following technical solutions:

[0007] A silicon square rod detection device includes a frame, a visual detection component, a moving component and a clamping component. The visual detection component is mounted on the frame and can move relative to the frame along the extension direction of the frame. The moving component is mounted on the frame and is also connected to the visual detection component. The moving component is used to drive the visual detection component to move along the extension direction of the frame. The clamping components are relatively arranged along the extension direction of the frame. There is an installation space for placing the silicon square rod between the clamping components. When the clamping components clamp the silicon square rod, the silicon square rod is suspended above the frame. The visual detection component includes a shell, a first shooting mechanism and a second shooting mechanism. The shell has a processing volume and covers at least part of the installation space. The first shooting mechanism and the second shooting mechanism are both located in the processing volume and fixed to the shell. The first shooting mechanism is used to detect the surface of the silicon square rod, and the second shooting mechanism is used to detect the edge of the silicon square rod.

[0008] Furthermore, the first shooting mechanism includes a plurality of first cameras, which are arranged around the silicon square rod, and each first camera corresponds to a surface of the silicon square rod.

[0009] Furthermore, each first camera is configured with two light sources for illuminating the surface it photographs, and the two light sources are respectively defined as a first light source and a second light source. The angle between the illumination direction of the first light source and the surface is defined as a first angle, the angle between the illumination direction of the second light source and the surface is defined as a second angle, and the angle between the viewing angle direction of the first camera and the surface is defined as a third angle. The first angle and the third angle are equal in size, and the second angle and the third angle are not equal in size.

[0010] Furthermore, the second shooting mechanism includes a plurality of second cameras, which are arranged around the outer edge of the silicon square rod, each second camera corresponds to an edge of the silicon square rod, and each second camera is configured with two light sources, and the two light sources have different emission angles.

[0011] Furthermore, the first shooting mechanism includes a plurality of first cameras, the second shooting mechanism includes a plurality of second cameras, and the plurality of first cameras and the plurality of second cameras are staggered.

[0012] Furthermore, the first shooting mechanism includes several first cameras, the second shooting mechanism includes several second cameras, and the visual detection component also includes an adjustment mechanism fixed to the shell, which is used to adjust the distance between the several first cameras and / or several second cameras and the silicon square rod.

[0013] Furthermore, the silicon square rod detection equipment also includes a lifting assembly, which is installed on the frame and can move relative to the frame in the height direction. The lifting assembly includes a support platform arranged in a "V" shape, and the support platform is used to support the silicon square rod so that one edge of the silicon square rod faces the bottom of the frame; two first cameras among the plurality of first cameras are arranged above the silicon square rod, and the adjustment mechanism includes a first adjustment mechanism connected to the two first cameras. One of the two first cameras can approach or move away from the silicon square rod along a first preset direction under the action of the first adjustment mechanism, and the first preset direction is perpendicular to the surface of the silicon square rod photographed by one first camera. The other first camera among the two second cameras can approach or move away from the silicon square rod along a second preset direction under the action of the first adjustment mechanism, and the second preset direction is perpendicular to the surface of the silicon square rod photographed by the other first camera; wherein, the first preset direction and the second preset direction form an angle of 90°, and the first preset direction and the second preset direction respectively form an angle of 45° with the horizontal plane.

[0014] Furthermore, two first cameras among the plurality of first cameras are arranged below the silicon square rod and remain relatively fixed to the housing.

[0015] Furthermore, two of the plurality of second cameras are respectively arranged on the upper and lower sides of the silicon square rod, and the viewing angles of the two second cameras are parallel to the height direction; the adjustment mechanism includes a second adjustment mechanism and a third adjustment mechanism, the second adjustment mechanism is respectively connected to the two second cameras, and the third adjustment mechanism is connected to the second camera arranged on the upper side of the silicon square rod. The second adjustment mechanism acts on the two second cameras on the upper and lower sides of the silicon square rod to move along the height direction to approach or move away from the silicon square rod, and the third adjustment mechanism acts on the second camera on the upper side of the silicon square rod to move along the horizontal direction, so that the second camera arranged above the silicon square rod is aligned with the upper edge of the silicon square rod.

[0016] Furthermore, two of the plurality of second cameras are respectively arranged on the left and right sides of the silicon square rod, and the viewing angles of the two second cameras are parallel to the horizontal direction; the adjustment mechanism includes a fourth adjustment mechanism connected to the two second cameras, and the fourth adjustment mechanism acts on the two second cameras on the left and right sides of the silicon square rod to move respectively along the first preset direction and the second preset direction, so that the two second cameras arranged on the left and right sides of the silicon square rod are aligned with the left and right edges of the silicon square rod.

[0017] In the present application, the silicon square rod is clamped by a clamping assembly, and the appearance of the silicon square rod can be automatically inspected by a visual inspection assembly in conjunction with a moving assembly, thereby eliminating the need for manual visual inspection of the appearance of the silicon square rod, thereby helping to improve the inspection accuracy and efficiency of the silicon square rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the overall structure of a silicon square rod detection device provided in an embodiment of the present application;

[0019] Figure 2 A schematic diagram of the assembly of a frame and a clamping assembly for a silicon square bar detection device provided in an embodiment of the present application;

[0020] Figure 3 A schematic structural diagram of a first fixing mechanism of a silicon square rod detection device provided in an embodiment of the present application;

[0021] Figure 4 A schematic diagram of the structure of the lifting assembly of the silicon square bar detection equipment provided in an embodiment of the present application;

[0022] Figure 5 A schematic diagram of the structure of a visual inspection component of a silicon square bar inspection device provided in an embodiment of the present application;

[0023] Figure 6 A schematic diagram of the combination of a first photographing mechanism, a second photographing mechanism, and a light source of a silicon square bar detection device provided in an embodiment of the present application;

[0024] Figure 7A schematic diagram of a partial structure of a first photographing mechanism and a second photographing mechanism of a silicon square bar detection device provided in an embodiment of the present application;

[0025] Figure 8 This is a schematic structural diagram of the first photographing mechanism, the second photographing mechanism, and the adjusting mechanism of the silicon square rod detection equipment provided in an embodiment of the present application.

[0026] Among them, 100, silicon square bar detection equipment; 11, frame; 12, lifting assembly; 121, support platform; 122, third drive mechanism; 123, fourth drive mechanism; 124, lifting seat; 13, clamping assembly; 131, first clamping assembly; 1311, first fixing mechanism; 1311a, first connecting member; 1311b, second connecting member; 1311c, movable member; 1312, first drive mechanism; 1313, positioning member; 132, second clamping assembly; 1321, second fixing mechanism; 1322, second drive mechanism; 133, installation space; 14, visual inspection assembly; 141, housing; 142, first shooting mechanism; 1421. First camera; 143. Second shooting mechanism; 1431. Second camera; 144. Light source; 1441. First light source; 1442. Second light source; 1443. Third light source; 1444. Fourth light source; 145. Adjustment mechanism; 1451. First adjustment mechanism; 1452. Second adjustment mechanism; 1453. Third adjustment mechanism; 1454. Fourth adjustment mechanism; 146. First preset direction; 147. Second preset direction; 15. Moving component; 200. Silicon square rod; 21. First surface; 22. Second surface; 23. First edge; 24. Second edge; α, first angle; β, second angle; γ, third angle. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation of the present application will be clearly and completely described below in conjunction with the drawings in the implementation of the present application.

