Objective lens turntable, laser focusing device and laser annealing equipment

Abstract

The invention discloses an objective lens rotating disc, a laser focusing device and laser annealing equipment. The objective lens rotating disc comprises a bearing disc, three hollow cylindrical objective lens interfaces and a protection plate. The bearing disc is provided with three end parts and is triangular or Y-shaped; the three hollow cylindrical objective lens interfaces are used for mounting objective lenses with different focal sections, each objective lens interface is obliquely arranged at one end part, the upper end of each objective lens interface is communicated with the surface of the bearing disc, and the included angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90 degrees. The protection plate is arranged on the upper surface of the objective lens and is provided with a light hole; wherein the bearing disc can rotate relative to the protection plate and is used for switching different objective lens interfaces to be aligned with the light hole. According to the objective lens turntable disclosed by the invention, the included angle between the axes of the two adjacent objective lens interfaces is greater than or equal to 90 degrees, so that other objective lenses can be prevented from touching the outer wall of a vacuum sample cavity when one objective lens extends into the vacuum sample cavity.

Description

Technical Field

[0001] The invention belongs to the technical field of micro-nano processing, and in particular relates to an objective lens turntable, a laser focusing device and a laser annealing device. Background Art

[0002] At present, the phase change research of low-dimensional materials such as thin film materials is mainly carried out by heating in traditional heating furnaces. Due to the small size of low-dimensional materials and the fast phase change speed of materials (the time scale of phase change of some materials is in the nanosecond level), the traditional heating furnace for phase change research can no longer meet the process requirements. At the same time, with the development of high-throughput combination material chip technology, there are various materials of different components on a single chip, and the melting points of different components are different. If they are placed in a heating furnace for phase change research at the same time, since the spacing between adjacent components is in the order of hundreds of microns, as the temperature rises, the low melting point area on the chip may begin to melt and contaminate the components in the adjacent areas. Using a telephoto focused laser device and laser annealing technology, high-energy density laser irradiation can be projected on a small area on the surface of the sample in an ultra-short time (tens to hundreds of nanoseconds), so that the material on the surface of the sample melts and naturally grows a crystal film in the molten layer by liquid phase epitaxy during the subsequent cooling process, reconstructing the crystal structure of the molten layer, and realizing precise surface treatment of materials or devices. Combined with the ultra-high vacuum atmosphere, it can effectively prevent the sample from reacting with components in the air at the high temperature generated by annealing, thereby affecting the performance of the device.

[0003] The working distance of the telephoto high-power objective lens in the telephoto focusing laser equipment is only 2-3 cm. The traditional flange window cannot guarantee normal focus, so the vacuum sample chamber can only use a concave window. The quartz observation window must be thin enough and the compact structure inside the cavity further limits the diameter of the concave observation window. During operation, only a single objective lens can extend into the cavity from the concave window, which plays the role of laser beam focusing and charge coupled device (CCD) imaging observation at the same time.

[0004] The existing scheme uses a single high-power objective lens, resulting in a fixed laser spot diameter and limited observation field of view, which greatly reduces the versatility of the equipment, because different materials and devices require different annealing areas, and the requirements for spot diameters are also different. Traditional semiconductor devices have a large annealing area and require a large millimeter-level spot. The existing laser spot diameter is usually millimeter-level, and there is no need to focus the beam again. The core structure of the quantum computing chip, the Josephson junction, usually has a junction area range of 0.1μm×0.1μm, and the distance between the junctions is usually hundreds of microns. In order to achieve independent annealing of each junction area without affecting each other, the laser spot diameter needs to be at the level of several microns, and an objective lens of more than 50 times is required to focus it. Therefore, it is necessary to use the objective lens turntable to switch different objective lenses to achieve a span from microns to millimeters in spot diameter. The traditional objective lens turntable has no space restrictions, and there is no need to consider mutual interference between objective lenses. Multiple objective lenses are compactly integrated on a spherical surface in a circular range. When the working objective lens extends into the well-shaped structure, it will collide with the cavity wall due to the oblique downward direction of the remaining objective lenses, and cannot be fully extended, so it cannot be applied to laser annealing technology.

[0005] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0006] The object of the present invention is to provide an objective lens turntable, which can prevent the carrier plate from abutting against the side wall of the vacuum sample chamber, so that the objective lens can be fully extended into the concave observation window.

