Clamp for ultra-thin crystal ion beam polishing

Abstract

The invention relates to the technical field of tool clamps, and discloses a clamp for ultra-thin crystal ion beam polishing, the clamp comprises a base and two supporting blocks, the two supporting blocks are arranged on the base at intervals, and a containing space is formed by the interval between the two supporting blocks; a V-shaped groove is formed in the side, facing the containing space, of the supporting block, the V-shaped groove extends in the height direction of the supporting block, and groove openings of the two V-shaped grooves are oppositely arranged and used for clamping and positioning the crystal slice; the diameter X1 of the crystal slice, the thickness Y of the crystal slice, the set light transmission area CA of the crystal slice and the set transverse gap d between the crystal slice and the V-shaped groove are known; the minimum transverse width of the containing space is X2, the height H of the supporting block, the opening width Z of the V-shaped groove and the opening angle theta of the V-shaped groove meet the condition that (2Z-Y) * cot theta is larger than or equal to 0 and smaller than or equal to (1-CA) * X1; x < 1 >-X < 2 > = (2Z-Y). Cot [theta]-2d; # imgabs0 #

Description

Technical Field

[0001] The invention relates to the technical field of tooling fixtures, and in particular to a fixture used for ion beam polishing of ultra-thin crystals. Background Art

[0002] At present, yttrium aluminum garnet crystal (abbreviated as: YAG crystal) has good mechanical and optical properties and is an important window material used in laser, infrared and ultraviolet optics.

[0003] YAG crystals are usually designed into thin-sheet structures with a large diameter-to-thickness ratio, for example: diameter > 10 mm, thickness between 100 μm and 200 μm, which ensures that there is only one-dimensional thermal gradient along the direction of beam propagation in the medium, thereby improving cooling efficiency and reducing effects such as thermal lensing and thermal distortion.

[0004] Although the existing mechanical polishing process can meet the requirements of the surface shape of the disk, that is, PV≤0.125λ, the crystal thin film will be deformed after being removed from the disk, and it is ultimately difficult to achieve the required thin film surface requirements. The surface shape needs to be refined through ion beam polishing technology.

[0005] Therefore, there is an urgent need for special tooling and fixtures to fix the crystal slices, prevent the crystal slices from being deformed due to extrusion in the fixture, and avoid the problem of the slices being blown away by the airflow when the vacuum is broken; at the same time, ensure that the tooling and fixture are adapted to the product size so that the light-transmitting area of ​​the polished slice meets the requirements. Summary of the invention

[0006] The technical problem to be solved by the present invention is: there is an urgent need for a special tooling fixture to fix the crystal slice, prevent the crystal slice from being deformed due to extrusion in the fixture, and avoid the problem of the slice being blown away by the airflow when the vacuum is broken; at the same time, ensure that the tooling fixture is adapted to the product size so that the light-transmitting area of ​​the polished slice meets the requirements.

[0007] In order to solve the above technical problems, the present invention provides a technical solution of a fixture for ultra-thin crystal ion beam polishing:

[0008] The fixture for ultra-thin crystal ion beam polishing comprises a base and two support blocks, wherein the two support blocks are arranged on the base at intervals, and the interval between the two support blocks forms an accommodating space for cooperating with the crystal slice;

[0009] A V-shaped groove is formed on one side of the support block facing the accommodating space, the V-shaped groove extends along the height direction of the support block, and two notches of the V-shaped groove are arranged opposite to each other in the length direction of the base and are used for clamping and positioning the crystal slice;

[0010] It is known that: the diameter of the crystal sheet is X1, the thickness of the crystal sheet is Y, the set light-transmitting area of ​​the crystal sheet is CA, and CA is between 0.8 and 0.9, and the set lateral gap between the crystal sheet and the V-shaped groove is d;

[0011] The minimum lateral width of the accommodating space in the length direction of the base is X2, the height of the support block is H, half of the opening width of the V-shaped groove is Z, and half of the opening angle of the V-shaped groove is θ;

[0012] The X2, H, Z, and θ satisfy the following formula:

[0013] 0≤(2Z-Y)·cotθ≤(1-CA)·X1;

[0014] X1-X2=(2Z-Y)·cotθ-2d;

[0015]

[0016] Furthermore, the support block includes two symmetrical optical resin blocks, the two optical resin blocks are spliced ​​and combined along the width direction of the base, the inner edges of the optical resin blocks along the height direction are provided with chamfered edges, and the chamfered edges of the two optical resin blocks are combined to form the V-shaped groove.

