Semiconductor product testing equipment

Abstract

The present application discloses a semiconductor product testing device, which relates to the field of semiconductor testing, and includes a box body, a feeding mechanism and a discharging mechanism are arranged on the box body, a moving mechanism is arranged in the box body, a mechanical arm is arranged on the moving mechanism, a storage rack is arranged in the box body, a square edge finder and a wafer edge finder are arranged on the storage rack, a plurality of testing mechanisms are arranged on the box body, and a plurality of testing ports are opened on the side wall of the box body. The present application utilizes the moving mechanism to drive the mechanical arm to move, and the mechanical arm transports the wafer and the liquid crystal square to the wafer edge finder and the square edge finder respectively for edge finding, and the wafer edge finder and the square edge finder perform edge finding at the same time, and then the wafer and the liquid crystal square after edge finding are transported to different testing mechanisms through the testing ports, and the plurality of testing mechanisms simultaneously perform detection on the wafer and the liquid crystal square, so that the detection device is compatible with the transportation, edge finding and detection of the wafer and the liquid crystal square, and improves the detection efficiency of the wafer and the liquid crystal square.

Description

Technical Field

[0001] The present application relates to the field of semiconductor testing, and in particular to a semiconductor product testing device. Background Art

[0002] Wafers are the core raw materials of the semiconductor industry and are used to manufacture integrated circuits and various semiconductor devices. Liquid crystal squares are key components of semiconductor display technology, realizing the image display function of liquid crystal displays. Both are indispensable semiconductor products for modern electronic devices.

[0003] At present, the existing inspection equipment includes wafer loaders, wafer edge finders, robotic arms and inspection mechanisms. The robotic arm first moves the wafers in the wafer loader to the wafer edge finder, and the wafer edge finder finds the edges of the wafers. The robotic arm then moves the wafers after edge finding to the inspection mechanism, and the inspection mechanism inspects the wafers. Finally, the robotic arm moves the inspected wafers back to the wafer loader.

[0004] The edge finding and inspection of the wafer both require waiting for a period of time. The next wafer will be transported, edge found and inspected only after one wafer has completed inspection. This will reduce the inspection efficiency of the wafer, and the inspection equipment will not be able to inspect the LCD square piece. Summary of the invention

[0005] In order to accommodate the handling, edge finding and detection of wafers and liquid crystal squares and to improve the detection efficiency, the present application provides a semiconductor product detection device.

[0006] The semiconductor product testing equipment provided in this application adopts the following technical solution:

[0007] A semiconductor product inspection device comprises a box body, a feeding mechanism and a discharging mechanism are arranged at intervals on one side wall of the box body in the width direction, a moving mechanism is arranged in the box body, a mechanical arm is arranged on the moving end of the moving mechanism, and the moving mechanism drives the mechanical arm to reciprocate along the length direction of the box body, a storage rack is arranged at one end of the box body in the length direction, a square piece edge finder and a wafer edge finder are arranged on the storage rack, a plurality of inspection mechanisms are arranged on the other side wall of the box body in the width direction, and an inspection port is opened on the side wall of the box body at each inspection mechanism.

[0008] By adopting the above technical solution, the feeding mechanism stores wafers and liquid crystal squares, the moving mechanism drives the mechanical arm to move, and the mechanical arm transports the wafers and liquid crystal squares to the wafer edge finder and square edge finder respectively for edge finding, the wafer edge finder and square edge finder perform edge finding at the same time, and then the wafers and liquid crystal squares after edge finding are transported to different inspection mechanisms through the inspection port, and multiple inspection mechanisms inspect the wafers and liquid crystal squares at the same time. With this arrangement, the inspection equipment is compatible with the transportation, edge finding and inspection of wafers and liquid crystal squares and improves the inspection efficiency of wafers and liquid crystal squares.

[0009] Preferably, the square piece edge finding machine includes a detection unit, a turntable, a reducer, a drive motor, a Y-axis single-axis robot and an X-axis single-axis robot, the X-axis single-axis robot is arranged on a storage rack, the Y-axis single-axis robot is arranged on the mobile end of the X-axis single-axis robot, the drive motor is arranged on the mobile end of the Y-axis single-axis robot, the reducer is arranged on the drive end of the drive motor, the turntable is arranged on the output end of the reducer, the liquid crystal square piece is placed on the turntable, and the detection unit is arranged on the storage rack and located above the turntable.

[0010] By adopting the above technical solution, the robotic arm places the liquid crystal square on the turntable, and the Y-axis single-axis robot and the X-axis single-axis robot drive the turntable to move freely on the horizontal plane, thereby driving the liquid crystal square to move, and the driving motor drives the turntable to rotate through the reducer, thereby driving the liquid crystal square to rotate. The liquid crystal square rotates during the movement, so that the edge of the liquid crystal square is always located below the detection unit, and the detection unit performs edge detection on the liquid crystal square.