[0007] In order to achieve the above-mentioned purpose, a technical solution provided by a specific embodiment of the present invention is as follows: an objective lens turntable, comprising: a carrier plate, three hollow cylindrical objective lens interfaces and a protective plate. The carrier plate has three ends and the carrier plate is triangular or Y-shaped; the three hollow cylindrical objective lens interfaces are used to install objective lenses of different focal lengths, each objective lens interface is tilted at one of the ends, the upper end of the objective lens interface is connected to the surface of the carrier plate, and the angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90°; the protective plate is arranged on the upper surface of the carrier plate and a light-transmitting hole is opened on the protective plate; wherein the carrier plate can rotate relative to the protective plate to switch different objective lens interfaces to align with the light-transmitting hole.

[0008] Another specific embodiment of the present invention provides a technical solution as follows: an objective lens turntable, comprising: a carrier plate, three hollow cylindrical objective lens interfaces and a protective plate. The carrier plate has three ends and is triangular or Y-shaped; the three hollow cylindrical objective lens interfaces are used to install objective lenses of different focal lengths; each objective lens interface is tilted at one of the ends, the upper end of the objective lens interface is connected to the surface of the carrier plate, and the angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90°; the protective plate is fixedly arranged on the upper surface of the carrier plate, and light-transmitting holes are provided at positions corresponding to the objective lens interfaces of the protective plate.

[0009] In one or more embodiments of the present invention, the angle between two adjacent axes of the objective lens interface is 90°-109°; and / or the angle between the axis of each objective lens interface and the plane where the carrier plate is located is 144°-160°.

[0010] In one or more embodiments of the present invention, a movable shielding plate is provided on the protection plate to shield the light-transmitting hole.

[0011] In one or more embodiments of the present invention, a guide groove is formed on the protection plate along the moving direction of the shielding plate, and a portion of the shielding plate is disposed in the guide groove.

[0012] In one or more embodiments of the present invention, the objective lens turntable also includes a support rod, one end of which is connected to the supporting plate and the protective plate, and the other end is used to connect to an external objective lens turntable supporting device, and the supporting plate can rotate around the connection between it and the support rod.

[0013] In one or more embodiments of the present invention, the objective lens turntable further includes: a motor, configured to drive the carrier plate to rotate.

[0014] In one or more embodiments of the present invention, a plurality of positioning posts are disposed on the carrier plate, and a sensor is disposed on the protection plate. The sensor detects the positions of the positioning posts to determine whether the carrier plate has been rotated into position.

[0015] Another specific embodiment of the present invention provides a technical solution as follows: a laser focusing device, comprising: a laser emitter, a polarization beam splitter and an objective lens assembly. The laser emitter is used to emit laser light; the polarization beam splitter is arranged on the laser light path; the objective lens assembly is arranged on the laser light path and is located downstream of the polarization beam splitter; the objective lens assembly comprises: an objective lens turntable, a plurality of objective lenses arranged on the objective lens turntable and an objective lens turntable carrying device.

[0016] Another specific embodiment of the present invention provides a technical solution as follows: a laser annealing device, comprising: a vacuum sample chamber and a laser focusing device. The vacuum sample chamber is used to place a sample, and the vacuum sample chamber has a concave observation window; the laser focusing device is used to laser anneal the sample in the vacuum sample chamber; wherein the objective lens is used to extend into the concave observation window.

[0017] Compared with the prior art, the objective lens turntable, laser focusing device and laser annealing equipment of the present invention have a triangular or Y-shaped carrier plate, an angle between the objective lens interface and the carrier plate, and an angle between two adjacent objective lens interface axes greater than or equal to 90°, which can prevent the carrier plate from abutting against the side wall of the vacuum sample chamber and the objective lens from abutting against the side wall of the vacuum sample chamber, thereby affecting the insertion of the objective lens. In addition, the protective plate and the shielding plate can shield the objective lens to prevent it from being contaminated. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 is a first stereoscopic view of an objective lens turret in one embodiment of the present invention;

[0020] Figure 2 is a second stereoscopic view of the objective lens turret in one embodiment of the present invention;

[0021] Figure 3 is a first stereoscopic view of an objective lens turret in yet another embodiment of the present invention;

[0022] Figure 4 is a second stereoscopic view of an objective lens turret in yet another embodiment of the present invention;

[0023] Figure 5 It is a three-dimensional diagram of a laser annealing device in one embodiment of the present invention.

