Substrate edge detection equipment

Abstract

The invention provides substrate edge detection equipment, and relates to the technical field of semiconductor processing. Comprising a base station, and a bearing assembly, an illumination unit, a reflector unit and a shooting unit which are arranged on the base station; the bearing assembly is used for placing a substrate and driving the substrate to operate; the lighting unit is arranged close to the bearing assembly, and the lighting unit is used for lighting the substrate; the reflector unit is arranged close to the lighting unit, and the reflector unit is used for reflecting light on the substrate to the shooting unit; the shooting unit is arranged corresponding to the reflecting mirror unit, and the shooting unit is used for carrying out optical imaging on the substrate. The reflecting mirror is a total reflection mirror, light rays are only reflected once through the reflecting mirror, the light source utilization rate of the reflecting mirror unit can be increased, and energy waste is avoided.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to substrate edge detection equipment. Background Art

[0002] In the manufacturing process of semiconductor devices, in order to achieve fine structural processing on the substrate, there is usually a process to remove specific parts of the thin film on the surface of the wafer, such as the photolithography process. Through the photolithography process, what is finally retained on the substrate is the characteristic pattern part. And in order to improve the product yield, the substrate online process defect detection module becomes a necessary part. During the substrate manufacturing process, the online process defect detection module needs to be able to effectively identify common process defects such as dust, process residues, grinding defects, crystal defects, scratch defects, etc. At the same time, the online process defect detection module can also identify the amount of substrate warping caused by multiple exposures. The warping amount is also an important data to pay attention to during the substrate manufacturing process.

[0003] The existing substrate edge detection equipment has low light source utilization, resulting in energy waste, and low space utilization, resulting in a large space occupied by the entire equipment. Summary of the invention

[0004] The present invention mainly provides a substrate edge detection device to solve the technical problems of low light source utilization, energy waste and large space occupation in the above-mentioned background technology.

[0005] The technical solution adopted by the present invention to solve the above technical problems is: A substrate edge detection device comprises a base and a carrying assembly, a lighting unit, a reflector unit and a shooting unit arranged on the base; the carrying assembly is used to place a substrate and drive the substrate to move; the lighting unit is arranged close to the carrying assembly, and the lighting unit is used to illuminate the substrate; the reflector unit is arranged close to the lighting unit, and the reflector unit is used to reflect light on the substrate to the shooting unit; the shooting unit is arranged corresponding to the reflector unit, and the shooting unit is used to perform optical imaging of the substrate.

[0006] Optionally, the lighting unit includes a first lighting component and a first splicing mirror; the first lighting component is arranged on the base and close to the supporting component, the first lighting component is used to illuminate the bottom surface of the substrate, and the reflector unit can receive light from the bottom surface of the substrate and reflect the light to the shooting unit; the first splicing mirror is arranged corresponding to the first lighting component, the first splicing mirror is used to receive part of the light from the first lighting component, reflect the light to the side of the substrate, and receive light from the side of the substrate, reflect the light from the side of the substrate to the reflector unit, and reflect it to the shooting unit through the reflector unit.

[0007] Optionally, the first lighting assembly includes a first frame with an opening, a first scattering plate and a first light source, the first frame is arranged on the base, the height of the first frame is lower than the supporting assembly, the first scattering plate cover is arranged at the opening of the first frame, and the first light source is arranged in the first frame; the first light source is used to illuminate the first scattering plate, the first scattering plate is used to scatter the light of the first light source to the bottom surface of the substrate, the first splicing mirror is used to receive part of the light scattered by the first scattering plate, reflect the light to the side surface of the substrate, and reflect the light on the side surface of the substrate to the reflector unit; the reflector unit is used to reflect the light on the bottom surface of the substrate and the light on the side surface of the substrate to the shooting unit.

