Posture adjusting mechanism and posture adjusting method thereof

Abstract

The posture adjusting mechanism comprises a fixing frame and a micro-motion part, the micro-motion part is fixed to the first side of the fixing frame, a first carrying table is installed at the end, away from the fixing frame, of the micro-motion part, and the first carrying table is connected with a second carrying table through a connecting rod; the driving part is installed on the second side of the fixing frame, and the transmission part is arranged between the driving part and the second carrying table; the detection part is used for detecting the posture of the end, away from the fixing frame, of the micro-motion part and / or the posture of the first carrying table, the driving part drives the second carrying table and the first carrying table to move through the transmission part, and the motion of the first carrying table is converted into motion around the axis of the micro-motion part through the micro-motion part. Through the flexible hinge matched with the first carrying table, the horizontal displacement of the first carrying table can be converted into the rotation displacement around the axis of the flexible hinge, so that the adjustment of the tilting posture of the first carrying table is realized, and high adjustment precision can be realized in a relatively small mounting space.

Description

Technical Field

[0001] The present specification relates to the technical field of posture fine-tuning in precision manufacturing equipment, and in particular to a posture adjustment mechanism. Background Art

[0002] The fine adjustment mechanism refers to a precision mechanism that can achieve high-precision position or posture adjustment within a very small adjustment range, and the adjustment accuracy can generally reach the micron or nanometer level. The micro-adjustment mechanism can be divided into micro-adjustments with a total of 6 degrees of freedom: X, Y, Z, Rx, Ry, and Rz. In the field of precision manufacturing, on the one hand, the positioning accuracy of mechanical assembly cannot meet the precision requirements of the product; on the other hand, the surface shapes of different templates or wafers are also different, and micro-adjustment mechanisms are required to compensate after replacement.

[0003] The tilt attitude fine-tuning module is mainly realized by mechanical hinges or flexible hinges. Mechanical hinges are usually connected by ball joints. A certain gap and lubricating medium are required between the two spherical surfaces to ensure smooth rotation. Therefore, mechanical hinges cannot achieve too high precision adjustment; flexible hinges adjust the attitude through the elastic deformation of the material, so the use of flexible hinges can achieve higher adjustment accuracy, but due to the existence of internal stress in the material, the adjustment range is limited, and there are higher requirements for the quality of mechanical processing. Summary of the invention

[0004] In view of this, an embodiment of the present specification provides a posture adjustment mechanism, in which a driving part drives a transmission part to move, and the transmission part can convert the vertical displacement of the driving part into a horizontal displacement. The transmission part drives the second carrier to move, and the second carrier drives the first carrier to move synchronously. By means of a micro-motion part coordinated with the first carrier, the horizontal displacement of the first carrier can be converted into a rotational displacement around the axis of the micro-motion part, thereby realizing the adjustment of the tilting posture of the first carrier, and achieving high adjustment accuracy in a smaller installation space.

[0005] The embodiments of this specification provide the following technical solutions: a posture adjustment mechanism, comprising:

[0006] Fixed frame;

[0007] A fine-motion part, the fine-motion part is fixed to a first side of the fixing frame, a first stage is installed at one end of the fine-motion part away from the fixing frame, the first stage is connected to a second stage via a connecting rod, and the fine-motion part is used to fine-tune the posture of the first stage;

[0008] A driving unit, the driving unit is mounted on the second side of the fixing frame and provides power to generate displacement;

[0009] a transmission part, the transmission part being disposed between the driving part and the second stage and in contact with the driving part and the second stage; and

[0010] a detection unit for detecting the posture of the end of the micro-movement unit away from the fixing frame and / or the posture of the first stage,

[0011] The driving part drives the second stage and the first stage to move via the transmission part, and converts the movement of the first stage into movement around the axis of the fine motion part through the fine motion part, so as to fine-tune the posture of the first stage.

[0012] Preferably, the driving unit includes a driving motor and a loading structure.

[0013] The driving motor is mounted on the second side of the fixing frame, and the output end of the driving motor is connected to the loading structure.

