Detection system and testing and editing all-in-one machine

Abstract

The invention relates to a detection system and a testing and editing all-in-one machine, and the system comprises an optical detection device which comprises an imaging mechanism; the multiple groups of reflection mechanisms are arranged in the field of view of the imaging mechanism, and each group of reflection mechanism correspondingly forms a detection position for placing a detected element; the light source mechanism is used for providing illumination light for the tested element; each reflection mechanism is used for reflecting light from at least two surfaces of the detected elements located at the corresponding detection positions to the imaging mechanism, and the imaging mechanism is used for receiving reflected light from the multiple groups of reflection mechanisms so as to perform imaging detection on the multiple detected elements; the suction device comprises a distance changing mechanism and a plurality of suction nozzle modules used for taking and placing the detected elements on the material disc, the suction nozzle modules are all connected with the distance changing mechanism, and the distance changing mechanism is used for adjusting the distance between the suction nozzle modules, so that the suction nozzle modules place the sucked detected elements on the detection positions in a one-to-one correspondence mode for detection. Compared with the prior art that only one detected element can be detected each time, the detection time is saved, and the detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor detection technology, and in particular to a detection system and a detection and coding integrated machine. Background Art

[0002] As the core component of electronic products, the performance and quality of chips directly affect the performance and life of the products. Due to the small size and multiple functions of chips, various problems are prone to occur during the processing and production process, which will seriously affect the electrical performance, reliability and life of the chips. Therefore, the appearance inspection of finished chips is an indispensable step.

[0003] In the traditional detection system, the gripping device grabs one chip at a time to the optical detection device, and the imaging mechanism of the optical detection device captures an image of one surface of the chip each time. The gripping device rotates the chip multiple times, and the imaging mechanism of the optical detection device performs multiple imaging, and then the images of each surface of the chip can be captured, and the detection of one chip is completed at this time. This setting method results in a long time consumption and low detection efficiency. Summary of the invention

[0004] Based on this, it is necessary to provide a detection system and a detection and coding integrated machine that can improve detection efficiency in order to address the above problems.

[0005] A detection system, comprising:

[0006] An optical detection device, comprising:

[0007] Imaging mechanism;

[0008] A plurality of groups of reflection mechanisms are arranged in the field of view of the imaging mechanism, and each group of the reflection mechanisms forms a corresponding detection position for placing the measured component;

[0009] A light source mechanism, used for providing illumination light to the component under test;

[0010] Wherein, each of the reflection mechanisms is used to reflect light from at least two sides of the measured component located at the corresponding detection position to the imaging mechanism, and the imaging mechanism is used to receive reflected light from multiple groups of the reflection mechanisms to perform imaging detection on multiple measured components;

[0011] The suction device includes a variable distance mechanism and a plurality of suction nozzle modules for picking up and placing the components to be tested on the material tray, wherein the suction nozzle modules are all connected to the variable distance mechanism, and the variable distance mechanism is used to adjust the distance between the suction nozzle modules so that the suction nozzle modules place the components to be tested sucked by them in a one-to-one correspondence at the detection position for detection; and

[0012] A controller is used to control the pickup device to pick up, place and move the measured component, and to control the optical detection device to image the measured component when the measured component is located in the detection position.

[0013] In one of the embodiments, the controller can control the variable distance mechanism to adjust the distance between the suction nozzle modules based on the distance between the material pits on the material tray and the distance between each of the detection positions, so that the distance between the suction nozzle modules is adapted to the distance between the material pits when placing the measured components on the material tray, and is adapted to the distance between the detection positions when placed at the detection positions for detection.

[0014] In one embodiment, the reflection mechanism includes a reflection prism assembly, the reflection prism assembly is adjacent to two adjacent detection positions, and the reflection prism assembly is used to reflect the illumination light emitted by the light source mechanism to the side surfaces of the corresponding two adjacent measured components, and reflect the light from the side surfaces of the corresponding two adjacent measured components to the imaging mechanism to image the side surfaces of the measured components;

[0015] Wherein, the distance between two adjacent detection positions is greater than or equal to the width of the reflective prism assembly in the adjacent direction.

[0016] In one embodiment, the reflecting prism assembly includes a first type reflecting prism which is an isosceles right angle prism, the hypotenuse of the first type reflecting prism is arranged perpendicular to the optical axis of the imaging mechanism, and the two right angle sides of the first type reflecting prism respectively reflect the illumination light emitted by the light source mechanism to the corresponding two adjacent sides of the measured components, and reflect the light from the corresponding two adjacent sides of the measured components to the imaging mechanism, so as to image multiple sides of the measured components; the width of the reflecting prism assembly in the adjacent direction is at least the length of the hypotenuse of the first type reflecting prism;

[0017] or

[0018] The reflecting prism assembly includes at least two second-type reflecting prisms arranged in parallel along the adjacent direction, the second-type reflecting prisms are isosceles right-angle prisms, one right-angle side of the second-type reflecting prism is arranged parallel to the optical axis of the imaging mechanism, and the hypotenuse of each second-type reflecting prism reflects the illumination light emitted by the light source mechanism to the side of the corresponding measured element, and reflects the light from the side of the corresponding measured element to the imaging mechanism, so as to image multiple side surfaces of the measured element; the width of the reflecting prism assembly in the adjacent direction is at least the sum of the lengths of the right-angle sides of the two second-type reflecting prisms.

[0019] In one embodiment, the reflection mechanism includes a plurality of reflection prisms, and the plurality of reflection prisms surround and form the detection position;

[0020] Part of the illumination light emitted by the light source mechanism is reflected to multiple side surfaces of the corresponding measured element by the multiple reflection prisms, and the reflection prisms reflect the first imaging light from the multiple side surfaces of the corresponding measured element to the imaging mechanism;

[0021] Part of the illumination light emitted by the light source mechanism is incident on the bottom surface or top surface of the measured component, and is reflected or scattered to form second imaging light to the imaging mechanism;

[0022] The imaging mechanism receives the first imaging light and the second imaging light to image multiple side surfaces of the component under test and a bottom surface or a top surface of the component under test.

[0023] In one embodiment, the reflective prism includes a first type of reflective prism and a second type of reflective prism, both of which are isosceles right-angle prisms, and the second type of reflective prism is arranged around the first type of reflective prism to form a plurality of the detection positions;

[0024] A right-angled side of the second-type reflecting prism is arranged parallel to the optical axis of the imaging mechanism, and the hypotenuse of each second-type reflecting prism reflects the illumination light emitted by the light source mechanism to the side of the corresponding measured element, and reflects the light from the side of the corresponding measured element to the imaging mechanism, so as to image multiple side surfaces of the measured element;

[0025] The hypotenuse of the first type of reflecting prism is arranged perpendicular to the optical axis of the imaging mechanism, and the two right-angled sides of the first type of reflecting prism respectively reflect the illumination light emitted by the light source mechanism to the side of the corresponding measured element, and reflect the light from the side of the corresponding measured element to the imaging mechanism, so as to image multiple side surfaces of the measured element.

