Substrate and manufacturing method thereof

Abstract

The invention discloses a substrate and a manufacturing method thereof. The substrate comprises a substrate body; the multiple groups of first electrodes are located on one side of the substrate, and the first electrodes reflect light; different groups of first electrodes correspond to pixels emitting different colors of light; the plurality of groups of cavity length adjusting structures are positioned on one sides, far away from the substrate, of the plurality of groups of first electrodes and are in one-to-one correspondence with the plurality of groups of first electrodes; the thicknesses of different groups of cavity length adjusting structures corresponding to different colors of light are different; one group of cavity length adjusting structures with the smallest thickness is composed of a first barrier layer, and the other groups of cavity length adjusting structures are all composed of first cushion layers and the first barrier layers; the first cushion layer is located between the corresponding first electrode and the first barrier layer, the first cushion layer is made of an organic material, and the first barrier layer is made of an inorganic material.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to a substrate and a manufacturing method thereof. Background Art

[0002] Silicon-based organic light-emitting diodes (OLEDs) use mature silicon-based semiconductor process technology to produce OLED displays with high brightness, high color gamut, low power consumption, high pixel density (Pixels Per Inch, PPI), and high refresh rate. They are widely used in the fields of virtual reality (VR) / augmented reality (AR).

[0003] In order to obtain high-brightness display products, the anode in the display product needs to have a high reflectivity. In order to obtain a display product with a high color gamut, a special cavity length structure is required to purify light of a specific wavelength. The film layer where the traditional cavity length structure is located is mainly a metal oxide layer represented by indium tin oxide (ITO) and an inorganic film layer represented by silicon oxide (SiO), which is formed through multiple yellow light and etching processes. The process is relatively complicated, and during the production process, the thickness of the anode film layer will be reduced due to the need for multiple etching and wet processes. The surface of the anode is damaged, making the surface roughness of the anode worse, resulting in a decrease in the reflectivity of the anode, which in turn reduces the brightness of the display product and affects the life of the product. Summary of the invention

[0004] The embodiments of the present disclosure provide a substrate and a method for manufacturing the same, so as to solve the above-mentioned technical problems existing in the prior art.

[0005] In a first aspect, in order to solve the above technical problems, the present disclosure provides a substrate, including:

[0006] substrate substrate;

[0007] A plurality of groups of first electrodes are located on one side of the substrate, the first electrodes reflect light; different groups of first electrodes correspond to pixels emitting light of different colors;

[0008] A plurality of groups of cavity length adjustment structures are located on a side of the plurality of groups of first electrodes away from the substrate and correspond one to one with the plurality of groups of first electrodes; different groups of cavity length adjustment structures corresponding to different colors of light have different thicknesses;

[0009] A group of cavity length adjustment structures with the smallest thickness is composed of a first blocking layer, and the cavity length adjustment structures of the remaining groups are composed of a first cushion layer and the first blocking layer; the first cushion layer is located between the corresponding first electrode and the first blocking layer, the first cushion layer is composed of an organic material, and the first blocking layer is composed of an inorganic material.

[0010] In a possible implementation manner, the substrate further includes:

[0011] A plurality of groups of microlens structures are located on a side of the plurality of groups of first electrodes away from the substrate;

[0012] The multiple groups of microlens structures correspond to at least the remaining groups of cavity length adjustment structures one by one; and a surface of the microlens structure away from the substrate is a convex surface.

[0013] In a possible implementation manner, the multiple groups of microlens structures correspond one-to-one to the remaining groups of cavity length adjustment structures;

[0014] The cavity length adjustment structures of the remaining groups are multiplexed as corresponding microlens structures.

[0015] In a possible implementation manner, the multiple groups of microlens structures correspond one-to-one to the multiple groups of first electrodes, and the multiple groups of microlens structures are located on a side of the multiple groups of cavity length adjustment structures away from the substrate;

[0016] The microlens structure includes a second cushion layer and a second barrier layer, wherein the second cushion layer is located between the first barrier layer and the second barrier layer.

[0017] In a possible implementation manner, the first electrode includes:

[0018] A cushion structure is located on one side of the substrate; a side of the cushion structure away from the substrate is a convex surface;

[0019] The conductive structure is located on a side of the cushion structure away from the substrate, and the refractive index of the conductive structure is greater than the refractive index of the cavity length adjustment structure.

[0020] In a possible implementation manner, the thicknesses of the first cushion layers corresponding to the cavity length adjustment structures in different groups of the remaining groups of cavity length adjustment structures are different, and the thicknesses of the first barrier layers in each cavity length adjustment structure are the same.

[0021] In a possible implementation manner, the substrate further includes:

[0022] A plurality of groups of light-emitting structures are located on a side of the plurality of groups of cavity length adjustment structures away from the substrate;

[0023] The second electrode is located at a side of the plurality of light emitting structures away from the base substrate, and the second electrode is light-transmissive.