[0017] Furthermore, the width of the orthographic projection of the chamfered edge along the length direction of the base is equal to half of the opening width of the V-shaped groove, and the angle between the chamfered edge and the length direction of the base is equal to half of the opening angle of the V-shaped groove.

[0018] Furthermore, the parameters of the chamfered edge satisfy: 0.3mm≤Z≤0.5mm, 45°≤θ≤60°.

[0019] Furthermore, the thickness of the optical resin block is between 3 mm and 12 mm, and the height of the chamfered edge is between 8 mm and 30 mm.

[0020] Furthermore, the dimensional tolerance of the optical resin block is ±0.01 mm.

[0021] Furthermore, a set transverse gap d between the crystal sheet and the V-shaped groove satisfies: 0<d≤0.2mm.

[0022] Furthermore, the parameters of the crystal sheet satisfy: X1=20 mm, Y=0.1 mm, and the minimum lateral width of the accommodating space in the length direction of the base satisfies: X2=19.7 mm.

[0023] Furthermore, the optical resin block is a block made of ZF5 glass, ZF6 glass or K9 glass, and has a bottom surface and an inner side wall. The bottom surface is arranged in contact with the upper surface of the base, and the inner side wall is perpendicular to the bottom surface and arranged toward the accommodating space.

[0024] Furthermore, the base is made of ZF5 glass, ZF6 glass or K9 glass into a rectangular plate, and the optical adhesive block is bonded and fixedly connected to the upper surface of the base.

[0025] Compared with the prior art, the fixture for ion beam polishing of ultra-thin crystals of the present invention has the following beneficial effects: the fixture for ion beam polishing of ultra-thin crystals adopts a structural design of a base and two support blocks, the two support blocks are arranged on the base at intervals, the interval between the two support blocks forms an accommodating space, a V-shaped groove is provided on one side of the support block facing the accommodating space, and the notches of the two V-shaped grooves are arranged relatively in the length direction of the base. When in use, the crystal slice can be placed in the accommodating space, the base plays a role of vertically supporting the crystal slice, and the V-shaped grooves on both sides are used to clamp and position the crystal slice.

[0026] Moreover, the V-shaped groove extends along the height direction of the support block, so that the crystal slice can be smoothly positioned and inserted into the V-shaped groove from top to bottom, ensuring that the positioning portion of the V-shaped groove for the crystal slice is not lower than the geometric center of the crystal slice, thereby ensuring the position stability of the crystal slice and avoiding the problem of the crystal slice being blown away by the airflow when the vacuum is broken. In addition, the set lateral gap between the crystal slice and the V-shaped groove is d, that is, the gap between the V-shaped groove and the edge of the crystal slice is matched, avoiding the radial extrusion of the crystal slice by the V-shaped groove, thereby reducing the deformation effect of the crystal surface after the ion beam polishing is removed from the shelf.

[0027] Given: the diameter of the crystal sheet is X1, the thickness is Y, the set light-transmitting area CA, and CA is between 0.8 and 0.9, and the set lateral gap between the crystal sheet and the V-groove is d, according to the following formula:

[0028] 1. 0≤(2Z-Y)·cotθ≤(1-CA)·X1

[0029] 2. X1-X2=(2Z-Y)·cotθ-2d

[0030] three,

[0031] The functional relationship among the four parameters of the minimum lateral width X2 of the accommodating space in the length direction of the base, half of the opening width Z of the V-groove, half of the opening angle θ of the V-groove, and the height H of the support block can be obtained. By ensuring that the width of the accommodating space, the opening width and angle of the V-groove, and the height of the support block all conform to the above functional relationship, deformation of the crystal slice in the fixture due to extrusion can be prevented, while ensuring that the tooling fixture is adapted to the product size, so that the light-transmitting area of ​​the polished slice meets the requirements.

[0032] The derivation process of formula 1 is:

[0033] The orthographic projection length of the V-shaped groove in the width direction of the base is A.

[0034] When the crystal sheet abuts against the V-shaped groove, the orthographic projection of the remaining space in the groove in the width direction of the base is B.

[0035] Then the relationship between the maximum light blocking part of the crystal slice by the support block and the set light-transmitting area CA is:

[0036] Simplified,

[0037] 0≤(2Z-Y)·cotθ≤(1-CA)·X1.

