Metal mask

Abstract

The invention provides a metal mask. A metal mask (10) is provided with a mask plate (20) having one or more openings (22) for film formation and a plurality of marks (23) for detecting deformation of the mask plate (20), and a coating member (30) for coating a partial region of the mask plate (20), the partial region including a plurality of regions (25) corresponding to the plurality of marks (23). Each of the plurality of regions (25) is a region including a mark (23) corresponding to the region (25) among the plurality of marks (23).

Description

Technical Field

[0001] The present disclosure relates to a metal mask, and in particular, to a metal mask having a coating part. Background Art

[0002] In the past, metal masks with coating components were known. As an example of such a metal mask, Patent Document 1 discloses a mask assembly including a mask frame and a mask screen both made of metal materials, and a metal coating disposed on an exposed surface of one or both of the mask frame and the mask screen. Prior art literature Patent Literature

[0003] Patent document 1: Japanese Patent Publication No. 2021-080567

[0004] However, in the metal mask of Patent Document 1, since the metal coating is disposed on all exposed surfaces of one or both of the mask frame and the mask screen, there is a problem of deformation of the metal mask. In addition, when a mark for detecting deformation of the metal mask is provided on the metal mask, and when the mark is not coated, there is a problem that when a film-forming material attached to the metal mask is removed, the mark changes color and cannot be read. Summary of the invention

[0005] The present disclosure has been made to solve the above-mentioned problems, and an object thereof is to provide a metal mask capable of suppressing the inability to read a mark for detecting deformation of the metal mask and suppressing deformation of the metal mask.

[0006] A metal mask involved in one embodiment of the present invention comprises: a mask plate; and a coating component that coats a portion of the mask plate, the mask plate having one or more openings for film formation and a plurality of marks for detecting deformation of the mask plate, the portion of the area including a plurality of areas corresponding to the plurality of marks, and the plurality of areas are respectively areas including marks among the plurality of marks corresponding to the area.

[0007] According to the present disclosure, it is possible to provide a metal mask capable of suppressing the inability to read a mark for detecting deformation of the metal mask and suppressing deformation of the metal mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a top view showing the metal mask involved in Embodiment 1. Figure 2 is along Figure 1 Cross-sectional view along line II-II. Figure 3is along Figure 1 Cross-sectional view along line III-III. Figure 4 This is a table showing experimental results related to the accuracy of metal masks and the reading of marks. Figure 5 This is a table showing experimental results related to the quality of coated parts. Figure 6 is a graph showing the results of thermomechanical analysis of an uncoated metal mask. Figure 7 TABLE 2 is a table showing the results of thermomechanical analysis of uncoated metal masks. Figure 8 is a graph showing the results of thermomechanical analysis of all coated metal masks. Fig. 9 TABLE 2 is a table showing the results of thermomechanical analysis of all coated metal masks. Fig.10 It is a top view showing the metal mask involved in Embodiment 2. DETAILED DESCRIPTION

[0009] Below, the embodiments of the metal mask involved in the present disclosure are described with reference to the accompanying drawings. In addition, the embodiments described below all represent a specific example of the present disclosure. Therefore, the numerical values, constituent elements, configuration positions and connection methods of the constituent elements shown in the following embodiments are examples and are not intended to limit the present disclosure. Therefore, the constituent elements in the following embodiments that are not recorded in the independent claims are described as arbitrary constituent elements.

[0010] In each figure, the same reference numerals are given to substantially the same components. In addition, each figure is a schematic diagram and does not necessarily strictly represent the size ratio of each part.

[0011] (Implementation method 1) Figure 1 1 is a top view showing the metal mask 10 according to the first embodiment. Figure 1 In FIG. 1 , a plurality of regions 25 are indicated by marking dots. Figure 2 is along Figure 1 Cross-sectional view along line II-II. Figure 3 is along Figure 1 Cross-sectional view along line III-III.

[0012] The metal mask 10 is a metal mask for forming a film in one or more regions of a film forming object (not shown). The details will be described later. The metal mask 10 has one or more openings 22 corresponding to the one or more regions. By using such a metal mask 10, a film can be formed only in the one or more regions of the film forming object. Figures 1 to 3 As shown, the metal mask 10 includes a mask plate 20 and a coating member 30 .