[0008] Optionally, the first splicing mirror includes a first reflecting surface and a second reflecting surface, and the angle between the first reflecting surface and the second reflecting surface is an obtuse angle; in a working state, the substrate is placed on the supporting assembly, the first reflecting surface and the second reflecting surface are located on the side of the substrate, the first reflecting surface and the second reflecting surface are used to reflect the light of the first light source to the side of the substrate, and the second reflecting surface is also used to reflect the light on the side of the substrate to the reflector unit.

[0009] Optionally, the lighting unit also includes a second lighting component and a second stitching mirror; the second lighting component is arranged on the base and close to the supporting component, the second lighting component is used to illuminate the surface of the substrate, and the reflector unit can receive light from the surface of the substrate and reflect the light to the shooting unit; the second stitching mirror is arranged corresponding to the second lighting component, the second stitching mirror is used to receive part of the light from the second lighting component and reflect the light to the chamfer of the side of the substrate, the reflector unit can receive light at the chamfer of the side of the substrate and reflect the light to the shooting unit.

[0010] Optionally, the second lighting assembly includes a second frame with an opening, a second scattering plate and a second light source, the second frame is arranged on the base, the height of the second frame is higher than the supporting assembly, the second scattering plate cover is arranged at the opening of the second frame, and the second light source is arranged in the second frame; the second light source is used to illuminate the second scattering plate, the second scattering plate is used to scatter the light of the second light source to the surface of the substrate, the second splicing mirror is used to receive part of the light scattered by the second scattering plate and reflect the light to the chamfer of the side of the substrate, so that the reflector assembly reflects the light on the surface of the substrate and the light at the chamfer of the side of the substrate to the shooting unit.

[0011] Optionally, the reflector unit includes a first reflective component and a second reflective component; the first reflective component includes a first mirror frame and a first reflector, the first mirror frame is mounted on the first frame, the first reflector is mounted on the first mirror frame, and the first reflector is used to reflect the light on the bottom surface of the substrate and the light on the side surface of the substrate to the shooting unit; the second reflective component includes a second mirror frame and a second reflector, the second mirror frame is mounted on the second frame, the second reflector is mounted on the second mirror frame, and the second reflector is used to reflect the light on the surface of the substrate to the shooting unit.

[0012] Optionally, the shooting unit includes a bottom shooting assembly, which includes a bottom lens and a bottom camera, the bottom lens cover is arranged on the bottom camera, and the bottom lens faces the first frame, so that the bottom camera receives the light from the bottom surface of the substrate reflected by the first reflector for optical imaging.

[0013] Optionally, the shooting unit also includes a side shooting assembly, which includes a side lens and a side camera, the side lens cover is arranged on the side camera, and the side lens faces the first frame, so that the side camera receives the light from the side of the substrate reflected by the first reflector for optical imaging.

[0014] Optionally, the shooting unit also includes a surface shooting component, which includes a surface lens and a surface camera, the surface lens cover is arranged on the surface camera, and the surface lens faces the second frame, so that the surface camera receives the light on the surface of the substrate reflected by the second reflector for optical imaging.

[0015] Optionally, the first reflector, the second reflector, the first spliced ​​mirror and the second spliced ​​mirror are all total reflectors.

[0016] Optionally, the supporting assembly includes a mounting seat, a motor and a stage; the mounting seat is disposed on a base and is used to mount the stage and the motor; the stage is mounted on the mounting seat and is used to support the substrate; the motor is mounted in the mounting seat and is used to drive the stage to rotate.

