Straight-tube magnetic filtration radial arc source

Abstract

The present invention relates to the technical field of arc sources, specifically a straight-tube magnetic-filtered radial arc source, which includes a cathode assembly and an anode sleeve. The cathode assembly includes a target seat, and the target seat includes a bottom plate and a target column. A target material is sleeved outside the target column, and a cathode magnetic steel group is built inside. The cathode magnetic steel group is a pair of annular magnetic steels, and the magnetic field directions of the two annular magnetic steels are opposite and radial. The anode sleeve is a straight tube and is sleeved with an anode magnetic steel. The anode magnetic steel is a cylinder, and its magnetic field direction is axial. The anode sleeve is arranged on the bottom plate, and an insulating plate is arranged between the anode sleeve and the bottom plate. Therefore, the plasma and droplets of the present invention are emitted radially on the target surface. Under the constraint of the anode magnetic field, the plasma is transmitted axially, while the droplets are captured by the inner wall of the anode sleeve, thereby realizing the filtration of droplets and the purification of plasma. Compared with a bent tube, the structure of the straight tube is relatively simple and occupies less space, so it is convenient for processing and maintenance. Moreover, the transmission path is shorter and the transmission efficiency is higher.

Description

Technical Field

[0001] The present invention relates to the technical field of arc sources, specifically a straight-tube magnetic-filtered radial arc source. Background Art

[0002] Arc ion plating is a commonly used physical vapor deposition (PVD) coating technology. Due to its high ionization rate, arc ion plating has significant advantages in aspects such as film-substrate adhesion, film layer density, and the formation of compound film layers. However, during the formation of the cathode arc plasma in arc ion plating, "droplets" are ejected, resulting in "large particles" defects in the coating.

[0003] In order to reduce the "large particle" inclusions in the coating, in the 1980s, scientist Aksenov invented the "bent-tube magnetic filtering" technology. This technology uses a bent-tube magnetic field to confine and guide charged plasma, and uncharged neutral droplets will be linearly transmitted and captured by the bent-tube wall, thus realizing droplet filtration and plasma purification. With the in-depth research, the bent-tube magnetic filtering technology has developed from the traditional 90-degree bent tube to various magnetic filtering methods such as S double-bent tubes, T-shaped bent tubes, and dual-source Y-shaped bent tubes, and has been widely used in scientific research, military, and aerospace fields. However, it is less applied in the civilian industrial field (such as tool plating). The reason is that the bent-tube magnetic filtering structure is complex and occupies a large amount of space, resulting in high processing and maintenance costs. Moreover, the plasma transmission path of the bent-tube magnetic filtering is long, so the transmission efficiency is low and the coating deposition speed is slow. Therefore, the industry urgently needs a magnetic-filtered arc source that is simple in structure and can efficiently filter droplets and transmit plasma. Summary of the Invention

[0004] The purpose of the present invention is to provide a straight-tube magnetic-filtered radial arc source, which adopts a straight-tube structure and realizes magnetic filtration through the cooperation of a radial magnetic field and an axial magnetic field. Therefore, compared with the bent tube, the structure of the present invention is relatively simple and occupies less space, so it is convenient for processing and maintenance. Moreover, the transmission path is shorter and the transmission efficiency is higher, thus solving the problems of the complex structure of the bent tube, large occupied space, long transmission path, and low transmission efficiency.

[0005] The purpose of the present invention is achieved as follows:

[0006] The straight-tube magnetic-filtered radial arc source includes a cathode assembly and an anode assembly. The cathode assembly includes a target seat, and the target seat includes a bottom plate and a target column arranged at the center of the bottom plate. A target material is sleeved outside the target column, and a chamber for water cooling and placing a cathode magnetic steel group is opened inside the target column. The cathode magnetic steel group is a pair of coaxial and parallel annular magnetic steels, and the magnetic field directions of the two annular magnetic steels are radial and opposite to each other;

[0007] The anode assembly includes an anode sleeve and an anode magnet. The anode sleeve is a straight tube with a channel for water cooling inside. An anode magnet is sleeved outside the anode sleeve. The anode magnet is a cylinder, and the magnetic field direction of the anode magnet is axial. The anode sleeve is arranged on the bottom plate, and an insulating plate is provided between the anode sleeve and the bottom plate. The target column is located at the axis of the anode sleeve.