[0028] It should be noted that the words "first", "second" and similar terms used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "an" do not indicate a quantity limitation, but rather indicate the presence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are used for ease of description only and are not limited to one position or one spatial orientation. Words such as "include" or "comprising" and similar terms mean that the elements or objects appearing before "include" or "comprising" include the elements or objects listed after "include" or "comprising" and their equivalents, and do not exclude other elements or objects. Words such as "connected" or "connected" and similar terms are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0029] As used in this specification and the appended claims, the singular forms "a," "an," "said," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0030] In order to clearly illustrate the technical solution of this application, the following is also defined: Figure 1 The front, back, up, down, left and right directions are shown.

[0031] like Figures 1 to 3 As shown, the present application provides a silicon square bar inspection device 100, which is used to inspect the appearance of silicon square bar 200. The silicon square bar inspection device 100 includes a silicon square bar inspection platform, which is used to clamp the silicon square bar 200 and provide an inspection space for the silicon square bar 200. The silicon square bar inspection platform includes a frame 11, a lifting assembly 12, and a clamping assembly 13. The frame 11 is used to support the lifting assembly 12 and the clamping assembly 13. The lifting assembly 12 is used to support the silicon square bar 200. The lifting assembly 12 is mounted on the frame 11 and can move relative to the frame 11 in the height direction. In this application, the height direction is parallel to the up and down direction of the silicon square bar inspection device 100. With this arrangement, when the silicon square bar 200 is placed on the lifting assembly 12, the lifting assembly 12 can drive the silicon square bar 200 to move up and down, thereby facilitating the loading and unloading of the silicon square bar 200 on the silicon square bar inspection device 100. The clamping assembly 13 is used to clamp the silicon square rod 200 , and the clamping assembly 13 is installed on the frame 11 .

[0032] Specifically, the clamping assembly 13 includes a first clamping assembly 131 and a second clamping assembly 132. The first clamping assembly 131 and the second clamping assembly 132 are both arranged along the extension direction of the frame 11. The lifting assembly 12 is located between the first clamping assembly 131 and the second clamping assembly 132. The first clamping assembly 131 and the second clamping assembly 132 cooperate to clamp or release the silicon square rod 200. In the present application, the extension direction of the frame 11 is the front-to-back direction of the silicon square rod detection device 100. Through the above arrangement, the first clamping assembly 131 and the second clamping assembly 132 can be used to clamp and release the silicon square rod 200, thereby facilitating the appearance inspection of the silicon square rod 200.

[0033] More specifically, the first clamping assembly 131 includes a first fixing mechanism 1311 and a first driving mechanism 1312. The first driving mechanism 1312 is fixed to the frame 11 and is located on the side of the first driving mechanism 1312 facing the lifting assembly 12. When the silicon square rod 200 is placed on the lifting assembly 12, the first driving mechanism 1312 is used to drive the first fixing mechanism 1311 toward or away from the silicon square rod 200 along the extension direction of the frame 11. Exemplarily, when the first fixing mechanism 1311 approaches the silicon square rod 200 along the front-to-back direction of the silicon square rod testing apparatus 100, the first clamping assembly 131 can cooperate with the second clamping assembly 132 to clamp the silicon square rod 200. When the first fixing mechanism 1311 moves away from the silicon square rod 200 along the front-to-back direction of the silicon square rod testing apparatus 100, the first clamping assembly 131 and the second clamping assembly 132 release the silicon square rod 200. Exemplarily, the first driving mechanism includes, but is not limited to, a motor, a cylinder, etc. This application does not limit the structural form of the first driving mechanism 1312.

[0034] In this embodiment, the first fixing mechanism 1311 includes a first connecting member 1311a and a second connecting member 1311b. A movable member 1311c is disposed between the first connecting member 1311a and the second connecting member 1311b, and the first connecting member 1311a is movably connected to the second connecting member 1311b via the movable member 1311c to adjust the angle between the two opposing end faces of the first connecting member 1311a and the second connecting member 1311b. With this arrangement, the movable member 1311c can adjust the inclination angle of the second connecting member 1311b relative to the first connecting member 1311a. In this application, the first connecting member 1311a is connected to the first driving mechanism 1312, so that the first driving mechanism 1312 can drive the first connecting member 1311a to move in the front-to-back direction of the silicon square rod detection device 100. When the first clamping assembly 131 clamps the silicon square rod 200 , the second connecting member 1311 b abuts against the silicon square rod 200 to achieve clamping of the silicon square rod 200 .

[0035] It should be noted that during the cutting process of the silicon square rod 200, due to cutting errors or the tilt of the silicon square rod during the cutting process, the two opposite end faces of the silicon square rod 200 may be inclined surfaces. When the first clamping assembly 131 and the second clamping assembly 132 clamp the silicon square rod 200, the inclination angle of the second connecting member 1311b relative to the first connecting member 1311a is adjusted by the movable member 1311c, so that the second connecting member 1311b can adapt to the silicon square rod 200 with the tilted end, which is conducive to increasing the contact area between the second connecting member 1311b and the silicon square rod 200, thereby improving the clamping stability of the first clamping assembly 131 on the silicon square rod 200, and then helping to improve the overall clamping stability of the silicon square rod detection equipment 100 on the silicon square rod 200.

[0036] In addition, the above arrangement can also prevent the clamping assembly 13 from being unstable and causing the silicon square rod 200 to fall, thereby preventing the silicon square rod 200 from being damaged, and further improving the protection of the silicon square rod detection device 100 for the silicon square rod 200.

[0037] like Figure 3 As shown, as an embodiment, the movable member 1311c is configured as a ball shaft. Specifically, one end of the ball shaft is fixedly connected to the second connecting member 1311b. In addition, the first connecting member 1311a has a groove body adapted to the ball shaft, and the ball head of the ball shaft is installed in the groove body. In this embodiment, the end of the ball shaft away from the ball head is fixedly connected to the second connecting member 1311b. Such an arrangement allows the second connecting member 1311b and the first connecting member 1311a to achieve relative rotation through the ball shaft, thereby adjusting the angle between the two opposite end faces of the first connecting member 1311a and the second connecting member 1311b, and then adjusting the inclination angle of the second connecting member 1311b relative to the first connecting member 1311a, so that the second connecting member 1311b can adapt to the silicon square rod 200 with an inclined end.