[0024] In a second aspect, an embodiment of the present disclosure provides a method for manufacturing a substrate, comprising:

[0025] Providing a substrate;

[0026] A plurality of groups of first electrodes are formed on one side of the base substrate; the first electrodes reflect light, and different groups of first electrodes correspond one-to-one to pixels emitting light of different colors;

[0027] On the side of the multiple groups of first electrodes away from the base substrate, multiple groups of cavity length adjustment structures corresponding to the multiple groups of first electrodes are formed; the thicknesses of different groups of cavity length adjustment structures corresponding to different colors are different; a group of cavity length adjustment structures with the smallest thickness is composed of a first blocking layer, and the cavity length adjustment structures of the remaining groups are all composed of a first cushion layer and the first blocking layer; the first cushion layer is located between the corresponding first electrode and the first blocking layer, the first cushion layer is composed of an organic material, and the first blocking layer is composed of an inorganic material.

[0028] In a possible implementation manner, a plurality of groups of cavity length adjustment structures corresponding to the plurality of groups of first electrodes are formed on a side of the plurality of groups of first electrodes away from the substrate, including:

[0029] Coating a first sub-pad layer having a first thickness on a side of the plurality of groups of first electrodes away from the base substrate, and curing the first sub-pad layer after removing the first sub-pad layer on the surface of the first electrode corresponding to the third color light;

[0030] Coating a second subpad layer having a second thickness on a side of the first subpad layer away from the base substrate, and curing the second subpad layer after removing the second subpad layer in a region where the first electrode corresponding to the second color light is located and in a region where the first electrode corresponding to the third color light is located;

[0031] The first barrier layer is deposited on a side of the second subpad layer away from the base substrate.

[0032] In a possible implementation manner, after forming a plurality of groups of cavity length adjustment structures corresponding one-to-one to the plurality of groups of first electrodes, the method further includes:

[0033] On the side of the multiple groups of cavity length adjustment structures away from the substrate, multiple groups of lens structures corresponding to the multiple groups of first electrodes are formed; the side of the lens structure away from the substrate is a convex surface.

[0034] In a possible implementation manner, a plurality of groups of first electrodes are formed on one side of the substrate, including:

[0035] A plurality of cushion layer structures are formed on one side of the substrate; a side of the cushion layer structure away from the substrate is a convex surface;

[0036] A plurality of groups of conductive structures are deposited on a side of the plurality of cushion structures away from the substrate; the plurality of groups of conductive structures correspond one-to-one to the plurality of cushion structures, and the refractive index of the conductive structure is greater than the refractive index of the cavity length adjustment structure; the first electrode includes the cushion structure and the corresponding conductive structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic diagram of the structure of a substrate provided in an embodiment of the present disclosure;

[0038] Figure 2 A schematic diagram of the structure of another substrate provided in an embodiment of the present disclosure;

[0039] Figure 3 and Figure 4 A schematic diagram of the structure of another substrate provided in an embodiment of the present disclosure;

[0040] Figure 5 A reflection schematic diagram of a first electrode provided in an embodiment of the present disclosure;

[0041] Figure 6 A reflection schematic diagram of another first electrode provided in an embodiment of the present disclosure;

[0042] Figure 7 A schematic diagram of the structure of a first electrode provided in an embodiment of the present disclosure;

[0043] Figure 8 A flowchart of a method for manufacturing a substrate provided in an embodiment of the present disclosure;

[0044] Fig. 9 A schematic diagram of manufacturing multiple groups of cavity length adjustment structures provided in an embodiment of the present disclosure.

[0045] Reference numerals:

[0046] Base substrate 1, first electrode 2, cavity length adjustment structure 3, first cushion layer 31, first barrier layer 32, light emitting structure 4, second electrode 5, lens structure 6, second cushion layer 61, second barrier layer 62, cushion layer structure 21, conductive structure 22, color resist 7, first sub-cushion layer 311, second sub-cushion layer 312. DETAILED DESCRIPTION

[0047] The embodiments of the present disclosure provide a substrate and a method for manufacturing the same, so as to solve the above-mentioned technical problems existing in the prior art.

[0048] It should be understood that the specific structural and functional details disclosed in the embodiments of the present disclosure are merely representative and are for the purpose of describing the exemplary embodiments of the present disclosure. However, the present disclosure can be specifically implemented in many alternative forms or combinations and should not be interpreted as being limited to the embodiments described herein.

[0049] In the description of the present disclosure, it should be understood that the terms "center", "lateral", "up", "down", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present disclosure, unless otherwise specified, "multiple" means two or more. In addition, the term "including" and any variation thereof are intended to cover non-exclusive inclusions.