[0017] The present application provides a substrate edge detection device, which arranges a carrying component, a lighting unit, a reflector unit and a shooting unit on a base. The lighting unit illuminates the substrate on the carrying component, and the reflector unit further reflects the light of the substrate to the shooting unit, so that the shooting unit shoots and images the substrate. Finally, through relevant image processing, accurate identification of substrate defects and analysis of substrate warping are performed. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a schematic diagram of the structure of the substrate edge detection device of the present application; Figure 2 A schematic diagram of placing a substrate in the substrate edge detection device of the present application; Figure 3 This is a schematic diagram of the coordination between the first lighting unit and the reflector unit of the present application; Figure 4 This is a schematic diagram of the cooperation between the second lighting unit and the reflector unit of the present application; Figure 5 This is a schematic diagram of the structure of the carrier assembly and the shooting unit of this application; Figure 6 This is a schematic diagram of the optical path conduction structure on the bottom surface of the substrate of the present application; Figure 7 This is a schematic diagram of the light path conduction structure on the side of the substrate of the present application; Figure 8 This is a schematic diagram of the light path conduction structure on the surface of the substrate of the present application.

[0020] Icons: 100-base; 200-carrying assembly; 210-mounting seat; 220-objective stage; 300-illumination unit; 311-first frame; 312-first scattering plate; 313-first light source; 320-first splicing mirror; 321-first reflecting surface; 322-second reflecting surface; 331-second frame; 332-second scattering plate; 333-second light source; 340-second splicing mirror; 400-reflector unit; 410-first mirror frame; 420-first reflector; 430-second mirror frame; 440-second reflector; 500-shooting unit; 510-bottom lens; 520-bottom camera; 530-side lens; 540-side camera; 550-surface lens; 560-surface camera; 600-substrate; The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the present invention clearer, the technical scheme in the embodiment of the present application will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0022] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0023] In this application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0025] Existing substrate edge detection equipment usually uses a semi-reflective mirror. Since the transmittance and reflectivity are 50% each, the light received by the camera imaging passes through the semi-reflective mirror, which makes the light source utilization rate low, resulting in energy waste. In view of the above problems, the embodiments of the present invention provide the following technical solutions to overcome the above problems.

[0026] Please refer to Figures 1 to 5The embodiment of the present application provides a substrate edge detection device, including a base 100 and a supporting component 200, a lighting unit 300, a reflector unit 400 and a shooting unit 500 arranged on the base 100; the supporting component 200 is used to place a substrate 600 and drive the substrate 600 to rotate; the lighting unit 300 is arranged close to the supporting component 200, and the lighting unit 300 is used to illuminate the substrate 600; the reflector unit 400 is arranged close to the lighting unit 300, and the reflector unit 400 is used to reflect the light on the substrate 600 to the shooting unit 500; the shooting unit 500 is arranged corresponding to the reflector unit 400, and the shooting unit 500 is used to perform optical imaging of the substrate 600.

[0027] Specifically, a supporting assembly 200 is arranged on the base 100, and a lighting unit 300, a reflector unit 400 and a shooting unit 500 are arranged on the base 100 and around the supporting assembly 200. In a working state, a substrate 600 is placed on the supporting assembly 200, and the supporting assembly 200 drives the substrate 600 to rotate, the lighting unit 300 illuminates the substrate 600, and the reflector unit 400 reflects the light on the substrate 600 to the shooting unit 500. The shooting unit 500 receives the reflected light and completes imaging of the substrate 600.

[0028] It should be noted that, in this embodiment, since the substrate is circular, the bearing assembly 200 is configured to detect the edge of the substrate in a rotatable manner. In some embodiments, when the substrate is in other shapes, such as a square, the bearing assembly 200 can move in a multi-axis combined motion to adapt to the contour of the detected substrate.

[0029] The present application provides a substrate edge detection device, by arranging a bearing assembly 200, an illumination unit 300, a reflector unit 400 and a shooting unit 500 on a base 100, the illumination unit 300 illuminates a substrate 600 on the bearing assembly 200, and further the reflector unit 400 reflects the light of the substrate 600 to the shooting unit 500, so that the shooting unit 500 shoots and images the substrate 600. The reflector in the present application is a total reflector, and the light is only reflected once by the reflector, which can improve the utilization rate of the light source by the reflector unit, avoid energy waste, reduce the heat of the light source, and avoid using a condenser to increase the structural space of the light source in order to improve the illumination concentration of the light source.