[0013] The mask plate 20 is plate-shaped. The mask plate 20 is rectangular in a plan view. Specifically, the mask plate 20 is rectangular in a plan view: two opposite sides thereof are along a first direction ( Figure 1 The two sides perpendicular to the two sides are along the second direction ( Figure 1 The first direction is a direction parallel to a main surface 21 of the mask plate 20, and the second direction is a direction parallel to the main surface 21 and orthogonal to the first direction. In addition, for example, the mask plate 20 may not be a rectangular shape when viewed from above, but may be a circular shape, an elliptical shape, a polygonal shape, etc. The mask plate 20 has one or more openings 22 and a plurality of marks 23. In the present embodiment, the one or more openings 22 are a plurality of openings 22. In addition, for example, the mask plate 20 may not have a plurality of openings 22 but one opening 22. In order to suppress deformation caused by heat during film formation, the mask plate 20 is formed of a material with a relatively small linear expansion coefficient. For example, the material is Invar 36, etc. In addition, the linear expansion coefficient is also called the thermal expansion coefficient. The thickness of the mask plate 20 is, for example, 0.02 to 0.2 mm.

[0014] The one or more openings 22 are openings for film formation. The one or more openings 22 define film formation regions in the film formation object to be formed using the metal mask 10. For example, when the metal mask 10 is placed overlapping the film formation object, one or more regions in the film formation object overlapping with the one or more openings 22 become exposed, and film formation can be performed only in the one or more regions in the film formation object.

[0015] The one or more openings 22 are respectively arranged in the thickness direction of the mask plate 20 ( Figure 1 The mask plate 20 is penetrated in the Z-axis direction (e.g., the Z-axis direction).

[0016] One or more openings 22 are arranged in a direction parallel to one main surface 21 of the mask 20. Specifically, one or more openings 22 are arranged in a first direction and a second direction, and are arranged in a matrix. In addition, for example, one or more openings 22 may not be arranged in a matrix, but may be arranged in a zigzag shape, or may be arranged only in the first direction, or may be arranged only in the second direction. For example, one or more openings 22 are arranged according to a film formation pattern for film formation on a film formation object.

[0017] The one or more openings 22 are rectangular in shape when viewed from above. Specifically, the one or more openings 22 are rectangular in shape when viewed from above: two opposite sides thereof are along a first direction and two sides orthogonal to the two sides are along a second direction. In addition, for example, the one or more openings 22 may not be rectangular in shape when viewed from above, but may be circular, elliptical, or polygonal. For example, the one or more openings 22 are formed according to the shape of a film formation pattern formed on a film formation object.

[0018] The marks 23 are used to detect deformation of the mask 20. For example, by measuring the distance between the marks 23, it is possible to detect whether the mask 20 is deformed and how much the mask 20 is deformed. For example, the marks 23 are optical marks that can be read optically.

[0019] The plurality of marks 23 are provided on one main surface 21 of the mask plate 20. The plurality of marks 23 are not provided on the other main surface 24 (the main surface opposite to the main surface 21) of the mask plate 20. In addition, for example, the plurality of marks 23 may also be provided on the other main surface 24 of the mask plate 20. In this embodiment, when forming a film, the film forming material is Figure 1 That is, the film forming material adheres to the main surface 21 side of the mask plate 20 .

[0020] The plurality of marks 23 are arranged in a direction parallel to a main surface 21 of the mask 20. Specifically, the plurality of marks 23 are arranged in a first direction and a second direction and arranged in a matrix. In addition, for example, the plurality of marks 23 may not be arranged in a matrix, as long as they are configured to detect deformation of the mask 20.

[0021] In this embodiment, multiple marks 23 are arranged in the second direction on one side (positive side of the X-axis) closer to one or more opening portions 22 in the first direction, and are arranged in the second direction on the other side (negative side of the X-axis) closer to one or more opening portions 22 in the first direction, and are arranged in the first direction on one side (positive side of the Y-axis) closer to one or more opening portions 22 in the second direction, and are arranged in the first direction on the other side (negative side of the Y-axis) closer to one or more opening portions 22 in the second direction.