[0024] Description of main reference numerals:

[0025] 1-carrying plate, 11-end, 12-objective lens interface, 13-positioning column, 2-protective plate, 21-light transmission hole, 211-shielding plate, 22-sensor, 23-driving member, 24-guide groove, 3-support rod, 4-motor, 5-laser emitter, 6-polarization beam splitter, 7-vacuum sample chamber, 71-recessed observation window. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0027] like Figure 1-2 As shown, an objective lens turntable in one embodiment of the present invention comprises: a carrier plate 1, three hollow cylindrical objective lens interfaces 12 and a protective plate 2. The carrier plate 1 has three ends 11 and the carrier plate 1 is triangular or Y-shaped. The three objective lens interfaces 12 are used to install objective lenses of different focal lengths, each objective lens interface 12 is tilted at one end 11 and the upper end of the objective lens interface 12 is connected to the surface of the carrier plate 1. The angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90°. The protective plate 2 is arranged on the upper surface of the carrier plate 1 and a light-transmitting hole 21 is opened on the protective plate 2. The carrier plate 1 can rotate relative to the protective plate 2 to switch different objective lens interfaces to align with the light-transmitting hole 21.

[0028] The working principle of the objective lens turret is as follows: Since different materials and devices require different annealing areas, the requirements for the spot diameter are also different. Therefore, for different samples, objective lenses with different focal lengths are required for focusing. Figure 5 As shown, objective lenses of different focal lengths are installed on each objective lens interface 12. Among them, the objective lens corresponding to the light-transmitting hole 21 on the protective plate 2 is the working objective lens. The end 11 on the carrier plate 1 corresponding to the light-transmitting hole 21 can be controllably extended into the concave observation window 71 of the vacuum sample chamber 7, and then cooperate with the external laser to realize laser annealing of the sample. When the sample replacement requires adjustment of the objective lens focal length, the carrier plate 1 drives the end 11 to withdraw from the concave observation window 71, and then the carrier plate 1 rotates relative to the protective plate 2 to convert the objective lenses of other focal lengths to the light-transmitting hole 21. Then, it is extended into the concave observation window 71 of the vacuum sample chamber 7 for focusing and laser annealing.

[0029] In the above embodiment, the objective lens turret of the present invention does not use a traditional circular carrier plate 1, but uses a triangular or Y-shaped carrier plate 1, the objective lens interface 12 is tilted, and the angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90°, which can prevent the objective lens, the carrier plate 1 from abutting against the outer wall of the vacuum sample chamber 7. In addition, during use, only one objective lens is aligned with the light transmission hole 21, and the upper ends of the other objective lenses are blocked by the protective plate 2 to avoid contamination.

[0030] Preferably, the angle between the axes of two adjacent objective lens interfaces 12 is 90°-109°. Furthermore, the angle between the axis of each objective lens interface 12 and the plane where the carrier plate 1 is located is 144°-160°. By controlling the angle between the objective lens interfaces 12 and the angle between the objective lens interface 12 and the carrier plate 1, there will be no interference between the objective lens, the carrier plate 1 and the vacuum sample chamber 7, and the objective lens can be fully extended into the concave observation window 71 of the vacuum sample chamber 7, meeting the requirements of laser annealing. Preferably, when the carrier plate 1 is triangular, it is roughly an equilateral triangle carrier plate 1. When the carrier plate 1 is Y-shaped, the distances from the three ends 11 of the carrier plate 1 to the center of the carrier plate 1 are equal, and the connecting line of the three ends 11 is roughly an equilateral triangle. The above structure can avoid the carrier plate 1 from abutting against the outer wall of the vacuum sample chamber 7.

[0031] In one embodiment, if Figure 1 As shown, when the carrier plate 1 is a triangular carrier plate 1, the protective plate 2 can also be a triangular protective plate 2 that matches the carrier plate 1. Since the carrier plate 1 can rotate relative to the protective plate 2, in order to ensure that the objective lens can be aligned with the light-transmitting hole 21, a plurality of positioning posts 13 are provided on the side wall of the carrier plate 1, and a sensor 22 is provided on the protective plate 2 for detecting the position of the positioning posts 13 to determine whether the carrier plate 1 has rotated into place.

[0032] For example, when the carrier plate 1 is a triangular carrier plate 1, the positioning posts 13 can be respectively arranged on the three side walls of the triangular carrier plate 1, and the positions of the positioning posts 13 on the three side walls are the same, and the sensor 22 is arranged on one side of the protective plate 2. The working mode of the sensor 22 and the positioning posts 13 can be: when the carrier plate 1 does not rotate, there is a corresponding positioning post 13 below the sensor 22. When the carrier plate 1 rotates, the sensor 22 senses the movement of the positioning post 13 and generates a sensing signal. When another positioning post 13 moves to the bottom of the sensor 22, the sensor 22 generates a sensing signal again, and the sensing signal can be transmitted to the external controller, and the controller determines that the carrier plate 1 is rotated into place. Therefore, when the carrier plate 1 rotates, the sensor 22 can sense the movement of the positioning post 13 to realize the switching of the objective lens.

