Evaporation chamber, electronic device, and sheet for evaporation chamber

Abstract

The invention provides an evaporation chamber, an electronic apparatus, and a sheet for the evaporation chamber. An evaporation chamber in which a working fluid is sealed in a sealed space is provided with a first flow path and a liquid flow path section adjacent to the first flow path in the sealed space.

Description

[0001] This application is a divisional application of the Chinese invention patent application with an application date of March 11, 2020, an invention name of “Evaporation chamber, electronic device, and sheet for evaporation chamber”, and an application number of 202080010217.4 (PCT / JP2020 / 010587). Technical Field

[0002] The present disclosure relates to an evaporation chamber that performs heat transport by causing a working fluid sealed in a closed space to reflux with phase change. Background Art

[0003] The amount of heat generated by electronic components such as CPUs (central processing units) in portable terminals such as personal computers, mobile phones, and tablet terminals tends to increase due to the improvement of information processing capabilities, so cooling technology is important. As a means for such cooling, a heat pipe is known. It is a component that uses a working fluid sealed in a pipe to transfer heat from a heat source to other parts, thereby diffusing the heat to cool the heat source.

[0004] On the other hand, in recent years, particularly in portable terminals and the like, thinning has become remarkable, and cooling means thinner than conventional heat pipes are required. For this purpose, an evaporation chamber such as that described in Patent Document 1 has been proposed.

[0005] The evaporation chamber is a device that expands the concept of heat transfer based on heat pipes to a plate-shaped component. That is, in the evaporation chamber, a working fluid is sealed between opposing plates, and the working fluid refluxes with phase change, thereby transporting heat, transporting and diffusing heat in the heat source to cool the heat source.

[0006] More specifically, a steam flow path and a condensate flow path are provided inside the evaporation chamber, and the working fluid is sealed therein. When the evaporation chamber is arranged near the heat source, the working fluid evaporates due to the heat from the heat source, and becomes a gas (steam) and moves in the steam flow path. As a result, the heat from the heat source is smoothly transported to a position away from the heat source, and as a result, the heat source is cooled.

[0007] The working fluid in a gaseous state that transports heat from the heat source moves to a position far from the heat source, where the heat is absorbed by the surroundings, thereby being cooled and condensed, and changing phase to a liquid state. The working fluid in a liquid state after the phase change returns to the position of the heat source through the condensate flow path, and is again evaporated by the heat from the heat source, thereby changing to a gaseous state.

[0008] Through the above-described cycle, the heat generated from the heat source is transported and diffused to a location away from the heat source, thereby cooling the heat source.

[0009] Prior art literature

[0010] Patent Literature

[0011] Patent Document 1: Japanese Patent Application Publication No. 2007-212028 Summary of the invention

[0012] Problems to be solved by the invention

[0013] The present disclosure aims to provide an evaporation chamber capable of improving heat transfer capability, and also to provide an electronic device including the evaporation chamber and a sheet for use in the evaporation chamber.

[0014] Means for solving problems

[0015] One method disclosed herein is an evaporation chamber, in which a working fluid is sealed in a closed space, wherein a first flow path and a liquid flow path portion adjacent to the first flow path are provided in the closed space, and a second flow path is provided on the liquid flow path portion on both sides in the thickness direction of the evaporation chamber, and the evaporation chamber is composed of three overlapping sheets, and on a sheet arranged in the center of the three sheets, a first flow path is formed in a manner that penetrates the sheet in the thickness direction and extends along the surface of the sheet, and second flow paths are respectively provided on both sides in the thickness direction of the liquid flow path portion of the sheet arranged in the center.

[0016] Furthermore, it is possible to provide an electronic device including a housing, an electronic component disposed inside the housing, and the evaporation chamber disposed on the electronic component.

[0017] Another method disclosed herein is a sheet for an evaporation chamber, which has a hollow portion for injecting a working fluid, wherein the hollow portion is provided with a first flow path and a liquid flow path portion adjacent to the first flow path, and the liquid flow path portion is provided with a second flow path on both sides in the thickness direction of the evaporation chamber, and the evaporation chamber sheet is composed of three overlapping sheets, and on a sheet arranged in the center of the three sheets, a first flow path is formed in a manner that penetrates the sheet in the thickness direction and extends along the surface of the sheet, and second flow paths are respectively provided on both sides in the thickness direction of the liquid flow path portion of the sheet arranged in the center.

[0018] Another embodiment of the present invention is an evaporation chamber, in which a working fluid is sealed in a closed space, wherein a first flow path and a liquid flow path portion adjacent to the first flow path are provided in the closed space, a second flow path and a heat insulating portion are provided in the liquid flow path portion, and the heat insulating portion is not connected to the first flow path and the second flow path. The evaporation chamber is composed of three overlapping sheets, and a first flow path is formed on a sheet arranged in the center of the three sheets in a manner that penetrates the sheet in the thickness direction and extends along the surface of the sheet, a second flow path is provided on a surface on one side in the thickness direction of the liquid flow path portion of the sheet arranged in the center, and a heat insulating portion is provided on a surface on the other side.

[0019] Furthermore, it is possible to provide an electronic device including a housing, an electronic component disposed inside the housing, and the evaporation chamber disposed on the electronic component.

[0020] Another method disclosed herein is a sheet for an evaporation chamber, which has a hollow portion for injecting a working fluid, wherein a first flow path and a liquid flow path portion adjacent to the first flow path are provided in the hollow portion, a second flow path and a heat insulating portion are provided in the liquid flow path portion, and the heat insulating portion is not connected to the first flow path and the second flow path. The sheet for an evaporation chamber is composed of three overlapping sheets, and on a sheet arranged in the center of the three sheets, a first flow path is formed in a manner that penetrates the sheet in a thickness direction and extends along a surface of the sheet, a second flow path is provided on a surface on one side in a thickness direction of the liquid flow path portion of the sheet arranged in the center, and a heat insulating portion is provided on a surface on the other side.

[0021] Another embodiment of the present invention is an evaporation chamber, which has a working fluid sealed in a confined space, wherein a first flow path and a liquid flow path portion adjacent to the first flow path are provided in the confined space, a second flow path and an introduction portion are provided on the liquid flow path portion, the introduction portion protrudes toward the first flow path side on a boundary surface with the first flow path, the introduction portion has an introduction surface extending from a top most protruding toward the first flow path side toward the second flow path, the evaporation chamber is composed of three overlapping sheets, on a sheet arranged in the center of the three sheets, the first flow path is formed in a manner that penetrates the sheet in the thickness direction and extends along the surface of the sheet, and the second flow path is provided on the surface of at least one side in the thickness direction of the liquid flow path portion of the sheet arranged in the center.

[0022] Furthermore, it is possible to provide an electronic device including a housing, an electronic component disposed inside the housing, and the evaporation chamber disposed on the electronic component.

[0023] Another embodiment of the present invention is a sheet for an evaporation chamber, which has a hollow portion for injecting a working fluid, wherein a first flow path and a liquid flow path portion adjacent to the first flow path are provided in the hollow portion, a second flow path and an introduction portion are provided on the liquid flow path portion, the introduction portion protrudes toward the first flow path side on a boundary surface with the first flow path, the introduction portion has an introduction surface extending from a top portion most protruding toward the first flow path side toward the second flow path, the sheet for an evaporation chamber is composed of three overlapping sheets, and on a sheet arranged in the center of the three sheets, the first flow path is formed in a manner that penetrates the sheet in the thickness direction and extends along the surface of the sheet, and a second flow path is provided on a surface of at least one side in the thickness direction of the liquid flow path portion of the sheet arranged in the center.

[0024] Another embodiment of the present invention is an evaporation chamber, which has a working fluid sealed in a confined space, wherein a first flow path and a liquid flow path portion adjacent to the first flow path are provided in the confined space, and a second flow path is provided on the liquid flow path portion on at least one side in the thickness direction of the evaporation chamber, and the evaporation chamber is formed by stacking a first sheet, a second sheet and a third sheet, wherein the third sheet is arranged between the first sheet and the second sheet, and a first flow path is formed on the third sheet in a manner that penetrates the sheet in the thickness direction and extends along the surface of the sheet, and at least one of the first sheet and the second sheet is formed by stacking an inner sheet on the third sheet side and a reinforcing sheet on the opposite side to the third sheet side, and the yield strength of the reinforcing sheet is higher than the yield strength of the inner sheet.

[0025] Another embodiment of the present invention is an evaporation chamber, which seals a working fluid in a confined space, wherein the confined space is provided with a first flow path and a liquid flow path portion adjacent to the first flow path, and the liquid flow path portion is provided with a second flow path on at least one side in the thickness direction of the evaporation chamber, and the evaporation chamber is formed by stacking a first sheet, a second sheet and a third sheet, wherein the third sheet is arranged between the first sheet and the second sheet, and the first flow path is formed on the third sheet in a manner that penetrates the sheet in the thickness direction and extends along the surface of the sheet, and at least one of the first sheet and the second sheet is formed by stacking an inner sheet on the third sheet side, a reinforcing sheet on the opposite side of the third sheet side, and a barrier sheet arranged between the inner sheet and the reinforcing sheet, the yield strength of the reinforcing sheet is higher than the yield strength of the inner sheet, and the barrier sheet contains at least one of tungsten, titanium, tantalum and molybdenum.

[0026] Effects of the Invention

[0027] According to the present disclosure, the heat transport capacity of the evaporation chamber can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a perspective view of the evaporation chamber 1 .

[0029] Figure 2 It is an exploded perspective view of the evaporation chamber 1 .

[0030] Figure 3 This is a diagram of the third sheet 30 as viewed from the z direction.

[0031] Figure 4 It is from Figure 3 View from the opposite side.

[0032] Figure 5 is a cross-sectional view of the third sheet 30 .

[0033] Figure 6 is another cross-sectional view of the third sheet 30 .

[0034] exist Figure 7 middle, Figure 7 (a) and Figure 7 (b) is a cross-sectional view focusing on the peripheral liquid flow path portion 34.

[0035] Figure 8 This is a partially enlarged view of the outer peripheral liquid flow path section 34 as viewed from the z direction.

[0036] Fig. 9 This is a partially enlarged view of another example of the peripheral liquid flow path portion as viewed from the z direction.

[0037] Fig.10 It is a diagram for explaining another example of the peripheral liquid flow path portion.

[0038] Fig.11 It is a diagram for explaining another example of the peripheral liquid flow path portion.

[0039] Fig.12 It is a diagram for explaining another example of the peripheral liquid flow path portion.

[0040] exist Fig.13 middle, Fig.13 (a) and Fig.13 (b) is a cross-sectional view focusing on the inner liquid flow path portion 38.

[0041] Fig.14 This is a partially enlarged view of the inner liquid flow path section 38 as viewed from the z direction.

[0042] Fig.15 is a cross-sectional view of the evaporation chamber 1 .

[0043] Fig.16 is another cross-sectional view of the evaporation chamber 1 .

[0044] exist Fig.17 middle, Fig.17 (a) and Fig.17 (b) is to Fig.15 An enlarged cross-sectional view of a portion of Fig.18 middle, Fig.18 (a) and Fig.18 (b) is to Fig.15 An enlarged cross-sectional view of a portion of the

[0045] Fig.19 It is a diagram for explaining the electronic device 50 .

[0046] Fig. 20 It is a diagram for explaining the flow of the working fluid.

[0047] Fig.21 This is a diagram for explaining an example based on four slices.

[0048] Fig. 22It is an exploded perspective view of the evaporation chamber 51 of the second embodiment.

[0049] Fig.23 It is a diagram for explaining the sealed space of the evaporation chamber 51 .

[0050] Fig.24 is a cross-sectional view of the evaporation chamber 51 .

[0051] Fig.25 Yes Fig.24 A magnified portion of the image.

[0052] Fig.26 is a perspective view of the evaporation chamber 101 .

[0053] Fig. 27 It is an exploded perspective view of the evaporation chamber 101 .

[0054] Fig.28 This is a diagram of the third sheet 130 as viewed from the z direction.

[0055] Fig.29 It is from Fig.28 View from the opposite side.

[0056] Fig.30 is a cross-sectional view of the third sheet 130 .

[0057] Fig.31 is another cross-sectional view of the third sheet 130 .

[0058] Fig.32 This is a cross-sectional view focusing on the peripheral liquid flow path portion 134 .

[0059] Fig.33 It is a diagram for explaining the peripheral liquid flow path section 134 .

[0060] Fig.34 It is a cross-sectional view of a portion where the pillar 136 a is arranged.

[0061] Fig.35 This is a cross-sectional view focusing on the inner liquid flow path portion 138 .

[0062] Fig.36 It is a diagram for explaining the inner liquid flow path section 138 .

[0063] Fig.37 It is a cross-sectional view of a portion where the pillar 140 a is arranged.

[0064] Fig.38 is a cross-sectional view of the evaporation chamber 101 .

[0065] Fig.39 is another cross-sectional view of the evaporation chamber 101 .

[0066] Fig.40 Yes Fig.38 A magnified portion of the image.

[0067] Fig.41 It is an enlarged cross-sectional view of a portion where the pillar 136 a is arranged.

[0068] Fig.42 Yes Fig.38 A magnified portion of the image.

[0069] Fig.43 It is a cross-sectional view showing an enlarged portion where the pillar 140 a is arranged.

[0070] Fig.44 This is a diagram illustrating another method.

[0071] Fig.45 This is a diagram illustrating another method.

[0072] Fig.46 This is a diagram illustrating another method.

[0073] Fig.47 This is a diagram illustrating another method.

[0074] exist Fig.48 middle, Fig.48 (a) and Fig.48 (b) is a cross-sectional view focusing on the inner liquid flow path portion 238.

[0075] exist Fig.49 middle, Fig.49 (a) and Fig.49 (b) is a diagram showing the periphery of the inner liquid flow path portion 238 in the cross section of the evaporation chamber 201 .

[0076] Fig.50 It is a diagram for explaining a preferred embodiment in cross section.

[0077] exist Fig.51 middle, Fig.51 (a) and Fig.51 (b) is a diagram for explaining another method of the introduction part.

[0078] exist Fig.52 middle, Fig.52 (a) and Fig.52 (b) is a diagram for explaining another method of the introduction part.

[0079] exist Fig.53 middle, Fig.53 (a) and Fig.53 (b) is a diagram for explaining another method of the introduction part.

[0080] exist Fig.54 middle, Fig.54 (a) and Fig.54(b) is a diagram for explaining another method of the introduction part.

[0081] exist Fig.55 middle, Fig.55 (a) and Fig.55 (b) is a diagram for explaining another method of the introduction part.

[0082] exist Fig.56 middle, Fig.56 (a) and Fig.56 (b) is a diagram for explaining another method of the introduction part.

[0083] exist Fig.57 middle, Fig.57 (a) and Fig.57 (b) is a diagram for explaining another method of the introduction part.

[0084] Fig.58 is a cross-sectional view of the evaporation chamber 301 .

[0085] Fig.59 It is a diagram for explaining the manufacturing process of the evaporation chamber 301 .

[0086] Fig.60 It is a diagram for explaining the manufacturing process of the evaporation chamber 301 .

[0087] Fig.61 It is a diagram for explaining the manufacturing process of the evaporation chamber 301 .

[0088] Fig.62 It is a diagram for explaining the manufacturing process of the evaporation chamber 301 .

[0089] Fig.63 It is a diagram for explaining the manufacturing process of the evaporation chamber 301 .

[0090] Fig.64 It is a diagram for explaining the manufacturing process of the evaporation chamber 301 .

[0091] Fig.65 is a cross-sectional view of the evaporation chamber 301 ′.

[0092] Fig.66 is a cross-sectional view of the evaporation chamber 301″.

[0093] Fig.67 is a cross-sectional view of the evaporation chamber 401 .

[0094] Fig.68 It is a diagram for explaining the inner liquid flow path portion 538 in the evaporation chamber 501 .

[0095] Fig.69 Yes Description Fig.68 A diagram showing the morphology of a pair of liquid flow path protrusions.

[0096] Fig.70 Yes Description Fig.69 A diagram illustrating the effect of a pair of liquid flow path projections shown.

[0097] Fig.71 Yes Description Fig.68 The figure shows the actual form of the liquid flow path convex portion.

[0098] Fig.72 It is a diagram for explaining the inner liquid flow path portion 538 ′ in the evaporation chamber 501 ′.

[0099] Fig.73 It is a diagram for explaining the inner liquid flow path portion 538 ″ in the evaporation chamber 501 ″. DETAILED DESCRIPTION

[0100] The present disclosure is described below based on the method shown in the accompanying drawings. In the following drawings, the size or ratio of the components is sometimes changed or exaggerated for easy understanding. In addition, for ease of observation, the illustration of the parts that do not need to be explained and the repeated reference numerals are sometimes omitted.

[0101] In addition, the terms such as "parallel", "perpendicular", "same", etc., and the values ​​of lengths, angles, and physical properties used in this specification to specify the shape or geometric conditions and physical properties and their degree, are not limited to strict meanings, but are interpreted in the range of the degree to which the same function can be expected. In addition, in the drawings, for the sake of clarity, the shapes of multiple parts that can expect the same function are regularly recorded, but are not limited to strict meanings. Within the range where the function can be expected, the shapes of the parts can be different from each other. In addition, in the drawings, for convenience, only the boundary lines representing the bonding surfaces between the components are shown as straight lines, but they are not limited to strict straight lines. Within the range where the desired bonding performance can be expected, the shape of the boundary line is arbitrary.

[0102] 1. Method 1

[0103] 1.1. Method 1a

[0104] [Components]

[0105] exist Figure 1 The evaporation chamber 1 of the embodiment 1a is shown in FIG. Figure 2 , an exploded perspective view of the evaporation chamber 1 is shown. In these figures and the following figures, arrows (x, y, z) indicating directions corresponding to the three-dimensional orthogonal coordinate system are also shown as needed for convenience. Here, the xy in-plane direction is the plate surface direction of the plate-shaped evaporation chamber 1, and the z direction is the thickness direction.

[0106] according to Figure 1 , Figure 2It can be seen that the evaporation chamber 1 of this embodiment has a first sheet 10, a second sheet 20, and a third sheet 30 (sometimes also described as "intermediate sheet 30"). And, as described later, these sheets are overlapped and joined together (diffusion bonding, brazing, etc.), thereby forming an evaporation chamber sheet such that a hollow portion based on the shape of the third sheet 30 is formed between the first sheet 10 and the second sheet 20. And, the working fluid is sealed in the hollow portion, thereby forming a closed space 2 (for example, see Fig.15 ) and becomes evaporation chamber 1.

[0107] <First film>

[0108] In this embodiment, the first sheet 10 is a member whose front and back surfaces (surfaces on one side and the other side in the thickness direction, inner surface 10a and outer surface 10b) are flat and the whole sheet is formed. The first sheet 10 is composed of flat surfaces on both the front and back surfaces, and has: a flat inner surface 10a; a flat outer surface 10b on the opposite side of the inner surface 10a; and an end surface 10c, which is formed to have a thickness across the inner surface 10a and the outer surface 10b.

[0109] In addition, the first sheet 10 includes a main body 11 and an injection portion 12 .

[0110] The main body 11 is a sheet-like portion that forms a hollow portion and a sealed space, and in the present embodiment, is a rectangular shape with rounded corners (having so-called R corners) when viewed from above.

[0111] The main body 11 of the first sheet 10 may be a quadrilateral as in the present embodiment, or may be a shape required for each evaporation chamber. For example, it may be a circle, an ellipse, a triangle, other polygons, or a shape having a curved portion (e.g., an L-shape, a T-shape, a crank shape, a U-shape, etc.). In addition, it may be a shape formed by combining at least two of these shapes.

[0112] The injection portion 12 is a portion for injecting the working fluid into the formed hollow portion, and in the present embodiment, is a sheet-like shape of a quadrangular shape in plan view that protrudes from one side of the main body 11 in plan view in a rectangular shape.

[0113] The thickness of such a first sheet 10 is not particularly limited, but is preferably less than 1.0 mm, may be less than 0.75 mm, or may be less than 0.5 mm. On the other hand, the thickness is preferably greater than 0.01 mm, may be greater than 0.05 mm, or may be greater than 0.1 mm. The range of the thickness may be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. In addition, the range of the thickness may be limited by a combination of any two of the plurality of upper limit candidate values, or a combination of any two of the plurality of lower limit candidate values.

[0114] This increases the number of applications where the evaporation chamber is used as a thin evaporation chamber.

[0115] The material constituting the first sheet 10 is not particularly limited, but is preferably a metal with high thermal conductivity. Examples of such materials include copper and copper alloys. However, such materials do not necessarily have to be metal materials, and materials such as AlN and Si may also be used. 3 N 4 or Al 2 O 3 Ceramics such as polyimide or epoxy resin.

[0116] Furthermore, a material obtained by laminating two or more materials may be used in one sheet, and different materials may be used depending on the location.

[0117] The first sheet 10 may be a single layer or a plurality of sheets may be laminated. For example, a sheet (covering material) in which a plurality of layers having different strengths are laminated may be used.

[0118] <Second film>

[0119] In this embodiment, the second sheet 20 is also a sheet-shaped component whose front and back surfaces are flat. The second sheet 20 is composed of flat surfaces on both the front and back surfaces, and has: a flat inner surface 20a; a flat outer surface 20b on the opposite side of the inner surface 20a; and an end surface 20c, which is formed to have a thickness across the inner surface 20a and the outer surface 20b.

[0120] Moreover, the second sheet 20 also includes a main body 21 and an injection portion 22 similarly to the first sheet 10 .

[0121] The second sheet 20 can be considered similarly to the first sheet 10. However, the thickness or material of the second sheet 20 does not need to be the same as that of the first sheet 10, and may be different in structure.

[0122] The second sheet 20 may be a single layer or a plurality of sheets laminated together. For example, a sheet (covering material) in which a plurality of layers having different strengths are laminated together may be used.

[0123] <Third film>

[0124] In this embodiment, the third sheet 30 is a sheet sandwiched between the inner surface 10 a of the first sheet 10 and the inner surface 20 a of the second sheet 20 and overlapped therewith, and has a structure for forming the closed space 2 through which the working fluid moves.

[0125] Figure 3 , Figure 4 A view showing the third sheet 30 viewed from above (viewed from the z direction) is shown. Figure 3is a diagram of the surface that coincides with the first sheet 10, Figure 4 This is a diagram of the surface overlapping with the second sheet 20 .

[0126] In addition, Figure 5 The figure shows the Figure 3 C 1 -C 1 A cross-sectional view of the line shown in Figure 6 The figure shows the Figure 3 C 2 -C 2 In addition, the parts related to the cut surface in the cross-sectional view are marked with hatching (oblique lines), and the parts that need to be shown in the parts that are not related to the cut surface but are shown in the cross-sectional view are not marked with hatching. The same is true in the following drawings.

[0127] Furthermore, the third sheet 30 may be a single layer or a plurality of sheets stacked together. When a plurality of sheets are stacked together, the plurality of sheets may be stacked to form the following configuration, or the plurality of sheets may be processed separately and then overlapped to form the following configuration.