[0026] In one embodiment, the imaging mechanism includes a camera and an object-side telecentric lens, the field of view of the object-side telecentric lens corresponds to multiple groups of the reflection mechanisms, and the imaging mechanism is used to simultaneously image the side surfaces and bottom surfaces of multiple measured components;

[0027] or

[0028] The imaging mechanism comprises a camera and a non-object space telecentric lens, the field of view of the non-object space telecentric lens corresponds to a plurality of groups of the reflection mechanisms, and the imaging mechanism is used to respectively image the side surfaces and bottom surfaces of a plurality of measured components.

[0029] In one embodiment, the suction device further includes a displacement driving mechanism, and the displacement driving mechanism is used to drive the suction nozzle module to flow between the tray pit position and the detection position;

[0030] The controller is used to control the distance-changing mechanism to adjust the distance between the suction nozzle modules when the suction nozzle modules flow between the material tray pit position and the detection position.

[0031] In one embodiment, the displacement drive mechanism includes a first suction drive mechanism and a second suction drive mechanism, the second suction drive mechanism is connected to the first suction drive mechanism, and the variable distance mechanism is connected to the second suction drive mechanism;

[0032] The first suction drive mechanism is used to drive the second suction drive mechanism, the variable pitch mechanism and the suction nozzle module to translate along the first direction to drive the suction nozzle module to flow between the material tray and the detection position, and the second suction drive mechanism is used to drive the variable pitch mechanism and the suction nozzle module to rise and fall along the second direction to approach or move away from the material tray or the optical detection device;

[0033] The first direction and the second direction intersect.

[0034] In one embodiment, the controller is used to perform at least one cycle of the following control process:

[0035] During the first time interval, the nozzle module is controlled to suck the measured component on the material tray and then transfer the measured component to the detection position, and during the transfer process, the distance-changing mechanism is controlled to adjust the spacing of the nozzle modules to the detection position spacing, and the first time interval is ended and the second time interval is started when the measured component is located in the detection position;

[0036] During the second time interval, the camera of the imaging mechanism is controlled to be exposed, and an image of the component under test is collected under the illumination light provided by the light source mechanism, and after the image of the component under test is collected, the second time interval is ended and a third time interval is started;

[0037] During the third time interval, the nozzle module is controlled to transfer the component under test that has completed image acquisition in the detection position to the tray pit, and during the transfer process, the distance changing mechanism is controlled to adjust the spacing of the nozzle modules to the tray pit spacing, and the third time interval ends when the component under test is placed in the tray pit.

[0038] In one embodiment, the optical detection device further includes a first detection driving mechanism, the imaging mechanism, the reflection mechanism and the light source mechanism are all connected to the first detection driving mechanism, and the first detection driving mechanism is used to drive the imaging mechanism, the reflection mechanism and the light source mechanism to translate along the third direction to be opposite to the nozzle module;

[0039] and / or

[0040] The reflecting mechanism, the light source mechanism and the imaging mechanism are arranged in sequence along the second direction. The optical detection device also includes a second detection driving mechanism. The imaging mechanism is connected to the second detection driving mechanism. The second detection driving mechanism is used to drive the imaging mechanism to rise and fall along the second direction to adjust the relative position of the imaging mechanism and the light source mechanism along the second direction.

[0041] In one embodiment, the suction device includes a plurality of nozzle module groups arranged along a third direction, each nozzle module group includes a plurality of nozzle modules arranged along a first direction; a plurality of detection positions are arranged in an array along the first direction and the third direction;

[0042] The distance-changing mechanism comprises a first distance-changing component and a second distance-changing component, wherein the first distance-changing component is used to adjust the distances between the plurality of nozzle module groups in the third direction, and the second distance-changing component is used to adjust the distances between the nozzle modules of each nozzle module group in the first direction;

[0043] The first direction intersects the third direction.

[0044] A testing and weaving machine comprises a feeding system, a weaving system and a detection system as described above, wherein the feeding system is used to convey a material tray, the detection system can detect the components to be tested on the material tray conveyed by the feeding system, and the weaving system can grab the qualified components to be tested on the material tray for weaving.

[0045] In the above-mentioned detection system and the integrated detection and encoding machine, when it is necessary to detect the measured component on the material tray, the controller controls the multiple suction nozzle modules of the suction device to suck the measured component from the material tray. After the suction nozzle module sucks the measured component, the controller can also control the variable distance mechanism to adjust the spacing between the suction nozzle modules, so that the suction nozzle module places the measured components sucked by it in the detection position for detection one by one. Since the optical detection device has multiple detection positions, the measured components located at multiple detection positions can be imaged and detected in the imaging mechanism at the same time, which saves detection time and improves detection efficiency compared to the situation in the prior art where only one measured component can be detected at a time. In addition, each reflection mechanism can reflect light from at least two sides of the measured component located at the corresponding detection position to the imaging mechanism. During detection, each measured component has at least two sides imaged in the imaging mechanism. Compared with the situation in the prior art where only one side of the measured component can be detected at a time, detection time is saved and detection efficiency is further improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 A structural diagram of a detection system provided in one embodiment of the present application;

[0047] Figure 2A structural diagram of a partial structure of a test and coding integrated machine provided in one embodiment of the present application;

[0048] Figure 3 for Figure 1 A structural diagram of another perspective of the detection system shown in ;

[0049] Figure 4 for Figure 1 A structural diagram of an optical detection device of a detection system shown in ;

[0050] Figure 5 is a schematic structural diagram of an optical detection device according to another embodiment;

[0051] Figure 6 is a structural schematic diagram of an optical detection device according to another embodiment;

[0052] Figure 7 is a structural schematic diagram of a reflection mechanism of an embodiment;

[0053] Figure 8 is an axonometric view of a reflection mechanism of another embodiment;

[0054] Fig. 9 and Fig.10 A schematic diagram of relative position adjustment between reflecting prisms in one embodiment;

[0055] Fig.11 is an axonometric diagram of a reflection mechanism of yet another embodiment;

[0056] Fig.12 A schematic diagram of the positional relationship between the reflection mechanism and the measured element in one embodiment;

[0057] Fig.13 A schematic diagram of the positional relationship between the reflection mechanism and the measured element in another embodiment;

[0058] Fig.14 is an imaging schematic diagram of an imaging mechanism in one embodiment;

[0059] Fig.15 is a control timing diagram of a controller in one embodiment;

[0060] Fig.16 for Figure 1 An axonometric view of the suction device of the detection system shown in;

[0061] Fig.17 A schematic diagram of the structure of a test and coding machine provided in one embodiment of the present application.