[0008] Preferably, it further includes an arc ignition needle. The arc ignition needle is arranged on the bottom plate and on one side of the target material, and an insulating part is provided between the arc ignition needle and the bottom plate.

[0009] Preferably, the arc ignition needle is arranged on the bottom plate through a connecting rod. A connecting sleeve is sleeved on the top of the connecting rod. An arc ignition needle is arranged on one side of the connecting sleeve. An insulating part is sleeved on the bottom of the connecting rod, and the insulating part and the bottom plate are connected by a fastener.

[0010] Preferably, the target column includes a mounting part and a connecting part. The connecting part is used to connect the mounting part and the bottom plate. The target material is sleeved outside the mounting part. The outer diameter of the part where the mounting part is connected to the target material is smaller than the outer diameter of the connecting part. A nut is connected to the top of the mounting part to limit the movement of the target material, and a target cover is arranged above the nut.

[0011] Preferably, arc limiting rings are sleeved on the outer sides of both ends of the target material;

[0012] Or / and, a target pressing ring is arranged between the nut and the target material. The target pressing ring is sleeved outside the mounting part and connected to the bottom of the target cover, and the nut is located between the target pressing ring and the target cover.

[0013] Preferably, the bottom of the chamber is open and provided with a cover plate. The cover plate is provided with holes for water to enter and exit. A partition is arranged inside the chamber to divide the chamber into a water inlet area, a water outlet area, and a communication area for communicating the water inlet area and the water outlet area;

[0014] One of the ring magnets is located in the communication area and abuts against the bottom of the partition. The other is sleeved outside the partition, and the partition is provided with a mounting groove corresponding to the ring magnet.

[0015] Preferably, the anode sleeve includes an upper flange, a lower flange, an inner tube, and an outer tube located between the upper flange and the lower flange. The inner tube and the outer tube are coaxially arranged. A channel is formed between the inner tube and the outer tube. Both the upper flange and the lower flange are provided with openings communicating with the channel;

[0016] The lower flange is arranged on the bottom plate, and an insulating plate is provided between the lower flange and the bottom plate. The opening of the lower flange is for water inlet.

[0017] Preferably, the mounting part is detachably arranged on the connecting part. A connecting plate is arranged at the bottom of the mounting part. At least one slider one is arranged at the bottom of the connecting plate. A limiting block is arranged on one side of the slider one and is L-shaped;

[0018] At least one first chute is formed at the top of the connecting part, and a limiting groove is formed at one end of the first chute corresponding to the limiting block. Moreover, placing grooves three for placing sealing rings are formed on both the inner and outer sides of the connecting part in the first chute. The first slider moves in the first chute, and the mounting part and the connecting part are connected by the cooperation of the limiting block and the limiting groove.

[0019] Preferably, the mounting part is detachably arranged on the connecting part, and a housing is arranged at the bottom of the mounting part, and the housing is sleeved on the outer side of the connecting part;

[0020] A second chute is formed on the outer side of the connecting part, and one end of the second chute is open. Moreover, a third chute communicated with the second chute is formed on one side of the other end of the second chute. A second slider is arranged on the inner wall of the housing, and the second slider moves in the second chute and the third chute.

[0021] Preferably, the mounting part is detachably arranged on the connecting part, and the connecting rod includes an inner rod and an outer rod. Moreover, the bottom of the inner rod is located inside the outer rod and moves inside the outer rod. A connecting sleeve is sleeved on the top of the inner rod, and an insulating part is sleeved on the bottom of the outer rod.

[0022] The prominent and beneficial technical effects of the present invention compared with the prior art are:

[0023] An anode magnet is sleeved on the outer side of the anode sleeve of the present invention and is a straight pipe, and the anode magnet is a cylinder, so the magnetic field direction generated by it is axial. At the same time, a target is sleeved on the outer side of the target column and a cathode magnet group is arranged inside. Moreover, the target column is located at the axis of the anode sleeve, and the cathode magnet group is a pair of coaxial and parallel annular magnets, so the magnetic field direction generated by it is radial. And because the magnetic field directions of the two annular magnets are opposite to form a closed loop, so that the plasma and droplets are emitted radially on the target surface (the surface of the target). Under the constraint of the anode magnetic field, the plasma is axially transmitted, and the droplets are captured by the inner wall of the anode sleeve, so as to realize the filtration of droplets and the purification of plasma. Compared with the elbow pipe, the structure of the straight pipe is relatively simple and occupies less space, so it is convenient for processing and maintenance, and the transmission path is shorter and the transmission efficiency is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is one of the structural schematic diagrams of the present invention.