[0030] In an embodiment of the present application, the lighting unit 300 includes a first lighting component and a first splicing mirror 320; the first lighting component is arranged on the base 100 and is arranged close to the supporting component 200, the first lighting component is used to illuminate the bottom surface of the substrate 600, and the reflector unit 400 can receive the light from the bottom surface of the substrate 600 and reflect the light to the shooting unit 500; the first splicing mirror 320 is arranged corresponding to the first lighting component, the first splicing mirror 320 is used to receive part of the light from the first lighting component, reflect the light to the side of the substrate 600, and receive the light from the side of the substrate 600, reflect the light from the side of the substrate 600 to the reflector unit 400, and reflect it to the shooting unit 500 through the reflector unit 400.

[0031] Specifically, after the first lighting assembly illuminates the bottom surface of the substrate 600, the reflector unit 400 receives the light from the bottom surface of the substrate 600, and reflects the light from the bottom surface of the substrate 600 to the shooting unit 500, and the shooting unit 500 images the bottom surface of the substrate. The first splicing mirror 320 receives part of the light from the first lighting assembly, reflects the light to the side of the substrate 600, and further receives the light from the side of the substrate 600, reflects the light from the side of the substrate 600 to the reflector unit 400, after the reflector unit 400 receives the light, it reflects the light to the shooting unit 500, after the shooting unit 500 receives the light, it images the side of the substrate 600. In the above form, the bottom surface illumination light of the substrate 600 and the side illumination light of the substrate 600 share the same first lighting assembly for lighting, which can save one lighting light source. It is understandable that in some embodiments, one light source can also be added to illuminate the side of the substrate 600 separately.

[0032] Please refer to Figures 1 to 8 In an embodiment of the present application, the first lighting assembly includes a first frame 311 with an opening, a first scattering plate 312 and a first light source 313, the first frame 311 is arranged on the base 100, the height of the first frame is lower than the supporting assembly 200, the first scattering plate 312 is covered at the opening of the first frame 311, and the first light source 313 is arranged in the first frame 311; the first light source 313 is used to illuminate the first scattering plate 312, the first scattering plate 312 is used to scatter the light of the first light source 313 to the bottom surface of the substrate 600, the first splicing mirror 320 is used to receive part of the light scattered by the first scattering plate 312, reflect the light to the side of the substrate 600, and reflect the light on the side of the substrate 600 to the reflector unit 400; the reflector unit 400 is used to reflect the light on the bottom surface of the substrate 600 and the light on the side of the substrate 600 to the shooting unit 500.

[0033] Specifically, during use, the substrate 600 is placed on the carrying assembly 200, the opening of the first frame 311 faces the back of the substrate 600, the first light source 313 irradiates the first scattering plate 312, the first scattering plate 312 scatters the light of the first light source 313 to the bottom surface of the substrate 600, the reflector unit 400 receives the light on the bottom surface of the substrate 600, and reflects it to the shooting unit 500, so that the shooting unit 500 images the bottom surface of the substrate 600. The first splicing mirror 320 receives part of the light scattered by the first scattering plate 312, reflects the light to the side of the substrate 600, and further receives the light on the side of the substrate 600, reflects the light on the side of the substrate 600 to the reflector unit 400, after the reflector unit 400 receives the light, it reflects the light to the shooting unit 500, after the shooting unit 500 receives the light, it images the side of the substrate 600. It should be noted that the first scattering plate 312 can reduce the volume of the first light source 313, improve the uniformity of the light source, and simplify the spatial structure of the first light source 313.