[0038] In addition, the ball shaft can rotate to any angle, so that the second connecting member 1311b can be rotated to any angle through the ball shaft, so that the second connecting member 1311b can adapt to the silicon square rod 200 with different end inclination states, which is beneficial to improving the versatility of the first fixing mechanism 1311 in clamping the silicon square rod 200.

[0039] It should be noted that the movable member 1311c may also be a spring, a rubber tube, or other component or structure capable of adjusting the angle between the opposing end surfaces of the first and second connecting members 1311a, 1311b. Therefore, this application does not impose any restrictions on the structure or form of the movable member 1311c; it only needs to ensure that the movable member 1311c can adjust the tilt angle of the second connecting member 1311b relative to the first connecting member 1311a.

[0040] As an embodiment, the first clamping assembly 131 further includes a positioning member 1313, the ends of which are respectively connected to the first connecting member 1311a and the second connecting member 1311b. The positioning member 1313 is used to fix the angle between the two opposing end faces of the first connecting member 1311a and the second connecting member 1311b. With this arrangement, when the inclination angle of the second connecting member 1311b relative to the first connecting member 1311a is adjusted, the positioning member 1313 can fix the relative position of the first connecting member 1311a and the second connecting member 1311b, thereby improving the connection stability between the first connecting member 1311a and the second connecting member 1311b, and further facilitating the stability of the silicon square rod testing device 100 in clamping the silicon square rod 200.

[0041] For example, the positioning member 1313 may be a damper. The damper allows the second connecting member 1311b to remain in any position after rotation without restricting the rotation of the second connecting member 1311b. This helps improve the connection stability between the first connecting member 1311a and the second connecting member 1311b, allowing the second connecting member 1311b to fit and clamp the silicon square rod 200 with its tilted end. Furthermore, there is no need to repeatedly adjust the tilt angle of the second connecting member 1311b, thereby improving the ease of use of the second connecting member 1311b.

[0042] In one embodiment, the second clamping assembly 132 includes a second fixing mechanism 1321 mounted on the frame 11. The second fixing mechanism 1321 is positioned opposite the first fixing mechanism 1311 to clamp the silicon square bar 200. With this arrangement, the second fixing mechanism 1321 and the first fixing mechanism 1311 can clamp both ends of the silicon square bar 200 along the front-to-back direction of the silicon square bar testing apparatus 100, facilitating visual inspection of the silicon square bar 200.

[0043] In this application, the structure of the second fixing mechanism 1321 is consistent with that of the first fixing mechanism 1311, and the structure of the second fixing mechanism 1321 is not further described here. This arrangement allows the first fixing mechanism 1311 and the second fixing mechanism 1321 to respectively adapt and clamp the silicon square rod 200 with its two ends tilted, thereby improving the overall clamping stability of the clamping assembly 13 on the silicon square rod 200.

[0044] In another embodiment, the second clamping assembly 132 includes a second fixing mechanism 1321 and a second driving mechanism 1322. The second driving mechanism 1322 is mounted on the frame 11 and connected to the second fixing mechanism 1321. The second driving mechanism 1322 is configured to drive the second fixing mechanism 1321 toward or away from the silicon square rod 200 along the extension direction of the frame 11. With this arrangement, the second driving mechanism 1322 can drive the second fixing mechanism 1321 to move in the front-to-back direction of the silicon square rod testing device 100. This, in turn, cooperates with the first driving mechanism 1312 to drive the first fixing mechanism 1311 to move in the front-to-back direction of the silicon square rod testing device 100, thereby clamping and releasing the silicon square rod 200. Furthermore, the second driving mechanism 1322 can cooperate with the first driving mechanism 1312 to apply clamping force to each end of the silicon square rod 200, thereby improving the clamping stability of the clamping assembly 13 on the silicon square rod 200.

[0045] Exemplarily, when the first drive mechanism 1312 drives the first fixing mechanism 1311 toward the silicon square bar 200, the second drive mechanism 1322 also drives the second fixing mechanism 1321 toward the silicon square bar 200, thereby enabling the first fixing mechanism 1311 and the second fixing mechanism 1321 to clamp both ends of the silicon square bar 200, facilitating visual inspection of the silicon square bar 200. When the first drive mechanism 1312 drives the first fixing mechanism 1311 away from the silicon square bar 200, the second drive mechanism 1322 also drives the second fixing mechanism 1321 away from the silicon square bar 200, thereby causing the clamping assembly 13 to release the silicon square bar 200, thereby facilitating unloading of the silicon square bar 200. In some embodiments, the second drive mechanism 1322 may be a pneumatic cylinder capable of driving the second fixing mechanism 1321 to move in the front-to-back direction of the silicon square bar inspection apparatus 100, thereby moving the second fixing mechanism 1321 toward or away from the silicon square bar 200.

[0046] It should be noted that the present application does not restrict whether the second clamping assembly 132 is provided with a second driving mechanism 1322 . It only requires that the second clamping assembly 132 can cooperate with the first clamping assembly 131 to clamp or release the silicon square rod 200 .

[0047] It should be noted that, in the present application, the second clamping assembly 132 including the second fixing mechanism 1321 and the second driving mechanism 1322 is taken as an example for description.

[0048] like Figure 1 and Figure 4As shown, as an embodiment, the lifting assembly 12 includes a support platform 121 and a third drive mechanism 122. The support platform 121 is used to support the silicon square rod 200, and the third drive mechanism 122 is used to drive the support platform 121 to move along a first direction, and the first direction is parallel to the extension direction of the frame 11. In this application, the first direction is the front of the silicon square rod detection device 100. With this configuration, the third drive mechanism 122 can drive the support platform 121 and the silicon square rod 200 to move along the first direction, thereby adjusting the position of the silicon square rod 200.

[0049] Specifically, the third driving mechanism 122 is configured as a single-acting cylinder, so that the third driving mechanism 122 can only drive the support platform 121 to move along the first direction.

[0050] As an optional implementation, the support platform 121 includes a first position indicating that the third drive mechanism 122 is in an initial state. Before the first clamping assembly 131 and the second clamping assembly 132 clamp the silicon square rod 200, the support platform 121 can be moved to a second position under the action of the third drive mechanism 122. The second position is located in the first direction to the first position. The initial state refers to the state of the support platform 121 when the support platform 121 and the first clamping assembly 131 are on the same horizontal plane and the support platform 121 is not being driven by the third drive mechanism 122.

[0051] In one embodiment, the first clamping assembly 131 is arranged on the second direction side of the silicon square bar 200, where the second direction is opposite to the first direction. In this application, the second direction is the rear of the silicon square bar testing device 100. The first clamping assembly 131 is arranged on the rear side of the support platform 121, and the second clamping assembly 132 is arranged on the front side of the support platform 121.