[0128] In this embodiment, the third sheet 30 includes: a first surface 30a overlapping with the inner surface 10a of the first sheet 10; a second surface 30b overlapping with the inner surface 20a of the second sheet 20; and an end surface 30c, which is formed to have a thickness extending over the first surface 30a and the second surface 30b. Figure 3 The first surface 30a appears in Figure 4 A second surface 30b appears in the.

[0129] In addition, the third sheet 30 includes a main body 31 and an injection portion 32 .

[0130] The main body 31 is a sheet-shaped portion that forms a hollow portion in the evaporation chamber sheet and a sealed space in the evaporation chamber 1 , and in this embodiment, is a rectangle with rounded corners (so-called R corners) in a plan view.

[0131] The main body 31 may be a quadrilateral as in the present embodiment, or may be a shape required for the evaporation chamber. For example, it may be a circle, an ellipse, a triangle, other polygons, or a shape having a curved portion (e.g., an L-shape, a T-shape, a crank shape, a U-shape, etc.). In addition, it may be a shape formed by combining at least two of these shapes.

[0132] The injection portion 32 is a portion for injecting working fluid into the formed hollow portion, and in this embodiment, is a sheet-shaped quadrilateral in plan view protruding from one side of the rectangular main body 31 in plan view. In addition, in the injection portion 32, a groove 32a is provided on the second surface 30b side, which is connected from the end surface 30c to the main body 31.

[0133] The thickness of the third sheet 30 may be 0.03 mm or more and 0.8 mm or less. The thickness of the third sheet 30 is preferably thicker than the first sheet 10 and the second sheet 20. This allows a larger cross section of the vapor flow path 4 described later to achieve smoother movement of the working fluid.

[0134] The material of the third sheet 30 can be considered in the same way as the first sheet 10 and the second sheet 20 .

[0135] The main body 31 has a structure for reflux of the working fluid. Specifically, the main body 31 includes an outer peripheral joint portion 33 , an outer peripheral liquid flow path portion 34 , an inner liquid flow path portion 38 , a vapor flow path groove 42 , and a vapor flow path connecting groove 44 .

[0136] The evaporation chamber 1 of this embodiment includes a vapor flow path 4, which is a first flow path through which the vapor of the working fluid passes (see Fig.15 and condensate flow path 3, which is a second flow path for the condensate formed by condensation of the working fluid (reference Fig.18 In addition, the vapor flow path groove 42 of the third sheet 30 forms the vapor flow path 4, and the liquid flow path groove 35 and the liquid flow path groove 36 (see Figure 7 etc.), and the liquid flow path grooves 39 and 40 (see Fig.13 (a) Fig.13 (b), etc.) to form a condensate flow path 3.

[0137] <<Peripheral joint>>

[0138] The peripheral joint portion 33 is a portion provided along the periphery of the main body 31, and includes: a peripheral joint surface 33a provided on the first surface 30a of the main body 31; and a peripheral joint surface 33b provided on the second surface 30b. The peripheral joint surface 33a overlaps with the peripheral portion of the inner surface 10a of the first sheet 10, and the peripheral joint surface 33b overlaps with the peripheral portion of the inner surface 20a of the second sheet 20, and they are respectively joined (diffusion bonding, brazing, etc.) together, thereby forming a hollow portion based on the shape of the third sheet 30 between the first sheet 10 and the second sheet 20, and the working fluid is sealed here, thereby forming a closed space.

[0139] About Figures 3 to 7 China 1 The width (the size in the direction perpendicular to the direction in which the peripheral joint portion 33 extends) of the peripheral joint portion 33 (the peripheral joint surface 33a and the peripheral joint surface 33b) shown in FIG. 1 can be appropriately set as needed, but the width W 1It is preferably 3.0 mm or less, and may be 2.5 mm or less, or 2.0 mm or less. 1 If the width W is greater than 3.0 mm, the internal volume of the closed space becomes small, and there is a concern that a sufficient vapor flow path or condensate flow path cannot be ensured. 1 It is preferably 0.1 mm or more, and may be 0.4 mm or more, or 0.8 mm or more. 1 If the width is less than 0.1 mm, there is a concern that the bonding area may be insufficient when positional deviation between the sheets occurs during bonding. 1 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 1 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0140] Here, the width of the outer peripheral joint surface 33a and the width of the outer peripheral joint surface 33b are both expressed as W. 1 However, the width of the outer peripheral joint surface 33a and the width of the outer peripheral joint surface 33b do not have to be the same, and they may be different widths.

[0141] <<Peripheral liquid flow path section>>

[0142] The peripheral liquid flow path portion 34 functions as a liquid flow path portion and is a portion constituting a portion of the condensate flow path 3, which is a second flow path through which the working fluid passes when condensing and liquefying. Figure 7 (a) Figure 7 In (b), Figure 5 Arrow C 3 The indicated portion is shown enlarged. Figure 8 Shown from Figure 7 Arrow C 4 , which is an enlarged view of the peripheral liquid flow path section 34 viewed from above (viewed from the z direction). Figure 8 A part of the peripheral liquid flow path section 34 viewed from the first surface 30 a side is shown.

[0143] Here, Figure 7 (a) is along Figure 8 C 15 -C 15 Cross-sectional view as viewed from the arrow. Figure 7 (b) is along Figure 8 C 16 -C 16 Cross-sectional view as viewed from the arrow. Figure 7(a) is a cross section in which the convex portion 35a is arranged on the side of the introduction portion 37. Figure 7 (b) is a cross section in which the communication opening 35b is arranged on the introduction portion 37 side.

[0144] As can be seen from these figures, the peripheral liquid flow path portion 34 is a portion formed along the inner side of the peripheral joint portion 33 in the main body 31 and provided along the periphery of the portion that becomes the enclosed space 2. In addition, on the first surface 30a and the second surface 30b of the peripheral liquid flow path portion 34, a plurality of grooves extending along the peripheral direction of the main body 31, namely, liquid flow path grooves 35 (on the first surface 30a side) and liquid flow path grooves 36 (on the second surface 30b side), are respectively formed, and the plurality of liquid flow path grooves 35 and liquid flow path grooves 36 are arranged at prescribed intervals in a direction different from the direction in which the liquid flow path grooves 35 and liquid flow path grooves 36 extend. Therefore, as Figures 5 to 7 It can be seen that in the cross section of the outer peripheral liquid flow path section 34 , on the first surface 30 a side, the liquid flow path grooves 35 as recessed portions and the projections 35 a between the liquid flow path grooves 35 are formed in a repetitive manner.

[0145] Furthermore, on the second surface 30b side, the liquid flow path grooves 36 as recessed portions and the convex portions 36a as the liquid flow path grooves 36 are formed in a repetitive manner. That is, in this embodiment, the liquid flow path grooves that become the condensate flow path 3 are provided on one side and the other side (front and back) in the thickness direction (z direction), respectively.

[0146] In this way, the first surface 30a and the second surface 30b are provided with a plurality of liquid flow path grooves 35 and 36, respectively. Thus, the total flow path cross-sectional area of ​​the condensate flow path 3 as a whole is ensured to be of an appropriate size, so that the required flow rate of condensate can flow therethrough, and the depth and width of each of the liquid flow path grooves 35 and 36 can be reduced, thereby reducing the condensate flow path 3 as the second flow path (see Fig.17 (a) Fig.17 (b), etc.) and utilize the larger capillary force.

[0147] Furthermore, the depth and width may be changed on one side and the other side (front and back), that is, in the liquid flow channel 35 and the liquid flow channel 36. Thus, the flow rate and capillary force can be adjusted independently according to the final product.

[0148] Here, since the liquid flow path grooves 35 and 36 are grooves, they have a bottom in their cross-sectional shape, and the opposite side facing the bottom is an opening. As described later, the first sheet 10 or the second sheet 20 overlaps with the third sheet 30, whereby the opening is blocked and becomes the condensate flow path 3.

[0149] In this embodiment, the cross-section of the liquid flow path groove 35 and the liquid flow path groove 36 is a semi-elliptical shape. The cross-sectional shape is not limited to a semi-elliptical shape, but may be a circle, a quadrilateral such as a rectangle, a square, a trapezoid, or other polygons, or a shape formed by combining any plurality of these shapes.

[0150] In addition, in the present embodiment, in the peripheral liquid flow path portion 34, according to Figure 8 It can be seen that the adjacent liquid flow path grooves 35 are connected through the connecting opening 35b at a predetermined interval. As a result, the amount of condensate is equalized between the plurality of liquid flow path grooves 35, and the condensate can flow efficiently, thereby achieving smooth reflux of the working fluid. Figure 8 In the figure, the first surface 30a side is shown, so the liquid flow path groove 35, the protrusion 35a and the connecting opening portion 35b are explained, but the liquid flow path groove 36 and the protrusion 36a arranged on the second surface 30b side can also be considered in the same way. It can be considered that a connecting opening portion 36b not shown in the figure is provided and is the same as the liquid flow path groove 35, the protrusion 35a and the connecting opening portion 35b.

[0151] In this method, if Figure 8 As shown in FIG. 1 , the groove sandwiching one liquid flow path groove 35 may be provided with communication openings 35b at different positions in the direction in which the liquid flow path groove 35 extends. That is, the convex portions 35a and the communication openings 35b are alternately provided in a direction perpendicular to the direction in which the liquid flow path groove extends. However, this is not limited to this. For example, Fig. 9 As shown, the communication openings 35 b may be arranged so as to face each other at the same position in the direction in which the liquid flow path groove 35 extends, sandwiching the liquid flow path groove 35 .

[0152] In addition, it can also be formed as, for example Figures 10 to 12 In the manner described. Figures 10 to 12 Such a diagram is shown in Figure 8 The same viewing angle shows a liquid flow path groove 35, two convex portions 35a sandwiching the liquid flow path groove 35, and a communication opening 35b provided on each convex portion 35a. In this viewing angle (top view), the shape of the convex portion 35a in these figures is the same as that in FIG. Figure 8 The examples are different.

[0153] That is, in Figure 8 In the convex portion 35a shown in FIG. 1 , the width of the end portion where the communicating opening 35b is formed is also the same as that of the other portions and is constant. Figures 10 to 12In the convex portion 35a of the shape shown in FIG. 1 , the width at the end portion where the communicating opening portion 35b is formed is formed to be smaller than the maximum width of the convex portion 35a. More specifically, Fig.10 This is an example where the corner at the end is in an arc shape, and an R (arc) is formed at the corner, whereby the width of the end becomes smaller. Fig.11 This is an example of reducing the width of the end by making the end semicircular. Fig.12 This is an example of tapering in a manner that the end becomes sharp.

[0154] like Figures 10 to 12 As shown, in the convex portion 35a, the width at the end portion where the communicating opening portion 35b is formed is formed to be smaller than the maximum width of the convex portion 35a, thereby making it easy for the working fluid to move in the communicating opening portion 35b, thereby facilitating the movement of the working fluid toward the adjacent condensate flow path.

[0155] In addition, in this method, if Figure 5 As shown in the figure, an introduction portion 37 is provided in the peripheral liquid flow path portion 34. The introduction portion 37 is a portion formed on the boundary surface with the vapor flow path groove 42, and is a portion protruding toward the vapor flow path groove 42 side. In this embodiment, a top portion 37a that is most protruding is provided in the center in the thickness direction (z direction), and an arc-shaped introduction surface 37b that is recessed toward the peripheral liquid flow path portion 34 side in a cross-sectional view is provided from the top portion 37a toward the first surface 30a and the second surface 30b side (z direction).

[0156] The form of the introduction part 37 is not limited thereto, and the position of the top 37a can be any position in the z direction, and the introduction surface 37b can be a straight line or a curve that is not an arc in the cross section. In addition, the top 37a can be a point in the cross-sectional view or have a length.

[0157] According to such an introduction portion 37, due to the above-mentioned shape, the condensate is easily concentrated on the introduction surface 37b, and the introduction portion 37 facilitates the movement of the working fluid between the condensate flow path 3 and the vapor flow path 4, thereby further improving the heat transfer capacity.

[0158] The peripheral liquid flow path portion 34 having the above structure may also have the following structure. Moreover, here, for reference to the drawings, only the first surface 30a side is described, but the second surface 30b side (liquid flow path groove 36, convex portion 36a and communication opening portion 36b) can also be considered in the same way. However, this does not mean that the shape of the first surface 30a side and the shape of the second surface 30b side must be the same, and the shapes of the first surface 30a side and the second surface 30b side can be the same or different.

[0159] About Figures 3 to 5 , Figure 7 (a) with W 2 The width of the peripheral liquid flow path portion 34 (the size in the direction in which the liquid flow path grooves 35 and 36 are arranged) can be appropriately set according to the size of the entire evaporation chamber, etc., but the width W 2 It is preferably 3.0 mm or less, and may be 1.5 mm or less, or 1.0 mm or less. 2 If the width W exceeds 3.0 mm, there is a concern that the space for the inner liquid flow path or the vapor flow path may become insufficient. 2 It is preferably 0.05 mm or more, and may be 0.1 mm or more, or 0.2 mm or more. 2 If the width W is less than 0.05 mm, there is a concern that the amount of liquid flowing back to the outside may not be sufficient. 2 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 2 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0160] Here, the width of the outer peripheral liquid flow path portion 34 on the first surface 30a side and the width on the second surface 30b side are both W. 2 However, the width of the outer peripheral joint surface 33a and the width of the outer peripheral joint surface 33b do not have to be the same, and they may be different widths.

[0161] Regarding the liquid flow path groove 35, Figure 7 (a) Figure 8 China 3 The groove width (the size in the direction in which the liquid flow path grooves 35 are arranged and the width on the opening surface of the groove) is preferably 1000 μm or less, and may be 500 μm or less, or 200 μm or less. 3 The width W is preferably 20 μm or more, and may be 45 μm or more, or 60 μm or more. 3 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 3 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0162] In addition, Figure 7 (a) D 1The depth of the groove indicated is preferably 200 μm or less, and may be 150 μm or less, or 100 μm or less. 1 The depth D is preferably 5 μm or more, and may be 10 μm or more, or 20 μm or more. 1 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 1 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0163] With the above configuration, the capillary force of the condensate flow path required for reflux can be more strongly exerted.

[0164] From the viewpoint of exerting the capillary force of the condensate flow path more strongly, the groove width W is 3 Divide by the depth D 1 The aspect ratio (aspect ratio) on the flow path cross section represented by the obtained value is preferably greater than 1.0. The ratio may be greater than 1.5, or greater than 2.0. Alternatively, the aspect ratio may be less than 1.0. The ratio may be less than 0.75, or less than 0.5.

[0165] Among them, from the perspective of manufacturing, W 3 Preferably greater than D 1 From this point of view, the aspect ratio is preferably greater than 1.3.

[0166] In addition, Figure 7 (a) P 1 The pitch between adjacent liquid flow path grooves 35 in the plurality of liquid flow path grooves 35 shown is preferably 1100 μm or less, may be 550 μm or less, or may be 220 μm or less. 1 It is preferably 30 μm or more, and may be 55 μm or more, or 70 μm or more. 1 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 1 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0167] This can improve the density of the condensate flow path and suppress the condensate flow path from being crushed due to deformation during joining or assembly.

[0168] Regarding the communication opening 35b, Figure 8 L1 The size of the opening along the direction in which the liquid flow channel 35 extends is preferably 1100 μm or less, and may be 550 μm or less, or 220 μm or less. 1 It is preferably 30 μm or more, and may be 55 μm or more, or 70 μm or more. 1 The range of L can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 1 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0169] In addition, Figure 8 L 2 The distance between adjacent communication openings 35b in the direction in which the liquid flow path groove 35 extends is preferably 2700 μm or less, and may be 1800 μm or less, or 900 μm or less. 2 It is preferably 60 μm or more, and may be 110 μm or more, or 140 μm or more. 2 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 2 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0170] Regarding the introduction section 37, Figure 7 (a) with W 4 The protrusion amount W (the distance from the end of the convex portion 35a to the top 37a) is preferably 1000 μm or less, and may be 500 μm or less, or 300 μm or less. 4 It is preferably 20 μm or more, and may be 45 μm or more, or 60 μm or more. 4 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 4 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0171] <<Inner liquid flow path>>

[0172] return Figures 1 to 5The inner liquid flow path portion 38 is described. The inner liquid flow path portion 38 also functions as a liquid flow path portion and is a portion constituting a part of the condensate flow path 3 and the introduction portion 41, wherein the condensate flow path 3 is a second flow path for the working fluid to pass through when condensing and liquefying. Fig.13 (a) Fig.13 In (b), Figure 5 Arrow C 5 The indicated portion is shown enlarged. Fig.13 (a) Fig.13 (b) also shows the cross-sectional shape of the inner liquid flow path portion 38. Fig.14 Shown from Fig.13 Arrow C 6 1 is an enlarged view of the inner liquid flow path section 38 viewed from above as viewed in the direction indicated.

[0173] Here, Fig.13 (a) is along Fig.14 C 17 -C 17 Cross-sectional view as viewed from the arrow. Fig.13 (b) is along Fig.14 C 18 -C 18 Cross-sectional view as viewed from the arrow. Fig.13 (a) is a cross section in which the convex portion 39a is arranged on the side of the introduction portion 41. Fig.13 (b) is a cross section in which the communication opening 39b is arranged on the introduction portion 41 side.

[0174] As can be seen from these figures, the inner liquid flow path portion 38 is a portion formed inside the ring of the annular outer peripheral liquid flow path portion 34 in the main body 31. The inner liquid flow path portion 38 of this embodiment extends in a direction (x direction) parallel to the long side of the rectangular shape of the main body 31 when viewed from above (when viewed from the z direction), and a plurality of (three in this embodiment) inner liquid flow path portions 38 are arranged at predetermined intervals in a direction (y direction) parallel to the short side thereof.

[0175] On the first surface 30a and the second surface 30b of the inner liquid flow path portion 38, a plurality of grooves extending along the direction in which the inner liquid flow path portion 38 extends, namely, liquid flow path grooves 39 (on the first surface 30a side) and liquid flow path grooves 40 (on the second surface 30b side), are respectively formed, and the plurality of liquid flow path grooves 39 and liquid flow path grooves 40 are arranged at prescribed intervals in a direction different from the direction in which the liquid flow path grooves 39 and liquid flow path grooves 40 extend.

[0176] Therefore, according to Fig.13As can be seen from the figure, in the cross section of the inner liquid flow path portion 38, on the first surface 30a side, the liquid flow path groove 39 as a concave portion and the convex portion 39a as between the liquid flow path grooves 39 are formed in a repeated concave-convex manner. Moreover, on the second surface 30b side, the liquid flow path groove 40 as a concave portion and the convex portion 40a as between the liquid flow path grooves 40 are formed in a repeated concave-convex manner. That is, in this embodiment, the liquid flow path grooves that become the condensate flow path 3 are provided on both one side and the other side (front and back sides) in the thickness direction (z direction).

[0177] In this way, the first surface 30a and the second surface 30b are provided with a plurality of liquid flow path grooves 39 and liquid flow path grooves 40, respectively. Thus, the total flow path cross-sectional area of ​​the condensate flow path 3 as a whole is ensured to be of an appropriate size, so that the required flow rate of condensate can flow therethrough, and the depth and width of each of the liquid flow path grooves 39 and liquid flow path grooves 40 can be reduced, thereby reducing the condensate flow path 3 as the second flow path (see Fig.18 etc.) and utilize the larger capillary force.

[0178] Here, since the liquid flow path grooves 39 and 40 are grooves, they have a bottom in their cross-sectional shape, and the opposite side facing the bottom is an opening. As described later, the first sheet 10 or the second sheet 20 overlaps with the third sheet 30, whereby the opening is blocked and becomes the condensate flow path 3.

[0179] In this embodiment, the cross-section of the liquid flow path groove 39 and the liquid flow path groove 40 is a semi-elliptical shape. The cross-sectional shape is not limited to a semi-elliptical shape, but may be a circle, a quadrilateral such as a rectangle, a square, a trapezoid, or other polygons, or a shape formed by combining any plurality of these shapes.

[0180] In addition, in this embodiment, in the inner liquid flow path portion 38, according to Fig.14 It can be seen that the adjacent liquid flow path grooves 39 are connected through the connecting opening 39b at a predetermined interval. As a result, the amount of condensate is equalized between the plurality of liquid flow path grooves 39, and the condensate can flow efficiently, thereby achieving smooth reflux of the working fluid. Fig.14 In the figure, the first surface 30a side is shown, so the liquid flow path groove 39, the protrusion 39a and the connecting opening portion 39b are explained, but the liquid flow path groove 40 and the protrusion 40a arranged on the second surface 30b side can also be considered in the same way. It can be considered that a connecting opening portion 40b not shown in the figure is provided and is the same as the liquid flow path groove 39, the protrusion 39a and the connecting opening portion 39b.

[0181] In addition, the communication opening 39b may be formed similarly to the communication opening 35b. Fig. 9 In the example shown, the communication openings 39b are arranged in the same position in a direction perpendicular to the direction in which the liquid flow path grooves 39 and 40 extend. Figures 10 to 12 The shapes of the communicating opening portion 39b and the convex portion 39a are shown in FIG.

[0182] In addition, in this embodiment, an introduction portion 41 is provided in the inner liquid flow path portion 38. The introduction portion 41 is a portion formed on the boundary surface with the vapor flow path groove 42, and is a portion protruding toward the vapor flow path groove 42. In this embodiment, a top portion 41a that is most protruding is provided at the center in the thickness direction (z direction), and an arc-shaped introduction surface 41b that is recessed toward the inner liquid flow path portion 38 side in a cross-sectional view is provided from the top portion 41a toward the first surface 30a and the second surface 30b side (z direction).

[0183] The shape of the introduction part 41 is not limited thereto, and the position of the top 41a can be any position in the z direction, and the introduction surface 41b can be a straight line or a curve that is not an arc in the cross section. In addition, the top 41a can be a point in the cross section or have a length.

[0184] According to such an introduction portion 41, due to the above-mentioned shape, the condensate is easily concentrated on the introduction surface 41b, and the movement of the working fluid in the condensate flow path 3 and the vapor flow path 4 becomes smooth through the introduction portion 41, thereby further improving the heat transfer capacity.

[0185] The inner liquid flow path section 38 having the above-described structure preferably further has the following structure.

[0186] exist Figure 3 , Figure 4 , Figure 5 , Fig.13 (a) with W 5 The width of the inner liquid flow path portion 38 (the size in the direction in which the inner liquid flow path portion 38 and the vapor flow path groove 42 are arranged, and is the maximum value) is preferably 3000 μm or less, and may be 2000 μm or less, or 1500 μm or less. 5 The width W is preferably 100 μm or more, and may be 200 μm or more, or 400 μm or more. 5 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 5 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0187] In addition, Figure 3 , Figure 5 China-Israel 2 The pitch of the plurality of inner liquid flow path portions 38 shown is preferably 5000 μm or less, and may be 3500 μm or less, or 3000 μm or less. 2 It is preferably 200 μm or more, and may be 400 μm or more, or 800 μm or more. 2 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 2 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0188] This can reduce the flow resistance of the steam flow path, and enable the movement of the steam and the return of the condensate to be performed in a well-balanced manner.