[0014] The driving motor drives the loading structure to move along the second direction and generates displacement in the second direction.

[0015] Preferably, the transmission part comprises a transmission block and a guide structure, and the transmission block moves along the first direction on the guide structure.

[0016] The transmission block is in contact with the loading structure and the second carrier respectively, and the displacement of the transmission block in the first direction is the same as the displacement of the second carrier in the first direction. Under the drive of the driving motor, the displacement of the loading structure in the second direction is converted into the displacement of the second carrier in the first direction via the transmission block.

[0017] Preferably, when the loading structure contacts the transmission block, the contact surface of the loading structure is set as a cylindrical surface and the contact surface of the transmission block is set as an inclined surface, or the contact surface of the loading structure is set as an inclined surface and the contact surface of the transmission block is set as a cylindrical surface.

[0018] Preferably, the micro-motion portion comprises a flexible hinge, and the flexible hinge is provided with a first opening and a second opening on a plane in the third direction.

[0019] The first end of the first opening and the first end of the second opening are spaced apart from each other by a first distance in the first direction, and the axis of the flexible hinge is located in the middle of the first distance.

[0020] When the driving unit drives the second stage and the first stage to move via the transmission unit, the horizontal movement of the first stage is converted into a rotational movement around the axis through the flexible hinge, so as to fine-tune the posture of the first stage.

[0021] Preferably, the posture adjustment mechanism further includes a tension spring and / or a compression spring.

[0022] The tension spring is arranged on a side of the second carrier close to the transmission part, and the tension spring always pulls the second carrier to have a tendency to approach the transmission part.

[0023] The compression spring is arranged on a side of the second carrier away from the transmission part, and the compression spring always pushes the second carrier to have a tendency to approach the transmission part.

[0024] Preferably, the detection unit includes a position sensor, and based on a change in a reading of the position sensor, closed-loop control is performed on the driving unit.

[0025] Preferably, the position sensor measures the posture change of the lower end of the first carrier and / or the micro-motion part, thereby performing closed-loop control on the driving part.

[0026] Preferably, the fixing frame is provided with a first opening, and the micro-moving portion is provided with a second opening.

[0027] The connecting rod fixed to the first carrier passes through the first opening and the second opening and is connected to the second carrier.

[0028] A high-precision posture adjustment method, based on the posture adjustment mechanism described in any one of the above, the high-precision posture adjustment method comprises:

[0029] a detection step, using the detection unit to detect the posture of the end of the fine-motion unit away from the fixing frame and / or the posture of the first stage, and controlling the driving unit based on the reading change of the detection unit;

[0030] A driving step, wherein the driving part provides power to move in the second direction and generate displacement in the second direction;

[0031] a transmission step, converting the displacement of the driving part in the second direction into the displacement of the second stage and the first stage in the first direction via the transmission part;

[0032] The posture fine-tuning step converts the movement of the first stage in the first direction into a rotational movement around the axis of the fine-moving portion through the fine-moving portion, so as to fine-tune the posture of the first stage.

[0033] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0034] The driving part drives the transmission part to move, and the transmission part can convert the vertical displacement of the driving part into horizontal displacement. The transmission part drives the second carrier to move, and the second carrier drives the first carrier to move synchronously. By setting a micro-motion part coordinated with the first carrier, the horizontal displacement of the first carrier can be converted into a rotational displacement around the axis of the micro-motion part, thereby realizing the adjustment of the tilting posture of the first carrier, and achieving high adjustment accuracy in a smaller installation space. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 It is a structural schematic diagram of the posture adjustment mechanism provided by the present invention.

[0037] Figure 2 It is a driving link diagram of the posture adjustment mechanism provided by the present invention when it is working.

[0038] Figure 3 It is an enlarged schematic diagram of the transmission part of the posture adjustment mechanism provided by the present invention.