[0052] Specifically, before the first clamping assembly 131 and the second clamping assembly 132 clamp the silicon square rod 200, the support platform 121 can be moved to the second position under the action of the third driving mechanism 122, so that when the first clamping assembly 131 reaches the set position, a certain gap exists between the first clamping assembly 131 and the silicon square rod 200. The set position refers to the position of the first clamping assembly 131 when the first clamping assembly 131 clamps the silicon square rod 200.

[0053] Through the above-mentioned setting, when the first clamping component 131 reaches the set position, there is a gap between the first clamping component 131 and the silicon square rod 200, thereby preventing the first clamping component 131 from excessively moving when moving to the preset position, causing the first clamping component 131 to push the silicon square rod 200 to move relative to the support platform 121, thereby preventing the silicon square rod 200 from moving relative to the support platform 121 and causing the silicon square rod 200 to wear on the support platform 121, which is beneficial to improving the protection of the outer wall of the silicon square rod 200 and improving the surface quality of the silicon square rod 200.

[0054] More specifically, the second clamping assembly 132 moves in the second direction until it contacts the silicon square rod 200, pushing the silicon square rod 200 and the support platform 121 in the second direction, causing the support platform 121 to retreat from the second position to the first position, and bringing the silicon square rod 200 into contact with the first clamping assembly 131. This arrangement enables the second clamping assembly 132 to cooperate with the first clamping assembly 131 to clamp the silicon square rod 200.

[0055] In the present application, when the second clamping assembly 132 drives the silicon square rod 200 to move in the second direction, the friction between the silicon square rod 200 and the support platform 121 is greater than the force between the support platform 121 and the third driving mechanism 122, so that the second clamping assembly 132 can drive the silicon square rod 200 and the support platform 121 to move synchronously in the second direction, thereby preventing the silicon square rod 200 and the support platform 121 from moving relative to each other. This further prevents friction between the silicon square rod 200 and the support platform 121, which could cause wear on the silicon square rod 200, thereby improving the protection of the silicon square rod 200. Furthermore, this also facilitates the automatic resetting of the support platform 121 from the second position to the first position, eliminating the need for manual adjustment of the position of the support platform 121, thereby improving the working efficiency of the silicon square rod testing device 100.

[0056] It should be noted that the third driving mechanism 122 can also be other structures that can drive the support platform 121 to move forward along the front-to-back direction of the silicon square rod detection equipment 100 without restricting the support platform 121 from having freedom of movement backward. This application does not impose any restrictions on the structural form of the third driving mechanism 122.

[0057] As an optional implementation, the support platform 121 is configured in a "V" shape, with one edge of the silicon square rod 200 facing downward from the frame 11. This configuration facilitates the support platform 121 to limit the position of the silicon square rod 200, thereby limiting the angle of the silicon square rod 200 when the clamping assembly 13 clamps the silicon square rod 200. This prevents angular deflection of the silicon square rod 200 when the clamping assembly 13 clamps the silicon square rod 200, thereby improving the clamping accuracy of the clamping assembly 13 for the silicon square rod 200 and facilitating subsequent appearance inspection of the silicon square rod 200.

[0058] It should be noted that in this application, the cross-section of the silicon square rod 200 along the vertical direction of the silicon square rod testing device 100 is rectangular, and the "V"-shaped opening angle of the support platform 121 is 90°. This configuration allows the support platform 121 to support the silicon square rod 200 with one edge of the silicon square rod 200 facing downward along the vertical direction of the silicon square rod testing device 100, thereby effectively limiting the position of the silicon square rod 200.

[0059] like Figure 4 As shown, as an embodiment, the lifting assembly 12 further includes a fourth drive mechanism 123, which is connected to the support platform 121 and is used to drive the support platform 121 to move in a vertical direction. In this application, the vertical direction refers to the vertical direction of the silicon square bar testing equipment 100. With this configuration, the fourth drive mechanism 123 can drive the support platform 121 to move in the vertical direction of the silicon square bar testing equipment 100, so that the fourth drive mechanism 123 can drive the support platform 121 to move upward to the first position, which facilitates the clamping assembly 13 to clamp the silicon square bar 200. The fourth drive mechanism 123 can also drive the support platform 121 and the silicon square bar 200 to move downward, thereby facilitating the loading and unloading of the silicon square bar 200 and thereby improving the convenience of loading and unloading the silicon square bar 200. Exemplarily, the fourth drive mechanism 123 can be a linear cylinder, so that the fourth drive mechanism 123 can drive the support platform 121 to move in the vertical direction of the silicon square bar testing equipment 100.

[0060] As an optional implementation, the second clamping assembly 132 moves in the second direction, so that when the first clamping assembly 131 and the second clamping assembly 132 clamp the silicon square rod 200, the fourth drive mechanism 123 drives the support platform 121 to move in the height direction and return the support platform 121 to its initial position. The initial position refers to the position of the support platform 121 before the fourth drive mechanism 123 moves it upward to the first position and when the silicon square rod 200 is being loaded or unloaded on the support platform 121.

[0061] Specifically, when the support platform 121 returns to its initial position, it separates from the silicon square rod 200, allowing the silicon square rod 200 to be suspended on the silicon square rod inspection platform. This arrangement allows the silicon square rod 200 to be clamped solely by the clamping assembly 13, preventing the support platform 121 from obstructing the surface and edges of the silicon square rod 200, thereby facilitating appearance inspection of the silicon square rod 200.

[0062] In some embodiments, the lifting assembly 12 further includes a lifting base 124. The fourth drive mechanism 123 is connected to the lifting base 124, enabling the fourth drive mechanism 123 to drive the lifting base 124 to move vertically within the silicon square bar testing apparatus 100, thereby moving the support platform 121 between the first position and the initial position. The support platform 121 and the third drive mechanism 122 are both mounted on the lifting base 124, enabling the fourth drive mechanism 123 to synchronously drive the movement of the support platform 121 and the third drive mechanism 122.

[0063] like Figure 1 and Figure 5 As shown, as an embodiment, the silicon square bar inspection device 100 further includes a visual inspection component 14 and a moving component 15. The visual inspection component 14 is used to inspect the appearance of the silicon square bar 200. The visual inspection component 14 is mounted on the frame 11 and is movable relative to the frame 11 along the extension direction of the frame 11. The moving component 15 is mounted on the frame 11 and is also connected to the visual inspection component 14. The moving component 15 is used to drive the visual inspection component 14 to move along the extension direction of the frame 11 so that the visual inspection component 14 can inspect the appearance of the silicon square bar 200.