[0050] The terms used in this disclosure are only for describing specific embodiments and are not intended to limit exemplary embodiments. Unless the context clearly indicates otherwise, the singular forms "one", "one" and "item" used herein are also intended to include plural forms. It should also be understood that the terms "include" and / or "comprise" used herein specify the existence of stated features, integers, steps, operations, units and / or components, without excluding the existence or addition of one or more other features, integers, steps, operations, units, components and / or combinations thereof.

[0051] In order to make the above-mentioned purposes, features and advantages of the present disclosure more obvious and easy to understand, the present disclosure will be further described below with reference to the accompanying drawings and examples. However, the example embodiments can be implemented in various forms and should not be understood as being limited to the embodiments described herein; on the contrary, these embodiments are provided to make the present disclosure more comprehensive and complete, and to fully convey the concepts of the example embodiments to those skilled in the art. The same figure marks in the figures represent the same or similar structures, and thus their repeated descriptions will be omitted. The words expressing position and direction described in the present disclosure are all explained using the accompanying drawings as examples, but changes can be made as needed, and the changes made are all included in the scope of protection of the present disclosure. The drawings of the present disclosure are only used to illustrate the relative position relationship and do not represent the true proportion.

[0052] It should be noted that specific details are described in the following description to facilitate a full understanding of the present disclosure. However, the present disclosure can be implemented in a variety of other ways different from those described herein, and those skilled in the art can make similar generalizations without violating the connotation of the present disclosure. Therefore, the present disclosure is not limited to the specific implementation methods disclosed below. The subsequent description of the specification is a preferred implementation method for implementing the present disclosure, but the description is for the purpose of illustrating the general principles of the present disclosure and is not intended to limit the scope of the present disclosure. The scope of protection of the present disclosure shall be determined by the definition of the attached claims.

[0053] A substrate and a manufacturing method thereof provided by an embodiment of the present disclosure are described in detail below in conjunction with the accompanying drawings.

[0054] Please refer to Figure 1 A schematic structural diagram of a substrate provided in an embodiment of the present disclosure, the substrate comprising:

[0055] Base substrate 1;

[0056] A plurality of groups of first electrodes 2 are located on one side of the substrate 1, and the first electrodes 2 reflect light; different groups of first electrodes 2 correspond to pixels emitting light of different colors;

[0057] The plurality of groups of cavity length adjustment structures 3 are located on a side of the plurality of groups of first electrodes 2 away from the substrate 1 and correspond one to one with the plurality of groups of first electrodes 2; the thickness of different groups of cavity length adjustment structures 3 corresponding to different colors of light are different;

[0058] A group of cavity length adjustment structures 3 with the smallest thickness is composed of a first barrier layer 32, and the cavity length adjustment structures 3 of the remaining groups are all composed of a first cushion layer 31 and a first barrier layer 32; the first cushion layer 31 is located between the corresponding first electrode 2 and the first barrier layer 32, the first cushion layer 31 is composed of an organic material, and the first barrier layer 32 is composed of an inorganic material (such as silicon oxide).

[0059] The first electrode 2 may be an anode or a cathode without limitation.

[0060] The first electrode 2 can be made of a metal material. When the first electrode 2 is made of a metal material, the first electrode 2 can be conductive and reflective at the same time. The first electrode 2 can also be made of other conductive materials and reflective materials. The other conductive material can be ITO, and the reflective material is arranged on the side of the other conductive material close to the base substrate 1. In this way, the first electrode 2 can also be conductive and reflective at the same time.

[0061] If pixels of three colors of light, red (R), green (G), and blue (B), are provided in the substrate, the plurality of groups of first electrodes 2 are three groups of first electrodes 2, and the three groups of first electrodes 2 correspond one-to-one to the pixels of the three colors of light, red, green, and blue; if pixels of four colors of light, red, green, blue, and white, are provided in the substrate, the plurality of groups of first electrodes 2 are four groups of first electrodes 2, and the four groups of first electrodes 2 correspond one-to-one to the pixels of the four colors of light, red, green, blue, and white;

[0062] like Figure 1 The figure shows a part of the structure in the substrate. Taking the pixel containing three colors of light in the substrate as an example, the corresponding substrate includes three groups of first electrodes 2 and three groups of cavity length adjustment structures 3 corresponding to the three colors of light. Figure 1 In the figure, the corresponding color light is indicated in brackets after the reference numbers of the different first electrodes 2 .