[0039] In the figure, 1, fixed frame; 2, micro-motion part; 21, flexible hinge; 22, first opening; 23, second opening; 3, first carrier; 4, second carrier; 5, driving motor; 6, loading structure; 7, transmission block; 71, inclined plane; 8, detection part; 9, guide structure; 10, tension spring; 11, compression spring; 12, connecting rod. DETAILED DESCRIPTION

[0040] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0041] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0042] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0043] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0044] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0045] For the attitude fine-tuning mechanism, adjustment stroke and accuracy are two important design indicators. Among them, the adjustment accuracy is mainly determined by two factors, namely, driving accuracy and measurement accuracy. The driving accuracy is determined by the minimum step of the driving motor, while the measurement accuracy depends on the resolution of the measuring sensor. Generally speaking, the resolution of the measuring sensor is higher than the minimum step of the motor. Therefore, the present invention has undergone extensive and in-depth experiments and designed a attitude adjustment mechanism for improving the driving accuracy.

[0046] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0047] like Figure 1 The posture adjustment mechanism of the present embodiment shown includes:

[0048] Fixed frame 1;

[0049] A micro-motion part 2, the micro-motion part 2 is fixed to a first side of the fixing frame 1, a first stage 3 is installed at one end of the micro-motion part 2 away from the fixing frame 1, the first stage 3 is fixedly connected to a second stage 4 via a connecting rod 12, and the micro-motion part 2 is used to fine-tune the posture of the first stage 3;

[0050] A driving unit, which is mounted on the second side of the fixing frame 1 and provides power to generate displacement;

[0051] a transmission part, which is disposed between the driving part and the second stage 4 and contacts the driving part and the second stage 4; and

[0052] The detection unit 8 detects the posture of the end of the fine-motion unit 2 away from the fixed frame 1 and / or the posture of the first stage 3.

[0053] The driving unit drives the second stage 4 and the first stage 3 to move via the transmission unit, and converts the movement of the first stage 3 into movement around the axis of the fine motion unit 2 through the fine motion unit 2 to fine-tune the posture of the first stage 3 .

[0054] By arranging a driving part on the fixed frame 1, the driving part drives the second carrier 4 to move through the transmission part, and by installing the micro-motion part 2 on the fixed frame 1, the other end of the micro-motion part 2 is connected to the first carrier 3, and the first carrier 3 can be rotated and displaced around the axis of the micro-motion part 2. When the second carrier 4 drives the first carrier 3 to move, the first carrier 3 is rotated and displaced around the axis of the micro-motion part 2, thereby realizing the adjustment of the tilting posture of the first carrier 3. By arranging the detection part 8, the driving part is closed-loop controlled by the change value of the reading of the detection part 8, so as to realize the closed-loop control of the driving part.

[0055] like Figure 1-Figure 2 As shown, in some embodiments, the driving part includes a driving motor 5 and a loading structure 6, the driving motor 5 is installed on the second side of the fixing frame 1, the output end of the driving motor 5 is connected to the loading structure 6, and the driving motor 5 drives the loading structure 6 to move in the second direction and generates a displacement in the second direction. By installing the loading structure 6 at the driving end of the driving motor 5, the driving motor 5 drives the loading structure 6 to move in the second direction (vertical direction), and the loading structure 6 contacts the transmission part, thereby pushing the transmission part to move in the first direction (horizontal direction).

[0056] like Figure 1-Figure 2 As shown, in some embodiments, the transmission part includes a transmission block 7 and a guide structure 9, the transmission block 7 moves along the first direction on the guide structure 9, the transmission block 7 contacts the loading structure 6 and the second carrier 4 respectively, the displacement of the transmission block 7 in the first direction is the same as the displacement of the second carrier 4 in the first direction, and under the drive of the driving motor 5, the displacement of the loading structure 6 in the second direction is converted into the displacement of the second carrier 4 in the first direction via the transmission block 7. By setting the transmission block 7, the transmission block 7 contacts the driving part and the second carrier 4 respectively, when the driving part moves along the vertical direction, the transmission block 7 is subjected to the vertical thrust of the driving part and converted into the horizontal displacement, thereby pushing the second carrier 4 to move along the horizontal direction, and by setting the guide structure 9, the guide structure 9 is horizontally arranged, and the transmission block 7 is connected between the movable modules of the guide structure 9, when the transmission block 7 is subjected to the thrust of the driving part, the guide structure 9 can guide the transmission block 7, and ensure that the transmission block 7 moves along the horizontal direction.