[0038] The derivation process of formula 2 is:

[0039] In practical applications, the crystal sheet and the V-groove have a clearance fit, and the set lateral clearance between the crystal sheet and the V-groove is d. Based on Formula 1, the corresponding relationship between the minimum lateral width X2 of the accommodation space in the length direction of the base, the diameter X1 of the crystal sheet, and the maximum light shielding portion of the crystal sheet by the support block can be obtained:

[0040]

[0041] Simplified,

[0042] X1-X2=(2Z-Y)·cotθ-2d.

[0043] The derivation process of formula 3 is:

[0044] The height H of the support block should be greater than the effective positioning height of the V-groove for the crystal slice. According to the Pythagorean theorem, we can get:

[0045] BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1It is a three-dimensional schematic diagram of the positioning and cooperation of the fixture used for ion beam polishing of ultra-thin crystals and the crystal slice in an embodiment of the present invention;

[0047] Figure 2 It is a schematic front view of the fixture used for ultra-thin crystal ion beam polishing and the crystal slice when they are positioned and matched in an embodiment of the present invention;

[0048] Figure 3 is a top view schematic diagram of the positioning and cooperation of the fixture used for ion beam polishing of ultra-thin crystals and the crystal slice in an embodiment of the present invention;

[0049] Figure 4 yes Figure 3 A partial enlarged schematic diagram of the middle fixture and the crystal slice;

[0050] Figure 5 It is a three-dimensional schematic diagram of the positioning and coordination of the fixture and the crystal slice in the comparative example;

[0051] Figure 1-4 Middle: 1-base, 2-support block, 20-accommodation space, 21-V-groove, 22-plastic block, 23-chamfered edge, 3-crystal sheet;

[0052] Figure 5 Middle: 2a-support block, 21a-V-groove, 3-crystal sheet. DETAILED DESCRIPTION

[0053] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0054] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like used in the present invention to indicate the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0055] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0056] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0057] like Figures 1 to 4 As shown, a fixture for ultra-thin crystal ion beam polishing according to an embodiment of the present invention comprises a base 1 and two support blocks 2, wherein the two support blocks 2 are arranged on the base 1 at intervals, and the interval between the two support blocks 2 forms a receiving space 20 for cooperating with a crystal slice 3; a V-shaped groove 21 is provided on one side of the support block 2 facing the receiving space 20, and the V-shaped groove 21 extends along the height direction of the support block 2, and the notches of the two V-shaped grooves 21 are arranged relatively to each other in the length direction of the base 1, and are used for clamping and positioning the crystal slice 3.

[0058] It is known that: the diameter of the crystal sheet 3 is X1, the thickness of the crystal sheet 3 is Y, the set light-transmitting area of ​​the crystal sheet 3 is CA, and CA is between 0.8 and 0.9, and the set lateral gap between the crystal sheet 3 and the V-shaped groove 21 is d; the minimum lateral width of the accommodating space 20 in the length direction of the base 1 is X2, the height of the support block 2 is H, half of the opening width of the V-shaped groove 21 is Z, and half of the opening angle of the V-shaped groove 21 is θ; X2, H, Z, θ satisfy the following formula:

[0059] 0≤(2Z-Y)·cotθ≤(1-CA)·X1;

[0060] X1-X2=(2Z-Y)·cotθ-2d;

[0061]

[0062] The fixture for ultra-thin crystal ion beam polishing adopts a structural design of a base 1 and two support blocks 2. The two support blocks 2 are arranged at intervals on the base 1. The interval between the two support blocks 2 forms an accommodating space 20. The support block 2 is provided with a V-shaped groove 21 on one side facing the accommodating space 20. The notches of the two V-shaped grooves 21 are arranged oppositely in the length direction of the base 1. When in use, the crystal slice 3 can be placed in the accommodating space 20, and the base 1 plays a role in vertically supporting the crystal slice 3, and the V-shaped grooves 21 on both sides are used to clamp and position the crystal slice 3.

[0063] Moreover, the V-groove 21 extends along the height direction of the support block 2, so that the crystal slice 3 can be smoothly positioned and inserted into the V-groove 21 from top to bottom, ensuring that the positioning portion of the V-groove 21 for the crystal slice 3 is not lower than the geometric center of the crystal slice 3, thereby ensuring the position stability of the crystal slice 3 and avoiding the problem of the crystal slice 3 being blown away by the airflow when the vacuum is broken. In addition, the set lateral gap between the crystal slice 3 and the V-groove 21 is d, that is, the V-groove 21 and the edge gap of the crystal slice 3 are matched, avoiding the V-groove 21 from possibly causing radial extrusion of the crystal slice 3, thereby reducing the deformation effect of the crystal surface after the ion beam polishing is removed from the shelf.