[0189] The inner liquid flow path portion 38 having the above structure may also have the following structure. Here, only the first surface 30a side is described for reference to the drawings, but the second surface 30b side (liquid flow path groove 40, convex portion 40a and communication opening 40b) can also be considered in the same way. However, this does not mean that the shape of the first surface 30a side and the shape of the second surface 30b side must be the same, and the shapes of the first surface 30a side and the second surface 30b side can be the same or different.

[0190] Regarding the liquid flow path groove 39, Fig.13 (a) Fig.14 China 6 The groove width (the size in the direction in which the liquid flow path grooves 39 are arranged and the width on the opening surface of the groove) is preferably 1000 μm or less, and can be 500 μm or less, or 200 μm or less. 6 It is preferably 20 μm or more, and may be 45 μm or more, or 60 μm or more. 6 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 6 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0191] In addition, Fig.13 (a) D 2The depth of the liquid flow channel groove 39 shown is preferably 200 μm or less, and may be 150 μm or less, or 100 μm or less. 2 It is preferably 5 μm or more, and may be 10 μm or more, or 20 μm or more. 2 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 2 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0192] This allows the capillary force of the condensate flow path required for the reflux to be strongly exerted.

[0193] From the viewpoint of exerting the capillary force of the flow path more strongly, the groove width W 6 Divide by the depth D 2 The width-to-height ratio (aspect ratio) on the flow path cross section represented by the obtained value is preferably greater than 1.0. It may be greater than 1.5 or greater than 2.0. Alternatively, it may be less than 1.0, less than 0.75 or less than 0.5.

[0194] However, from the perspective of manufacturing, the groove width W 6 Preferably greater than the depth D 2 From this point of view, the aspect ratio is preferably greater than 1.3.

[0195] In addition, Fig.13 (a) P 3 The pitch between adjacent liquid flow path grooves 39 in the plurality of liquid flow path grooves 39 shown is preferably 1100 μm or less, may be 550 μm or less, or may be 220 μm or less. 3 It is preferably 30 μm or more, and may be 55 μm or more, or 70 μm or more. 3 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 3 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0196] This can improve the density of the condensate flow path and suppress the flow path from being crushed due to deformation during joining or assembly.

[0197] Furthermore, regarding the communication opening 39b, Fig.14 L3 The size of the opening along the direction in which the liquid flow channel 39 extends is preferably 1100 μm or less, and may be 550 μm or less, or 220 μm or less. 3 It is preferably 30 μm or more, and may be 55 μm or more, or 70 μm or more. 3 The range of L can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 3 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0198] In addition, Fig.14 L 4 The distance between adjacent communication openings 39b in the direction in which the liquid flow path groove 39 extends is preferably 2700 μm or less, and may be 1800 μm or less, or 900 μm or less. 4 It is preferably 60 μm or more, and may be 110 μm or more, or 140 μm or more. 4 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 4 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0199] The liquid flow path grooves 35 and 36, and the liquid flow path grooves 39 and 40 of the present embodiment described above are separated at equal intervals and arranged in parallel with each other, but are not limited to this. As long as the capillary action can be exerted, the spacing between the grooves can also be changed, or the grooves can be non-parallel to each other.

[0200] Regarding the introduction section 41, Fig.13 (a) with W 7 The protrusion amount W (the distance from the end of the convex portion 39a to the top 41a) is preferably 1000 μm or less, and may be 500 μm or less, or 300 μm or less. 7 It is preferably 20 μm or more, and may be 45 μm or more, or 60 μm or more. 7 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 7The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0201] <<Steam Flow Channel>>

[0202] Next, the vapor flow path groove 42 will be described. The vapor flow path groove 42 is a portion through which the vapor generated by evaporation of the working fluid passes, and constitutes the vapor flow path 4 (see Fig.15 etc.). Figure 3 , Figure 4 The shape of the steam flow path groove 42 is shown in FIG. Figure 5 2 shows the cross-sectional shape of the vapor flow path groove 42 .

[0203] As can be seen from these figures, in this embodiment, the steam flow path groove 42 is formed by a groove (slit) formed on the inner side of the ring of the annular peripheral liquid flow path portion 34 in the main body 31. In detail, the steam flow path groove 42 of this embodiment is a groove that is formed between adjacent inner liquid flow path portions 38 and between the outer peripheral liquid flow path portion 34 and the inner liquid flow path portion 38, and extends in a direction parallel to the long side (x direction) in the top view rectangle of the main body 31. In addition, a plurality of (four in this embodiment) steam flow path grooves 42 are arranged in a direction parallel to the short side thereof (y direction). The steam flow path groove 42 of this embodiment is configured to connect the first surface 30a side and the second surface 30b side of the third sheet 30, that is, it is a slit-shaped groove that penetrates the third sheet 30 in the thickness direction, opens on the first surface 30a side and the second surface 30b side, and extends along the sheet surface (first surface 30a, second surface 30b) of the third sheet 30.

[0204] Therefore, according to Figure 5 It can be seen that the third sheet 30 has a shape in which the outer peripheral liquid flow path portion 34 , the inner liquid flow path portion 38 , and the vapor flow path grooves 42 are repeated alternately in the y direction.

[0205] The steam flow path groove 42 having such a structure may further have the following structure.

[0206] exist Figure 3 , Figure 4 , Figure 5 China 8 The width of the vapor flow path groove 42 (the size in the direction in which the inner liquid flow path portion 38 and the vapor flow path groove 40 are arranged, and the width on the opening surface of the vapor flow path groove) is formed to be at least larger than the width W of the liquid flow path groove 35 and the liquid flow path groove 37 described above. 3 , and the width W of the liquid flow path groove 39 and the liquid flow path groove 40 6On the other hand, the width W is preferably 2500 μm or less, and may be 2000 μm or less, or 1500 μm or less. 8 The width W is preferably 100 μm or more, and may be 200 μm or more, or 400 μm or more. 8 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 8 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0207] The pitch of the vapor flow path grooves 42 is usually determined by the pitch of the inner liquid flow path portions 38 .

[0208] By making the flow path cross-sectional area of ​​the vapor flow path groove larger than the flow path cross-sectional area of ​​the liquid flow path groove, the vapor, which has a larger volume than the condensate due to the nature of the working fluid, can be smoothly refluxed.

[0209] In this embodiment, the cross-sectional shape of the steam flow path groove 42 is based on the shape of the introduction part 37 and the introduction part 41. However, when the introduction part 41 is not provided, it may be a rectangular, square, trapezoidal or other quadrilateral, a triangle, or a shape formed by combining any plurality of these shapes. The steam flow path can smoothly reflux the working fluid by reducing the flow resistance of the steam, and therefore, the shape of the flow path cross section can also be determined from this point of view.

[0210] In this embodiment, an example in which one vapor flow path groove 42 is formed between adjacent inner liquid flow path sections 38 is described, but the present invention is not limited thereto, and two or more vapor flow path grooves may be arranged side by side between adjacent inner liquid flow path sections.

[0211] <<Steam flow path connecting groove>>

[0212] The steam flow path connecting groove 44 is a groove that connects the plurality of steam flow path grooves 42. Thus, the plurality of steam flow path grooves 42 achieve equalization of steam, or steam is transmitted to a wider range, and a large number of condensate flow paths 3 can be efficiently used, so that the reflux of the working fluid can be smoother.

[0213] according to Figure 3 , Figure 4 as well as Figure 6 It can be seen that the vapor flow path connecting groove 44 of the present embodiment is formed between the inner liquid flow path portion 38 and both end portions of the vapor flow path groove 42 in the direction in which they extend and the outer peripheral liquid flow path portion 34 .

[0214] The steam flow path connecting groove 44 is formed so as to connect the adjacent steam flow path grooves 42. Figure 6 As can be seen, the vapor flow path connecting groove 44 includes a groove 44a on the first surface 30a side and a groove 44b on the second surface 30b side, and includes a connecting portion 44c between the groove 44a and the groove 44b. The connecting portion 44c connects the inner liquid flow path portion 38 and the outer peripheral liquid flow path portion 33 and holds the inner liquid flow path portion 38.

[0215] In addition, if Figure 3 , Figure 4 As shown, in this embodiment, a hole 44d is provided on a connecting portion 44c at a portion of the steam flow path connecting groove 44 where the end of the groove 32a is arranged, so that the groove 44a and the groove 44b are connected, wherein the groove 32a is provided in the injection portion 132 of the third sheet 30. Thus, the injection of the working fluid from the groove 32a is not hindered, and smoother injection of the working fluid can be achieved.

[0216] The shape of the steam flow path communication groove 44 is not particularly limited as long as it communicates with the plurality of steam flow path grooves 42 , but the following structure may be employed, for example.

[0217] exist Figure 3 , Figure 4 , Figure 6 China 9 The width of the steam flow path connecting groove 44 (the size in the direction perpendicular to the connecting direction and the width on the opening surface of the groove) is preferably 2500 μm or less, and can be 2000 μm or less, or 1500 μm or less. 9 The width W is preferably 100 μm or more, and may be 200 μm or more, or 400 μm or more. 9 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 9 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0218] In the present embodiment, the cross-sectional shape of the grooves 44a and 44b of the steam flow path connecting groove 44 is semi-elliptical, but is not limited to this, and may also be a rectangular, square, trapezoidal or other quadrilateral, a triangle, a semicircle, a shape with a semicircular bottom, a shape with a semi-elliptical bottom, or a combination of any multiple of these shapes.

[0219] The steam flow path communication groove can smoothly reflux the working fluid by reducing the flow resistance of the steam, and therefore the shape of the flow path cross section can be determined from this viewpoint as well.

[0220] <Structure of evaporation chamber>

[0221] Next, the structure of the evaporation chamber 1 formed by combining the first sheet 10, the second sheet 30 will be described. This description will further understand the shape of the evaporation chamber 1 and the arrangement, size, shape, etc. of each structure that the first sheet 10, the second sheet 30 should have.

[0222] Fig.15 Shown in Figure 1 C 7 -C 7 2 is a cross-sectional view showing the evaporation chamber 1 cut in the thickness direction along the y direction. Fig.16 Shown in Figure 1 C 8 -C 8 1 is a cross-sectional view showing the evaporation chamber 1 cut in the thickness direction along the x direction.

[0223] Fig.17 (a) shows that Fig.15 C 9 The part represented by Figure 7 The cross section corresponding to (a) is Fig.17 (b) shows the Figure 7 The cross section corresponding to (b) is Fig.18 (a) shows that Fig.15 C 10 The part represented by Fig.13 The cross section corresponding to (a) is Fig.18 (b) shows the Fig.13 (b) The corresponding cross section.

[0224] And, in Fig.15 , Fig.16 , Fig.17 (a) Fig.18 In the cross section shown in (a), the steam flow path 4 and the steam flow path 3 are separated by the convex portion 35a and the convex portion 39a, but as in Figure 8 and Fig.14 As shown and described in FIG. 1 , the convex portion 35a and the convex portion 39a are provided with the communicating opening portion 35b and the communicating opening portion 39b, respectively. Fig.17 (b) Fig.18 As shown in (b), according to the cross section where the communication openings 35b, 39b and the steam flow path 4 are connected, the steam flow path 4 and the steam flow path 3 are connected through the communication openings 35b and 39b.

[0225] according to Figure 1 , Figure 2 as well as Figures 15 to 18 It can be seen that the inner surface 10a of the first sheet 10 is arranged in an overlapping manner and bonded to the first surface 30a side of the third sheet 30, and the inner surface 20a of the second sheet 20 is arranged in an overlapping manner and bonded to the second surface 30b side of the third sheet 30, thereby forming the evaporation chamber 1. At this time, the main body 31 of the third sheet 30 overlaps with the main body 11 of the first sheet 10, the main body 31 of the third sheet 30 overlaps with the main body 21 of the second sheet 20, the injection part 32 of the third sheet 30 overlaps with the injection part 12 of the first sheet 10, and the injection part 32 of the third sheet 30 overlaps with the injection part 22 of the second sheet 20.

[0226] According to the laminated body of the first sheet 10, the second sheet 20 and the third sheet 30, the structures of the main body 11, the main body 21 and the main body 31 are as follows: Fig.15 , Fig.16 , Fig.17 (a) Fig.17 (b) Fig.18 (a) and Fig.18 The configuration is as shown in (b). The details are as follows.

[0227] The outer peripheral joint surface 33a of the third sheet 30 provided on the first surface 30a side and the surface of the outer peripheral portion of the inner surface 10a of the first sheet 10 are arranged in an overlapping manner, and the outer peripheral joint surface 33b of the third sheet 30 provided on the second surface 30b side and the surface of the outer peripheral portion of the inner surface 20a of the second sheet 20 are arranged in an overlapping manner, and they are respectively bonded together by bonding means such as diffusion bonding or brazing. Thus, a hollow portion based on the shape of the third sheet 30 is formed between the first sheet 10 and the second sheet 20, and the working fluid is sealed here to form a closed space 2.

[0228] The inner surface 10a of the first sheet 10 is arranged in an overlapping manner on the first surface 30a side of the peripheral liquid flow path portion 34 of the third sheet 30. As a result, the opening of the liquid flow path groove 35 is blocked by the first sheet 10 and becomes a part of the hollow portion. This becomes the condensate flow path 3, which is a second flow path for the condensate in a liquefied state of the working fluid sealed in the hollow portion to flow.

[0229] Similarly, the inner surface 20a of the second sheet 20 is arranged in an overlapping manner on the second surface 30b side of the peripheral liquid flow path portion 34 of the third sheet 30. As a result, the opening of the liquid flow path groove 36 is blocked by the second sheet 20 and becomes a part of the hollow portion. This becomes the condensate flow path 3, which is a second flow path for the condensate in a liquefied state of the working fluid sealed in the hollow portion to flow.

[0230] In addition, the inner surface 10a of the first sheet 10 is arranged in an overlapping manner on the first surface 30a side of the inner liquid flow path portion 38 of the third sheet 30. As a result, the opening of the liquid flow path groove 39 is blocked by the first sheet 10 and becomes a part of the hollow portion. This becomes the condensate flow path 3, which is a second flow path for the condensate in a liquefied state of the working fluid sealed in the hollow portion to flow.

[0231] Similarly, the inner surface 20a of the second sheet 20 is arranged in an overlapping manner on the second surface 30b side of the peripheral liquid flow path portion 38 of the third sheet 30. As a result, the opening of the liquid flow path groove 40 is blocked by the second sheet 20 and becomes a part of the hollow portion. This becomes the condensate flow path 3, which is a second flow path for the condensate in a liquefied state of the working fluid sealed in the hollow portion to flow.

[0232] By forming a thin flow path surrounded by a wall in the cross section, the condensate can be moved by a strong capillary force, thereby achieving smooth circulation. That is, when considering the flow path for the condensate to flow, the condensate flow path 3 can obtain a higher capillary force than a flow path based on a groove in which one surface of the flow path is continuously open.

[0233] Furthermore, since the condensate flow path 3 is formed separately from the vapor flow path 4 as the first flow path, the circulation of the working fluid can be smoothed.

[0234] In addition, in the present embodiment, there is a condensate flow path 3 based on a liquid flow path groove 35 and a liquid flow path groove 39, and a condensate flow path 3 based on a liquid flow path groove 36 and a liquid flow path groove 40, and the condensate flow path 3 is respectively provided on one side and the other side of the thickness direction (z direction) of the evaporation chamber 1.

[0235] Thus, the total cross-sectional area of ​​the condensate flow paths 3 can be increased while reducing the cross-sectional area of ​​one condensate flow path 3 (making it narrower), so that the condensate can flow smoothly while maintaining a high capillary force.

[0236] Furthermore, the working fluid in the evaporation chamber 1 can be provided with an opportunity to move not only in the in-plane direction (xy direction) but also in the thickness direction (z direction), and thus more uniform heat transfer and heat transport can be expected.

[0237] The shape of the condensate flow path 3 can be considered based on the shape and size described above with reference to the third sheet 30 .

[0238] The other parts are described below. Fig.15It can be seen that the opening of the steam flow path groove 42 is blocked by the first sheet 10 and the second sheet 20, thereby forming a part of the hollow portion, which becomes a flow path for the sealed working fluid and a first flow path for the steam to flow, that is, the steam flow path 4.

[0239] Here, it is preferred that the surfaces of the first sheet 10 and the second sheet 20 constituting a part of the steam flow path 4 are flat on the steam flow path 4 side. In this embodiment, since the surfaces of the first sheet 10 and the second sheet 20 are not processed and have flat plate surfaces, the inner wall of the steam flow path 4 becomes smooth and the resistance when the steam moves can be suppressed.

[0240] The condensate flow path 3 as the second flow path has a smaller flow path cross-sectional area than the steam flow path 4 as the first flow path. More specifically, when the average flow path cross-sectional area of ​​two adjacent steam flow paths 4 (in this embodiment, the flow paths surrounded by one steam flow path groove 42, the first sheet 10, and the second sheet 20) is A, g The average flow cross-sectional area of ​​the plurality of condensate flow paths 3 (in this embodiment, the plurality of condensate flow paths 3 surrounded by one inner liquid flow path portion 38, the first sheet 10 and the second sheet 20) disposed between two adjacent vapor flow paths 4 is A. l When the condensate flow path 3 and the vapor flow path 4 satisfy A l A g Thus, the working fluid can selectively pass through the first flow path and the second flow path easily according to its phase form (gas phase, liquid phase).

[0241] This relationship only needs to be satisfied in at least a portion of the entire evaporation chamber, and it is more preferable if this relationship is satisfied in the entire evaporation chamber.

[0242] The shape of the vapor flow path 4 can be considered based on the shape and size described above with reference to the third sheet 30 .

[0243] Furthermore, in the present embodiment, since the introduction portion 37 and the introduction portion 41 are provided, one steam flow path 4 is configured to be connected to two introduction portions.

[0244] according to Fig.16 It can be seen that the opening of the groove 44a of the steam flow path connecting groove 44 of the third sheet 30 is blocked by the first sheet 10, and the opening of the groove 44b is blocked by the second sheet 20, thereby forming a hollow part in which multiple steam flow paths 4 are connected, and the hollow part becomes a flow path for the working fluid.

[0245] Regarding the injection part 12, the injection part 22 and the injection part 32, Figure 1 , Figure 2As shown, the injection portion 12 overlaps with the first surface 30a side of the injection portion 32, the injection portion 22 overlaps with the second surface 30 side of the injection portion 32, and the opening of the injection groove 32a on the second surface 30b side of the third sheet 30 is blocked by the injection portion 22 of the second sheet 20, thereby forming an injection flow path 5 that connects the outside with the hollow portion (condensate flow path 3 and vapor flow path 4).

[0246] After the working fluid is injected into the hollow portion from the injection flow path 5 , the injection flow path 5 is closed to form the closed space 2 . Therefore, in the final form of the evaporation chamber 1 , the outside and the hollow portion are not communicated with each other.

[0247] In this embodiment, an example is shown in which the injection part 12, the injection part 22, and the injection part 32 are provided at one end of a pair of ends in the longitudinal direction of the evaporation chamber 1, but the present invention is not limited thereto and they may be arranged at any other end, or a plurality of them may be arranged. When a plurality of them are arranged, for example, they may be arranged at a pair of ends in the longitudinal direction of the evaporation chamber 1, or at one end of the other pair of ends.

[0248] A working fluid is sealed in the sealed space 2 of the evaporation chamber 1. The type of the working fluid is not particularly limited, and working fluids commonly used in evaporation chambers such as pure water, ethanol, methanol, acetone, and mixtures thereof can be used.

[0249] [Manufacture of evaporation chamber]

[0250] The evaporation chamber as described above can be produced, for example, as follows.

[0251] Liquid flow grooves 35, 36, 39, 40, vapor flow grooves 42, grooves 44a and 44b are formed by half etching in the sheet having the outer peripheral shape of the third sheet 30. Half etching means etching halfway through the sheet without penetrating the sheet in the thickness direction.

[0252] The vapor flow path groove 42 is half-etched from both the first surface 30a side and the second surface 30b side so as to penetrate in the thickness direction. By etching in this way, the shapes of the introduction portion 37 and the introduction portion 41 can be formed.

[0253] Next, the first sheet 10 is overlapped on the first surface 30a side of the third sheet 30, and the second sheet 20 is overlapped on the second surface 30b side of the third sheet 30 for temporary fastening. The temporary fastening method is not particularly limited, and resistance welding, ultrasonic welding, and bonding with adhesives can be cited.

[0254] Then, diffusion bonding is performed after temporary fastening to permanently bond the first sheet 10, the second sheet 20, and the third sheet 30 together to form a sheet for the evaporation chamber. Moreover, brazing may be used instead of diffusion bonding to perform bonding. Here, the expression "permanently bonded" is not strictly limited in meaning, and it means bonding to such an extent that the bonding can be maintained to such an extent that the airtightness of the enclosed space 2 can be maintained when the evaporation chamber 1 is in operation.

[0255] After joining, the formed injection flow path 5 is evacuated to reduce the pressure on the hollow part. Then, the working fluid is injected from the injection flow path 5 into the hollow part after the pressure reduction, so that the working fluid enters the hollow part. Then, the injection flow path 5 is closed by melting or riveting the overlapping injection parts 12, 22, and 32 to form a closed space. Thus, the working fluid is stably maintained inside the closed space 2.

[0256] In the evaporation chamber of this embodiment, since the internal liquid flow path portion 38 functions as a support, it is possible to suppress the closed space from being crushed during bonding and pressure reduction.

[0257] In the above section, the manufacturing of the evaporation chamber by etching is described, but the manufacturing method is not limited thereto, and the evaporation chamber can also be manufactured by press working, cutting working, laser working, and processing using a 3D printer.

[0258] For example, when the evaporation chamber is manufactured by a 3D printer, it is not necessary to join a plurality of sheets together to manufacture the evaporation chamber, and an evaporation chamber without a joining portion can be realized.

[0259] [Structure of electronic equipment and role of evaporation chamber]

[0260] Next, the function of the evaporation chamber 1 will be described. Fig.19 Schematically shows the following state: an evaporation chamber 1 is arranged inside a portable terminal 80 as one form of electronic equipment. Here, since the evaporation chamber 1 is arranged inside a housing 81 of the portable terminal 80, it is indicated by a dotted line. Such a portable terminal 80 is configured to include: a housing 81, which contains various electronic components; and a display unit 82, which is exposed through an opening of the housing 81 so that an image can be seen outside. And, as one of these electronic components, an electronic component 53 to be cooled by the evaporation chamber 1 is arranged in the housing 51.