[0025] Figure 2 is the second of the structural schematic diagrams of the present invention.

[0026] Figure 3 is the sectional structural schematic diagram of the present invention.

[0027] Figure 4 is the schematic diagram of the magnetic field.

[0028] Figure 5Schematic structural diagram of the split of the present invention.

[0029] Figure 6 Schematic structural diagram of the cathode assembly.

[0030] Figure 7 Schematic structural diagram related to the arc ignition pin.

[0031] Figure 8 One of the schematic structural diagrams of the installation part and the connection part.

[0032] Figure 9 Another schematic structural diagram of the installation part and the connection part.

[0033] Figure 10 Cross-sectional view related to the arc ignition pin.

[0034] Reference numerals in the drawings: 1 - anode sleeve; 11 - channel; 12 - upper flange; 13 - lower flange; 14 - inner tube;

[0035] 15 - outer tube; 16 - opening; 2 - target seat; 21 - bottom plate; 22 - target post; 23 - chamber; 24 - installation part;

[0036] 241 - connecting plate; 242 - slider 1; 243 - limiting block; 244 - housing; 245 - slider 2;

[0037] 25 - connection part; 251 - chute 1; 252 - limiting groove; 253 - chute 2; 254 - chute 3; 3 - target material;

[0038] 4 - cathode magnet group; 5 - anode magnet; 6 - insulating plate; 71 - arc ignition pin; 72 - insulating part; 73 - connecting rod;

[0039] 74 - connecting sleeve; 75 - inner rod; 76 - outer rod; 8 - cover plate; 9 - partition; 91 - installation groove; 10 - nut;

[0040] 20 - target cover; 30 - limiting ring; 40 - target pressing ring. Detailed description of the specific implementation

[0041] The following further elaborates on the specific implementation of the present invention with reference to the accompanying drawings.

[0042] As Figures 1 - 10 shown, the straight - tube magnetic - filtering radial arc source includes a cathode assembly and an anode assembly. The cathode assembly includes a target seat 2, and the target seat 2 includes a bottom plate 21 and a target post 22 arranged at the center of the bottom plate 21. A target material 3 is sleeved outside the target post 22, and a chamber 23 for water - cooling and placing the cathode magnet group 4 is provided inside the target post 22. The cathode magnet group 4 is a pair of coaxially parallel - arranged annular magnets, and the magnetic field directions of the two annular magnets are radial and opposite to each other.

[0043] Meanwhile, the component includes an anode sleeve 1 and an anode magnet 5. The anode sleeve 1 is a straight tube and is internally provided with a channel 11 for water cooling. An anode magnet 5 is sleeved outside the anode sleeve 1. The anode magnet 5 is a cylinder, and the magnetic field direction of the anode magnet 5 is axial. The anode sleeve 1 is arranged on the bottom plate 21, and an insulating plate 6 is arranged between the anode sleeve 1 and the bottom plate 21. The target post 22 is located at the axis of the anode sleeve 1.

[0044] Therefore, in the actual use process, since an anode magnet 5 is sleeved outside the anode sleeve 1 and the anode sleeve 1 is a straight tube, and the anode magnet 5 is a cylinder, the magnetic field direction generated by it is axial. At the same time, a target 3 is sleeved outside the target post 22 and a cathode magnet group 4 is internally provided. The target post 22 is located at the axis of the anode sleeve 1. The cathode magnet group 4 is a pair of coaxial and parallel annular magnets, so the magnetic field direction generated by it is radial. And because the magnetic field directions of the two annular magnets are opposite to form a closed loop, the plasma and droplets are emitted radially on the target surface (the surface of the target). Under the constraint of the anode magnetic field, the plasma is axially transmitted, while the droplets are captured by the inner wall of the anode sleeve, thus realizing the filtration of droplets and the purification of plasma. Compared with a bent tube, the structure of the straight tube is relatively simple and occupies less space, so it is convenient for processing and maintenance. Moreover, the transmission path is shorter and the transmission efficiency is higher.