[0062] Description of reference numerals:

[0063] 1000, measuring and weaving machine; 100, detection system; 10, suction device; 11, pitch-changing mechanism; 111, first pitch-changing assembly; 1111, first screw rod; 112, second pitch-changing assembly; 1121, second screw rod; 12, nozzle module; 13, first suction drive mechanism; 14, second suction drive mechanism; 20, optical detection device; 21, imaging mechanism; 211, camera; 212, lens; 22, reflection mechanism; 221, reflection prism assembly; 222, first type of reflection prism; 223, second type of reflection prism; 23, light source mechanism; 231, annular light source; 232, coaxial light source; 2321, light source; 23 22. Semi-transparent and semi-reflective membrane; 24. Adjustment mechanism; 25. First detection drive mechanism; 26. Mounting frame; 27. Second detection drive mechanism; 28. Filter; 200. Feeding system; 201. First tray separation device; 202. First conveying device; 203. Tray moving device; 204. Second tray separation device; 205. Second conveying device; 300. First transfer robot; 400. First optical detection module; 500. Taping system; 501. Rejection robot; 502. Taping robot; 600. Second optical detection module; 700. Second transfer robot; 2000. Material tray; 2001. Material pit; 3000. Component under test. DETAILED DESCRIPTION

[0064] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0065] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0066] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0067] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0068] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0069] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0070] See also Figure 1 and Figure 2, an embodiment of the present application provides a detection system 100, including a suction device 10, an optical detection device 20 and a controller. The controller is used to control the suction device 10 to suck the measured component 3000 from the material pit 2001 of the material tray 2000 and transfer the measured component 3000 to the detection position of the optical detection device 20, and control the optical detection device 20 to perform imaging detection on the measured component 3000 located at the detection position. In addition, the controller can also control the suction device 10 to put the measured component 3000 detected by the optical detection device 20 back into the material pit 2001 of the material tray 2000. The suction device 10 is controlled to reciprocate between the material tray 2000 and the detection position to achieve appearance detection of all the measured components 3000 on the material tray 2000.

[0071] Specifically, the component under test 3000 may be a semiconductor chip, or other components that require surface appearance inspection. Taking the component under test 3000 as a semiconductor chip as an example, the chip may be a structure with a square or rectangular cross-section, or may be other similar chip structures, such as a structure in which two square chips are connected together through a communication line. Common chip packages include BGA, QFN, FLP, LEAD, etc., and other similar packages.

[0072] For further information, see Figure 3 and Figure 4 The optical detection device 20 includes an imaging mechanism 21 and a plurality of reflecting mechanisms 22. The plurality of reflecting mechanisms 22 are arranged in the field of view of the imaging mechanism 21, and each reflecting mechanism 22 forms a corresponding detection position for placing the measured component 3000. Since the optical detection device 20 includes a plurality of reflecting mechanisms 22, each reflecting mechanism 22 forms a detection position, and thus the number of detection positions is multiple.

[0073] See also Figure 5 The optical detection device 20 further includes a light source mechanism 23, which is used to provide illumination light to the component under test 3000. Each reflection mechanism 22 is used to reflect light from at least two sides of the component under test 3000 located at the corresponding detection position to the imaging mechanism 21. The imaging mechanism 21 is used to receive reflected light from multiple groups of reflection mechanisms 22 to perform imaging detection on multiple components under test 3000. Specifically, the component under test 3000 is generally placed horizontally at the detection position so that multiple sides thereof correspond to the reflection mechanisms 22. A part of the illumination light output by the light source mechanism 23 is directly irradiated to the bottom surface of the component under test 3000, and a part of the illumination light is reflected to each side of the component under test 3000 by the reflection mechanism 22. The reflection mechanism 22 reflects the light from each side of the corresponding component under test 3000. The reflected light can be transmitted to the imaging mechanism 21 after passing through the light source mechanism 23, or it can be directly transmitted to the imaging mechanism 21.

[0074] Continue reading Figure 3The suction device 10 includes a distance-changing mechanism 11 and a plurality of suction nozzle modules 12 for picking up and placing the components 3000 to be tested on the material tray 2000. Each suction nozzle module 12 is connected to the distance-changing mechanism 11. The distance-changing mechanism 11 is used to adjust the distance between each suction nozzle module 12 so that the suction nozzle module 12 places the components 3000 to be tested that it sucks one by one at the detection position for detection.

[0075] It should be noted that the nozzle module 12 places the measured components 3000 it absorbs in the detection position for detection one by one, which means that only one measured component 3000 can be placed in each detection position. The number of nozzle modules 12 and the number of detection positions can be the same or different. When the number of nozzle modules 12 and the number of detection positions are the same, each nozzle module 12 corresponds to one detection position, and the measured components 3000 absorbed by the nozzle module 12 are placed in the corresponding detection position. When the nozzle modules 12 are greater than the number of detection positions, the measured components 3000 absorbed by some of the nozzle modules 12 are placed in the detection position for detection, and the remaining nozzle modules 12 may or may not absorb the measured components 3000. When the remaining nozzle modules 12 absorb the measured components 3000, they can be placed in the detection position for detection next time. When the nozzle modules 12 are less than the number of detection positions, only some of the detection positions are placed with measured components 3000 for testing.

[0076] In the detection system 100 provided in the embodiment of the present application, when it is necessary to detect the measured component 3000 on the material tray 2000, the controller controls the multiple suction nozzle modules 12 of the suction device 10 to suck the measured component 3000 from the material tray 2000. After the suction nozzle module 12 sucks the measured component 3000, the controller can also control the variable distance mechanism 11 to adjust the distance between each suction nozzle module 12, so that the suction nozzle module 12 places the sucked measured component 3000 in the detection position for detection one by one. Since the optical detection device 20 has multiple detection positions, the measured components 3000 located at multiple detection positions can be imaged and detected simultaneously in the imaging mechanism 21, which saves detection time and improves detection efficiency compared to the situation in the prior art where only one measured component 3000 can be detected at a time. Furthermore, each reflection mechanism 22 can reflect light from at least two sides of the component under test 3000 located at the corresponding detection position to the imaging mechanism 21. Therefore, during detection, at least two sides of each component under test 3000 are imaged in the imaging mechanism 21. Compared with the prior art that can only detect one side of the component under test 3000 at a time, this saves detection time and further improves detection efficiency.

[0077] Generally, the material tray 2000 is a standard part, and the spacing between the material pits 2001 on the material tray 2000 is kept fixed for the measured component 3000 of a specific size. The setting of the spacing between the detection positions of the optical detection device 20 needs to ensure that each detection position is located under the field of view of the imaging mechanism 21 and does not affect the shooting effect of each measured component 3000. Therefore, the spacing between the detection positions is generally different from the spacing between the pits of the material tray (the spacing between the material pits 2001 on the material tray 2000).

[0078] In some embodiments, the controller can control the variable distance mechanism 11 to adjust the distance between the nozzle modules 12 based on the distance between the material pits 2001 on the material tray 2000 and the distance between each detection position, so that the distance between the nozzle modules 12 is adapted to the distance between the material pits 2001 on the material tray 2000 when the measured components 3000 are taken and placed on the material tray 2000, and is adapted to the distance between the detection positions when placed at the detection positions. With this arrangement, when the nozzle module 12 takes and places materials on the material tray 2000, it can be ensured that the nozzle module 12 absorbs the measured components 3000 in the corresponding material pits 2001 and places the measured components 3000 in the corresponding material pits 2001. When the measured components 3000 need to be detected, the nozzle module 12 can accurately place the measured components 3000 at the corresponding detection positions for detection, thereby ensuring the detection effect.