[0261] The evaporation chamber 1 is provided in a housing of a portable terminal or the like, and is mounted on an electronic component 83 such as a CPU, which is an object to be cooled. The electronic component is mounted on the outer surface or outer surface of the evaporation chamber 1 directly or via an adhesive, sheet, tape, etc. having high thermal conductivity. There is no particular limitation on the position where the electronic component 83 is mounted in the evaporation chamber, and in a portable terminal or the like, it is appropriately set according to the relationship between the configuration of other components. In this method, as in Figure 1 As shown by the dotted line in FIG. 1 , the electronic component 53 is arranged at the center of the body 21 in the xy direction on the surface of the second sheet 20 opposite to the side on which the third sheet 30 is arranged. Figure 1 In the figure, the electronic component 83 is shown by a dotted line because it is in a blind spot and cannot be seen.

[0262] exist Fig. 20 A diagram for explaining the flow of the working fluid is shown in . For convenience of explanation, in this diagram, the first surface 30 a side of the third sheet 30 is shown in the evaporation chamber 1 .

[0263] When the electronic component 83 generates heat, the heat is transferred by heat conduction in the second sheet 20, and the condensed liquid in the closed space 2 near the electronic component 83 is heated. The heated condensed liquid absorbs the heat and evaporates and gasifies. Thus, the electronic component 83 is cooled.

[0264] The vaporized working fluid becomes vapor and as in Fig. 20 As shown by the solid straight line arrow in FIG. 8 , the vapor flows and moves in the vapor flow path 4 . Since this flow is generated in the direction away from the electronic component 83 , the vapor moves in the direction away from the electronic component 83 .

[0265] The vapor in the vapor flow path 4 leaves the electronic component 83 as a heat source and moves to the outer periphery of the evaporation chamber 1 where the temperature is relatively low. During this movement, the vapor is cooled while being successively deprived of heat by the first sheet 10, the second sheet 20, and the third sheet 30. The first sheet 10, the second sheet 20, and the third sheet 30 that have deprived the vapor of heat transfer the heat to the housing 81 of the electronic device 80 in contact with the evaporation chamber, etc., and the heat is finally released to the outside air.

[0266] The working fluid that has its heat removed while moving in the steam flow path 4 is condensed and liquefied. The condensed liquid adheres to the wall surface of the steam flow path 4. On the other hand, in the steam flow path 4, the steam continuously flows, so the condensed liquid is as Fig.18 Arrow C 11 As shown in the figure, the condensate is pushed into the condensate flow path 3 by the steam. Figure 8 , Fig.14As shown in FIG. 1 , the communication opening 35 b , the communication opening 36 b , the communication opening 39 b , and the communication opening 40 b are provided, and thus the condensate is distributed to the plurality of condensate flow paths 3 through these communication openings.

[0267] In this embodiment, since the condensate flow paths 3 are provided on both sides of the evaporation chamber 1 in the thickness direction, the movement opportunities from the vapor flow path 4 to the condensate flow path 3 can be increased, and smoother movement of the condensate can be achieved.

[0268] At this time, if the introduction part 37 and the introduction part 41 are provided, there is a portion surrounded by the introduction surface 37b, the introduction surface 41b and the first sheet 10 and the second sheet 20, and the condensate is easily retained there due to the action of capillary force. As a result, the condensate is introduced into the condensate flow path 3 more smoothly.

[0269] The condensate entering the condensate flow path 3 is moved by the capillary force of the condensate flow path and the push from the vapor as in Fig. 20 As shown by the dashed straight arrow in the figure, the electronic component 83, which is the heat source, is moved toward it.

[0270] Then, it is vaporized again due to the heat from the electronic component 83 as a heat source, and the above-mentioned process is repeated.

[0271] As described above, according to the evaporation chamber 1, in the condensate flow path, the condensate can be well refluxed due to the high capillary force, thereby improving the heat transport amount.

[0272] Furthermore, in the present embodiment, the condensate flow path 3 is provided on both one side and the other side of the evaporation chamber 1 in the thickness direction (z direction).

[0273] Thus, the total cross-sectional area of ​​the condensate flow paths 3 can be increased while reducing the cross-sectional area of ​​one condensate flow path 3 (making it narrower), so that the condensate can flow smoothly while maintaining a high capillary force.

[0274] Furthermore, the working fluid in the evaporation chamber 1 can be provided with an opportunity to move not only in the in-plane direction (xy direction) but also in the thickness direction (z direction), and thus more uniform heat transfer and heat transport can be expected.

[0275] [About the number of pieces]

[0276] So far, the example in which the evaporation chamber 1 is composed of three sheets, namely, the first sheet 10, the second sheet 20, and the third sheet 30, has been described. By being composed of three sheets in this way, the overlapping of the sheets is not complicated compared to the case of using more sheets, so it is easy to manufacture, and the bonding of each sheet can be made stronger. Among them, as in this embodiment, as long as the surfaces of the first sheet 10 and the second sheet 20 are not processed and become flat, it is not necessary to pay attention to the alignment (alignment) for forming the condensate flow path or the vapor flow path when the sheets are overlapped, so it can be manufactured more simply.

[0277] However, regardless of the number of sheets, as long as the condensate flow paths are provided on one side and the other side in the thickness direction of the evaporation chamber, the number of sheets may be four or five.

[0278] Thus, by forming the evaporation chamber with three or more sheets, it is easier to form the evaporation chamber than when it is formed with two sheets. Fig.18 The introduction surface 41 b shown in the figure is a surface where the working fluid is likely to condense, and the working fluid can be moved more smoothly.

[0279] In addition, for example Fig.21 As shown, when the third sheet is divided in the thickness direction and the evaporation chamber is composed of four sheets, a groove may be formed in the center of the inner liquid flow path portion 38 in the thickness direction to provide a condensate flow path.

[0280] 1.2. Method 1b

[0281] Figure 22 to Figure 25 A diagram illustrating the evaporation chamber 51 of the embodiment 1b is shown.

[0282] Fig. 22 is an exploded perspective view of the evaporation chamber 51 and is Figure 2 Quite a picture. Fig.23 This is a diagram showing the sealed space 2 of the evaporation chamber 51 so as to be visible, and is a diagram showing the first surface 30 a side of the third sheet 52 . Fig.24 Shows a cross-sectional view: Fig.23 C 12 -C 12 The evaporation chamber 101 is cut off at the position shown. Fig.25 Yes Fig.24 C 13 The figure shows the enlarged view of the area (inner liquid flow path portion 138) and the Fig.18 Quite a picture.

[0283] The evaporation chamber 51 is different from the evaporation chamber 1 described above in that a third sheet 52 is used instead of the third sheet 30, and a thickness-direction communicating hole 54a is provided in the inner liquid flow path portion 54 of the body 53 of the third sheet 52. As for other components and parts, the same reference numerals are given in the drawings and the description thereof is omitted because the description of the evaporation chamber 1 is appropriate. Therefore, the description here focuses on the thickness-direction communicating hole 54a provided in the inner liquid flow path portion 54.

[0284] The thickness-direction connecting hole 54a is provided in the inner liquid flow path portion 54 of the third sheet 52, and is a hole connecting from the first surface 30a to the second surface 30b. Through the thickness-direction connecting hole 54a, the liquid flow path groove 39 and the liquid flow path groove 40 are connected, so that the condensate flow path 3 on the first surface 30a side and the condensate flow path 3 on the second surface 30b side are connected.

[0285] Therefore, as in Fig.25 Arrow C 14 As shown, the condensate flow paths 3 that are separated in the thickness direction are connected without passing through the vapor flow path 4, so that the condensate can be distributed more evenly, and thus the working fluid can flow more smoothly.

[0286] The thickness direction communicating hole 54 a is not particularly limited in its specific form as long as it can communicate the condensate flow paths 3 disposed on one side and the other side in the thickness direction of one inner liquid flow path portion 54 . For example, it can be described as follows.

[0287] exist Fig. 22 , Fig.23 The cross-sectional shape of the thickness-direction communicating hole 54 a shown in FIG. 5 is not particularly limited, and may be a circle, an ellipse, a triangle, a quadrilateral, other polygons, or a geometric shape formed by combining these shapes.

[0288] In addition, Fig.24 , Fig.25 The shape in the direction (z direction) in which the thickness-direction connecting hole 54a shown in the figure extends is not particularly limited, and the cross-sectional shape may be fixed at each position in the z direction or may be changed. For example, the following forms can be listed: the cross-sectional area of ​​the portion connected to the condensate flow path 3 is larger than that of other portions.

[0289] The number of condensate flow paths 3 connected by one thickness-direction connecting hole 54a is also not particularly limited. It may be configured such that two condensate flow paths 3 on the first surface 30a side and two condensate flow paths 3 on the second surface 30b side are connected as in the present embodiment, or it may be configured such that one or more than three condensate flow paths 3 are connected on one surface side in the thickness direction.

[0290] The effect can be achieved by providing only one thickness-direction communicating hole 54 a in the evaporation chamber 1 , but in order to achieve a more significant effect, it is preferable to provide a plurality of thickness-direction communicating holes 54 a .

[0291] The manner of providing a plurality of thickness-direction communicating holes 54a is not particularly limited, but one may be provided in one inner liquid flow path portion 54, or a plurality of thickness-direction communicating holes 54a may be provided in one inner liquid flow path portion 54. When a plurality of thickness-direction communicating holes 54a are provided in one inner liquid flow path portion 54, they may be arranged in a straight line, or may be arranged in a straight line. Fig.23 As shown in FIG. 1 , the positions of the adjacent thickness-direction communicating holes 54 a are shifted in the direction (y direction) perpendicular to the arrangement direction.

[0292] Furthermore, in the present embodiment, the thickness-direction connecting hole 54a is provided only in the inner liquid flow path portion 54, but instead of this design, the thickness-direction connecting hole may be provided only in the peripheral liquid flow path portion 34, or the thickness-direction connecting hole may be provided in both the inner liquid flow path portion 54 and the peripheral liquid flow path portion 34.

[0293] 2. Method 2

[0294] 2.1. Method 2a

[0295] [Components]

[0296] exist Fig.26 FIG. 2 shows a perspective view of the appearance of the evaporation chamber 101 of the embodiment 2a. Fig. 27 FIG. 101 shows an exploded perspective view of the evaporation chamber 101. Fig. 27 It can be seen that the evaporation chamber 26 of this embodiment has a first sheet 10, a second sheet 20, and a third sheet 130 (sometimes also described as "intermediate sheet 130"). And, as described later, these sheets are overlapped and joined together (diffusion bonding, brazing, etc.), thereby forming an evaporation chamber sheet such that a hollow portion based on the shape of the third sheet 130 is formed between the first sheet 10 and the second sheet 20. And, the working fluid is sealed in the hollow portion, thereby forming a closed space 102 (for example, see Fig.19 ) and becomes the evaporation chamber 101.

[0297] The first sheet 10 and the second sheet 20 included in this embodiment can be considered similarly to the first sheet 10 and the second sheet 20 described in Embodiment 1, and therefore, the same reference numerals are used here and the description thereof is omitted.

[0298] <Third film>

[0299] In this embodiment, the third sheet 130 is a sheet sandwiched between the inner surface 10 a of the first sheet 10 and the inner surface 20 a of the second sheet 20 and overlapped therewith, and has a structure for forming the closed space 2 through which the working fluid moves.

[0300] Fig.28 , Fig.29 A view showing the third sheet 130 viewed from above (viewed from the z direction) is shown. Fig.28 is a diagram of the surface that coincides with the first sheet 10, Fig.29 This is a diagram of the surface overlapping with the second sheet 20 .

[0301] In addition, Fig.30 The figure shows the Fig.28 C 101 -C 101 The cross-sectional view of the line represented by Fig.31 The figure shows the Fig.28 C 102 -C 102 A cross-sectional view of the line represented.

[0302] Furthermore, the third sheet 130 may be a single layer or a plurality of sheets stacked together. When a plurality of sheets are stacked together, the plurality of sheets may be stacked to form the following configuration, or the plurality of sheets may be processed separately and then overlapped to form the following configuration.

[0303] In this embodiment, the third sheet 130 includes: a first surface 130a overlapping with the inner surface 10a of the first sheet 10; a second surface 130b overlapping with the inner surface 20a of the second sheet 20; and an end surface 130c, which is formed to have a thickness extending over the first surface 130a and the second surface 130b. Fig.28 The first surface 130a appears in Fig.29 A second surface 130b appears in the image.

[0304] The third sheet 130 includes a main body 131 and an injection portion 32. The injection portion 32 of this embodiment can be considered similarly to the injection portion 32 shown in Embodiment 1, and therefore, the same reference numerals are used here and the description thereof is omitted.

[0305] The main body 31 is a sheet-shaped portion that forms a hollow portion in the evaporation chamber sheet and a sealed space in the evaporation chamber 1 , and in this embodiment, is a rectangle with rounded corners (so-called R corners) in a plan view.

[0306] The main body 31 may be a quadrilateral as in the present embodiment, or may be a shape required for the evaporation chamber. For example, it may be a circle, an ellipse, a triangle, other polygons, or a shape having a curved portion (e.g., an L-shape, a T-shape, a crank shape, a U-shape, etc.). In addition, it may be a shape formed by combining at least two of these shapes.

[0307] The thickness and material of the third sheet 130 can be considered similarly to those of the first sheet 10. However, the thickness and material of the third sheet 130 do not need to be the same as those of the first sheet 10, and may be different.

[0308] The body 131 has a structure for reflux of the working fluid. Specifically, the body 131 includes an outer peripheral joint portion 33 , an outer peripheral liquid flow path portion 134 , an inner liquid flow path portion 138 , a vapor flow path groove 142 , and a vapor flow path connecting groove 144 .

[0309] The evaporation chamber 101 of this embodiment includes a vapor flow path 4, which is a first flow path through which the vapor of the working fluid passes (see Fig.38 and condensate flow path 3, which is a second flow path for the condensate formed by condensation of the working fluid (reference Fig.42 In addition, the vapor flow grooves 142 of the third sheet 130 form the vapor flow path 4 , and the liquid flow grooves 35 of the outer peripheral liquid flow path section 134 and the liquid flow grooves 39 of the inner liquid flow path section 138 form the condensate flow path 3 .

[0310] <<Peripheral joint>>

[0311] The outer peripheral bonding portion 33 can be considered similarly to the outer peripheral bonding portion 33 described in the above-mentioned embodiment 1, and therefore the same reference numerals are given here and the description thereof is omitted.

[0312] <<Peripheral liquid flow path section>>

[0313] The peripheral liquid flow path portion 134 functions as a liquid flow path portion and has a portion constituting a part of the condensate flow path 3 and constituting the heat insulating portion 6, wherein the condensate flow path 3 is a second flow path through which the working fluid passes when condensing and liquefying. Fig.32 In, will be Fig.30 Arrow C 103 The indicated portion is shown enlarged. Fig.33 Shown from Fig.32 Arrow C 105 , which is an enlarged view of the peripheral liquid flow path section 134 viewed from the z direction. Fig.33 A part of the peripheral liquid flow path section 134 viewed from the second surface 130 b is shown.

[0314] As can be seen from these drawings, the peripheral liquid flow path portion 134 is a portion formed along the inner side of the peripheral joint portion 33 in the main body 131 and provided along the outer periphery of a portion serving as the sealed space 2 .

[0315] A plurality of grooves, namely, liquid flow path grooves 35 extending parallel to the outer circumference of the body 131 are formed on the first surface 130a of the peripheral liquid flow path portion 134. The plurality of liquid flow path grooves 35 are arranged at predetermined intervals in a direction different from the extending direction.

[0316] The liquid flow path groove 35 can be considered in the same manner as the liquid flow path groove 35 described in the above-mentioned embodiment 1, and therefore the same reference numerals are given here and the description thereof is omitted.

[0317] according to Figure 29 to Figure 33 It can be seen that in this embodiment, the peripheral liquid flow path section 134 includes the heat insulating section groove 136 on the second surface 30 b side.

[0318] The heat insulating portion groove 136 is a groove extending in the direction in which the peripheral liquid flow path portion 134 extends, and is not connected to the vapor flow path groove 42 and the liquid flow path groove 35 , so that the working fluid does not flow into the heat insulating portion groove 136 .

[0319] Here, since the heat insulating portion groove 136 is a groove, it has a bottom in its cross-sectional shape and an opening on the opposite side (second surface 130b side) facing the bottom. As described later, the second sheet 20 and the third sheet 30 overlap, thereby blocking the opening and forming the heat insulating portion 6.

[0320] In this embodiment, the cross section of the heat insulating groove 136 is formed into a semi-elliptical shape. The cross-sectional shape is not limited to a semi-elliptical shape, but may be a circle, a quadrilateral such as a rectangle, a square, a trapezoid, or other polygons, or a shape formed by combining any of these shapes.

[0321] in addition, Fig.34 Shown along the Fig.33 C shown in 106 -C 106 That is, Fig.34 1 is a cross-sectional view of the peripheral liquid flow path section 134 at a location including the column 136a. Fig.32 The cross section shown is a cross-sectional view of the outer peripheral liquid flow path section 134 at a portion of the heat insulating section groove 136 where the pillars 136 a are not arranged.

[0322] As can be seen from these figures, a plurality of columns 136a are arranged at intervals and erected from the bottom of the heat insulating groove 136. The columns 136a can suppress the collapse of the heat insulating groove 136 when the third sheet 130 and the second sheet 20 are joined, and can also improve the strength of the evaporation chamber 101 itself.

[0323] The top view shape of the column (from Fig.33 The shape observed from a viewing angle) is not particularly limited, and in addition to a quadrilateral as in the present embodiment, a polygon such as a triangle or a pentagon, a circle, an ellipse, or any other shape may also be applied.

[0324] In addition, the pitch and number of the arranged pillars are not particularly limited and can be appropriately set. Therefore, the number of pillars may be set to 1 or reduced, and one pillar may be configured to be long so as to extend along the heat insulating portion groove.

[0325] In addition, in this method, if Fig.30 As shown, the introduction part 37 is provided in the peripheral liquid flow path part 134. The introduction part 37 can be considered similarly to the introduction part 37 described in the embodiment 1, and therefore, the same reference numerals are given here and the description thereof is omitted.

[0326] The peripheral liquid flow path section 134 having the above-described structure may further have the following structure.

[0327] About Figures 28 to 30 , Fig.32 China 102 The width of the peripheral liquid flow path portion 134 (the size in the direction in which the liquid flow path grooves 35 are arranged) can be appropriately set according to the size of the entire evaporation chamber, etc., but the width W 102 It is preferably 3.0 mm or less, and may be 1.5 mm or less, or 1.0 mm or less. 102 If the width W exceeds 3.0 mm, there is a concern that the space for the inner liquid flow path or the vapor flow path may become insufficient. 102 It is preferably 0.05 mm or more, and may be 0.1 mm or more, or 0.2 mm or more. 102 If the width W is less than 0.05 mm, there is a concern that the amount of liquid flowing back to the outside may not be sufficient. 102 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 102 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0328] Here, the width of the peripheral liquid flow path portion 134 on the first surface 130a side and the width on the second surface 130b side are both W. 102 However, the width of the outer peripheral joint surface 33a and the width of the outer peripheral joint surface 33b do not have to be the same, and they may be different widths.

[0329] Regarding the heat insulating groove 136, Fig.32 China 104 The groove width indicated is preferably 1500 μm or less, and may be 1000 μm or less, or 700 μm or less. 104 The width W is preferably 20 μm or more, and may be 45 μm or more, or 60 μm or more. 104 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 104 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0330] In addition, Fig.32 China-Israel D 102 The depth of the groove indicated is preferably 200 μm or less, and may be 150 μm or less, or 100 μm or less. 102 The depth D is preferably 5 μm or more, and may be 10 μm or more, or 20 μm or more. 102 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 102 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0331] <<Inner liquid flow path>>

[0332] return Figures 26 to 30 The inner liquid flow path portion 138 is described. The inner liquid flow path portion 138 is also a part of the condensate flow path 3, the heat insulation portion 6, and the introduction portion 41, wherein the condensate flow path 3 is a second flow path for the working fluid to pass through when condensing and liquefying. Fig.35 In, will be Fig.30 Arrow C 107 The indicated portion is shown enlarged. Fig.35 The cross-sectional shapes of the inner liquid flow path portion 38, the heat insulating groove 140, and the introduction portion 41 are also shown. Fig.36 Shown from Fig.35 Arrow C 109 1 is an enlarged view of the inner liquid flow path section 138 viewed from above as viewed in the direction indicated.

[0333] As can be seen from these figures, the inner liquid flow path portion 138 is a portion formed inside the ring of the annular outer peripheral liquid flow path portion 134 in the main body 131. The inner liquid flow path portion 138 of this embodiment extends in a direction (x direction) parallel to the long side of the rectangular shape of the main body 131 when viewed from above (when viewed from the z direction), and a plurality of (three in this embodiment) inner liquid flow path portions 138 are arranged at a predetermined interval in a direction (y direction) parallel to the short side thereof.

[0334] A plurality of grooves extending along the direction in which the inner liquid flow path portion 138 extends, i.e., liquid flow path grooves 39 are formed on the first surface 130a of the inner liquid flow path portion 138. The plurality of liquid flow path grooves 39 are arranged at predetermined intervals in a direction different from the direction in which they extend.

[0335] Here, the liquid flow path groove 39 can be considered in the same way as the liquid flow path groove 39 described in Embodiment 1, and therefore the same reference numerals are given and the description thereof is omitted.

[0336] according to Fig.29 , Fig.30 , Fig.35 , Fig.36 It can be seen that the inner liquid flow path section 138 includes the heat insulating section groove 140 on the second surface 130 b .

[0337] The heat insulating portion groove 140 is a groove extending along the direction in which the inner liquid flow path portion 138 extends, and is not connected to the vapor flow path groove 42 and the liquid flow path groove 39 , so that the working fluid does not flow into the heat insulating portion groove 140 .

[0338] Here, since the heat insulating groove 140 is a groove, it has a bottom in its cross-sectional shape and an opening on the opposite side (second surface 130b side) facing the bottom. As described later, the second sheet 20 and the third sheet 30 overlap, thereby blocking the opening and forming the heat insulating section 6.

[0339] In this embodiment, the cross section of the heat insulating groove 140 is formed into a semi-elliptical shape. The cross-sectional shape is not limited to a semi-elliptical shape, but may be a circle, a quadrilateral such as a rectangle, a square, a trapezoid, or other polygons, or a shape formed by combining any of these shapes.

[0340] in addition, Fig.37 Shown along the Fig.36 C shown in 110 -C 110 That is, Fig.371 is a cross-sectional view of the inner liquid flow path section 138 at a location including the column 140a. Fig.35 The cross-sectional view shown is a cross-sectional view of the inner liquid flow path section 138 at a portion of the heat insulating groove 140 where the column 140 a is not arranged.

[0341] As can be seen from these figures, a plurality of columns 140a are arranged at intervals in the heat insulating groove 140, which are erected from the bottom. The columns 140a can suppress the heat insulating groove 140 from being crushed when the third sheet 130 and the second sheet 20 are joined, and can also improve the strength of the evaporation chamber 101 itself.