[0011] Preferably, the robotic arm comprises a moving box, a lifting column, a first rotating arm, a second rotating arm, a third rotating arm and a bracket, the moving box is arranged at the moving end of the moving mechanism, the lifting column is slidably arranged in the moving box, the first rotating arm is rotatably arranged at the top of the lifting column, the second rotating arm is rotatably arranged on the first rotating arm, the third rotating arm is rotatably arranged on the second rotating arm, the bracket is fixedly arranged on the third rotating arm, the bracket is used to hold up wafers or liquid crystal square pieces, and the bracket is provided with gaskets for supporting wafers or liquid crystal square pieces.

[0012] By adopting the above technical solution, the first rotating arm, the second rotating arm and the third rotating arm drive the bracket to move on the horizontal plane. When the bracket moves to the bottom of the wafer or the liquid crystal square, the lifting column drives the bracket to move upward, so that the bracket drives the gasket to move and lift the wafer or the liquid crystal square. The moving mechanism then drives the wafer or the liquid crystal square to move through the moving box.

[0013] Preferably, a plurality of fan filter units are arranged on the top wall of the box body, and a plurality of air outlets are arranged at intervals on the bottom wall of the box body.

[0014] By adopting the above technical solution, the fan filter unit can purify the external air and blow it into the chassis, and the air in the chassis is then blown out from the air outlet, making it difficult for dust to appear inside the chassis.

[0015] Preferably, a rotating seat is rotatably provided on the side wall of the third rotating arm, a rotating member for driving the rotating seat to rotate is provided in the third rotating arm, the bracket is fixedly provided on the side wall of the rotating seat, a moving seat is slidably provided on the bracket, a first driving member for driving the moving seat to reciprocate is provided in the rotating seat, a second driving member is provided on the moving seat, a moving plate is provided at the driving end of the second driving member, two limit plates are provided on the moving plate and the bracket, and the four limit plates abut to clamp the wafer or liquid crystal square piece.

[0016] By adopting the above technical solution, after the bracket lifts the wafer or liquid crystal square, the second driving member drives the two limit plates to move through the movable plate, and the four limit plates abut and clamp the wafer or liquid crystal square, so that the liquid crystal or liquid crystal square will not shift during the transfer process, and the rotating member drives the bracket to rotate through the rotating seat, thereby driving the wafer or liquid crystal square to flip, which is convenient for multi-directional detection of the wafer or liquid crystal square, and the first driving member drives the second driving member to move through the movable seat, thereby driving the two limit plates on the movable plate to move, so that the four limit plates can limit and clamp wafers or liquid crystal squares of different sizes.

[0017] Preferably, the limiting plate includes a rod body, a connecting ring and a plate body, the four rod bodies are respectively fixedly arranged on the movable plate and the bracket, the connecting ring is fixedly arranged on the rod body, the plate body is fixedly connected to the connecting ring and is located at the end of the rod body, and the diameter of the plate body is larger than the diameter of the connecting ring.

[0018] By adopting the above technical solution, when the bracket lifts the wafer or liquid crystal square, the bottom wall of the wafer or liquid crystal square abuts on the gasket, the second driving member drives the movable plate to move, and the movable plate drives the connecting ring and the disk body to move through the rod body, the connecting ring abuts on the side wall of the wafer or liquid crystal square, and the disk body limits the top wall of the wafer or liquid crystal square. When the wafer or liquid crystal square is flipped over, the four disk bodies support the wafer or liquid crystal square, so that the wafer or liquid crystal square will not fall.

[0019] Preferably, an air frame is fixedly provided on the outer wall of the connecting ring, the outer peripheral side of the air frame is opened, an air film is provided at the open end of the outer peripheral side of the air frame, a first air supply component is provided on the bracket, a first air pipe is provided on the air frame, the first air pipe connects the first air supply component and the inner cavity of the air frame, and an annular chamfer is formed on the outer peripheral side of the disk body close to one end of the bracket.

[0020] By adopting the above technical solution, when the wafer or liquid crystal square is flipped over and placed, the second driving member first drives the two limit plates to move slowly through the movable plate. During this process, the first air supply member supplies air into the air frame through the first air pipe and blows up an air film, so that the air film is pressed against the side wall of the wafer or liquid crystal square. The four air films squeeze the wafer or liquid crystal square at the same time, so that the wafer or liquid crystal square moves slightly in the direction close to the movable plate. The wafer or liquid crystal square falls onto the annular chamfers of the four disks. The movement of the wafer or liquid crystal square is guided by the four annular chamfers, so that the wafer or liquid crystal square can always maintain a horizontal state and move slowly downward, so that the wafer or liquid crystal square can be placed smoothly.