[0063] Since the wavelengths of different colored lights are different, to purify the corresponding colored lights, it is necessary to design different cavity lengths for pixels of different colored lights, and the adjustment of the cavity length is usually achieved through the cavity length adjustment structure 3. In the embodiment provided by the present disclosure, different thicknesses are set for the cavity length adjustment structures 3 corresponding to different colored lights, so that the color lights emitted by the corresponding pixels can be purified; the wavelength corresponding to blue light is the smallest among red light, green light, and blue light, so the cavity length adjustment structure 3 corresponding to the blue light is set to be composed of a first blocking layer 32, and the cavity length adjustment structures 3 corresponding to the red light and the green light are both composed of a first cushion layer 31 and a first blocking layer 32, and the first cushion layer 31 is made of an organic material. The first blocking layer 32 is composed of inorganic materials, so that the cavity length adjustment structure 3 corresponding to different color lights can be used to adjust the cavity length of the corresponding color light to purify the corresponding color light, and the material properties of the organic material can be used to form the first cushion layer 31 of different thicknesses using a coating and curing process, thereby forming a cavity length adjustment structure 3 of different thicknesses. In this way, there is no need to form the cavity length adjustment structure 3 of different thicknesses through an etching process and a wet process as in the related art, and the first blocking layer 32 is arranged on the side of the first cushion layer 31 away from the base substrate 1, which can also protect the first electrode 2 from etching damage in subsequent processes, thereby improving the reflectivity of the first electrode 2.

[0064] It should be understood that different colors of light have different wavelength ranges, so the minimum wavelength in the present disclosure refers to the comparison of wavelengths between different colors of light, rather than the comparison of different wavelengths in the same color of light.

[0065] In addition, the thickness of the cavity length adjustment structure 3 corresponding to different color lights can also be set according to the luminous amount of different color lights. For example, the luminous amount of red light is the largest among the three color lights of red, green and blue, and the thickness of the cavity length adjustment structure 3 corresponding to the red light can be set to the minimum, that is, it is composed of the first barrier layer 32; the cavity length adjustment structures 3 corresponding to the green light and the blue light are each composed of the first barrier layer 32 and the first cushion layer 31. Of course, the thickness of the cavity length adjustment structure 3 corresponding to different color lights can be affected by other factors or a combination of multiple factors in addition to the above-mentioned wavelength, luminous amount and other factors, so there is no limitation here on which factor or factors are specifically referred to to set the thickness of the cavity length adjustment structure 3 corresponding to different color lights.

[0066] In the embodiment provided by the present disclosure, by setting the thickness of the cavity length adjustment structure 3 corresponding to different colors of light to be different, the pixels of different colors of light can have different cavity lengths to purify the corresponding colors of light; and the cavity length adjustment structure 3 corresponding to the color light with the shortest wavelength is set to be composed of the first blocking layer 32, and the cavity length adjustment structure 3 corresponding to the remaining colors of light is set to be composed of the first cushion layer 31 and the first barrier layer 32, and the first electric field is located between the first barrier layer 32 and the corresponding first electrode 2, and the first cushion layer 31 is composed of an organic material, and the first barrier layer 32 is composed of an inorganic material, so that the cavity length adjustment structure 3 with different thicknesses can be formed by coating and curing processes, and the first barrier layer 32 can be used to protect the first electrode 2 from being damaged by the subsequent etching process, so that there is no need to use an etching process to form the cavity length adjustment structure 3 as in the related art, so that the surface of the first electrode 2 can be effectively prevented from becoming rough and thin due to etching, thereby effectively improving the reflectivity and life of the first electrode 2, and finally achieving the purpose of improving the color gamut, brightness and life of the display product.

[0067] In addition, since organic materials have higher light transmittance, setting the first cushion layer 31 to be an organic material can also reduce the loss of light transmission and improve the light extraction rate.

[0068] Please continue to see Figure 1 In the remaining groups of cavity length adjustment structures 3, the thicknesses of the first cushion layers 31 corresponding to different groups of cavity length adjustment structures 3 are different, and the thicknesses of the first barrier layers 32 in each cavity length adjustment structure 3 are the same.

[0069] Still taking the example that the substrate includes pixels of three colors of red, green and blue light, and the thickness of the cavity length adjustment structure is set according to the wavelengths of different colors of light, at this time, the cavity length adjustment structure 3 corresponding to the blue light has the smallest thickness and is composed of the first blocking layer 32, so the thickness of the cavity length adjustment structure 3 corresponding to the blue light is the thickness of the first blocking layer 32; and the cavity length adjustment structures 3 corresponding to the red light and the green light are both composed of the first cushion layer 31 and the first blocking layer 32. Since the wavelength corresponding to the red light is the largest, the thickness d1 of the first cushion layer 31 corresponding to the red light is greater than the thickness d2 of the first cushion layer 31 corresponding to the green light. Since the thickness d3 of the first blocking layer 32 in each cavity length adjustment structure 3 is the same, the thickness of the cavity length adjustment structure 3 corresponding to the red light is (d1+d3), the thickness of the cavity length adjustment structure 3 corresponding to the green light is (d2+d3), and the thickness of the cavity length adjustment structure 3 corresponding to the blue light is d3.