[0342] The top view shape of the column (from Fig.36 The shape observed from a viewing angle) is not particularly limited, and in addition to a quadrilateral as in the present embodiment, a polygon such as a triangle or a pentagon, a circle, an ellipse, or any other shape may also be applied.

[0343] The pitch and number of the arranged pillars are not particularly limited and can be appropriately set. Therefore, the number of pillars may be set to 1 or reduced to a small number, and one pillar may be configured to be long so as to extend along the heat insulating groove.

[0344] In this embodiment, an introduction portion 41 is provided in the inner liquid flow path portion 138. The introduction portion 41 can be considered similarly to the introduction portion 41 described in Embodiment 1, and therefore, the same reference numerals are used and description thereof is omitted.

[0345] The inner liquid flow path section 138 having the above-described structure preferably further has the following structure.

[0346] exist Figures 28 to 30 , Fig.35 China 106 The width of the inner liquid flow path portion 138 (the size in the direction in which the inner liquid flow path portion 138 and the vapor flow path groove 42 are arranged, and is the maximum value) is preferably 3000 μm or less, and can be 2000 μm or less, or 1500 μm or less. 106 The width W is preferably 100 μm or more, and may be 200 μm or more, or 400 μm or more. 106 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 106 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0347] In addition, Fig.30China-Israel 102 The pitch of the plurality of inner liquid flow path portions 138 shown is preferably 5000 μm or less, and may be 3500 μm or less, or 3000 μm or less. 102 It is preferably 200 μm or more, and may be 400 μm or more, or 800 μm or more. 102 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 102 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0348] This can reduce the flow resistance of the steam flow path, and enable the movement of the steam and the return of the condensate to be performed in a well-balanced manner.

[0349] The inner liquid flow path section 38 having the above-described structure may further have the following structure.

[0350] Regarding the heat insulating groove 140, Fig.35 China 108 The groove width indicated is preferably 1500 μm or less, and may be 1000 μm or less, or 700 μm or less. 108 The width W is preferably 20 μm or more, and may be 45 μm or more, or 60 μm or more. 108 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 108 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0351] In addition, Fig.35 China-Israel D 104 The depth of the groove indicated is preferably 200 μm or less, and may be 150 μm or less, or 100 μm or less. 104 The depth D is preferably 5 μm or more, and may be 10 μm or more, or 20 μm or more. 104 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 104 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0352] <<Steam Flow Channel>>

[0353] Next, the vapor flow path groove 142 will be described. The vapor flow path groove 142 is a portion through which the vapor generated by evaporation of the working fluid passes, and constitutes the vapor flow path 4 (see Fig.19 etc.). Fig.28 , Fig.29 The shape of the steam flow path groove 142 is shown in FIG. Fig.30 2 shows the cross-sectional shape of the vapor flow path groove 142 .

[0354] As can be seen from these figures, in this embodiment, the steam flow path groove 142 is composed of a groove (slit) formed on the inner side of the ring of the annular peripheral liquid flow path portion 134 in the main body 131. In detail, the steam flow path groove 142 of this embodiment is a groove that is formed between adjacent inner liquid flow path portions 138 and between the outer peripheral liquid flow path portion 134 and the inner liquid flow path portion 138, and extends in a direction parallel to the long side (x direction) in the top view rectangle of the main body 131. In addition, a plurality of (four in this embodiment) steam flow path grooves 142 are arranged in a direction parallel to their short sides (y direction). The steam flow path groove 142 of this embodiment is configured to connect the first surface 130a side and the second surface 130b side of the third sheet 130, that is, it is a slit-shaped groove, and opens on the first surface 130a side and the second surface 130b side.

[0355] Therefore, according to Fig.30 It can be seen that the third sheet 130 has a shape in which the outer peripheral liquid flow path portion 134 , the inner liquid flow path portion 138 , and the vapor flow path grooves 142 are repeated alternately in the y direction.

[0356] The structure of the steam flow path groove 142 having such a structure can be considered in the same way as the steam flow path groove 42 described in the first embodiment.

[0357] <<Steam flow path connecting groove>>

[0358] The steam flow path connecting groove 44 is a groove that connects the plurality of steam flow path grooves 142 , and can be considered similarly to the steam flow path connecting groove 44 described in the above-mentioned embodiment 1, so the same reference numerals are given and the description thereof is omitted.

[0359] [Structure of the evaporation chamber]

[0360] Next, the structure of the evaporation chamber 101 formed by combining the first sheet 10, the second sheet 130 will be described. Through this description, the shape of the evaporation chamber 101 and the arrangement, size, shape, etc. of each structure that the first sheet 10, the second sheet 130 should have can be further understood.

[0361] Fig.38 Shown in Fig.26 C 111 -C 111 , which is a cross-sectional view of the evaporation chamber 101 cut in the thickness direction along the y direction. Fig.39 Shown in Fig.26 C 112 -C 112 1 is a cross-sectional view of the evaporation chamber 101 cut in the thickness direction along the x direction.

[0362] Fig.40 Will be in Fig.38 C 113 The indicated portion is shown enlarged. Fig.41 The portion of the peripheral liquid flow path section 134 having the pillars 136a is shown in an enlarged manner. Fig.42 Will be in Fig.38 C 114 The indicated portion is shown enlarged. Fig.43 The portion of the inner liquid flow path section 138 including the pillars 140 a is shown in an enlarged manner.

[0363] And, in Figures 38 to 43 In the cross section shown, the vapor flow path 4 and the condensate flow path 3 are separated by the convex portion 35a and the convex portion 39a, but the convex portion 35a and the convex portion 39a are respectively provided with the communicating opening portion 35b and the communicating opening portion 39b. Therefore, the vapor flow path 4 and the condensate flow path 3 are communicated through the communicating opening portion 35b and the communicating opening portion 39b.

[0364] according to Fig.26 , Fig. 27 as well as Figures 38 to 42 It can be seen that the inner surface 10a of the first sheet 10 is arranged in an overlapping manner and bonded to the first surface 130a side of the third sheet 130, and the inner surface 20a of the second sheet 20 is arranged in an overlapping manner and bonded to the second surface 130b side of the third sheet 130, thereby forming the evaporation chamber 101. At this time, the main body 131 of the third sheet 130 overlaps with the main body 11 of the first sheet 10, the main body 131 of the third sheet 130 overlaps with the main body 21 of the second sheet 20, the injection part 32 of the third sheet 130 overlaps with the injection part 12 of the first sheet 10, and the injection part 32 of the third sheet 130 overlaps with the injection part 22 of the second sheet 20.

[0365] According to the laminated body of the first sheet 10, the second sheet 20 and the third sheet 130, the structures of the main body 11, the main body 21 and the main body 131 are as shown in Figures 38 to 42 The configuration is as shown in . The details are as follows.

[0366] The outer peripheral joint surface 33a of the third sheet 130 provided on the first surface 130a side and the outer peripheral surface of the inner surface 10a of the first sheet 10 are arranged in an overlapping manner, and the outer peripheral joint surface 33b of the third sheet 30 provided on the second surface 30b side and the outer peripheral surface of the inner surface 20a of the second sheet 20 are arranged in an overlapping manner, and they are respectively bonded together by bonding means such as diffusion bonding or brazing. Thus, a hollow portion based on the shape of the third sheet 130 is formed between the first sheet 10 and the second sheet 20, and the working fluid is sealed here to form a closed space 102.

[0367] The inner surface 10a of the first sheet 10 is arranged in an overlapping manner on the first surface 130a side of the peripheral liquid flow path portion 134 of the third sheet 130. As a result, the opening of the liquid flow path groove 35 is blocked by the first sheet 10 and becomes a part of the hollow portion. This becomes the condensate flow path 3, which is a second flow path for the condensate in a liquefied state of the working fluid sealed in the hollow portion to flow.

[0368] The inner surface 20a of the second sheet 20 is arranged on the second surface 30a side of the peripheral liquid flow path portion 134 of the third sheet 130 in an overlapping manner. As a result, the opening of the heat insulating portion groove 136 is blocked by the second sheet 20 to form the heat insulating portion 6. The heat insulating portion 6 is configured not to communicate with the condensate flow path 3 and the vapor flow path 4, and is set to have a lower thermal conductivity than the material adjacent to the heat insulating portion 6. The specific structure is not limited, as long as the heat insulating portion 6 is vacuumed, filled with air or other gas, or filled with a material with low thermal conductivity.

[0369] In addition, the inner surface 10a of the first sheet 10 is arranged in an overlapping manner on the first surface 130a side of the inner liquid flow path portion 138 of the third sheet 130. As a result, the opening of the liquid flow path groove 39 is blocked by the first sheet 10 and becomes a part of the hollow portion. This becomes the condensate flow path 3, which is a second flow path for the condensate in a liquefied state of the working fluid sealed in the hollow portion to flow.

[0370] The inner surface 20a of the second sheet 20 is arranged in an overlapping manner on the second surface 130b side of the inner liquid flow path portion 138 of the third sheet 130. As a result, the opening of the heat insulating portion groove 140 is blocked by the second sheet 20 to form the heat insulating portion 6. The heat insulating portion 6 is configured not to communicate with the condensate flow path 3 and the vapor flow path 4, and is set to have a lower thermal conductivity than the material adjacent to the heat insulating portion 6. The specific structure is not limited, as long as the heat insulating portion 6 is vacuumed, filled with air or other gas, or filled with a material with low thermal conductivity.

[0371] In this way, in the condensate flow path 3, a thin flow path surrounded by a wall on all sides is formed in the cross section, so that the condensate can be moved by a strong capillary force, thereby achieving smooth circulation. That is, when considering the flow path for the condensate to flow, compared with a so-called groove flow path in which one surface of the flow path is continuously open, according to the condensate flow path 3, a higher capillary force can be obtained.

[0372] Furthermore, since the condensate flow path 3 is formed separately from the vapor flow path 4 as the first flow path, the circulation of the working fluid can be smoothed.

[0373] On the other hand, in the thickness direction (z direction) of the evaporation chamber 101, a heat insulating portion with reduced thermal conductivity is provided on the opposite side of the condensate flow path 3. As a result, heat transfer to the working fluid becomes slow, and the phenomenon of local temperature rise and local temperature drop is reduced, so that uniformity can be improved. More specifically, such situations as drying out due to rapid heating or clogging of condensate due to excessive condensation that hinder the flow of the working fluid can be suppressed, thereby improving the heat transfer capacity.

[0374] The shapes of the condensate flow path 3 and the heat insulating portion 6 can be considered based on the shape and size described above with reference to the third sheet 130 .

[0375] The other parts are described below. Fig.38 It can be seen that the opening of the steam flow path groove 142 is blocked by the first sheet 10 and the second sheet 20, thereby forming a part of the hollow portion, where the flow path of the working fluid is formed, thereby forming the steam flow path 4 as the first flow path for the steam to flow. The relationship between the flow path cross-sectional area of ​​the condensate flow path 3 and the flow path cross-sectional area of ​​the steam flow path 4 can be considered in the same way as the relationship between the flow path cross-sectional area of ​​the condensate flow path 3 and the flow path cross-sectional area of ​​the steam flow path 4 described in the first embodiment.

[0376] The shape of the vapor flow path 4 can be considered based on the shape and size described above with reference to the third sheet 130 .

[0377] Furthermore, in the present embodiment, since the introduction portion 37 and the introduction portion 41 are provided, the steam flow path 4 is configured to be connected to the two introduction portions.

[0378] according to Fig.39 It can be seen that the opening of the groove 44a of the steam flow path connecting groove 44 of the third sheet 130 is blocked by the first sheet 10, and the opening of the groove 44b is blocked by the second sheet 20, thereby forming a hollow part in which multiple steam flow paths 4 are connected, and the hollow part becomes a flow path for the working fluid.

[0379] A working fluid is sealed in the sealed space 102 of the evaporation chamber 101. The type of the working fluid is not particularly limited, and working fluids commonly used in evaporation chambers such as pure water, ethanol, methanol, acetone, and mixtures thereof can be used.

[0380] [Manufacture of evaporation chamber]

[0381] The evaporation chamber as described above can be produced, for example, as follows.

[0382] For the sheet having the outer peripheral shape of the third sheet 130, the liquid flow path groove 35, the heat insulating portion groove 136, the liquid flow path groove 39, the heat insulating portion groove 140, the vapor flow path groove 142, and the groove 44a and the groove 44b are formed by half etching. Among them, the vapor flow path groove 142 is half-etched from both the first surface 130a side and the second surface 130b side to penetrate in the thickness direction. By etching in this way, the shapes of the introduction part 37 and the introduction part 41 can also be formed.

[0383] Next, the first sheet 10 is overlapped on the first surface 130a of the third sheet 130, and the second sheet 20 is overlapped on the second surface 130b of the third sheet 130 for temporary fastening. The temporary fastening method is not particularly limited, and resistance welding, ultrasonic welding, and bonding with adhesives can be cited.

[0384] Then, after temporary fastening, diffusion bonding is performed to permanently bond the first sheet 10, the second sheet 20, and the third sheet 130 together to form a sheet for the evaporation chamber. Moreover, brazing may be used instead of diffusion bonding to perform bonding. Here, the expression "permanently bonded" is not strictly bound by the meaning, and it means bonding to such an extent that the bonding can be maintained to such an extent that the airtightness of the enclosed space 102 can be maintained when the evaporation chamber 101 is in operation.

[0385] By performing the joining in a vacuum, the heat insulating part 6 can be made into a vacuum, and if it is performed in air or other gas, the heat insulating part 6 can be filled with the corresponding gas. In addition, if the heat insulating part groove 136 is provided with a column 136a, and the heat insulating part groove 140 is provided with a column 140a, it is possible to suppress the collapse and expansion of the heat insulating part 6 during joining, when the hollow part is depressurized as described below, and when the working fluid is injected. In addition, when a solid material is loaded into the heat insulating part 6, it is sufficient to load the material into the heat insulating part groove before joining.

[0386] After joining, the formed injection flow path 5 is evacuated to reduce the pressure on the hollow portion. Then, the working fluid is injected from the injection flow path 5 into the hollow portion after the pressure reduction, so that the working fluid enters the hollow portion. Then, the injection flow path 5 is closed by melting or riveting the overlapping injection portions 12, 22, and 32 to form a closed space. Thus, the working fluid is stably maintained inside the closed space 102.

[0387] In the evaporation chamber of this embodiment, since the internal liquid flow path portion 138 functions as a support, it is possible to suppress the closed space from being crushed during bonding and pressure reduction.

[0388] [Function of evaporation chamber]

[0389] Next, the function of the evaporation chamber 101 will be described. As described in Embodiment 1, the evaporation chamber 101 is arranged relative to the electronic device. Figure 1 , Fig.19 ) In addition, the method of considering the movement of the working fluid and the diffusion of heat in the condensate flow path 3 and the vapor flow path 4 can be considered in the same way as the case described in the first embodiment.

[0390] In this embodiment, the heat insulating portion 6 is provided on the opposite side of the condensate flow path 3 in the thickness direction (z direction) of the evaporation chamber 101, so that the heat transfer to the working fluid becomes slow, and the phenomenon of local temperature rise and local temperature drop is reduced, so that the uniformity can be improved. That is, it is possible to suppress the situation that the flow of the working fluid is hindered by drying due to rapid heating or clogging of the condensate due to excessive condensation, thereby improving the heat transfer capacity.

[0391] Therefore, the heat insulation part does not necessarily need to be arranged in the whole evaporation chamber, and can also be arranged only in the local part where heat transfer is assumed. Here, for example, the part where the heat source (electronic component) is arranged, the end of the evaporation chamber far away from the heat source, etc. can be listed.

[0392] In addition, if the introduction portion 37 and the introduction portion 41 are provided, a portion surrounded by the introduction surface 37b, the introduction surface 41b and the first sheet 10 and the second sheet 20 is generated, and the condensate is easily retained there due to the action of capillary force. As a result, the condensate is introduced into the condensate flow path 3 more smoothly.

[0393] 2.2. Other methods

[0394] Fig.44 This is an example in which the heat insulating groove 140 is provided at a portion of the second surface 130b of the third sheet 130. Fig.29Thus, the heat insulating portion 6 is also limited to the portion where the heat insulating portion groove 140 is provided. This allows the heat insulating portion to be provided according to the following thermal design: for example, the heat insulating portion 6 is provided in the portion close to the cooling object and in the portion where condensation is desired to be suppressed, and the heat insulating portion 6 is not provided in the portion where condensation is desired to be performed quickly.

[0395] Figure 45 to Figure 47 This is an example in which a heat insulating portion 6 is also provided in the steam flow path 4. Fig.38 Quite a picture.

[0396] Fig.45 This is an example in which heat insulating portions 6 are provided in the condensate flow path 3 and the vapor flow path 4 , respectively. Fig.46 This is an example of the heat insulating portion 6 that is connected through the condensate flow path 3 and the vapor flow path 4. Fig.47 This is an example in which the heat insulating portion 6 is provided only in the steam flow path 4 .

[0397] 3. Method 3

[0398] In Mode 1 and Mode 2, the introduction part 37 and the introduction part 39 have been described, but in Mode 3, the introduction part is described in detail. Therefore, the structure other than the introduction part can be considered in the same way as in Mode 1 and Mode 2, so the description is omitted. In addition, in Mode 1, the second surface 30b of the third sheet 30 is provided with a liquid flow path groove 40, and in Mode 2, the second surface 130b of the third sheet 130 is provided with a heat insulation groove 140, but it is not necessary to have these elements on the second surface of the third sheet, so here it is described by an example that these elements are not provided on the second surface of the third sheet. However, it is not a problem to have a liquid flow path groove 40 or a heat insulation groove 140 on the second surface of the third sheet.

[0399] In the following description, the same reference numerals as those used in Embodiment 1 are used for elements other than the introduction section.

[0400] 3.1. Method 3a

[0401] Fig.48 (a) Fig.48 (b) is a diagram for explaining the inner liquid flow path portion 238 and is similar to Fig.13 (a) Fig.13 Also, although the introduction section 241 is described here with reference to the inner liquid flow path section 238, the introduction section included in the outer liquid flow path section can also be considered in the same manner.

[0402] In addition, in this embodiment, the introduction portion 241 is provided in the inner liquid flow path portion 238. The introduction portion 241 is a portion formed on the boundary surface with the vapor flow path groove 42, and is a portion protruding toward the vapor flow path groove 42. Therefore, in this embodiment, the introduction portion 241 is arranged on both sides of the inner liquid flow path portion 238 in the width direction (y direction).

[0403] In this embodiment, the distance T from the introduction portion 241 to the first surface 30a (the top of the convex portion 39a of the liquid flow channel groove) in the thickness direction (z direction) is 203 The most protruding top 241a is provided at the position of the liquid flow path groove 39, and an arc-shaped introduction surface 241b is provided which is recessed toward the inner liquid flow path portion 238 side in the cross-sectional view from the top 241a. However, it is not necessarily an arc shape, and it may be a curved shape other than the arc recessed toward the inner liquid flow path portion 238 side in the cross-sectional view.

[0404] Other examples of the introduction portion will be shown later, but any introduction portion has a surface (introduction surface): the surface (introduction surface) has a surface approaching the liquid flow path groove (condensate flow path) from its most protruding top at a portion protruding toward the steam flow path groove 42 (steam flow path) side.

[0405] According to such an introduction portion 241 , the condensate is easily collected on the introduction surface 241 b , and the introduction portion 241 facilitates the movement of the working fluid in the condensate flow path 3 and the vapor flow path 4 , thereby improving the heat transport capability.

[0406] In addition, the surface of the introduction surface 241 b is not particularly limited, but may be a rough surface or a surface with minute steps, thereby improving the holding force against the condensed liquid.

[0407] The surface roughness (ISO 25178) of the introduction surface can be measured, for example, by a laser microscope (model: VK-X250) manufactured by KEYENCE Co., Ltd. The arithmetic mean height Sa of the surface roughness is preferably 0.005 μm or more, more preferably 0.03 μm or more. In addition, the maximum height Sz is preferably 0.05 μm or more, more preferably 0.3 μm or more.

[0408] The introduction section 241 having the above-described structure preferably further has the following structure.

[0409] exist Fig.48 (a) with W 205The width of the inner liquid flow path portion 238 (the size in the direction in which the inner liquid flow path portion 238 and the vapor flow path groove 42 are arranged, and is the maximum value) is preferably 3000 μm or less, and can be 2000 μm or less, or 1500 μm or less. 205 The width W is preferably 100 μm or more, and may be 200 μm or more, or 400 μm or more. 205 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 205 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0410] exist Fig.48 (a) with W 207 The protrusion amount W (the distance from the end of the convex portion 39a to the top 241a) is preferably 1000 μm or less, and may be 500 μm or less, or 300 μm or less. 207 It is preferably 20 μm or more, and may be 45 μm or more, or 60 μm or more. 207 The range of can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 207 The range of can be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0411] In addition, regarding Fig.48 (a) T 203 The thickness direction distance from the top 241a of the convex portion 39a to the top 241a of the introduction portion 241 is shown as T. 204 When T 203 Divide by T 204 The obtained value is preferably 0.05 or more, and may be 0.15 or more, or 0.3 or more. 203 Divide by T 204 The obtained value only needs to be 1.0 or less, and may be 0.8 or less, or 0.6 or less. 203 Divide by T 204 The range of the obtained value can be limited by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. 203 Divide by T 204The obtained value range may be limited by a combination of any two upper limit candidate values ​​among a plurality of upper limit candidate values, or a combination of any two lower limit candidate values ​​among a plurality of lower limit candidate values.

[0412] In the present embodiment, the value is 0.5, and the top portion 241 a is arranged at a position that becomes the center in the thickness direction of the inner liquid flow path portion 238 .

[0413] In addition, if Fig.48 As shown in (a), the width of the liquid flow path groove 39 closest to the introduction portion 241 is set to W. 209 , let the depth of the liquid flow path groove 39 closest to the introduction part 241 be D 201 , let the protrusion amount of the surface 30b (the surface without the liquid flow path groove 39) side of the protrusion amount of the introduction part 241 be W 210 The following relationship is preferred.

[0414] D 201 ×(W 209 / 2)<T 203 ×W 207 <(T 204 -T 203 )×W 210

[0415] This makes it easier for the condensed liquid working fluid to be recovered in the condensate flow path 3 , and for the liquid working fluid to move between the vapor flow path 4 and the condensate flow path 3 . Also, this makes it easier for the liquid working fluid to evaporate in the vapor flow path 4 .

[0416] Next, a description will be given of a structure in which the first sheet 10 , the second sheet, and the third sheet 30 are combined to form the evaporation chamber 1 . Fig.49 (a) Fig.49 (b) shows the Fig.18 (a) Fig.18 (b) The equivalent graph of .