[0021] Preferably, six gaskets are provided, six sliding rods are slidably installed in the bracket, and the ends of the six sliding rods are respectively fixedly connected to the six gaskets, and the six gaskets are respectively two first gaskets, a second gasket and a third gasket, the two first gaskets are located on the side of the bracket away from the rotating seat, the two third gaskets are located on the side of the bracket close to the rotating seat, and the two second gaskets are located between the first gasket and the third gaskets, and a second air supply member is provided on the bracket, and a first air duct, a second air duct and a third air duct are opened in the bracket, one end of the first air duct, the second air duct and the third air duct are connected to the second air supply member, and the other end is respectively connected to the sliding rods corresponding to the two first gaskets, the second gasket and the third gasket, and a switching member is provided on the bracket, and a switching plate is provided on the driving end of the switching member, and the switching plate is used to open or close the second air duct and the third air duct.

[0022] By adopting the above technical scheme, when a small-sized wafer or liquid crystal square is flipped and placed, the second driving member first drives the two limit plates to move slowly through the moving plate, and the switching member drives the switching plate to move, so that the second air channel is opened and the third air channel is closed, and the second air supply member supplies air to the first air channel and the second air channel, and the gas drives the first gasket and the second gasket to move through the sliding rod, and the first gasket and the second gasket abut to push the wafer to move downward, so that the wafer can always maintain a horizontal state when it moves downward; when a large-sized wafer or liquid crystal square is flipped and placed, the second driving member first drives the two limit plates to move slowly through the moving plate, and the switching member drives the switching plate to move, so that the second air channel is closed and the third air channel is opened, and the second air supply member supplies air to the first air channel and the third air channel, and the gas drives the first gasket and the third gasket to move through the sliding rod, so that it can be suitable for wafers or liquid crystal squares of different sizes.

[0023] In summary, the present application includes at least one of the following beneficial technical effects:

[0024] 1. The moving mechanism is used to drive the mechanical arm to move. The mechanical arm moves the wafer and the LCD square to the wafer edge finder and the square edge finder respectively for edge finding. The wafer edge finder and the square edge finder perform edge finding at the same time. Then, the wafer and the LCD square after edge finding are moved to different testing mechanisms through the testing port. Multiple testing mechanisms test the wafer and the LCD square at the same time, so that the testing equipment is compatible with the handling, edge finding and testing of the wafer and the LCD square and improves the testing efficiency of the wafer and the LCD square.

[0025] 2. With the help of the fan filter unit and the air outlet, the fan filter unit can purify the external air and blow it into the chassis, and the air in the chassis is blown out from the air outlet, making it difficult for dust to appear inside the chassis;

[0026] 3. Through the four limit plates, when the bracket lifts the wafer or liquid crystal square, the second driving member drives the two limit plates to move through the moving plate, and the four limit plates abut and clamp the wafer or liquid crystal square, so that the liquid crystal or liquid crystal square will not deviate during the transfer process. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the overall structure of the semiconductor product testing equipment in Example 1 of the present application;

[0028] Figure 2 This is an exploded view of the overall structure of the semiconductor product detection equipment in Example 1 of the present application;

[0029] Figure 3 This is a partial structural diagram of the semiconductor product testing equipment in Example 1 of the present application;

[0030] Figure 4 This is a partial structural diagram of the semiconductor product testing equipment in Example 1 of the present application, in order to highlight the mechanical arm;

[0031] Figure 5 This is a partial structural diagram of the semiconductor product testing equipment in Example 1 of the present application, in order to highlight the square wafer edge finder;

[0032] Figure 6 This is a partial structural diagram of a semiconductor product testing device in Example 2 of the present application;

[0033] Figure 7 A partial structural cross-sectional view of a semiconductor product testing device in Example 2 of the present application;

[0034] Figure 8 This is a partial structural cross-sectional view of the semiconductor product testing device in Example 2 of the present application, which is used to highlight the limit plate;

[0035] Fig. 9 For this application Figure 8 The enlarged schematic diagram at A in the middle;

[0036] Fig.10 This is a partial structural diagram of the semiconductor product testing equipment in Example 2 of the present application, in order to highlight the first gas supply component and the second gas supply component;

[0037] Fig.11 This is a partial structural cross-sectional view of the semiconductor product detection equipment in Example 2 of the present application, highlighting the first air channel, the second air channel and the third air channel.