[0079] The specific structure of the reflection mechanism 22 is not unique, and a reflection prism and / or a reflection mirror can be selected to reflect the light. Figure 6 The reflecting mechanism 22 includes a reflecting prism assembly 221, which is adjacent to two adjacent detection positions. The reflecting prism assembly 221 is used to reflect the illumination light emitted by the light source mechanism 23 to the corresponding sides of the two adjacent measured components 3000, and reflect the light from the corresponding sides of the two adjacent measured components 3000 to the imaging mechanism 21, so as to image the side of the measured component 3000. The spacing between the two adjacent detection positions is greater than or equal to the adjacent direction of the reflecting prism assembly 221 ( Figure 6 In this way, when the nozzle module 12 places the component under test 3000 at the detection position, the reflection mechanism 22 will not interfere with it, so that the component under test 3000 is placed at the detection position for detection.

[0080] In some specific implementations, please refer to Figure 5The reflecting prism assembly 221 includes a first type reflecting prism 222 which is an isosceles right angle prism. The hypotenuse of the first type reflecting prism 222 is arranged perpendicular to the optical axis of the imaging mechanism 21. The two right angles of the first type reflecting prism 222 respectively reflect the illumination light emitted by the light source mechanism 23 to the corresponding two adjacent sides of the measured components 3000, and reflect the light from the corresponding two adjacent sides of the measured components 3000 to the imaging mechanism 21, so as to image multiple sides of the measured components 3000. The width of the reflecting prism assembly 221 in the adjacent direction is at least the length of the hypotenuse of the first type reflecting prism 222. At this time, the reflecting prism assembly 221 does not need to be formed by assembling, and is easy to set.

[0081] In some other specific implementations, please refer to Figure 6 The reflecting prism assembly 221 includes at least two second-type reflecting prisms 223 arranged in parallel along the adjacent direction. The second-type reflecting prisms 223 are isosceles right-angle prisms. One right-angle side of the second-type reflecting prism 223 is arranged parallel to the optical axis of the imaging mechanism 21. The hypotenuse of each second-type reflecting prism 223 reflects the illumination light emitted by the light source mechanism 23 to the side of the corresponding measured element 3000, and reflects the light from the side of the corresponding measured element 3000 to the imaging mechanism 21, so as to image multiple side surfaces of the measured element 3000. The width of the reflecting prism assembly 221 in the adjacent direction is at least the sum of the lengths of the right-angle sides of the two second-type reflecting prisms 223. At this time, the reflecting prism assembly 221 is formed by assembling a plurality of second-type reflecting prisms 223, and the structure of the reflecting prism assembly 221 can be flexibly adjusted.

[0082] In some embodiments, the reflection mechanism 22 includes a plurality of reflection prisms, and the plurality of reflection prisms surround to form a detection position. Part of the illumination light emitted by the light source mechanism 23 is reflected to the corresponding multiple sides of the measured component 3000 through the plurality of reflection prisms, and the reflection prisms reflect the first imaging light from the corresponding multiple sides of the measured component 3000 to the imaging mechanism 21; part of the illumination light emitted by the light source mechanism 23 is incident on the bottom surface or top surface of the measured component 3000, and is reflected or scattered to form the second imaging light to the imaging mechanism 21; the imaging mechanism 21 receives the first imaging light and the second imaging light to image the multiple sides of the measured component 3000 and the bottom surface or top surface of the measured component 3000. In this way, the side surfaces and the bottom surface (or top surface) of each measured component 3000 can be imaged at the same time. When the measured component 3000 is a rectangular chip, that is, the four side surfaces and the bottom surface (or top surface) of each chip are imaged at the same time, so as to perform defect detection on the measured component 3000.

[0083] The reflecting prism includes a first type reflecting prism 222 and a second type reflecting prism 223. The second type reflecting prism 223 is arranged around the first type reflecting prism 222 to form at least two detection positions. For example, three second type reflecting prisms 223 and one first type reflecting prism 222 can be used, and two of them are arranged perpendicular to each other to form a detection position for placing the measured component 3000. The formed detection position can be a square or rectangular area. The specific size of each reflecting prism is not unique. The size of the reflecting prism can be changed according to the different sizes and shapes (such as square or rectangular) of the measured component 3000, so as to image the side and bottom (or top) of the measured component 3000 of different sizes.

[0084] In the reflection mechanism 22, the combination of the first type of reflection prism 222 and the second type of reflection prism 223 is not unique, and can be combined in a variety of ways (m*n) in combination with the field of view of the imaging mechanism 21. Figure 7 The reflection mechanism 22 can be designed as a 2*2 structure, with two first-type reflection prisms 222, and six second-type reflection prisms 223 are correspondingly arranged around each first-type reflection prism 222 to form a first detection position A1, a second detection position A2, etc., respectively, so that four components under test 3000 can be detected at the same time; when the size of the component under test 3000 is small, the reflection mechanism 22 can also be designed as a 2*3 structure (see Figure 8 ). Four first-type reflecting prisms 222 are arranged, and a second-type reflecting prism 223 is arranged around each first-type reflecting prism 222 to detect six components under test 3000 at the same time, and so on.

[0085] Specifically, a reflective film may be plated on the hypotenuse of the second type of reflective prism 223 for reflecting light, and a reflective film may be plated on the two right-angled edges of the first type of reflective prism 222, so as to reflect light. A part of the illumination light emitted by the light source mechanism 23 is irradiated to the hypotenuse of the second type of reflective prism 223 and the two right-angled edges of the first type of reflective prism 222, and the second type of reflective prism 223 and the first type of reflective prism 222 reflect the light to the side of the corresponding measured element 3000. After being reflected by the side of the measured element 3000, the light is returned to the light source mechanism 23 along the original path by the second type of reflective prism 223 and the first type of reflective prism 222, and is transmitted to the imaging mechanism 21 through the light source mechanism 23 to form an image.

[0086] Continue reading Figure 7 and Figure 8The optical detection device 20 further includes an adjustment mechanism 24 connected to each reflective prism, and the adjustment mechanism 24 is used to install the reflective prism and adjust the relative position between each reflective prism to adapt to the different sizes of the measured components 3000. Specifically, the adjustment mechanism 24 can be designed as a mechanical structure to install the first type of reflective prism 222 and the second type of reflective prism 223, and adjust the relative position between the first type of reflective prism 222 and the second type of reflective prism 223. Fig. 9 and Fig.10 Taking the first type of reflecting prism 222 and the second type of reflecting prism 223 as being arranged perpendicular to each other along the X-axis and the Y-axis as an example, the adjusting mechanism 24 can control the first type of reflecting prism 222 and the second type of reflecting prism 223 to move along the X-axis or the Y-axis, so as to adjust the relative position between the first type of reflecting prism 222 and the second type of reflecting prism 223, change the area size of the detection position, so as to adapt to the detection of components 3000 of various sizes.

[0087] The structure of the light source mechanism 23 is not unique, and the light source mechanism 23 may specifically include an annular light source 231 that provides dark field illumination light, and / or a coaxial light source 232 that provides bright field illumination light. The annular light source 231 may provide low-angle uniform dark field illumination light, and may obtain surface height variation information of the measured component 3000; the light emitted by the annular light source 231 is scattered by the side of the measured component 3000, and then reflected by the reflective prism, and received by the imaging mechanism 21 for imaging.