[0022] For example, a straight line passing through the opening 22 disposed most on one side in the first direction and parallel to the second direction is set as the first straight line, a straight line passing through the center between two adjacent openings 22 in the first direction and parallel to the second direction is set as the second straight line, a straight line passing through the opening 22 disposed most on the other side in the first direction and parallel to the second direction is set as the third straight line, a straight line passing through the opening 22 disposed most on one side in the second direction and parallel to the first direction is set as the fourth straight line, a straight line passing through the center between two openings 22 located in the center in the second direction and parallel to the first direction is set as the fifth straight line, and a straight line passing through the opening 22 disposed most on the other side in the second direction and parallel to the first direction is set as the sixth straight line. In this case, the plurality of marks 23 are arranged at the intersection of the first straight line and the fourth straight line, the intersection of the first straight line and the fifth straight line, and the intersection of the first straight line and the sixth straight line. In addition, a plurality of marks 23 are arranged at the intersection of the second straight line and the fourth straight line, the intersection of the second straight line and the fifth straight line, and the intersection of the second straight line and the sixth straight line. In addition, a plurality of marks 23 are arranged at the intersection of the third straight line and the fourth straight line, the intersection of the third straight line and the fifth straight line, and the intersection of the third straight line and the sixth straight line.

[0023] The plurality of marks 23 are respectively arranged near the corners of the opening 22. Alternatively, for example, the plurality of marks 23 may be respectively arranged near the corners of the opening 22 and between the corners.

[0024] The multiple marks 23 are each concave, for example, formed by half etching, and are circular when viewed from above. In addition, for example, the multiple marks 23 may be convex. In addition, for example, the multiple marks 23 may not be circular when viewed from above, but may be rectangular, elliptical, or polygonal. The multiple marks 23 may be formed so as to be able to detect the deformation of the mask 20. Through these concave or convex shapes, the reflection characteristics are optically different, so that their positions can be optically observed.

[0025] The coating member 30 coats a partial area of ​​the mask plate 20. That is, the coating member 30 does not coat the entire mask plate 20 but coats a portion of the mask plate 20.

[0026] The partial area is an area on one main surface 21 of the mask 20. That is, the coating member 30 coats one main surface 21 of the mask 20. In the present embodiment, the coating member 30 coats a portion of one main surface 21 of the mask 20. In addition, for example, the coating member 30 may also coat the other main surface 24 of the mask 20.

[0027] The partial area includes a plurality of areas 25 corresponding to the plurality of marks 23. That is, the coating member 30 is dispersedly disposed in the plurality of areas 25, and coats each of the plurality of areas 25. In the present embodiment, the partial area includes only the plurality of areas 25, and the coating member 30 coats only the plurality of areas 25. In addition, for example, the partial area may include an area other than the plurality of areas 25, and the coating member 30 may coat the area other than the plurality of areas 25.

[0028] The plurality of regions 25 are regions that contain the mark 23 corresponding to the region 25 among the plurality of marks 23. That is, the coating member 30 coats each of the plurality of marks 23. More specifically, the coating member 30 includes a rounded corner formed by the bottom of the concave shape of the mark 23 and the side wall of the concave portion thereof and the main surface 21 of the mask 20, and is provided on the main surface 21 of the periphery thereof. The plurality of marks 23 are respectively contained in the region 25 corresponding to the mark 23 among the plurality of regions 25 when viewed from above.

[0029] The multiple marks 23 are each of sizes that can be contained within the field of view of a microscope (not shown) when the marks 23 are observed by the microscope. That is, when the marks 23 are observed by the microscope, the marks 23 are contained within the field of view of the microscope. For example, the microscope is a general microscope. In addition, for example, when the width of the field of view of the microscope can be adjusted, the multiple marks 23 are each of sizes that can be contained within the field of view of the microscope when the field of view of the microscope is maximized and the marks 23 are observed by the microscope. Specifically, for example, the microscope is an optical microscope, and the field of view of the microscope is a circular range with a diameter of more than 0.5 mm and less than 6 mm.

[0030] In addition, each of the plurality of regions 25 is sized to cover the entire visual field of the microscope. Each of the plurality of regions 25 is a region containing a mark 23 corresponding to the region 25, and when the mark 23 is contained in the visual field of the microscope, the entire visual field of the microscope is preferably covered by the region 25, so the preferred size of the region 25 is about twice the visual field of the microscope.

[0031] On the main surface 21 , the plurality of marks 23 arranged in the first direction have an area 26 not coated by the coating member 30 between every two marks 23 , and the plurality of marks 23 arranged in the second direction have an area 27 not coated by the coating member 30 between every two marks 23 .