[0038] Figure numerals: 1. Box; 2. Control unit; 3. Feed mechanism; 4. Discharge mechanism; 5. Fan filter unit; 6. Base; 7. Moving mechanism; 8. Robotic arm; 81. Moving box; 82. Lifting column; 83. First rotating arm; 84. Second rotating arm; 85. Third rotating arm; 86. Bracket; 9. Storage rack; 10. Wafer edge finder; 11. Square piece edge finder; 111. Detection unit; 112. Turntable; 113. Reducer; 114. Drive motor; 115. Y-axis single-axis robot; 116. X-axis single-axis robot; 12. Four-color warning light; 13. Detection port No. 1; 14. Detection port No. 2; 15. Detection port No. 3; 16. Casters; 17. Foot cup; 18 , detection mechanism; 19, gasket; 191, first gasket; 192, second gasket; 193, third gasket; 20, rotating seat; 21, rotating member; 22, moving seat; 23, first driving member; 24, second driving member; 25, moving plate; 26, limiting plate; 261, rod body; 262, connecting ring; 263, plate body; 27, air frame; 28, air film; 29, first air supply member; 30, first air pipe; 31, annular chamfer; 32, sliding rod; 33, first air duct; 34, second air duct; 35, third air duct; 36, switching member; 37, switching plate; 38, piston; 40, connecting air duct; 41, switching block; 42, second air supply member; 43, telescopic guide rod. DETAILED DESCRIPTION

[0039] The following is combined with Figure 1-Figure 11 This application is described in further detail.

[0040] Embodiment 1:

[0041] The embodiment of the present application discloses a semiconductor product testing device.

[0042] Reference Figure 1 , Figure 2 and Figure 3 A semiconductor product testing device includes a box body 1, a base 6 is fixedly installed at the bottom of the box body 1, eight casters 16 are symmetrically installed on the bottom wall of the base 6, and eight foot cups 17 are symmetrically installed on the bottom wall of the base 6. The eight foot cups 17 correspond to the eight casters 16. The box body 1 is convenient to move and position using the foot cups 17 and the casters 16.

[0043] A feeding mechanism 3 and a discharging mechanism 4 are installed at intervals on one side wall of the box body 1 in the width direction. In the present application, the feeding mechanism 3 and the discharging mechanism 4 can be selected to be composed of a wafer loader and a liquid crystal square sheet loader. Three detection ports are installed at intervals on the other side wall of the box body 1 in the width direction. The three detection ports are detection port No. 1 13, detection port No. 2 14 and detection port No. 3 15. Three detection mechanisms 18 are installed at intervals on the side wall of the box body 1 near the detection port. The three detection mechanisms 18 correspond to the three detection ports respectively.

[0044] A moving mechanism 7 is installed on the base 6, and a mechanical arm 8 is installed on the moving mechanism 7. The moving mechanism 7 drives the mechanical arm 8 to move back and forth in the length direction of the box 1. A rack 9 is fixedly installed on the base 6 and located at one end of the length direction of the box 1. A wafer edge finder 10 and a liquid crystal square edge finder 11 are installed on the rack 9. In the present application, the moving mechanism 7 can be selected as a linear module.

[0045] The two groups of loaders of the feeding mechanism 3 store wafers and liquid crystal squares respectively. The moving mechanism 7 drives the mechanical arm 8 to move. The mechanical arm 8 moves to the loader corresponding to the wafer or liquid crystal square, and then the wafer or liquid crystal square can be transported. The mechanical arm 8 transports the wafer and the liquid crystal square to the wafer edge finder 10 and the square edge finder 11 respectively for edge finding. The wafer edge finder 10 and the square edge finder 11 perform edge finding at the same time, and then transport the wafer and liquid crystal square after edge finding to different detection mechanisms 18 through the detection port. Multiple detection mechanisms 18 detect the wafer and liquid crystal square at the same time, so that the detection equipment is compatible with the transportation, edge finding and detection of wafers and liquid crystal squares, thereby improving the detection efficiency of wafers and liquid crystal squares.

[0046] Reference Figure 3 and 4 Specifically, the mechanical arm 8 includes a moving box 81, a lifting column 82, a first rotating arm 83, a second rotating arm 84, a third rotating arm 85 and a bracket 86. The moving box 81 is fixedly mounted on the moving end of the moving mechanism 7. The lifting column 82 is slidably mounted in the middle of the moving box 81 along the vertical direction, and the top end of the lifting column 82 extends out of the moving box 81. The first rotating arm 83 is rotatably mounted on the top end of the lifting column 82, the second rotating arm 84 is rotatably mounted on the end of the first rotating arm 83 away from the lifting column 82, the third rotating arm 85 is rotatably mounted on the end of the second rotating arm 84 away from the first rotating arm 83, and the bracket 86 is fixedly mounted on the third rotating arm 85. The bracket 86 is U-shaped, and the open end of the U-shaped bracket 86 is located on the side away from the third rotating arm 85. Three gaskets 19 are installed on the bracket 86.