[0064] It is known that the diameter of the crystal sheet 3 is X1, the thickness is Y, the light-transmitting area CA is set, and CA is between 0.8 and 0.9, and the set lateral gap between the crystal sheet 3 and the V-shaped groove 21 is d, according to the following formula:

[0065] 1. 0≤(2Z-Y)·cotθ≤(1-CA)·X1

[0066] 2. X1-X2=(2Z-Y)·cotθ-2d

[0067] three,

[0068] The functional relationship among the four parameters of the minimum lateral width X2 of the accommodating space 20 in the length direction of the base 1, half the opening width Z of the V-shaped groove 21, half the opening angle θ of the V-shaped groove 21, and the height H of the support block 2 can be obtained. By ensuring that the width of the accommodating space 20, the opening width and angle of the V-shaped groove 21, and the height of the support block 2 all conform to the above functional relationship, the crystal slice 3 can be prevented from being deformed due to extrusion in the fixture, while ensuring that the tooling fixture is adapted to the product size so that the light-transmitting area of ​​the polished slice meets the requirements.

[0069] The derivation process of formula 1 is:

[0070] like Figure 4 As shown, the orthographic projection length of the V-shaped groove 21 in the width direction of the base 1 is A.

[0071] When the crystal sheet 3 abuts against the V-shaped groove 21, the orthographic projection of the remaining space in the groove in the width direction of the base 1 is B.

[0072] Then the relationship between the maximum light shielding portion of the crystal sheet 3 by the support block 2 and the set light-transmitting area CA is:

[0073] Simplified,

[0074] 0≤(2Z-Y)·cotθ≤(1-CA)·X1.

[0075] The derivation process of formula 2 is:

[0076] In practical applications, the crystal sheet 3 and the V-shaped groove 21 are clearance-matched, and the set lateral clearance between the crystal sheet 3 and the V-shaped groove 21 is d, such as Figure 4 As shown, based on Formula 1, the corresponding relationship between the minimum lateral width X2 of the accommodating space 20 in the length direction of the base 1, the diameter X1 of the crystal slice 3 and the maximum light shielding portion of the crystal slice 3 by the support block 2 can be obtained:

[0077]

[0078] Simplified,

[0079] X1-X2=(2Z-Y)·cotθ-2d.

[0080] The derivation process of formula 3 is:

[0081] like Figure 2 In the embodiment, the height H of the support block 2 should be greater than the effective positioning height of the V-shaped groove 21 for the crystal slice 3. According to the Pythagorean theorem, it can be obtained that:

[0082]

[0083] In this embodiment, the support block 2 includes two symmetrically structured smooth plastic blocks 22, the two smooth plastic blocks 22 are spliced ​​and combined along the width direction of the base 1, and the inner edges of the smooth plastic blocks 22 along the height direction are provided with chamfered edges 23, and the chamfered edges 23 of the two smooth plastic blocks 22 are combined to form a V-shaped groove 21. Specifically, the width of the orthographic projection of the chamfered edge 23 along the length direction of the base 1 is equal to one-half of the opening width of the V-shaped groove 21, and the angle between the chamfered edge 23 and the length direction of the base 1 is equal to one-half of the opening angle of the V-shaped groove 21.

[0084] It should be noted that the parameters of the chamfered edge 23 satisfy: 0.3mm≤Z≤0.5mm, 45°≤θ≤60°. The thickness of the optical resin block 22 is between 3mm and 12mm, the height of the chamfered edge 23 is between 8mm and 30mm, and the dimensional tolerance of the optical resin block 22 is ±0.01mm. Accordingly, the set lateral gap d between the crystal sheet 3 and the V-shaped groove 21 satisfies: 0<d≤0.2mm.

[0085] As a further preferred solution, the parameters of the crystal sheet 3 satisfy: X1=20mm, Y=0.1mm, the set lateral gap d between the crystal sheet 3 and the V-groove 21 is 0.1mm, the set light-transmitting area CA=80%, the minimum lateral width of the accommodating space 20 in the length direction of the base 1 satisfies: X2=19.7mm, the parameters of the chamfered edge 23 are selected as Z=0.3mm, θ=45°, and the height of the chamfered edge 23, that is, the height of the support block 2, is H=12mm.

[0086] The surface shape of the YAG disc after ion beam polishing of the crystal slice 3 using the fixture is shown in the following table:

[0087]

[0088] It can be seen that after the crystal slice 3 is ion-beam polished and removed from the shelf, the deformation of the crystal slice 3 is small, and the final product meets the technical requirement of PV≤0.125λ.