[0045] The annular magnet can be a permanent magnet or an electromagnet, preferably an electromagnet, which is convenient for adjusting the magnetic intensity by current. For example, by periodically adjusting the magnetic field intensities of the two annular magnets, the arc spot can be controlled to scan up and down on the target surface, which is beneficial to improving the utilization rate of the target 3.

[0046] Meanwhile, the anode magnet 5 is a permanent magnet or an electromagnet, preferably a permanent magnet, because the permanent magnet has a higher magnetic field intensity under the same volume.

[0047] Moreover, the principle of arc ion plating is that a magnetic field is generated after being powered on, and the metal is directly evaporated on the target 3 through arc discharge. The evaporated matter exists in the form of plasma, and metal ions are deposited on the surface of the substrate to form a film in a vacuum or inert gas environment. Therefore, in order to ensure the vacuum or ensure the sealing performance, placement grooves 1 for placing sealing rings are opened on both the upper and lower sides of the insulating plate 6, and better sealing is achieved through the sealing rings.

[0048] Secondly, the present invention further includes an arc ignition pin 71. The arc ignition pin 71 is arranged on the bottom plate 21 and is located on one side of the target 3. An insulating part 72 is arranged between the arc ignition pin 71 and the bottom plate 21.

[0049] Therefore, during actual use, the arc ignition pin 71 can effectively guide the current, making it easier to form an electric arc, thereby reducing the arc starting time and improving production efficiency. Specifically, the arc ignition pin 71 strikes the target surface (the surface of the target material) under the action of the rotary cylinder, generating a spark discharge, which quickly transforms into an arc discharge, further ionizing the surrounding gas molecules and igniting the arc source. At this time, a large number of cathode arc spots appear on the target surface, and these arc spots move irregularly rapidly on the target surface, causing the combustion of the target material, evaporating the target surface and ionizing it, thereby generating a large number of metal positive ions.

[0050] Meanwhile, the relevant structure of the arc ignition pin 71 is as follows: First, the arc ignition pin 71 is arranged on the bottom plate 21 through a connecting rod 73. A connecting sleeve 74 is sleeved on the top of the connecting rod 73, and an arc ignition pin 71 is arranged on one side of the connecting sleeve 74. An insulating part 72 is sleeved on the bottom of the connecting rod 73, and the insulating part 72 is connected to the bottom plate 21 by a fastener.

[0051] The fastener connection is a screw or bolt connection. The insulating part 72 includes a mounting plate and two cylinders with different diameters on the upper and lower sides of the mounting plate. The mounting plate is connected to the bottom plate 21 by a fastener, and the cylinder on the mounting plate is located in the hole opened on the bottom plate 21.

[0052] As Figure 3 、 Figure 5 and Figure 6 shown, the structure between the target column 22 and the target material 3: First, the target column 22 includes a mounting part 24 and a connecting part 25. The connecting part 25 is used to connect the mounting part 24 and the bottom plate 21. The target material 3 is sleeved on the outside of the mounting part 24, and the outer diameter of the part where the mounting part 24 is connected to the target material 3 is smaller than the outer diameter of the connecting part 25. A nut 10 is connected to the top of the mounting part 24 to limit the movement of the target material 3, and a target cover 20 is arranged above the nut 10.

[0053] Therefore, during actual use, since the outer diameter of the part where the mounting part 24 is connected to the target material 3 is smaller than the outer diameter of the connecting part 25, when the target material 3 is sleeved on the outside of the mounting part 24, it will not move downward. At the same time, the top of the target material 3 is limited by the nut 10 and the target cover 20, and the target cover 20 can play a role of covering and separating, so that during use, the coating deposition on the nut 10 is avoided, thereby reducing the impact on later maintenance and servicing.

[0054] Meanwhile, a target pressing ring 40 is arranged between the nut 10 and the target material 3. The target pressing ring 40 is sleeved on the outside of the mounting part 24 and connected to the bottom of the target cover 20, and the nut 10 is located between the target pressing ring 40 and the target cover 20.