[0047] The moving mechanism 7 first drives the mechanical arm 8 to move to the feeding mechanism 3, and the first rotating arm 83, the second rotating arm 84 and the third rotating arm 85 drive the bracket 86 to move on the horizontal plane, so that the bracket 86 moves to the bottom of the wafer or the liquid crystal square, and the lifting column 82 drives the bracket 86 to move upward. At this time, the three pads 19 hold up the wafer or the liquid crystal square. The moving mechanism 7 then drives the wafer or the liquid crystal square to move to the storage rack 9 through the mechanical arm 8, and the lifting column 82 drives the bracket 86 to move downward, so that the wafer is placed on the wafer edge finder 10 or the liquid crystal square is placed on the square edge finder 11. After completing the edge finding, the moving mechanism 7 then uses the mechanical arm 8 to transport the wafer or the liquid crystal square to the detection mechanism 18 for detection. After completing the detection, the wafer or the liquid crystal square is transported to the discharge mechanism 4.

[0048] When a wafer is edge-finding, the robot arm 8 can carry a liquid crystal square to the square edge-finding machine 11 for edge-finding during the waiting process, so that the wafer and the liquid crystal square can be edge-finding at the same time. When a wafer is inspected, the robot arm 8 can carry a liquid crystal square to the inspection mechanism 18 for inspection during the waiting process, so that the wafer and the liquid crystal square can be inspected at the same time, thereby improving the inspection efficiency.

[0049] Reference Figure 3 and Figure 5 , the square edge finder 11 includes a detection unit 111, a turntable 112, a reducer 113, a drive motor 114, a Y-axis single-axis robot 115 and an X-axis single-axis robot 116, the X-axis single-axis robot 116 is fixedly mounted on the rack 9, the Y-axis single-axis robot 115 is fixedly mounted on the mobile end of the X-axis single-axis robot 116, and the drive motor 114 is fixedly mounted on the mobile end of the Y-axis single-axis robot 115. In this application, both the Y-axis single-axis robot 115 and the X-axis single-axis robot 116 can be composed of a servo motor and a screw module. The reducer 113 is fixedly mounted on the top of the drive motor 114, the output shaft of the drive motor 114 is fixedly connected to the input end of the reducer 113, the turntable 112 is mounted on the top of the reducer 113, and the output end of the reducer 113 is fixedly connected to the turntable 112. The detection unit 111 is fixedly mounted on the rack 9 through a vertical pole. In this application, the detection unit 111 can be selected as an industrial camera.

[0050] The robot arm 8 places the liquid crystal square on the turntable 112, and the driving motor 114 drives the liquid crystal square to rotate through the reducer 113 and the turntable 112. The Y-axis single-axis robot 115 and the X-axis single-axis robot 116 drive the liquid crystal square to move freely on the horizontal plane through the driving motor 114, the reducer 113 and the turntable 112, so that during the rotation of the liquid crystal square, its side edge is always located directly below the detection unit 111, and the detection unit 111 performs edge detection on the liquid crystal square.

[0051] Reference Figure 2 and Figure 3 Three fan filter units 5 are fixedly installed on the top wall of the chassis at equal intervals along its length direction, and a plurality of air outlets are spaced apart on the base 6. In the present application, the fan filter unit 5 can be selected as a FFU laminar air supply device. The fan filter unit 5 can purify the external air and blow it into the chassis, and the air in the chassis is then blown out from the air outlet, so that dust is not easy to appear inside the chassis.

[0052] Reference Figure 1 , Figure 2 and Figure 3 A control unit 2 is installed on the side wall of the box 1 in the width direction. The control unit 2 is electrically connected to the feeding mechanism 3, the discharging mechanism 4, the fan filter unit 5, the moving mechanism 7, the mechanical arm 8, the wafer edge finder 10, the square piece edge finder 11 and the detection mechanism 18. The control unit 2 can be used to control the detection equipment. A four-color warning light 12 is installed on the top of the box 1. When the detection equipment fails, the four-color warning light 12 can warn.

[0053] The implementation principle of a semiconductor product inspection device in an embodiment of the present application is as follows: wafers and liquid crystal squares are stored in the feeding mechanism 3, the moving mechanism 7 drives the robot arm 8 to move, the first rotating arm 83, the second rotating arm 84 and the third rotating arm 85 drive the bracket 86 to move on the horizontal plane, the lifting column 82 drives the bracket 86 to move in the vertical direction, the robot arm 8 transports the wafer and the liquid crystal square to the wafer edge finder 10 and the square edge finder 11 respectively for edge finding, the wafer edge finder 10 and the square edge finder 11 perform edge finding at the same time, the robot arm 8 then transports the wafer and liquid crystal square after edge finding to different inspection ports, and multiple inspection mechanisms 18 inspect the wafer and liquid crystal square at the same time, so that the inspection equipment is compatible with the transportation, edge finding and inspection of wafers and liquid crystal squares, thereby improving the inspection efficiency of wafers and liquid crystal squares.