[0417] And, in Fig.49 In the cross section shown in (a), the steam flow path 4 and the steam flow path 3 are separated by the convex portion 39a, but the convex portion 39a has a communicating opening portion 39b. Fig.49 As shown in (b), according to the cross section where the communication opening 39b is adjacent to the steam flow path 4, the steam flow path 4 and the steam flow path 3 are communicated through the communication opening 39b.

[0418] according to Fig.49 (a) Fig.49As can be seen from (b), the inner surface 10a of the first sheet 10 is arranged in an overlapping manner and joined to the first surface 30a side of the third sheet 30, and the inner surface 20a of the second sheet 20 is arranged in an overlapping manner and joined to the second surface 30b side of the third sheet 30, thereby forming the evaporation chamber 1.

[0419] Since the introduction portion 241 is provided, the introduction portion 241 is disposed between the condensate flow path 3 and the vapor flow path 4 and protrudes toward the vapor flow path 4 side.

[0420] In this embodiment, the introduction portion 241 has a top portion 241a that protrudes most toward the vapor flow path 4 in the thickness direction (z direction), and has an introduction surface 241b that is arc-shaped in cross section from the top portion 241a toward the side where the condensate flow path 3 is provided.

[0421] That is, the introduction portion is arranged between the condensate flow path 3 and the vapor flow path 4, protrudes toward the vapor flow path 4, and has a surface (introduction surface) including a surface approaching the condensate flow path 3 from its most protruding portion (top).

[0422] The working fluid that is condensed while being deprived of heat while moving in the steam flow path 4 adheres to the wall surface of the steam flow path 4. On the other hand, in the steam flow path 4, the steam continuously flows, so the condensed liquid is as in Fig.49 (a) Fig.49 In (b), arrow C 211 As shown, the condensate is pushed into the condensate flow path 3 by the vapor. Since the condensate flow path 3 includes the communication openings 39b, the condensate is distributed to the plurality of condensate flow paths 3 through the communication openings.

[0423] At this time, since the introduction portion 241 is provided on the inner surface of the steam flow path 4, a portion is formed between the introduction surface 241b and the first sheet 10, and the condensate is easily retained there due to the capillary force. As a result, the condensate is introduced into the condensate flow path 3 more smoothly, thereby increasing the heat transfer amount.

[0424] Here, the steam flow path 4, the introduction portion 241, and the condensate flow path 3 are preferably in the following relationship. Fig.50 A diagram for illustration is shown in FIG. Fig.50 In order to facilitate the observation, some of the numbers are omitted, but it can be referred to Fig.49 (a).

[0425] In with Fig.49 In the same cross section as (a), a rectangular region in the steam flow path 4 with the distance between the opposing top portions 241a as the horizontal direction and the size in the thickness direction of the steam flow path 4 as the vertical direction is defined as region A, and its area is defined as A A.

[0426] In with Fig.49 In the same cross section as (a), the region surrounded by the introduction surface 241b, the region A, the convex portion 39a and the first sheet 10 in the steam flow path 4 is referred to as region B, and its area is referred to as A. B .

[0427] In with Fig.49 In the same cross section as (a), the area of ​​the condensate flow path 3 closest to the area B is defined as area C, and its area is defined as A. C .

[0428] These A A , A B , A C It is preferable to have the following relationship.

[0429] A A >A B >A C

[0430] With such a relationship, the working fluid condensed from the vapor flow path 4 into the condensate flow path 3 can be easily introduced, and the liquid rapidly vaporized from the condensate flow path 3 into the vapor flow path 4 can be suppressed from flowing out.

[0431] 3.2. Mode 3b to Mode 3h

[0432] In the following figures, the following figures are shown: focusing on the shape of the introduction part, the forms 3b to 3h as other form examples are described. Fig.49 (a) Fig.49 (b) is equivalent to FIG. Moreover, the forms of these introduction parts can also be applied to the peripheral liquid flow path part. Moreover, for convenience, in all the examples, the reference numeral 238 represents the inner liquid flow path part, the reference numeral 241 represents the introduction part, the reference numeral 241a represents the top, and the reference numeral 241b represents the introduction surface.

[0433] exist Fig.51 (a) Fig.51 In the embodiment 3b of (b), the top portion 241a is arranged at a position smaller than Fig.49 (a) Fig.49 In the embodiment (b), the top 41a of 3a is close to the condensate flow path 3. Specifically, Fig.48 T 203 Divide by T 204 The obtained value is set to a range of 0.2 to 0.4.

[0434] According to this embodiment, since the space sandwiched between the introduction surface 141 b and the first sheet 10 is small, the capillary force is likely to act strongly, and the above-mentioned effect becomes more remarkable.

[0435] exist Fig.52 (a) Fig.52 In the embodiment (b) 3c, the introduction surface 241b extending from the top 241a is straight in the cross-sectional view. The introduction surface 241b of the above-mentioned embodiments 3a and 3b is an arc shape that is recessed toward the inner liquid flow path portion 238, but in the embodiment 3c, the introduction surface 241b is straight in the cross section.

[0436] Even in this way, the above-mentioned effects can be achieved.

[0437] exist Fig.53 (a) Fig.53 In the aspect 3d of (b), the top portion 241a is planar, and the introduction surface 241b includes a surface extending parallel to the direction in which the plurality of condensate flow paths 3 and the vapor flow paths 4 are arranged (in the y direction).

[0438] Even in this way, the above-mentioned effects can be achieved.

[0439] exist Fig.54 (a) Fig.54 In the embodiment 3e of (b), the introduction surface 241b extending from the top 241a is an arc shape protruding toward the steam flow path 4 in the cross-sectional view. However, it is not necessarily an arc shape, and may be a curved shape other than an arc shape protruding toward the steam flow path 4 in the cross-sectional view.

[0440] In this embodiment, as the introduction surface 241 b approaches the condensate flow path 3 , more portions with a narrow gap between the introduction surface 241 b and the first sheet 10 can be formed, and efficient use of the capillary force can be expected.

[0441] exist Fig.55 (a) Fig.55 In the embodiment 3f of (b), the top portion 241a is provided to be separated to the surface on the opposite side of the condensate flow path 3 in the vapor flow path 4. Even in such an embodiment, the introduction surface 241b can be formed, and the above-mentioned effect can be achieved.

[0442] Among them, from the viewpoint of utilizing stronger capillary force by narrowing the gap between the inlet surface and the first surface 10a, it is preferred that, as in the above-mentioned various form examples, the top is arranged in the thickness direction at any position of the side surface in the steam flow path that is not consistent with the inner surface opposite in the thickness direction.

[0443] exist Fig.56 (a) Fig.56 In the embodiment 3g of (b), the condensate flow path 3 is formed on both sides of the inner liquid flow path portion 238 in the thickness direction (i.e., this point is the same as the embodiment 1). In this example, the introduction portion 241 can form introduction surfaces 241b from its top 241a toward the condensate flow paths 3 on both sides, thereby achieving the above-mentioned effects for the condensate flow paths 3 existing on both sides in the thickness direction.

[0444] exist Fig.57 (a) Fig.57 In the embodiment 3h of (b), the condensate flow path 3 is formed at the center of the thickness direction of the inner liquid flow path portion 238. In this example, the evaporation chamber is composed of two sheets. In this case, the first sheet 210 has a part of the structure of the first sheet 10 and the third sheet 30, and the second sheet 220 has a part of the structure of the second sheet 20 and the third sheet 30, thereby forming a closed space of the evaporation chamber by combining the two.

[0445] Furthermore, in the embodiment 3h, the introduction surface 241b includes a surface extending from the top 241a of the introduction portion 241 in parallel with the direction in which the plurality of condensate flow paths 3 and the vapor flow paths 4 are arranged (in the y direction).

[0446] Even in this way, the above-mentioned effects can be achieved.

[0447] In addition, this embodiment is an example in which the thickness direction position (z direction position) of the top 241a and the condensate flow path 3 is the same, and in the above-mentioned embodiments, the thickness direction position (z direction position) of the top and the condensate flow path is different. Any embodiment can be applied as needed, but the embodiment in which the thickness direction position (z direction position) of the top and the condensate flow path is different has such a tendency that a large amount of condensate can be retained and introduced.

[0448] 4. Method 4

[0449] In the evaporation chamber, the working fluid may freeze in a temperature environment lower than the freezing point of the sealed working fluid. It is conceivable that in the case of expansion due to freezing, such as pure water, the evaporation chamber is deformed due to the volume expansion of the working fluid in the vapor flow path. In the case of such a problem, the working fluid preferably has a form that can suppress deformation even when frozen and expanded, so as to exhibit more stable performance.

[0450] Therefore, in Embodiment 4, an evaporation chamber having a structure for this purpose will be described.

[0451] In the fourth embodiment, the first sheet 10 and the second sheet 20 in the first to third embodiments are different. Therefore, the third sheet can be applied to the above-mentioned embodiments 1 to 3, and thus the description is omitted here. Here, for convenience, the third sheet 30 of the first embodiment is used for the description, but the present invention is not limited thereto. Therefore, the configuration of the electronic device or the operation of the working fluid, and the method of considering the heat diffusion based thereon are as described above, and thus the description is omitted.

[0452] 4.1. Method 4a

[0453] [Way]

[0454] exist Fig.58 A cross section of the evaporation chamber 301 is shown in FIG. Fig.58 is with Fig.15 According to the corresponding figure. Fig.58 It can be seen that the first sheet 310 includes an inner sheet 311 and a reinforcing sheet 312 , and the second sheet 320 includes an inner sheet 321 and a reinforcing sheet.

[0455] The inner sheet 311 is a sheet disposed in contact with the first surface 30a of the third sheet 30 and constitutes the inner surface 10a. Similarly, the inner sheet 321 is a sheet disposed in contact with the second surface 30b of the third sheet 30 and constitutes the inner surface 20a.

[0456] The reinforcing sheet 312 is disposed on the side of the inner sheet 311 opposite to the third sheet 30 and constitutes the outer surface 10b. Similarly, the reinforcing sheet 322 is disposed on the side of the inner sheet 321 opposite to the third sheet 30 and constitutes the outer surface 10b.

[0457] The inner sheet 311 and the reinforcing sheet 312 can also be configured as a composite. A composite refers to a laminated material formed by joining multiple sheets to each other. For example, for the inner sheet 311 and the reinforcing sheet 312, a composite can be made by plating another sheet onto one sheet. In this case, between the two sheets, a close-fitting layer (strike plating layer, seed layer, etc.) not shown in the figure can be sandwiched to improve their close fit. In addition, for the two sheets, a composite can also be made by performing diffusion bonding.

[0458] Similarly, the inner sheet 321 and the reinforcing sheet 322 can also be configured as a composite. A composite refers to a laminated material formed by joining multiple sheets to each other. For example, for the inner sheet 321 and the reinforcing sheet 322, a composite can be made by plating another sheet onto one sheet. In this case, between the two sheets, a close-fitting layer (strike coating, seed layer, etc.) not shown in the figure can be sandwiched to improve their close fit. In addition, for the two sheets, a composite can also be made by performing diffusion bonding.

[0459] The material constituting the inner sheet 311 and the inner sheet 321 is not particularly limited as long as it is a material with good thermal conductivity, and may contain copper or a copper alloy, for example. In this case, the thermal conductivity of each sheet can be improved. Therefore, the heat dissipation efficiency of the evaporation chamber 301 can be improved. In addition, when pure water is used as the working fluid, corrosion can be prevented. In addition, other metal materials such as aluminum or titanium, or other metal alloy materials such as stainless steel can also be used as long as the desired heat dissipation efficiency can be obtained and corrosion can be prevented.

[0460] The reinforcing sheet 312 is made of a material having a higher yield strength than the inner sheet 311, and the reinforcing sheet 322 is made of a material having a higher yield strength than the inner sheet 321. Here, the yield strength refers to the stress at which the permanent deformation during unloading becomes 0.2%.

[0461] The specific material of the reinforcing sheets 312 and 322 is not particularly limited, but preferably, it is a metal material with good thermal conductivity and desired mechanical strength, and can include materials containing copper alloy, iron alloy, nickel, nickel alloy, titanium, titanium alloy or aluminum alloy. Among them, as examples of iron alloy, stainless steel, Invar alloy material (iron alloy containing nickel), Kovar (iron alloy containing cobalt) can be listed.

[0462] The thickness of the inner sheet 311 and the inner sheet 312 can be set to, for example, 0.2 μm or more and 100 μm or less. By setting the thickness to 0.2 μm or more, it is possible to prevent pinholes from being formed in the inner sheet 311 and the inner sheet 312, and to prevent impurities contained in the materials constituting the reinforcing sheet 312 and the reinforcing sheet 322 from precipitating toward the third sheet 30 through the pinholes. On the other hand, by setting the thickness to 100 μm or less, it is possible to suppress the thickness of the evaporation chamber 301 from becoming thicker. The thickness of the inner sheet is more preferably 0.25 μm or more and 10 μm or less, and further preferably 0.45 μm or more and 5 μm or less.

[0463] In addition, in order to improve the reinforcing function, the thickness of the reinforcing sheets 312 and 322 may be thicker than the thickness of the inner sheets 311 and 321. Among them, from the viewpoint of improving the reinforcing function, the reinforcing sheet 321 is preferably thicker than the inner sheet 311, and more specifically, the thickness of the reinforcing sheet is preferably 5 times or more and 30 times or less, and more preferably 5 times or more and 20 times or less, the thickness of the inner sheet.

[0464] The specific thickness of the reinforcing sheet 312 and the reinforcing sheet 322 is not particularly limited, and is, for example, 3 μm or more and 100 μm or less. By setting the thickness to 3 μm or more, effective reinforcement can be achieved. On the other hand, by setting the thickness to 100 μm or less, the thickness of the evaporation chamber 301 can be suppressed from becoming thicker. It is more preferably 5 μm or more and 50 μm or less, and even more preferably 9 μm or more and 25 μm or less.

[0465] In addition, the thickness of the first sheet 310 and the second sheet 320 is 0.1 mm or less, preferably 0.05 mm or less, and more preferably 0.02 mm or less. Thus, a thin (e.g., 0.4 mm or less) evaporation chamber that is not prone to freezing expansion can be manufactured. On the other hand, the thickness of the first sheet 310 and the second sheet 320 is, for example, 0.01 mm or more. Thus, the deformation of the inner sheet 311 and the inner sheet 321 caused by the freezing expansion of the working fluid in the vapor flow path 4 can be suppressed.

[0466] In this embodiment, the first sheet 310 and the second sheet 320 both include an inner sheet and a reinforcing sheet. However, the present invention is not limited thereto, and when not necessary, a reinforcing sheet may be provided on only one of the first sheet and the second sheet.

[0467] Furthermore, a layer having the same material and thickness as the inner sheet may be further laminated on at least one of the reinforcing sheet 312 of the first sheet 310 and the reinforcing sheet 322 of the second sheet 320. This can suppress the occurrence of warping in the sheet laminated with the layer.

[0468] [Manufacturing method]

[0469] Next, use Figure 59 to Figure 64 , a method for manufacturing the evaporation chamber 301 having such a structure is described.

[0470] First, if Fig.59 As shown in FIG. 1 , as a preparation step, a flat metal material sheet M including a first surface Ma and a second surface Mb is prepared.

[0471] Then, if Fig.60 As shown, as a resist forming step, a resist film 340 is formed on the first surface Ma of the metal material sheet M, and a resist film 341 is formed on the second surface Mb. Before forming the resist film 340 and the resist film 341, as a pre-treatment, the first surface Ma and the second surface Mb of the metal material sheet M may be subjected to an acid degreasing treatment.

[0472] Next, if Fig.61 As shown, as a patterning process, the resist film 340 and the resist film 341 are patterned by photolithography technology.

[0473] In the patterning of the resist film 340, openings corresponding to the liquid flow path groove 39, the communication opening 39b, and the vapor flow path groove 42 of the inner liquid flow path 38 are formed. At this time, the openings corresponding to the liquid flow path groove 39 and the communication opening 39b can be formed in a manner smaller than the width of these liquid flow path grooves 39 and the communication opening 39b. On the other hand, the opening corresponding to the vapor flow path groove 42 can be formed to have the same width as the width of the vapor flow path groove 42 on the first surface 30a.

[0474] On the other hand, in the patterning of the resist film 341, openings corresponding to the liquid flow path groove 40, the communication opening 40b, and the vapor flow path groove 42 of the inner liquid flow path 38 are formed. At this time, the openings corresponding to the liquid flow path groove 40 and the communication opening 40b can be formed in a manner smaller than the width of these liquid flow path grooves 40 and the communication opening 40b. On the other hand, the opening corresponding to the vapor flow path groove 42 can be formed to have the same width as the width of the vapor flow path groove 42 on the second surface 30b.

[0475] Then, if Fig.62 As shown, as an etching process, the first surface 30a and the second surface 30b of the metal material sheet M are etched. As a result, the portion of the metal material sheet M corresponding to the opening portion formed with the resist film 340 and the resist film 341 is etched, thereby forming the liquid flow path groove 39, the connecting opening portion 39b, the liquid flow path portion 40, the connecting opening portion 40b and the vapor flow path groove 42. In addition, as the etching liquid, for example, an ferric chloride-based etching liquid such as an aqueous ferric chloride solution or a cupric chloride-based etching liquid such as an aqueous cupric chloride solution can be used.

[0476] Here, as described above, if the openings corresponding to the liquid flow path groove 39, the connecting opening 39b, the liquid flow path groove 40, and the connecting opening 40b in the resist film 340 and the resist film 341 are formed with a width smaller than the groove width, the amount of etching liquid entering the opening is reduced, thereby reducing the etching speed at the portion. Therefore, the depth of these liquid flow path grooves 39, the connecting opening 39b, the liquid flow path groove 40, and the connecting opening 40b can be made shallow. In contrast, by forming the openings of the resist film 340 and the resist film 341 corresponding to the vapor flow path groove 42 to be the same as the width of the vapor flow path groove 42 on the first surface 30a and the second surface 30b, the amount of etching liquid entering the opening can be ensured, thereby ensuring the etching depth for forming the vapor flow path groove 42 (as a result, the vapor flow path groove 42 is penetrated in the thickness direction.).

[0477] In addition, for example Figure 6The connecting portion 44c shown or other means for maintaining the inner liquid flow path portion 38 is used to form a portion that does not penetrate the groove in the thickness direction. For this portion, the depth can be suppressed by adjusting the width of the anti-etching film, or by providing an opening only on one side of the anti-etching film arranged on the two surfaces of the metal material sheet M.

[0478] After the etching process, Fig.63 As shown, as a resist removal step, the resist film 340 and the resist film 341 are removed.

[0479] In this way, the third sheet 30 can be obtained.

[0480] As the preparation step of the first sheet 310, a sheet having a reinforcing sheet 312 laminated on an inner sheet 311 is prepared, and as the preparation step of the second sheet 320, a sheet having a reinforcing sheet 322 laminated on an inner sheet 321 is prepared. The method of each preparation step is not particularly limited, but a method of manufacturing as a composite material can be adopted.

[0481] As another method, the inner sheets 311 and 312 may be formed by plating the reinforcing sheets 311 and 322 formed by the rolled pieces. In this case, a close-fitting layer for improving the bonding between the reinforcing sheets 312 and 322 and the inner sheets 311 and 321 may be sandwiched. Examples of close-fitting layers include strike plating layers and seed layers. For example, when the reinforcing sheets 312 and 322 are formed by stainless steel and the inner sheets 311 and 321 are formed by copper, a strike plating layer containing materials such as nickel or copper may be sandwiched, or a seed layer containing materials such as titanium and molybdenum may be sandwiched by sputtering. The thickness of the strike plating layer and the seed layer is, for example, in the range of 10 nm or more and 1000 nm or less. Alternatively, the inner sheets 311 and 321 may be formed by the rolled pieces, and the reinforcing sheets 312 and 322 may be formed by plating. Furthermore, one of the inner sheets 311 and 321 and the reinforcing sheets 312 and 322 may be formed by plating, and the other may be formed by laminating by further plating.

[0482] After the third sheet 30 , the first sheet 310 , and the second sheet 320 are prepared, they are temporarily fastened in a stacked state as a temporary fastening step.

[0483] The fixing method for temporary fastening is not particularly limited, and resistance welding, for example, can be performed. In this case, resistance welding can be performed in a spot shape using an electrode rod not shown. Laser welding can also be performed instead of resistance welding.

[0484] After the temporary fastening process, Fig.64As shown, as a bonding process, the first sheet 310, the second sheet 320 and the third sheet 30 are permanently bonded together by diffusion bonding. Diffusion bonding is a method in which the first sheet 310 and the third sheet 30 to be bonded are closely attached, and the third sheet 30 and the second sheet 320 are closely attached, and pressure and heating are applied in a controlled atmosphere such as vacuum or inert gas in the stacking direction, and bonding is performed by atomic diffusion occurring at the bonding surface. In diffusion bonding, although the material constituting each sheet is heated to a temperature close to the melting point, since it is lower than the melting point, it is possible to avoid the situation in which each sheet melts and deforms.

[0485] After the joining process, as a sealing process, the working fluid is sealed from the injection part into the hollow part. After the working fluid is injected, the injection flow path is sealed. For example, it can be: irradiating the injection part with a laser to partially melt the injection part and seal the injection flow path. As a result, the space sealed with the working fluid is blocked from the outside. In addition, in order to seal, the injection part can be tightened (it can be squeezed to make it plastically deformed), or it can also be brazed.

[0486] Through the above, the evaporation chamber 301 is obtained. In this example, each sheet is stacked after plating in the first sheet and the second sheet, but the present invention is not limited thereto, and plating may be performed after stacking each sheet. Thus, a layer based on plating is also formed on the side surface.

[0487] [Function of evaporation chamber]

[0488] The operation process related to cooling of the heat source in the evaporation chamber 301 is the same as that described above, and therefore, the description thereof is omitted here.

[0489] On the other hand, the electronic device equipped with the evaporation chamber 301 is sometimes placed in an environment with a temperature lower than the freezing point of the working fluid. In this case, the working fluid freezes, and depending on the type of the working fluid, expansion occurs due to freezing. For example, when the working fluid is pure water, it can freeze and expand in an environment below the freezing point. Due to this expansion, a force in a direction that causes the evaporation chamber 301 to expand in the thickness direction is sometimes applied to the portion where the working fluid accumulates.

[0490] In contrast, in the evaporation chamber 301, a reinforcing sheet 312 is provided in the first sheet 310, and a reinforcing sheet 322 is provided in the second sheet 320, and the first sheet 310 and the second sheet 320 are respectively reinforced, so that even if the force caused by the freezing expansion of the working fluid is applied, deformation can be suppressed. Therefore, it is possible to suppress the flatness of the contact surface with the heat source at the part that receives heat from the heat source and the contact surface with the component (such as the housing) at the part that releases heat to the outside from being reduced, thereby suppressing the formation of a gap. In this case, it is possible to suppress the situation where heat conduction from the heat source to the evaporation chamber 301 and heat conduction from the evaporation chamber 301 to the outside are hindered.