[0070] If the thickness of the cavity length adjustment structure 3 is set according to the luminous intensity of different colors of light, the thickness of the cavity length adjustment structure 3 corresponding to the red light is the smallest, and is composed of the first blocking layer 32. The thickness of the cavity length adjustment structure 3 corresponding to the red light is the first blocking layer 32; the cavity length adjustment structures 3 corresponding to the blue light and the green light are each composed of the first blocking layer 32 and the first cushion layer 31, wherein the thickness of the first cushion layer 31 corresponding to the blue light is greater than the thickness of the first cushion layer 31 corresponding to the green light, and the thicknesses of the first blocking layer 32 corresponding to the blue light and the green light are the same.

[0071] Since the thickness d3 of the first blocking layer 32 in each cavity length adjustment structure 3 is the same, the first blocking layer 32 in each cavity length adjustment structure 3 can be formed using the same process. In this way, the first cushion layer 31 can be used to adjust the thickness of the remaining groups of cavity length adjustment structures 3 except the group of cavity length adjustment structures with the smallest thickness, and the first blocking layer 32 can be used to form a group of cavity length adjustment structures 3 with the smallest thickness. The entire process does not require the use of an etching process to form cavity length adjustment structures 3 with different thicknesses corresponding to different colors of light, thereby avoiding damage to the first electrode 2 using an etching process, thereby improving the reflectivity of the first electrode 2.

[0072] See also Figure 2 A schematic diagram of another substrate provided in an embodiment of the present disclosure. The substrate further includes:

[0073] The multiple groups of light emitting structures 4 are located on the side of the multiple groups of cavity length adjustment structures 3 away from the substrate 1; different groups of light emitting structures 4 emit different colors of light, such as Figure 2 The light emitting structure 4 of three colors of red (R), green (G) and blue (B) is shown;

[0074] The second electrode 5 is located on a side of the plurality of light emitting structures 4 away from the base substrate 1 , and the second electrode 5 is light-transmissive.

[0075] If the first electrode 2 is an anode, the second electrode 5 is a cathode; if the first electrode 2 is a cathode, the second electrode 5 is an anode. The second electrode 5 can be made of ITO. The light-emitting structure 4 can be an organic light-emitting diode (OLED) or other light-emitting structures 4, which are not limited here.

[0076] Figure 2 The structure between the first electrode 2 and the second electrode 5 constitutes a microcavity structure of the corresponding pixel, and the distance between the first electrode 2 and the second electrode 5 is the cavity length of the corresponding microcavity structure.

[0077] See also Figure 3 and Figure 4 A schematic diagram of the structure of another substrate provided in an embodiment of the present disclosure, the substrate further comprising:

[0078] A plurality of groups of microlens structures 6 are located on a side of the plurality of groups of first electrodes 2 away from the substrate 1;

[0079] The multiple groups of microlens structures 6 correspond to at least the remaining groups of cavity length adjustment structures 3 one by one; the surface of the microlens structure 6 away from the base substrate 1 is a convex surface.

[0080] like Figure 3 As shown, multiple groups of microlens structures 6 correspond one-to-one to the remaining groups of cavity length adjustment structures 3; the remaining groups of cavity length adjustment structures 3 are reused as corresponding microlens structures 6. Figure 3 In the figure, the cavity length adjustment structures 3 corresponding to the red light (R) and the green light (G) are all the cavity length adjustment structures 3 of the remaining groups, so their corresponding cavity length adjustment structures 3 are reused as the microlens structure 6. When the cavity length adjustment structure 3 is reused as the microlens structure 6, the material used for the first cushion layer 31 can be a lens material, such as optical glue. When the cavity length adjustment structure 3 is reused as the microlens structure 6, the refractive index of the first blocking layer 32 is less than the refractive index of the first cushion layer 31, so that it is easier to collect the light outside the microlens structure 6 to the surface of the first electrode 2.

[0081] like Figure 4 As shown, the multiple groups of microlens structures 6 correspond to the multiple groups of first electrodes 2 one by one, and the multiple groups of microlens structures 6 are located on one side of the multiple groups of cavity length adjustment structures 3 away from the base substrate 1;

[0082] The microlens structure 6 includes a second cushion layer 61 and a second barrier layer 62, wherein the second cushion layer 61 is located between the first barrier layer 32 and the second barrier layer 62. The refractive index of the second barrier layer 62 is smaller than that of the second cushion layer 61, so that it is easier to collect light outside the microlens structure 6 onto the surface of the first electrode 2.

[0083] The material of the first cushion layer 31 can be an optical material (such as optical glue), and the material of the second barrier layer 62 can be an inorganic material (such as silicon oxide). By providing a corresponding microlens structure 6 for each first electrode 2, the color gamut corresponding to each color of light can be improved.