[0064] In this embodiment, a mounting space 133 for the silicon square rod 200 is defined between the clamping assemblies 13. When the clamping assemblies 13 clamp the silicon square rod 200, the silicon square rod 200 is suspended above the frame 11. This arrangement prevents the frame 11 from obstructing the surface of the silicon square rod 200, thereby facilitating inspection of the silicon square rod 200 by the visual inspection assembly 14.

[0065] Specifically, the visual inspection assembly 14 includes a housing 141, a first camera mechanism 142, and a second camera mechanism 143. The housing 141 has a processing volume and covers at least a portion of the installation space 133. The first camera mechanism 142 and the second camera mechanism 143 are both located within the processing volume and fixed to the housing 141, enabling the first camera mechanism 142 and the second camera mechanism 143 to perform visual inspection of the silicon square rod 200. Furthermore, the housing 141 is in transmission connection with the moving assembly 15, enabling the moving assembly 15 to drive the housing 141 to move in the front-to-back direction of the silicon square rod inspection apparatus 100.

[0066] More specifically, the first camera 142 is used to inspect the surface of the silicon square bar 200, and the second camera 143 is used to inspect the edges of the silicon square bar 200. This arrangement enables automatic inspection of the appearance of the silicon square bar 200 by the first and second cameras 142, 143, eliminating the need for manual visual inspection of the appearance quality of the silicon square bar 200. This avoids misjudgments and missed detections that can occur during manual inspection, thereby improving the accuracy of inspection of the silicon square bar 200. Furthermore, automatic inspection of the silicon square bar 200 by the visual inspection assembly 14 improves the efficiency of appearance inspection of the silicon square bar 200, thereby increasing production efficiency.

[0067] like Figure 6 and Figure 7 As shown, as one embodiment, the first imaging mechanism 142 includes several first cameras 1421 arranged around the silicon square rod 200, each first camera 1421 corresponding to a surface of the silicon square rod 200, and each first camera 1421 is equipped with two light sources 144. The second imaging mechanism 143 includes several second cameras 1431 arranged around the outer edge of the silicon square rod 200, each second camera 1431 corresponding to an edge of the silicon square rod 200, and each second camera 1431 is equipped with two light sources 144. With this arrangement, the first cameras 1421 and the second cameras 1431 can respectively capture and inspect the surface and edges of the silicon square rod 200.

[0068] like Figure 7 As shown, for example, taking any first camera 1421 as an example, two light sources 144 can illuminate the surface of the silicon square rod 200 corresponding to the first camera 1421. Specifically, the two light sources 144 are defined as a first light source 1441 and a second light source 1442. Furthermore, the angle between the illumination direction of the first light source 1441 and the surface is defined as a first angle α, the angle between the illumination direction of the second light source 1442 and the surface is defined as a second angle β, and the angle between the viewing angle of the first camera 1421 and the surface is defined as a third angle γ.

[0069] The first angle α and the third angle γ are equal in magnitude. Furthermore, in this embodiment, the viewing angle of the first camera 1421 is located at the exit end of the first light source 1441 after irradiating the surface of the silicon square rod 200. This arrangement improves the lighting effect of the first light source 1441 on the first camera 1421, thereby improving the image clarity of the first camera 1421.

[0070] Furthermore, the second angle β and the third angle γ are unequal. With this configuration, when the surface of the silicon square rod 200 is smooth, the refracted light from the second light source 1442 illuminating the surface of the silicon square rod 200 will not be directed toward the first camera 1421. However, when the surface of the silicon square rod 200 has defects such as protrusions or depressions, the light from the second light source 1442 will be refracted by these defects and directed toward the first camera 1421. This will result in a light spot on the surface of the silicon square rod 200 captured by the first camera 1421 that differs in brightness from the surrounding area. Therefore, the presence of a light spot on the surface of the silicon square rod 200 captured by the first camera 1421 can be used to determine whether the surface of the silicon square rod 200 has defects, thereby improving the accuracy of the silicon square rod inspection apparatus 100 in detecting the surface quality of the silicon square rod 200.

[0071] like Figure 7 As shown, in other examples, taking any second camera 1431 as an example, each second camera 1431 is configured with two light sources 144, and the two light sources 144 have different emission angles. For example, the two light sources 144 corresponding to the second camera 1431 are defined as a third light source 1443 and a fourth light source 1444. Furthermore, the angle between the viewing angle of the second camera 1431 and the horizontal plane is equal to the angle between the illumination direction of the third light source 1443 and the horizontal plane. The third light source 1443 and the fourth light source 1444 have different emission angles, that is, the angle between the viewing angle of the second camera 1431 and the horizontal plane is different from the angle between the illumination direction of the fourth light source 1444 and the horizontal plane. For example, when the edge of the silicon square rod 200 is smooth, the refracted light from the fourth light source 1444 irradiating the edge of the silicon square rod 200 will not be emitted toward the second camera 1431. However, when the edge of the silicon square rod 200 has defects such as protrusions or depressions, the light from the fourth light source 1444 will be refracted by the defects and emitted toward the second camera 1431, resulting in a light spot on the edge of the silicon square rod 200 with a brightness different from that of the surrounding area when photographed by the second camera 1431. Therefore, the presence of a light spot on the edge of the silicon square rod 200 photographed by the second camera 1431 can be used to determine whether the edge of the silicon square rod 200 has a defect, thereby improving the accuracy of the silicon square rod inspection device 100 in detecting the quality of the silicon square rod 200 edges.

[0072] As an embodiment, a plurality of first cameras 1421 and a plurality of second cameras 1431 are staggered. In the present application, the silicon square rod 200 is a rectangular rod. The above arrangement enables the first camera 1421 and the second camera 1431 to sequentially photograph and inspect the surface and edges of the silicon square rod 200, which is beneficial to improving the comprehensiveness of the visual inspection component 14 on the silicon square rod 200. This eliminates the need to flip the silicon square rod 200 during the inspection process, thereby reducing the number of steps in the appearance inspection of the silicon square rod 200, thereby reducing the workload of the appearance inspection of the silicon square rod 200 and improving the appearance inspection efficiency of the silicon square rod 200. In addition, it can also avoid the situation where the silicon square rod 200 is damaged due to flipping, thereby improving the protection of the silicon square rod 200, which is beneficial to improving the product quality of the silicon square rod 200.

[0073] like Figure 8 As shown, in this embodiment, the visual inspection assembly 14 further includes an adjustment mechanism 145. The adjustment mechanism 145 is used to adjust the distance between the plurality of first cameras 1421 and / or the plurality of second cameras 1431 and the silicon square rod 200. The adjustment mechanism 145 is fixed to the housing 141. This arrangement enables the first cameras 1421 and the second cameras 1431 to photograph and inspect silicon square rods 200 of different sizes, thereby improving the versatility of the silicon square rod inspection device 100.