[0033] In one embodiment, if Figure 4 As shown, a movable shielding plate 211 is provided on the protection plate 2 for shielding the light transmission hole 21. When the objective lens is not needed, the shielding plate 211 can shield the light transmission hole 21 to protect the objective lens in the objective lens interface 12 from being contaminated.

[0034] Further, a driving member 23 may be provided on the protection plate 2. For example, the driving member 23 may be a cylinder or a driving motor. Preferably, the driving member 23 is connected to the shielding plate 211 to control the movement of the shielding plate 211.

[0035] A guide groove 24 is provided on the protection plate 2 along the moving direction of the shielding plate 211 , and part of the shielding plate 211 is arranged in the guide groove 24 and connected to the driving member 23 to ensure that the moving direction of the shielding plate 211 will not deviate.

[0036] In one embodiment, the objective turret further comprises a support rod 3. One end of the support rod 3 is connected to the carrier plate 1 and the protection plate 2, and the other end is used to connect to an external objective turret carrying device. The carrier plate 1 can rotate around the connection between it and the support rod 3. Through the support rod 3, the objective turret can approach or move away from the vacuum sample chamber 7 under the control of the external objective turret carrying device.

[0037] Furthermore, the objective lens turret may further include a motor 4. For example, the motor 4 may be disposed at the connection between the carrier plate 1, the protection plate 2 and the support rod 3 to drive the carrier plate 1 to rotate, so as to realize the switching of the objective lens.

[0038] like Figure 3-4 As shown, an objective lens turntable in another embodiment of the present invention comprises: a carrier plate 1, three hollow cylindrical objective lens interfaces 12 and a protective plate 2. The carrier plate 1 has three ends 11 and the carrier plate 1 is triangular or Y-shaped. The three objective lens interfaces are used to install objective lenses of different focal lengths, each objective lens interface 12 is tilted at one end 11 and the upper end of the objective lens interface 12 is connected to the surface of the carrier plate 1. The angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90°. The protective plate 2 is fixedly arranged on the upper surface of the carrier plate 1 and light-transmitting holes 21 are provided at positions corresponding to the objective lens interfaces 12 on the protective plate 2.

[0039] The working principle of the carrier plate 1 is as follows: each objective lens interface 12 is mounted with an objective lens of a different focal length. When in use, the objective lens of the corresponding focal length is controllably extended into the concave observation window 71 of the vacuum sample chamber 7, and then cooperates with the external laser to achieve laser annealing of the sample. When the sample is replaced and the focal length of the objective lens needs to be adjusted, the carrier plate 1 drives the end 11 to withdraw from the concave observation window, and the carrier plate 1 rotates to switch the objective lens of other focal lengths to the top of the concave observation window 71. Then, it is extended into the concave observation window 71 of the vacuum sample chamber 7.

[0040] like Figure 3 and Figure 4 As shown, in one embodiment, a movable shielding plate 211 is provided on the protection plate 2 to shield the light-transmitting hole 21. When the objective lens is not in use, the shielding plate 211 can shield the light-transmitting hole 21 to protect the objective lens in the objective lens interface 12 from being contaminated. In this embodiment, each light-transmitting hole 21 is equipped with a shielding plate 211. When in use, only the shielding plate 211 at the corresponding light-transmitting hole 21 needs to be opened, and the other light-transmitting holes 21 are in a closed state.

[0041] Further, a driving member 23 is provided on the protection plate 2. For example, the driving member 23 may be a cylinder or a driving motor. Preferably, the driving member 23 is connected to the shielding plate 211 to control the movement of the shielding plate 211.

[0042] A guide groove 24 is provided on the protection plate 2 along the moving direction of the shielding plate 211 , and part of the shielding plate 211 is arranged in the guide groove 24 and connected to the driving member 23 to ensure that the moving direction of the shielding plate 211 will not deviate.

[0043] In one embodiment, the objective turret further comprises a support rod 3. One end of the support rod 3 is connected to the carrier plate 1 and the protection plate 2, and the other end is used to connect to an external objective turret carrying device. The carrier plate 1 can rotate around the connection between it and the support rod 3. Through the support rod 3, the objective turret can approach or move away from the vacuum sample chamber 7 under the control of the external objective turret carrying device.

[0044] Furthermore, the objective lens turret further comprises a motor 4. For example, the motor 4 can be arranged at the connection between the carrier plate 1, the protection plate 2 and the support rod 3 to drive the carrier plate 1 to rotate, so as to realize the switching of the objective lens.