[0032] For example, the coating member 30 is formed of a material that is resistant to plasma or liquid medicine to be exposed in order to remove the film-forming material attached to the metal mask 10, that is, a material whose surface is not easily corroded or does not easily form a reaction product even if it is exposed to plasma or liquid medicine in order to remove the film-forming material attached to the metal mask 10. Specifically, for example, the coating member 30 is formed of a material resistant to fluorine plasma, such as an oxide (Al2O3, Y2O3) or a metal (Ni, Cu, Co, or an alloy thereof). However, the linear expansion coefficient of these fluorine plasma-resistant material films is greater than that of the Invar alloy 36 or the like, which is the raw material of the mask 20. Therefore, if the coating member 30 is formed on the entire surface of the exposed surface of the mask 20 or the entire surface of one main surface 21, the metal mask 10 is easily deformed beyond the allowable limit due to temperature changes during film formation. In addition, for example, the coating member 30 can be formed of a material that can form a film at room temperature or under normal pressure, or can be formed at a high temperature or under reduced pressure to the extent that the metal mask 10 does not deform. In addition, for example, the coating member 30 is formed of a material having a low linear expansion coefficient or elasticity so that the film is not easily damaged and the metal mask 10 is not easily deformed.

[0033] For example, the coating member 30 is bonded to the plurality of regions 25 by plating. In addition, for example, the coating member 30 contains at least one of nickel, cobalt and copper. For example, the size of each of the plurality of marks 23 when viewed from above is greater than 0.1 mm and less than 5 mm. In addition, for example, the size of each of the plurality of regions 25 when viewed from above is a size that can be accommodated in a square with one side greater than 1 mm and less than 100 mm. In addition, for example, the shape of each of the plurality of regions 25 when viewed from above is a quadrilateral or a circle. In addition, for example, the thickness of the coating member 30 is greater than 0.1 μm and less than 10 μm.

[0034] For example, when film is formed in one or more regions of the film forming object, a metal mask 10 having one or more openings 22 corresponding to the one or more regions is used to form the film in the one or more regions. If the metal mask 10 is overlapped with the film forming object, the one or more regions overlap with the one or more openings 22, and the one or more regions are exposed. In the state where the metal mask 10 is overlapped with the film forming object, the material can be attached only to the one or more regions exposed in the film forming object by physically spraying the material from above the metal mask 10 or causing a chemical reaction to the material. For example, film formation using the metal mask 10 is performed by vacuum film formation or the like. For example, the material used for film formation is silicon nitride or silicon oxide.

[0035] After film formation is performed using the metal mask 10, the material used for film formation is attached to the metal mask 10. If film formation is repeatedly performed with the material attached to the metal mask 10, the accuracy of film formation is reduced due to the difference in linear expansion coefficient between the film-forming material attached to the mask and the mask plate 20. Therefore, for example, after film formation is performed using the metal mask 10, the material attached to the metal mask 10 is removed. For example, a liquid or gas that reacts with the material is used to remove the material attached to the metal mask 10. For example, as the gas, an etching gas is used. Specifically, as the etching gas, a fluorine-based gas is used. If the Invar alloy 36, which is the material of the mask plate 20, is exposed to the plasma of the fluorine-based gas, the optical reflectivity is reduced (discoloration) due to surface corrosion or the formation of reaction products, etc., and it is sometimes difficult to read the mark 23.

[0036] In this embodiment, the plurality of marks 23 are coated by the coating member 30 on the metal mask 10 , so that the plurality of marks 23 can be prevented from being discolored when removing the material attached to the metal mask 10 . Therefore, the plurality of marks 23 can be prevented from being unreadable.

[0037] Furthermore, in the metal mask 10, not all of the mask 20 but a part of it is coated by the coating member 30. Therefore, since the area of ​​the mask 20 coated by the coating member 30 can be further reduced, the deformation of the metal mask 10 caused by the difference between the linear expansion coefficient of the mask 20 and the linear expansion coefficient of the coating member 30 can be suppressed. Furthermore, since the area of ​​the mask 20 coated by the coating member 30 can be further reduced, the amount of the coating member 30 used for coating the mask 20 can be further reduced, and the increase in the cost required for coating the mask 20 can be suppressed.

[0038] Figure 4 This is a table showing experimental results related to the accuracy of metal masks and the reading of marks.

[0039] exist Figure 4 In the figure, the accuracy of the metal mask is 0 when the difference between the measured value and the designed value is less than 0.1 mm, and is × when the difference between the measured value and the designed value is greater than 0.1 mm. Figure 4 In the figure, the mark reading is 0 when the mark can be distinguished by a microscope, and is × when the mark cannot be distinguished by a microscope.