[0074] In this embodiment, two of the plurality of first cameras 1421 are arranged above the silicon square bar 200 along the vertical direction of the silicon square bar inspection apparatus 100. One of the two first cameras 1421 is located on the upper left side of the silicon square bar 200, and the other of the two first cameras 1421 is located on the upper right side of the silicon square bar 200, so as to inspect the two surfaces above the silicon square bar 200, respectively.

[0075] Specifically, the adjustment mechanism 145 includes a first adjustment mechanism 1451 connected to two first cameras 1421. Under the control of the first adjustment mechanism 1451, one of the two first cameras 1421 can move toward or away from the silicon square rod 200 along a first preset direction 146. The first preset direction 146 is perpendicular to the surface of the silicon square rod 200 captured by the first camera 1421. Under the control of the first adjustment mechanism 1451, the other of the two second cameras 1431 can move toward or away from the silicon square rod 200 along a second preset direction 147. The second preset direction 147 is perpendicular to the surface of the silicon square rod 200 captured by the other first camera 1421. More specifically, the first preset direction 146 and the second preset direction 147 form a 90° angle, and each of the first preset direction 146 and the second preset direction 147 forms a 45° angle with the horizontal plane. Such an arrangement enables the first adjustment mechanism 1451 to adjust the distance between the two first cameras 1421 and the surface of the silicon square rod 200 respectively, thereby facilitating the first cameras 1421 to detect silicon square rods 200 of different sizes.

[0076] For example, along the vertical direction of the silicon square bar inspection device 100, the upper left surface of the silicon square bar 200 is defined as the first surface 21, and the upper right surface of the silicon square bar 200 is defined as the second surface 22. Furthermore, the first preset direction 146 is perpendicular to the first surface 21, and the second preset direction 147 is perpendicular to the second surface 22. When the size of the silicon square bar 200 decreases, the first adjustment mechanism 1451 drives one first camera 1421 toward the first surface 21 along the first preset direction 146. Simultaneously, the first adjustment mechanism 1451 drives another first camera 1421 toward the second surface 22 along the second preset direction 147, thereby enabling the two first cameras 1421 to adapt to the smaller silicon square bar 200. When the size of the silicon square rod 200 increases, the first adjustment mechanism 1451 drives one first camera 1421 away from the first surface 21 along the first preset direction 146. Simultaneously, the first adjustment mechanism 1451 drives the other first camera 1421 away from the second surface 22 along the second preset direction 147. This allows the two first cameras 1421 to adapt to the increased size of the silicon square rod 200. Through these steps, the versatility of the two first cameras 1421 in inspecting the silicon square rod 200 can be improved.

[0077] In some embodiments, the first adjustment mechanism 1451 includes two sets of linear cylinders, so that the two sets of linear cylinders can respectively adjust the movement of the two first cameras 1421. It should be noted that when the first adjustment mechanism 1451 drives the first cameras 1421 to move, the first adjustment mechanism 1451 also synchronously drives the two light sources 144 corresponding to the imaging surfaces of the first cameras 1421.

[0078] As one embodiment, two of the plurality of first cameras 1421 are arranged below the silicon square bar 200 along the vertical direction of the silicon square bar inspection device 100 and are relatively fixed to the housing 141. One of the two first cameras 1421 is located at the lower left of the silicon square bar 200 and is fixedly connected to the housing 141, while the other is located at the lower right of the silicon square bar 200 and is fixedly connected to the housing 141. Furthermore, the light sources 144 corresponding to the two first cameras 1421 are also fixed to the housing 141, enabling the two first cameras 1421 to inspect both surfaces below the silicon square bar 200.

[0079] In one embodiment, two of the plurality of second cameras 1431 are positioned on the upper and lower sides of the silicon square bar 200, respectively, along the vertical direction of the silicon square bar inspection apparatus 100. The viewing angles of both second cameras 1431 are parallel to the height direction. The viewing angle of the second camera 1431 positioned above the silicon square bar 200 faces downward along the vertical direction of the silicon square bar inspection apparatus 100; the viewing angle of the second camera 1431 positioned below the silicon square bar 200 faces upward along the vertical direction of the silicon square bar inspection apparatus 100. This arrangement enables the two second cameras 1431 to inspect the edges of the silicon square bar 200 on both the upper and lower sides.

[0080] More specifically, the adjustment mechanism 145 includes a second adjustment mechanism 1452 and a third adjustment mechanism 1453. The second adjustment mechanism 1452 is connected to each of the two second cameras 1431, while the third adjustment mechanism 1453 is connected to the second camera 1431 located above the silicon square rod 200. The second adjustment mechanism 1452 acts on the two second cameras 1431 on the upper and lower sides of the silicon square rod 200 to move them in the height direction, moving them closer to or further away from the silicon square rod 200. With this arrangement, the second adjustment mechanism 1452 can adjust the vertical distance between the two second cameras 1431 on the upper and lower sides of the silicon square rod 200 and the silicon square rod 200 in the silicon square rod inspection apparatus 100, facilitating the second cameras 1431 to photograph and inspect silicon square rods 200 of different sizes.

[0081] In some embodiments, the second adjustment mechanism 1452 includes two sets of linear cylinders, each capable of independently adjusting the movement of the two second cameras 1431. It should be noted that when the second adjustment mechanism 1452 drives the second cameras 1431 to move, it also simultaneously drives the two light sources 144 used to illuminate the edges of the silicon square rod 200 captured by the second cameras 1431.

[0082] In this embodiment, the third adjustment mechanism 1453 acts on the second camera 1431 above the silicon square rod 200 to move horizontally, aligning the second camera 1431 above the silicon square rod 200 with the upper edge of the silicon square rod 200. In this application, the horizontal direction refers to the left-right direction of the silicon square rod inspection apparatus 100. As will be appreciated, as the size of the silicon square rod 200 changes, the upper edge of the silicon square rod 200 will move left-right. The third adjustment mechanism 1453 allows the second camera 1431 above the silicon square rod 200 to be precisely aligned with the upper edge of the silicon square rod 200, thereby improving the inspection accuracy of the second camera 1431 above the silicon square rod 200 and, in turn, the overall inspection accuracy of the silicon square rod 200 appearance quality by the silicon square rod inspection apparatus 100.

[0083] In some embodiments, the third adjustment mechanism 1453 includes a linear cylinder, which can drive the second camera 1431 on the upper side of the silicon square bar 200 to move in the left and right directions of the silicon square bar inspection apparatus 100. It should be noted that when the third adjustment mechanism 1453 drives the second camera 1431 to move, the third adjustment mechanism 1453 simultaneously drives the two light sources 144 used to illuminate the edges of the silicon square bar 200 captured by the second camera 1431.