[0055] Among them, the material of the pressing target ring 40 is oxygen-free copper with good thermal conductivity. During actual use, the pressing target ring 40 is used to fix the target material, facilitating the installation of the target cover 20 and conducting the heat generated by the combustion of the target material 3. Moreover, convex rings can be provided at both ends of the target material 3, and the pressing target ring 40 and the connecting part 25 are correspondingly grooved.

[0056] Secondly, in order to limit the movement area of the arc spot, a limited arc ring 30 is sleeved outside both ends of the target material 3. The material of the limited arc ring 30 is boron nitride ceramic. Since it has a low electron emission coefficient, the arc spot can be limited to the target surface (the surface of the target material), thus preventing the arc spot from escaping and burning out the cathode assembly.

[0057] As Figure 3 and Figure 5 shown, the relevant structure of the chamber 23 is as follows: First, the bottom of the chamber 23 is open and provided with a cover plate 8. The cover plate 8 is provided with openings for water to enter and exit. The cover plate 8 is connected to the bottom plate 21 by screws or bolts. A sealing ring is provided between the cover plate 8 and the bottom plate 21, and the cover plate 8 is provided with a second placement groove for placing the sealing ring.

[0058] At the same time, a partition 9 is arranged inside the chamber 23 to divide the chamber 23 into an inlet area, an outlet area, and a communication area for communicating the inlet area and the outlet area. Thus, water enters from the inlet area and flows to the outlet area through the communication area and then exits.

[0059] Secondly, the installation structure of the cathode magnet group 4: First, one of the ring magnets is located in the communication area and abuts against the bottom of the partition 9, and the other is sleeved outside the partition 9. The partition 9 is provided with an installation groove 91 corresponding to the ring magnet.

[0060] Therefore, during actual use, the installation and positioning of the cathode magnet group 4 are realized through the partition 9, achieving multiple functions with one component. At the same time, the processing of the chamber 23 can be reduced, and the structure can be simplified.

[0061] As Figure 3 shown, the relevant structure of the anode sleeve 1 is as follows: First, the anode sleeve 1 includes an upper flange 12, a lower flange 13, an inner tube 14 and an outer tube 15 located between the upper flange 12 and the lower flange 13. The inner tube 14 and the outer tube 15 are coaxially arranged. A channel 11 is provided between the inner tube 14 and the outer tube 15. Both the upper flange 12 and the lower flange 13 are provided with openings communicating with the channel 11. The opening 16 of the lower flange 13 is for water inlet. Thus, water enters from the opening 16 of the lower flange 13 and flows to the opening 16 of the upper flange 12 through the channel 11 and then exits.

[0062] Meanwhile, the lower flange 13 is arranged on the bottom plate 21, and an insulating plate 6 is arranged between the lower flange 13 and the bottom plate 21. Moreover, the upper flange 12 and the lower flange 13 are welded to the inner pipe 14 and the outer pipe 15 respectively, that is, both ends of the inner pipe 14 are welded to the upper flange 12 and the lower flange 13 respectively, and both ends of the outer pipe 15 are welded to the upper flange 12 and the lower flange 13 respectively.

[0063] As Figure 8 and Figure 9 shown, since there may be different models of the target 3, the installation part 24 is detachably arranged on the connection part 25, so that different models of the installation part 24 can be replaced, and then different models of the target 3 can be adapted.

[0064] Moreover, the structure between the installation part 24 and the connection part 25 can be diverse. For example, a connecting plate 241 is arranged at the bottom of the installation part 24, and at least one first slider 242 is arranged at the bottom of the connecting plate 241. And a limiting block 243 is arranged on one side of the first slider 242 and is L-shaped.

[0065] Meanwhile, at least one first chute 251 is opened at the top of the connection part 25, and a limiting groove 252 is opened at one end of the first chute 251 corresponding to the limiting block 243. Therefore, in the actual use process, the first slider 242 moves in the first chute 251, and the installation part 24 and the connection part 25 are connected by the adaptation of the limiting block 243 and the limiting groove 252.

[0066] And for better sealing performance, placing grooves three for placing sealing rings are opened on both the inner and outer sides of the first chute 251 of the connection part 25. Moreover, in order to better limit the position, a convex and groove matching is also set between the limiting block 243 and the limiting groove 252, so as to further limit the position.