[0088] Continue reading Figure 5 The coaxial light source 232 can provide bright field illumination. The coaxial light source 232 specifically includes a light source 2321 and a semi-transparent and semi-reflective film 2322. The light source 2321 is provided with a diffuse reflection plate (not shown in the figure). The light emitted by the light source 2321 passes through the semi-transparent and semi-reflective film 2322, and a part of the light is directly transmitted, and the other part is reflected to the first type of reflection prism 222 and the second type of reflection prism 223. The light reflected by the reflection prism irradiates the side of the measured component 3000, and the light reflected by the measured component 3000 returns to the semi-transparent and semi-reflective film 2322 of the coaxial light source 232 along the original path, and directly transmits the light to the imaging mechanism 21 for imaging. The coaxial light source 232 can provide uniform parallel light irradiation to obtain the external dimension information of the measured component 3000.

[0089] It can be understood that when the light source mechanism 23 includes both the annular light source 231 and the coaxial light source 232 , imaging is performed in a combined light source illumination manner, satisfying both bright field illumination and dark field illumination conditions.

[0090] Furthermore, the annular light source 231 and / or the coaxial light source 232 are light sources that can provide illumination light of multiple wavelengths. Figure 6According to the different surface characteristic colors of the component under test 3000, the annular light source 231 and / or the coaxial light source 232 can use a multi-wavelength light source, such as a multi-color light formed by a mixture of red, green, and blue light. The use of complementary colors can highlight the defect edge of the component under test 3000, sharpen the boundary, and improve the contrast of the defect boundary. Alternatively, the coaxial light source 232 uses light sources of different wavelengths corresponding to different detection positions. For example, see Figure 8 and Fig.11 , the coaxial light source 232 area corresponding to the first detection position A1 adopts a first wavelength light source, the coaxial light source 232 area corresponding to the second detection position A2 adopts a second wavelength light source, and so on. In this way, the wavelength light source required for the corresponding coaxial light source 232 area can be set according to the differences in the types or defects of the measured components 3000 in different detection positions, so as to achieve effective detection of the measured components 3000 of different types or defects at the same time. In addition, the optical detection device 20 also includes a filter 28 arranged between the imaging mechanism 21 and the light source mechanism 23. The filter 28 is added to obtain imaging effects of different colors of light, and different wavelengths of light sources are used for irradiation. Different wavelengths can collect different feature information, so that richer defect information can be obtained, which is convenient for defect detection.

[0091] In some embodiments, see Figure 5 The imaging mechanism 21 includes a camera 211 and a lens 212. Specifically, the lens 212 is an object-side telecentric lens. The field of view of the object-side telecentric lens corresponds to multiple groups of reflection mechanisms 22. The imaging mechanism 21 is used to simultaneously image the side surfaces and bottom surfaces of multiple components under test 3000. When the component under test 3000 is rectangular, the imaging mechanism 21 is used to simultaneously image the four side surfaces and the bottom surfaces of the multiple components under test 3000, a total of five surfaces. The object-side telecentric lens can specifically select a double telecentric lens or an object-side telecentric lens that is not image-side telecentric. As long as the lens 212 can achieve object-side telecentricity, the object-side telecentric lens can eliminate the error of inconsistent magnification caused by the inconsistent distance between the component under test 3000 and the lens 212, and more realistically image the component under test 3000, which is convenient for defect detection. The camera 211 can be a monochrome or color camera 211, which can be selected according to actual needs.

[0092] In the imaging mechanism 21, the object-side telecentric lens is used to eliminate the problem of different clarity of different sides caused by the position offset of the measured component 3000 in the detection position. Fig.12 When the component under test 3000 is caught at the center of the detection area, the four sides of the component under test 3000 are at the same distance from the reflection surface of the reflection prism. For the object side telecentric lens, the working distance is equal, and the imaging effects of the four sides are consistent, so defect detection can be carried out directly. Fig.13When the measured component 3000 deviates from the center of the detection area, the distances from the four sides of the measured component 3000 to the reflection surface of the reflection prism are inconsistent, resulting in different working distances. Since the object-side telecentric lens can eliminate the error of inconsistent magnification caused by the inconsistent distance between the measured component 3000 and the lens, the side image of the measured component 3000 can also be truly formed. Therefore, for the same reflection mechanism 22, it is compatible with the detection of measured components 3000 of different sizes, and the size range (that is, the field of view range) that the optical detection device 20 can detect is jointly determined by the performance parameters of the object-side telecentric lens and the camera 211. Fig.14 This is a schematic diagram of the camera 211 imaging the side surface and bottom surface (top surface) of the component under test 3000. It can well image each surface of the component under test 3000 for defect detection.

[0093] In some other embodiments, continue to refer to Figure 5 , the imaging mechanism 21 includes a camera 211 and a non-object space telecentric lens, the field of view of the non-object space telecentric lens corresponds to multiple groups of reflection mechanisms 22, and the imaging mechanism 21 is used to image the side surfaces and bottom surfaces of multiple components under test 3000 respectively. Specifically, when the component under test 3000 is rectangular, the non-object space telecentric lens is used to capture the four side images of the component under test 3000 each time, and the non-object space telecentric lens moves a preset distance relative to the nozzle module 12 and focuses on the bottom surface of the component under test 3000 for imaging. Generally, the non-object space telecentric lens is controlled to remain stationary, the nozzle module 12 is displaced, and the distance between the non-object space telecentric lens and the nozzle module 12 is adjusted. If the nozzle module 12 is controlled not to move and the non-object space telecentric lens is adjusted to move, the non-object space telecentric lens needs to be reset when the component under test 3000 is photographed next time.

[0094] In some embodiments, see Figure 4 The optical detection device 20 also includes a first detection drive mechanism 25, and the imaging mechanism 21, the reflection mechanism 22 and the light source mechanism 23 are all connected to the first detection drive mechanism 25. The first detection drive mechanism 25 is used to drive the imaging mechanism 21, the reflection mechanism 22 and the light source mechanism 23 to translate along the third direction to be opposite to the nozzle module 12. By setting the first detection drive mechanism 25, the positions of the imaging mechanism 21, the reflection mechanism 22 and the light source mechanism 23 and the nozzle module 12 can be adjusted, so that the nozzle module 12 can place the component under test 3000 at the detection position for detection. Optionally, the first detection drive mechanism 25 can be driven by a motor or a cylinder.

[0095] Furthermore, the optical detection device 20 includes a mounting frame 26, and the imaging mechanism 21, the reflection mechanism 22 and the light source mechanism 23 are all installed on the mounting frame 26. The first detection drive mechanism 25 drives the mounting frame 26 to translate along the third direction to drive the imaging mechanism 21, the reflection mechanism 22 and the light source mechanism 23 to translate along the third direction.