[0491] Furthermore, if the reinforcing sheet 312 is thicker than the inner sheet 311 and the reinforcing sheet 322 is thicker than the inner sheet 321 , the inner sheets 311 , 321 can be further reinforced by the reinforcing sheets 312 , 322 , thereby further suppressing deformation of the evaporation chamber 301 .

[0492] 4.2. Method 4b

[0493] Next, method 4b is described. Fig.65 A diagram for explaining the evaporation chamber 301' is shown in FIG. Fig.66 The diagrams for explaining the evaporation chamber 301 are shown in FIG. Fig.64 Comparative cross-sectional view.

[0494] exist Fig.65 In the evaporation chamber 301' shown, the third sheet 30 is not provided, and the first sheet 310' and the second sheet 320' are directly laminated together, that is, the inner sheet 311' of the first sheet 310' and the inner sheet 321' of the second sheet 320' are overlapped and joined together.

[0495] In this embodiment, grooves are formed on the overlapped surfaces of the inner sheet 311' and the inner sheet 321', thereby forming the condensate flow path 3 and the vapor flow path 4. The method of considering the shape of the condensate flow path 3 and the vapor flow path 4 is the same as above.

[0496] In this embodiment, since the reinforcing sheets 312 and 322 are also provided, the same effects as those described above can be achieved.

[0497] exist Fig.66 In the evaporation chamber 301 ″ shown, the third sheet 30 is not provided, and the first sheet 310 ″ and the second sheet 320 ″ are directly stacked together. That is, the inner sheet 311 ″ of the first sheet 310 ″ and the inner sheet 321 ″ of the second sheet 320 ″ are overlapped and joined together.

[0498] In this embodiment, the condensate flow path 3 is not provided between adjacent vapor flow paths 4, but an example in which the condensate flow path 3 and the vapor flow path 4 are provided in the same flow path. Therefore, in this embodiment, a capillary structure member 339 is arranged in the same flow path as the flow path that becomes the vapor flow path 4. The capillary structure member 339 is configured as a capillary structure (wick) through which the liquefied working fluid flows. The capillary structure member 339 can be composed of, for example, a metal mesh, metal powder, a metal strand, or the like.

[0499] In this embodiment, since the reinforcing sheets 312 and 322 are also provided, the same effects as those described above can be achieved.

[0500] 5. Method 5

[0501] The evaporation chamber 401 of the embodiment 5 is an example in which a first sheet 410 and a second sheet 420 are used instead of the first sheet 310 and the second sheet 320 included in the evaporation chamber 301 described in the embodiment 4. The first sheet 410 is different from the first sheet 310 in that a barrier sheet 413 is disposed between the inner sheet 311 and the reinforcing sheet 312 described by the first sheet 310. The second sheet 420 is different from the second sheet 320 in that a barrier sheet 423 is disposed between the inner sheet 321 and the reinforcing sheet 322 described by the first sheet 320.

[0502] Therefore, components other than the barrier sheets 413 and 423 can be considered in the same manner as the evaporation chamber 301 of the fourth embodiment, and therefore, the barrier sheets 413 and 423 will be described here.

[0503] The barrier material constituting the barrier sheets 413 and 423 is not particularly limited as long as it is a material that can prevent the metal elements constituting the reinforcing sheets 312 and 322 from penetrating toward the inner sheets 311 and 321. Such a barrier material may include, for example, at least one of tungsten (W), titanium (Ti), tantalum (Ta) and molybdenum (Mo). The barrier material may also be composed of only any one of tungsten, titanium, tantalum and molybdenum. In this case, the barrier sheets 413 and 423 are formed as a single-phase film. Alternatively, the barrier material may also be composed of any two or more materials of tungsten, titanium, tantalum and molybdenum combined. In this case, the barrier sheets 413 and 423 are formed as alloy films. As an example of such an alloy film, an alloy film of tungsten and titanium can be listed. In addition, the barrier material may also be a combination of the above-mentioned four metal elements and metal elements other than these. As an example of an alloy film in this case, an alloy film of nickel and tungsten can be listed.

[0504] The thickness of the barrier sheets 413 and 423 is arbitrary as long as the barrier function can be exerted. The thickness of the barrier sheets 413 and 423 is, for example, in the range of 10 nm or more and 1000 nm or less. By setting the thickness of the barrier sheets 413 and 423 to be 10 nm or more, it is possible to effectively prevent the metal elements constituting the reinforcing sheets 312 and 322 from penetrating. On the other hand, by setting it to be 1000 nm or less, it is possible to easily manufacture it by sputtering treatment, and it is possible to suppress the thickness of the evaporation chamber 401 from becoming thicker. Moreover, by setting it to be 1000 nm or less, it is possible to suppress the situation where heat conduction is hindered. From the viewpoint of more effectively exerting the barrier function, the thickness of the barrier sheet is preferably 100 nm or more.

[0505] Here, a method for confirming the composition of the barrier sheets 413 and 423 is described. First, the presence or absence of the barrier sheets 413 and 423 can be confirmed by, for example, taking an image of the following cross section using a SEM (scanning electron microscope), wherein the cross section is obtained by cutting the evaporation chamber 401 at an arbitrary position. As for the composition of the barrier sheets 413 and 423, for example, the lower surface of the evaporation chamber 401 can be slightly shaved off, the shaved components can be analyzed by an energy dispersive X-ray analyzer (EDX), and then further shaved off and the components can be analyzed. By repeating the component analysis in this way, the composition of the barrier sheets 413 and 423 can be confirmed.

[0506] In addition, a close-fitting layer for improving the bonding between the barrier sheets 413, 423 and the inner sheets 311, 321 can be formed. In the case where a close-fitting layer is formed, first, a close-fitting layer is formed on the surface of the barrier sheets 413, 423, and then the inner sheets 311, 321 are formed on the surface of the close-fitting layer. As examples of close-fitting layers, strike plating layers, seed layers, etc. can be listed. For example, in the case where the barrier sheets 413, 423 are formed with a molybdenum-containing material and the inner sheets 311, 321 are formed with copper, it can be that a seed layer containing copper material is sandwiched by sputtering treatment using a sputtering target containing copper. The thickness of the strike plating layer and the seed layer can be, for example, in the range of more than 50nm and less than 500nm. Alternatively, it can also be that the barrier sheets 413, 423 are formed by rolled pieces, and the reinforcing sheets 312, 322 are formed by plating treatment. Alternatively, one of the barrier sheets 413 and 423 and the reinforcing sheets 312 and 322 may be formed by plating, and the other may be formed by laminating by further plating.

[0507] According to such an evaporation chamber 401 , in addition to the same effects as those of the evaporation chamber 301 described in the fourth embodiment, it is possible to suppress the metal material forming the reinforcing sheet from diffusing into the inner sheet.

[0508] 6. Method 6

[0509] In the sixth embodiment, the shape of the liquid flow path groove of the third sheet is different from the evaporation chamber of the first to fifth embodiments described above. The other parts can be considered in the same way as the first to fifth embodiments, so the inner liquid flow path portion is described here, and the description of other parts is omitted. The same shape can also be applied to the outer peripheral liquid flow path portion.

[0510] Furthermore, for the sake of convenience, the parts common to the embodiments 1 to 5 are given the reference numerals of the embodiment 1, but the forms of the embodiments 2 to 5 can also be applied to the common parts.

[0511] 6.1. Method 6a

[0512] Fig.68 This is a diagram of the inner liquid flow path portion 538 of the evaporation chamber 501 of this embodiment viewed from the z direction, and is based on the Fig.14 Figure from the same perspective. Fig.68 As can be seen, the inner liquid flow path portion 538 includes a liquid flow path groove 551 extending in the x direction and liquid flow path protrusions 552 which are a pair of protrusions adjacent to each other across the liquid flow path groove 551. The liquid flow path groove 551 is configured to mainly transport a liquid working fluid.

[0513] The pair of liquid flow path protrusions 552 is composed of the following parts: a first liquid flow path protrusion 552A, which is arranged on one side (the y direction side in the figure) relative to the liquid flow path groove 551; and a second liquid flow path protrusion 552B, which is arranged on the side opposite to the one side (the side opposite to the y direction in the figure) relative to the liquid flow path groove 551. In addition, a plurality of the first liquid flow path protrusions 552A are arranged in the first direction (the x direction in the figure) to form a first liquid flow path protrusion column 553A, and similarly, a plurality of the second liquid flow path protrusions 552B are arranged in the first direction (the x direction in the figure) to form a second liquid flow path protrusion column 553B.

[0514] In addition, first connection grooves 554A are formed between the plurality of first liquid flow path protrusions 552A arranged in the first direction (x direction in the figure), and similarly, second connection grooves 554B are formed between the plurality of second liquid flow path protrusions 552B arranged in the first direction (x direction in the figure). Each of the first connection grooves 554A and each of the second connection grooves 554B is connected to the liquid flow path groove 551.

[0515] The working fluid that loses heat from the vapor state and condenses on the surface of the vapor flow groove 42 (vapor flow path 4) to become liquid enters the first connecting groove 554A or the second connecting groove 554B from the surface of the vapor flow groove 42 (vapor flow path 4) by capillary action, and then enters the liquid flow groove 551 (condensate flow path 3) by capillary action.

[0516] And, in Fig.68 In the example shown, the plurality of first liquid flow path convex portions 552A constituting the first liquid flow path convex portion row 553A are arranged at a fixed pitch P. 501 In the first direction (x direction), the plurality of second liquid flow path convex portions 552B constituting the second liquid flow path convex portion row 553B are also arranged at a fixed pitch P. 501 Arranged in the first direction (x direction).

[0517] By setting the pitch to be fixed in this way, the design of the first liquid flow path convex portion row 553A and the second liquid flow path convex portion row 553B does not become complicated. In addition, it is also expected that the action of each pair of liquid flow path convex portions 552 is made uniform. For example, it is expected that the ease with which the liquid working fluid enters the liquid flow path groove 551 from the plurality of first connecting grooves 554A and the plurality of second connecting grooves 554B is uniform.

[0518] However, the plurality of first liquid flow path convex portions 552A and the plurality of second liquid flow path convex portions 552B may not be arranged at a fixed pitch.

[0519] In addition, Fig.68 In the illustrated example, the first liquid flow path convex portion 552A constituting the pair of liquid flow path convex portions 552 and the second liquid flow path convex portion 552B adjacent to the liquid flow path groove 551 are formed line-symmetrically with respect to the liquid flow path groove 551 .

[0520] By making it line-symmetrical like this, the design of the first liquid flow path convex part row 553A and the second liquid flow path convex part row 553B does not become complicated. In addition, it can also be expected that the action of each pair of liquid flow path convex parts 552 is made uniform. For example, it can be expected that the ease with which the liquid working fluid enters the liquid flow path groove 551 from the plurality of first connecting grooves 554A and the plurality of second connecting grooves 554B is uniform.

[0521] However, in the present embodiment, the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B adjacent to the liquid flow path groove 551 may not be formed to be line-symmetrical with respect to the liquid flow path groove 551 .

[0522] Furthermore, the first liquid flow path convex portion 552A extends in a direction inclined with respect to the first direction so as to advance in the first direction (the x direction in the figure) from one side relative to the liquid flow path groove 551 (the y direction side in the figure) toward the liquid flow path groove 551, and the second liquid flow path convex portion 552B extends in a direction inclined with respect to the first direction so as to advance in the first direction from a side opposite to the one side relative to the liquid flow path groove 551 (the side opposite to the y direction in the figure) toward the liquid flow path groove 551. Furthermore, regarding the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B constituting the pair of liquid flow path convex portions 552, the distance on the first direction side is smaller than the distance on the side opposite to the first direction side.

[0523] use Fig.69 and Fig.70 , the shapes and functions of the above-mentioned first liquid flow path convex portion 552A and second liquid flow path convex portion 552B are described in detail.

[0524] First, the configurations of the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B described above will be described. Fig.69 Yes Description Fig.68 FIG. 5 is a diagram showing the configuration of a pair of liquid flow path protrusions 52. Fig.69 In the example shown, the first liquid flow path convex portion 552A has a planar shape of a parallelogram formed by four points P1, Q1, R1, and S1, and the side connecting P1 and Q1 forms an angle θ1 with the first direction (x direction). The angle θ1 can be set to a range greater than 0° and less than 90°, but is preferably greater than 30° and less than 60°.

[0525] As described above, the first liquid flow path convex portion 552A has a shape that extends in a direction inclined with respect to the first direction while advancing in the first direction (x direction) from the side relative to the liquid flow path groove 551 (the y direction side in the figure) toward the liquid flow path groove 551. Therefore, the first connection groove 554A (the portion surrounded by a dotted line in the figure) formed between the first liquid flow path convex portions 552A arranged in the first direction (x direction) also has a shape that extends in a direction inclined with respect to the first direction while advancing in the first direction (x direction) toward the liquid flow path groove 551 from the side relative to the liquid flow path groove 551 (the y direction side).

[0526] Similarly, the second liquid flow path convex portion 552B has a planar shape of a parallelogram formed by four points P2, Q2, R2, and S2, and the side connecting P2 and Q2 forms an angle θ2 with the first direction (x direction). The angle θ2 can be set to a range greater than 0° and less than 90°, but is preferably greater than 30° and less than 60°.

[0527] As described above, the second liquid flow path convex portion 552B has a configuration that extends in a direction oblique to the first direction while advancing in the first direction from the side opposite to the one side relative to the liquid flow path groove 551 (the side opposite to the y direction) toward the liquid flow path groove 551. Therefore, the second connection groove 554B (the portion surrounded by a dotted line in the figure) formed between the second liquid flow path convex portions 552B arranged in the first direction (x direction) also has a configuration that extends in a direction oblique to the first direction while advancing in the first direction (x direction) toward the liquid flow path 551 from the side opposite to the one side relative to the liquid flow path groove 551 (the side opposite to the y direction).

[0528] Here, with Fig.68 Same, in Fig.69 In the example shown, the first liquid flow path convex portion 552A constituting a pair of liquid flow path convex portions 552 and the second liquid flow path convex portion 552B adjacent to the main flow path groove 551 are formed to be line symmetrical with respect to the liquid flow path groove 551. In this case, the above-mentioned angle θ1 and angle θ2 are equal. In addition, in this case, the first connecting groove 554A and the second connecting groove 554B are also line symmetrical with respect to the liquid flow path 551.

[0529] By making it line-symmetrical like this, the design of the first liquid flow path convex part row 553A and the second liquid flow path convex part row 553B does not become complicated. In addition, it can also be expected that the action of each pair of liquid flow path convex parts 552 is made uniform. For example, it can be expected that the ease with which the liquid working fluid enters the liquid flow path groove 551 from the plurality of first connecting grooves 554A and the plurality of second connecting grooves 554B is uniform.

[0530] In this embodiment, the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B constituting the pair of liquid flow path convex portions 552 may not be formed line-symmetrically with respect to the liquid flow path groove 551. When not formed line-symmetrically, for example, the following effects can be achieved.

[0531] For example, in a case where vapor of a working fluid flows into or is generated in an area sandwiched by a pair of liquid flow path protrusions 552, it is necessary to prevent the vapor from intruding into the evaporation portion (the portion close to the heat source). Here, in the present method, even in a case where the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B constituting the pair of liquid flow path protrusions 552 are not formed to be linearly symmetrical with respect to the liquid flow path groove 551, the vapor of the working fluid will be shielded by the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B even if it moves in the first direction (x direction), thereby reducing the momentum of moving in the first direction (x direction), thereby preventing the vapor from moving toward the evaporation portion. Furthermore, regarding the role of the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B, the following will be described using Fig.70 This is described in more detail in the description of .

[0532] In the evaporation chamber 501 of the present embodiment, the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B constituting the pair of liquid flow path protrusions 552 is smaller on the first direction side than on the side opposite to the first direction side. Fig.69 As shown, in the first liquid flow path convex portion 552A (a parallelogram formed by four points P1, Q1, R1, and S1) and the second liquid flow path convex portion 552B (a parallelogram formed by four points P2, Q2, R2, and S2), the distance D1 between the end portions on the first direction (x direction) side (the distance between S1 and S2) is smaller than the distance D2 between the end portions on the opposite side of the first direction (x direction) side (the distance between R1 and R2).

[0533] Next, the functions of the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B having the above-described configuration will be described. Fig.70 Yes Description Fig.69 The figure is a diagram showing the effect of the pair of liquid flow path protrusions 552 shown in FIG. 1 , and is a diagram mainly explaining the flow of the liquid working fluid and the flow of the vapor working fluid in this embodiment. Fig.70 In FIG. 1 , the thick solid arrows indicate the flow of the liquid working fluid, and the thick dotted arrows indicate the flow of the vapor working fluid.

[0534] First of all, Fig.70 The flow of the liquid working fluid is shown for explanation.

[0535] If using Fig.69As described, the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B constituting a pair of liquid flow path protrusions 552 have a form extending in a direction inclined relative to the first direction, and the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B has the following form: the distance on the first direction side is smaller than the distance on the side opposite to the first direction side.

[0536] Therefore, in Fig.70 In the figure, as indicated by the thick solid arrow, the liquid working fluid existing in the area sandwiched between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B constituting a pair of liquid flow path protrusions 552 moves from the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is larger toward the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is smaller by capillary action.

[0537] That is, according to this embodiment, a stronger propulsive force can be provided to the liquid working fluid existing in the region sandwiched between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B constituting the pair of liquid flow path convex portions 552 so as to transport it in the first direction (x direction).

[0538] In addition, in the present embodiment, the depth of the area sandwiched by a pair of liquid flow path protrusions 552 can be set to such a form that the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is larger is deeper than the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is smaller.

[0539] By adopting such a configuration, more liquid working fluid can be stored in the region. Furthermore, as described above, the liquid working fluid in the region can be transported toward the first direction (x direction) (i.e., toward the evaporation portion V) with a stronger propulsion force. Therefore, the following situation can be prevented: the liquid working fluid is insufficient in the evaporation portion (the portion 4 close to the cooling object).

[0540] In addition, by adopting the above-mentioned configuration, the depth of the side where the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B is smaller becomes shallower, that is, the flow path cross-sectional area of ​​the side where the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B is smaller than the side where the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B is larger becomes smaller, so that the capillary action works more strongly. Therefore, it is possible to give a stronger propulsive force to the liquid working fluid in the liquid flow path groove 551, so that it can be transported in the first direction (x direction) in the liquid flow path groove 551 (condensate flow path 3) of the inner liquid flow path portion 538.

[0541] In addition, the liquid working fluid passing through the end portion on the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is smaller diffuses in the area sandwiched by the next pair of liquid flow path protrusions 552. However, due to the pressure of the diffusion and the volume of the liquid working fluid existing in the area sandwiched by the pair of liquid flow path protrusions 552, it is possible to more effectively prevent the vapor of the working fluid from invading the liquid flow path groove 551 (condensate flow path 3) from the first connecting groove 554A and the second connecting groove 554B.

[0542] The above-mentioned form can be obtained, for example, by half etching using an etching liquid to form the liquid flow path portion 50. In half etching using an etching liquid, there is a property that the etching depth of the larger etched area is more likely to become deeper than that of the smaller etched area.

[0543] Therefore, for example, the etching pattern for forming the inner liquid flow path portion 538 is set to be an etching pattern such that, with respect to the region sandwiched by the pair of liquid flow path protrusions 552, the area on the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is larger (the above-mentioned D2 side) than the area on the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is smaller (the above-mentioned D1 side). Thus, with respect to the depth of the region sandwiched by the pair of liquid flow path protrusions 552 formed by half etching using an etching solution, the depth on the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is larger (the above-mentioned D2 side) can be made deeper than the depth on the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is smaller (the above-mentioned D1 side).

[0544] Next, the flow of the working fluid which is vapor will be described.

[0545] If using Fig.69As described above, the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B, and the first connecting groove 554A and the second connecting groove 554B have a configuration extending in a direction inclined relative to the first direction. Therefore, the vapor of the working fluid diffused in the opposite direction to the first direction (x direction) through the vapor flow path groove 42 (vapor flow path 4) (indicated by a dotted arrow in the figure) is unlikely to intrude into the liquid flow path groove 551 (condensate flow path 3) through the first connecting groove 554A or the second connecting groove 554B which is in a direction substantially opposite to the diffusion direction.

[0546] That is, Fig.68 As shown, since the evaporation part (the part close to the cooling object) 4 is Fig.70 is located on the upper side (x direction side), so Fig.70 In the embodiment, the pressure of the vapor is higher on the upper side (the side in the x direction), and lower on the lower side (the side opposite to the x direction). Therefore, it is difficult for the vapor of the working fluid to diffuse from the lower side (the side opposite to the x direction) which is the side with lower pressure to the upper side (the x direction) which is the side with higher pressure. In other words, it is difficult for the vapor of the working fluid to flow from the lower side (the side opposite to the x direction) to the upper side (the x direction) in the first connecting groove 554A or the second connecting groove 554B.

[0547] Furthermore, as described above, the liquid working fluid passing through the end portion on the side where the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B is smaller diffuses in the region sandwiched by the next pair of liquid flow path convex portions 552. Therefore, by virtue of the pressure of this diffusion and the volume of the liquid working fluid existing in the region sandwiched by the pair of liquid flow path convex portions 552, it is possible to more effectively prevent the vapor of the working fluid from intruding into the liquid flow path groove 551 (condensate flow path 3) from the first connecting groove 554A and the second connecting groove 554B.

[0548] Therefore, according to the evaporation chamber 501 of this embodiment, the working fluid can be effectively prevented from invading the liquid flow path groove 551 (condensate flow path 3) from the first connecting groove 554A or the second connecting groove 554B in a vapor state, thereby improving the transport function of the liquid working fluid and improving the heat transport efficiency.

[0549] In addition, regarding the vapor pressure just after the inflow of vapor of the working fluid or the sudden boiling of the liquid working fluid (i.e., the generation of vapor) in the liquid flow path groove 551 (condensate flow path 3) (instantaneously), the side on which the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B of a pair of liquid flow path protrusions 552 is smaller becomes higher, and the other side (the side on which the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is larger, or the first connecting groove 554A side and the second connecting groove 554B side) becomes lower.

[0550] Therefore, the vapor flowing into or generated in the region sandwiched by the pair of liquid flow path protrusions 552 is more likely to flow toward the other side (the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is larger, or the first connection groove 554A side and the second connection groove 554B side) than to flow toward the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is smaller. That is, the vapor flowing into or generated in the region sandwiched by the pair of liquid flow path protrusions 552 is less likely to flow in the first direction (x direction) in the liquid flow path groove 551 (condensate flow path 3).

[0551] Therefore, according to the evaporation chamber 501 of this embodiment, when the temperature of the evaporation part V is high and the evaporation is active, for example, even if vapor flows into or is generated in the liquid flow path groove 551 (condensate flow path 3), the vapor that flows in or is generated can be prevented from moving in the first direction (x direction) in the liquid flow path groove 551 (condensate flow path 3), thereby improving the transport function of the liquid working fluid and improving the heat transport efficiency.