[0034] Please refer to Figures 1 to 8 In an embodiment of the present application, the first splicing mirror 320 includes a first reflecting surface 321 and a second reflecting surface 322, and the angle between the first reflecting surface 321 and the second reflecting surface 322 is an obtuse angle; in the working state, the substrate 600 is placed on the supporting assembly 200, and the first reflecting surface 321 and the second reflecting surface 322 are located on the side of the substrate 600, and the first reflecting surface 321 and the second reflecting surface 322 are used to reflect the light of the first light source 313 to the side of the substrate 600, and the second reflecting surface 322 is used to reflect the light on the side of the substrate 600 to the reflector unit 400.

[0035] Specifically, the first reflection surface 321 and the second reflection surface 322 of the first splicing mirror 320 receive part of the light scattered by the first scattering plate 312, and reflect the light to the side of the substrate 600. Further, the second reflection surface 322 of the first splicing mirror 320 receives the light on the side of the substrate 600, and reflects the light on the side of the substrate 600 to the reflector unit 400. After the reflector unit 400 receives the light, it reflects the light to the shooting unit 500. After the shooting unit 500 receives the light, it images the side of the substrate 600. It should be noted that the first reflection surface 321 and the second reflection surface 322 are arranged close to the side of the substrate 600, and the angle between the first reflection surface 321 and the second reflection surface 322 is an obtuse angle, which is used to better provide lighting for the side of the substrate 600, thereby improving the accuracy of imaging of the shooting unit 500.

[0036] Please refer to Figures 1 to 5In an embodiment of the present application, the lighting unit 300 also includes a second lighting component and a second stitching mirror 340; the second lighting component is arranged on the base 100 and is arranged close to the supporting component 200, the second lighting component is used to illuminate the surface of the substrate 600, and the reflector unit 400 can receive the light on the surface of the substrate 600 and reflect the light to the shooting unit 500; the second stitching mirror 340 is arranged corresponding to the second lighting component, the second stitching mirror 340 is used to receive part of the light of the second lighting component and reflect the light to the chamfer of the side of the substrate 600, the reflector unit 400 can receive the light at the chamfer of the side of the substrate 600 and reflect the light to the shooting unit 500.

[0037] Specifically, after the second lighting assembly illuminates the surface of the substrate 600, the reflector unit 400 receives the light on the surface of the substrate 600, and reflects the light on the surface of the substrate 600 to the shooting unit 500, and the shooting unit 500 images the surface of the substrate. The second splicing mirror 340 receives part of the light from the second lighting assembly, and reflects the light to the chamfered corner of the side of the substrate 600. After the reflector unit 400 receives the light at the chamfered corner of the side of the substrate 600, it reflects the light to the shooting unit 500, and the shooting unit 500 images the chamfered corner of the side of the substrate 600 after receiving the light.

[0038] Please refer to Figures 1 to 8 In an embodiment of the present application, the second lighting assembly includes a second frame 331 with an opening, a second scattering plate 332 and a second light source 333, the second frame 331 is arranged on the base 100, the height of the second frame 331 is higher than the supporting assembly 200, the second scattering plate 332 is covered at the opening of the second frame 331, and the second light source 333 is arranged in the second frame 331; the second light source 333 is used to illuminate the second scattering plate 332, the second scattering plate 332 is used to scatter the light of the second light source 333 to the surface of the substrate 600, the second splicing mirror 340 is used to receive part of the light scattered by the second scattering plate 332, and reflect the light to the chamfer of the side of the substrate 600, so that the reflector assembly reflects the light on the surface of the substrate 600 and the light at the chamfer of the side of the substrate 600 to the shooting unit 500.

[0039] Specifically, during use, the substrate 600 is placed on the bearing assembly 200, the opening of the second frame 331 faces the surface of the substrate 600, the second light source 333 irradiates the second scattering plate 332, the second scattering plate 332 scatters the light of the second light source 333 to the surface of the substrate 600, the reflector unit 400 receives the light on the surface of the substrate 600, and reflects it to the shooting unit 500, so that the shooting unit 500 images the surface of the substrate 600. The second splicing mirror 340 receives part of the light scattered by the second scattering plate 332, and reflects the light to the chamfer of the side of the substrate 600. After the reflector unit 400 receives the light at the chamfer of the side of the substrate 600, it reflects the light to the shooting unit 500. After receiving the light, the shooting unit 500 images the chamfer of the side of the substrate 600. It should be noted that the second scattering plate 332 can reduce the volume of the second light source 333, improve the uniformity of the light source, and simplify the spatial structure of the second light source 333.