[0057] like Figure 1-Figure 2 As shown, in some embodiments, when the loading structure 6 contacts the transmission block 7, the contact surface of the loading structure 6 is set to a cylindrical surface and the contact surface of the transmission block 7 is set to an inclined surface, or the contact surface of the loading structure 6 is set to an inclined surface and the contact surface of the transmission block 7 is set to a cylindrical surface.

[0058] In this embodiment, a slope 71 is formed on one side of the transmission block 7 close to the loading structure 6, and the slope 71 gradually tilts from top to bottom toward the direction close to the second carrier 4. The loading structure 6 contacts the slope 71, and when the loading structure 6 moves in the vertical direction, it pushes the transmission block 7 to move in the horizontal direction. When the driving part moves in the vertical direction, due to the existence of the slope, the transmission block 7 moves in the horizontal direction, so that the transmission block 7 converts the vertical movement of the driving part into its own horizontal movement.

[0059] It should be noted that, in the present embodiment, the driving part is disposed below the inclined surface 71 , and in other embodiments, the driving part may also be disposed above the inclined surface, and the arrangement may be made according to actual conditions.

[0060] In some other embodiments, a second inclined surface is provided at the contact point between the loading structure 6 and the transmission block 7, and the second inclined surface is in contact with the transmission block 7. When the loading structure 6 is displaced in the vertical direction, the transmission block 7 is pushed to move in the horizontal direction. By providing the second inclined surface at the contact point between the loading structure 6 and the transmission block 7, the second inclined surface is in contact with the transmission block 7. When the driving part moves in the vertical direction, due to the existence of the second inclined surface, the transmission block 7 moves in the horizontal direction, thereby realizing that the transmission block 7 converts the vertical movement of the driving part into its own horizontal movement.

[0061] like Figure 1-Figure 2 As shown, in some embodiments, the micro-motion part 2 includes a flexible hinge 21, and the flexible hinge 21 is provided with a first opening 22 and a second opening 23 on a plane in the third direction, and the first end of the first opening 22 and the first end of the second opening 23 are spaced apart in the first direction by a first distance, and the axis of the flexible hinge 21 is located in the middle of the interval, and when the driving part drives the second carrier 4 and the first carrier 3 to move via the transmission part, the horizontal movement of the first carrier 3 is converted into a rotational movement around the axis through the flexible hinge 21, so as to fine-tune the posture of the first carrier 3. By providing the first opening 22 and the second opening 23 on the plane facing the third direction of the flexible hinge 21, and the axis of the flexible hinge 21 is located in the middle of the interval between the first opening 22 and the second opening 23, when the second carrier 4 moves along the first direction, the second carrier 4 drives the first carrier 3 to move into a rotational movement around the axis, so as to achieve fine-tuning of the posture of the first carrier 3.

[0062] It should be noted that the posture adjustment of the first carrier 3 is achieved by using the elastic deformation of the flexible hinge 21 , and the size of the flexible hinge 21 needs to be determined comprehensively based on the structural size, load weight, adjustment stroke, etc.

[0063] like Figure 1-Figure 2 As shown, in some embodiments, the posture adjustment mechanism further includes a tension spring 10 and / or a compression spring 11.

[0064] The tension spring 10 is arranged on the side of the second carrier 4 close to the transmission part, and the tension spring 10 always pulls the second carrier 4 to have a tendency to approach the transmission part. By arranging the tension spring 10 on the side of the second carrier 4 close to the transmission part, the first end of the tension spring 10 is connected to the second carrier 4, and the second end of the tension spring 10 is fixed on the mounting plate fixedly connected to the fixing frame 1. The tension spring 10 always has a tendency to pull the second carrier 4 to move close to the transmission part, thereby ensuring that the contact constraint between the second carrier 4, the transmission block 7 and the driving part is always in an effective state;

[0065] The compression spring 11 is arranged on the side of the second platform 4 away from the transmission part. The compression spring 11 always pushes the second platform 4 to move closer to the transmission part. By arranging the compression spring 11 on the side of the second platform 4 away from the transmission part, the first end of the compression spring 11 is connected to the second platform 4, and the second end of the compression spring 11 is fixed on the mounting plate fixedly connected to the fixing frame 1. The compression spring 11 always has the tendency to push the second platform 4 to move closer to the transmission part, thereby ensuring that the contact constraint between the second platform 4, the transmission block 7 and the driving part is always in an effective state.