[0054] Embodiment 2:

[0055] Reference Figure 6 and Figure 7The difference between this embodiment and the first embodiment is that a rotating member 21 is fixedly installed in the third rotating arm 85, and a rotating seat 20 is fixedly installed on the rotating end of the rotating member 21, and the rotating seat 20 is located at the end of the third rotating arm 85. The bracket 86 is fixedly installed on the side wall of the rotating seat 20 away from the third rotating arm 85, and the first driving member 23 is fixedly installed on the rotating seat 20, and the moving seat 22 is slidably installed on the bracket 86, and the driving end of the first driving member 23 is fixedly connected to the moving seat 22. The second driving member 24 is fixedly installed on the moving seat 22, and the moving plate 25 is fixedly installed on the driving end of the second driving member 24. Two telescopic guide rods 43 are fixedly installed on the side wall of the moving plate 25, and the ends of the two telescopic guide rods 43 are fixedly connected to the moving seat 22. In the present application, the rotating member 21 can be selected as a rotary cylinder, and the first driving member 23 and the second driving member 24 can be selected as linear cylinders.

[0056] Reference Figure 7 , Figure 8 and Fig. 9 The two ends of the movable plate 25 in the length direction and the two ends of the opening side of the top wall of the bracket 86 are fixedly installed with limit plates 26. The limit plates 26 include a rod body 261, a connecting ring 262 and a plate body 263. The four rod bodies 261 are respectively fixedly installed on the movable plate 25 and the bracket 86. The connecting ring 262 is fixedly sleeved on the rod body 261. The plate body 263 is fixedly connected to the connecting ring 262. The plate body 263 is located at the top end of the rod body 261. The diameter of the plate body 263 is larger than the diameter of the connecting ring 262. An annular chamfer 31 is formed on the peripheral side of the top wall of the bracket 86 near the plate body 263.

[0057] When the tray drives the gasket 19 to lift the wafer or liquid crystal square, the second driving member 24 drives the movable plate 25 to move away from the rotating seat 20, and the movable plate 25 drives the two limit plates 26 to move. The connecting rings 262 of the four limit plates 26 abut against the side walls of the wafer or liquid crystal square, thereby limiting the position of the wafer or liquid crystal square, so that when the bracket 86 drives the wafer or liquid crystal square to move, the wafer or liquid crystal square will not move.

[0058] The rotating member 21 drives the rotating seat 20 to rotate, the rotating seat 20 drives the bracket 86 to rotate, and the bracket 86 drives the wafer or liquid crystal square to flip. At this time, the four disks 263 support the wafer or liquid crystal square to prevent the wafer or liquid crystal square from falling, thereby facilitating multi-directional detection of the wafer or liquid crystal square.

[0059] When the sizes of wafers or liquid crystal squares are different, the first driving member 23 drives the moving seat 22 to move, and the moving seat 22 drives the second driving member 24 and the moving plate 25 to move, so that the positions of the two limit plates 26 on the moving plate 25 can be adjusted, so that the four limit plates 26 can limit and clamp wafers or liquid crystal squares of different sizes.

[0060] Reference Figure 7 , Figure 8 , Fig. 9 and Fig.10 , an air frame 27 is fixedly sleeved on the outer side wall of each connecting ring 262, the outer peripheral side wall of the air frame 27 is open, and an air film 28 is covered at the opening of the outer peripheral side wall of the air frame 27. A first air supply member 29 is fixedly installed on the bottom wall of the bracket 86, and a first air pipe 30 is installed on the first air supply member 29. One end of the first air pipe 30 is connected to the first air supply member 29, and the other end is connected to the inner cavity of the four air frames 27. In the present application, the first air supply member 29 can be selected as a micro air pump, and the air frame 27 can be made of rubber material.

[0061] When the limiting plate 26 clamps the wafer or liquid crystal square, the side of the wafer or liquid crystal square abuts against the open end of the cylinder, and the first air supply member 29 inhales air, causing the air film 28 on the air frame 27 to shrink. When the wafer or liquid crystal square is flipped over and placed, the second driving member 24 first drives the two limiting plates 26 to move slowly through the moving plate 25. At this time, the first air supply member 29 supplies air to the air frame 27 through the first air pipe 30 and blows up the air film 28, which presses against the side wall of the wafer or liquid crystal square. The four air films 28 squeeze the wafer or liquid crystal square at the same time, causing the wafer or liquid crystal square to move slightly toward the center of the four limiting plates 26. After moving, the wafer or liquid crystal square falls onto the annular chamfers 31 of the four disk bodies 263, and the movement of the wafer or liquid crystal square is guided by the four annular chamfers 31, so that the wafer or liquid crystal square can be placed smoothly.