[0040] In an embodiment of the present application, the reflector unit 400 includes a first reflective component and a second reflective component; the first reflective component includes a first mirror frame 410 and a first reflector 420, the first mirror frame 410 is installed on the first frame 311, the first reflector 420 is installed on the first mirror frame 410, and the first reflector 420 is used to reflect the light on the bottom surface of the substrate 600 and the light on the side surface of the substrate 600 to the shooting unit 500; the second reflective component includes a second mirror frame 430 and a second reflector 440, the second mirror frame 430 is installed on the second frame 331, the second reflector 440 is installed on the second mirror frame 430, and the second reflector 440 is used to reflect the light on the surface of the substrate 600 to the shooting unit 500.

[0041] Specifically, the first mirror frame 410 is disposed on one side of the first frame 311, and the first reflector 420 is mounted on the first mirror frame 410. It should be noted that the angle of the first reflector 420 needs to be flexibly set according to the actual situation, and it only needs to be able to reflect the light on the bottom surface of the substrate 600 and the light on the side of the substrate 600 to the shooting unit 500. The second mirror frame 430 is disposed on one side of the second frame 331, and the second reflector 440 is mounted on the second mirror frame 430. It is understandable that the angle of the second reflector 440 needs to be flexibly set according to the actual situation, and it only needs to be able to reflect the light on the surface of the substrate 600 to the shooting unit 500.

[0042] By adopting the above-mentioned arrangement, the angles of the first reflector 420 and the second reflector 440 can be flexibly adjusted, so that the reflector unit 400 can be conveniently adjusted to a desired angle according to actual needs.

[0043] Please refer to Figure 1 , Figure 5, Figure 6 , Figure 7 and Figure 8 In the embodiment of the present application, the shooting unit 500 includes a bottom shooting assembly, which includes a bottom lens 510 and a bottom camera 520. The bottom lens 510 is covered on the bottom camera 520, and the bottom lens 510 faces the first frame 311, so that the bottom camera 520 receives the light reflected by the first reflector 420 from the bottom surface of the substrate 600 to perform optical imaging. The shooting unit 500 also includes a side shooting assembly, which includes a side lens 530 and a side camera 540. The side lens 530 is covered on the side camera 540, and the side lens 530 faces the first frame 311, so that the side camera 540 receives the light reflected by the first reflector 420 from the side surface of the substrate 600 to perform optical imaging. The shooting unit 500 also includes a surface shooting component, which includes a surface lens 550 and a surface camera 560. The surface lens 550 is covered on the surface camera 560, and the surface lens 550 faces the second frame 331, so that the surface camera 560 receives the light on the surface of the substrate 600 reflected by the second reflector 440 to perform optical imaging.

[0044] Specifically, the bottom camera 520 is disposed correspondingly to the first reflector 420, the bottom lens 510 is covered on the bottom camera 520 and disposed toward the first reflector 420, the first reflector 420 reflects the light from the bottom surface of the substrate 600 to the bottom lens 510, and the bottom surface of the substrate 600 is imaged onto the bottom camera 520 through the bottom lens 510. The side camera 540 is disposed correspondingly to the first reflector 420, the side lens 530 is covered on the side camera 540 and disposed toward the first reflector 420, the first reflector 420 reflects the light from the side surface of the substrate 600 to the side lens 530, and the side surface of the substrate 600 is imaged onto the side camera 540 through the side lens 530. The surface camera 560 is arranged corresponding to the second reflector 440, and the surface lens 550 is covered on the surface camera 560 and arranged toward the second reflector 440. The second reflector 440 reflects the light on the surface of the substrate 600 to the surface lens 550, and the surface of the substrate 600 is imaged on the surface camera 560 through the surface lens 550. In the above manner, the three shooting positions are imaged separately to avoid mutual interference, reduce the difficulty of optical design and adjustment; and without using a compensation mirror, the lens can be closer to the target position and the structure is more compact.