[0066] like Figure 1-Figure 2 As shown, in some embodiments, the detection unit 8 includes a position sensor, and the drive unit is closed-loop controlled based on the reading change value of the position sensor. By arranging a position sensor on the fixed frame 1, the posture change of the lower end of the first carrier 3 and / or the micro-motion unit 2 is measured, thereby performing closed-loop control on the drive unit.

[0067] like Figure 1-Figure 2 As shown, in some embodiments, a first opening is provided on the fixing frame 1, a second opening is provided in the micro-motion part 2, and a connecting rod 12 fixed to the first carrier 3 passes through the first opening and the second opening to connect with the second carrier 4. A connecting rod 12 is fixedly connected to the first carrier 3, and the connecting rod 12 passes through the fixing frame 1 to connect with the second carrier 4. By providing the connecting rod 12, the connecting rod 12 passes through the fixing frame 1 to fix the first carrier 3 and the second carrier 4. A second opening is provided on the micro-motion part 2 for the connecting rod 12 to pass through, and a first opening is provided on the fixing frame 1 for the connecting rod 12 to pass through. The connecting rod 12 passes through the second opening and the first opening to connect with the second carrier 4, so as to ensure that the movement of the second carrier 4 can drive the movement of the first carrier 3.

[0068] See also Figure 1-Figure 3 Based on the same inventive concept, the embodiment of this specification provides a high-precision posture adjustment method. Based on any of the above posture adjustment mechanisms, the high-precision posture adjustment method includes:

[0069] A detection step, using the detection unit 8 to detect the posture of the end of the fine-motion unit 2 away from the fixed frame 1 and / or the posture of the first stage 3, and controlling the driving unit based on the reading change of the detection unit 8;

[0070] A driving step, wherein the driving part provides power to move in the second direction and generate displacement in the second direction;

[0071] a transmission step, converting the displacement in the second direction generated by the driving part into the displacement in the first direction of the second stage 4 and the first stage 3 via the transmission part;

[0072] In the posture fine-tuning step, the movement of the first stage 3 in the first direction is converted into a rotational movement around the axis of the fine-moving part 2 by the fine-moving part 2 to fine-tune the posture of the first stage 3 .

[0073] See also Figure 1-Figure 3 , the specific high-precision adjustment process will be described below. Taking the Ry adjustment direction as an example, the adjustment process is as follows:

[0074] The driving motor 5 drives the loading mechanism to move vertically upward by X1;

[0075] The vertical displacement X1 is converted into the horizontal displacement X2 of the second stage 4 by the transmission block 7, where X1 / X2=tan a;

[0076] The second platform 4 is fixedly connected to the first platform 3 below the flexible hinge 21, and the horizontal displacement X2 is converted into Ry of the first platform 3 around the hinge point, where Ry=X2 / L1.

[0077] Therefore, we get Ry=X1 / (L1×tan a), that is, according to the required adjustment accuracy Ry, the comprehensive drive motor 5 is selected X1, the structural design is carried out, the appropriate L1 and a are determined, and the accuracy index is achieved.

[0078] Wherein, a is the angle between the normal line of the inclined plane or the second inclined plane and the horizontal plane, and L1 is the distance between the center of the second carrier 4 and the hinge point of the flexible hinge 21 .

[0079] The same or similar parts between the various embodiments in this specification can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the method embodiment described later, since it corresponds to the system, the description is relatively simple, and the relevant parts can be referred to the partial description of the system embodiment.