[0045] A laser focusing device in another embodiment of the present invention comprises a laser emitter 5, a polarization beam splitter 6 and an objective lens assembly. The laser emitter 5 is used to emit laser light. The polarization beam splitter 6 is arranged on the laser light path. The objective lens assembly is arranged on the laser light path and is located downstream of the polarization beam splitter 6. The objective lens assembly comprises: the above-mentioned objective lens turret, a plurality of objective lenses arranged on the objective lens turret and an objective lens turret carrying device (not shown in the figure).

[0046] like Figure 5 As shown, a laser annealing device in another embodiment of the present invention comprises a vacuum sample chamber 7 and the above-mentioned laser focusing device. The vacuum sample chamber 7 is used to place the sample and the vacuum sample chamber 7 has a concave observation window 71. The laser focusing device is used to laser anneal the sample in the vacuum sample chamber 7. The objective lens is used to extend into the concave observation window 71.

[0047] In summary, the objective lens turntable, laser focusing device and laser annealing equipment of the present invention can avoid the support plate 1 from abutting against the outer wall of the vacuum sample chamber 7 and affecting the objective lens from extending into the concave observation window 71 by adopting a triangular or Y-shaped support plate 1. The objective lens interface 12 is tilted and the angle between the axes of two adjacent objective lens interfaces 12 is greater than or equal to 90°, which can avoid the objective lens from abutting against the outer wall of the vacuum sample chamber 7. In addition, during use, the protective plate 2 and the shielding plate 211 can shield the unused objective lens to prevent it from being contaminated.

[0048] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0049] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An objective lens turret, characterized in that: include: A carrier plate having three ends and being in a triangular or Y-shape; Three hollow cylindrical objective lens interfaces, used for installing objective lenses of different focal lengths, each objective lens interface is tiltedly arranged at one of the end portions, the upper end of the objective lens interface is connected to the surface of the carrier plate, and the angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90°; and A protection plate, disposed on the upper surface of the carrier plate and having a light-transmitting hole; The carrier plate can rotate relative to the protection plate to switch between different objective lens interfaces and align with the light-transmitting hole.

2. An objective lens turret, characterized in that: include: A carrier plate having three ends and being in a triangular or Y-shape; Three hollow cylindrical objective lens interfaces, used for installing objective lenses of different focal lengths, each objective lens interface is tiltedly arranged at one of the end portions, the upper end of the objective lens interface is connected to the surface of the carrier plate, and the angle between the axes of two adjacent objective lens interfaces is greater than or equal to 90°; and The protection plate is fixedly arranged on the upper surface of the carrying plate, and light-transmitting holes are provided at positions of the protection plate corresponding to the objective lens interface.

3. The objective lens turret according to claim 1 or 2, characterized in that: The angle between two adjacent objective lens interface axes is 90°-109°; and / or the angle between the axis of each objective lens interface and the plane where the carrier plate is located is 144°-160°.

4. The objective lens turret according to claim 1 or 2, characterized in that: The protection plate is provided with a movable shielding plate for shielding the light-transmitting hole.

5. The objective lens turret according to claim 4, characterized in that: A guide groove is provided on the protection plate along the moving direction of the shielding plate, and a portion of the shielding plate is arranged in the guide groove.

6. The objective lens turret according to claim 1 or 2, characterized in that: It also includes a support rod, one end of which is connected to the carrying plate and the protection plate, and the other end is used to connect to an external carrying plate carrying device, and the carrying plate can rotate around the connection between it and the support rod.

7. The objective lens turret according to claim 1 or 2, characterized in that: Also includes: The motor is used to drive the carrying plate to rotate.

8. The objective lens turret according to claim 1, characterized in that: A plurality of positioning posts are arranged on the carrier plate, and a sensor is arranged on the protection plate. The sensor detects the positions of the positioning posts to determine whether the carrier plate is rotated into position.

9. A laser focusing device, characterized in that: include: A laser transmitter, used for emitting laser; A polarization beam splitter, arranged on the laser light path; and an objective lens assembly, arranged in the laser optical path and downstream of the polarization beam splitter; The objective lens assembly comprises: an objective lens turntable as described in any one of claims 1 to 8, a plurality of objective lenses arranged on the objective lens turntable, and an objective lens turntable carrying device.

10. A laser annealing device, characterized in that: include: A vacuum sample chamber, used for placing a sample, and the vacuum sample chamber has a concave observation window; and The laser focusing device according to claim 9, used for laser annealing the sample; in, The objective lens is used to extend into the concave observation window.

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