[0084] In addition, when the second adjustment mechanism 1452 located above the silicon square rod 200 drives the above-mentioned second camera 1431 to move, the second adjustment mechanism 1452 also synchronously drives the third adjustment mechanism 1453 to move, or, when the third adjustment mechanism 1453 drives the second camera 1431 to move, the third adjustment mechanism 1453 also synchronously drives the second adjustment mechanism 1452 located above the silicon square rod 200.

[0085] In one embodiment, two of the plurality of second cameras 1431 are positioned on the left and right sides of the silicon square bar 200, respectively, along the left-right direction of the silicon square bar inspection apparatus 100. The viewing angles of the two second cameras 1431 are parallel to the horizontal direction. In this application, the horizontal direction refers to the left-right direction of the silicon square bar inspection apparatus 100. The viewing angle of the second camera 1431 positioned on the left side of the silicon square bar 200 faces right, while the viewing angle of the second camera 1431 positioned on the right side of the silicon square bar 200 faces left. This allows the two second cameras 1431 to inspect the edges of the silicon square bar 200 on both sides.

[0086] More specifically, the adjustment mechanism 145 includes a fourth adjustment mechanism 1454 connected to the two second cameras 1431. The fourth adjustment mechanism 1454 causes the two second cameras 1431 on the left and right sides of the silicon square rod 200 to move in the first and second preset directions 146 and 147, respectively, so that the two second cameras 1431, arranged on the left and right sides of the silicon square rod 200, are aligned with the left and right edges of the silicon square rod 200. As can be understood, when the size of the silicon square rod 200 changes, the left and right edges of the silicon square rod 200 will move in the first and second preset directions 146 and 147, respectively. Through this arrangement, when the size of the silicon square rod 200 changes, the fourth mechanism allows the two second cameras 1431 on the left and right sides of the silicon square rod 200 to accurately align with the left and right edges of the silicon square rod 200, thereby improving the accuracy of the second cameras 1431 in detecting the left and right edges of the silicon square rod 200.

[0087] For example, along the left and right directions of the silicon square rod detection equipment 100, the edge of the silicon square rod 200 on the left is defined as the first edge 23, the edge of the silicon square rod 200 on the right is defined as the second edge 24, the surface of the silicon square rod 200 on the upper left is defined as the first surface 21, the surface of the silicon square rod 200 on the upper right is defined as the second surface 22, and the first preset direction 146 is perpendicular to the first surface 21, and the second preset direction 147 is perpendicular to the second surface 22. When the size of the silicon square rod 200 changes, the fourth adjustment mechanism 1454 drives the second camera 1431 located on the left side of the silicon square rod 200 to move along the first preset direction 146, so that the second camera 1431 located on the left side of the silicon square rod 200 is close to the first edge 23. At the same time, the fourth adjustment mechanism 1454 drives the second camera 1431 located on the right side of the silicon square rod 200 to move along the second preset direction 147, so that the second camera 1431 located on the right side of the silicon square rod 200 is close to the second edge 24, so that the above two second cameras 1431 can be respectively aligned with the first edge 23 and the second edge 24, which is conducive to improving the detection accuracy of the above two second cameras 1431 on the edges of the silicon square rod 200.

[0088] In some embodiments, the fourth adjustment mechanism 1454 includes two sets of linear cylinders, each capable of adjusting the movement of the two second cameras 1431. It should be noted that when the fourth drive mechanism 123 drives the two second cameras 1431 to move, it also synchronously drives the light source 144 used to illuminate the two second cameras 1431 to capture the edges of the silicon square rod 200.

[0089] In this application, the working process of the silicon square rod detection device 100 is as follows:

[0090] First, a robotic arm places a square silicon rod 200 on the support platform 121. The fourth drive mechanism 123 then drives the support platform 121 upward to a first position. At this point, the V-shaped structure of the support platform 121 allows the square silicon rod 200 to be positioned so that its lower edge faces downward.

[0091] Then, the third drive mechanism 122 drives the support platform 121 and the silicon square rod 200 forward, causing the support platform 121 to move to the second position. At this point, there is a certain gap between the silicon square rod 200 and the first clamping assembly 131 behind it. This prevents the first clamping assembly 131 from pushing the silicon square rod 200 relative to the support platform 121 when the first clamping assembly 131 moves to the set position, thereby preventing wear on the silicon square rod 200. This improves the protection of the silicon square rod 200.

[0092] Then, the second clamping assembly 132 drives the silicon square rod 200 to move backward, causing the silicon square rod 200 to abut against the first clamping assembly 131 to clamp the silicon square rod 200. During the backward movement of the silicon square rod 200, the silicon square rod 200 and the support platform 121 move backward synchronously, thereby preventing the silicon square rod 200 from relative movement with the support platform 121 and causing wear on the silicon square rod 200, further improving the protection of the silicon square rod 200. Furthermore, during the process of the clamping assembly 13 clamping the silicon square rod 200, the first fixing mechanism 1311 on the first clamping assembly 131 and the second fixing mechanism 1321 on the second clamping assembly 132 can respectively adapt to the inclined end surfaces of the two ends of the silicon square rod 200, thereby facilitating the stability of the clamping assembly 13 in clamping the silicon square rod 200.

[0093] Then, the fourth driving mechanism 123 drives the support platform 121 to move downward to prevent the support platform 121 from blocking the silicon square rod 200 .

[0094] Finally, the moving component 15 drives the shell 141 to move forward, so that the first shooting mechanism 142 in the shell 141 can shoot and detect the surface of the silicon square rod 200, and the second shooting mechanism 143 can shoot and detect the edges of the silicon square rod 200, thereby realizing automatic detection of the appearance quality of the silicon square rod 200, which is beneficial to improving the accuracy and efficiency of the appearance detection of the silicon square rod 200.

[0095] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all such improvements and changes should fall within the scope of protection of the claims appended to this application.