[0045] In the embodiment of the present application, the first reflector 420, the second reflector 440, the first splicing mirror 320 and the second splicing mirror 340 are all full reflectors, which can be aluminum mirrors, coated lenses or other high reflectivity lenses. And the full reflector in this embodiment only performs a single reflection, which improves the utilization rate of the light source and avoids energy waste. It is understandable that in some embodiments, a single full reflector or multiple full reflectors can also be used for multiple reflections.

[0046] Please refer to Figures 1 to 5 In an embodiment of the present application, the supporting assembly 200 includes a mounting seat 210, a motor and a stage 220; the mounting seat 210 is arranged on the base 100 and is used to install the stage 220 and the motor; the stage 220 is installed on the mounting seat 210 and is used to support the substrate 600; the motor is installed in the mounting seat 210 and is used to drive the stage 220 to rotate.

[0047] Specifically, one end of the mounting seat 210 is connected to the base 100, and the other end is connected to the stage 220. The motor is installed in the mounting seat 210 and drives the stage 220 to rotate. During use, the stage 220 fixes the substrate 600 and drives the substrate 600 to rotate. It is understandable that an encoder can be set on the motor, and the encoder can record the rotation position of the motor. When shooting with the encoder, the bottom camera 520, the side camera 540 and the surface camera 560 will correspond to the rotation position.

[0048] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto, and any changes or replacements within the technical scope disclosed in the embodiment of the present application should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application should be based on the protection scope of the claims.

Claims

1. A substrate edge detection device, characterized in that: It comprises a base, and a bearing assembly, a lighting unit, a reflector unit and a shooting unit arranged on the base; The carrying assembly is used to place the substrate and drive the substrate to run; The lighting unit is disposed close to the supporting assembly, and the lighting unit is used to illuminate the substrate; The reflector unit is disposed close to the lighting unit, and is used to reflect the light on the substrate to the shooting unit; The shooting unit is arranged corresponding to the reflector unit, and is used for performing optical imaging on the substrate.

2. The substrate edge detection device according to claim 1, characterized in that: The lighting unit includes a first lighting assembly and a first splicing mirror; The first lighting assembly is disposed on the base and close to the supporting assembly, the first lighting assembly is used to illuminate the bottom surface of the substrate, and the reflector unit is capable of receiving light from the bottom surface of the substrate and reflecting the light to the shooting unit; The first stitching mirror is arranged corresponding to the first lighting component, and is used to receive part of the light from the first lighting component, reflect the light to the side of the substrate, and receive the light from the side of the substrate, reflect the light from the side of the substrate to the reflector unit, and reflect it to the shooting unit through the reflector unit.

3. The substrate edge detection device according to claim 2, characterized in that: The first lighting assembly includes a first frame with an opening, a first scattering plate and a first light source, the first frame is arranged on the base, the height of the first frame is lower than the bearing assembly, the first scattering plate cover is arranged at the opening of the first frame, and the first light source is arranged in the first frame; The first light source is used to illuminate the first scattering plate, the first scattering plate is used to scatter the light of the first light source to the bottom surface of the substrate, the first splicing mirror is used to receive part of the light scattered by the first scattering plate, reflect the light to the side of the substrate, and reflect the light on the side of the substrate to the reflector unit; The reflector unit is used to reflect the light from the bottom surface of the substrate and the light from the side surface of the substrate to the shooting unit.