[0067] Another example is that a housing 244 is arranged at the bottom of the installation part 24, and the housing 244 is sleeved outside the connection part 25. Moreover, a second chute 253 is opened on the outside of the connection part 25, one end of the second chute 253 is open, and a third chute 254 communicated with the second chute 253 is opened on one side of the other end of the second chute 253. At the same time, a second slider 245 is arranged on the inner wall of the housing 244, and the second slider 245 moves in the second chute 253 and the third chute 254.

[0068] Therefore, in the actual use process, when the second slider 245 enters the third chute 254 along the second chute 253, the installation part 24 and the connection part 25 are connected by the adaptation of the second slider 245 and the third chute 254.

[0069] And for better sealing performance, a fourth placement groove for placing a sealing ring is provided inside the second chute 253 at the bottom of the installation part 24, and a fifth placement groove for placing a sealing ring is provided below the third chute 254 on the inner wall of the housing 244. Moreover, for better limiting, a cooperation of protrusions and grooves is also provided between the second slider 245 and the third chute 254, so as to further limit the position.

[0070] At the same time, since different models of the installation part 24 can be replaced, in order to make the arc ignition needle 71 better cooperate with the target 3, the connecting rod 73 is designed to include an inner rod 75 and an outer rod 76. The bottom of the inner rod 75 is located inside the outer rod 76 and moves inside the outer rod 76. A connecting sleeve 74 is sleeved on the top of the inner rod 75, and an insulating part 72 is sleeved on the bottom of the outer rod 76.

[0071] Therefore, in the actual use process, the bottom of the inner rod 75 is connected to the piston tube of the air cylinder or other driving sources that can be used to drive the movement. Therefore, the inner rod 75 can move up and down under the action of the air cylinder. Moreover, in order to adapt to the rotary air cylinder, a rotary air cylinder can be provided on the pen-shaped air cylinder, and then the rotary air cylinder is connected to the inner rod 75, so that the pen-shaped air cylinder drives the rotary air cylinder to move and then drives the inner rod 75 to move, and the rotary air cylinder drives the inner rod 75 to rotate, so that the arc ignition needle 71 strikes the target surface (the surface of the target), or other structures are also possible.

[0072] The above shows and describes the basic principles, main features and advantages of the present invention. At the same time, the present invention is not limited by the above embodiments. Therefore, without departing from the principles and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. Straight tube magnetic filtration radial arc source, characterized in that: The invention comprises a cathode assembly and an anode assembly, wherein the cathode assembly comprises a target seat (2), and the target seat (2) comprises a bottom plate (21) and a target column (22) arranged at the center of the bottom plate (21), a target material (3) is sleeved on the outside of the target column (22), and a chamber (23) for water cooling and placing a cathode magnetic steel group (4) is provided inside the target column (22), wherein the cathode magnetic steel group (4) is a pair of coaxial and parallel annular magnetic steels, and the magnetic field directions of the two annular magnetic steels are radial, and the magnetic field directions of the two annular magnetic steels are opposite; The anode assembly comprises an anode sleeve (1) and an anode magnet (5), wherein the anode sleeve (1) is a straight tube and has a channel (11) for water cooling built therein, and the anode magnet (5) is sleeved on the outside of the anode sleeve (1), the anode magnet (5) is a cylinder, and the magnetic field direction of the anode magnet (5) is axial, and the anode sleeve (1) is arranged on a bottom plate (21) and an insulating plate (6) is arranged between the bottom plate (21), and the target column (22) is located at the axis of the anode sleeve (1).

2. The straight tube magnetic filtration radial arc source according to claim 1, characterized in that: It also includes an arc-starting needle (71), which is arranged on the bottom plate (21) and located on one side of the target material (3), and an insulating member (72) is arranged between the arc-starting needle (71) and the bottom plate (21).

3. The straight tube magnetic filtering radial arc source according to claim 2, characterized in that: The arc-starting needle (71) is arranged on the bottom plate (21) via a connecting rod (73), a connecting sleeve (74) is sleeved on the top of the connecting rod (73), and the arc-starting needle (71) is arranged on one side of the connecting sleeve (74), an insulating member (72) is sleeved on the bottom of the connecting rod (73), and the insulating member (72) and the bottom plate (21) are connected by fasteners.