[0552] Furthermore, as described above, for the vapor flowing into or generated in the area sandwiched by a pair of liquid flow path protrusions 552, it is easier to move toward the other side (the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B is larger, or the first connecting groove 554A side and the second connecting groove 554B side) than to move toward the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B of the pair of liquid flow path protrusions 552 is smaller.

[0553] Here, the pressure is higher on the side where the distance between the first liquid flow path protrusion 552A and the second liquid flow path protrusion 552B of a pair of liquid flow path protrusions 552 is smaller and is located on the opposite side of the first direction (x direction) of a pair of liquid flow path protrusions 552 where vapor flows in or is generated. Therefore, it is difficult for vapor to pass through the high-pressure portion and flow into the pair of liquid flow path protrusions 552 located on the opposite side of the first direction (x direction).

[0554] Therefore, the steam is discharged to the steam flow path groove 42 (steam flow path 4) through the first connecting groove 554A and the second connecting groove 554B. Here, by designing the width of the first connecting groove 554A and the second connecting groove 554B to be larger than the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B of the pair of liquid flow path convex portions 552, the above-mentioned steam discharge effect can be further promoted.

[0555] Next, use Fig.71, the planar shapes (particularly the corners) of the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B are described in detail. As described later, the inner liquid flow path portion 538 is formed by half-etching the metal material sheet using an etching solution. Therefore, the planar shapes of the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B constituting the pair of liquid flow path convex portions 552 are not strictly parallelograms, but have rounded corners.

[0556] For example, Fig.71 As shown in FIG. 1 , the first liquid flow path protrusion 552A is in the form of a parallelogram (in Fig.71 In the parallelogram (shown by solid lines in FIG. 1 ), the steep corners are rounded to have curved portions 555 and 556 as shown by dotted lines. However, if the side 557 in the direction of the line connecting P1 and Q1 and the side 558 in the direction of the line connecting S1 and R1 remain, the above-mentioned various effects of the evaporation chamber 501 of this embodiment can be exerted. The same is true for the second liquid flow path convex portion 552B.

[0557] 6.2. Method 6b

[0558] Next, use Fig.72 The evaporation chamber of embodiment 6b will be described. The evaporation chamber of embodiment 6b differs from the evaporation chamber of embodiment 6a in the form of the inner liquid flow path portion, but the other structures may be the same as those of the evaporation chamber of embodiment 6a.

[0559] Fig.72 6b is a diagram showing an example of the inner liquid flow path portion 538' of the evaporation chamber 501'. Fig.72 is the evaporation chamber 501' and Fig.69 Quite a picture.

[0560] The liquid flow path portion of the evaporation chamber of the present method comprises: a plurality of liquid flow path grooves extending in the first direction and passing liquid working fluid; and a plurality of convex portion columns extending in the first direction across the liquid flow path grooves, the plurality of liquid flow path grooves include a liquid flow path groove serving as a reference, the convex portion columns respectively include a plurality of liquid flow path convex portions arranged in the first direction across a plurality of connecting grooves, the plurality of connecting grooves include: a first connecting groove arranged on one side relative to the reference main flow groove; and a second connecting groove arranged on the other side relative to the reference main flow groove, the first connecting groove extending in a direction inclined relative to the first direction in a manner of moving toward the reference main flow groove while moving in the first direction, and the second connecting groove extending in a direction inclined relative to the first direction in a manner of moving toward the liquid flow path groove serving as a reference while moving in the first direction.

[0561] In addition, the first connection grooves are aligned in the direction in which the first connection grooves extend, and the second connection grooves are aligned in the direction in which the second connection grooves extend.

[0562] For example, Fig.72 As shown, the inner liquid flow path portion 538' of the evaporation chamber 501' has three liquid flow path grooves (551', 551'A, 551'B) including a single reference liquid flow path groove 551'. Each liquid flow path groove extends in the first direction (x direction).

[0563] In addition, the inner liquid flow path portion 538' of the evaporation chamber 501' has four convex portion rows (553'A, 553'B, 553'C, 553'D) extending in the first direction. And, among the four convex portion rows (553'A, 553'B, 553'C, 553'D), the convex portion row located on one side (the Y direction side in the figure) of the liquid flow path groove 551 as a reference is the first convex portion row (553'A, 553'B), and the convex portion row located on the other side (the side opposite to the y direction in the figure) of the liquid flow path groove 551' as a reference is the second convex portion row (553'D, 553'C).

[0564] To put it in a more understandable way, Fig.72 In the example shown, the first convex portion row 553'A, the liquid flow channel 551'A, the first convex portion row 553'B, the reference main flow channel 551', the second convex portion row 553'D, the liquid flow channel 551'B, and the second convex portion row 553'C are arranged in order from the y direction side in the figure.

[0565] The first convex portion row 553'A includes a plurality of liquid flow path convex portions 552'A arranged in the first direction (x direction) with a plurality of first connection grooves 554'A interposed therebetween. Similarly, the first convex portion row 553'B includes a plurality of liquid flow path convex portions 552'B arranged in the first direction with a plurality of first connection grooves 554'B interposed therebetween. In addition, the second convex portion row 553'D includes a plurality of liquid flow path convex portions 552'D arranged in the first direction with a plurality of second connection grooves 554'D interposed therebetween. In addition, the second convex portion row 553'C includes a plurality of liquid flow path convex portions 552'C arranged in the first direction with a plurality of second connection grooves 554'C interposed therebetween.

[0566] Furthermore, the first connection grooves 554'A and 554'B extend in a direction inclined with respect to the first direction (x direction) so as to advance in the first direction (x direction) from one side (y direction side) of the reference liquid flow path groove 551 toward the reference liquid flow path groove 551'.

[0567] exist Fig.72In the example shown, the angle (the angle on the acute angle side) formed by the direction in which the first connection grooves 554'A and 554'B extend (in the figure, the direction indicated by the thick dashed arrow) and the first direction (x direction) is set to angle θ3. Angle θ3 can be set to a range greater than 0° and less than 90°, but is preferably greater than 30° and less than 60°.

[0568] In addition, the second connection grooves 534'D and 554'C extend in a direction inclined with respect to the first direction (x direction) while advancing from the other side (opposite side in the y direction) of the reference liquid flow path groove 551' toward the reference liquid flow path groove 551'.

[0569] exist Fig.72 In the example shown, the angle (the angle on the acute angle side) formed by the direction in which the second connection grooves 554'D and 554'C extend (in the figure, the direction indicated by the thick dashed arrow) and the first direction (x direction) is set to angle θ4. Angle θ4 can be set to a range greater than 0° and less than 90°, but is preferably greater than 30° and less than 60°.

[0570] In addition, the first connection grooves 554 ′A and 554 ′B are aligned in the direction in which the first connection grooves extend, and the second connection grooves 554 ′D and 554 ′C are aligned in the direction in which the second connection grooves extend.

[0571] For example, Fig.72 As shown, the first connecting grooves 554'A and 554'B are arranged in the direction in which the first connecting groove extends, that is, the direction in which the angle formed with the first direction (x direction) is angle θ3 (in the figure, the direction is indicated by the thick dotted arrow), and the second connecting grooves 554'C and 554'D are arranged in the direction in which the second connecting groove extends, that is, the direction in which the angle formed with the first direction (x direction) is angle θ4 (in the figure, the direction is indicated by the thick dotted arrow).

[0572] By setting such a configuration, the design of the plurality of first connecting grooves and second connecting grooves does not become complicated. In addition, it can be expected that the functions of each connecting groove are uniform. For example, it can be expected that the ease with which the liquid working fluid enters each liquid flow path groove (condensate flow path) from the plurality of first connecting grooves and the plurality of second connecting grooves is uniform.

[0573] In addition, as described above, the evaporation chamber 501' has a plurality of liquid flow path grooves (551', 551'A, 551B) and a plurality of convex portion rows (553'A, 553'B, 555'C, 553'D) extending in the first direction across the liquid flow path grooves, so that the concavo-convex structure of the inner liquid flow path portion 538' of the evaporation chamber 501' can be made more complex, thereby further increasing the surface area of ​​the inner liquid flow path portion 538'. Therefore, the transport amount of the working fluid based on the capillary action can be further increased, thereby further improving the transport efficiency.

[0574] In addition, the first connection groove 554'A and the second connection groove 554'C of the evaporation chamber 501' have a shape extending in a direction inclined relative to the first direction. Therefore, the following effect can be expected, similar to the evaporation chamber 501 of the above-mentioned mode 6a: the working fluid of the vapor diffused in the opposite direction of the first direction (x direction) through the vapor flow path 4 is difficult to intrude into the liquid flow path groove (condensate flow path) through the first connection groove 554'A or the second connection groove 554'C which is in a direction substantially opposite to the diffusion direction.

[0575] 6.3. Method 6c

[0576] Next, use Fig.73 The evaporation chamber of embodiment 6c will be described.

[0577] As described above, the first connection groove 554'A and the second connection groove 554'C of the evaporation chamber 501' of the embodiment 6b have a shape extending in a direction inclined relative to the first direction. Therefore, the following effect can be expected, similar to the evaporation chamber 501 of the embodiment 6a: the working fluid of the vapor diffused in the opposite direction of the first direction (x direction) through the vapor flow path portion is difficult to intrude into the liquid flow path groove through the first connection groove 554'A or the second connection groove 554'C which is in a direction substantially opposite to the diffusion direction.

[0578] However, in the above-mentioned evaporation chamber 501', unlike the evaporation chamber 501 of embodiment 6a, the distance (D3) between the adjacent liquid flow path protrusions is constant (refer to Fig.72 ). That is, in Fig.72 The evaporation chamber 501' shown does not have a configuration similar to that of the evaporation chamber 501 of form 6a, that is, the distance between the first liquid flow path protrusion and the second liquid flow path protrusion constituting a pair of liquid flow path protrusions is smaller on the first direction side than on the side opposite to the first direction side.

[0579] More specifically, in the evaporation chamber 501 of mode 6a, as Fig.69As shown, the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B has a configuration in which the distance (D1) on the first direction side (x direction side) is smaller than the distance (D2) on the side opposite to the first direction side.

[0580] Furthermore, due to such a configuration, the liquid working fluid passing through the end portion on the side where the distance between the first liquid flow path convex portion 552A and the second liquid flow path convex portion 552B is smaller is diffused in the region sandwiched by the next pair of liquid flow path convex portions 552. Furthermore, due to the pressure of this diffusion and the volume of the liquid working fluid existing in the region sandwiched by the pair of liquid flow path convex portions 552, the following effect can be expected: the vapor working fluid can be more effectively prevented from intruding into the liquid flow path portion 551 (condensate flow path 3) from the first connecting groove 554A and the second connecting groove 554B.

[0581] On the other hand, in the evaporation chamber 501' of mode 6b, as Fig.72 As shown, the distance (D3) between the adjacent liquid flow path convex portion 552'B and the liquid flow path convex portion 552'D is constant, and the distance on the first direction side (x direction side) and the distance on the side opposite to the first direction side are also the same.

[0582] Therefore, the evaporation chamber 501 of method 6a is more preferable in terms of the effect of being able to more effectively prevent the vapor working fluid from intruding into the reference liquid flow path groove 551' (condensate flow path 3) from the first connecting groove 554'B and the second connecting groove 554'D.

[0583] Moreover, in Fig.72 In the evaporation chamber 501 ′ shown, the first connecting grooves 554 ′A and 554 ′B are respectively aligned in the direction in which the first connecting grooves extend, and the second connecting grooves 554 ′D and 554 ′C are respectively aligned in the direction in which the second connecting grooves extend.

[0584] For example, Fig.72 As shown, the first connecting grooves 554'A and 554'B are arranged in the direction in which the first connecting groove extends, that is, the direction in which the angle formed with the first direction (x direction) is angle θ3 (in the figure, the direction is indicated by the thick dotted arrow), and the second connecting grooves 554'C and 554'D are arranged in the direction in which the second connecting groove extends, that is, the direction in which the angle formed with the first direction (x direction) is angle θ4 (in the figure, the direction is indicated by the thick dotted arrow).

[0585] Therefore, there is a concern that the vapor working fluid that enters from the first connecting groove 554'A, which is further outward than the reference liquid flow path groove 551', will easily enter the reference liquid flow path groove 551' (condensate flow path 3) through the first connecting groove 554'B, which is further inward, because there is no liquid flow path convex portion in the direction in which the first connecting groove extends. Similarly, there is a concern that the vapor working fluid that enters from the second connecting groove 554'C, which is further outward than the reference liquid flow path groove 551', will easily enter the reference liquid flow path groove 551' (condensate flow path 3) through the second connecting groove 554'D, which is further inward, because there is no liquid flow path convex portion in the direction in which the second connecting groove extends.

[0586] Therefore, in the evaporation chamber of mode 6c, a liquid flow path convex portion is formed in the direction in which the connection groove extends. In addition, the evaporation chamber of mode 6c has a different shape of the inner liquid flow path portion from the evaporation chambers of modes 6a and 6b, and the other structures can be the same as those of the evaporation chamber of mode 6a.

[0587] Fig.73 6c is a diagram showing an example of the inner liquid flow path portion 538" of the evaporation chamber 501". Fig.73 As shown, the inner liquid flow path portion 538" of the evaporation chamber 501" has three liquid flow path grooves (551", 551"A, 551"B) including a liquid flow path groove 551" as a reference. Each liquid flow path groove extends in the first direction (x direction).

[0588] In addition, the inner liquid flow path portion 538" of the evaporation chamber 501" has four convex columns (553"A, 553"B, 553"C, 553"D) extending in the first direction. Furthermore, among the four convex columns (553"A, 553"B, 553"C, 553"D), the convex column on one side (y-direction side) of the liquid flow path groove 551" serving as a reference is the first convex column (553"A, 553"B), and the convex column on the other side (the side opposite to the y-direction) of the liquid flow path groove 551" serving as a reference is the second convex column (553"D, 553"C).

[0589] To put it in a more understandable way, Fig.73 In the example shown, starting from the y direction side, there are arranged in sequence: the first convex column 553"A, the liquid flow path groove 551"A, the first convex column 553"B, the liquid flow path groove 551" serving as a reference, the second convex column 553"D, the liquid flow path groove 551"B, and the second convex column 553"C.

[0590] The first protrusion column 553"A includes a plurality of liquid flow path protrusions 552"A arranged in the first direction (x direction) across a plurality of first connecting grooves 554"A. Similarly, the first protrusion column 553"B includes a plurality of liquid flow path protrusions 552"B arranged in the first direction across a plurality of first connecting grooves 554"B. In addition, the second protrusion column 553"D includes a plurality of liquid flow path protrusions 552"D arranged in the first direction across a plurality of second connecting grooves 554"D. In addition, the second protrusion column 553"C includes a plurality of liquid flow path protrusions 552"C arranged in the first direction across a plurality of second connecting grooves 554"C.

[0591] Furthermore, the first connecting grooves 554"A and 554"B extend in a direction inclined relative to the first direction (x direction) while advancing from one side (y direction side) of the reference liquid flow path groove 551" toward the reference liquid flow path groove 551" respectively. Fig.73 In the example shown, the angle (the angle on the acute angle side) formed by the direction in which the first connecting groove 554"A extends (in the figure, the direction indicated by the thick dotted arrow) and the first direction (x direction) is set to angle θ5. The angle θ5 can be set in a range greater than 0° and less than 90°, but is preferably greater than 30° and less than 60°.

[0592] In addition, the second connecting grooves 554"D and 554"C extend in a direction inclined relative to the first direction (x direction) while advancing from the other side (the opposite side of the y direction) of the reference liquid flow path groove 551" toward the reference liquid flow path groove 551" as the first direction. Fig.73 In the example shown, the angle (the angle on the acute angle side) formed by the direction in which the second connecting groove 554"C extends (in the figure, the direction indicated by the thick dotted arrow) and the first direction (x direction) is set to angle θ6. The angle θ6 can be set to a range greater than 0° and less than 90°, but is preferably greater than 30° and less than 60°.

[0593] Here, in the evaporation chamber of the present method, in a pair of adjacent first convex columns, the first convex column arranged on the outside relative to the liquid flow path groove serving as a reference is regarded as the outer first convex column, and the first convex column arranged on the inside relative to the liquid flow path groove serving as a reference is regarded as the inner first convex column. In a pair of adjacent second convex columns, the second convex column arranged on the outside relative to the liquid flow path groove serving as a reference is regarded as the outer second convex column, and the second convex column arranged on the inside relative to the liquid flow path groove serving as a reference is regarded as the inner second convex column. In this case, the liquid flow path convex portions constituting the inner first convex column are arranged in the direction in which the first connecting groove passing between the liquid flow path convex portions constituting the outer first convex column extends, and the liquid flow path convex portions constituting the inner second convex column are arranged in the direction in which the second connecting groove passing between the liquid flow path convex portions constituting the outer second convex column extends.

[0594] For example, in Fig.73 In the evaporation chamber 501" shown, the 1st convex column 553"A is the outer 1st convex column, and the 1st convex column 553"B is the inner 1st convex column. Similarly, the 2nd convex column 553"C is the outer 2nd convex column, and the 2nd convex column 553"D is the inner 2nd convex column.

[0595] Furthermore, in the direction in which the first connecting groove 554"A extending between the liquid flow path convex portions 552"A constituting the first convex portion column 553"A constituting the outer first convex portion column (in the figure, the direction indicated by the thick dotted arrow), a liquid flow path convex portion 552"B constituting the first convex portion column 553"B constituting the inner first convex portion column is arranged.

[0596] Therefore, for the working fluid of vapor invading from the first connecting groove 554"A which is further outside than the liquid flow path groove 551" serving as a reference, its flow is blocked by the liquid flow path protrusion 552"B existing in the direction in which the first connecting groove extends, and thus it is difficult to invade the liquid flow path groove 551" which is further inside and serves as a reference. In addition, since the flow of vapor is dispersed by the liquid flow path protrusion 552"B, the pressure of vapor is also reduced. Therefore, it is more difficult to invade the liquid flow path groove 551" which serves as a reference.

[0597] Similarly, in the direction in which the second connecting groove 554"C extending between the liquid flow path convex portions 552"C constituting the second convex portion row 553"C as the outer second convex portion row extends (in the figure, the direction is indicated by the thick dotted arrow), a liquid flow path convex portion 552"D constituting the second convex portion row 553"D as the inner second convex portion row is arranged.

[0598] Therefore, for the working fluid of vapor invading from the second connecting groove 554"C which is further outside than the liquid flow path groove 551" serving as a reference, its flow is blocked by the liquid flow path protrusion 552"D existing in the direction in which the first connecting groove extends, and thus it is difficult to invade the liquid flow path groove 551" which is further inside and serves as a reference. In addition, since the flow of vapor is dispersed by the liquid flow path protrusion 552"D, the pressure of vapor is also reduced. Therefore, it is more difficult to invade the liquid flow path groove 551" which serves as a reference.

[0599] Therefore, according to the evaporation chamber 501 ″, the vapor working fluid can be effectively prevented from intruding into the liquid flow path groove 551 ″ serving as a reference, thereby improving the transport function of the liquid working fluid and improving the heat transport efficiency.

[0600] In addition, Fig.72 The evaporation chamber 501' is the same as the one shown in the figure. Since the evaporation chamber 501" has a plurality of liquid flow path grooves (551", 551"A, 551"B) and a plurality of convex portion rows (553"A, 553"B, 553"C, 553"D) extending in the first direction across these liquid flow path grooves, the concave-convex structure of the inner liquid flow path portion 538" of the evaporation chamber 501" can be made more complex, thereby further increasing the surface area of ​​the inner liquid flow path portion 538". Therefore, the delivery amount of the working fluid based on capillary action can be further increased, thereby further improving the delivery efficiency.

[0601] The present disclosure is not limited to the above-mentioned embodiments, and the components can be modified and embodied within the scope of the gist thereof. In addition, a plurality of components disclosed in the above-mentioned embodiments can be combined to form various embodiments that exert effects.

[0602] Some components may be deleted from all the components shown in each embodiment, and only one or some of the components may be used from the viewpoint of obtaining the desired effect.

[0603] Description of symbols

[0604] 1. 51: evaporation chamber;

[0605] 2: Confined space;

[0606] 3: Condensate flow path;

[0607] 4: Steam flow path;

[0608] 10: first piece;

[0609] 11: Subject;

[0610] 12: injection part;

[0611] 20: second piece;

[0612] 21: Subject;

[0613] 22: injection part;

[0614] 30, 52: the third piece;

[0615] 31, 53: main body;

[0616] 32: injection part;

[0617] 33: peripheral joint;

[0618] 34: Peripheral liquid flow path part (liquid flow path part);

[0619] 37: introduction part;

[0620] 38, 54: Inner liquid flow path part (liquid flow path part);

[0621] 41: introduction part;

[0622] 42: steam flow groove;

[0623] 44: steam flow path connecting groove;

[0624] 54a: communicating holes in the thickness direction;

[0625] 80: Electronic equipment;

[0626] 81: housing;

[0627] 83: Electronic components;

[0628] 101: evaporation chamber;

[0629] 130: The third piece;

[0630] 131: Subject;

[0631] 134: Peripheral liquid flow path part (liquid flow path part);

[0632] 136: groove for heat insulation;

[0633] 138: Inner liquid flow path part (liquid flow path part);

[0634] 140: groove for heat insulation;

[0635] 201: evaporation chamber;

[0636] 230: The third piece;

[0637] 238: Inner liquid flow path portion (liquid flow path portion);

[0638] 241: introduction part;

[0639] 301: evaporation chamber;

[0640] 310: The first piece;

[0641] 311: medial piece;

[0642] 312: Reinforcement sheet;

[0643] 320: The second piece;

[0644] 321: medial piece;

[0645] 322: Reinforcement sheet;

[0646] 401: evaporation chamber;

[0647] 410: The first piece;

[0648] 411: medial piece;

[0649] 413: Barrier sheet;

[0650] 420: The second piece;

[0651] 423: Barrier sheet;

[0652] 501: evaporation chamber;

[0653] 538: inner liquid flow path portion;

[0654] 551: steam flow groove;

[0655] 552: A pair of liquid flow path convex parts;

[0656] 552A: The first liquid flow path convex portion;

[0657] 552B: The second liquid flow path convex portion;

[0658] 553A: 1st liquid flow path convex part row;

[0659] 553B: The second liquid flow path convex portion row;

[0660] 554A: 1st connection slot;

[0661] 554B: 2nd connection slot.

Claims

1. An evaporation chamber, wherein a working fluid is enclosed in a closed space, wherein: A first flow path and a liquid flow path portion adjacent to the first flow path are provided in the sealed space, and the liquid flow path portion has second flow paths on both sides in the thickness direction of the evaporation chamber. The evaporation chamber is composed of three overlapping sheets. The sheet arranged at the center of the three sheets has the first flow path formed therein so as to penetrate the sheet in the thickness direction and extend along the surface of the sheet. The second flow paths are provided on both surfaces in the thickness direction of the liquid flow path portion of the sheet disposed at the center.

Images