[0062] Reference Figure 7 , Figure 8 , Fig.10 and Fig.11 Six gaskets 19 are installed on the bracket 86. A slide bar 32 is fixedly installed in the middle of each gasket 19. The slide bar 32 is slidably installed in the bracket 86. A piston 38 is fixedly installed at the end of the slide bar 32 away from the gasket 19. The piston 38 is slidably installed in the bracket 86. The six gaskets 19 are two first gaskets 191, a second gasket 192 and a third gasket 193. The two first gaskets 191 are located on both sides of the open end of the bracket 86, the two third gaskets 193 are located on the side of the bracket 86 close to the rotating seat 20, and the two second gaskets 192 are located between the two first gaskets 191 and the third gaskets 193.

[0063] The bracket 86 is provided with a first air channel 33, a second air channel 34 and a third air channel 35. The two ends of the first air channel 33 are connected to the pistons 38 corresponding to the two first gaskets 191, the two ends of the second air channel 34 are connected to the pistons 38 corresponding to the two second gaskets 192, and the two ends of the third air channel 35 are connected to the pistons 38 corresponding to the two third gaskets 193.

[0064] The bracket 86 is provided with a connecting air passage 40, which is connected to the first air passage 33, the second air passage 34 and the third air passage 35. A second air supply member 42 is fixedly mounted on the bottom wall of the bracket 86, and the second air supply member 42 is connected to the end of the connecting air passage 40. In the present application, the second air supply member 42 can be selected as a micro cylinder.

[0065] A switching member 36 is fixedly mounted on the bracket 86, a switching plate 37 is fixedly mounted on the driving end of the switching member 36, two switching blocks 41 are fixedly mounted on both ends of the switching plate 37, the two switching blocks 41 are slidably mounted in the bracket 86, the two switching blocks 41 are located on both sides of the connecting air passage 40, and the switching blocks 41 slide back and forth between the second air passage 34 and the third air passage 35. In the present application, the switching member 36 can be selected as a micro cylinder.

[0066] When a small-sized wafer or liquid crystal square is flipped and placed, the second driving member 24 first drives the two limit plates 26 to move slowly through the moving plate 25, the switching member 36 drives the switching plate 37 to move, the switching plate 37 drives the two switching blocks 41 to move, and the switching block 41 moves into the third air channel 35, so that the second air channel 34 is opened and the third air channel 35 is closed. The second gas supply member 42 supplies gas to the first air channel 33 and the second air channel 34, and the gas drives the first gasket 191 and the second gasket 192 to move through the sliding rod 32, and the first gasket 191 and the second gasket 192 abut against each other to push the wafer downward, so that the wafer can always maintain a horizontal state when it moves downward, thereby further improving the stability of the wafer when it is placed.

[0067] When flipping and placing a large-sized wafer or liquid crystal square, the second driving member 24 first drives the two limit plates 26 to move slowly through the moving plate 25, the switching member 36 drives the switching plate 37 to move, the switching plate 37 drives the two switching blocks 41 to move, and the switching block 41 moves into the second air duct 34, so that the second air duct 34 is closed and the third air duct 35 is opened, and the second air supply member 42 supplies air to the first air duct 33 and the third air duct 35, and the gas drives the first gasket 191 and the third gasket 193 to move through the sliding rod 32, so that it can be suitable for wafers or liquid crystal squares of different sizes.

[0068] The implementation principle of Example 2 of the present application is as follows: when the limiting disk 26 clamps the wafer or liquid crystal square, the side of the wafer or liquid crystal square abuts against the open end of the cylinder, and the first air supply member 29 inhales air, causing the air film 28 on the air frame 27 to shrink. When the wafer or liquid crystal square is flipped over and placed, the second driving member 24 first drives the two limiting disks 26 to move slowly through the moving plate 25, and the first air supply member 29 supplies air to the air frame 27 through the first air pipe 30 and blows up the air film 28, which presses against the side wall of the wafer or liquid crystal square. The four air films 28 squeeze the wafer or liquid crystal square at the same time, causing the wafer or liquid crystal square to move slightly toward the center of the four limiting disks 26. After moving, the wafer or liquid crystal square falls onto the annular chamfers 31 of the four disk bodies 263, and the movement of the wafer or liquid crystal square is guided by the four annular chamfers 31, so that the wafer or liquid crystal square can be placed smoothly.