[0080] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A posture adjustment mechanism, characterized in that: include: Fixed frame; A fine-motion part, the fine-motion part is fixed to a first side of the fixing frame, a first stage is installed at one end of the fine-motion part away from the fixing frame, the first stage is connected to a second stage via a connecting rod, and the fine-motion part is used to fine-tune the posture of the first stage; A driving unit, the driving unit is mounted on the second side of the fixing frame and provides power to generate displacement; a transmission part, the transmission part being disposed between the driving part and the second stage and in contact with the driving part and the second stage; as well as a detection unit for detecting the posture of the end of the micro-movement unit away from the fixing frame and / or the posture of the first stage, The driving unit drives the second stage and the first stage to move via the transmission unit, and converts the movement of the first stage into movement around the axis of the fine motion unit through the fine motion unit, so as to fine-tune the posture of the first stage.

2. The posture adjustment mechanism according to claim 1, characterized in that: The driving unit includes a driving motor and a loading structure. The driving motor is mounted on the second side of the fixing frame, and the output end of the driving motor is connected to the loading structure. The driving motor drives the loading structure to move along the second direction and generates displacement in the second direction.

3. The posture adjustment mechanism according to claim 2, characterized in that: The transmission part includes a transmission block and a guide structure, and the transmission block moves along a first direction on the guide structure. The transmission block is in contact with the loading structure and the second carrier respectively, and the displacement of the transmission block in the first direction is the same as the displacement of the second carrier in the first direction. Driven by the driving motor, the displacement of the loading structure in the second direction is converted into the displacement of the second carrier in the first direction via the transmission block.

4. The posture adjustment mechanism according to claim 3, characterized in that: When the loading structure contacts the transmission block, the contact surface of the loading structure is set as a cylindrical surface and the contact surface of the transmission block is set as an inclined surface, or the contact surface of the loading structure is set as an inclined surface and the contact surface of the transmission block is set as a cylindrical surface.

5. The posture adjustment mechanism according to claim 1, characterized in that: The micro-motion part includes a flexible hinge, and the flexible hinge is provided with a first opening and a second opening on a plane in a third direction. The first end of the first opening and the first end of the second opening are spaced apart from each other by a first distance in the first direction, and the axis of the flexible hinge is located in the middle of the first distance. When the driving unit drives the second stage and the first stage to move via the transmission unit, the horizontal movement of the first stage is converted into a rotational movement around the axis through the flexible hinge, so as to fine-tune the posture of the first stage.

6. The posture adjustment mechanism according to claim 1, characterized in that: The posture adjustment mechanism also includes a tension spring and / or a compression spring. The tension spring is arranged on a side of the second carrier close to the transmission part, and the tension spring always pulls the second carrier to have a tendency to approach the transmission part. The compression spring is arranged on a side of the second carrier away from the transmission part, and the compression spring always pushes the second carrier to have a tendency to approach the transmission part.

7. The posture adjustment mechanism according to claim 1, characterized in that: The detection unit includes a position sensor, and based on a reading change value of the position sensor, a closed-loop control is performed on the driving unit.

8. The posture adjustment mechanism according to claim 7, characterized in that: The position sensor measures the posture change of the lower end of the first carrier and / or the micro-motion part, thereby performing closed-loop control on the driving part.

9. The posture adjustment mechanism according to claim 1, characterized in that: The fixing frame is provided with a first opening, and the micro-moving part is provided with a second opening. The connecting rod fixed to the first carrier passes through the first opening and the second opening and is connected to the second carrier.

10. A posture adjustment method, based on the posture adjustment mechanism according to any one of claims 1 to 9, characterized in that: The high-precision posture adjustment method comprises: a detection step, using the detection unit to detect the posture of the end of the fine-motion unit away from the fixing frame and / or the posture of the first stage, and controlling the driving unit based on the reading change of the detection unit; A driving step, wherein the driving part provides power to move in the second direction and generate displacement in the second direction; a transmission step, converting the displacement of the driving part in the second direction into the displacement of the second stage and the first stage in the first direction via the transmission part; The posture fine-tuning step converts the movement of the first stage in the first direction into a rotational movement around the axis of the fine-moving portion through the fine-moving portion, so as to fine-tune the posture of the first stage.

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