[0040] Here, a mask plate with a thickness of 0.1 mm formed of Invar 36 and a coating component containing nickel are used, so that the thickness of the coating component is greater than 1 μm and less than 3 μm, and the coating component is bonded to the mask plate by plating. The diameter of the mark is 1 mm, and the length measurement is performed on the marks with a spacing of 100 mm. The coating is implemented with a diameter of 16 mm with the mark as the center. That is, on the straight line connecting the mark and the mark for length measurement, when the distance between the marks is 100 mm, the length of the area where the coating is implemented is 16 mm, and the ratio is 16%. For one mark, a coating with a radius of 8% of the mark spacing from the center of the mark is implemented.

[0041] like Figure 4 As shown, for the metal mask coated on the entire mask plate, the accuracy of the metal mask is × and the mark reading is 0.

[0042] In addition, for a metal mask that is not coated on the mask plate, the accuracy of the metal mask is 0 and the mark is read as ×.

[0043] In addition, for a metal mask coated on a portion of the mask plate (the area containing the mark), the accuracy of the metal mask is 0 and the reading of the mark is also 0.

[0044] In this way, since the coating is not applied to the entire mask but to a part (including the marked area), the deformation of the metal mask can be suppressed and the mark can also be read. That is, it can be seen that if the area where the coating is applied is less than 16% on the straight line connecting the mark and the mark for length measurement relative to the configuration spacing of the mark, the accuracy of the mask can be within the allowable range. In addition, it can be seen that if the radius of the area where the coating is applied is less than 8% of the mark spacing of the length measurement object from the center of the mark relative to a mark as the length measurement object, the accuracy of the mask can be within the allowable range. In addition, as mentioned above, the area where the coating is applied needs to be larger than the radius of the mark at least from the center of the mark.

[0045] Figure 5 This is a table showing experimental results related to the quality of coated parts.

[0046] exist Figure 5 In the film state, when no cracks or peeling occurred in the clutch test, it was 0; when small cracks or peeling occurred in the clutch test, it was △; when large cracks or peeling occurred in the clutch test, it was ×. Figure 5 In the plasma resistance, if the sample does not change color when irradiated with fluorine plasma at 100° C. for a predetermined time, it is 0, and if the sample changes color when irradiated with fluorine plasma at 100° C. for a predetermined time, it is ×.

[0047] like Figure 5As shown, sample 1 is a coated member containing nickel, bonded by electroplating, and having a film thickness of 10 μm. Regarding sample 1, the film state is △, and the plasma resistance is 0.

[0048] Sample 2 is a coated member containing nickel, bonded by electroplating, and having a film thickness of 30 μm. Regarding Sample 2, the film state is ×, and the plasma resistance is 0.

[0049] Sample 3 is a coated member containing nickel, bonded by electroplating, and having a film thickness of 0.2 μm. Regarding Sample 3, the film state is 0 and the plasma resistance is 0.

[0050] Sample 4 is a coated member containing nickel and cobalt, bonded by electroplating, and having a film thickness of 1 μm. Regarding Sample 4, the film state is 0, and the plasma resistance is 0.

[0051] Sample 5 is a coated member containing nickel and cobalt, bonded by electroplating, and having a film thickness of 2 μm. Regarding Sample 5, the film state is 0 and the plasma resistance is 0.

[0052] Sample 6 is a coated member containing nickel, bonded by electroplating, and having a film thickness of 1 μm. Regarding Sample 6, the film state is 0 and the plasma resistance is 0.

[0053] Figure 6 is a graph showing the results of thermomechanical analysis of an uncoated metal mask. Figure 7 TABLE 2 is a table showing the results of thermomechanical analysis of uncoated metal masks.

[0054] Here, a metal mask including a mask plate formed of Invar 36 is used.

[0055] like Figure 6 As shown, as the temperature increases, the size of the metal mask changes.

[0056] In addition, if Figure 7 As shown, when the temperature is changed from T1 to T2, the linear expansion coefficients of both sample 7 and sample 8 change. Sample 7 and sample 8 are metal masks each having a mask plate formed of Invar 36.

[0057] Figure 8 is a graph showing the results of thermomechanical analysis of all coated metal masks. Fig. 9 TABLE 2 is a table showing the results of thermomechanical analysis of all coated metal masks.

[0058] Here, a metal mask including a mask plate formed of Invar 36 and a coating member containing nickel and having a film thickness of 3 μm was used.