[0096] The reflection mechanism 22, the light source mechanism 23 and the imaging mechanism 21 are arranged in sequence along the second direction. The optical detection device 20 also includes a second detection drive mechanism 27. The imaging mechanism 21 is connected to the second detection drive mechanism 27. The second detection drive mechanism 27 is used to drive the imaging mechanism 21 to rise and fall along the second direction to adjust the relative position of the imaging mechanism 21 and the light source mechanism 23 along the second direction, so that the distance between the imaging mechanism 21 and the light source mechanism 23 or the reflection mechanism 22 in the second direction is appropriate, which is conducive to the imaging of the measured component 3000. Optionally, the second detection drive mechanism 27 can be driven by a motor or a cylinder.

[0097] In some embodiments, the suction device 10 further includes a displacement drive mechanism, which is used to drive the suction nozzle module 12 to flow between the tray pit and the detection position. The controller is used to control the distance-changing mechanism 11 to adjust the distance between the suction nozzle modules 12 during the process of the suction nozzle module 12 flowing between the tray pit and the detection position. In this way, it is avoided that the distance between the suction nozzle modules 12 is adjusted when the suction nozzle module 12 is above the tray pit or the detection position. When the suction nozzle module 12 moves to above the tray pit, the measured component 3000 can be taken and placed, or when it moves to above the detection position, the camera 211 of the imaging mechanism 21 can be directly exposed for detection, which saves detection time.

[0098] Specifically, see Fig.15 , the controller is used to execute at least one cycle of the following control process:

[0099] During the first time interval T1, the nozzle module 12 is controlled to suck the measured component 3000 on the material tray 2000 and then transfer the measured component 3000 to the detection position, and during the transfer process, the distance changing mechanism 11 is controlled to adjust the spacing of the nozzle module 12 to the detection position spacing. When the measured component 3000 is located in the detection position, the first time interval T1 ends and the second time interval T2 starts.

[0100] It should be noted that when the nozzle module 12 is at the detection position spacing, the nozzle module 12 spacing is matched with the detection position spacing, and the nozzle module 12 can just place the components to be tested 3000 one by one in the detection position.

[0101] During the second time interval T2, the camera 211 of the imaging mechanism 21 is controlled to be exposed, and the image of the component under test 3000 is collected under the illumination light provided by the light source mechanism 23. After the image of the component under test 3000 is collected, the second time interval T2 ends and the third time interval T3 begins. In this embodiment, the light source mechanism 23 performs stroboscopic illumination, and the light source mechanism 23 performs stroboscopic illumination in the time period corresponding to the exposure of the camera 211. In other embodiments, the light source mechanism 23 may also perform illumination in a constant light manner.

[0102] During the third time interval T3, the nozzle module 12 is controlled to transfer the component under test 3000 that has completed image acquisition in the detection position to the tray pit, and during the transfer process, the distance variable mechanism 11 is controlled to adjust the spacing of the nozzle module 12 to the tray pit spacing, and the third time interval T3 ends when the component under test 3000 is placed in the tray pit.

[0103] It should be noted here that when the nozzle module 12 is at the spacing of the tray pits, the spacing of the nozzle module 12 is adapted to the spacing of the tray pits, and the nozzle module 12 can just place the measured components 3000 one by one in the tray pits.

[0104] In the above control process, the controller mainly controls the camera 211 of the imaging mechanism 21 to expose and collect images in the second time interval T2, and the nozzle module 12 remains stationary during this period, or performs a Z-axis displacement to complete the focus of the bottom surface of the chip. The controller mainly controls the nozzle module 12 to move and change distance in the third time interval T3 and the first time interval T1. The imaging mechanism 21 first performs data conversion after exposure during this period, and then waits for the next exposure. During this waiting process, the imaging mechanism 21 remains stationary or performs the aforementioned Z-axis displacement reset process.

[0105] The controller executes the above-mentioned control process to control the variable distance mechanism 11 to adjust the spacing of the suction nozzle module 12 during the transfer process. When the suction nozzle module 12 moves to above the tray pit, it can take and place the measured component 3000, or when it moves to above the detection position, the camera 211 of the imaging mechanism 21 can directly expose and detect, saving detection time.

[0106] Since the material tray 2000 carries a large number of components under test 3000 , generally, the controller executes the above control process for a plurality of cycles to detect all the components under test 3000 on the material tray 2000 .

[0107] Continue reading Figure 3 , the displacement drive mechanism includes a first suction drive mechanism 13 and a second suction drive mechanism 14, the second suction drive mechanism 14 is connected to the first suction drive mechanism 13, and the pitch-changing mechanism 11 is connected to the second suction drive mechanism 14. The first suction drive mechanism 13 is used to drive the second suction drive mechanism 14, the pitch-changing mechanism 11 and the suction nozzle module 12 to translate along the first direction, so as to drive the suction nozzle module 12 to flow between the material tray 2000 and the detection position, and the second suction drive mechanism 14 is used to drive the pitch-changing mechanism 11 and the suction nozzle module 12 to rise and fall along the second direction to approach the material tray 2000 or the optical detection device 20, so as to take the measured component 3000 from the material tray pit or place the measured component 3000 at the detection position for detection. The above-mentioned first direction, second direction and third direction intersect each other. Specifically, the first direction, the second direction and the third direction are perpendicular to each other. Figure 1The Y direction is the first direction and the second direction is Figure 1 The middle Z direction, the third direction is Figure 1 Middle X direction.

[0108] Optionally, both the first suction drive mechanism 13 and the second suction drive mechanism 14 may be driven by a motor or a cylinder.

[0109] In some embodiments, the suction device 10 includes a plurality of nozzle module groups arranged along a third direction, and each nozzle module group includes a plurality of nozzle modules 12 arranged along a first direction. A plurality of detection positions are arranged in an array along the first direction and the third direction. At this time, the first direction or the second direction is the adjacent direction mentioned above. The distance-changing mechanism 11 includes a first distance-changing component 111 and a second distance-changing component 112, and the first distance-changing mechanism 11 is used to adjust the spacing of the plurality of nozzle module groups in the third direction, and the second distance-changing component 112 is used to adjust the spacing of the nozzle modules 12 of each nozzle module group in the first direction. With the cooperation of the first distance-changing component 111 and the second distance-changing component 112, the distance-changing of the nozzle module 12 can be realized.

[0110] In a specific embodiment, the suction device 10 includes two groups of suction nozzle modules, each group of suction nozzle modules includes three suction nozzle modules 12. Fig.16 The first variable pitch assembly 111 includes a first screw rod 1111 and a first nut that are screwed together, and a group of nozzle modules are connected to the first nut. The second variable pitch assembly 112 includes a second screw rod 1121 and two second nuts, and the two second nuts are screwed together with two opposite threaded sections of the second screw rod 1121, and the two nozzle modules 12 at both ends of the nozzle module group are respectively connected to the two second nuts. Optionally, the first screw rod 1111 and the second screw rod 1121 are both driven by a motor.

[0111] In the above arrangement, the motor drives the first screw rod 1111 to rotate, and the first nut moves relative to the first screw rod 1111, so that the spacing between the two groups of nozzle module groups in the third direction changes, and the motor drives the second screw rod 1121 to rotate, and the two second nuts move relative to the second screw rod 1121, and the nozzle modules 12 at both ends of each group of nozzle module groups move along the first direction relative to the other nozzle modules 12, thereby realizing the variable distance of 2*3, i.e., 6 nozzle modules 12.