Claims

1. A silicon square bar detection device, characterized in that: include: Rack (11); a visual detection component (14), the visual detection component (14) being mounted on the frame (11) and being movable relative to the frame (11) along an extension direction of the frame (11); A moving component (15), the moving component (15) being mounted on the frame (11), the moving component (15) being further connected to the visual detection component (14), and the moving component (15) being used to drive the visual detection component (14) to move along an extension direction of the frame (11); A clamping assembly (13), the clamping assembly (13) comprising a first clamping assembly (131) and a second clamping assembly (132), both of which are arranged along the extension direction of the frame (11), an installation space (133) for placing a silicon square rod is provided between the first clamping assembly (131) and the second clamping assembly (132), and when the first clamping assembly (131) and the second clamping assembly (132) clamp the silicon square rod, the silicon square rod is suspended above the frame (11); A lifting assembly (12), wherein the lifting assembly (12) is mounted on the frame (11) and can move relative to the frame (11) in a height direction, the lifting assembly (12) is located between the first clamping assembly (131) and the second clamping assembly (132), the lifting assembly (12) includes a support platform (121) and a third driving mechanism (122), the support platform (121) is used to support the silicon square rod, and the third driving mechanism (122) is used to drive the support platform (121) to move in a first direction, wherein the first direction is parallel to the extension direction of the frame (11); the support platform (121) is used to support the silicon square rod, and the third driving mechanism (122) is used to drive the support platform (121) to move in a first direction. The support platform (121) includes a first position representing that the third driving mechanism (122) is in an initial state, and before the first clamping assembly (131) and the second clamping assembly (132) clamp the silicon square rod, the support platform (121) can be moved to a second position under the action of the third driving mechanism (122), and the second position is located on the first direction side of the first position, and the initial state refers to a state when the support platform (121) and the first clamping assembly (131) are in the same horizontal plane and the support platform (121) is not driven by the third driving mechanism (122); The first clamping assembly (131) is arranged on the second direction side of the silicon square rod, and the second direction is opposite to the first direction. Before the first clamping assembly (131) and the second clamping assembly (132) clamp the silicon square rod, the support platform (121) can be moved to the second position under the action of the third driving mechanism (122), so that when the first clamping assembly (131) reaches the set position, there is a certain gap between the first clamping assembly (131) and the silicon square rod. The set position refers to the position of the first clamping assembly (131) when the first clamping assembly (131) clamps the silicon square rod. The second clamping assembly (132) moves along the second direction to abut the silicon square rod, and pushes the silicon square rod and the support platform (121) to move along the second direction, so that the support platform (121) retreats from the second position to the first position, and the silicon square rod abuts against the first clamping assembly (131); The visual inspection component (14) includes a shell (141), a first shooting mechanism (142) and a second shooting mechanism (143); the shell (141) has a processing volume and covers at least a portion of the installation space (133); the first shooting mechanism (142) and the second shooting mechanism (143) are both located in the processing volume and fixed on the shell (141); the first shooting mechanism (142) is used to detect the surface of the silicon square rod, and the second shooting mechanism (143) is used to detect the edge of the silicon square rod.

2. The silicon square bar detection equipment according to claim 1, characterized in that: The first shooting mechanism (142) includes a plurality of first cameras (1421), and the plurality of first cameras (1421) are arranged around the silicon square rod, and each first camera (1421) corresponds to a surface of the silicon square rod.

3. The silicon square bar detection equipment according to claim 2, characterized in that: Each of the first cameras (1421) is configured with two light sources (144) for illuminating the surface it photographs, and the two light sources (144) are defined as a first light source (1441) and a second light source (1442), respectively. The angle between the illumination direction of the first light source (1441) and the surface is defined as a first angle α, the angle between the illumination direction of the second light source (1442) and the surface is defined as a second angle β, and the angle between the viewing angle direction of the first camera (1421) and the surface is defined as a third angle γ. The first angle α is equal to the third angle γ, and the second angle β is not equal to the third angle γ.

4. The silicon square bar detection equipment according to claim 1, characterized in that: The second shooting mechanism (143) includes a plurality of second cameras (1431), which are arranged around the outer edge of the silicon square rod, each second camera (1431) corresponds to an edge of the silicon square rod, and each second camera (1431) is configured with two light sources (144), and the two light sources (144) have different emission angles.

5. The silicon square bar detection equipment according to claim 1, characterized in that: The first shooting mechanism (142) includes a plurality of first cameras (1421), and the second shooting mechanism (143) includes a plurality of second cameras (1431), and the plurality of first cameras (1421) and the plurality of second cameras (1431) are staggered.

6. The silicon square bar detection equipment according to claim 1, characterized in that: The first shooting mechanism (142) includes a plurality of first cameras (1421), the second shooting mechanism (143) includes a plurality of second cameras (1431), and the visual detection component (14) further includes an adjustment mechanism (145) fixed to the shell (141), and the adjustment mechanism (145) is used to adjust the distance between the plurality of first cameras (1421) and / or the plurality of second cameras (1431) and the silicon square rod.

7. The silicon square bar detection equipment according to claim 6, characterized in that: The support platform (121) is configured in a "V" shape, with one edge of the silicon square rod facing downwardly of the frame (11); Two first cameras (1421) among the plurality of first cameras (1421) are arranged above the silicon square rod, and the adjustment mechanism (145) includes a first adjustment mechanism (1451) connected to the two first cameras (1421). One first camera (1421) among the two first cameras (1421) can approach or move away from the silicon square rod along a first preset direction (146) under the action of the first adjustment mechanism (1451). The first preset direction (146) is perpendicular to the surface of the silicon square rod photographed by the one first camera (1421). The other first camera (1421) of the two second cameras (1431) can approach or move away from the silicon square rod along a second preset direction (147) under the action of a first adjustment mechanism (1451), and the second preset direction (147) is perpendicular to the surface of the silicon square rod photographed by the other first camera (1421); wherein the first preset direction (146) and the second preset direction (147) form an angle of 90°, and the first preset direction (146) and the second preset direction (147) respectively form an angle of 45° with the horizontal plane.

8. The silicon square bar detection equipment according to claim 6, characterized in that: Two first cameras (1421) among the plurality of first cameras (1421) are arranged below the silicon square rod and remain relatively fixed to the housing (141).

9. The silicon square bar detection equipment according to claim 6, characterized in that: Two second cameras (1431) among the plurality of second cameras (1431) are respectively arranged on the upper and lower sides of the silicon square rod, and the viewing angles of the two second cameras (1431) are both parallel to the height direction; the adjustment mechanism (145) includes a second adjustment mechanism (1452) and a third adjustment mechanism (1453), the second adjustment mechanism (1452) is respectively connected to the two second cameras (1431), and the third adjustment mechanism (1453) is connected to the second camera (1431) arranged on the upper side of the silicon square rod, the second adjustment mechanism (1452) acts on the two second cameras (1431) on the upper and lower sides of the silicon square rod to move in the height direction to approach or move away from the silicon square rod, and the third adjustment mechanism (1453) acts on the second camera (1431) on the upper side of the silicon square rod to move in the horizontal direction, so that the second camera (1431) arranged above the silicon square rod is aligned with the upper edge of the silicon square rod.

10. The silicon square bar detection equipment according to claim 7, characterized in that: Two second cameras (1431) among the plurality of second cameras (1431) are respectively arranged on the left and right sides of the silicon square rod, and the viewing angles of the two second cameras (1431) are parallel to the horizontal direction; the adjustment mechanism (145) includes a fourth adjustment mechanism (1454) connected to the two second cameras (1431), and the fourth adjustment mechanism (1454) acts on the two second cameras (1431) on the left and right sides of the silicon square rod to move respectively along the first preset direction (146) and the second preset direction (147), so that the two second cameras (1431) arranged on the left and right sides of the silicon square rod are aligned with the left and right edges of the silicon square rod.

Images