[0059] like Figure 8 As shown, as the temperature increases, the size of the metal mask changes.

[0060] In addition, if Fig. 9 As shown, when the temperature is changed from T1 to T2, the linear expansion coefficients of both sample 9 and sample 10 change. Sample 9 and sample 10 are metal masks including a mask plate formed of Invar 36 and a coating member containing nickel and having a film thickness of 3 μm.

[0061] Comparing the uncoated metal mask and the fully coated metal mask, the linear expansion coefficient of the fully coated metal mask is greater than the linear expansion coefficient of the uncoated metal mask.

[0062] The metal mask 10 involved in embodiment 1 includes a mask plate 20 and a coating part 30 that coats a portion of the mask plate 20, the mask plate 20 has one or more openings 22 for film formation and a plurality of marks 23 for detecting deformation of the mask plate 20, the portion of the area includes a plurality of areas 25 corresponding to the plurality of marks 23, and the plurality of areas 25 are areas that include marks 23 corresponding to the area 25 among the plurality of marks 23.

[0063] Thus, the coating member 30 coats the plurality of regions 25 including the plurality of marks 23, thereby preventing the plurality of marks 23 from being unreadable. Furthermore, the coating member 30 coats a portion of the mask 20, thereby preventing deformation of the mask 20 caused by deformation of the coating member 30, and preventing deformation of the metal mask 10. In this way, the metal mask 10 can prevent the marks 23 for detecting deformation of the metal mask 10 from being unreadable, and can prevent the metal mask 10 from being deformed.

[0064] In the metal mask 10 according to the first embodiment, each of the plurality of marks 23 has a size that fits within the field of view of the microscope when the marks 23 are observed under the microscope. Each of the plurality of regions 25 has a size that covers the entire field of view of the microscope.

[0065] Thus, the area 25 coated by the coating member 30 is of a size that covers the entire field of view of the microscope when the area 25 is observed by a microscope. Therefore, since the mark 23 can be coated more reliably by the coating member 30, it is possible to further suppress the mark 23 for detecting deformation of the metal mask 10 from being unreadable, and the metal mask 10 can be suppressed from being deformed.

[0066] In the metal mask 10 according to the first embodiment, the plurality of marks 23 are provided on one main surface 21 of the mask plate 20 , and a partial region is a region on the main surface 21 .

[0067] Thus, only the main surface 21 is coated by the coating member 30. Therefore, since the partial area coated by the coating member 30 can be further reduced, it is possible to suppress the mark 23 for detecting deformation of the metal mask 10 from being unreadable and further suppress deformation of the metal mask 10.

[0068] In addition, in the metal mask 10 involved in embodiment 1, a plurality of marks 23 are arranged on a main surface 21 of the mask plate 20, and are arranged in a second direction parallel to the main surface 21 and orthogonal to the first direction, closer to one side than one or more opening portions 22 in the first direction parallel to the main surface 21, and are arranged in the second direction, closer to the other side than one or more opening portions 22 in the first direction, and are arranged in the first direction, closer to one side than one or more opening portions 22 in the second direction, and are arranged in the first direction, closer to the other side than one or more opening portions 22 in the second direction, and on the main surface 21, there is an area 26 that is not coated by the coating component 30 between every two marks 23 arranged in the first direction among the plurality of marks 23, and there is an area 27 that is not coated by the coating component 30 between every two marks 23 arranged in the second direction among the plurality of marks 23.

[0069] Thus, between every two marks 23 arranged in the first direction among the plurality of marks 23, there is an area 26 that is not coated by the coating member 30, and between every two marks 23 arranged in the second direction among the plurality of marks 23, there is an area 27 that is not coated by the coating member 30. Therefore, since the area partially coated by the coating member 30 can be further reduced, it is possible to suppress the marks 23 for detecting deformation of the metal mask 10 from being unreadable, and the deformation of the metal mask 10 can be further suppressed.

[0070] Furthermore, in the metal mask 10 according to the first embodiment, the coating member 30 includes at least one of nickel, cobalt, and copper.

[0071] This can suppress discoloration of the marks 23 when removing the film forming material attached to the metal mask 10. Therefore, it is possible to further suppress the marks 23 for detecting deformation of the metal mask 10 from being unreadable and suppress deformation of the metal mask 10.

[0072] (Implementation method 2) Fig.10 is a top view showing a metal mask 10a according to Embodiment 2. Fig.10 In FIG. 1 , a plurality of regions 25 are indicated by marking dots.