[0084] See also Figure 5 and Figure 6 , Figure 5 A reflection schematic diagram of a first electrode provided in an embodiment of the present disclosure, Figure 6 A reflection schematic diagram of another first electrode provided in an embodiment of the present disclosure. Figure 5 As shown in FIG. 1 , when the microlens structure 6 is formed on the side of the first electrode 2 away from the substrate 1 , the light reflected by the first electrode 2 is relatively dispersed, and some reflected light does not pass through the color resist 7 corresponding to the first electrode 2 ; Figure 6 As shown, when a microlens structure 6 is provided on a side of the first electrode 2 away from the base substrate 1, light (not shown) emitted from the light emitting structure 4 toward the first electrode 2 is incident on the first electrode 2 at a smaller angle by the microlens structure 6, so that the first electrode 2 is reflected at a smaller angle. In this way, more light reflected by the first electrode 2 passes through the light emitting structure 4 and then emerges from the corresponding color resist 7, thereby improving light utilization and brightness. Figure 5 and Figure 6 The color resist 7 in the embodiment may be disposed on the substrate or on a color filter substrate disposed opposite to the substrate, and there is no limitation on which substrate the color resist 7 is disposed on.

[0085] In the embodiment provided by the present disclosure, by providing multiple groups of microlens structures 6 with convex surfaces on the side of multiple groups of first electrodes 2 away from the base substrate 1, the microlens structures 6 can be used to aggregate the light of the corresponding color scattered around to the area corresponding to the first electrode 2, thereby improving the optical gain of the corresponding pixel and improving the color point. When the first electrode 2 passes the converged light through the color glue (not shown), the stray light at a large angle when passing through the color glue can be reduced, and the cross-light between pixels can be reduced, thereby improving the product color gamut.

[0086] It should be understood that, in practical applications, the light emitting structure 4 is disposed in an opening of a pixel definition layer, and the pixel definition layer is not shown in the present disclosure.

[0087] See also Figure 7 A schematic diagram of the structure of a first electrode provided in an embodiment of the present disclosure. The first electrode 2 includes:

[0088] The cushion structure 21 is located on one side of the base substrate 1; the side of the cushion structure 21 away from the base substrate 1 is a convex surface;

[0089] The conductive structure 22 is located on a side of the cushion structure 21 away from the base substrate 1 , and the refractive index of the conductive structure 22 is greater than the refractive index of the cavity length adjustment structure 3 .

[0090] The conductive structure 22 can be made of metal material, and the electric field structure can be made of organic material; it can also be made of ITO. When the conductive material is made of IRO, the pad structure 21 can be made of black material (such as resin), so that the first electrode 2 can reflect light.

[0091] By configuring the first electrode 2 to have a convex cushioning structure 21, and a conductive structure 22 located on the side of the cushioning structure 21 away from the base substrate 1, and making the refractive index of the conductive structure 22 greater than the refractive index of the cavity length adjustment structure 3, the first electrode 2 can be made into a convex electrode, thereby increasing the reflection area of ​​the first electrode 2, improving the optical gain, and further improving the brightness of the display product.

[0092] Based on the same inventive concept, the present disclosure provides a method for manufacturing a substrate, such as Figure 8 As shown, the production method includes:

[0093] S11: providing a substrate;

[0094] S12: forming a plurality of groups of first electrodes on one side of the substrate; the first electrodes reflect light, and different groups of first electrodes correspond to pixels emitting light of different colors;

[0095] S13: On the side of the multiple groups of first electrodes away from the substrate, multiple groups of cavity length adjustment structures corresponding to the multiple groups of first electrodes are formed one by one; the thickness of different groups of cavity length adjustment structures corresponding to different colors of light is different; a group of cavity length adjustment structures with the smallest thickness is composed of the first blocking layer, and the cavity length adjustment structures of the remaining groups are all composed of the first cushion layer and the first blocking layer; the first cushion layer is located between the corresponding first electrode and the first blocking layer, the first cushion layer is composed of an organic material, and the first blocking layer is composed of an inorganic material.

[0096] See also Fig. 9 A schematic diagram of manufacturing multiple groups of cavity length adjustment structures provided in an embodiment of the present disclosure.

[0097] S21: Coating a first sub-pad layer 311 having a first thickness h1 on a side of the plurality of first electrodes 2 away from the base substrate 1, and curing the first sub-pad layer 311 after removing the first sub-pad layer 311 on the surface of the first electrode 2 corresponding to the third color light; wherein, taking the first color light as R, the second color light as G, the third color light as B, and the thickness of the cavity length adjustment structure 3 corresponding to the third color light as an example.

[0098] The material of the first subpad layer 311 is an organic material.