[0089] In this embodiment, the optical plastic block 22 is a block made of ZF5 glass, ZF6 glass or K9 glass, and has a bottom surface and an inner side wall, wherein the bottom surface is arranged in contact with the upper surface of the base 1, and the inner side wall is perpendicular to the bottom surface and arranged toward the accommodating space 20. Accordingly, the base 1 is made of ZF5 glass, ZF6 glass or K9 glass into a rectangular plate, and the optical plastic block 22 is bonded and fixedly connected to the upper surface of the base 1.

[0090] As a comparative example: Figure 5 As shown, the two support blocks 2a are both right-angled trapezoidal blocks, and the V-shaped groove 21a is an oblique groove arranged on the oblique waist edge of the support block 2a. At this time, the positioning part of the V-shaped groove 21a for the crystal slice 3 is lower than the geometric center of the crystal slice 3. The crystal slice 3 may be blown away by the airflow when the vacuum is broken, and the positioning reliability of the tooling fixture for the crystal slice 3 is poor.

[0091] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A fixture for ion beam polishing of ultra-thin crystals, characterized in that: It comprises a base and two support blocks, wherein the two support blocks are arranged on the base at intervals, and the interval between the two support blocks forms an accommodating space for cooperating with a crystal sheet; A V-shaped groove is formed on one side of the support block facing the accommodating space, the V-shaped groove extends along the height direction of the support block, and two notches of the V-shaped groove are arranged opposite to each other in the length direction of the base and are used for clamping and positioning the crystal slice; It is known that: the diameter of the crystal sheet is X1, the thickness of the crystal sheet is Y, the set light-transmitting area of ​​the crystal sheet is CA, and CA is between 0.8 and 0.9, and the set lateral gap between the crystal sheet and the V-shaped groove is d; The minimum lateral width of the accommodating space in the length direction of the base is X2, the height of the support block is H, half of the opening width of the V-shaped groove is Z, and half of the opening angle of the V-shaped groove is θ; The X2, H, Z, and θ satisfy the following formula: 0≤(2Z-Y)·cotθ≤(1-CA)·X1; X1-X2=(2Z-Y)·cotθ-2d; 2. The fixture for ultra-thin crystal ion beam polishing according to claim 1, characterized in that: The support block includes two symmetrical optical resin blocks, which are spliced ​​and combined along the width direction of the base. The inner sides of the optical resin blocks are provided with chamfered edges along the height direction, and the chamfered edges of the two optical resin blocks are combined to form the V-shaped groove.

3. The fixture for ultra-thin crystal ion beam polishing according to claim 2, characterized in that: The width of the orthographic projection of the chamfered edge along the length direction of the base is equal to half of the opening width of the V-shaped groove, and the angle between the chamfered edge and the length direction of the base is equal to half of the opening angle of the V-shaped groove.

4. The fixture for ultra-thin crystal ion beam polishing according to claim 3, characterized in that: The parameters of the chamfered edge satisfy: 0.3mm≤Z≤0.5mm, 45°≤θ≤60°.

5. The fixture for ultra-thin crystal ion beam polishing according to claim 3, characterized in that: The thickness of the optical resin block is between 3 mm and 12 mm, and the height of the chamfered edge is between 8 mm and 30 mm.

6. The fixture for ultra-thin crystal ion beam polishing according to claim 3, characterized in that: The dimensional tolerance of the optical resin block is ±0.01 mm.

7. The fixture for ultra-thin crystal ion beam polishing according to claim 1, characterized in that: The set transverse gap d between the crystal sheet and the V-shaped groove satisfies: 0<d≤0.2mm.

8. The fixture for ultra-thin crystal ion beam polishing according to claim 1, characterized in that: The parameters of the crystal sheet satisfy: X1=20 mm, Y=0.1 mm, and the minimum lateral width of the accommodating space in the length direction of the base satisfies: X2=19.7 mm.

9. The fixture for ultra-thin crystal ion beam polishing according to claim 3, characterized in that: The optical resin block is a block made of ZF5 glass, ZF6 glass or K9 glass, and has a bottom surface and an inner side wall. The bottom surface is arranged in contact with the upper surface of the base, and the inner side wall is perpendicular to the bottom surface and arranged toward the accommodating space.

10. The fixture for ultra-thin crystal ion beam polishing according to claim 3, characterized in that: The base is made of ZF5 glass, ZF6 glass or K9 glass into a rectangular plate, and the optical adhesive block is bonded and fixedly connected to the upper surface of the base.

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