4. The substrate edge detection device according to claim 3, characterized in that: The first splicing mirror includes a first reflecting surface and a second reflecting surface, and the angle between the first reflecting surface and the second reflecting surface is an obtuse angle; in the working state, the substrate is placed on the supporting assembly, the first reflecting surface and the second reflecting surface are located on the side of the substrate, the first reflecting surface and the second reflecting surface are used to reflect the light of the first light source to the side of the substrate, and the second reflecting surface is used to reflect the light on the side of the substrate to the reflector unit.

5. The substrate edge detection device according to any one of claims 1 to 4, characterized in that: The lighting unit also includes a second lighting assembly and a second splicing mirror; The second lighting assembly is disposed on the base and close to the supporting assembly, the second lighting assembly is used to illuminate the surface of the substrate, and the reflector unit is capable of receiving light from the surface of the substrate and reflecting the light to the shooting unit; The second stitching mirror is arranged corresponding to the second lighting component, and is used to receive part of the light from the second lighting component and reflect the light to the chamfer of the side of the substrate. The reflector unit is capable of receiving the light at the chamfer of the side of the substrate and reflecting the light to the shooting unit.

6. The substrate edge detection device according to claim 5, characterized in that: The second lighting assembly comprises a second frame with an opening, a second scattering plate and a second light source, the second frame is arranged on the base, the height of the second frame is higher than the bearing assembly, the second scattering plate cover is arranged at the opening of the second frame, and the second light source is arranged in the second frame; The second light source is used to illuminate the second scattering plate, and the second scattering plate is used to scatter the light of the second light source to the surface of the substrate. The second splicing mirror is used to receive part of the light scattered by the second scattering plate and reflect the light to the chamfer of the side of the substrate, so that the reflector assembly reflects the light on the surface of the substrate and the light at the chamfer of the side of the substrate to the shooting unit.

7. The substrate edge detection device according to claim 6, characterized in that: The reflector unit comprises a first reflective component and a second reflective component; The first reflection assembly includes a first mirror frame and a first reflector, the first mirror frame is mounted on the first frame, the first reflector is mounted on the first mirror frame, and the first reflector is used to reflect the light on the bottom surface of the substrate and the light on the side surface of the substrate to the shooting unit; The second reflection assembly includes a second mirror frame and a second reflector, the second mirror frame is mounted on the second frame, the second reflector is mounted on the second mirror frame, and the second reflector is used to reflect the light on the surface of the substrate to the shooting unit.

8. The substrate edge detection device according to claim 7, characterized in that: The shooting unit includes a bottom shooting component, which includes a bottom lens and a bottom camera. The bottom lens cover is arranged on the bottom camera, and the bottom lens faces the first frame, so that the bottom camera receives the light reflected by the first reflector from the bottom surface of the substrate to perform optical imaging.

9. The substrate edge detection device according to claim 8, characterized in that: The shooting unit also includes a side shooting component, which includes a side lens and a side camera. The side lens cover is arranged on the side camera, and the side lens faces the first frame, so that the side camera receives the light on the side of the substrate reflected by the first reflector to perform optical imaging.

10. The substrate edge detection device according to claim 9, characterized in that: The shooting unit also includes a surface shooting component, which includes a surface lens and a surface camera. The surface lens cover is arranged on the surface camera, and the surface lens faces the second frame, so that the surface camera receives the light on the surface of the substrate reflected by the second reflector to perform optical imaging.

11. The substrate edge detection device according to claim 7, characterized in that: The first reflecting mirror, the second reflecting mirror, the first splicing mirror and the second splicing mirror are all total reflecting mirrors.

12. The substrate edge detection device according to claim 11, characterized in that: The bearing assembly includes a mounting seat, a motor and a stage; The mounting seat is arranged on the base and is used for mounting the stage and the motor; The stage is mounted on the mounting seat and is used to carry the substrate; The motor is installed in the mounting seat and is used to drive the stage to rotate.

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