[0099] After coating a first sub-pad layer 311 having a first thickness h1 on one side of the base substrate 1, the first sub-pad layer 311 on the surface of the first electrode 2 corresponding to the third color light is removed by exposure and development, and then light curing and vacuum baking are performed to remove the solvent in the first sub-pad layer 311 to the greatest extent.

[0100] S22: coating a second sub-pad layer 312 having a second thickness on a side of the first sub-pad layer 311 away from the base substrate 1, and curing the second sub-pad layer 312 after removing the second sub-pad layer 312 where the first electrode 2 corresponding to the second color light and the first electrode 2 corresponding to the third color light are located; wherein the first pad layer 31 includes the first sub-pad layer 311 and the second sub-pad layer 312;

[0101] The material used for the second subpad layer 312 is also an organic material.

[0102] After coating the second subpad layer 312 having a second thickness h2 on the side of the first subpad layer 311 away from the base substrate 1, the second subpad layer 312 on the surface of the first electrode 2 corresponding to the second color light and the third color light is removed by exposure and development, and then photocuring and vacuum baking are performed to remove the solvent in the second subpad layer 312 to the greatest extent.

[0103] S23 : depositing a first barrier layer 32 on a side of the second sub-pad layer 312 away from the base substrate 1 .

[0104] The first barrier layer 32 is made of inorganic material, such as silicon oxide. The first barrier layer 32 covers the first cushion layer 31 , which can prevent the volatilization of the material of the first cushion layer 31 from causing damage to the light-emitting material and prevent the subsequent etching process from damaging the first electrode 2 .

[0105] In the embodiment provided in the present disclosure, since the first cushion layer can form different thicknesses by coating and curing processes, thereby adjusting the thickness of the cavity length adjustment structure corresponding to different color lights, there is no need to use yellow light etching process to etch the inorganic layer to form cavity length adjustment structures of different thicknesses as in the related art, and the surface of the first electrode will not be damaged, thereby improving the reflection sides and service life of the first electrode; and the first blocking layer is deposited on the side of the first cushion layer away from the substrate, which can not only set a group of cavity length adjustment structures with the smallest thickness on the first electrode composed of the first blocking layer, but also use the first blocking layer to protect the first electrode from damage in the subsequent etching process.

[0106] In some embodiments, after forming a plurality of groups of cavity length adjustment structures corresponding to the plurality of groups of first electrodes, the method further includes:

[0107] On the side of the multiple groups of cavity length adjustment structures away from the substrate, multiple groups of lens structures corresponding to the multiple groups of first electrodes are formed one by one; the side of the lens structure away from the substrate is a convex surface.

[0108] Whether it is formed Figure 3 still Figure 4 The lens structure shown can use a coating and curing process to form a second cushion layer with a convex surface, and then deposit a second liner structure on a side of the second cushion layer away from the substrate to cover the second cushion layer, so that there is no need to use an etching process to form a lens structure with a convex surface, thereby preventing the first electrode from being damaged. The lens structure is used to increase the light extraction rate.

[0109] In some other embodiments, a plurality of groups of first electrodes are formed on one side of the substrate, including:

[0110] A plurality of cushion layer structures are formed on one side of the substrate; a side of the cushion layer structure away from the substrate is a convex surface;

[0111] Multiple groups of conductive structures are deposited on one side of the multiple pad structures away from the substrate; the multiple groups of conductive structures correspond to the multiple groups of pad structures one by one, and the refractive index of the conductive structure is greater than the refractive index of the cavity length adjustment structure; the first electrode includes the pad structure and the corresponding conductive structure.

[0112] A coating process may be used to form a cushion layer structure having a convex surface, and then a conductive structure may be deposited on one side of the convex surface to obtain a first electrode, which can effectively increase the reflection area of ​​the first electrode and improve the optical gain.

[0113] The substrate may be an organic light emitting diode (OLED) substrate, a quantum dot light emitting diode (QLED) substrate, a micro light emitting diode (Micro LED) substrate, etc., and the present disclosure does not make any specific limitation on this.

[0114] Although the preferred embodiments of the present disclosure have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present disclosure.

[0115] Obviously, those skilled in the art can make various changes and modifications to the present disclosure without departing from the spirit and scope of the present disclosure. Thus, if these modifications and variations of the present disclosure fall within the scope of the claims of the present disclosure and their equivalents, the present disclosure is also intended to include these modifications and variations.

Claims

1. A substrate, wherein: include: substrate substrate; A plurality of groups of first electrodes are located on one side of the substrate, and the first electrodes reflect light; Different groups of first electrodes correspond to pixels emitting light of different colors; A plurality of groups of cavity length adjustment structures are located on a side of the plurality of groups of first electrodes away from the substrate and correspond one to one with the plurality of groups of first electrodes; different groups of cavity length adjustment structures corresponding to different colors of light have different thicknesses; A group of cavity length adjustment structures with the smallest thickness is composed of a first blocking layer, and the cavity length adjustment structures of the remaining groups are composed of a first cushion layer and the first blocking layer; the first cushion layer is located between the corresponding first electrode and the first blocking layer, the first cushion layer is composed of an organic material, and the first blocking layer is composed of an inorganic material.