4. The straight tube magnetic filtration radial arc source according to any one of claims 1 to 3, characterized in that: The target column (22) comprises a mounting portion (24) and a connecting portion (25), wherein the connecting portion (25) is used to connect the mounting portion (24) and the base plate (21), the target material (3) is sleeved on the outside of the mounting portion (24), and the outer diameter of the portion where the mounting portion (24) and the target material (3) are connected is smaller than the outer diameter of the connecting portion (25), a nut (10) is connected to the top of the mounting portion (24) and is used to limit the movement of the target material (3), and a target cover (20) is arranged above the nut (10).

5. The straight tube magnetic filtration radial arc source according to claim 4, characterized in that: Arc limiting rings (30) are sleeved on the outer sides of both ends of the target material (3); Or / and, a target pressing ring (40) is provided between the nut (10) and the target material (3), the target pressing ring (40) is sleeved on the outside of the mounting portion (24) and connected to the bottom of the target cover (20), and the nut (10) is located between the target pressing ring (40) and the target cover (20).

6. The straight tube magnetic filtering radial arc source according to any one of claims 1 to 3, characterized in that: The chamber (23) is open at the bottom and is provided with a cover plate (8), and the cover plate (8) has holes for water to enter and exit, and a partition plate (9) is built into the chamber (23) to divide the chamber (23) into a water inlet area and a water outlet area, and a communication area for connecting the water inlet area and the water outlet area; One of the annular magnetic steels is located in the communication area and abuts against the bottom of the partition (9), and the other is sleeved on the outside of the partition (9), and the partition (9) is provided with a mounting groove (91) corresponding to the annular magnetic steel.

7. The straight tube magnetic filtration radial arc source according to any one of claims 1 to 3, characterized in that: The anode sleeve (1) comprises an upper flange (12) and a lower flange (13), and an inner tube (14) and an outer tube (15) located between the upper flange (12) and the lower flange (13), wherein the inner tube (14) and the outer tube (15) are coaxially arranged, a channel (11) is formed between the inner tube (14) and the outer tube (15), and both the upper flange (12) and the lower flange (13) are provided with openings communicating with the channel (11); The lower flange (13) is arranged on the bottom plate (21) and an insulating plate (6) is arranged between the lower flange (13) and the bottom plate (21), and the opening (16) of the lower flange (13) is used for water inlet.

8. The straight tube magnetic filtration radial arc source according to claim 4, characterized in that: The mounting portion (24) is detachably mounted on the connecting portion (25), and a connecting plate (241) is disposed at the bottom of the mounting portion (24), and at least one sliding block (242) is disposed at the bottom of the connecting plate (241), and a limiting block (243) is disposed on one side of the sliding block (242) and is L-shaped; The connecting portion (25) is provided with at least one slide groove (251) at the top, and a limiting groove (252) is provided at one end of the slide groove (251) corresponding to the limiting block (243), and the connecting portion (25) is provided with placement grooves (3) for placing a sealing ring on both the inner and outer sides of the slide groove (251), and the sliding block (242) moves in the slide groove (251) and is adapted to the limiting groove (252) through the limiting block (243) to connect the mounting portion (24) and the connecting portion (25).

9. The straight tube magnetic filtration radial arc source according to claim 4, characterized in that: The mounting portion (24) is detachably mounted on the connecting portion (25), and a shell (244) is disposed at the bottom of the mounting portion (24), and the shell (244) is sleeved on the outside of the connecting portion (25); A second slide groove (253) is provided on the outer side of the connecting portion (25), and one end of the second slide groove (253) is open, and a third slide groove (254) connected to the second slide groove (253) is provided on one side of the other end of the second slide groove (253), and a second slider (245) is provided on the inner wall of the shell (244), and the second slider (245) moves in the second slide groove (253) and the third slide groove (254).

10. The straight tube magnetic filtration radial arc source according to claim 4, characterized in that: The mounting portion (24) is detachably arranged on the connecting portion (25), and the connecting rod (73) comprises an inner rod (75) and an outer rod (76), and the bottom of the inner rod (75) is located inside the outer rod (76) and moves inside the outer rod (76), the top of the inner rod (75) is sleeved with a connecting sleeve (74), and the bottom of the outer rod (76) is sleeved with an insulating member (72).

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