[0112] It is conceivable that in some other embodiments, when there are more nozzle modules 12 , such as more than 6, the distance changing mechanism 11 can be adaptively changed to meet the distance changing requirements of more nozzle modules 12 .

[0113] See also Fig.17Another embodiment of the present application further provides a testing and weaving integrated machine 1000, including a feeding system 200, a weaving system 500 and the above-mentioned detection system 100, the feeding system 200 is used to convey the material tray 2000, the detection system 100 can detect the measured components 3000 on the material tray 2000 conveyed by the feeding system 200, and the weaving system 500 can grab the measured components 3000 on the material tray 2000 that have passed the inspection for weaving.

[0114] Specifically, the feeding system 200 includes a first tray separation device 201, a first conveying device 202, a tray moving device 203, and a second tray separation device 204. The first tray separation device 201 is used to store the trays 2000 stacked along the second direction and can separate the bottom trays 2000 from the upper trays 2000. The first conveying device 202 is used to receive the separated bottom trays 2000 and convey the trays 2000 to the first station along the third direction. When the tray 2000 is at the first station, the nozzle module 12 of the suction device 10 can suck the measured components 3000 on the tray 2000 and transfer them to the optical detection device 20 for detection. After all the measured components 3000 on the tray 2000 have been detected, the first conveying device 202 conveys the tray 2000 to the second station along the third direction. When the material tray 2000 is at the second workstation, the tray moving device 203 can move the material tray 2000 to the second tray separating device 204 for stacking.

[0115] The feeding system 200 also includes a second conveying device 205. The second tray separation device 204 can separate the bottom tray 2000 and the upper tray 2000. The second conveying device 205 is used to receive the separated bottom tray 2000 and convey the tray 2000 along the third direction to the third station and the fourth station.

[0116] Optionally, the integrated testing and coding machine 1000 further includes a first transfer robot 300 and a first optical detection module 400. The first transfer robot 300 can transfer the tested component 3000 on the tray 2000 at the third station to the first optical detection module 400 for detection. The integrated testing and coding machine 1000 further includes a second transfer robot 700 and a second optical detection module 600. The second transfer robot 700 can transfer the tested component 3000 on the tray 2000 at the fourth station to the second optical detection module 600 for detection. The first optical detection module 400 and the second optical detection module 600 cooperate with the first optical detection device 20 to perform a comprehensive detection on the tested component 3000. For example, in some specific embodiments, the optical detection device 20 detects five surfaces (including four side surfaces and a bottom surface) of the measured component 3000, the first optical detection module 400 can detect the bottom surface of the measured component 3000 and can also perform 3D detection on the measured component 3000, and the second optical detection module 600 can detect the top surface of the measured component 3000.

[0117] Optionally, the taping system 500 includes a rejection robot 501 and a taping robot 502. The second conveying device 205 can convey the tray 2000 to the fifth station. The rejection robot 501 can grab the unqualified test components 3000 on the tray 2000 at the fifth station and transfer the unqualified test components 3000 to the waste tray. The taping robot 502 can grab the qualified test components 3000 on the tray 2000 at the fifth station and tap them to the taping station. During the taping process, if the test components 3000 are detected to be unqualified when performing in-situ detection and mark detection on the test components 3000, the taping robot 502 can also grab the unqualified test components 3000 and put them back into the tray 2000, and grab qualified test components 3000 from the tray 2000 to fill the vacant positions.

[0118] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0119] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A detection system, characterized in that: include: An optical detection device (20) comprising: Imaging mechanism (21); A plurality of groups of reflection mechanisms (22) are all arranged in the field of view of the imaging mechanism (21), and each group of the reflection mechanisms (22) forms a corresponding detection position for placing the measured component (3000); A light source mechanism (23) for providing illumination light to the measured component (3000); Each of the reflection mechanisms (22) is used to reflect light from at least two sides of the component under test (3000) located at the corresponding detection position to the imaging mechanism (21), and the imaging mechanism (21) is used to receive reflected light from multiple groups of the reflection mechanisms (22) to perform imaging detection on multiple components under test (3000); A suction device (10), comprising a variable distance mechanism (11) and a plurality of suction nozzle modules (12) for picking up and placing the components to be tested (3000) on a material tray (2000), wherein the suction nozzle modules (12) are all connected to the variable distance mechanism (11), and the variable distance mechanism (11) is used to adjust the distance between the suction nozzle modules (12), so that the suction nozzle modules (12) place the components to be tested (3000) sucked therein in a one-to-one correspondence at the detection position for detection; and A controller is provided, wherein the controller is used to control the suction device (10) to pick up, place and move the measured component (3000), and to control the optical detection device (20) to image the measured component (3000) when the measured component (3000) is located in the detection position.

2. The detection system according to claim 1, characterized in that: The controller can control the distance-changing mechanism (11) to adjust the distance between the suction nozzle modules (12) based on the distance between the material pits (2001) on the material tray (2000) and the distance between each of the detection positions, so that the distance between the suction nozzle modules (12) is matched with the distance between the material pits (2001) when the measured component (3000) is taken and placed on the material tray (2000), and is matched with the distance between the detection positions when the components (3000) are placed at the detection positions for detection.

3. The detection system according to claim 2, characterized in that: The reflection mechanism (22) comprises a reflection prism assembly (221), the reflection prism assembly (221) being adjacent to two adjacent detection positions, and the reflection prism assembly (221) being used to reflect the illumination light emitted by the light source mechanism (23) to the side surfaces of two corresponding adjacent measured components (3000), and to reflect the light from the side surfaces of the two corresponding adjacent measured components (3000) to the imaging mechanism (21), so as to form an image of the side surfaces of the measured components (3000); Wherein, the distance between two adjacent detection positions is greater than or equal to the width of the reflection prism assembly (221) in the adjacent direction.

4. The detection system according to claim 3, characterized in that: The reflecting prism assembly (221) comprises a first type reflecting prism (222) which is an isosceles right-angle prism; the hypotenuse of the first type reflecting prism (222) is arranged perpendicular to the optical axis of the imaging mechanism (21); the two right-angled sides of the first type reflecting prism (222) respectively reflect the illumination light emitted by the light source mechanism (23) to the side surfaces of two corresponding adjacent measured components (3000), and reflect the light from the side surfaces of two corresponding adjacent measured components (3000) to the imaging mechanism (21), so as to form images of multiple side surfaces of the measured components (3000); the width of the reflecting prism assembly (221) in the adjacent direction is at least the length of the hypotenuse of the first type reflecting prism (222); or The reflecting prism assembly (221) comprises at least two second-type reflecting prisms (223) arranged in parallel along the adjacent direction, the second-type reflecting prisms (223) being isosceles right-angle prisms, a right-angled side of the second-type reflecting prism (223) being arranged parallel to the optical axis of the imaging mechanism (21), the hypotenuse of each second-type reflecting prism (223) reflecting the illumination light emitted by the light source mechanism (23) to the side of the corresponding measured component (3000), and reflecting the light from the side of the corresponding measured component (3000) to the imaging mechanism (21), so as to form images of multiple side surfaces of the measured component (3000); the width of the reflecting prism assembly (221) in the adjacent direction is at least the sum of the lengths of the right-angled sides of the two second-type reflecting prisms (223).