2. The substrate according to claim 1, wherein The substrate further comprises: A plurality of groups of microlens structures are located on a side of the plurality of groups of first electrodes away from the substrate; The multiple groups of microlens structures correspond to at least the remaining groups of cavity length adjustment structures one by one; and a surface of the microlens structure away from the substrate is a convex surface.

3. The substrate according to claim 2, wherein The multiple groups of microlens structures correspond one to one with the remaining groups of cavity length adjustment structures; The cavity length adjustment structures of the remaining groups are multiplexed as microlens structures of the corresponding groups.

4. The substrate according to claim 2, wherein The multiple groups of microlens structures correspond to the multiple groups of first electrodes one by one, and the multiple groups of microlens structures are located on a side of the multiple groups of cavity length adjustment structures away from the substrate; The microlens structure includes a second cushion layer and a second barrier layer, wherein the second cushion layer is located between the first barrier layer and the second barrier layer.

5. The substrate according to claim 1, wherein The first electrode comprises: A cushion structure is located on one side of the substrate; a side of the cushion structure away from the substrate is a convex surface; The conductive structure is located on a side of the cushion structure away from the substrate, and the refractive index of the conductive structure is greater than the refractive index of the cavity length adjustment structure.

6. The substrate according to any one of claims 1 to 5, wherein: The thicknesses of the first cushion layers corresponding to the cavity length adjustment structures in different groups of the remaining groups of cavity length adjustment structures are different, and the thicknesses of the first barrier layers in each cavity length adjustment structure are the same.

7. The substrate according to any one of claims 1 to 6, wherein: The substrate further comprises: A plurality of groups of light-emitting structures are located on a side of the plurality of groups of cavity length adjustment structures away from the substrate; The second electrode is located at a side of the plurality of light emitting structures away from the base substrate, and the second electrode is light-transmissive.

8. A method for manufacturing a substrate, wherein: include: Providing a substrate; On one side of the base substrate, a plurality of groups of first electrodes are formed; The first electrodes reflect light, and different groups of first electrodes correspond one-to-one to pixels emitting light of different colors; On the side of the multiple groups of first electrodes away from the base substrate, multiple groups of cavity length adjustment structures corresponding to the multiple groups of first electrodes are formed; the thicknesses of different groups of cavity length adjustment structures corresponding to different colors are different; a group of cavity length adjustment structures with the smallest thickness is composed of a first blocking layer, and the cavity length adjustment structures of the remaining groups are all composed of a first cushion layer and the first blocking layer; the first cushion layer is located between the corresponding first electrode and the first blocking layer, the first cushion layer is composed of an organic material, and the first blocking layer is composed of an inorganic material.

9. The method of claim 8, wherein: On a side of the plurality of groups of first electrodes away from the substrate, a plurality of groups of cavity length adjustment structures corresponding to the plurality of groups of first electrodes are formed, including: Coating a first sub-pad layer having a first thickness on a side of the plurality of groups of first electrodes away from the base substrate, and curing the first sub-pad layer after removing the first sub-pad layer on the surface of the first electrode corresponding to the third color light; On a side of the first subpad layer away from the base substrate, a second subpad layer having a second thickness is coated, and the second subpad layer is cured after removing the second subpad layer in the area where the first electrode corresponding to the second color light is located and the area where the first electrode corresponding to the third color light is located; wherein the first pad layer includes the first subpad layer and the second subpad layer; The first barrier layer is deposited on a side of the second subpad layer away from the base substrate.

10. The method according to claim 8, wherein: After forming a plurality of groups of cavity length adjustment structures corresponding to the plurality of groups of first electrodes one by one, the method further includes: On the side of the multiple groups of cavity length adjustment structures away from the substrate, multiple groups of lens structures corresponding to the multiple groups of first electrodes are formed; the side of the lens structure away from the substrate is a convex surface.

11. The method according to claim 8, wherein: On one side of the base substrate, a plurality of first electrodes are formed, including: A plurality of cushion layer structures are formed on one side of the substrate; a side of the cushion layer structure away from the substrate is a convex surface; A plurality of groups of conductive structures are deposited on a side of the plurality of cushion structures away from the substrate; the plurality of groups of conductive structures correspond one-to-one to the plurality of cushion structures, and the refractive index of the conductive structure is greater than the refractive index of the cavity length adjustment structure; the first electrode includes the cushion structure and the corresponding conductive structure.

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