[0069] The above are only optional embodiments of the present disclosure and are not intended to limit the present disclosure. For those skilled in the art, the present disclosure may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A semiconductor product testing device, characterized in that: The invention comprises a box body (1), a feeding mechanism (3) and a discharging mechanism (4) are arranged at intervals on one side wall of the box body (1) in the width direction, a moving mechanism (7) is arranged inside the box body (1), a mechanical arm (8) is arranged on the moving end of the moving mechanism (7), and the moving mechanism (7) drives the mechanical arm (8) to move back and forth along the length direction of the box body (1), a storage rack (9) is arranged at one end in the length direction of the box body (1), a square edge finder (11) and a wafer edge finder (10) are arranged on the storage rack (9), a plurality of detection mechanisms (18) are arranged on the other side wall of the box body (1) in the width direction, and a detection port is opened on the side wall of the box body (1) at each detection mechanism (18); The mechanical arm (8) comprises a moving box (81), a lifting column (82), a first rotating arm (83), a second rotating arm (84), a third rotating arm (85) and a bracket (86); the moving box (81) is arranged at the moving end of the moving mechanism (7); the lifting column (82) is slidably arranged in the moving box (81); the first rotating arm (83) is rotatably arranged at the top end of the lifting column (82); the second rotating arm (84) is rotatably arranged on the first rotating arm (83); the third rotating arm (85) is rotatably arranged on the second rotating arm (84); the bracket (86) is fixedly arranged on the third rotating arm (85); the bracket (86) is used to hold up a wafer or a liquid crystal square plate; and a gasket (19) for supporting a wafer or a liquid crystal square plate is arranged on the bracket (86); A rotating seat (20) is rotatably arranged on the side wall of the third rotating arm (85), a rotating member (21) for driving the rotating seat (20) to rotate is arranged inside the third rotating arm (85), the bracket (86) is fixedly arranged on the side wall of the rotating seat (20), a moving seat (22) is slidably arranged on the bracket (86), a first driving member (23) for driving the moving seat (22) to reciprocate is arranged on the rotating seat (20), a second driving member (24) is arranged on the moving seat (22), a moving plate (25) is arranged at the driving end of the second driving member (24), two limiting plates (26) are arranged on the moving plate (25) and the bracket (86), and the four limiting plates (26) abut against and clamp the wafer or liquid crystal square plate; The limiting disk (26) comprises a rod body (261), a connecting ring (262) and a disk body (263); the four rod bodies (261) are fixedly arranged on the moving plate (25) and the bracket (86) respectively; the connecting ring (262) is fixedly arranged on the rod body (261); the disk body (263) is fixedly connected to the connecting ring (262) and is located at the end of the rod body (261); and the diameter of the disk body (263) is greater than the diameter of the connecting ring (262).

2. A semiconductor product testing device according to claim 1, characterized in that: The square piece edge finding machine (11) comprises a detection unit (111), a turntable (112), a reducer (113), a drive motor (114), a Y-axis single-axis robot (115) and an X-axis single-axis robot (116); the X-axis single-axis robot (116) is arranged on a storage rack (9); the Y-axis single-axis robot (115) is arranged on a moving end of the X-axis single-axis robot (116); the drive motor (114) is arranged on a moving end of the Y-axis single-axis robot (115); the reducer (113) is arranged on a driving end of the drive motor (114); the turntable (112) is arranged on an output end of the reducer (113); a liquid crystal square piece is placed on the turntable (112); and the detection unit (111) is arranged on the storage rack (9) and is located above the turntable (112).

3. The semiconductor product testing device according to claim 1, characterized in that: A plurality of fan filter units (5) are arranged on the top wall of the box body (1), a base (6) is arranged at the bottom of the box body (1), and a plurality of air outlets are arranged at intervals on the base (6).

4. The semiconductor product testing device according to claim 1, characterized in that: An air frame (27) is fixedly arranged on the outer wall of the connecting ring (262), the outer peripheral side of the air frame (27) is opened, and an air film (28) is arranged at the open end of the outer peripheral side of the air frame (27), a first air supply member (29) is arranged on the bracket (86), and a first air pipe (30) is arranged on the air frame (27), the first air pipe (30) connects the first air supply member (29) and the inner cavity of the air frame (27), and an annular chamfer (31) is formed on one end of the outer peripheral side of the disc body (263) close to the bracket (86).

5. The semiconductor product testing equipment according to claim 1, characterized in that: The number of the gaskets (19) is six, and six slide bars (32) are slidably installed in the bracket (86). The ends of the six slide bars (32) are fixedly connected to the six gaskets (19), respectively. The six gaskets (19) are two first gaskets (191), a second gasket (192) and a third gasket (193). The two first gaskets (191) are located on a side of the bracket (86) away from the rotating seat (20), the two third gaskets (193) are located on a side of the bracket (86) close to the rotating seat (20), and the two second gaskets (192) are located between the first gaskets (191) and the third gaskets (193). The bracket (86) 6) is provided with a second air supply member (42), and the bracket (86) is provided with a first air duct (33), a second air duct (34) and a third air duct (35), one end of the first air duct (33), the second air duct (34) and the third air duct (35) is connected to the second air supply member, and the other end is respectively connected to the sliding rods (32) corresponding to the two first gaskets (191), the second gasket (192) and the third gasket (193), and the bracket (86) is provided with a switching member (36), and the driving end of the switching member (36) is provided with a switching plate (37), and the switching plate (37) is used to open or close the second air duct (34) and the third air duct (35).

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