5. The detection system according to claim 1, characterized in that: The reflection mechanism (22) comprises a plurality of reflection prisms, and the plurality of reflection prisms surround and form the detection position; Part of the illumination light emitted by the light source mechanism (23) is reflected to multiple side surfaces of the corresponding measured component (3000) through the multiple reflection prisms, and the reflection prisms reflect the first imaging light from the multiple side surfaces of the corresponding measured component (3000) to the imaging mechanism (21); Part of the illumination light emitted by the light source mechanism (23) is incident on the bottom surface or top surface of the measured element (3000), and is reflected or scattered to form second imaging light to the imaging mechanism (21); The imaging mechanism (21) receives the first imaging light and the second imaging light to image multiple side surfaces of the component under test (3000) and the bottom surface or top surface of the component under test (3000).

6. The detection system according to claim 5, characterized in that: The reflecting prism comprises a first type of reflecting prism (222) and a second type of reflecting prism (223), both of which are isosceles right-angle prisms; the second type of reflecting prism (223) is arranged around the first type of reflecting prism (222) to form a plurality of the detecting positions; A right-angled side of the second-type reflecting prism (223) is arranged parallel to the optical axis of the imaging mechanism (21), and the hypotenuse of each second-type reflecting prism (223) reflects the illumination light emitted by the light source mechanism (23) to the side of the corresponding measured component (3000), and reflects the light from the side of the corresponding measured component (3000) to the imaging mechanism (21), so as to form images of multiple side surfaces of the measured component (3000); The hypotenuse of the first-type reflecting prism (222) is arranged perpendicular to the optical axis of the imaging mechanism (21), and the two right-angled sides of the first-type reflecting prism (222) respectively reflect the illumination light emitted by the light source mechanism (23) to the side of the corresponding measured component (3000), and reflect the light from the side of the corresponding measured component (3000) to the imaging mechanism (21), so as to form images of multiple side surfaces of the measured component (3000).

7. The detection system according to claim 1, characterized in that: The imaging mechanism (21) comprises a camera (211) and an object-side telecentric lens, the field of view of the object-side telecentric lens corresponds to a plurality of groups of the reflection mechanisms (22), and the imaging mechanism (21) is used to simultaneously image the side surfaces and bottom surfaces of a plurality of measured components (3000); or The imaging mechanism (21) comprises a camera (211) and a non-object-space telecentric lens, the field of view of the non-object-space telecentric lens corresponds to a plurality of groups of the reflection mechanisms (22), and the imaging mechanism (21) is used to respectively image the side surfaces and bottom surfaces of a plurality of measured components (3000).

8. The detection system according to claim 1, characterized in that: The suction device (10) further comprises a displacement driving mechanism, wherein the displacement driving mechanism is used to drive the suction nozzle module (12) to flow between the material tray pit position and the detection position; The controller is used to control the distance-changing mechanism (11) to adjust the distance between the suction nozzle modules (12) during the process of the suction nozzle modules (12) transferring between the material tray pit position and the detection position.

9. The detection system according to claim 8, characterized in that: The displacement drive mechanism comprises a first suction drive mechanism (13) and a second suction drive mechanism (14), the second suction drive mechanism (14) is connected to the first suction drive mechanism (13), and the variable distance mechanism (11) is connected to the second suction drive mechanism (14); The first suction drive mechanism (13) is used to drive the second suction drive mechanism (14), the variable pitch mechanism (11) and the suction nozzle module (12) to translate along a first direction, so as to drive the suction nozzle module (12) to flow between the material tray (2000) and the detection position; the second suction drive mechanism (14) is used to drive the variable pitch mechanism (11) and the suction nozzle module (12) to rise and fall along a second direction, so as to approach or move away from the material tray (2000) or the optical detection device (20); The first direction and the second direction intersect.

10. The detection system according to claim 8, characterized in that: The controller is used to execute the following control process of at least one cycle: During a first time interval, the suction nozzle module (12) is controlled to suck the measured component (3000) on the material tray (2000) and then transfer the measured component (3000) to the detection position, and during the transfer process, the distance-changing mechanism (11) is controlled to adjust the spacing of the suction nozzle module (12) to the detection position spacing, and when the measured component (3000) is located in the detection position, the first time interval ends and a second time interval begins; During a second time interval, the camera (211) of the imaging mechanism (21) is controlled to be exposed, and an image of the component under test (3000) is collected under the illumination light provided by the light source mechanism (23); after the image of the component under test (3000) is collected, the second time interval is ended and a third time interval is started; During the third time interval, the nozzle module (12) is controlled to transfer the component under test (3000) that has completed image acquisition in the detection position to the tray pit, and during the transfer process, the variable distance mechanism (11) is controlled to adjust the spacing of the nozzle modules (12) to the tray pit spacing, and the third time interval ends when the component under test (3000) is placed in the tray pit.

11. The detection system according to claim 1, characterized in that: The optical detection device (20) further comprises a first detection drive mechanism (25), the imaging mechanism (21), the reflection mechanism (22) and the light source mechanism (23) are all connected to the first detection drive mechanism (25), and the first detection drive mechanism (25) is used to drive the imaging mechanism (21), the reflection mechanism (22) and the light source mechanism (23) to translate along a third direction so as to be opposite to the nozzle module (12); and / or The reflection mechanism (22), the light source mechanism (23) and the imaging mechanism (21) are arranged in sequence along a second direction. The optical detection device (20) further comprises a second detection drive mechanism (27). The imaging mechanism (21) is connected to the second detection drive mechanism (27). The second detection drive mechanism (27) is used to drive the imaging mechanism (21) to rise and fall along the second direction so as to adjust the relative position of the imaging mechanism (21) and the light source mechanism (23) along the second direction.

12. The detection system according to claim 1, characterized in that: The suction device (10) comprises a plurality of suction nozzle module groups arranged along a third direction, each of the suction nozzle module groups comprises a plurality of suction nozzle modules (12) arranged along a first direction; and a plurality of detection positions are arranged in an array along the first direction and the third direction; The distance-changing mechanism (11) comprises a first distance-changing component (111) and a second distance-changing component (112), wherein the first distance-changing component (111) is used to adjust the distance between the plurality of suction nozzle module groups in the third direction, and the second distance-changing component (112) is used to adjust the distance between the suction nozzle modules (12) of each suction nozzle module group in the first direction; The first direction intersects the third direction.

13. A measuring and coding integrated machine, characterized in that: The invention comprises a feeding system (200), a taping system (500) and a detection system as claimed in any one of claims 1 to 12, wherein the feeding system (200) is used to convey a material tray (2000), the detection system can detect the components to be tested (3000) on the material tray (2000) conveyed by the feeding system (200), and the taping system (500) can grab the components to be tested (3000) on the material tray (2000) that have passed the inspection and perform taping.

Images