[0073] like Fig.10As shown, the main difference between the metal mask 10 a and the metal mask 10 is that the metal mask 10 a includes a mask plate 20 a which is different from the mask plate 20 .

[0074] The mask plate 20 a is different from the mask plate 20 in terms of the arrangement of the plurality of marks 23 and the like.

[0075] For example, a straight line passing through a position closer to one side than the opening 22 closest to one side arranged in the first direction and parallel to the second direction is set as a first straight line, a straight line passing through the center between two adjacent openings 22 in the first direction and parallel to the second direction is set as a second straight line, a straight line passing through a position closer to the other side than the opening 22 closest to the other side arranged in the first direction and parallel to the second direction is set as a third straight line, a straight line passing through a position closer to one side than the opening 22 closest to one side arranged in the second direction and parallel to the first direction is set as a fourth straight line, a straight line passing through the center between two adjacent openings 22 in the second direction and parallel to the first direction is set as a fifth straight line, and a straight line passing through a position closer to the other side than the opening 22 closest to the other side arranged in the second direction and parallel to the first direction is set as a sixth straight line.

[0076] In this case, the plurality of marks 23 are arranged at the intersection of the first straight line and the fourth straight line, the intersection of the first straight line and the fifth straight line, and the intersection of the first straight line and the sixth straight line. In addition, the plurality of marks 23 are arranged at the intersection of the second straight line and the fourth straight line, the intersection of the second straight line and the fifth straight line, and the intersection of the second straight line and the sixth straight line. In addition, the plurality of marks 23 are arranged at the intersection of the third straight line and the fourth straight line, the intersection of the third straight line and the fifth straight line, and the intersection of the third straight line and the sixth straight line.

[0077] In this case, the mark 23 is arranged at the center position between every two intersection points adjacent to each other in the first direction.

[0078] In this case, the mark 23 is arranged at the center position between every two intersection points adjacent to each other in the second direction.

[0079] In the present embodiment, the plurality of marks 23 are arranged near corners of the mask plate 20 a , near corners of the plurality of openings 22 , and near centers between corners of the plurality of openings 22 .

[0080] The coating member 30 coats the plurality of regions 25 each including a corresponding mark 23 .

[0081] (Other implementations, etc.) The metal mask involved in the present disclosure is described above based on the embodiments, but the present disclosure is not limited to the above embodiments. Within the scope of the present disclosure, various modifications that can be thought of by a person skilled in the art to the above embodiments are also included in the present disclosure, and various devices with built-in display panels involved in the present disclosure are also included in the present disclosure. Industrial Applicability

[0082] The metal mask according to the present disclosure can be used as a metal mask for forming a film on a film formation object, etc. Description of Reference Numerals

[0083] 10.10a Metal mask 20, 20a mask 21, 24 Main side 22 Opening 23 Mark Areas 25, 26, and 27 30 Coated parts

Claims

1. A metal mask, characterized in that have: Reticle; and A coating component is used to coat a portion of the mask. The mask has one or more openings for film formation and a plurality of marks for detecting deformation of the mask. The part of the area includes a plurality of areas corresponding to the plurality of marks, The plurality of regions are regions including a mark corresponding to the region among the plurality of marks.

2. The metal mask according to claim 1, characterized in that: The multiple marks are each of sizes that can be contained within the field of view of the microscope when the mark is observed under the microscope. The plurality of regions are each sized to cover the entire field of view of the microscope.

3. The metal mask according to claim 1 or 2, characterized in that: The plurality of marks are arranged on a main surface of the mask, The partial region is a region on the main surface.

4. The metal mask according to claim 1 or 2, characterized in that: The multiple marks are provided on a main surface of the mask, and are arranged in a second direction parallel to the main surface and orthogonal to the first direction on one side than the one or more openings in a first direction parallel to the main surface, and are arranged in the second direction on the other side than the one or more openings in the first direction, and are arranged in the first direction on one side than the one or more openings in the second direction, and are arranged in the first direction on the other side than the one or more openings in the second direction, On the main surface, the arrangement configuration of the plurality of marks in the first direction has an area not coated by the coating member between every two marks, and the arrangement configuration of the plurality of marks in the second direction has an area not coated by the coating member between every two marks.

5. The metal mask according to claim 1, characterized in that: The coated member includes at least one of nickel, cobalt, and copper.

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